ATE289407T1 - Dynamischer vergleich von artefakten - Google Patents

Dynamischer vergleich von artefakten

Info

Publication number
ATE289407T1
ATE289407T1 AT03712319T AT03712319T ATE289407T1 AT E289407 T1 ATE289407 T1 AT E289407T1 AT 03712319 T AT03712319 T AT 03712319T AT 03712319 T AT03712319 T AT 03712319T AT E289407 T1 ATE289407 T1 AT E289407T1
Authority
AT
Austria
Prior art keywords
artefact
workpieces
artifacts
dynamic comparison
fast speed
Prior art date
Application number
AT03712319T
Other languages
English (en)
Inventor
Benjamin Roller Taylor
Geoffrey Mcfarland
Original Assignee
Renishaw Plc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=9932465&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=ATE289407(T1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Renishaw Plc filed Critical Renishaw Plc
Application granted granted Critical
Publication of ATE289407T1 publication Critical patent/ATE289407T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/002—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates
    • G01B11/005—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates coordinate measuring machines
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
    • G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
    • G01B21/04—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness by measuring coordinates of points
    • G01B21/042—Calibration or calibration artifacts
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
    • G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
    • G01B21/04—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness by measuring coordinates of points
    • G01B21/045—Correction of measurements

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • A Measuring Device Byusing Mechanical Method (AREA)
  • Measuring Or Testing Involving Enzymes Or Micro-Organisms (AREA)
  • Steroid Compounds (AREA)
AT03712319T 2002-03-06 2003-03-06 Dynamischer vergleich von artefakten ATE289407T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GBGB0205332.0A GB0205332D0 (en) 2002-03-06 2002-03-06 Dynamic artefact comparison
PCT/GB2003/000961 WO2003074968A1 (en) 2002-03-06 2003-03-06 Dynamic artefact comparison

Publications (1)

Publication Number Publication Date
ATE289407T1 true ATE289407T1 (de) 2005-03-15

Family

ID=9932465

Family Applications (1)

Application Number Title Priority Date Filing Date
AT03712319T ATE289407T1 (de) 2002-03-06 2003-03-06 Dynamischer vergleich von artefakten

Country Status (9)

Country Link
US (1) US7079969B2 (de)
EP (2) EP1528355B1 (de)
JP (2) JP2005519277A (de)
CN (1) CN1295484C (de)
AT (1) ATE289407T1 (de)
AU (1) AU2003216997A1 (de)
DE (1) DE60300331T3 (de)
GB (1) GB0205332D0 (de)
WO (1) WO2003074968A1 (de)

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US6990743B2 (en) * 2002-08-29 2006-01-31 Micron Technology, Inc. Process for monitoring measuring device performance
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GB0322115D0 (en) 2003-09-22 2003-10-22 Renishaw Plc Method of error compensation
GB0322362D0 (en) * 2003-09-24 2003-10-22 Renishaw Plc Measuring methods for use on machine tools
EP1596160A1 (de) * 2004-05-10 2005-11-16 Hexagon Metrology AB Verfahren zur Prüfung eines Werkstücks mit einer Messmachine
FR2871228B1 (fr) * 2004-06-08 2006-09-15 Equip Et Services De Process I Procede et dispositif de mesure tridimensionnelle
US7320911B2 (en) * 2004-12-06 2008-01-22 Micron Technology, Inc. Methods of forming pluralities of capacitors
GB2425840A (en) 2005-04-13 2006-11-08 Renishaw Plc Error correction of workpiece measurements
EP2013571B1 (de) * 2006-04-21 2011-09-07 Renishaw plc Verfahren zur fehlerkorrektur
GB0608235D0 (en) * 2006-04-26 2006-06-07 Renishaw Plc Differential calibration
JP5203028B2 (ja) * 2007-05-30 2013-06-05 株式会社ミツトヨ 形状測定機構の異常検出方法及び形状測定機構
EP2160565A1 (de) * 2007-06-28 2010-03-10 Hexagon Metrology S.p.A. Verfahren zum bestimmen von dynamischen fehlern in einer messmaschine
US7912572B2 (en) * 2007-09-20 2011-03-22 General Electric Company Calibration assembly for an inspection system
FR2930818B1 (fr) * 2008-04-30 2010-06-18 Peugeot Citroen Automobiles Sa Procede de determination de la precision d'un capteur de mesure de forme
US7905031B1 (en) * 2009-03-06 2011-03-15 Florida Turbine Technologies, Inc. Process for measuring a part
US7905027B2 (en) * 2009-07-01 2011-03-15 Hexagon Metrology, Inc. Method and apparatus for probe tip diameter calibration
GB201003363D0 (en) 2010-03-01 2010-04-14 Renishaw Plc Measurement method and apparatus
KR101126808B1 (ko) * 2010-03-02 2012-03-23 경북대학교 산학협력단 다축 제어 기계의 오차 평가 방법 및 장치
GB201003599D0 (en) 2010-03-04 2010-04-21 Renishaw Plc Measurement method and apparatus
EP2492635B1 (de) * 2011-02-22 2013-05-29 Siemens Aktiengesellschaft Kalibrierverfahren für einen kugelförmigen Messtaster
GB201113715D0 (en) 2011-08-09 2011-09-21 Renishaw Plc Method and apparatus for inspecting workpieces
TWI515455B (zh) * 2011-11-10 2016-01-01 鴻海精密工業股份有限公司 星型探針量測校正系統及方法
US20170363403A1 (en) * 2012-03-21 2017-12-21 Renishaw Plc Method and apparatus for inspecting workpieces
GB201204947D0 (en) * 2012-03-21 2012-05-02 Renishaw Plc Method and apparatus for inspecting workpieces
CN103377300A (zh) * 2012-04-27 2013-10-30 鸿富锦精密工业（深圳）有限公司 探针校准路径模拟系统及方法
JP6325768B2 (ja) * 2012-12-27 2018-05-16 川崎重工業株式会社 計測システム、及びその計測方法
GB201308467D0 (en) * 2013-05-10 2013-06-19 Renishaw Plc Method and Apparatus for Inspecting Workpieces
JP6735735B2 (ja) * 2014-09-02 2020-08-05 レニショウ パブリック リミテッド カンパニーＲｅｎｉｓｈａｗ Ｐｕｂｌｉｃ Ｌｉｍｉｔｅｄ Ｃｏｍｐａｎｙ ワークピースを検査するための座標測定方法および同装置であって、理想的な形態から実質的に逸脱していないことが判っている基準形状を使用して測定補正値を生成するステップを含む、ワークピースを検査するための座標測定方法および同装置
US10331105B2 (en) * 2015-08-07 2019-06-25 Spm Automation (Canada) Inc. Machine for self-adjusting its operation to compensate for part-to-part variations
CN105423919B (zh) * 2015-12-18 2018-01-02 重庆德新机器人检测中心有限公司 利用固液相快速转换材料投影成像检测机器人精度的方法
DE102016206986B4 (de) * 2016-04-25 2020-10-29 Carl Zeiss Industrielle Messtechnik Gmbh Verfahren und Vorrichtung zur Bestimmung einer Rundheit-Formmessabweichung sowie Lehrring
EP3715977A1 (de) 2019-03-27 2020-09-30 Renishaw PLC Kalibrierverfahren und verfahren zur gewinnung von werkstückinformationen
JP2020159911A (ja) * 2019-03-27 2020-10-01 三菱日立パワーシステムズ株式会社 ゲージ、その製造方法、形状測定機の精度評価方法、及び測定データの補正方法
TWI754888B (zh) * 2020-01-21 2022-02-11 財團法人工業技術研究院 校準方法及校準系統
CN112082512B (zh) * 2020-09-08 2023-04-14 深圳广成创新技术有限公司 一种相位测量偏折术的标定优化方法、装置及计算机设备
JP6917096B1 (ja) 2020-12-25 2021-08-11 リンクウィズ株式会社 情報処理方法、情報処理システム、プログラム

Family Cites Families (17)

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JPS6123906A (ja) * 1984-07-13 1986-02-01 Toyota Motor Corp ワークの偏差測定装置
GB8705301D0 (en) * 1987-03-06 1987-04-08 Renishaw Plc Calibration of machines
GB8713715D0 (en) * 1987-06-11 1987-07-15 Renishaw Plc Workpiece inspection method
US5257460A (en) * 1991-06-18 1993-11-02 Renishaw Metrology Limited Machine tool measurement methods
US5426861A (en) * 1993-04-19 1995-06-27 Advanced Metrological Development Method and apparatus for inspecting parts for dimensional accuracy outside a laboratory environment
JPH07204991A (ja) * 1994-01-13 1995-08-08 Japan Small Corp 変位検出形測定ヘッドを用いた測定システム
EP0684447B1 (de) * 1994-05-27 2003-09-17 Carl Zeiss Koordinatenmessung an Werkstücken mit einer Korrektur des durch die Messkraft abhängigen Biegeverhaltens des Koordinatenmessgerätes
DE4436507A1 (de) * 1994-10-13 1996-04-18 Zeiss Carl Fa Verfahren zur Koordinatenmessung an Werkstücken
DE19539148A1 (de) 1995-10-20 1997-04-24 Zeiss Carl Fa Verfahren zur Koordinatenmessung von Werkstücken
JPH10111126A (ja) * 1996-10-03 1998-04-28 Nissan Motor Co Ltd 計測部材補正付き距離検出装置
US6131301A (en) * 1997-07-18 2000-10-17 Renishaw Plc Method of and apparatus for measuring workpieces using a coordinate positioning machine
DE19830646C2 (de) † 1998-07-09 2003-11-27 Leitz Messtechnik Gmbh Verfahren zur Korrektur von geometrischen Ablauffehlern einer Koordinatenmeßmaschine
JP3474448B2 (ja) * 1998-09-01 2003-12-08 株式会社リコー 座標軸直角度誤差の校正方法及び三次元形状測定装置
JP2000081329A (ja) * 1998-09-04 2000-03-21 Nikon Corp 形状測定方法及び装置
GB9907868D0 (en) * 1999-04-08 1999-06-02 Renishaw Plc Method of calibrating a scanning system
DE10050795C2 (de) * 1999-12-23 2002-11-07 Klingelnberg Gmbh Verfahren und Vorrichtung zum Scannen auf einem Koordinatenmessgerät
JP3851046B2 (ja) * 2000-01-18 2006-11-29 株式会社ミツトヨ 測定機の真直精度補正方法および測定機

Also Published As

Publication number Publication date
EP1446636B2 (de) 2011-12-14
CN1639541A (zh) 2005-07-13
DE60300331T2 (de) 2005-06-30
US7079969B2 (en) 2006-07-18
JP2012198241A (ja) 2012-10-18
JP2005519277A (ja) 2005-06-30
EP1446636B1 (de) 2005-02-16
DE60300331D1 (de) 2005-03-24
AU2003216997A1 (en) 2003-09-16
DE60300331T3 (de) 2012-02-09
EP1528355A3 (de) 2005-08-17
WO2003074968A1 (en) 2003-09-12
EP1446636A1 (de) 2004-08-18
EP1528355A2 (de) 2005-05-04
CN1295484C (zh) 2007-01-17
JP5425267B2 (ja) 2014-02-26
US20050005465A1 (en) 2005-01-13
GB0205332D0 (en) 2002-04-17
EP1528355B1 (de) 2017-09-27

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