ATE393672T1 - Elektroakustischer wandler für hochfrequenzanwendungen - Google Patents
Elektroakustischer wandler für hochfrequenzanwendungenInfo
- Publication number
- ATE393672T1 ATE393672T1 AT05425642T AT05425642T ATE393672T1 AT E393672 T1 ATE393672 T1 AT E393672T1 AT 05425642 T AT05425642 T AT 05425642T AT 05425642 T AT05425642 T AT 05425642T AT E393672 T1 ATE393672 T1 AT E393672T1
- Authority
- AT
- Austria
- Prior art keywords
- cells
- micro
- high frequency
- electroacoustic transducer
- frequency applications
- Prior art date
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
- B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
- B06B1/0292—Electrostatic transducers, e.g. electret-type
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Transducers For Ultrasonic Waves (AREA)
- Piezo-Electric Transducers For Audible Bands (AREA)
- Diaphragms For Electromechanical Transducers (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP05425642A EP1764162B1 (de) | 2005-09-14 | 2005-09-14 | Elektroakustischer Wandler für Hochfrequenzanwendungen |
Publications (1)
Publication Number | Publication Date |
---|---|
ATE393672T1 true ATE393672T1 (de) | 2008-05-15 |
Family
ID=35645783
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT05425642T ATE393672T1 (de) | 2005-09-14 | 2005-09-14 | Elektroakustischer wandler für hochfrequenzanwendungen |
Country Status (4)
Country | Link |
---|---|
US (1) | US7477572B2 (de) |
EP (1) | EP1764162B1 (de) |
AT (1) | ATE393672T1 (de) |
DE (1) | DE602005006419T2 (de) |
Families Citing this family (44)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7489593B2 (en) | 2004-11-30 | 2009-02-10 | Vermon | Electrostatic membranes for sensors, ultrasonic transducers incorporating such membranes, and manufacturing methods therefor |
US7589456B2 (en) * | 2005-06-14 | 2009-09-15 | Siemens Medical Solutions Usa, Inc. | Digital capacitive membrane transducer |
ATE393672T1 (de) * | 2005-09-14 | 2008-05-15 | Esaote Spa | Elektroakustischer wandler für hochfrequenzanwendungen |
US7305883B2 (en) * | 2005-10-05 | 2007-12-11 | The Board Of Trustees Of The Leland Stanford Junior University | Chemical micromachined microsensors |
US8456958B2 (en) | 2006-02-21 | 2013-06-04 | Vermon S.A. | Capacitive micro-machined ultrasonic transducer for element transducer apertures |
ITRM20060238A1 (it) * | 2006-05-03 | 2007-11-04 | Esaote Spa | Trasduttore ultracustico capacitivo multipiano |
WO2009001157A1 (en) * | 2007-06-26 | 2008-12-31 | Vermon | A capacitive micro-machined ultrasonic transducer for element transducer apertures |
CN101969856B (zh) * | 2007-09-17 | 2013-06-05 | 皇家飞利浦电子股份有限公司 | 预塌陷的电容微机械超声传感器的制造及其应用 |
US8850893B2 (en) * | 2007-12-05 | 2014-10-07 | Valtion Teknillinen Tutkimuskeskus | Device for measuring pressure, variation in acoustic pressure, a magnetic field, acceleration, vibration, or the composition of a gas |
GB2469410B (en) * | 2008-05-07 | 2011-01-19 | Wolfson Microelectronics Plc | Mems transducers |
FR2938918B1 (fr) * | 2008-11-21 | 2011-02-11 | Commissariat Energie Atomique | Procede et dispositif d'analyse acoustique de microporosites dans un materiau tel que le beton a l'aide d'une pluralite de transducteurs cmuts incorpores dans le materiau |
DE102009027355A1 (de) * | 2009-06-30 | 2011-01-05 | Endress + Hauser Flowtec Ag | Ultraschallsensor und Ultraschall-Durchflussmessgerät |
US8531919B2 (en) * | 2009-09-21 | 2013-09-10 | The Hong Kong Polytechnic University | Flexible capacitive micromachined ultrasonic transducer array with increased effective capacitance |
US8406084B2 (en) | 2009-11-20 | 2013-03-26 | Avago Technologies Wireless Ip (Singapore) Pte. Ltd. | Transducer device having coupled resonant elements |
US9032797B2 (en) * | 2011-02-11 | 2015-05-19 | Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung E.V. | Sensor device and method |
CN102178545B (zh) * | 2011-02-14 | 2012-06-06 | 中国科学院深圳先进技术研究院 | 电容式超声传感器及其制备方法 |
CN102353610A (zh) * | 2011-06-10 | 2012-02-15 | 西安交通大学 | 一种用于密度测量的电容微加工超声传感器及其制备方法 |
JP5893352B2 (ja) | 2011-11-14 | 2016-03-23 | キヤノン株式会社 | 電気機械変換装置 |
CN102520147B (zh) * | 2011-12-05 | 2014-04-23 | 西安交通大学 | 一种用于痕量生化物质检测的cmut及其制备方法 |
US9454954B2 (en) | 2012-05-01 | 2016-09-27 | Fujifilm Dimatix, Inc. | Ultra wide bandwidth transducer with dual electrode |
US8767512B2 (en) | 2012-05-01 | 2014-07-01 | Fujifilm Dimatix, Inc. | Multi-frequency ultra wide bandwidth transducer |
US9061320B2 (en) | 2012-05-01 | 2015-06-23 | Fujifilm Dimatix, Inc. | Ultra wide bandwidth piezoelectric transducer arrays |
CN104349722B (zh) | 2012-06-11 | 2016-08-31 | 奥林巴斯株式会社 | 超声波部件以及超声波内窥镜 |
JP6057571B2 (ja) | 2012-07-06 | 2017-01-11 | キヤノン株式会社 | 静電容量型トランスデューサ |
JP6071285B2 (ja) * | 2012-07-06 | 2017-02-01 | キヤノン株式会社 | 静電容量型トランスデューサ |
JP5986441B2 (ja) | 2012-07-06 | 2016-09-06 | キヤノン株式会社 | 静電容量型トランスデューサ |
US9660170B2 (en) * | 2012-10-26 | 2017-05-23 | Fujifilm Dimatix, Inc. | Micromachined ultrasonic transducer arrays with multiple harmonic modes |
EP2796210B1 (de) | 2013-04-25 | 2016-11-30 | Canon Kabushiki Kaisha | Kapazitiver Wandler und Verfahren zu seiner Herstellung |
EP2796209B1 (de) * | 2013-04-25 | 2020-06-17 | Canon Kabushiki Kaisha | Kapazitiver Wandler und Verfahren zu seiner Herstellung |
JP6238556B2 (ja) | 2013-04-25 | 2017-11-29 | キヤノン株式会社 | 被検体情報取得装置およびその制御方法、ならびに探触子 |
JP6234073B2 (ja) * | 2013-06-07 | 2017-11-22 | キヤノン株式会社 | 静電容量型トランスデューサの駆動装置、及び被検体情報取得装置 |
KR102250185B1 (ko) * | 2014-01-29 | 2021-05-10 | 삼성전자주식회사 | 전기 음향 변환기 |
JP6424507B2 (ja) * | 2014-07-28 | 2018-11-21 | コニカミノルタ株式会社 | 超音波トランスデューサ及び超音波診断装置 |
JP6552177B2 (ja) * | 2014-10-10 | 2019-07-31 | キヤノン株式会社 | 静電容量型トランスデューサ及びその駆動方法 |
CN105036058B (zh) * | 2015-05-27 | 2016-10-05 | 华南理工大学 | 集成化电容式微加工超声换能器及其制备方法 |
JP6429759B2 (ja) * | 2015-10-24 | 2018-11-28 | キヤノン株式会社 | 静電容量型トランスデューサ及びそれを備える情報取得装置 |
US10413938B2 (en) * | 2015-11-18 | 2019-09-17 | Kolo Medical, Ltd. | Capacitive micromachined ultrasound transducers having varying properties |
CN106862045A (zh) * | 2017-01-06 | 2017-06-20 | 中北大学 | 收发性能平衡的微机电超声换能器面阵探头及其制备方法 |
CN106925496A (zh) * | 2017-01-06 | 2017-07-07 | 中北大学 | 微机电超声探头及电路 |
CN106744642A (zh) * | 2017-01-06 | 2017-05-31 | 中北大学 | 收发平衡的宽频带混合式超声换能器面阵探头及制备方法 |
KR102052257B1 (ko) * | 2018-01-04 | 2019-12-04 | 재단법인 다차원 스마트 아이티 융합시스템 연구단 | 송수신 가능한 초음파 시스템 및 그 방법 |
JP2019212992A (ja) * | 2018-05-31 | 2019-12-12 | キヤノン株式会社 | 静電容量型トランスデューサ、及びその製造方法 |
JP2022507193A (ja) * | 2018-11-15 | 2022-01-18 | バタフライ ネットワーク,インコーポレイテッド | 微細加工超音波トランスデューサ装置のためのアンチスティクションキャビティ底面 |
TW202102312A (zh) | 2019-02-25 | 2021-01-16 | 美商蝴蝶網路公司 | 用於微加工超音波換能器裝置的適應性空腔厚度控制 |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5619476A (en) * | 1994-10-21 | 1997-04-08 | The Board Of Trustees Of The Leland Stanford Jr. Univ. | Electrostatic ultrasonic transducer |
US6381197B1 (en) * | 1999-05-11 | 2002-04-30 | Bernard J Savord | Aperture control and apodization in a micro-machined ultrasonic transducer |
US6829131B1 (en) * | 1999-09-13 | 2004-12-07 | Carnegie Mellon University | MEMS digital-to-acoustic transducer with error cancellation |
US6262946B1 (en) * | 1999-09-29 | 2001-07-17 | The Board Of Trustees Of The Leland Stanford Junior University | Capacitive micromachined ultrasonic transducer arrays with reduced cross-coupling |
DE10122765A1 (de) * | 2001-05-10 | 2002-12-05 | Campus Micro Technologies Gmbh | Elektroakustischer Wandler zur Erzeugung oder Erfassung von Ultraschall, Wandler-Array und Verfahren zur Herstellung der Wandler bzw. der Wandler-Arrays |
AU2003290513A1 (en) * | 2002-08-07 | 2004-04-08 | Georgia Tech Research Corporation | Capacitive resonators and methods of fabrication |
ITRM20030318A1 (it) * | 2003-06-25 | 2004-12-26 | Esaote Spa | Trasduttore ultracustico capacitivo microlavorato e |
US7274623B2 (en) * | 2004-04-06 | 2007-09-25 | Board Of Trustees Of The Deland Stanford Junior University | Method and system for operating capacitive membrane ultrasonic transducers |
ITRM20040300A1 (it) * | 2004-06-18 | 2004-09-18 | Esaote Spa | Trasduttore a geometria interdigitata per l'ottimizzazione del fascio acustico irradiato. |
US7489593B2 (en) * | 2004-11-30 | 2009-02-10 | Vermon | Electrostatic membranes for sensors, ultrasonic transducers incorporating such membranes, and manufacturing methods therefor |
ITRM20050093A1 (it) * | 2005-03-04 | 2006-09-05 | Consiglio Nazionale Ricerche | Procedimento micromeccanico superficiale di fabbricazione di trasduttori ultracustici capacitivi microlavorati e relativo trasduttore ultracustico capacitivo microlavorato. |
ATE393672T1 (de) * | 2005-09-14 | 2008-05-15 | Esaote Spa | Elektroakustischer wandler für hochfrequenzanwendungen |
-
2005
- 2005-09-14 AT AT05425642T patent/ATE393672T1/de not_active IP Right Cessation
- 2005-09-14 EP EP05425642A patent/EP1764162B1/de active Active
- 2005-09-14 DE DE602005006419T patent/DE602005006419T2/de active Active
-
2006
- 2006-09-13 US US11/520,145 patent/US7477572B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
EP1764162A1 (de) | 2007-03-21 |
US7477572B2 (en) | 2009-01-13 |
EP1764162B1 (de) | 2008-04-30 |
DE602005006419D1 (de) | 2008-06-12 |
DE602005006419T2 (de) | 2008-09-25 |
US20070059858A1 (en) | 2007-03-15 |
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Legal Events
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RER | Ceased as to paragraph 5 lit. 3 law introducing patent treaties |