ATE130636T1 - Verfahren zur abscheidung von einem aluminium als hauptbestandteil enthaltenden metallischen film mittels eines alkylaluminiumhydrids. - Google Patents
Verfahren zur abscheidung von einem aluminium als hauptbestandteil enthaltenden metallischen film mittels eines alkylaluminiumhydrids.Info
- Publication number
- ATE130636T1 ATE130636T1 AT90309832T AT90309832T ATE130636T1 AT E130636 T1 ATE130636 T1 AT E130636T1 AT 90309832 T AT90309832 T AT 90309832T AT 90309832 T AT90309832 T AT 90309832T AT E130636 T1 ATE130636 T1 AT E130636T1
- Authority
- AT
- Austria
- Prior art keywords
- deposing
- main component
- film containing
- metallic film
- aluminum hydride
- Prior art date
Links
- 238000000034 method Methods 0.000 title abstract 3
- AZDRQVAHHNSJOQ-UHFFFAOYSA-N alumane Chemical compound [AlH3] AZDRQVAHHNSJOQ-UHFFFAOYSA-N 0.000 title 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 title 1
- 229910052782 aluminium Inorganic materials 0.000 title 1
- 125000005234 alkyl aluminium group Chemical group 0.000 abstract 1
- 230000015572 biosynthetic process Effects 0.000 abstract 1
- 238000005229 chemical vapour deposition Methods 0.000 abstract 1
- 238000000151 deposition Methods 0.000 abstract 1
- 230000008021 deposition Effects 0.000 abstract 1
- 239000007789 gas Substances 0.000 abstract 1
- 239000001257 hydrogen Substances 0.000 abstract 1
- 229910052739 hydrogen Inorganic materials 0.000 abstract 1
- 125000004435 hydrogen atom Chemical class [H]* 0.000 abstract 1
- 229910052710 silicon Inorganic materials 0.000 abstract 1
- 239000010703 silicon Substances 0.000 abstract 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/06—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of metallic material
- C23C16/18—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of metallic material from metallo-organic compounds
- C23C16/20—Deposition of aluminium only
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/42—Silicides
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
- H01L21/283—Deposition of conductive or insulating materials for electrodes conducting electric current
- H01L21/285—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation
- H01L21/28506—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers
- H01L21/28512—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers on semiconductor bodies comprising elements of Group IV of the Periodic Table
- H01L21/28556—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers on semiconductor bodies comprising elements of Group IV of the Periodic Table by chemical means, e.g. CVD, LPCVD, PECVD, laser CVD
- H01L21/28562—Selective deposition
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Organic Chemistry (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Physics & Mathematics (AREA)
- Inorganic Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Electrodes Of Semiconductors (AREA)
- Chemical Vapour Deposition (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Physical Vapour Deposition (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1233927A JP2781220B2 (ja) | 1989-09-09 | 1989-09-09 | 堆積膜形成法 |
| JP1233925A JP2781219B2 (ja) | 1989-09-09 | 1989-09-09 | 堆積膜形成法 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| ATE130636T1 true ATE130636T1 (de) | 1995-12-15 |
Family
ID=26531261
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| AT90309832T ATE130636T1 (de) | 1989-09-09 | 1990-09-07 | Verfahren zur abscheidung von einem aluminium als hauptbestandteil enthaltenden metallischen film mittels eines alkylaluminiumhydrids. |
Country Status (10)
| Country | Link |
|---|---|
| EP (1) | EP0417997B1 (de) |
| KR (1) | KR940011006B1 (de) |
| AT (1) | ATE130636T1 (de) |
| DE (1) | DE69023724T2 (de) |
| DK (1) | DK0417997T3 (de) |
| ES (1) | ES2079445T3 (de) |
| GR (1) | GR3018958T3 (de) |
| MY (1) | MY107426A (de) |
| PT (1) | PT95233B (de) |
| SG (1) | SG43271A1 (de) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0498580A1 (de) * | 1991-02-04 | 1992-08-12 | Canon Kabushiki Kaisha | Verfahren zur Herstellung einer abgeschiedenen Metallschicht, die Aluminium enthält, mit Anwendung von Alkylaluminiumhalid |
| GB2320129B (en) * | 1996-06-24 | 2001-09-26 | United Microelectronics Corp | Method of fabricating an aluminium plug for contact with a semiconductor device |
-
1990
- 1990-09-06 PT PT95233A patent/PT95233B/pt not_active IP Right Cessation
- 1990-09-07 ES ES90309832T patent/ES2079445T3/es not_active Expired - Lifetime
- 1990-09-07 DE DE69023724T patent/DE69023724T2/de not_active Expired - Fee Related
- 1990-09-07 DK DK90309832.5T patent/DK0417997T3/da active
- 1990-09-07 SG SG1996006781A patent/SG43271A1/en unknown
- 1990-09-07 EP EP90309832A patent/EP0417997B1/de not_active Expired - Lifetime
- 1990-09-07 AT AT90309832T patent/ATE130636T1/de not_active IP Right Cessation
- 1990-09-08 MY MYPI90001545A patent/MY107426A/en unknown
- 1990-09-10 KR KR1019900014260A patent/KR940011006B1/ko not_active IP Right Cessation
-
1996
- 1996-02-14 GR GR960400359T patent/GR3018958T3/el unknown
Also Published As
| Publication number | Publication date |
|---|---|
| EP0417997A1 (de) | 1991-03-20 |
| KR940011006B1 (ko) | 1994-11-22 |
| PT95233A (pt) | 1991-05-22 |
| KR910007076A (ko) | 1991-04-30 |
| DE69023724T2 (de) | 1996-05-09 |
| ES2079445T3 (es) | 1996-01-16 |
| DK0417997T3 (da) | 1995-12-27 |
| DE69023724D1 (de) | 1996-01-04 |
| EP0417997B1 (de) | 1995-11-22 |
| GR3018958T3 (en) | 1996-05-31 |
| MY107426A (en) | 1995-12-30 |
| SG43271A1 (en) | 1997-10-17 |
| PT95233B (pt) | 1998-06-30 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| UEP | Publication of translation of european patent specification | ||
| REN | Ceased due to non-payment of the annual fee |