DE69828995D1 - Signalverarbeitungs- und regelungssystem auf mehreren ebenen - Google Patents

Signalverarbeitungs- und regelungssystem auf mehreren ebenen

Info

Publication number
DE69828995D1
DE69828995D1 DE69828995T DE69828995T DE69828995D1 DE 69828995 D1 DE69828995 D1 DE 69828995D1 DE 69828995 T DE69828995 T DE 69828995T DE 69828995 T DE69828995 T DE 69828995T DE 69828995 D1 DE69828995 D1 DE 69828995D1
Authority
DE
Germany
Prior art keywords
physical system
time varying
dynamic
control system
signal processing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69828995T
Other languages
English (en)
Other versions
DE69828995T2 (de
Inventor
C Shah
Pradeep Pandey
A Erickson
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Ltd
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Publication of DE69828995D1 publication Critical patent/DE69828995D1/de
Application granted granted Critical
Publication of DE69828995T2 publication Critical patent/DE69828995T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G05CONTROLLING; REGULATING
    • G05BCONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B13/00Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion
    • G05B13/02Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion electric
    • G05B13/04Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion electric involving the use of models or simulators
    • G05B13/042Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion electric involving the use of models or simulators in which a parameter or coefficient is automatically adjusted to optimise the performance
    • GPHYSICS
    • G05CONTROLLING; REGULATING
    • G05BCONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B13/00Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion
    • G05B13/02Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion electric
    • G05B13/04Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion electric involving the use of models or simulators
    • GPHYSICS
    • G05CONTROLLING; REGULATING
    • G05BCONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B17/00Systems involving the use of models or simulators of said systems
    • G05B17/02Systems involving the use of models or simulators of said systems electric

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Medical Informatics (AREA)
  • Software Systems (AREA)
  • Evolutionary Computation (AREA)
  • Health & Medical Sciences (AREA)
  • Artificial Intelligence (AREA)
  • Feedback Control In General (AREA)
  • Electrophonic Musical Instruments (AREA)
  • Selective Calling Equipment (AREA)
  • Control Of Position, Course, Altitude, Or Attitude Of Moving Bodies (AREA)
DE69828995T 1997-11-26 1998-11-10 Signalverarbeitungs- und regelungssystem auf mehreren ebenen Expired - Lifetime DE69828995T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US08/980,041 US6041172A (en) 1997-11-26 1997-11-26 Multiple scale signal processing and control system
US980041 1997-11-26
PCT/US1998/023889 WO1999027425A1 (en) 1997-11-26 1998-11-10 Multiple scale signal processing and control system

Publications (2)

Publication Number Publication Date
DE69828995D1 true DE69828995D1 (de) 2005-03-17
DE69828995T2 DE69828995T2 (de) 2006-01-19

Family

ID=25527312

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69828995T Expired - Lifetime DE69828995T2 (de) 1997-11-26 1998-11-10 Signalverarbeitungs- und regelungssystem auf mehreren ebenen

Country Status (6)

Country Link
US (3) US6041172A (de)
EP (1) EP1034459B1 (de)
AT (1) ATE289083T1 (de)
AU (1) AU1453999A (de)
DE (1) DE69828995T2 (de)
WO (1) WO1999027425A1 (de)

Families Citing this family (41)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0931283B1 (de) * 1996-10-08 2001-03-14 Siemens Aktiengesellschaft Verfahren und regelungsstruktur zur momentenvorsteuerung numerisch geregelter, elastischer und damit schwingungsfähiger mehrmassensysteme
US6041172A (en) * 1997-11-26 2000-03-21 Voyan Technology Multiple scale signal processing and control system
US6687658B1 (en) * 1998-09-01 2004-02-03 Agere Systems, Inc. Apparatus and method for reduced-order modeling of time-varying systems and computer storage medium containing the same
US8353738B2 (en) * 1998-11-06 2013-01-15 Semcon Tech, Llc Advanced finishing control
US7878882B2 (en) * 1999-04-01 2011-02-01 Charles J. Molnar Advanced workpiece finishing
US20130189801A1 (en) * 1998-11-06 2013-07-25 Semcon Tech, Llc Advanced finishing control
US6498694B1 (en) 1999-06-15 2002-12-24 Voyan Technology Servo error integration in read-channel equalization
JP4488569B2 (ja) 1999-12-22 2010-06-23 日本テキサス・インスツルメンツ株式会社 最短時間pll回路
US6495805B2 (en) 2000-06-30 2002-12-17 Tokyo Electron Limited Method of determining set temperature trajectory for heat treatment system
DE10036971A1 (de) * 2000-07-28 2002-02-28 Siemens Ag Verfahren zur Ferndiagnose eines technologischen Prozesses
JP4493192B2 (ja) 2000-09-13 2010-06-30 東京エレクトロン株式会社 バッチ式熱処理装置及びその制御方法
US7062357B2 (en) * 2000-09-21 2006-06-13 Mts Systems Corporation Multiple region convolver with tapering
US7377836B1 (en) 2000-10-10 2008-05-27 Beaver Creek Concepts Inc Versatile wafer refining
US6945780B2 (en) * 2001-04-02 2005-09-20 United Defense, L.P. Integrated performance simulation system for military weapon systems
US7577951B2 (en) * 2002-05-30 2009-08-18 Hewlett-Packard Development Company, L.P. Performance of computer programs while they are running
US7346113B2 (en) * 2002-07-26 2008-03-18 Texas Instruments Incorporated Method and circuit for stop of signals quantized using noise-shaping
US7328074B2 (en) * 2002-12-02 2008-02-05 United Technologies Corporation Real-time quadratic programming for control of dynamical systems
US7593880B2 (en) * 2003-03-19 2009-09-22 General Electric Company Methods and systems for analytical-based multifactor multiobjective portfolio risk optimization
US20040186804A1 (en) * 2003-03-19 2004-09-23 Anindya Chakraborty Methods and systems for analytical-based multifactor multiobjective portfolio risk optimization
US7640201B2 (en) * 2003-03-19 2009-12-29 General Electric Company Methods and systems for analytical-based multifactor Multiobjective portfolio risk optimization
US7461045B1 (en) * 2003-08-18 2008-12-02 University Of Florida Research Foundation, Inc. Optimization of spatio-temporal pattern processing for seizure warning and prediction
US8126795B2 (en) * 2004-02-20 2012-02-28 General Electric Company Systems and methods for initial sampling in multi-objective portfolio analysis
US7630928B2 (en) * 2004-02-20 2009-12-08 General Electric Company Systems and methods for multi-objective portfolio analysis and decision-making using visualization techniques
US7542932B2 (en) * 2004-02-20 2009-06-02 General Electric Company Systems and methods for multi-objective portfolio optimization
US8219477B2 (en) * 2004-02-20 2012-07-10 General Electric Company Systems and methods for multi-objective portfolio analysis using pareto sorting evolutionary algorithms
US7469228B2 (en) * 2004-02-20 2008-12-23 General Electric Company Systems and methods for efficient frontier supplementation in multi-objective portfolio analysis
US7203554B2 (en) * 2004-03-16 2007-04-10 United Technologies Corporation Model predictive controller with life extending control
US7203555B2 (en) * 2004-05-14 2007-04-10 University Of Delaware Predictive regulatory controller
US20060282178A1 (en) * 2005-06-13 2006-12-14 United Technologies Corporation System and method for solving equality-constrained quadratic program while honoring degenerate constraints
CN101322083A (zh) 2005-12-05 2008-12-10 费舍-柔斯芒特系统股份有限公司 利用并行过程仿真的多目标预测过程优化
US7376471B2 (en) * 2006-02-21 2008-05-20 United Technologies Corporation System and method for exploiting a good starting guess for binding constraints in quadratic programming with an infeasible and inconsistent starting guess for the solution
US7991499B2 (en) 2006-12-27 2011-08-02 Molnar Charles J Advanced finishing control
DE102007005070B4 (de) * 2007-02-01 2010-05-27 Klippel, Wolfgang, Dr. Anordnung und Verfahren zur optimalen Schätzung der linearen Parameter und der nichtlinearen Parameter eines Modells, das einen Wandler beschreibt
US8357286B1 (en) 2007-10-29 2013-01-22 Semcon Tech, Llc Versatile workpiece refining
WO2009114941A1 (en) * 2008-03-20 2009-09-24 University Of New Brunswick Method of multi-dimensional nonlinear control
US7885717B2 (en) * 2008-03-31 2011-02-08 Sikorsky Aircraft Corporation Fast control law optimization
US8215013B2 (en) 2008-04-11 2012-07-10 Bal Seal Engineering, Inc. Method for making a free standing axially compressed connector stack
US8096838B2 (en) 2009-03-11 2012-01-17 Bal Seal Engineering, Inc. Header assembly for implantable medical devices
US8328587B2 (en) 2009-04-20 2012-12-11 Bal Seal Engineering, Inc. In-line connector stack with testing capability
US9466915B2 (en) 2011-10-03 2016-10-11 Bal Seal Engineering, Inc. In-line connectors and related methods
GB2526806A (en) * 2014-06-03 2015-12-09 Here Global Bv Trail interpolation

Family Cites Families (31)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5716719A (en) * 1980-07-04 1982-01-28 Hitachi Ltd Method and equipment for controlling steam temperature in thermal power plant
US4599692A (en) * 1984-01-16 1986-07-08 Itt Corporation Probabilistic learning element employing context drive searching
US4620286A (en) * 1984-01-16 1986-10-28 Itt Corporation Probabilistic learning element
EP0247163B1 (de) * 1985-11-27 1992-02-05 Trustees Of Boston University System zur musterkodierung
US4814050A (en) * 1986-10-06 1989-03-21 Aluminum Company Of America Estimation and control of alumina concentration in hall cells
US4852018A (en) * 1987-01-07 1989-07-25 Trustees Of Boston University Massively parellel real-time network architectures for robots capable of self-calibrating their operating parameters through associative learning
US4881178A (en) * 1987-05-07 1989-11-14 The Regents Of The University Of Michigan Method of controlling a classifier system
US4974191A (en) * 1987-07-31 1990-11-27 Syntellect Software Inc. Adaptive natural language computer interface system
FI896219A0 (fi) * 1989-04-28 1989-12-22 Antti Aarne Ilmari Lange Anordning och foerfarande foer kalibrering av detektorsystem.
US5060132A (en) * 1989-06-13 1991-10-22 Elsag International B.V. Method of modeling and control for delignification of pulping
US5191521A (en) * 1990-06-18 1993-03-02 Controlsoft, Inc. Modular multivariable control apparatus and method
JP2539540B2 (ja) * 1990-09-19 1996-10-02 株式会社日立製作所 プロセス制御装置
US5214715A (en) * 1991-01-31 1993-05-25 Trustees Of Boston University Predictive self-organizing neural network
US5412060A (en) * 1991-08-20 1995-05-02 Bayer Aktiengesellschaft Process for the production of polycarbonate of constant viscosity
US5453226A (en) * 1992-02-05 1995-09-26 The Board Of Regents Of The University Of Oklahoma Curing of composite materials using extended heat transfer models
US6041141A (en) * 1992-09-28 2000-03-21 Matsushita Electric Industrial Co., Ltd. Character recognition machine utilizing language processing
US5377307A (en) * 1992-10-07 1994-12-27 Schlumberger Technology Corporation System and method of global optimization using artificial neural networks
US5740033A (en) * 1992-10-13 1998-04-14 The Dow Chemical Company Model predictive controller
US5355305A (en) * 1992-10-29 1994-10-11 Johnson Service Company Pattern recognition adaptive controller
US5424963A (en) * 1992-11-25 1995-06-13 Photon Research Associates, Inc. Molecular dynamics simulation method and apparatus
CA2129761A1 (en) * 1993-08-11 1995-02-12 David G. Taylor Self-tuning tracking controller for permanent-magnet synchronous motors
US5579440A (en) * 1993-11-22 1996-11-26 Brown; Robert A. Machine that learns what it actually does
US5464369A (en) * 1994-02-25 1995-11-07 Johnson Service Company Method and apparatus for estimating the rate at which a gas is generated within an enclosed space
WO1996005541A1 (en) * 1994-08-10 1996-02-22 Motorola Inc. Cascade tuning controller and method of use therefor
US5517594A (en) * 1994-10-17 1996-05-14 Relman, Inc. Thermal reactor optimization
US5748847A (en) * 1995-12-21 1998-05-05 Maryland Technology Corporation Nonadaptively trained adaptive neural systems
JP2806349B2 (ja) * 1996-03-13 1998-09-30 日本電気株式会社 スパッタ装置シミュレーション方法
US5909381A (en) * 1997-02-19 1999-06-01 Itt Manufacturing Enterprises, Inc. System of on board prediction of trajectories for autonomous navigation of GPS satellites
US6041172A (en) * 1997-11-26 2000-03-21 Voyan Technology Multiple scale signal processing and control system
US6071317A (en) * 1997-12-11 2000-06-06 Digits Corp. Object code logic analysis and automated modification system and method
US6096085A (en) * 1998-03-23 2000-08-01 The United States Of America As Represented By The Secretary Of The Navy Computer-readable software and computer-implemented method for performing an integrated sonar simulation

Also Published As

Publication number Publication date
WO1999027425A1 (en) 1999-06-03
EP1034459A4 (de) 2000-11-08
US6289508B1 (en) 2001-09-11
US6041172A (en) 2000-03-21
EP1034459A1 (de) 2000-09-13
AU1453999A (en) 1999-06-15
EP1034459B1 (de) 2005-02-09
ATE289083T1 (de) 2005-02-15
US6167360A (en) 2000-12-26
DE69828995T2 (de) 2006-01-19

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