ATA9992001A - Greifwerkzeug - Google Patents

Greifwerkzeug

Info

Publication number
ATA9992001A
ATA9992001A AT0099901A AT9992001A ATA9992001A AT A9992001 A ATA9992001 A AT A9992001A AT 0099901 A AT0099901 A AT 0099901A AT 9992001 A AT9992001 A AT 9992001A AT A9992001 A ATA9992001 A AT A9992001A
Authority
AT
Austria
Prior art keywords
cross tool
tool
cross
Prior art date
Application number
AT0099901A
Other languages
English (en)
Other versions
AT412553B (de
Original Assignee
Esec Trading Sa
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Esec Trading Sa filed Critical Esec Trading Sa
Publication of ATA9992001A publication Critical patent/ATA9992001A/de
Application granted granted Critical
Publication of AT412553B publication Critical patent/AT412553B/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K13/00—Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
    • H05K13/04—Mounting of components, e.g. of leadless components
    • H05K13/0404—Pick-and-place heads or apparatus, e.g. with jaws
    • H05K13/0408—Incorporating a pick-up tool
    • H05K13/0409—Sucking devices
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/53—Means to assemble or disassemble
    • Y10T29/5313—Means to assemble electrical device
    • Y10T29/53191—Means to apply vacuum directly to position or hold work part

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Die Bonding (AREA)
  • Manipulator (AREA)
AT0099901A 2000-07-03 2001-06-27 Greifwerkzeug AT412553B (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH13092000 2000-07-03

Publications (2)

Publication Number Publication Date
ATA9992001A true ATA9992001A (de) 2004-09-15
AT412553B AT412553B (de) 2005-04-25

Family

ID=4565364

Family Applications (1)

Application Number Title Priority Date Filing Date
AT0099901A AT412553B (de) 2000-07-03 2001-06-27 Greifwerkzeug

Country Status (8)

Country Link
US (1) US6675465B2 (de)
KR (1) KR20020004830A (de)
CN (1) CN1206714C (de)
AT (1) AT412553B (de)
CH (1) CH695075A5 (de)
HK (1) HK1041560A1 (de)
SG (1) SG97183A1 (de)
TW (1) TW503456B (de)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SE526666C2 (sv) * 2002-12-30 2005-10-25 Nobel Biocare Ab Anordning och arrangemang för fixturinstallation
DE10309879B4 (de) * 2003-03-06 2006-08-31 Siemens Ag Vorrichtung zum Bestücken von Substraten mit elektrischen Bauelementen
WO2005061188A1 (ja) * 2003-12-19 2005-07-07 Matsushita Electric Industrial Co., Ltd. 部品装着ヘッド、吸着ノズル、及び吸着ノズルの製造方法
CN101172539B (zh) * 2006-11-03 2011-05-04 鸿富锦精密工业（深圳）有限公司 吸附拾取装置
US7927976B2 (en) * 2008-07-23 2011-04-19 Semprius, Inc. Reinforced composite stamp for dry transfer printing of semiconductor elements
WO2010059781A1 (en) * 2008-11-19 2010-05-27 Semprius, Inc. Printing semiconductor elements by shear-assisted elastomeric stamp transfer
US8261660B2 (en) * 2009-07-22 2012-09-11 Semprius, Inc. Vacuum coupled tool apparatus for dry transfer printing semiconductor elements
FR2967292B1 (fr) 2010-11-05 2012-10-26 Legrand France Commutateur electrique de type push-push

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5804814A (en) * 1994-05-20 1998-09-08 Musha; Toru Optical pick-up head and integrated type optical unit for use in optical pick-up head
JPS5537283A (en) * 1978-09-08 1980-03-15 Matsushita Electric Ind Co Ltd Article shifter
US4763941A (en) * 1987-06-11 1988-08-16 Unisys Corporation Automatic vacuum gripper
NL8701603A (nl) 1987-07-08 1989-02-01 Philips & Du Pont Optical Vacuuminrichting voor het vastzuigen van werkstukken.
JPH02246233A (ja) * 1989-03-20 1990-10-02 Fujitsu Ltd ダイボンダ
DE69133413D1 (de) 1990-05-07 2004-10-21 Canon Kk Substratträger des Vakuumtyps
JPH04188840A (ja) * 1990-11-22 1992-07-07 Toshiba Corp ダイボンディング方法
JPH0521584A (ja) * 1991-07-16 1993-01-29 Nikon Corp 保持装置
JPH06244269A (ja) * 1992-09-07 1994-09-02 Mitsubishi Electric Corp 半導体製造装置並びに半導体製造装置におけるウエハ真空チャック装置及びガスクリーニング方法及び窒化膜形成方法
JPH0831910A (ja) * 1994-07-18 1996-02-02 Hitachi Ltd 静電防止機能付き吸着パッドおよびその被吸着物離脱方法、ならびに静電防止機能付き吸着パッドを用いた半導体製造装置
DE19530858C1 (de) * 1995-08-22 1997-01-23 Siemens Ag Ansaugplatte für Wafer
CH695405A5 (de) * 1999-12-14 2006-04-28 Esec Trading Sa Die Bonder und Wire Bonder mit einer Ansaugvorrichtung zum Flachziehen und Niederhalten eines gewölbten Substrats.

Also Published As

Publication number Publication date
HK1041560A1 (zh) 2002-07-12
CN1206714C (zh) 2005-06-15
CN1330399A (zh) 2002-01-09
SG97183A1 (en) 2003-07-18
KR20020004830A (ko) 2002-01-16
AT412553B (de) 2005-04-25
US20030029029A1 (en) 2003-02-13
TW503456B (en) 2002-09-21
US6675465B2 (en) 2004-01-13
CH695075A5 (de) 2005-11-30

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Legal Events

Date Code Title Description
ELJ Ceased due to non-payment of the annual fee