ATE289083T1 - Signalverarbeitungs- und regelungssystem auf mehreren ebenen - Google Patents

Signalverarbeitungs- und regelungssystem auf mehreren ebenen

Info

Publication number
ATE289083T1
ATE289083T1 AT98958508T AT98958508T ATE289083T1 AT E289083 T1 ATE289083 T1 AT E289083T1 AT 98958508 T AT98958508 T AT 98958508T AT 98958508 T AT98958508 T AT 98958508T AT E289083 T1 ATE289083 T1 AT E289083T1
Authority
AT
Austria
Prior art keywords
physical system
time varying
dynamic
control system
signal processing
Prior art date
Application number
AT98958508T
Other languages
English (en)
Inventor
Sunil C Shah
Pradeep Pandey
Mark A Erickson
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Application granted granted Critical
Publication of ATE289083T1 publication Critical patent/ATE289083T1/de

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B13/00—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion
    • G05B13/02—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion electric
    • G05B13/04—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion electric involving the use of models or simulators
    • G05B13/042—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion electric involving the use of models or simulators in which a parameter or coefficient is automatically adjusted to optimise the performance
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B13/00—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion
    • G05B13/02—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion electric
    • G05B13/04—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion electric involving the use of models or simulators
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B17/00—Systems involving the use of models or simulators of said systems
    • G05B17/02—Systems involving the use of models or simulators of said systems electric

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Medical Informatics (AREA)
  • Software Systems (AREA)
  • Evolutionary Computation (AREA)
  • Health & Medical Sciences (AREA)
  • Artificial Intelligence (AREA)
  • Feedback Control In General (AREA)
  • Selective Calling Equipment (AREA)
  • Electrophonic Musical Instruments (AREA)
  • Control Of Position, Course, Altitude, Or Attitude Of Moving Bodies (AREA)
AT98958508T 1997-11-26 1998-11-10 Signalverarbeitungs- und regelungssystem auf mehreren ebenen ATE289083T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/980,041 US6041172A (en) 1997-11-26 1997-11-26 Multiple scale signal processing and control system
PCT/US1998/023889 WO1999027425A1 (en) 1997-11-26 1998-11-10 Multiple scale signal processing and control system

Publications (1)

Publication Number Publication Date
ATE289083T1 true ATE289083T1 (de) 2005-02-15

Family

ID=25527312

Family Applications (1)

Application Number Title Priority Date Filing Date
AT98958508T ATE289083T1 (de) 1997-11-26 1998-11-10 Signalverarbeitungs- und regelungssystem auf mehreren ebenen

Country Status (6)

Country Link
US (3) US6041172A (de)
EP (1) EP1034459B1 (de)
AT (1) ATE289083T1 (de)
AU (1) AU1453999A (de)
DE (1) DE69828995T2 (de)
WO (1) WO1999027425A1 (de)

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Also Published As

Publication number Publication date
AU1453999A (en) 1999-06-15
WO1999027425A1 (en) 1999-06-03
DE69828995D1 (de) 2005-03-17
US6289508B1 (en) 2001-09-11
EP1034459A4 (de) 2000-11-08
DE69828995T2 (de) 2006-01-19
EP1034459B1 (de) 2005-02-09
US6167360A (en) 2000-12-26
US6041172A (en) 2000-03-21
EP1034459A1 (de) 2000-09-13

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