ATE355397T1 - Verfahren zur modifizierung einer metalloberfläche - Google Patents

Verfahren zur modifizierung einer metalloberfläche

Info

Publication number
ATE355397T1
ATE355397T1 AT02807333T AT02807333T ATE355397T1 AT E355397 T1 ATE355397 T1 AT E355397T1 AT 02807333 T AT02807333 T AT 02807333T AT 02807333 T AT02807333 T AT 02807333T AT E355397 T1 ATE355397 T1 AT E355397T1
Authority
AT
Austria
Prior art keywords
modifying
metallic surface
metal surface
substrate
depositing
Prior art date
Application number
AT02807333T
Other languages
English (en)
Inventor
S Ren Eriksen
Original Assignee
Danfoss As
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Danfoss As filed Critical Danfoss As
Application granted granted Critical
Publication of ATE355397T1 publication Critical patent/ATE355397T1/de

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/02—Pretreatment of the material to be coated
    • C23C16/0227—Pretreatment of the material to be coated by cleaning or etching
    • C23C16/0236—Pretreatment of the material to be coated by cleaning or etching by etching with a reactive gas
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/06—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of metallic material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/448—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials
    • C23C16/4488—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials by in situ generation of reactive gas by chemical or electrochemical reaction
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
    • C23C16/45523—Pulsed gas flow or change of composition over time

Landscapes

  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Electrochemistry (AREA)
  • Chemical Vapour Deposition (AREA)
  • Chemically Coating (AREA)
  • Physical Vapour Deposition (AREA)
AT02807333T 2002-05-01 2002-05-01 Verfahren zur modifizierung einer metalloberfläche ATE355397T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/DK2002/000280 WO2003093530A1 (en) 2002-05-01 2002-05-01 A method for modifying a metallic surface

Publications (1)

Publication Number Publication Date
ATE355397T1 true ATE355397T1 (de) 2006-03-15

Family

ID=29286034

Family Applications (1)

Application Number Title Priority Date Filing Date
AT02807333T ATE355397T1 (de) 2002-05-01 2002-05-01 Verfahren zur modifizierung einer metalloberfläche

Country Status (6)

Country Link
US (1) US7479301B2 (de)
EP (1) EP1501962B1 (de)
AT (1) ATE355397T1 (de)
AU (1) AU2002367908A1 (de)
DE (1) DE60218541T2 (de)
WO (1) WO2003093530A1 (de)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102004053502B8 (de) * 2004-10-27 2006-11-30 Universität Stuttgart Verfahren zum Korrosionsschutz von Bauteilen aus warmfestem Stahl
DE102006020426A1 (de) * 2006-04-25 2007-10-31 Georg-August-Universität Göttingen Stiftung öffentlichen Rechts (ohne Bereich Humanmedizin) Verfahren zum Nachweis von gasförmigen Verunreinigungen in Werkstoffen
WO2009106079A2 (en) * 2008-02-28 2009-09-03 Danfoss A/S Corrosion resistant object with alloying zone
WO2012174207A2 (en) 2011-06-16 2012-12-20 Zimmer, Inc. Chemical vapor infiltration apparatus and process
CA2839407C (en) 2011-06-16 2017-07-04 Zimmer, Inc. Micro-alloyed porous metal having optimized chemical composition and method of manufacturing the same
WO2013006600A1 (en) 2011-07-05 2013-01-10 Orchard Material Technology, Llc Retrieval of high value refractory metals from alloys and mixtures
EP2866848B1 (de) * 2012-07-02 2018-08-22 Zimmer, Inc. Dünnschicht-tantalbeschichtung für medizinische implantate
US10236517B2 (en) 2017-08-16 2019-03-19 GM Global Technology Operations LLC Method for manufacturing and cleaning a stainless steel fuel cell bipolar plate
RU2696179C1 (ru) * 2018-08-07 2019-07-31 Общество с ограниченной ответственностью "Научно-производственное объединение "Защитные покрытия", ООО "НПО "Защитные покрытия" Способ газофазного осаждения тантала на поверхность стального изделия

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1521789A1 (de) * 1964-07-15 1969-10-16 Ibm Deutschland Verfahren zum chemischen Feinpolieren
USB389017I5 (de) * 1964-08-12
US3480491A (en) * 1965-11-17 1969-11-25 Ibm Vapor polishing technique
US3767456A (en) 1971-09-07 1973-10-23 Fansteel Inc Chemical vapor deposition of steel with tantalum and columbium
FR2595572B1 (fr) * 1986-03-12 1989-06-16 France Implant Procede de fabrication d'implants chirurgicaux au moins partiellement revetus d'une couche en un compose metallique, et implants realises conformement audit procede
US5169685A (en) * 1989-06-12 1992-12-08 General Electric Company Method for forming non-columnar deposits by chemical vapor deposition
JP2673380B2 (ja) 1990-02-20 1997-11-05 三菱電機株式会社 プラズマエッチングの方法
US5356474A (en) * 1992-11-27 1994-10-18 General Electric Company Apparatus and method for making aligned Hi-Tc tape superconductors
JPH10242129A (ja) 1997-02-26 1998-09-11 Ebara Corp ガスエッチング方法、ガス噴出用ノズル及びガスエッチング装置
RU2141005C1 (ru) 1997-03-28 1999-11-10 Баранов Александр Михайлович Способ уменьшения шероховатости поверхности и устройство для его осуществления
US6121152A (en) * 1998-06-11 2000-09-19 Integrated Process Equipment Corporation Method and apparatus for planarization of metallized semiconductor wafers using a bipolar electrode assembly
US6265311B1 (en) 1999-04-27 2001-07-24 Tokyo Electron Limited PECVD of TaN films from tantalum halide precursors
US20030073304A1 (en) * 2001-10-16 2003-04-17 Applied Materials, Inc. Selective tungsten stud as copper diffusion barrier to silicon contact

Also Published As

Publication number Publication date
EP1501962B1 (de) 2007-02-28
AU2002367908A1 (en) 2003-11-17
US20050170088A1 (en) 2005-08-04
DE60218541T2 (de) 2007-11-22
US7479301B2 (en) 2009-01-20
DE60218541D1 (de) 2007-04-12
WO2003093530A1 (en) 2003-11-13
EP1501962A1 (de) 2005-02-02

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