US20010028518A1 - SiO2-coated mirror substrate for EUV - Google Patents
SiO2-coated mirror substrate for EUV Download PDFInfo
- Publication number
- US20010028518A1 US20010028518A1 US09/756,018 US75601801A US2001028518A1 US 20010028518 A1 US20010028518 A1 US 20010028518A1 US 75601801 A US75601801 A US 75601801A US 2001028518 A1 US2001028518 A1 US 2001028518A1
- Authority
- US
- United States
- Prior art keywords
- mirror
- substrate
- cover layer
- amorphous
- euv
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- G—PHYSICS
- G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
- G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
- G21K1/00—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
- G21K1/06—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating using diffraction, refraction or reflection, e.g. monochromators
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
-
- G—PHYSICS
- G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
- G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
- G21K1/00—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
- G21K1/06—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating using diffraction, refraction or reflection, e.g. monochromators
- G21K1/062—Devices having a multilayer structure
-
- G—PHYSICS
- G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
- G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
- G21K2201/00—Arrangements for handling radiation or particles
- G21K2201/06—Arrangements for handling radiation or particles using diffractive, refractive or reflecting elements
- G21K2201/061—Arrangements for handling radiation or particles using diffractive, refractive or reflecting elements characterised by a multilayer structure
-
- G—PHYSICS
- G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
- G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
- G21K2201/00—Arrangements for handling radiation or particles
- G21K2201/06—Arrangements for handling radiation or particles using diffractive, refractive or reflecting elements
- G21K2201/062—Arrangements for handling radiation or particles using diffractive, refractive or reflecting elements the element being a crystal
-
- G—PHYSICS
- G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
- G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
- G21K2201/00—Arrangements for handling radiation or particles
- G21K2201/06—Arrangements for handling radiation or particles using diffractive, refractive or reflecting elements
- G21K2201/067—Construction details
Definitions
- This invention relates to a mirror substrate, a mirror with such a mirror substrate, and a production process therefor, and also an EUV projection exposure device therewith.
- Monocrystalline silicon is a preferred substrate material for robust mirrors with a high thermal loading and best shape stability.
- EUV mirrors are preferred applications in EUV lithography, for the mirrors of illumination, mask and projection objective. Their quality of polishing is then decisive for the usability of the whole system. This follows, e.g., from K. Hoh, Bull. Electrotechn. Lab. 49, No. 12, October 1985, pp. 47-54; T. E. Jewell et al., Proc. SPIE, Vol. 1527 (1991); and David M. Williamson, OSA IODC Conference Paper LWA 2-1, pp. 181-184, Jun. 10, 1998.
- An X-ray mirror is known from Japanese Patent Document JP-B2-96/032 592, in which a matrix with sintered SiC is coated with crystalline SiC, by which means a precisely smooth surface is obtained.
- the invention has as its object the provision of a mirror substrate which combines the positive properties of the silicon single crystal substrate with outstanding “superpolish” properties.
- a mirror substrate of crystal wherein an amorphous cover layer is applied to the substrate, and the amorphous cover layer is covered with a multilayer reflecting layer.
- a thin, amorphous layer e.g. of quartz glass, amorphous SiO 2 , or Al 2 O 3 , is applied to a substrate member comprising a crystal with low thermal expansion and high thermal conductivity (diamond, BN, SiC, silicon, as examples).
- a cover layer which is known to be well suited for “super-polish” is thereby prepared, without impairing the other properties of the substrate.
- the invention also includes the following features:
- the substrate comprises at least one of the following materials: diamond, BN, SiC, or silicon.
- the cover layer comprises at least one of the following amorphous materials: quartz glass, SiO 2 or Al 2 O 3 .
- the amorphous cover layer has a thickness in the range of 1 ⁇ m through 100 ⁇ m.
- the micro-roughness of the amorphous cover layer is in the angstrom range.
- the multilayer reflection layers are constituted for a wavelength region of 10 nm to 20 nm, preferably 13 nm.
- the mirror has a curved surface.
- a substrate of crystal is shaped close to the final contour, an amorphous cover layer is deposited on the mirror side of the substrate, an optical final polishing takes place and a multilayer reflecting layer is applied.
- the amorphous cover layer is deposited by means of CVD.
- Application of mirrors according to the invention in EUV projection exposure devices comprises an EUV projection exposure device with an EUV source, an illuminating optics, a mask, a projection objective, and a wafer, wherein at least one mirror according to the invention is contained in the illuminating optics or in the projection objective.
- FIG. 1 shows schematically an EUV projection exposure device according to the invention.
- EUV projection exposure device includes a EUV source 1 , e.g., a synchrotron or a laser plasma focus source, which produces a EUV beam 2 with, e.g., 13 nm wavelength, or another wavelength in the preferred range of about 10-20 nm, for which suitable multilayer reflecting layers (see the reflecting layer 533 , below) are available.
- EUV source 1 e.g., a synchrotron or a laser plasma focus source
- a EUV beam 2 with, e.g., 13 nm wavelength, or another wavelength in the preferred range of about 10-20 nm, for which suitable multilayer reflecting layers (see the reflecting layer 533 , below) are available.
- An illuminating optics 3 serves for the suitable shaping of the EUV light as regards light conducting value, pupil filling, homogeneity, telecentricity, and the like.
- the mask 4 is thereby illuminated, shown as a transmission mask, but in many cases, however, preferably as a reflection mask.
- This mask 4 is imaged on a reduced scale by a projection objective 5 onto the object 6 , the wafer.
- the projection objective 5 contains, as in many known designs, four curved mirrors 51 , 52 , 53 , 54 .
- the structure according to the invention is representatively shown on mirror 53 of these, with the silicon single crystal substrate 531 , a thin cover layer 532 of amorphous quartz, which with “super-polish” defines the highly accurate final contour of the mirror 53 , and the multilayer reflecting layer 533 .
- the latter provides, as a distributed Bragg reflector, a relatively high reflectivity of about 40-60% for a given spectral region.
- the shape of the substrate 531 is determined by the requirements of mechanical stability, cooling, installation into a mount, matching to the beam path (vignetting), and the like.
- the usable surface is first precisely optically polished to near the final contour.
- the thin amorphous quartz layer is then deposited.
- the CVD process for example, is suitable for this. Deformations of the mirror surfaces due to strains in the layer 532 can be kept to a minimum by the process parameters and after-treatments. They can be kept to a minimum by deflection during the shaping of the substrate 531 and by corresponding polishing of the quartz layer 532 .
- the amorphous quartz layer 532 thus does not serve as an adhesive base, diffusion barrier, or similar auxiliary layer of the multilayer reflection layers 533 , but rather as the material which supports the contour of the mirror 53 .
- a reflection layer 533 constructed as a multilayer EUV reflection layer, is then arranged on this layer 532 in a known manner.
- Mirrors constructed in this manner can of course be used at any other place of the projection exposure device and also in other devices, e.g., X-ray microscopes or telescopes.
- Each material of the substrate member, which is used for the “bulk”, such as the above mentioned materials of low thermal expansion and at the same time high thermal conductivity, can be provided with a thin cover layer of material which can well be polished to optical quality. Conformity as regards adhesion properties, strains, corrosion, and the like can be attained with known criteria.
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Nanotechnology (AREA)
- High Energy & Nuclear Physics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Theoretical Computer Science (AREA)
- Mathematical Physics (AREA)
- Optical Elements Other Than Lenses (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Abstract
Description
- This is a continuation of PCT/EP99/04209, which is pending.
- Not applicable.
- Not applicable.
- 1. Field of the Invention
- This invention relates to a mirror substrate, a mirror with such a mirror substrate, and a production process therefor, and also an EUV projection exposure device therewith.
- Monocrystalline silicon is a preferred substrate material for robust mirrors with a high thermal loading and best shape stability.
- For applications in the X-ray region, in particular for soft X-radiation, also termed “extreme ultraviolet” (EUV), extremely smooth surfaces with micro-roughness values in the angstrom range are required. This is attained with so-called “super-polish”.
- It has been found by experience that silicon substrates can be homogeneously polished to this standard only poorly or not at all homogeneously over sufficiently large surfaces, particularly in the case of strongly curved surfaces.
- 2. Discussion of Relevant Art
- The preferred application of such EUV mirrors is in EUV lithography, for the mirrors of illumination, mask and projection objective. Their quality of polishing is then decisive for the usability of the whole system. This follows, e.g., from K. Hoh, Bull. Electrotechn. Lab. 49, No. 12, October 1985, pp. 47-54; T. E. Jewell et al., Proc. SPIE, Vol. 1527 (1991); and David M. Williamson, OSA IODC Conference Paper LWA 2-1, pp. 181-184, Jun. 10, 1998.
- An X-ray mirror is known from Japanese Patent Document JP-B2-96/032 592, in which a matrix with sintered SiC is coated with crystalline SiC, by which means a precisely smooth surface is obtained.
- The invention has as its object the provision of a mirror substrate which combines the positive properties of the silicon single crystal substrate with outstanding “superpolish” properties.
- This object is attained by a mirror substrate of crystal, wherein an amorphous cover layer is applied to the substrate, and the amorphous cover layer is covered with a multilayer reflecting layer. According to one feature of the invention, a thin, amorphous layer, e.g. of quartz glass, amorphous SiO2, or Al2O3, is applied to a substrate member comprising a crystal with low thermal expansion and high thermal conductivity (diamond, BN, SiC, silicon, as examples). A cover layer which is known to be well suited for “super-polish” is thereby prepared, without impairing the other properties of the substrate.
- The invention also includes the following features:
- The substrate comprises at least one of the following materials: diamond, BN, SiC, or silicon.
- The cover layer comprises at least one of the following amorphous materials: quartz glass, SiO2 or Al2O3.
- The amorphous cover layer has a thickness in the range of 1 μm through 100 μm.
- The micro-roughness of the amorphous cover layer is in the angstrom range.
- The multilayer reflection layers are constituted for a wavelength region of 10 nm to 20 nm, preferably 13 nm.
- The mirror has a curved surface.
- In a production process for such a mirror, a substrate of crystal is shaped close to the final contour, an amorphous cover layer is deposited on the mirror side of the substrate, an optical final polishing takes place and a multilayer reflecting layer is applied.
- The amorphous cover layer is deposited by means of CVD.
- Application of mirrors according to the invention in EUV projection exposure devices comprises an EUV projection exposure device with an EUV source, an illuminating optics, a mask, a projection objective, and a wafer, wherein at least one mirror according to the invention is contained in the illuminating optics or in the projection objective.
- The invention will be described in more detail with reference to the drawing:
- FIG. 1 shows schematically an EUV projection exposure device according to the invention.
- The structure of such a EUV projection exposure device is known per se in numerous variants, e.g. from the above-cited reference Jewell and Williamson and the references cited therein. It includes a EUV source1, e.g., a synchrotron or a laser plasma focus source, which produces a
EUV beam 2 with, e.g., 13 nm wavelength, or another wavelength in the preferred range of about 10-20 nm, for which suitable multilayer reflecting layers (see the reflectinglayer 533, below) are available. - An
illuminating optics 3 serves for the suitable shaping of the EUV light as regards light conducting value, pupil filling, homogeneity, telecentricity, and the like. The mask 4 is thereby illuminated, shown as a transmission mask, but in many cases, however, preferably as a reflection mask. This mask 4 is imaged on a reduced scale by aprojection objective 5 onto theobject 6, the wafer. - The
projection objective 5 contains, as in many known designs, fourcurved mirrors mirror 53 of these, with the siliconsingle crystal substrate 531, athin cover layer 532 of amorphous quartz, which with “super-polish” defines the highly accurate final contour of themirror 53, and themultilayer reflecting layer 533. The latter provides, as a distributed Bragg reflector, a relatively high reflectivity of about 40-60% for a given spectral region. - The shape of the
substrate 531 is determined by the requirements of mechanical stability, cooling, installation into a mount, matching to the beam path (vignetting), and the like. The usable surface is first precisely optically polished to near the final contour. The thin amorphous quartz layer is then deposited. The CVD process, for example, is suitable for this. Deformations of the mirror surfaces due to strains in thelayer 532 can be kept to a minimum by the process parameters and after-treatments. They can be kept to a minimum by deflection during the shaping of thesubstrate 531 and by corresponding polishing of thequartz layer 532. - The
amorphous quartz layer 532 thus does not serve as an adhesive base, diffusion barrier, or similar auxiliary layer of themultilayer reflection layers 533, but rather as the material which supports the contour of themirror 53. - The final shaping processing, the so-called “super-polish”, thus follows after the coating with the
quartz layer 532. - A
reflection layer 533, constructed as a multilayer EUV reflection layer, is then arranged on thislayer 532 in a known manner. - Mirrors constructed in this manner can of course be used at any other place of the projection exposure device and also in other devices, e.g., X-ray microscopes or telescopes.
- Each material of the substrate member, which is used for the “bulk”, such as the above mentioned materials of low thermal expansion and at the same time high thermal conductivity, can be provided with a thin cover layer of material which can well be polished to optical quality. Conformity as regards adhesion properties, strains, corrosion, and the like can be attained with known criteria.
Claims (11)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19830449A DE19830449A1 (en) | 1998-07-08 | 1998-07-08 | SiO¶2¶ coated mirror substrate for EUV |
DE19830449.8 | 1998-07-08 | ||
PCT/EP1999/004209 WO2000003400A1 (en) | 1998-07-08 | 1999-06-17 | SiO2 COATED MIRROR SUBSTRATE FOR EUV |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/EP1999/004209 Continuation WO2000003400A1 (en) | 1998-07-08 | 1999-06-17 | SiO2 COATED MIRROR SUBSTRATE FOR EUV |
Publications (2)
Publication Number | Publication Date |
---|---|
US20010028518A1 true US20010028518A1 (en) | 2001-10-11 |
US6453005B2 US6453005B2 (en) | 2002-09-17 |
Family
ID=7873305
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US09/756,018 Expired - Lifetime US6453005B2 (en) | 1998-07-08 | 2001-01-05 | SiO2-coated mirror substrate for EUV |
Country Status (7)
Country | Link |
---|---|
US (1) | US6453005B2 (en) |
EP (1) | EP1095379B1 (en) |
JP (1) | JP2002520601A (en) |
KR (1) | KR20010079499A (en) |
DE (2) | DE19830449A1 (en) |
TW (1) | TWI235245B (en) |
WO (1) | WO2000003400A1 (en) |
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20040174624A1 (en) * | 2001-06-02 | 2004-09-09 | Martin Weiser | Reflecting device for electromagnetic waves |
US20040202278A1 (en) * | 2001-08-16 | 2004-10-14 | Carl-Zeiss Stiftung Trading As Schott-Glas And Carl Zeiss Smt Ag | Substrate material for X-ray optical components |
US7145739B1 (en) | 2002-03-07 | 2006-12-05 | The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration | Lightweight optical mirrors formed in single crystal substrate |
US20080192223A1 (en) * | 2007-02-14 | 2008-08-14 | Carl Zeiss Smt Ag | Method of producing a diffractive optical element and diffractive optical element produced by such a method |
US20080280539A1 (en) * | 2007-05-11 | 2008-11-13 | Asml Holding N.V. | Optical component fabrication using amorphous oxide coated substrates |
US20080318066A1 (en) * | 2007-05-11 | 2008-12-25 | Asml Holding N.V. | Optical Component Fabrication Using Coated Substrates |
WO2012101090A1 (en) * | 2011-01-25 | 2012-08-02 | Carl Zeiss Smt Gmbh | Process for producing a substrate for a reflective optical element for euv lithography |
US20130052468A1 (en) * | 2011-08-31 | 2013-02-28 | United Of America As Represented By The Administrator Of The National Ae | Method of making lightweight, single crystal mirror |
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WO2001008163A1 (en) | 1999-07-22 | 2001-02-01 | Corning Incorporated | Extreme ultraviolet soft x-ray projection lithographic method system and lithography elements |
DE10021075A1 (en) * | 2000-04-28 | 2001-10-31 | Max Planck Gesellschaft | Use of semiconductor single crystal as X-ray component, especially as monochromator and/or reflector of X-ray radiation |
US7843632B2 (en) * | 2006-08-16 | 2010-11-30 | Cymer, Inc. | EUV optics |
US6855380B2 (en) | 2001-05-18 | 2005-02-15 | Carl Zeiss Smt Ag | Method for the production of optical components with increased stability, components obtained thereby and their use |
DE10132819B4 (en) * | 2001-05-18 | 2006-04-13 | Carl Zeiss Smt Ag | Optical component manufacturing method e.g. for light guiding bar, involves abrading coating layer on surface of optical component having base material with optically active three-dimensional shape |
EP1401323A4 (en) | 2001-05-31 | 2009-06-03 | Image Navigation Ltd | Image guided implantology methods |
DE10163965B4 (en) * | 2001-08-29 | 2004-09-16 | Bte Bedampfungstechnik Gmbh | Light blocking coating for projection purposes and process for their production |
US20030206532A1 (en) | 2002-05-06 | 2003-11-06 | Extricom Ltd. | Collaboration between wireless lan access points |
US7129010B2 (en) * | 2002-08-02 | 2006-10-31 | Schott Ag | Substrates for in particular microlithography |
EP1598681A3 (en) * | 2004-05-17 | 2006-03-01 | Carl Zeiss SMT AG | Optical component with curved surface and multi-layer coating |
DE102004060184A1 (en) * | 2004-12-14 | 2006-07-06 | Carl Zeiss Smt Ag | Extreme ultraviolet mirror arrangement used in the semiconductor industry comprises a mirror substrate supporting dielectric layers and an electrically insulating heat transfer layer and a substrate support |
WO2009024181A1 (en) * | 2007-08-20 | 2009-02-26 | Optosic Ag | Method of manufacturing and processing silicon carbide scanning mirrors |
DE102009040785A1 (en) * | 2009-09-09 | 2011-03-10 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Substrate made of an aluminum-silicon alloy or crystalline silicon, metal mirror, process for its preparation and its use |
DE102009049640B4 (en) * | 2009-10-15 | 2012-05-31 | Carl Zeiss Smt Gmbh | Projection objective for a microlithographic EUV projection exposure machine |
DE102011080636A1 (en) | 2010-09-27 | 2012-03-29 | Carl Zeiss Smt Gmbh | Extreme UV (EUV) mirror for projection exposure system, has heat conducting layer having preset values of absolute and specific heat conductivity and average thickness, that is arranged between substrate and layer stack |
US8588844B2 (en) | 2010-11-04 | 2013-11-19 | Extricom Ltd. | MIMO search over multiple access points |
DE102011015141A1 (en) | 2011-03-16 | 2012-09-20 | Carl Zeiss Laser Optics Gmbh | Method for producing a reflective optical component for an EUV projection exposure apparatus and such a component |
DE102011080408A1 (en) | 2011-08-04 | 2013-02-07 | Carl Zeiss Smt Gmbh | Support for mirror of extreme UV-projection exposure system used in microlithography process to produce small structure in e.g. nanometer range, has actuators associated to bipod holder, mirror connection and support elements as compensator |
JP6329157B2 (en) * | 2012-10-12 | 2018-05-23 | ローレンス リバモア ナショナル セキュリティー, エルエルシー | Optical substrate flattening |
US9933617B2 (en) | 2014-05-21 | 2018-04-03 | Us Synthetic Corporation | Mirror including polycrystalline diamond body for use with a motor, scanning systems including the same, and related methods |
DE102014219775A1 (en) | 2014-09-30 | 2014-12-31 | Carl Zeiss Smt Gmbh | MIRROR SUBSTRATE FOR A MIRROR OF AN EUV PROJECTION EXPOSURE PLANT AND METHOD FOR THE PRODUCTION THEREOF |
DE102018207759A1 (en) * | 2018-05-17 | 2019-11-21 | Carl Zeiss Smt Gmbh | A method of manufacturing an optical element and reflective optical element substrate |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5317069A (en) * | 1976-07-30 | 1978-02-16 | Fujitsu Ltd | Semiconductor device and its production |
JPS6453408A (en) * | 1987-08-25 | 1989-03-01 | Hitachi Ltd | Manufacture of single crystal multilayer film |
JPH04190200A (en) * | 1990-11-22 | 1992-07-08 | Ishikawajima Harima Heavy Ind Co Ltd | Multiple layer film mirror for vacuum ultra-violet region and its fabrication |
JPH0567525A (en) * | 1991-09-06 | 1993-03-19 | Tdk Corp | Magnetic laminated body, its manufacture, and manufacture of magneto-resistance effect element |
JPH09318800A (en) * | 1996-05-28 | 1997-12-12 | Japan Aviation Electron Ind Ltd | Multilayer film mirror for x-ray |
-
1998
- 1998-07-08 DE DE19830449A patent/DE19830449A1/en not_active Withdrawn
-
1999
- 1999-06-17 KR KR1020017000156A patent/KR20010079499A/en active IP Right Grant
- 1999-06-17 DE DE59902673T patent/DE59902673D1/en not_active Expired - Lifetime
- 1999-06-17 JP JP2000559570A patent/JP2002520601A/en not_active Withdrawn
- 1999-06-17 WO PCT/EP1999/004209 patent/WO2000003400A1/en active IP Right Grant
- 1999-06-17 EP EP99931093A patent/EP1095379B1/en not_active Expired - Lifetime
- 1999-07-02 TW TW088111300A patent/TWI235245B/en not_active IP Right Cessation
-
2001
- 2001-01-05 US US09/756,018 patent/US6453005B2/en not_active Expired - Lifetime
Cited By (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20040174624A1 (en) * | 2001-06-02 | 2004-09-09 | Martin Weiser | Reflecting device for electromagnetic waves |
US7077533B2 (en) | 2001-06-02 | 2006-07-18 | Carl Zeiss Smt Ag | Reflecting device for electromagnetic waves |
US20040202278A1 (en) * | 2001-08-16 | 2004-10-14 | Carl-Zeiss Stiftung Trading As Schott-Glas And Carl Zeiss Smt Ag | Substrate material for X-ray optical components |
US7031428B2 (en) | 2001-08-16 | 2006-04-18 | Carl-Zeiss Smt Ag | Substrate material for X-ray optical components |
US7145739B1 (en) | 2002-03-07 | 2006-12-05 | The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration | Lightweight optical mirrors formed in single crystal substrate |
US20080192223A1 (en) * | 2007-02-14 | 2008-08-14 | Carl Zeiss Smt Ag | Method of producing a diffractive optical element and diffractive optical element produced by such a method |
US8259392B2 (en) | 2007-02-14 | 2012-09-04 | Carl Zeiss Smt Gmbh | Method of producing a diffractive optical element and diffractive optical element produced by such a method |
US20080280539A1 (en) * | 2007-05-11 | 2008-11-13 | Asml Holding N.V. | Optical component fabrication using amorphous oxide coated substrates |
US20080318066A1 (en) * | 2007-05-11 | 2008-12-25 | Asml Holding N.V. | Optical Component Fabrication Using Coated Substrates |
WO2012101090A1 (en) * | 2011-01-25 | 2012-08-02 | Carl Zeiss Smt Gmbh | Process for producing a substrate for a reflective optical element for euv lithography |
US20130052468A1 (en) * | 2011-08-31 | 2013-02-28 | United Of America As Represented By The Administrator Of The National Ae | Method of making lightweight, single crystal mirror |
US9075188B2 (en) * | 2011-08-31 | 2015-07-07 | The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration | Method of making lightweight, single crystal mirror |
Also Published As
Publication number | Publication date |
---|---|
DE59902673D1 (en) | 2002-10-17 |
EP1095379B1 (en) | 2002-09-11 |
TWI235245B (en) | 2005-07-01 |
US6453005B2 (en) | 2002-09-17 |
KR20010079499A (en) | 2001-08-22 |
WO2000003400A1 (en) | 2000-01-20 |
JP2002520601A (en) | 2002-07-09 |
EP1095379A1 (en) | 2001-05-02 |
DE19830449A1 (en) | 2000-01-27 |
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