JPS57206804A - Measuring method and device for temperature correcting type film thickness - Google Patents
Measuring method and device for temperature correcting type film thicknessInfo
- Publication number
- JPS57206804A JPS57206804A JP9200181A JP9200181A JPS57206804A JP S57206804 A JPS57206804 A JP S57206804A JP 9200181 A JP9200181 A JP 9200181A JP 9200181 A JP9200181 A JP 9200181A JP S57206804 A JPS57206804 A JP S57206804A
- Authority
- JP
- Japan
- Prior art keywords
- film
- thickness
- film thickness
- measuring method
- type film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
- G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9200181A JPS57206804A (en) | 1981-06-15 | 1981-06-15 | Measuring method and device for temperature correcting type film thickness |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9200181A JPS57206804A (en) | 1981-06-15 | 1981-06-15 | Measuring method and device for temperature correcting type film thickness |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS57206804A true JPS57206804A (en) | 1982-12-18 |
Family
ID=14042174
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9200181A Pending JPS57206804A (en) | 1981-06-15 | 1981-06-15 | Measuring method and device for temperature correcting type film thickness |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS57206804A (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60203806A (ja) * | 1984-03-28 | 1985-10-15 | Kanegafuchi Chem Ind Co Ltd | フイルム類の偏肉測定方法 |
JPH04233745A (ja) * | 1990-08-09 | 1992-08-21 | Applied Materials Inc | ウェーハ上に堆積される薄膜の厚さをその場で測定する方法及び装置 |
-
1981
- 1981-06-15 JP JP9200181A patent/JPS57206804A/ja active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60203806A (ja) * | 1984-03-28 | 1985-10-15 | Kanegafuchi Chem Ind Co Ltd | フイルム類の偏肉測定方法 |
JPH04233745A (ja) * | 1990-08-09 | 1992-08-21 | Applied Materials Inc | ウェーハ上に堆積される薄膜の厚さをその場で測定する方法及び装置 |
JPH07101704B2 (ja) * | 1990-08-09 | 1995-11-01 | アプライド マテリアルズ インコーポレイテッド | ウェーハ上に堆積される薄膜の厚さをその場で測定する方法及び装置 |
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