AR071205A1 - Microsensor resonante piezoresistivo tipo p para aplicaciones industriales en la medicion de campos magneticos - Google Patents
Microsensor resonante piezoresistivo tipo p para aplicaciones industriales en la medicion de campos magneticosInfo
- Publication number
- AR071205A1 AR071205A1 ARP090101348A ARP090101348A AR071205A1 AR 071205 A1 AR071205 A1 AR 071205A1 AR P090101348 A ARP090101348 A AR P090101348A AR P090101348 A ARP090101348 A AR P090101348A AR 071205 A1 AR071205 A1 AR 071205A1
- Authority
- AR
- Argentina
- Prior art keywords
- type
- magnetic fields
- resonant
- peszoresistive
- measurement
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/12—Measuring magnetic properties of articles or specimens of solids or fluids
- G01R33/1215—Measuring magnetisation; Particular magnetometers therefor
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
- G01R33/028—Electrodynamic magnetometers
- G01R33/0283—Electrodynamic magnetometers in which a current or voltage is generated due to relative movement of conductor and magnetic field
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
- G01R33/038—Measuring direction or magnitude of magnetic fields or magnetic flux using permanent magnets, e.g. balances, torsion devices
Landscapes
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
- Micromachines (AREA)
Abstract
Esta solicitud se refiere a un microsensor resonante piezoresistivo tipo p que utiliza el principio de la fuerza de Lorentz para medir un amplio rango de campos magnéticos (1-400G) con un alto factor de calidad (Q=842) y sensibilidad magnética (40.3 V/G) operando a presion atmosférica. El objeto de esta solicitud es proporcionar una mejora de los microsensores resonantes actuales mediante la utilizacion de una configuracion estructural placa-viga optimizada de silicio de 15 m de espesor con un puente de Wheatstone mejorado con piezoresistores dopados de boro (tipo p) y una configuracion de lazo de aluminio alrededor de la estructura placa-viga, que le permiten un mejor funcionamiento global, con un mínimo de componentes estructurales.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/MX2008/000053 WO2009128693A1 (es) | 2008-04-16 | 2008-04-16 | Microsensor resonante piezoresistivo tipo p para la medición de campos magnéticos |
Publications (1)
Publication Number | Publication Date |
---|---|
AR071205A1 true AR071205A1 (es) | 2010-06-02 |
Family
ID=40210677
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
ARP090101348A AR071205A1 (es) | 2008-04-16 | 2009-04-16 | Microsensor resonante piezoresistivo tipo p para aplicaciones industriales en la medicion de campos magneticos |
Country Status (2)
Country | Link |
---|---|
AR (1) | AR071205A1 (es) |
WO (1) | WO2009128693A1 (es) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109590767B (zh) * | 2018-11-27 | 2021-05-07 | 西北工业大学 | 带测力功能的夹具 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5923166A (en) * | 1996-04-30 | 1999-07-13 | Tau Sensors Llc | Electrically insulating cantilever magnetometer with mutually isolated and integrated thermometry, background elimination and null detection |
US5798641A (en) * | 1997-03-17 | 1998-08-25 | Quantum Design, Inc. | Torque magnetometer utilizing integrated piezoresistive levers |
US6332359B1 (en) * | 1997-04-24 | 2001-12-25 | Fuji Electric Co., Ltd. | Semiconductor sensor chip and method for producing the chip, and semiconductor sensor and package for assembling the sensor |
DE19827056A1 (de) * | 1998-06-18 | 1999-12-23 | Bosch Gmbh Robert | Mikromechanischer Magnetfeldsensor |
JP4188087B2 (ja) * | 2001-03-23 | 2008-11-26 | シュルンベルジェ ホールディングス リミテッド | 流体特性センサー |
US7221144B2 (en) * | 2004-06-07 | 2007-05-22 | General Electric Company | Micro-electromechanical system (MEMS) based current and magnetic field sensor having improved sensitivities |
WO2006021858A2 (en) * | 2004-08-24 | 2006-03-02 | Eidgenössische Technische Hochschule Zürich | Resonator-based magnetic field sensor |
-
2008
- 2008-04-16 WO PCT/MX2008/000053 patent/WO2009128693A1/es active Application Filing
-
2009
- 2009-04-16 AR ARP090101348A patent/AR071205A1/es active IP Right Grant
Also Published As
Publication number | Publication date |
---|---|
WO2009128693A1 (es) | 2009-10-22 |
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Legal Events
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FG | Grant, registration |