ATE35060T1 - PHOTOSENSITIVE TRANSFER MATERIAL AND METHOD OF MAKING A PHOTORESIST STENCIL. - Google Patents

PHOTOSENSITIVE TRANSFER MATERIAL AND METHOD OF MAKING A PHOTORESIST STENCIL.

Info

Publication number
ATE35060T1
ATE35060T1 AT83109447T AT83109447T ATE35060T1 AT E35060 T1 ATE35060 T1 AT E35060T1 AT 83109447 T AT83109447 T AT 83109447T AT 83109447 T AT83109447 T AT 83109447T AT E35060 T1 ATE35060 T1 AT E35060T1
Authority
AT
Austria
Prior art keywords
layer
photosensitive
transfer material
photosensitive layer
support film
Prior art date
Application number
AT83109447T
Other languages
German (de)
Inventor
Ulrich Dr Geissler
Walter Dr Herwig
Helga Sikora
Original Assignee
Hoechst Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=6174792&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=ATE35060(T1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Hoechst Ag filed Critical Hoechst Ag
Application granted granted Critical
Publication of ATE35060T1 publication Critical patent/ATE35060T1/en

Links

Classifications

    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/09Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers
    • G03F7/115Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers having supports or layers with means for obtaining a screen effect or for obtaining better contact in vacuum printing
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03CPHOTOSENSITIVE MATERIALS FOR PHOTOGRAPHIC PURPOSES; PHOTOGRAPHIC PROCESSES, e.g. CINE, X-RAY, COLOUR, STEREO-PHOTOGRAPHIC PROCESSES; AUXILIARY PROCESSES IN PHOTOGRAPHY
    • G03C1/00Photosensitive materials
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/26Processing photosensitive materials; Apparatus therefor
    • G03F7/34Imagewise removal by selective transfer, e.g. peeling away
    • G03F7/346Imagewise removal by selective transfer, e.g. peeling away using photosensitive materials other than non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Architecture (AREA)
  • Structural Engineering (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Materials For Photolithography (AREA)
  • Non-Silver Salt Photosensitive Materials And Non-Silver Salt Photography (AREA)
  • Semiconductor Memories (AREA)
  • Drying Of Semiconductors (AREA)
  • Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
  • Photoreceptors In Electrophotography (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Manufacturing Of Printed Circuit Boards (AREA)

Abstract

The present invention relates to a photosensitive transfer material, which comprises a flexible temporary support film which is preferably transparent, a thermoplastic photosensitive layer, optionally a flexible cover film on the free side of the photosensitive layer and, optionally, an intermediate layer between the support film and the photosensitive layer. The photosensitive transfer material is suitable for manufacturing photoresist stencils and solder masks. The temporary support film has a rough surface which exerts an embossing effect on the surface of the photosensitive layer and the intermediate layer, respectively. The mat-finish of the intermediate layer prevents an irregular deformation of this layer in moist air, while the mat-finish of the photosensitive layer precludes unwanted reflections.
AT83109447T 1982-10-02 1983-09-22 PHOTOSENSITIVE TRANSFER MATERIAL AND METHOD OF MAKING A PHOTORESIST STENCIL. ATE35060T1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19823236560 DE3236560A1 (en) 1982-10-02 1982-10-02 LIGHT SENSITIVE LAYER TRANSFER MATERIAL AND METHOD FOR PRODUCING A PHOTORESIS TEMPLATE
EP83109447A EP0105421B1 (en) 1982-10-02 1983-09-22 Photosensitive stripping material and process for obtaining a photoresist stencil

Publications (1)

Publication Number Publication Date
ATE35060T1 true ATE35060T1 (en) 1988-06-15

Family

ID=6174792

Family Applications (1)

Application Number Title Priority Date Filing Date
AT83109447T ATE35060T1 (en) 1982-10-02 1983-09-22 PHOTOSENSITIVE TRANSFER MATERIAL AND METHOD OF MAKING A PHOTORESIST STENCIL.

Country Status (11)

Country Link
US (1) US4559292A (en)
EP (1) EP0105421B1 (en)
JP (1) JPH0612413B2 (en)
KR (1) KR910004874B1 (en)
AT (1) ATE35060T1 (en)
AU (1) AU558773B2 (en)
CA (1) CA1242100A (en)
DE (2) DE3236560A1 (en)
ES (1) ES526181A0 (en)
FI (1) FI74156C (en)
IL (1) IL69876A (en)

Families Citing this family (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59181342A (en) * 1983-03-31 1984-10-15 Nitto Electric Ind Co Ltd Developing method by stripping
US4587199A (en) * 1983-07-11 1986-05-06 E. I. Du Pont De Nemours And Company Controlled roughening of a photosensitive composition
JPS61169829A (en) * 1985-01-23 1986-07-31 Fuji Photo Film Co Ltd Photopolymerizable composition
US4719169A (en) * 1986-04-18 1988-01-12 Hoechst Celanese Corporation Protective coating for images
JPH0623845B2 (en) * 1986-06-23 1994-03-30 富士写真フイルム株式会社 Photosensitive image-receiving sheet material and image transfer method
JPH07101309B2 (en) * 1987-05-29 1995-11-01 富士写真フイルム株式会社 Photosensitive transfer material
US5213945A (en) * 1988-02-26 1993-05-25 Morton International, Inc. Dry film photoresist for forming a conformable mask and method of application to a printed circuit board or the like
JPH07107603B2 (en) * 1988-10-07 1995-11-15 曙フォトマスク株式会社 Screen printing screen and manufacturing method thereof
JPH0345548U (en) * 1989-09-08 1991-04-26
DE3931467A1 (en) * 1989-09-21 1991-04-04 Hoechst Ag POLYMERIZABLE MIXTURE BY RADIATION AND METHOD FOR PRODUCING A SOLDER STOP MASK
JP2613990B2 (en) * 1990-08-01 1997-05-28 矢崎総業株式会社 Branch circuit structure
EP0471483A1 (en) * 1990-08-03 1992-02-19 Canon Kabushiki Kaisha Surface reforming method, process for production of printing plate, printing plate and printing process
JPH0580503A (en) * 1991-06-25 1993-04-02 Fuji Photo Film Co Ltd Photosensitive transfer material and image forming method
DE4243912A1 (en) * 1992-04-09 1993-10-14 Fuji Photo Film Co Ltd Light sensitive transfer material - has thermoplastic resin as release coat between temporary film base and intermediate coat, to prevent flaws and soiling on laminating light-sensitive resin coat to permanent substrate
US5391458A (en) * 1992-12-18 1995-02-21 Morton International, Inc. Photoresist processing for improved resolution having a bake step to remove the tackiness of the laminated photosensitive layer prior to contact imagewise exposure
TW475098B (en) * 1995-10-27 2002-02-01 Tokyo Ohka Kogyo Co Ltd Photosensitive resin composition and photosensitive resin laminated film containing the same
JP3592827B2 (en) * 1996-03-06 2004-11-24 富士写真フイルム株式会社 Method for manufacturing photosensitive element and multilayer wiring board
US5993945A (en) * 1996-05-30 1999-11-30 International Business Machines Corporation Process for high resolution photoimageable dielectric
US5795647A (en) * 1996-09-11 1998-08-18 Aluminum Company Of America Printing plate having improved wear resistance
US6022670A (en) * 1997-05-08 2000-02-08 International Business Machines Corporation Process for high resolution photoimageable dielectric
US6399270B1 (en) * 1998-12-04 2002-06-04 Konica Corporation Support for printing plate and printing plate
CA2477779A1 (en) * 2002-03-14 2003-09-25 E.I. Du Pont De Nemours And Company Photosensitive element for use as flexographic printing plate
US20080213570A1 (en) * 2007-02-16 2008-09-04 Jennifer Hoyt Lalli Self-assembled conductive deformable films
US20040234886A1 (en) * 2003-03-12 2004-11-25 Rudolph Michael Lee Photosensitive element for use as flexographic printing plate
JP2015066853A (en) * 2013-09-30 2015-04-13 富士フイルム株式会社 Flexographic printing plate precursor for laser engraving, process for producing the same, and process for producing flexographic printing plate
TWI592760B (en) * 2014-12-30 2017-07-21 羅門哈斯電子材料韓國有限公司 Coating compositions for use with an overcoated photoresist
JP2018014446A (en) * 2016-07-22 2018-01-25 イビデン株式会社 Solder resist and printed wiring board
CN106498616B (en) * 2016-12-26 2018-09-21 浙江海森纺机科技有限公司 Glove knitting machine head linked system and function-driven folder
US20220066322A1 (en) * 2020-08-26 2022-03-03 Tamura Corporation Photosensitive dry film, and printed wiring board with photosensitive dry film

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1591304A (en) * 1925-07-16 1926-07-06 Walter W Giveans Stripping films
US3010390A (en) * 1954-06-29 1961-11-28 Buskes Willem Marie Planographic printing plates
FR1310056A (en) * 1960-10-19 1963-03-04
DE1522515C2 (en) 1965-08-03 1980-10-09 Du Pont Process for the production of printed circuits
DE2106574A1 (en) * 1970-03-03 1971-09-23 Shpley Co Inc Photosensitive laminate
US4193797A (en) 1971-03-22 1980-03-18 E. I. Dupont De Nemours And Company Method for making photoresists
DE2123702C3 (en) 1971-05-13 1988-05-26 Hoechst Ag, 6230 Frankfurt Process for producing a relief image
JPS5236698B2 (en) * 1973-01-29 1977-09-17
US3891443A (en) 1973-02-01 1975-06-24 Polychrome Corp Mat finish photosensitive relief plates
US3909328A (en) 1973-04-10 1975-09-30 Du Pont Decoration of substrates by thermal transfer of photosensitive, thermoplastic, dye-imaged film
JPS5019961A (en) * 1973-06-29 1975-03-03
CH621416A5 (en) 1975-03-27 1981-01-30 Hoechst Ag
DE2718254C3 (en) 1977-04-25 1980-04-10 Hoechst Ag, 6000 Frankfurt Radiation-sensitive copying paste
US4278752A (en) 1978-09-07 1981-07-14 E. I. Du Pont De Nemours And Company Flame retardant radiation sensitive element
US4232108A (en) * 1979-05-01 1980-11-04 E. I. Du Pont De Nemours And Company Marking transfer sheets
JPS5642629A (en) * 1979-09-17 1981-04-20 Diafoil Co Ltd Biaxially-stretched polyester film for photograph
DE3036694A1 (en) 1980-09-29 1982-06-03 Hoechst Ag, 6000 Frankfurt RUBBER-ELASTIC, ETHYLENICALLY UNSATURATED POLYURETHANE AND MIXTURE CONTAINING THE SAME BY RADIATION

Also Published As

Publication number Publication date
IL69876A (en) 1987-02-27
DE3377022D1 (en) 1988-07-14
US4559292A (en) 1985-12-17
AU1986283A (en) 1984-04-05
FI74156C (en) 1987-12-10
KR840006419A (en) 1984-11-29
KR910004874B1 (en) 1991-07-15
CA1242100A (en) 1988-09-20
ES8501539A1 (en) 1984-11-16
EP0105421B1 (en) 1988-06-08
JPS5975245A (en) 1984-04-27
FI833517A (en) 1984-04-03
AU558773B2 (en) 1987-02-05
ES526181A0 (en) 1984-11-16
IL69876A0 (en) 1983-12-30
DE3236560A1 (en) 1984-04-05
FI74156B (en) 1987-08-31
FI833517A0 (en) 1983-09-29
JPH0612413B2 (en) 1994-02-16
EP0105421A1 (en) 1984-04-18

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Legal Events

Date Code Title Description
REN Ceased due to non-payment of the annual fee