ATE2443T1 - Verfahren zum absetzen einer selbstschmierenden, aus metallischen chalkogeniden bestehenden schicht auf unterlagen durch kathodenzerstaeubung. - Google Patents

Verfahren zum absetzen einer selbstschmierenden, aus metallischen chalkogeniden bestehenden schicht auf unterlagen durch kathodenzerstaeubung.

Info

Publication number
ATE2443T1
ATE2443T1 AT79810117T AT79810117T ATE2443T1 AT E2443 T1 ATE2443 T1 AT E2443T1 AT 79810117 T AT79810117 T AT 79810117T AT 79810117 T AT79810117 T AT 79810117T AT E2443 T1 ATE2443 T1 AT E2443T1
Authority
AT
Austria
Prior art keywords
depositioning
self
onto substrates
lubrication coating
cathode spraying
Prior art date
Application number
AT79810117T
Other languages
German (de)
English (en)
Inventor
Erich Bergmann
Georges Melet
Original Assignee
Asu Composants S.A.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asu Composants S.A. filed Critical Asu Composants S.A.
Application granted granted Critical
Publication of ATE2443T1 publication Critical patent/ATE2443T1/de

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0623—Sulfides, selenides or tellurides
    • G—PHYSICS
    • G04—HOROLOGY
    • G04B—MECHANICALLY-DRIVEN CLOCKS OR WATCHES; MECHANICAL PARTS OF CLOCKS OR WATCHES IN GENERAL; TIME PIECES USING THE POSITION OF THE SUN, MOON OR STARS
    • G04B31/00—Bearings; Point suspensions or counter-point suspensions; Pivot bearings; Single parts therefor
    • G04B31/08—Lubrication

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Physical Vapour Deposition (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
  • Coating By Spraying Or Casting (AREA)
AT79810117T 1978-10-09 1979-10-08 Verfahren zum absetzen einer selbstschmierenden, aus metallischen chalkogeniden bestehenden schicht auf unterlagen durch kathodenzerstaeubung. ATE2443T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CH1045578 1978-10-09
EP79810117A EP0010070B1 (fr) 1978-10-09 1979-10-08 Procédé pour déposer sur des substrats par pulvérisation cathodique un revêtement autolubrifiant de chalcogénures métalliques

Publications (1)

Publication Number Publication Date
ATE2443T1 true ATE2443T1 (de) 1983-03-15

Family

ID=4363410

Family Applications (1)

Application Number Title Priority Date Filing Date
AT79810117T ATE2443T1 (de) 1978-10-09 1979-10-08 Verfahren zum absetzen einer selbstschmierenden, aus metallischen chalkogeniden bestehenden schicht auf unterlagen durch kathodenzerstaeubung.

Country Status (6)

Country Link
US (1) US4324803A (enExample)
EP (1) EP0010070B1 (enExample)
JP (1) JPS55500784A (enExample)
AT (1) ATE2443T1 (enExample)
DE (1) DE2964735D1 (enExample)
WO (1) WO1980000712A1 (enExample)

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5462772A (en) * 1957-06-27 1995-10-31 Lemelson; Jerome H. Methods for forming artificial diamond
DE3266380D1 (en) * 1981-06-30 1985-10-24 Suisse Horlogerie Rech Lab Process for forming a corrosion-resistant coating of a solid lubricant
US4508608A (en) * 1983-04-21 1985-04-02 Combustion Engineering, Inc. Method for making chalcogenide cathodes
DE3516933A1 (de) * 1985-05-10 1986-11-13 Deutsche Forschungs- und Versuchsanstalt für Luft- und Raumfahrt e.V., 5300 Bonn Verfahren zum aufbringen einer mos(pfeil abwaerts)2(pfeil abwaerts)-beschichtung auf ein substrat
US4891112A (en) * 1985-11-12 1990-01-02 Eastman Kodak Company Sputtering method for reducing hillocking in aluminum layers formed on substrates
FR2638764B1 (fr) * 1988-11-04 1993-05-07 Centre Nat Rech Scient Element composite comportant une couche en chalcogenure ou oxychalcogenure de titane, utilisable en particulier comme electrode positive dans une cellule electrochimique en couches minces
CA2078245A1 (en) * 1991-09-23 1993-03-24 Roland Dubach Machining tools
FR2697317B1 (fr) * 1992-10-28 1995-01-27 Lyon Ecole Centrale Pièce mécanique de frottement lubrifiée et procédé de lubrification permettant son obtention.
US5370778A (en) * 1992-11-19 1994-12-06 Iowa State University Research Foundation, Inc. Method for preparing basal oriented molybdenum disulfide (MoS2) thin films
US5740941A (en) * 1993-08-16 1998-04-21 Lemelson; Jerome Sheet material with coating
DE19825572A1 (de) * 1998-06-08 1999-12-09 Widia Gmbh Werkzeug aus einem Grundkörper und mindestens einer hierauf abgeschiedenen Schicht sowie Verfahren zur Herstellung einer Molybdänsulfidschicht auf einem Substratkörper
GB2360790A (en) * 2000-03-28 2001-10-03 Gehan Anil Joseph Amaratunga Low friction coatings produced by cathodic arc evaporation
WO2002084362A1 (en) * 2001-04-12 2002-10-24 Omniguide Communications Inc. High index-contrast fiber waveguides and applications
JP4220253B2 (ja) * 2001-05-18 2009-02-04 ケンブリッジ・ユニバーシティ・テクニカル・サービシズ・リミテッド エレクトロルミネセンス装置
US6660136B2 (en) * 2002-03-27 2003-12-09 Micron Technology, Inc. Method of forming a non-volatile resistance variable device and method of forming a metal layer comprising silver and tungsten
WO2004049042A2 (en) * 2002-11-22 2004-06-10 Omniguide Communications Inc. Dielectric waveguide and method of making the same
EP1486582A1 (fr) * 2003-06-13 2004-12-15 Asulab S.A. Pièce de micro-mécanique à frottement réduit
DE102004015231B4 (de) * 2004-03-29 2015-12-31 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren und Vorrichtung zum Behandeln von Substratoberflächen mittels Ladungsträgerbeschuss
US20070007505A1 (en) * 2005-07-07 2007-01-11 Honeywell International Inc. Chalcogenide PVD components
US8901943B1 (en) * 2008-05-13 2014-12-02 Ronald J. Kita Gravitational attenuating material
CN102449430B (zh) * 2009-05-26 2014-04-23 乌多·W·布赫 干涂层厚度测量方法和仪器
JP6211754B2 (ja) * 2012-09-28 2017-10-11 セイコーインスツル株式会社 機械部品の製造方法、及び機械部品
US20150345010A1 (en) * 2013-09-30 2015-12-03 University Of Dayton Methods of magnetically enhanced physical vapor deposition

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH431395A (fr) * 1964-08-17 1966-09-30 Ebauches Sa Dispositif de frottement auto-lubrifiant entre deux surfaces
US4025410A (en) * 1975-08-25 1977-05-24 Western Electric Company, Inc. Sputtering apparatus and methods using a magnetic field

Also Published As

Publication number Publication date
WO1980000712A1 (fr) 1980-04-17
JPS55500784A (enExample) 1980-10-16
US4324803A (en) 1982-04-13
DE2964735D1 (en) 1983-03-17
EP0010070B1 (fr) 1983-02-09
EP0010070A1 (fr) 1980-04-16

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Legal Events

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UEP Publication of translation of european patent specification
REN Ceased due to non-payment of the annual fee