ATE304737T1 - Probenhalter fuer ein elektronenmikroskop und vorrichtung und verfahren zum montieren einer probe in einem elektronenmikroskop - Google Patents
Probenhalter fuer ein elektronenmikroskop und vorrichtung und verfahren zum montieren einer probe in einem elektronenmikroskopInfo
- Publication number
- ATE304737T1 ATE304737T1 AT95942797T AT95942797T ATE304737T1 AT E304737 T1 ATE304737 T1 AT E304737T1 AT 95942797 T AT95942797 T AT 95942797T AT 95942797 T AT95942797 T AT 95942797T AT E304737 T1 ATE304737 T1 AT E304737T1
- Authority
- AT
- Austria
- Prior art keywords
- electron microscope
- specimen
- sample
- mounting
- bar
- Prior art date
Links
- 238000012216 screening Methods 0.000 abstract 3
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
- H01J2237/2001—Maintaining constant desired temperature
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
- H01J2237/2007—Holding mechanisms
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
- H01J2237/201—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated for mounting multiple objects
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
- H01J2237/204—Means for introducing and/or outputting objects
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Sampling And Sample Adjustment (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
NL9402226A NL9402226A (nl) | 1994-12-28 | 1994-12-28 | Inrichting en werkwijze voor het opnemen van een monster in een elektronenmicroscoop. |
NL9402241A NL9402241A (nl) | 1994-12-30 | 1994-12-30 | Monsterhouder voor een elektronenmicroscoop en werkwijze voor het opnemen van een monster in een elektronenmicroscoop. |
PCT/NL1995/000444 WO1996020495A2 (en) | 1994-12-28 | 1995-12-28 | Specimen holder for an electron microscope and device and method for mounting a specimen in an electron microscope |
Publications (1)
Publication Number | Publication Date |
---|---|
ATE304737T1 true ATE304737T1 (de) | 2005-09-15 |
Family
ID=26647288
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT95942797T ATE304737T1 (de) | 1994-12-28 | 1995-12-28 | Probenhalter fuer ein elektronenmikroskop und vorrichtung und verfahren zum montieren einer probe in einem elektronenmikroskop |
Country Status (5)
Country | Link |
---|---|
EP (1) | EP0801810B1 (de) |
AT (1) | ATE304737T1 (de) |
AU (1) | AU4402596A (de) |
DE (1) | DE69534447T2 (de) |
WO (1) | WO1996020495A2 (de) |
Families Citing this family (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6967335B1 (en) | 2002-06-17 | 2005-11-22 | Zyvex Corporation | Manipulation system for manipulating a sample under study with a microscope |
US6891170B1 (en) | 2002-06-17 | 2005-05-10 | Zyvex Corporation | Modular manipulation system for manipulating a sample under study with a microscope |
TW200531420A (en) | 2004-02-20 | 2005-09-16 | Zyvex Corp | Positioning device for microscopic motion |
CN1696652A (zh) | 2004-02-23 | 2005-11-16 | 塞威公司 | 带电粒子束装置探针操作 |
NL1027025C2 (nl) | 2004-09-13 | 2006-03-14 | Univ Delft Tech | Microreactor voor een transmissie elektronenmicroscoop en verwarmingselement en werkwijze voor vervaardiging daarvan. |
EP1863066A1 (de) | 2006-05-29 | 2007-12-05 | FEI Company | Probenträger und Probenhalter |
EP1868225A1 (de) * | 2006-05-29 | 2007-12-19 | FEI Company | Probenträger und Probenhalter |
NL1032224C2 (nl) * | 2006-07-21 | 2008-01-22 | Univ Delft Tech | Werkwijze voor sample preparatie voor cryo-elektronenmicroscopie (CEM), microreactor en laadperron. |
US7884326B2 (en) | 2007-01-22 | 2011-02-08 | Fei Company | Manipulator for rotating and translating a sample holder |
EP2051280A1 (de) | 2007-10-18 | 2009-04-22 | The Regents of the University of California | Motorisierter Manipulator zur Positionierung einer TEM-Probe |
JP5517559B2 (ja) | 2009-10-26 | 2014-06-11 | 株式会社日立ハイテクノロジーズ | 荷電粒子線装置及び荷電粒子線装置における三次元情報の表示方法 |
US8507876B2 (en) | 2010-03-08 | 2013-08-13 | Microscopy Innovations, Llc | Device for holding electron microscope grids and other materials |
CN114488506A (zh) * | 2020-11-12 | 2022-05-13 | 邑流微测股份有限公司 | 显微镜观测载台 |
WO2023127083A1 (ja) * | 2021-12-28 | 2023-07-06 | 株式会社日立ハイテク | 荷電粒子線装置 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4242586A (en) * | 1978-08-08 | 1980-12-30 | Commonwealth Scientific And Industrial Research Organization | Specimen holder for electron microscopy and electron diffraction |
US4591722A (en) * | 1982-04-20 | 1986-05-27 | The University Court Of The University Of Glasgow | Low temperature stage for microanalysis |
FR2578776A1 (fr) * | 1985-03-15 | 1986-09-19 | Commissariat Energie Atomique | Boite de transfert |
US4797261A (en) * | 1987-11-03 | 1989-01-10 | Gatan Inc. | Multiple specimen cryotransfer holder for electron microscopes |
US5225683A (en) * | 1990-11-30 | 1993-07-06 | Jeol Ltd. | Detachable specimen holder for transmission electron microscope |
EP0504972A1 (de) * | 1991-03-18 | 1992-09-23 | Koninklijke Philips Electronics N.V. | Präparathalter zur Verwendung in einer Ladungsteilchenbündelanordnung |
US5326971A (en) * | 1993-05-17 | 1994-07-05 | Motorola, Inc. | Transmission electron microscope environmental specimen holder |
-
1995
- 1995-12-28 AU AU44025/96A patent/AU4402596A/en not_active Abandoned
- 1995-12-28 WO PCT/NL1995/000444 patent/WO1996020495A2/en active IP Right Grant
- 1995-12-28 EP EP95942797A patent/EP0801810B1/de not_active Expired - Lifetime
- 1995-12-28 AT AT95942797T patent/ATE304737T1/de not_active IP Right Cessation
- 1995-12-28 DE DE69534447T patent/DE69534447T2/de not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
WO1996020495A3 (en) | 1996-09-06 |
EP0801810A2 (de) | 1997-10-22 |
EP0801810B1 (de) | 2005-09-14 |
DE69534447D1 (de) | 2005-10-20 |
WO1996020495A2 (en) | 1996-07-04 |
AU4402596A (en) | 1996-07-19 |
DE69534447T2 (de) | 2006-07-13 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
RER | Ceased as to paragraph 5 lit. 3 law introducing patent treaties |