AT9543U1 - Verfahren zur herstellung einer elektrisch leitfähigen schicht - Google Patents

Verfahren zur herstellung einer elektrisch leitfähigen schicht Download PDF

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Publication number
AT9543U1
AT9543U1 AT0053406U AT5342006U AT9543U1 AT 9543 U1 AT9543 U1 AT 9543U1 AT 0053406 U AT0053406 U AT 0053406U AT 5342006 U AT5342006 U AT 5342006U AT 9543 U1 AT9543 U1 AT 9543U1
Authority
AT
Austria
Prior art keywords
layer
deposited
density
khz
elements
Prior art date
Application number
AT0053406U
Other languages
German (de)
English (en)
Inventor
Karl Kailer
Georg Kunschert
Stefan Schlichtherle
Georg Strauss
Original Assignee
Plansee Se
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Plansee Se filed Critical Plansee Se
Priority to AT0053406U priority Critical patent/AT9543U1/de
Priority to PCT/AT2007/000338 priority patent/WO2008003113A1/de
Priority to DK07763737T priority patent/DK2038450T3/da
Priority to JP2009516817A priority patent/JP5421101B2/ja
Priority to CN2007800256105A priority patent/CN101484606B/zh
Priority to EP07763737A priority patent/EP2038450B1/de
Priority to KR1020087031211A priority patent/KR20090031518A/ko
Publication of AT9543U1 publication Critical patent/AT9543U1/de
Priority to US12/349,735 priority patent/US20100047565A1/en
Priority to US13/419,831 priority patent/US20120171464A1/en
Priority to US14/618,127 priority patent/US10320019B2/en

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M8/00—Fuel cells; Manufacture thereof
    • H01M8/10—Fuel cells with solid electrolytes
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08—Oxides
    • C23C14/088—Oxides of the type ABO3 with A representing alkali, alkaline earth metal or Pb and B representing a refractory or rare earth metal
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M8/00—Fuel cells; Manufacture thereof
    • H01M8/02—Details
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0688—Cermets, e.g. mixtures of metal and one or more of carbides, nitrides, oxides or borides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08—Oxides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/3485—Sputtering using pulsed power to the target
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00—Electrodes
    • H01M4/86—Inert electrodes with catalytic activity, e.g. for fuel cells
    • H01M4/90—Selection of catalytic material
    • H01M4/9016—Oxides, hydroxides or oxygenated metallic salts
    • H01M4/9025—Oxides specially used in fuel cell operating at high temperature, e.g. SOFC
    • H01M4/9033—Complex oxides, optionally doped, of the type M1MeO3, M1 being an alkaline earth metal or a rare earth, Me being a metal, e.g. perovskites
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M8/00—Fuel cells; Manufacture thereof
    • H01M8/10—Fuel cells with solid electrolytes
    • H01M8/12—Fuel cells with solid electrolytes operating at high temperature, e.g. with stabilised ZrO2 electrolyte
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
    • Y02E60/30—Hydrogen technology
    • Y02E60/50—Fuel cells
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/249921—Web or sheet containing structurally defined element or component
    • Y10T428/249953—Composite having voids in a component [e.g., porous, cellular, etc.]
    • Y10T428/249967—Inorganic matrix in void-containing component
    • Y10T428/24997—Of metal-containing material
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/26—Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension
    • Y10T428/263—Coating layer not in excess of 5 mils thick or equivalent
    • Y10T428/264—Up to 3 mils
    • Y10T428/265—1 mil or less

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Metallurgy (AREA)
  • Mechanical Engineering (AREA)
  • General Chemical & Material Sciences (AREA)
  • Electrochemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Sustainable Energy (AREA)
  • Sustainable Development (AREA)
  • Manufacturing & Machinery (AREA)
  • Physical Vapour Deposition (AREA)
  • Compositions Of Oxide Ceramics (AREA)
  • Fuel Cell (AREA)
  • Non-Insulated Conductors (AREA)
AT0053406U 2006-07-07 2006-07-07 Verfahren zur herstellung einer elektrisch leitfähigen schicht AT9543U1 (de)

Priority Applications (10)

Application Number Priority Date Filing Date Title
AT0053406U AT9543U1 (de) 2006-07-07 2006-07-07 Verfahren zur herstellung einer elektrisch leitfähigen schicht
PCT/AT2007/000338 WO2008003113A1 (de) 2006-07-07 2007-07-05 Verfahren zur herstellung einer elektrisch leitfähigen schicht
DK07763737T DK2038450T3 (da) 2006-07-07 2007-07-05 Fremgangsmåde til fremstilling af et elektrisk ledende lag og et porøst bæresubstrat
JP2009516817A JP5421101B2 (ja) 2006-07-07 2007-07-05 導電性層を製作する方法
CN2007800256105A CN101484606B (zh) 2006-07-07 2007-07-05 导电层的制备方法
EP07763737A EP2038450B1 (de) 2006-07-07 2007-07-05 Verfahren zur herstellung einer elektrisch leitfähigen schicht und poröses trägersubstrat
KR1020087031211A KR20090031518A (ko) 2006-07-07 2007-07-05 전기 전도층 제조 방법
US12/349,735 US20100047565A1 (en) 2006-07-07 2009-01-07 Process for depositing an electrically conductive layer and assembly of the layer on a porous support substrate
US13/419,831 US20120171464A1 (en) 2006-07-07 2012-03-14 Porous support substrate with an electrically conductive ceramic layer
US14/618,127 US10320019B2 (en) 2006-07-07 2015-02-10 Process for producing a solid oxide fuel cell by depositing an electrically conductive and gas permeable layer on a porous support substrate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
AT0053406U AT9543U1 (de) 2006-07-07 2006-07-07 Verfahren zur herstellung einer elektrisch leitfähigen schicht

Publications (1)

Publication Number Publication Date
AT9543U1 true AT9543U1 (de) 2007-11-15

Family

ID=38456742

Family Applications (1)

Application Number Title Priority Date Filing Date
AT0053406U AT9543U1 (de) 2006-07-07 2006-07-07 Verfahren zur herstellung einer elektrisch leitfähigen schicht

Country Status (8)

Country Link
US (3) US20100047565A1 (enExample)
EP (1) EP2038450B1 (enExample)
JP (1) JP5421101B2 (enExample)
KR (1) KR20090031518A (enExample)
CN (1) CN101484606B (enExample)
AT (1) AT9543U1 (enExample)
DK (1) DK2038450T3 (enExample)
WO (1) WO2008003113A1 (enExample)

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DE102008049606A1 (de) * 2008-09-30 2010-04-01 Siemens Aktiengesellschaft Verfahren zur Verringerung der Chromdiffusion aus Chrom enthaltenden, gesinterten porösen Metallsubstraten zwecks Verwendung in einer Hochtemperatur-Brennstoffzelle bzw. Brennstoffzellenanlage
EP2333883A1 (de) 2009-11-18 2011-06-15 Forschungszentrum Jülich Gmbh (FJZ) Anode für eine Hochtemperatur-Brennstoffzelle sowie deren Herstellung
EP2325931A1 (de) * 2009-11-18 2011-05-25 Plansee Se Anordnung für eine Brennstoffzelle sowie Verfahren zu deren Herstellungen
CN103477484B (zh) * 2011-03-31 2016-07-06 株式会社村田制作所 燃料电池
KR101421245B1 (ko) * 2011-12-26 2014-07-18 한국기계연구원 금속지지형 고체산화물 연료전지의 제조방법 및 이에 의해 제조되는 금속지지형 고체산화물 연료전지
DE102012103383A1 (de) * 2012-04-18 2013-10-24 Deutsches Zentrum für Luft- und Raumfahrt e.V. Verfahren zur Herstellung eines Trägersubstrats, Trägersubstrat und elektrochemische Einrichtung
EP2808932A1 (en) 2013-05-31 2014-12-03 Topsøe Fuel Cell A/S Metal-supported solid oxide cell
US9992917B2 (en) 2014-03-10 2018-06-05 Vulcan GMS 3-D printing method for producing tungsten-based shielding parts
US9559366B2 (en) 2014-03-20 2017-01-31 Versa Power Systems Ltd. Systems and methods for preventing chromium contamination of solid oxide fuel cells
US10084192B2 (en) 2014-03-20 2018-09-25 Versa Power Systems, Ltd Cathode contact layer design for preventing chromium contamination of solid oxide fuel cells
US10116007B2 (en) 2014-05-05 2018-10-30 Daramic, Llc Lead-acid battery separators, electrodes, batteries, and methods of manufacture and use thereof
AT521011B1 (de) 2018-09-21 2019-10-15 High Tech Coatings Gmbh Bauelement mit einer zweilagigen, oxidischen Schutzschicht
CN111028977B (zh) * 2019-12-24 2021-04-20 东北大学 一种双层复合质子导体材料及其制备方法
AT523864B1 (de) 2020-05-20 2022-12-15 High Tech Coatings Gmbh Verfahren zur Herstellung einer Schutzschicht auf einem Bauelement
CN111785916B (zh) * 2020-07-29 2024-05-24 吉林大学 一种pet膜双面快速镀膜、涂覆设备
DE102021209890A1 (de) 2021-09-08 2023-03-09 Robert Bosch Gesellschaft mit beschränkter Haftung Kriechfester Stahl
DE102023210745A1 (de) 2023-10-30 2025-04-30 Robert Bosch Gesellschaft mit beschränkter Haftung Elektrochemische Zellenvorrichtung und Verfahren zur Herstellung einer elektro-chemischen Zellenvorrichtung
CN117712389B (zh) * 2024-02-18 2024-04-16 深圳市汉嵙新材料技术有限公司 多孔集流体的制备方法、制造装置、电极以及二次电池

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Also Published As

Publication number Publication date
CN101484606B (zh) 2013-03-13
US20100047565A1 (en) 2010-02-25
KR20090031518A (ko) 2009-03-26
JP2009542899A (ja) 2009-12-03
EP2038450B1 (de) 2012-09-26
DK2038450T3 (da) 2013-01-14
US20120171464A1 (en) 2012-07-05
WO2008003113A1 (de) 2008-01-10
EP2038450A1 (de) 2009-03-25
US20150155581A1 (en) 2015-06-04
US10320019B2 (en) 2019-06-11
CN101484606A (zh) 2009-07-15
JP5421101B2 (ja) 2014-02-19

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