ATE365815T1 - Beschichtungsvorrichtung - Google Patents

Beschichtungsvorrichtung

Info

Publication number
ATE365815T1
ATE365815T1 AT03026337T AT03026337T ATE365815T1 AT E365815 T1 ATE365815 T1 AT E365815T1 AT 03026337 T AT03026337 T AT 03026337T AT 03026337 T AT03026337 T AT 03026337T AT E365815 T1 ATE365815 T1 AT E365815T1
Authority
AT
Austria
Prior art keywords
substrate
iii
surface layer
hard material
carbon
Prior art date
Application number
AT03026337T
Other languages
German (de)
English (en)
Inventor
Antonius Leyendecker
Oliver Lemmer
Martin Frank
Original Assignee
Cemecon Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Cemecon Ag filed Critical Cemecon Ag
Application granted granted Critical
Publication of ATE365815T1 publication Critical patent/ATE365815T1/de

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/02Pretreatment of the material to be coated
    • C23C16/0209Pretreatment of the material to be coated by heating
    • C23C16/0218Pretreatment of the material to be coated by heating in a reactive atmosphere
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/46Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for heating the substrate
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/24Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24355Continuous and nonuniform or irregular surface on layer or component [e.g., roofing, etc.]
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/24Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24942Structurally defined web or sheet [e.g., overall dimension, etc.] including components having same physical characteristic in differing degree
    • Y10T428/2495Thickness [relative or absolute]
    • Y10T428/24967Absolute thicknesses specified
    • Y10T428/24975No layer or component greater than 5 mils thick
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/25Web or sheet containing structurally defined element or component and including a second component containing structurally defined particles
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/25Web or sheet containing structurally defined element or component and including a second component containing structurally defined particles
    • Y10T428/252Glass or ceramic [i.e., fired or glazed clay, cement, etc.] [porcelain, quartz, etc.]
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/30Self-sustaining carbon mass or layer with impregnant or other layer

Landscapes

  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
  • Cutting Tools, Boring Holders, And Turrets (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Powder Metallurgy (AREA)
  • Formation And Processing Of Food Products (AREA)
  • Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
  • Seal Device For Vehicle (AREA)
  • Glass Compositions (AREA)
  • Ceramic Products (AREA)
  • Carbon And Carbon Compounds (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Polishing Bodies And Polishing Tools (AREA)
AT03026337T 1997-02-05 1998-02-05 Beschichtungsvorrichtung ATE365815T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19704262 1997-02-05

Publications (1)

Publication Number Publication Date
ATE365815T1 true ATE365815T1 (de) 2007-07-15

Family

ID=7819337

Family Applications (2)

Application Number Title Priority Date Filing Date
AT03026337T ATE365815T1 (de) 1997-02-05 1998-02-05 Beschichtungsvorrichtung
AT98906917T ATE265556T1 (de) 1997-02-05 1998-02-05 Beschichtung eines karbidverbundkörpers oder eines karbidenthaltenden cermets mit hartem material

Family Applications After (1)

Application Number Title Priority Date Filing Date
AT98906917T ATE265556T1 (de) 1997-02-05 1998-02-05 Beschichtung eines karbidverbundkörpers oder eines karbidenthaltenden cermets mit hartem material

Country Status (9)

Country Link
US (1) US6268045B1 (https=)
EP (2) EP0975820B1 (https=)
JP (1) JP4295830B2 (https=)
AT (2) ATE365815T1 (https=)
AU (1) AU6294998A (https=)
DE (2) DE69823495T2 (https=)
DK (1) DK1408138T3 (https=)
IL (1) IL131225A (https=)
WO (1) WO1998035071A1 (https=)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6436204B1 (en) 1998-11-20 2002-08-20 Kennametal Pc Inc. Diamond coated cutting tools and method of manufacture
US6220375B1 (en) * 1999-01-13 2001-04-24 Baker Hughes Incorporated Polycrystalline diamond cutters having modified residual stresses
SE522730C2 (sv) 2000-11-23 2004-03-02 Sandvik Ab Metod för tillverkning av en belagd hårdmetallkropp avsedd för skärande bearbetning
JP2003251503A (ja) * 2001-12-26 2003-09-09 Sumitomo Electric Ind Ltd 表面被覆切削工具
KR100493025B1 (ko) * 2002-08-07 2005-06-07 삼성전자주식회사 반도체 메모리 장치의 제조 방법
JP4588453B2 (ja) * 2002-09-27 2010-12-01 コムコン・アーゲー 被覆方法
WO2004083484A1 (de) * 2003-03-21 2004-09-30 Cemecon Ag Körper mit glatter diamantschicht, sowie vorrichtung und verfahren
US8069937B2 (en) * 2009-02-26 2011-12-06 Us Synthetic Corporation Polycrystalline diamond compact including a cemented tungsten carbide substrate that is substantially free of tungsten carbide grains exhibiting abnormal grain growth and applications therefor
GB0903322D0 (en) * 2009-02-27 2009-04-22 Element Six Holding Gmbh Hard-metal substrate with graded microstructure
WO2011020859A1 (de) 2009-08-19 2011-02-24 Cemecon Ag Beschichtetes werkzeug
DE102013218446A1 (de) 2013-09-13 2015-03-19 Cemecon Ag Werkzeug sowie Verfahren zum Zerspanen von faserverstärktenMaterialien
DE102014210371A1 (de) 2014-06-02 2015-12-03 Gühring KG Diamantbeschichtetes spanabhebendes Werkzeug und Verfahren zu seiner Herstellung
DE102015208742A1 (de) 2015-05-12 2016-11-17 Gühring KG Spanabhebendes Werkzeug
US11060155B2 (en) * 2016-04-01 2021-07-13 Pramet Tools, S.R.O. Surface hardening of cemented carbide body
DE102017002154A1 (de) 2017-03-06 2018-09-06 Audi Ag Schneidelement für ein Spanbearbeitungswerkzeug sowie Verfahren zur Herstellung eines solchen Schneidelementes
DE102017204109B4 (de) 2017-03-13 2019-03-14 Gühring KG Verwendung einer mit Fremdatomen dotierten Diamantschicht zur Erfassung des Abnutzungsgrades einer undotierten diamantenen Funktionsschicht eines Werkzeugs

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0384011B1 (en) 1989-02-23 1993-10-27 Toshiba Tungaloy Co. Ltd. Diamond-coated sintered body excellent in adhesion and process for preparing the same
US4979465A (en) * 1989-04-03 1990-12-25 Daidousanso Co., Ltd. Apparatus for producing semiconductors
US5236740A (en) 1991-04-26 1993-08-17 National Center For Manufacturing Sciences Methods for coating adherent diamond films on cemented tungsten carbide substrates
ES2107547T3 (es) * 1991-07-22 1997-12-01 Sumitomo Electric Industries Material duro con revestimiento de diamante y procedimiento de fabricacion de este material.
EP0628642B1 (en) * 1992-12-08 2001-03-21 Osaka Diamond Industrial Co. Superhard film-coated material and method of producing the same
AT400041B (de) * 1993-03-26 1995-09-25 Plansee Tizit Gmbh Hartmetall-substrat mit diamantschicht hoher haftfestigkeit
US5585176A (en) 1993-11-30 1996-12-17 Kennametal Inc. Diamond coated tools and wear parts
US5635256A (en) * 1994-08-11 1997-06-03 St. Gobain/Norton Industrial Ceramics Corporation Method of making a diamond-coated composite body
US5674620A (en) 1994-08-11 1997-10-07 Saint-Gobain/Norton Industrial Ceramics Corporation Diamond-coated composite cutting tool and method of making
US5701578A (en) * 1996-11-20 1997-12-23 Kennametal Inc. Method for making a diamond-coated member

Also Published As

Publication number Publication date
DE69838006T2 (de) 2008-03-13
EP0975820A1 (en) 2000-02-02
US6268045B1 (en) 2001-07-31
JP4295830B2 (ja) 2009-07-15
DE69823495D1 (de) 2004-06-03
EP1408138B9 (en) 2008-02-13
WO1998035071A1 (en) 1998-08-13
JP2001511219A (ja) 2001-08-07
IL131225A0 (en) 2001-01-28
AU6294998A (en) 1998-08-26
IL131225A (en) 2003-07-31
ATE265556T1 (de) 2004-05-15
DE69823495T2 (de) 2005-04-07
EP1408138A1 (en) 2004-04-14
DK1408138T3 (da) 2007-10-29
EP1408138B1 (en) 2007-06-27
EP0975820B1 (en) 2004-04-28
DE69838006D1 (de) 2007-08-09

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