ATE352799T1 - Vorrichtung zur reinigung und inspektion von retikeln - Google Patents
Vorrichtung zur reinigung und inspektion von retikelnInfo
- Publication number
- ATE352799T1 ATE352799T1 AT03771999T AT03771999T ATE352799T1 AT E352799 T1 ATE352799 T1 AT E352799T1 AT 03771999 T AT03771999 T AT 03771999T AT 03771999 T AT03771999 T AT 03771999T AT E352799 T1 ATE352799 T1 AT E352799T1
- Authority
- AT
- Austria
- Prior art keywords
- cleaning
- cleaning chamber
- detection
- detection unit
- reticle
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/68—Preparation processes not covered by groups G03F1/20 - G03F1/50
- G03F1/82—Auxiliary processes, e.g. cleaning or inspecting
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B5/00—Cleaning by methods involving the use of air flow or gas flow
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Cleaning In General (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Cleaning Or Drying Semiconductors (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CH01330/02A CH696188A5 (de) | 2002-07-29 | 2002-07-29 | Detektions- und Reinigungsvorrichtung in einer Handhabungsvorrichtung für Photomasken. |
Publications (1)
Publication Number | Publication Date |
---|---|
ATE352799T1 true ATE352799T1 (de) | 2007-02-15 |
Family
ID=30774632
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT03771999T ATE352799T1 (de) | 2002-07-29 | 2003-07-28 | Vorrichtung zur reinigung und inspektion von retikeln |
Country Status (8)
Country | Link |
---|---|
US (1) | US7478454B2 (de) |
EP (1) | EP1539386B1 (de) |
JP (1) | JP4477495B2 (de) |
AT (1) | ATE352799T1 (de) |
AU (1) | AU2003259273A1 (de) |
CH (1) | CH696188A5 (de) |
DE (1) | DE60311479T2 (de) |
WO (1) | WO2004011161A2 (de) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2422840B (en) * | 2003-10-21 | 2008-08-27 | Champion Technology Inc | Methods for inhibiting hydrate blockage in oil and gas pipelines using simple quaternary ammonium and phosphonium compounds |
CN100437279C (zh) * | 2005-08-15 | 2008-11-26 | 友达光电股份有限公司 | 有源光罩除尘设备 |
DE102008045369B4 (de) | 2008-09-02 | 2013-11-21 | Grenzebach Maschinenbau Gmbh | Vorrichtung und Verfahren zum Aufnehmen von Glasplatten |
US11181448B2 (en) | 2012-11-06 | 2021-11-23 | Biodot, Inc. | Controlled printing of a cell sample for karyotyping |
JP5881590B2 (ja) | 2012-12-12 | 2016-03-09 | 株式会社東芝 | マスククリーナー及びクリーニング方法 |
CN113044563A (zh) * | 2021-03-01 | 2021-06-29 | 大族激光科技产业集团股份有限公司 | 进料机构及清洗装置 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5846338A (en) * | 1996-01-11 | 1998-12-08 | Asyst Technologies, Inc. | Method for dry cleaning clean room containers |
US6115867A (en) * | 1997-08-18 | 2000-09-12 | Tokyo Electron Limited | Apparatus for cleaning both sides of substrate |
US6629638B1 (en) * | 1997-12-11 | 2003-10-07 | Ceyx Technologies | Electro-optic system controller and method of operation |
JP3998790B2 (ja) * | 1998-01-16 | 2007-10-31 | 大日本印刷株式会社 | マスク準備装置 |
JP3772056B2 (ja) * | 1998-10-12 | 2006-05-10 | 株式会社東芝 | 半導体基板の洗浄方法 |
WO2002001292A1 (de) * | 2000-06-27 | 2002-01-03 | Brooks-Pri Automation (Switzerland) Gmbh | Vorrichtung und verfahren zur reinigung von in der produktion von halbleiterelementen benutzten objekten |
JP3925088B2 (ja) | 2001-01-16 | 2007-06-06 | 株式会社日立製作所 | ドライ洗浄方法 |
JP2002217156A (ja) | 2001-01-16 | 2002-08-02 | Hitachi Ltd | ドライ洗浄装置 |
US6656017B2 (en) * | 2001-04-24 | 2003-12-02 | David P. Jackson | Method and apparatus for creating an open cell micro-environment for treating a substrate with an impingement spray |
-
2002
- 2002-07-29 CH CH01330/02A patent/CH696188A5/de not_active IP Right Cessation
-
2003
- 2003-07-28 WO PCT/US2003/023598 patent/WO2004011161A2/en active IP Right Grant
- 2003-07-28 EP EP03771999A patent/EP1539386B1/de not_active Expired - Lifetime
- 2003-07-28 AT AT03771999T patent/ATE352799T1/de not_active IP Right Cessation
- 2003-07-28 AU AU2003259273A patent/AU2003259273A1/en not_active Abandoned
- 2003-07-28 JP JP2004524976A patent/JP4477495B2/ja not_active Expired - Lifetime
- 2003-07-28 DE DE60311479T patent/DE60311479T2/de not_active Expired - Lifetime
- 2003-07-28 US US10/628,294 patent/US7478454B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
US7478454B2 (en) | 2009-01-20 |
AU2003259273A1 (en) | 2004-02-16 |
DE60311479D1 (de) | 2007-03-15 |
WO2004011161A3 (en) | 2005-04-21 |
EP1539386A4 (de) | 2006-02-22 |
EP1539386B1 (de) | 2007-01-24 |
US20040111823A1 (en) | 2004-06-17 |
EP1539386A2 (de) | 2005-06-15 |
JP4477495B2 (ja) | 2010-06-09 |
WO2004011161A2 (en) | 2004-02-05 |
JP2006511063A (ja) | 2006-03-30 |
DE60311479T2 (de) | 2007-11-08 |
CH696188A5 (de) | 2007-02-15 |
AU2003259273A8 (en) | 2004-02-16 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
RER | Ceased as to paragraph 5 lit. 3 law introducing patent treaties |