JPS57206805A - Measuring device for film thickness - Google Patents
Measuring device for film thicknessInfo
- Publication number
- JPS57206805A JPS57206805A JP9200281A JP9200281A JPS57206805A JP S57206805 A JPS57206805 A JP S57206805A JP 9200281 A JP9200281 A JP 9200281A JP 9200281 A JP9200281 A JP 9200281A JP S57206805 A JPS57206805 A JP S57206805A
- Authority
- JP
- Japan
- Prior art keywords
- chopper
- choppers
- filter
- reflected
- measured
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
- G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
PURPOSE:To enable to obtain a film thickness as a corrected value, by a method wherein, using two choppers, an optical path is controlled, a parameter, being necessary to computation of temperature and reference radiation amount, is continuously measured to convert it into an electric signal, and computable measurements are generated. CONSTITUTION:Reference infrared rays from a black body furnace 1 pass a stop 2, a filter 3, a chopper 4, a semitransparent mirror 5, a collecting lens 7, a chopper 8, a stop 9, and a protecting window material 11, and are reflected by a film 12 formed to a metal material 13 such as iron plate. Reflected light, reflected by a concave mirror 10, returns to an optical path, and the light, fetched by a semitransparent mirror 5, reaches a detector 6. With the chopper 4 closed and the chopper 8 opened, only heat radiation from a surface 1 to be measured is detected to use it as a temperature correction value. If a substance, corresponding to the material of the surface to be measured is selected as a filter 3, a thickness signal is obtained by means of a spectral diffraction of a film through the filter. With the two choppers closed, a disturbance signal between the choppers is obtained.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9200281A JPS57206805A (en) | 1981-06-15 | 1981-06-15 | Measuring device for film thickness |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9200281A JPS57206805A (en) | 1981-06-15 | 1981-06-15 | Measuring device for film thickness |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS57206805A true JPS57206805A (en) | 1982-12-18 |
Family
ID=14042214
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9200281A Pending JPS57206805A (en) | 1981-06-15 | 1981-06-15 | Measuring device for film thickness |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS57206805A (en) |
-
1981
- 1981-06-15 JP JP9200281A patent/JPS57206805A/en active Pending
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