ATA92075A - Messsonde fuer schichtdickenmessungen - Google Patents

Messsonde fuer schichtdickenmessungen

Info

Publication number
ATA92075A
ATA92075A AT92075A AT92075A ATA92075A AT A92075 A ATA92075 A AT A92075A AT 92075 A AT92075 A AT 92075A AT 92075 A AT92075 A AT 92075A AT A92075 A ATA92075 A AT A92075A
Authority
AT
Austria
Prior art keywords
layer thickness
measuring probe
thickness measurements
measurements
probe
Prior art date
Application number
AT92075A
Other languages
English (en)
Other versions
AT358292B (de
Original Assignee
Kollmorgen Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kollmorgen Corp filed Critical Kollmorgen Corp
Publication of ATA92075A publication Critical patent/ATA92075A/de
Application granted granted Critical
Publication of AT358292B publication Critical patent/AT358292B/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B15/00—Measuring arrangements characterised by the use of electromagnetic waves or particle radiation, e.g. by the use of microwaves, X-rays, gamma rays or electrons
    • G01B15/02—Measuring arrangements characterised by the use of electromagnetic waves or particle radiation, e.g. by the use of microwaves, X-rays, gamma rays or electrons for measuring thickness
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/20—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
    • G01N23/203—Measuring back scattering

Landscapes

  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Biochemistry (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electromagnetism (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Chemically Coating (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
  • Investigating And Analyzing Materials By Characteristic Methods (AREA)
AT92075A 1974-03-05 1975-02-06 Messsonde fuer schichtdickenmessungen AT358292B (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2410927A DE2410927C3 (de) 1974-03-05 1974-03-05 Meßsonde für Schichtdickenmessungen und Verfahren zur Messung der Schichtdicke bzw. der Abscheidungsgeschwindigkeit mittels dieser Sonde

Publications (2)

Publication Number Publication Date
ATA92075A true ATA92075A (de) 1980-01-15
AT358292B AT358292B (de) 1980-08-25

Family

ID=5909389

Family Applications (1)

Application Number Title Priority Date Filing Date
AT92075A AT358292B (de) 1974-03-05 1975-02-06 Messsonde fuer schichtdickenmessungen

Country Status (14)

Country Link
US (1) US4073964A (de)
JP (1) JPS5831521B2 (de)
AT (1) AT358292B (de)
AU (1) AU504747B2 (de)
CA (1) CA1022279A (de)
CH (1) CH615502A5 (de)
DE (1) DE2410927C3 (de)
ES (2) ES435290A1 (de)
FR (1) FR2263494B1 (de)
GB (1) GB1471121A (de)
IT (1) IT1045537B (de)
NL (1) NL7502625A (de)
SE (1) SE7502246L (de)
ZA (1) ZA75712B (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4283815A (en) * 1978-06-09 1981-08-18 Henshaw Brian H Button construction

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4141780A (en) * 1977-12-19 1979-02-27 Rca Corporation Optically monitoring the thickness of a depositing layer
US4477484A (en) * 1982-12-10 1984-10-16 International Business Machines Corporation Electroless plating monitor
JPS62259009A (ja) * 1985-12-12 1987-11-11 Mitsubishi Heavy Ind Ltd 放射性物質の除去状態測定方法
JPH02504529A (ja) * 1987-05-27 1990-12-20 コモンウェルス サイエンティフィック アンド インダストリアル リサーチ オーガニゼーション 金属類の電解回収の制御方法
DE3737489A1 (de) * 1987-11-02 1989-05-18 Schering Ag Verfahren zur kontrolle und/oder steuerung von metallisierungsprozessen und vorrichtung hierfuer
US4886552A (en) * 1988-09-09 1989-12-12 United Technologies Corporation Method for monitoring the removal of a metallic contaminant from the surface of a metallic article
US6684172B1 (en) * 2001-12-27 2004-01-27 Advanced Micro Devices, Inc. Sensor to predict void free films using various grating structures and characterize fill performance
US20130037405A1 (en) * 2007-10-05 2013-02-14 Intermolecular Inc. Method and System for Combinatorial Electroplating and Characterization

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3019336A (en) * 1956-06-25 1962-01-30 American Can Co Method of and apparatus for measuring coating amounts
US3147169A (en) * 1961-02-23 1964-09-01 Grumman Aircraft Engineering C Apparatus for determining thickness during chemical milling
US3503817A (en) * 1966-01-24 1970-03-31 Fmc Corp Process for controlling metal etching operation
US3475242A (en) * 1966-12-19 1969-10-28 Fmc Corp Process and apparatus for controlling metal etching operation
DE2039634B2 (de) * 1970-08-10 1972-03-09 Grundig Emv Verfahren zur messung der abscheidungsgeschwindigkeit von metallabscheidungen in reduktiven und galvanischen metalli sierungsbaedern sowie eine vorrichtung zur durchfuehrung dieses verfahrens

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4283815A (en) * 1978-06-09 1981-08-18 Henshaw Brian H Button construction

Also Published As

Publication number Publication date
AU7881475A (en) 1976-09-09
JPS50129430A (de) 1975-10-13
FR2263494B1 (de) 1978-04-21
DE2410927B2 (de) 1978-03-09
FR2263494A1 (de) 1975-10-03
ZA75712B (en) 1976-01-28
IT1045537B (it) 1980-05-10
GB1471121A (en) 1977-04-21
AU504747B2 (en) 1979-10-25
US4073964A (en) 1978-02-14
CA1022279A (en) 1977-12-06
DE2410927C3 (de) 1978-11-16
ES436462A1 (es) 1977-01-01
NL7502625A (nl) 1975-09-09
CH615502A5 (de) 1980-01-31
SE7502246L (de) 1975-09-08
DE2410927A1 (de) 1975-09-18
ES435290A1 (es) 1976-12-01
JPS5831521B2 (ja) 1983-07-06
AT358292B (de) 1980-08-25

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Legal Events

Date Code Title Description
ELJ Ceased due to non-payment of the annual fee