ATE326052T1 - Sensor mit kantilever und optischem resonator - Google Patents
Sensor mit kantilever und optischem resonatorInfo
- Publication number
- ATE326052T1 ATE326052T1 AT02755480T AT02755480T ATE326052T1 AT E326052 T1 ATE326052 T1 AT E326052T1 AT 02755480 T AT02755480 T AT 02755480T AT 02755480 T AT02755480 T AT 02755480T AT E326052 T1 ATE326052 T1 AT E326052T1
- Authority
- AT
- Austria
- Prior art keywords
- cantilever
- resonator
- sensor
- optical resonator
- lens assembly
- Prior art date
Links
- 230000003287 optical effect Effects 0.000 title abstract 3
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q20/00—Monitoring the movement or position of the probe
- G01Q20/02—Monitoring the movement or position of the probe by optical means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/266—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light by interferometric means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/268—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light using optical fibres
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/353—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre
- G01D5/35306—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre using an interferometer arrangement
- G01D5/35309—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre using an interferometer arrangement using multiple waves interferometer
- G01D5/35312—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre using an interferometer arrangement using multiple waves interferometer using a Fabry Perot
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/IB2002/003253 WO2004017329A1 (en) | 2002-08-14 | 2002-08-14 | Sensor with cantilever and optical resonator |
Publications (1)
Publication Number | Publication Date |
---|---|
ATE326052T1 true ATE326052T1 (de) | 2006-06-15 |
Family
ID=31726506
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT02755480T ATE326052T1 (de) | 2002-08-14 | 2002-08-14 | Sensor mit kantilever und optischem resonator |
Country Status (9)
Country | Link |
---|---|
US (1) | US7319527B2 (de) |
EP (1) | EP1540661B1 (de) |
JP (1) | JP3874358B2 (de) |
CN (1) | CN100538913C (de) |
AT (1) | ATE326052T1 (de) |
AU (1) | AU2002321721A1 (de) |
DE (1) | DE60211388T2 (de) |
ES (1) | ES2265048T3 (de) |
WO (1) | WO2004017329A1 (de) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1817557A4 (de) * | 2004-11-03 | 2010-06-16 | Omniprobe Inc | Vorrichtung und verfahren zur detektion des kontaktes zwischen einer sondenspitze und einer oberfläche |
US7347085B2 (en) * | 2005-11-16 | 2008-03-25 | Agilent Technologies, Inc. | Nanoscale displacement detector |
CN100451728C (zh) * | 2007-07-06 | 2009-01-14 | 清华大学 | 带压阻传感器的微型二维扫描镜 |
US9835591B2 (en) * | 2011-02-25 | 2017-12-05 | Panorama Synergy Ltd | Optical cantilever based analysis |
DE102014201274A1 (de) | 2014-01-24 | 2015-07-30 | Polytec Gmbh | Vorrichtung und Verfahren zur interferometrischen Vermessung eines Objekts |
CN105137127B (zh) * | 2015-09-28 | 2017-08-01 | 南开大学 | 介质微螺旋锥和金属粮仓形纳米锥复合探针 |
TW201719109A (zh) | 2015-11-23 | 2017-06-01 | 財團法人工業技術研究院 | 光學共振腔之腔長量測裝置 |
US9869695B1 (en) | 2016-08-26 | 2018-01-16 | International Business Machines Corporation | Atomic-force microscope system with integrated fabry-perot resonator |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5017010A (en) | 1989-05-16 | 1991-05-21 | International Business Machines Corporation | High sensitivity position sensor and method |
JPH04161807A (ja) * | 1990-10-26 | 1992-06-05 | Olympus Optical Co Ltd | 走査型プローブ顕微鏡 |
US5280341A (en) * | 1992-02-27 | 1994-01-18 | International Business Machines Corporation | Feedback controlled differential fiber interferometer |
DE4310349C2 (de) | 1993-03-30 | 2000-11-16 | Inst Mikrotechnik Mainz Gmbh | Sensorkopf und Verfahren zu seiner Herstellung |
US5463897A (en) * | 1993-08-17 | 1995-11-07 | Digital Instruments, Inc. | Scanning stylus atomic force microscope with cantilever tracking and optical access |
US5565987A (en) | 1995-03-23 | 1996-10-15 | Anvik Corporation | Fabry-Perot probe profilometer having feedback loop to maintain resonance |
US6455838B2 (en) * | 1998-10-06 | 2002-09-24 | The Regents Of The University Of California | High sensitivity deflection sensing device |
KR100486937B1 (ko) * | 2002-06-11 | 2005-05-03 | 한국표준과학연구원 | 광섬유에 의해 구현된 패브리 페로 공진기와 이를 이용한 원자간력 현미경에서의 외팔보 탐침의 변위 측정 및 보정시스템 |
-
2002
- 2002-08-14 AU AU2002321721A patent/AU2002321721A1/en not_active Abandoned
- 2002-08-14 DE DE60211388T patent/DE60211388T2/de not_active Expired - Lifetime
- 2002-08-14 ES ES02755480T patent/ES2265048T3/es not_active Expired - Lifetime
- 2002-08-14 WO PCT/IB2002/003253 patent/WO2004017329A1/en active IP Right Grant
- 2002-08-14 EP EP02755480A patent/EP1540661B1/de not_active Expired - Lifetime
- 2002-08-14 AT AT02755480T patent/ATE326052T1/de not_active IP Right Cessation
- 2002-08-14 JP JP2004528710A patent/JP3874358B2/ja not_active Expired - Fee Related
- 2002-08-14 CN CNB028294629A patent/CN100538913C/zh not_active Expired - Fee Related
- 2002-08-14 US US10/524,506 patent/US7319527B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
JP3874358B2 (ja) | 2007-01-31 |
US20050264825A1 (en) | 2005-12-01 |
ES2265048T3 (es) | 2007-02-01 |
EP1540661B1 (de) | 2006-05-10 |
CN100538913C (zh) | 2009-09-09 |
US7319527B2 (en) | 2008-01-15 |
WO2004017329A1 (en) | 2004-02-26 |
CN1682315A (zh) | 2005-10-12 |
EP1540661A1 (de) | 2005-06-15 |
DE60211388T2 (de) | 2007-02-08 |
DE60211388D1 (de) | 2006-06-14 |
JP2005535896A (ja) | 2005-11-24 |
AU2002321721A1 (en) | 2004-03-03 |
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Legal Events
Date | Code | Title | Description |
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UEP | Publication of translation of european patent specification |
Ref document number: 1540661 Country of ref document: EP |
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EEIH | Change in the person of patent owner | ||
REN | Ceased due to non-payment of the annual fee |