ATE341749T1 - Kalorimetrischer durchflussmesser - Google Patents

Kalorimetrischer durchflussmesser

Info

Publication number
ATE341749T1
ATE341749T1 AT04725444T AT04725444T ATE341749T1 AT E341749 T1 ATE341749 T1 AT E341749T1 AT 04725444 T AT04725444 T AT 04725444T AT 04725444 T AT04725444 T AT 04725444T AT E341749 T1 ATE341749 T1 AT E341749T1
Authority
AT
Austria
Prior art keywords
lead frame
channel
integrated circuit
holes
flow meter
Prior art date
Application number
AT04725444T
Other languages
English (en)
Inventor
Der Wiel Appolonius Jacobu Van
Original Assignee
Melexis Nv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Melexis Nv filed Critical Melexis Nv
Application granted granted Critical
Publication of ATE341749T1 publication Critical patent/ATE341749T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/6845—Micromachined devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/6847—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow where sensing or heating elements are not disturbing the fluid flow, e.g. elements mounted outside the flow duct

Landscapes

  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Volume Flow (AREA)
  • Paper (AREA)
  • Transition And Organic Metals Composition Catalysts For Addition Polymerization (AREA)
AT04725444T 2003-04-02 2004-04-02 Kalorimetrischer durchflussmesser ATE341749T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GBGB0307616.3A GB0307616D0 (en) 2003-04-02 2003-04-02 Calorimetric flow meter

Publications (1)

Publication Number Publication Date
ATE341749T1 true ATE341749T1 (de) 2006-10-15

Family

ID=9956050

Family Applications (1)

Application Number Title Priority Date Filing Date
AT04725444T ATE341749T1 (de) 2003-04-02 2004-04-02 Kalorimetrischer durchflussmesser

Country Status (7)

Country Link
US (1) US7691652B2 (de)
EP (1) EP1623190B1 (de)
AT (1) ATE341749T1 (de)
DE (1) DE602004002690T2 (de)
ES (1) ES2274443T3 (de)
GB (1) GB0307616D0 (de)
WO (1) WO2004088255A2 (de)

Families Citing this family (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2007063407A2 (en) * 2005-12-02 2007-06-07 Melexis Nv Thermal mass flow meter
US7261003B2 (en) * 2006-01-03 2007-08-28 Freescale Semiconductor, Inc. Flowmeter and method for the making thereof
US7755466B2 (en) * 2006-04-26 2010-07-13 Honeywell International Inc. Flip-chip flow sensor
US7513149B1 (en) * 2007-11-30 2009-04-07 Honeywell International Inc. Robust MEMS flow die with integrated protective flow channel
EP2154713B1 (de) * 2008-08-11 2013-01-02 Sensirion AG Verfahren zur Herstellung einer Messvorrichtung mit einer Spannungsverminderungsschicht
US7765872B2 (en) * 2008-11-19 2010-08-03 Honeywell International Inc. Flow sensor apparatus and method with media isolated electrical connections
EP2224218B1 (de) * 2009-02-25 2018-11-28 Sensirion Automotive Solutions AG Sensor in einer geformten Verpackung und Herstellungsverfahren dafür
US8356514B2 (en) 2011-01-13 2013-01-22 Honeywell International Inc. Sensor with improved thermal stability
US8640552B2 (en) 2011-09-06 2014-02-04 Honeywell International Inc. MEMS airflow sensor die incorporating additional circuitry on the die
JP5743922B2 (ja) * 2012-02-21 2015-07-01 日立オートモティブシステムズ株式会社 熱式空気流量測定装置
JP5632881B2 (ja) * 2012-06-15 2014-11-26 日立オートモティブシステムズ株式会社 熱式流量計
US8833384B2 (en) 2012-08-06 2014-09-16 Schneider Electric Buildings, Llc Advanced valve actuation system with integral freeze protection
US9534795B2 (en) 2012-10-05 2017-01-03 Schneider Electric Buildings, Llc Advanced valve actuator with remote location flow reset
US10295080B2 (en) 2012-12-11 2019-05-21 Schneider Electric Buildings, Llc Fast attachment open end direct mount damper and valve actuator
US10007239B2 (en) 2013-03-15 2018-06-26 Schneider Electric Buildings Llc Advanced valve actuator with integral energy metering
WO2014143922A1 (en) 2013-03-15 2014-09-18 Schneider Electric Buildings, Llc Advanced valve actuator with true flow feedback
GB2553681B (en) 2015-01-07 2019-06-26 Homeserve Plc Flow detection device
US10107662B2 (en) 2015-01-30 2018-10-23 Honeywell International Inc. Sensor assembly
GB201501935D0 (en) 2015-02-05 2015-03-25 Tooms Moore Consulting Ltd And Trow Consulting Ltd Water flow analysis
US20160370809A1 (en) * 2015-06-19 2016-12-22 Hni Technologies Inc. Fluid flow system
US10139256B2 (en) * 2015-08-03 2018-11-27 Aceinna, Inc. MEMS flow sensor
US20170115149A1 (en) * 2015-10-27 2017-04-27 Memsic, Inc. Removable high flow impedance module in flow sensor bypass circuit
CN111033186B (zh) * 2017-09-05 2022-01-07 日立安斯泰莫株式会社 热式流量计
JP2021139861A (ja) * 2020-03-10 2021-09-16 オムロン株式会社 パッケージ型フローセンサ

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4542650A (en) * 1983-08-26 1985-09-24 Innovus Thermal mass flow meter
DE19511687A1 (de) * 1995-03-30 1996-10-02 Cms Mikrosysteme Gmbh Chemnitz Durchflußmengenaufnehmer
NL1003315C2 (nl) * 1996-06-11 1997-12-17 Europ Semiconductor Assembly E Werkwijze voor het inkapselen van een geïntegreerde halfgeleiderschake- ling.
AT410727B (de) 2000-03-14 2003-07-25 Austria Mikrosysteme Int Verfahren zum unterbringen von sensoren in einem gehäuse

Also Published As

Publication number Publication date
EP1623190B1 (de) 2006-10-04
GB0307616D0 (en) 2003-05-07
WO2004088255A3 (en) 2005-01-20
US7691652B2 (en) 2010-04-06
EP1623190A2 (de) 2006-02-08
DE602004002690T2 (de) 2007-08-23
WO2004088255A2 (en) 2004-10-14
US20060234414A1 (en) 2006-10-19
DE602004002690D1 (de) 2006-11-16
ES2274443T3 (es) 2007-05-16

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Legal Events

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