AT264746B - Anordnung zum Aufdampfen von Interferenzschichten - Google Patents

Anordnung zum Aufdampfen von Interferenzschichten

Info

Publication number
AT264746B
AT264746B AT764866A AT764866A AT264746B AT 264746 B AT264746 B AT 264746B AT 764866 A AT764866 A AT 764866A AT 764866 A AT764866 A AT 764866A AT 264746 B AT264746 B AT 264746B
Authority
AT
Austria
Prior art keywords
arrangement
vapor deposition
interference layers
interference
layers
Prior art date
Application number
AT764866A
Other languages
English (en)
Inventor
Otto Dr Schwomma
Original Assignee
Eumig
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Eumig filed Critical Eumig
Priority to AT764866A priority Critical patent/AT264746B/de
Priority to DE19671621385 priority patent/DE1621385A1/de
Priority to CH1108767A priority patent/CH483497A/de
Priority to NL6710981A priority patent/NL6710981A/xx
Priority to GB3674167A priority patent/GB1199006A/en
Application granted granted Critical
Publication of AT264746B publication Critical patent/AT264746B/de

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50—Substrate holders
    • C23C14/505—Substrate holders for rotation of the substrates

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
AT764866A 1966-08-10 1966-08-10 Anordnung zum Aufdampfen von Interferenzschichten AT264746B (de)

Priority Applications (5)

Application Number Priority Date Filing Date Title
AT764866A AT264746B (de) 1966-08-10 1966-08-10 Anordnung zum Aufdampfen von Interferenzschichten
DE19671621385 DE1621385A1 (de) 1966-08-10 1967-08-05 Anordnung zum Aufdampfen von Interferenzschichten
CH1108767A CH483497A (de) 1966-08-10 1967-08-07 Anordnung zum Aufdampfen von Interferenzschichten
NL6710981A NL6710981A (de) 1966-08-10 1967-08-09
GB3674167A GB1199006A (en) 1966-08-10 1967-08-10 Arrangements for Depositing Interference Layers onto Concavely Curved Surfaces of Rotation

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
AT764866A AT264746B (de) 1966-08-10 1966-08-10 Anordnung zum Aufdampfen von Interferenzschichten

Publications (1)

Publication Number Publication Date
AT264746B true AT264746B (de) 1968-09-10

Family

ID=3598185

Family Applications (1)

Application Number Title Priority Date Filing Date
AT764866A AT264746B (de) 1966-08-10 1966-08-10 Anordnung zum Aufdampfen von Interferenzschichten

Country Status (5)

Country Link
AT (1) AT264746B (de)
CH (1) CH483497A (de)
DE (1) DE1621385A1 (de)
GB (1) GB1199006A (de)
NL (1) NL6710981A (de)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB8629552D0 (en) * 1986-12-10 1987-01-21 Philips Nv Television system & display tubes
USRE34131E (en) * 1986-12-10 1992-11-24 U.S. Philips Corporation Display tube having improved brightness distribution
FR2644180B1 (fr) * 1989-03-08 1991-05-10 Commissariat Energie Atomique Dispositif pour recouvrir une surface plane d'une couche d'epaisseur uniforme
AT408102B (de) * 2000-03-09 2001-09-25 Miba Gleitlager Ag Verfahren zur herstellung eines gleitelementes sowie eine vorrichtung zur beschichtung eines gleitelementes
GB2491152B (en) * 2011-05-24 2017-11-01 Qioptiq Ltd Methods and apparatuses for depositing a layer of coating material on a component

Also Published As

Publication number Publication date
CH483497A (de) 1969-12-31
NL6710981A (de) 1968-02-12
DE1621385A1 (de) 1971-05-13
GB1199006A (en) 1970-07-15

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