ATE174691T1 - Schnittstelle für automatisches testgerät - Google Patents

Schnittstelle für automatisches testgerät

Info

Publication number
ATE174691T1
ATE174691T1 AT96920097T AT96920097T ATE174691T1 AT E174691 T1 ATE174691 T1 AT E174691T1 AT 96920097 T AT96920097 T AT 96920097T AT 96920097 T AT96920097 T AT 96920097T AT E174691 T1 ATE174691 T1 AT E174691T1
Authority
AT
Austria
Prior art keywords
test head
handling device
kinematic
interface
test device
Prior art date
Application number
AT96920097T
Other languages
English (en)
Inventor
Alexander H Slocum
Michael A Chiu
David H Levy
Original Assignee
Aesop Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Aesop Inc filed Critical Aesop Inc
Application granted granted Critical
Publication of ATE174691T1 publication Critical patent/ATE174691T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/04—Housings; Supporting members; Arrangements of terminals
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06705—Apparatus for holding or moving single probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
    • G01R31/2887—Features relating to contacting the IC under test, e.g. probe heads; chucks involving moving the probe head or the IC under test; docking stations

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Measuring Leads Or Probes (AREA)
  • Selective Calling Equipment (AREA)
  • Automatic Analysis And Handling Materials Therefor (AREA)
  • Tests Of Electronic Circuits (AREA)
AT96920097T 1995-03-31 1996-02-27 Schnittstelle für automatisches testgerät ATE174691T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US08/414,456 US5982182A (en) 1994-09-01 1995-03-31 Interface apparatus for automatic test equipment with positioning modules incorporating kinematic surfaces

Publications (1)

Publication Number Publication Date
ATE174691T1 true ATE174691T1 (de) 1999-01-15

Family

ID=23641523

Family Applications (1)

Application Number Title Priority Date Filing Date
AT96920097T ATE174691T1 (de) 1995-03-31 1996-02-27 Schnittstelle für automatisches testgerät

Country Status (7)

Country Link
US (1) US5982182A (de)
EP (1) EP0817973B1 (de)
JP (1) JPH11503564A (de)
KR (1) KR100363762B1 (de)
AT (1) ATE174691T1 (de)
DE (1) DE69601167T2 (de)
WO (1) WO1996030772A1 (de)

Families Citing this family (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0857150B1 (de) 1995-10-13 2002-03-27 Empak, Inc. 300 mm behälter mit mikroumgebung und seitentür und erdungsleitung
US6166552A (en) * 1996-06-10 2000-12-26 Motorola Inc. Method and apparatus for testing a semiconductor wafer
US5949002A (en) * 1997-11-12 1999-09-07 Teradyne, Inc. Manipulator for automatic test equipment with active compliance
US6259262B1 (en) * 1999-03-10 2001-07-10 Delware Capital Formation, Inc. Camera system for automated verification and repair station
DE10039336C2 (de) * 2000-08-04 2003-12-11 Infineon Technologies Ag Verfahren zum Testen von Halbleiterschaltungen und Testvorrichtung zur Durchführung des Verfahrens
US6408500B1 (en) 2000-09-15 2002-06-25 James Orsillo Method of retrofitting a probe station
US6813817B2 (en) 2000-09-15 2004-11-09 James Orsillo Method of using a replacement headplate to adapt a probe station
US6741072B2 (en) * 2000-09-15 2004-05-25 James E. Orsillo Docking system for connecting a tester to a probe station using an A-type docking configuration
US7053646B2 (en) 2000-09-15 2006-05-30 Orsillo James F Apparatus and method for use in testing a semiconductor wafer
US6551122B2 (en) 2000-10-04 2003-04-22 Teradyne, Inc. Low profile pneumatically actuated docking module with power fault release
US6617867B2 (en) 2000-11-29 2003-09-09 Teradyne, Inc. Mechanism for clamping device interface board to peripheral
US6441607B1 (en) * 2000-12-01 2002-08-27 N&K Technology, Inc. Apparatus for docking a floating test stage in a terrestrial base
EP1410048B1 (de) * 2001-07-16 2010-12-29 inTEST Corporation System und verfahren zur ankopplung eines prüfkopfs
CN100374358C (zh) * 2001-11-27 2008-03-12 诚实公司 通过门形成接地线路的前开口式晶片容器
US20030162461A1 (en) * 2002-02-22 2003-08-28 Balthes Garry E. Process, composition and coating of laminate material
US6940298B2 (en) * 2002-09-30 2005-09-06 Teradyne, Inc. High fidelity electrical probe
US6836110B1 (en) * 2003-04-29 2004-12-28 National Semiconductor Corporation Universal tester to handler docking plate
KR100600482B1 (ko) * 2004-06-22 2006-07-13 삼성전자주식회사 반도체 패키지 측정용 프로브
DE102004031426A1 (de) * 2004-06-29 2006-01-26 Esmo Ag Dockingantrieb, Verriegelungselement, Dockingsystem
US7671614B2 (en) * 2005-12-02 2010-03-02 Formfactor, Inc. Apparatus and method for adjusting an orientation of probes
JP2007256117A (ja) * 2006-03-23 2007-10-04 Fujitsu Ltd プリント回路基板試験装置、プリント回路基板試験方法、プリント回路基板試験プログラム、プリント回路基板製造方法
US7733081B2 (en) * 2007-10-19 2010-06-08 Teradyne, Inc. Automated test equipment interface
US7847570B2 (en) * 2007-10-19 2010-12-07 Teradyne, Inc. Laser targeting mechanism
US8872532B2 (en) * 2009-12-31 2014-10-28 Formfactor, Inc. Wafer test cassette system
US20140317453A1 (en) 2011-07-12 2014-10-23 Intest Corporation Method and apparatus for docking a test head with a peripheral

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4303368A (en) * 1978-09-18 1981-12-01 Westinghouse Electric Corp. Remote docking apparatus
US4588346A (en) * 1982-08-25 1986-05-13 Intest Corporation Positioner for maintaining an object in a substantially weightless condition
US4705447A (en) * 1983-08-11 1987-11-10 Intest Corporation Electronic test head positioner for test systems
US5149029A (en) * 1982-08-25 1992-09-22 Intest Corporation Electronic test head positioner for test systems
US4527942A (en) * 1982-08-25 1985-07-09 Intest Corporation Electronic test head positioner for test systems
US4610020A (en) * 1984-01-06 1986-09-02 The Perkin-Elmer Corporation X-ray mask ring and apparatus for making same
DE3524348A1 (de) * 1985-07-08 1987-01-29 Heigl Helmuth Vorrichtung zum positionieren von testkoepfen
US4694230A (en) * 1986-03-11 1987-09-15 Usa As Represented By The Secretary Of Commerce Micromanipulator system
DE3615941A1 (de) * 1986-05-12 1987-11-19 Willberg Hans Heinrich Geraet zum pruefen von elektronischen bauelementen, insbesondere ic's
US4751457A (en) * 1986-09-08 1988-06-14 Tektronix, Inc. Integrated circuit probe parallelism establishing method and apparatus
US4765754A (en) * 1987-05-12 1988-08-23 The United States Of America As Represented By The Secretary Of Commerce Inclined contact recirculating roller bearing
US4973015A (en) * 1987-09-17 1990-11-27 Schlumberger Technologies, Inc. Manipulator apparatus for test head support and orientation
US4893074A (en) * 1988-05-13 1990-01-09 Intest Corporation Electronic device testing system
US4893914A (en) * 1988-10-12 1990-01-16 The Micromanipulator Company, Inc. Test station
US5091693A (en) * 1990-07-13 1992-02-25 Schlumberger Technologies, Inc. Dual-sided test head having floating contact surfaces
US5241870A (en) * 1991-07-22 1993-09-07 Intest Corporation Test head manipulator
US5479108A (en) * 1992-11-25 1995-12-26 David Cheng Method and apparatus for handling wafers
TW273635B (de) * 1994-09-01 1996-04-01 Aesop

Also Published As

Publication number Publication date
US5982182A (en) 1999-11-09
WO1996030772A1 (en) 1996-10-03
DE69601167T2 (de) 1999-07-08
KR19980703465A (ko) 1998-11-05
JPH11503564A (ja) 1999-03-26
EP0817973B1 (de) 1998-12-16
KR100363762B1 (ko) 2003-01-24
EP0817973A1 (de) 1998-01-14
DE69601167D1 (de) 1999-01-28

Similar Documents

Publication Publication Date Title
ATE174691T1 (de) Schnittstelle für automatisches testgerät
WO1998025352A3 (en) Port replicator for sharing peripherals
EP0246798A3 (de) Modulare Bearbeitungsvorrichtung zum Behandeln von Halbleiterplättchen
AU3917593A (en) Non-contact data and power connector for computer based modules
BR9305468A (pt) Sistema para transferência de dados, sistema para transferência de dados entre um dispositivo de computação e um dispositivo remoto, sistema integrado de computador e modem, processo para conexão de modem a um sistema de uma pluralidade de sistemas telefônicos, sistema de computador portátil, kit para programação e conexão de modem programável, conectado a um computador, a um de uma pluralidade de tipos diferentes de telefones celulares, e unidade exclusiva de modem portátil integrada
KR910017527A (ko) 반도체 웨이퍼등을 탑재한 보우트를 반송하는 수평수직 변환장치
TR28932A (tr) Gemilerin tekneleri üzerinde dis yüzey calismasinin gerceklestirilmesi icin yöntem ve aygit.
BR9206265A (pt) Aparelho para conectar fixamente um plugue em uma tomada de um equipamento associado com um computador conector para fixar um plugue de interface em uma tomada de um equipamento associado com um computador e dispositivo para fixar a conexão entre um plugue e uma tomada
DE69427640D1 (de) Mit Sprachausgabe ausgestattetes Prüfgerät FÜR COMPUTERGESTEUERTE GERÄTE
IT1196884B (it) Dispositivo manipolatore robotizzato ed impianto di piegatura di lamiere munito di tale dispositivo
DE3855024D1 (de) Peripheriesteuerungsmodul und Adapterschnittstelle
DE69400920D1 (de) Hinterschalenmodul fuer schnittstellensystem
DE59408468D1 (de) Schnittstellenanordnung für die Datenübertragung zwischen Trägerflugzeug und Flugkörper
DE69227108D1 (de) Datenübertragungssystem und -schnittstellenmodul und zugehörige Prioritätserzeugung
IT8867899A0 (it) Dispositivo di trasferimento di un carico tramite un elemento di sopporto montato su un perno liscio procedimenti per la sua realizzazione e giunto di trasmissione munito del dispositivo
DE69406148D1 (de) Innere notstromversorgungseinrichtung für datenverarbeitungsanlage
ATE99419T1 (de) Positionierer fuer elektronische testkoepfe von testsystemen.
WO1991008871A3 (en) A transmission coupling for a manipulator head
TR22559A (tr) Ic tabani uezerine duezenlenmis olan boru hatti sistemine sahip gemi
DE69807739D1 (de) Roboter dockvorrichtung für kassettenbibliotheksystem mit kassettenspeicheranord-nung
EP0119565A3 (en) Optical testing device for the detection of surface defects on cables or lines
MY126679A (en) Single axis manipulator with controlled compliance
IT8648473A0 (it) Dispositivo di propulsione marino e refrigeratore di fluidi per comandi idraulici per esso
DE3869965D1 (de) Anordung zum loesbaren befestigen von modulen auf einem modultraeger.
FR2577332B1 (fr) Systeme de mesure de l'utilisation de logiciel d'application sur un ordinateur ou un micro-ordinateur