AR063346A1 - Estructura conductora para sensores infrarrojos del tipo microbolometro - Google Patents

Estructura conductora para sensores infrarrojos del tipo microbolometro

Info

Publication number
AR063346A1
AR063346A1 ARP070104642A ARP070104642A AR063346A1 AR 063346 A1 AR063346 A1 AR 063346A1 AR P070104642 A ARP070104642 A AR P070104642A AR P070104642 A ARP070104642 A AR P070104642A AR 063346 A1 AR063346 A1 AR 063346A1
Authority
AR
Argentina
Prior art keywords
infrared sensors
conducting structure
microbolometer
conductive layer
microbolometer type
Prior art date
Application number
ARP070104642A
Other languages
English (en)
Original Assignee
Univ Central Florida Res Found
Sensormatic Electronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Univ Central Florida Res Found, Sensormatic Electronics Corp filed Critical Univ Central Florida Res Found
Publication of AR063346A1 publication Critical patent/AR063346A1/es

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
    • G01J5/20—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using resistors, thermistors or semiconductors sensitive to radiation, e.g. photoconductive devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
    • G01J5/20—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using resistors, thermistors or semiconductors sensitive to radiation, e.g. photoconductive devices
    • G01J2005/202—Arrays
    • G01J2005/204—Arrays prepared by semiconductor processing, e.g. VLSI

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
  • Radiation Pyrometers (AREA)

Abstract

Se puede contar con una estructura de conduccion para sensores microbolométricos de infrarrojos un método para detectar radiacion electromagnética. El microbolometro puede incluir una primera capa conductora y una segunda capa conductora. El microbolometro puede incluir además una capa bolométrica entre la primera capa conductora y la segunda capa conductora.
ARP070104642A 2006-10-19 2007-10-19 Estructura conductora para sensores infrarrojos del tipo microbolometro AR063346A1 (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US11/583,210 US7633065B2 (en) 2006-10-19 2006-10-19 Conduction structure for infrared microbolometer sensors

Publications (1)

Publication Number Publication Date
AR063346A1 true AR063346A1 (es) 2009-01-21

Family

ID=39317040

Family Applications (1)

Application Number Title Priority Date Filing Date
ARP070104642A AR063346A1 (es) 2006-10-19 2007-10-19 Estructura conductora para sensores infrarrojos del tipo microbolometro

Country Status (9)

Country Link
US (1) US7633065B2 (es)
EP (1) EP2076745A1 (es)
JP (1) JP2010507097A (es)
CN (1) CN101627290B (es)
AR (1) AR063346A1 (es)
AU (1) AU2007353817B2 (es)
CA (1) CA2666711C (es)
HK (1) HK1135766A1 (es)
WO (1) WO2008143632A1 (es)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102011056610A1 (de) * 2011-12-19 2013-06-20 Pyreos Ltd. Infrarotlichtsensorchip mit hoher Messgenauigkeit und Verfahren zum Herstellen des Infrarotlichtsensorchips
CN108458789A (zh) * 2018-04-20 2018-08-28 国家纳米科学中心 一种基于硫化钽薄膜的测辐射热计及其制备方法和用途

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5021663B1 (en) * 1988-08-12 1997-07-01 Texas Instruments Inc Infrared detector
EP0526551B1 (en) 1990-04-26 1996-12-11 The Commonwealth Of Australia Semiconductor film bolometer thermal infrared detector
JPH0894434A (ja) * 1994-09-27 1996-04-12 Matsushita Electric Works Ltd 赤外線検出素子
FR2752299B1 (fr) * 1996-08-08 1998-09-11 Commissariat Energie Atomique Detecteur infrarouge et procede de fabication de celui-ci
US5945673A (en) * 1996-08-30 1999-08-31 Raytheon Company Thermal detector with nucleation element and method
JPH10111178A (ja) * 1996-10-08 1998-04-28 Nikon Corp 熱型赤外線センサ及びこれを用いたイメージセンサ
US6087661A (en) * 1997-10-29 2000-07-11 Raytheon Company Thermal isolation of monolithic thermal detector
US6201243B1 (en) * 1998-07-20 2001-03-13 Institut National D'optique Microbridge structure and method for forming the microbridge structure
JP3303786B2 (ja) * 1998-08-13 2002-07-22 日本電気株式会社 ボロメータ型赤外線センサ
WO2000033041A1 (en) * 1998-11-30 2000-06-08 Daewoo Electronics Co., Ltd. Infrared bolometer
FR2802338B1 (fr) * 1999-12-10 2002-01-18 Commissariat Energie Atomique Dispositif de detection de rayonnement electromagnetique
JP3455146B2 (ja) * 1999-12-20 2003-10-14 シャープ株式会社 感温材料膜の製造方法および当該製造方法により製造される感温材料膜を利用した遠赤外線センサ
US6777681B1 (en) 2001-04-25 2004-08-17 Raytheon Company Infrared detector with amorphous silicon detector elements, and a method of making it
FR2861172B1 (fr) * 2003-10-15 2006-06-02 Ulis Detecteur bolometrique, dispositif de detection infrarouge mettant en oeuvre un tel detecteur bolometrique et procede de fabrication de ce detecteur
JP2006278478A (ja) * 2005-03-28 2006-10-12 Osaka Univ 赤外線センサ用薄膜、その製造方法、およびそれを用いた赤外線センサ

Also Published As

Publication number Publication date
CA2666711C (en) 2015-01-06
WO2008143632A1 (en) 2008-11-27
US20080093553A1 (en) 2008-04-24
CA2666711A1 (en) 2008-11-27
EP2076745A1 (en) 2009-07-08
JP2010507097A (ja) 2010-03-04
AU2007353817A1 (en) 2008-11-27
US7633065B2 (en) 2009-12-15
AU2007353817B2 (en) 2012-04-05
CN101627290A (zh) 2010-01-13
CN101627290B (zh) 2015-04-01
HK1135766A1 (en) 2010-06-11

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