AR071205A1 - TYPE P PESZORESISTIVE RESONANT MICROSENSOR FOR INDUSTRIAL APPLICATIONS IN THE MEASUREMENT OF MAGNETIC FIELDS - Google Patents

TYPE P PESZORESISTIVE RESONANT MICROSENSOR FOR INDUSTRIAL APPLICATIONS IN THE MEASUREMENT OF MAGNETIC FIELDS

Info

Publication number
AR071205A1
AR071205A1 ARP090101348A ARP090101348A AR071205A1 AR 071205 A1 AR071205 A1 AR 071205A1 AR P090101348 A ARP090101348 A AR P090101348A AR P090101348 A ARP090101348 A AR P090101348A AR 071205 A1 AR071205 A1 AR 071205A1
Authority
AR
Argentina
Prior art keywords
type
magnetic fields
resonant
peszoresistive
measurement
Prior art date
Application number
ARP090101348A
Other languages
Spanish (es)
Original Assignee
Tubos De Acero De Mexico S A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tubos De Acero De Mexico S A filed Critical Tubos De Acero De Mexico S A
Publication of AR071205A1 publication Critical patent/AR071205A1/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/12—Measuring magnetic properties of articles or specimens of solids or fluids
    • G01R33/1215—Measuring magnetisation; Particular magnetometers therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/028—Electrodynamic magnetometers
    • G01R33/0283—Electrodynamic magnetometers in which a current or voltage is generated due to relative movement of conductor and magnetic field
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/038—Measuring direction or magnitude of magnetic fields or magnetic flux using permanent magnets, e.g. balances, torsion devices

Landscapes

  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
  • Micromachines (AREA)

Abstract

Esta solicitud se refiere a un microsensor resonante piezoresistivo tipo p que utiliza el principio de la fuerza de Lorentz para medir un amplio rango de campos magnéticos (1-400G) con un alto factor de calidad (Q=842) y sensibilidad magnética (40.3 V/G) operando a presion atmosférica. El objeto de esta solicitud es proporcionar una mejora de los microsensores resonantes actuales mediante la utilizacion de una configuracion estructural placa-viga optimizada de silicio de 15 m de espesor con un puente de Wheatstone mejorado con piezoresistores dopados de boro (tipo p) y una configuracion de lazo de aluminio alrededor de la estructura placa-viga, que le permiten un mejor funcionamiento global, con un mínimo de componentes estructurales.This application refers to a piezoresistive resonant microsensor type p that uses the Lorentz force principle to measure a wide range of magnetic fields (1-400G) with a high quality factor (Q = 842) and magnetic sensitivity (40.3 V / G) operating at atmospheric pressure. The purpose of this application is to provide an improvement of the current resonant microsensors by using a 15 m thick optimized silicon plate-beam structural configuration with an improved Wheatstone bridge with doped boron piezoresistors (type p) and a configuration Aluminum loop around the plate-beam structure, which allow a better overall performance, with a minimum of structural components.

ARP090101348A 2008-04-16 2009-04-16 TYPE P PESZORESISTIVE RESONANT MICROSENSOR FOR INDUSTRIAL APPLICATIONS IN THE MEASUREMENT OF MAGNETIC FIELDS AR071205A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/MX2008/000053 WO2009128693A1 (en) 2008-04-16 2008-04-16 P-type piezoresistive resonant microsensor for measuring magnetic fields

Publications (1)

Publication Number Publication Date
AR071205A1 true AR071205A1 (en) 2010-06-02

Family

ID=40210677

Family Applications (1)

Application Number Title Priority Date Filing Date
ARP090101348A AR071205A1 (en) 2008-04-16 2009-04-16 TYPE P PESZORESISTIVE RESONANT MICROSENSOR FOR INDUSTRIAL APPLICATIONS IN THE MEASUREMENT OF MAGNETIC FIELDS

Country Status (2)

Country Link
AR (1) AR071205A1 (en)
WO (1) WO2009128693A1 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109590767B (en) * 2018-11-27 2021-05-07 西北工业大学 Clamp with force measuring function

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5923166A (en) * 1996-04-30 1999-07-13 Tau Sensors Llc Electrically insulating cantilever magnetometer with mutually isolated and integrated thermometry, background elimination and null detection
US5798641A (en) * 1997-03-17 1998-08-25 Quantum Design, Inc. Torque magnetometer utilizing integrated piezoresistive levers
US6332359B1 (en) * 1997-04-24 2001-12-25 Fuji Electric Co., Ltd. Semiconductor sensor chip and method for producing the chip, and semiconductor sensor and package for assembling the sensor
DE19827056A1 (en) * 1998-06-18 1999-12-23 Bosch Gmbh Robert Micromechanical magnetic field sensor
US7434457B2 (en) * 2001-03-23 2008-10-14 Schlumberger Technology Corporation Fluid property sensors
US7221144B2 (en) * 2004-06-07 2007-05-22 General Electric Company Micro-electromechanical system (MEMS) based current and magnetic field sensor having improved sensitivities
EP1784653A2 (en) * 2004-08-24 2007-05-16 Eidgenössische Technische Hochschule Zürich Resonator-based magnetic field sensor

Also Published As

Publication number Publication date
WO2009128693A1 (en) 2009-10-22

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