JP4614749B2 - Metal mask setting method and apparatus - Google Patents

Description

  The present invention provides, for example, a metal mask having a large number of elongated openings arranged in parallel, such as a metal mask used in a vapor deposition mask used in an organic EL element manufacturing process, as an apparatus for handling the metal mask. On the other hand, the present invention relates to a method and an apparatus for setting an opening so as to be accurately in a predetermined direction.

  Conventionally, vacuum evaporation is performed in the manufacture of organic EL elements, and a metal mask having a mask portion having a large number of elongated minute openings arranged in parallel is used as the evaporation mask. In vapor deposition, the metal mask is attached to a frame having a large rigidity having an opening larger than that of the mask by a magnet or the like. However, in recent years, when the patterning has been miniaturized and the openings formed in the mask portion have become finer and the thickness of the metal mask itself has become thinner, the metal mask is simply attached to a frame-like frame with a magnet or the like. Only by using and fixing, there arises a problem that the mask portion is distorted or sag, and the accuracy of the opening cannot be maintained. Therefore, the present applicant first developed a metal mask holding jig that can hold the metal mask in the longitudinal direction of the opening of the mask portion with the metal mask attached to the frame. (See Patent Document 1). By using this holding jig, it is possible to hold the thin wire portion (non-hole portion) between the openings of the mask portion in a state of being pulled in the longitudinal direction, so that the openings can be held in a straight line and at a constant pitch. The advantage that patterning is possible is obtained.

  However, the metal mask described in Patent Document 1 has a problem that productivity is poor because only one mask portion is formed on one metal mask. In order to increase productivity, a multifaceted metal mask in which a plurality of mask portions are formed on a single metal mask may be used. However, in a multifaceted metal mask, simply holding both ends and pulling the metal mask Even if the entire width of the mask is pulled evenly, the mask portion and the non-mask portion have different rigidity, so that the mask portion is distorted and slack, and the desired opening pattern cannot be obtained. Turned out to be worse. For example, in the case of a multi-face mask for vapor deposition used for manufacturing an organic EL element, a total pitch of ± 10 μm or less may be required for the position of each mask portion, but it is difficult to achieve such dimensional accuracy. .

  Therefore, as a result of studies to solve this problem, as shown in FIG. 11A, each of the four sides of the metal mask 1 of the metal mask 1 having the plurality of mask portions 2 is clamped by a plurality of clamps (not shown). ), Tension is applied to the metal mask 1 as indicated by an arrow T by each clamp, and the tension T is adjusted for each clamp, thereby making the metal mask 1 flat without distortion or sagging, It has been found that the openings of each mask portion 2 can be held linearly and at a constant pitch. In addition, tension is applied to the metal mask 1 to make it flat, and in that state, the metal mask is fixed to the frame-like frame by spot welding or the like, so that the metal mask is tensioned and flat even after the clamp is removed. It has been found that the multi-face mask can be held in a state free from distortion and sagging using a frame having a simple structure. And based on these knowledge, it is equipped with a plurality of tension units arranged so that tension can be applied by holding a plurality of locations on each of the four sides of the metal mask with a clamp, and the plurality of tension units We have developed a mask frame pasting device equipped with welding means for spot welding a metal mask that is gripped and tensioned to a frame-shaped frame.

  However, in this mask frame pasting apparatus, when the metal mask 1 is held by clamps of a plurality of tension units provided corresponding to each of the four sides, the metal mask is exaggerated as shown in FIG. If the direction of the elongated opening formed in 1 is a direction inclined with respect to the pulling direction by the clamp, the metal mask is deformed like a parallelogram when tension is applied to the metal mask, It has been found that there is a problem that high accuracy cannot be achieved due to the phenomenon that the position of the mask portion 2 is shifted or that the direction of the opening formed in the mask portion 2 is tilted and cannot be corrected. In order to prevent this, the metal mask 1 may be adjusted so that the direction of the opening is parallel to the tension direction by the clamp when the metal mask 1 is set, but the width of the opening formed in the metal mask 1 is, for example, 40. Since it is extremely fine such as about 100 μm and even a very slight inclination of 1 to 2 degrees is not acceptable, it is practical to visually observe this opening and match the direction of the opening to the tension direction by the clamp. It is impossible.

Generally, there are many cases where positioning pins are used to repeatedly set a sheet-like workpiece at the same position on a plane, so this positioning pin method can be applied to a metal mask. Since there is no metal, the shear rigidity of the entire metal mask is low, and when the metal mask is inserted into the positioning pin, the metal mask is deformed into a parallelogram, which is not a satisfactory solution. Although a method of aligning a plurality of points on the metal mask using a CCD camera is also conceivable, there is a problem that the equipment is expensive and large-scale, and it takes time to set.
JP 2003-68453 A

  The present invention has been made in view of such a situation. A metal mask having a large number of elongated openings arranged in parallel, such as a multi-face mask for vapor deposition, is used as a metal mask such as a mask frame attaching apparatus. A method and apparatus that enables a metal mask to be adjusted and set so that an elongated opening is in a predetermined direction easily and quickly using a simple apparatus when set in a handling apparatus. The issue is to provide.

  The invention according to claim 1 to solve the above-mentioned problem is a method of setting a metal mask having a large number of elongated openings arranged in parallel to a mask handling apparatus for handling the metal mask. The mask handling apparatus previously has a glass scale provided with a pattern portion composed of a large number of linear marks formed so as to extend in the same pitch as the large number of openings of the metal mask in the width direction and in the same direction as the openings. A step of positioning the linear mark in a predetermined direction, a step of positioning the metal mask on the glass scale, illuminating the glass scale and the metal mask from below, and transmitting Metal mask angle for observing interference fringes generated by light from above and adjusting the metal mask arrangement angle so that the interference fringes do not occur A metal mask set method characterized by having an integer steps.

  According to a second aspect of the present invention, in the metal mask setting method according to the first aspect, the mask handling apparatus grips four sides of the metal mask with a plurality of clamps, and applies tension to the metal mask. This is a mask frame pasting device that is free from distortion and sagging and is fixed to a frame-like frame in that state.

The invention according to claim 3 is an apparatus for setting a metal mask having a plurality of elongated openings arranged in parallel to a mask handling apparatus for handling the metal mask, wherein the plurality of openings of the metal mask are provided. And a pattern portion composed of a large number of linear marks formed at the same pitch in the width direction and extending in the same direction as the opening, and the linear marks are in a predetermined direction with respect to the mask handling apparatus. A metal mask set device comprising: a glass scale arranged in this manner; and an illumination device that irradiates the glass scale from the back side.

  According to a fourth aspect of the present invention, the metal mask setting device according to the third aspect further includes a fine adjustment mechanism for finely adjusting an arrangement angle of the metal mask placed on the glass scale.

  According to a fifth aspect of the present invention, in the metal mask setting device according to the third or fourth aspect, the mask handling device grips a plurality of locations on each of the four sides of the metal mask with clamps and applies tension. This is a mask frame pasting device provided with a plurality of tension units arranged so as to be able to.

  According to the method and apparatus of the present invention described above, a metal mask is positioned on a glass scale, and interference fringes generated in a region where a large number of openings of the metal mask and a large number of marks on the glass scale overlap are observed. By adjusting the arrangement angle of the metal mask so that there are no interference fringes, the arrangement angle of the metal mask can be adjusted in the direction that the opening is exactly parallel to the mark formed on the glass scale. Since it is large and clear even when a fine opening and a fine inclination of the mark, the interference fringes can be easily confirmed by visual observation, and it can be easily adjusted by adjusting the arrangement angle of the metal mask so that the interference fringes disappear. In addition, the direction of the metal mask can be positioned in a predetermined direction promptly and with high accuracy.

Here, if a mask frame attaching device is used as the mask handling device, the direction of the mark formed on the metal mask is previously matched with the direction in which the tension is applied to the metal mask by the mask frame attaching device. The direction of the opening can be set exactly in accordance with the tension direction of the clamp, and the mask frame application device stretches the metal mask in a state free from distortion and sagging, and the mask formed by the opening has high accuracy. in to position, it can be fixed to the frame-shaped frame.

  The metal mask placement angle may be adjusted by manually moving the metal mask, but this should be used if a fine adjustment mechanism is provided to fine-tune the placement angle of the metal mask placed on the glass scale. Thus, the angle can be adjusted more easily.

  The present invention can be applied to an arbitrary metal mask having a large number of elongated openings arranged in parallel. However, the present invention is used as a multi-face mask for vapor deposition for manufacturing an organic EL element requiring high precision. It is preferable to apply when a metal mask is set in a mask frame pasting apparatus. Hereinafter, a preferred embodiment of the present invention will be described by taking as an example a case where a metal mask used as a multi-face mask for vapor deposition in the manufacture of organic EL elements is set in a mask frame pasting apparatus.

  FIG. 1 is a schematic perspective view of a main part of a mask frame pasting apparatus provided with a metal mask setting device according to an embodiment of the present invention. FIG. 2 is a schematic side view showing a part of the mask frame pasting apparatus in cross section. 3 is a schematic side view of a tension unit provided in the mask frame attaching device, FIG. 4 is a schematic plan view showing a plurality of tension units provided in the mask frame attaching device and a metal mask held by the tension unit, and FIG. FIG. 6 is a schematic side view showing a part of a mask frame pasting apparatus provided with a metal mask setting apparatus according to another embodiment in cross section, and FIG. 6 shows a metal mask handled by the mask frame pasting apparatus and a frame shape for fixing the metal mask. 7 is a schematic perspective view showing a frame, FIG. 7 is a schematic perspective view of a vapor deposition mask device formed by fixing a metal mask to the frame, FIG. 8 is a schematic perspective view showing a metal mask and a glass scale, and FIG. FIG. 10A is a schematic plan view showing an enlarged opening formed in a metal mask, FIG. 10B is a schematic plan view showing an enlarged mark formed on a glass scale, and FIG. The schematic plan view which shows many opening parts currently formed in the mask part of this, (b), (c) when the mark of the glass scale arrange | positioned under the mask part and the opening part of a metal mask were inclined It is a schematic plan view which shows the interference fringe which arises in a mask part.

  In FIG. 6, reference numeral 1 denotes a right-sided quadrilateral metal mask used as a vapor deposition mask, which is formed by arranging a plurality of mask portions 2 vertically and horizontally. Each mask portion 2 includes a large number of minute elongated openings that allow vapor deposition. The shape and arrangement of the openings in each mask portion 2 are arbitrary. For example, the elongated slit-shaped openings are arranged in parallel, and the elongated rectangular (slot-shaped) openings are arranged in the vertical direction and in parallel. Listed items can be listed. Reference numeral 3 denotes a frame frame having a large rigidity for attaching the metal mask 1, and includes an opening 4 having a size including a region (referred to as an effective region) in which a large number of mask portions 2 of the metal mask 1 are formed. The metal mask 1 is made larger in both the vertical and horizontal directions than the frame 3, and an easy cutting line 5 that can be easily cut by bending is formed at a position substantially corresponding to the outer peripheral edge of the frame 3. The easy cutting line 5 has a strength that can withstand the tensile force applied to the metal mask 1. Although the thickness of the metal mask 1, the dimension of the mask part 2, the dimension of the opening formed in it are not specifically limited, the thickness of the metal mask 1 is typically 30 to 200 μm, and the mask part 2 As for the dimensions, the length is 50 to 70 mm, the width is 30 to 50 mm, the width of the opening is 40 to 100 μm, the width of the non-porous portion between the openings is 80 to 200 μm, and the like.

  1 to 4, a mask frame pasting apparatus generally designated by reference numeral 10 applies tension to the support base 11 and to the support base 11 by gripping a plurality of locations on each of the four sides of the metal mask 1. A plurality of tension units 13 are arranged so as to be able to.

  As shown in an enlarged view in FIG. 3, each tension unit 13 includes a base member 15, a clamp 17 movably held by the base member 15 via a linear motion guide 16, and a drive for reciprocating the clamp 17. Means 18 and the like are provided. Here, an air cylinder is used as the driving means 18, but a hydraulic cylinder, a servo motor or the like may be used instead of the air cylinder. The clamp 17 is a toggle mechanism that pivots the movable claw 17b to hold the metal mask 1 between the fixed claw 17a, the movable claw 17b, and the movable claw 17b while pressing the movable claw 17b firmly against the fixed claw 17a. And an air cylinder (both not shown). As can be clearly seen from FIG. 4, each tension unit 13 is arranged so that each side of the metal mask 1 can be gripped by a plurality of tension units 13 and tension can be applied to the side in a direction perpendicular thereto. Further, the clamps 17 of the plurality of tension units 13 arranged so as to hold each side of the metal mask 1 are arranged in accordance with the mask part 2 and the non-mask part of the metal mask 1, and accordingly, the metal mask A region extending in the vertical direction and a region extending in the horizontal direction in which one mask portion 2 is formed, and a region extending in the vertical direction and a region extending in the horizontal direction without the mask portion, that is, regions having different rigidity, are separately clamped. It is possible to apply tension by pulling at 17.

  The driving means 18 provided in each of the plurality of tension units 13 has adjusting means (not shown) for individually adjusting the driving force by the driving means so that the tension applied to the metal mask 1 can be individually adjusted. Is provided. More specifically, an air supply pipe is connected to the air cylinder constituting the drive means 18, and a regulator capable of individually adjusting the supply pressure to each air cylinder is provided as an adjustment means in the air supply pipe. It has been. Note that air is supplied to the air supply pipes connected to these air cylinders via a common on-off valve so that the drive means (air cylinders) 18 of all the tension units 13 can be operated simultaneously. A speed controller is also provided in the air supply piping to each air cylinder so that the operation timing of each air cylinder can be adjusted.

  2 and 3, a frame support 20 that supports the frame 3 is provided on the base member 15 of the tension unit 13. The frame support 20 places the frame 3 thereon, thereby positioning the frame 3 at a predetermined position in the horizontal plane, and the upper surface of the frame 3 is held by the clamp 17 and applied to the tension applied to the metal mask 1. It arrange | positions so that it can also position in an up-down direction so that it may become a position which touches substantially.

  In FIG. 2, reference numeral 23 denotes a metal mask setting device for adjusting the metal mask 1 so that the opening thereof is directed in a predetermined direction and holding the metal mask 1 by a plurality of clamps 17. The metal mask setting device 23 includes a mask mounting table 24 provided on the support table 11, a glass scale 25 held on the mask mounting table 24, an illumination device 26 that illuminates the back surface (lower surface) of the glass scale 25, An adjustment mechanism 27 (see FIGS. 1 and 4) is provided.

  As can be clearly understood from FIG. 8, the glass scale 25 is a pattern composed of a large number of parallel marks 31 formed on a transparent plate material such as a glass plate so as to correspond to each mask portion 2 of the metal mask 1. The part 30 is formed. A large number of marks 31 formed on each pattern portion 30 are overlaid with a large number of openings of the mask portion 2 of the metal mask 1 and when viewed from above when illuminated from below, the marks 31 and the openings are separated from each other. It is provided in such a pattern that interference fringes appear when it is inclined. As a suitable shape and arrangement of the marks 31 formed on the glass scale 25, as shown in FIGS. 9A and 9B, the same pitch as the openings 33 formed in the mask portion 2 of the metal mask 1 is used. Moreover, the mark 31 formed in the same shape and size can be mentioned. The shape and arrangement of the marks 31 that can be used in the present invention are not limited to those shown in FIG. 9B, but can be changed as long as interference fringes appear. For example, in the longitudinal direction, The openings 33 are not limited to those having the same length and the same pitch, but may have different lengths, or may be in a continuous form. Further, the width of the mark 31 is not necessarily required to be exactly the same as the width of the opening 33. If the interference fringes appear, the mark 31 has a slightly different width (for example, ± 20% with respect to the width of the opening). Different widths may be used. In short, the mark 31 formed on the glass scale 25 may be a linear mark formed at the same pitch in the width direction as the opening 33 of the metal mask 1 and extending in the same direction as the opening 33.

  The pattern portion 30 formed on the glass scale 25 is provided in correspondence with all the mask portions 2 formed on the metal mask 1 as in the embodiment shown in FIG. The portion 2 is preferable because it is possible to inspect whether or not the opening is parallel to the pulling direction by the clamp. However, the present invention is not limited to this, and the pattern portion 30 may be formed only in a desired region of the glass scale 25. Good. When adjusting the arrangement angle of the opening of the metal mask 1, the metal mask 1 can be set in a desired manner by adjusting the angle of one or two mask portions 2 without adjusting all the mask portions 2. Since it can be directed in the direction, the pattern portion 30 may be formed in at least one place. Further, the mark 31 formed on the pattern portion 30 does not need to be formed in the entire area of the corresponding mask portion 2, and may be formed in a range where visible interference fringes can be generated.

  In FIG. 2, the glass scale 25 can support the metal mask 1 when the metal mask 1 is attached to the region surrounded by the plurality of tension units 13 and to the clamps 17 of the plurality of tension units 13. Has been placed. However, the arrangement height of the glass scale 25 is stretched to a flat state when the metal mask 1 is gripped by the clamps 17 of the plurality of tension units 13 and a tension is applied by the clamps 17 to make the flat state. It is determined to be in a very close position with respect to the metal mask 1 in a non-contact state. The glass scale 25 is installed using a length measuring machine or the like when the glass scale 25 is installed so that the direction of the mark 31 formed on the glass scale 25 is exactly coincident with the tension direction by the tension unit 13. And precisely measured and adjusted. Here, the arrangement height of the glass scale 25 is determined so as to be non-contact with the metal mask 1 in a flat state by applying a tension when the tension is applied to the metal mask 1. The reason for this is to prevent scuffing and scratching. The metal mask 1 is placed close to the glass scale 25. After adjusting the arrangement angle, the metal mask 1 is held when the metal mask 1 is held by the clamp 17. This is to avoid moving too much. The distance between the metal mask 1 and the glass scale 25 in the tensioned state by the clamp 17 is set to about 50 to 200 μm, preferably about 50 to 100 μm. Instead of fixing the glass scale 25 in the position shown in FIG. 2 in advance, the glass scale 25 is held by an appropriate lifting means, and when the tension is applied to the metal mask 1, the glass scale 25 is made to wait downward, and the metal mask. When the operation of adjusting the arrangement angle of 1 and holding the clamp 17 is performed, the glass scale 25 may be raised to a position suitable for the operation. Further, as will be described later, when the metal mask 1 is placed on the glass scale 25 and the angle is adjusted, the glass scale 25 and the metal mask 1 may rub against each other. It is desirable to apply a coating to prevent damage to the metal mask.

  1 and 4, the fine adjustment mechanism 27 includes a base 35 and an adjustment screw 36 screwed to the base 35, and a metal mask placed on the glass scale 25 at the tip of the adjustment screw 36. It is arranged at a position where the vicinity of one corner of 1 can be pushed. With this configuration, by turning the adjustment screw 36, the tip of the adjustment screw 36 can be advanced, and the metal mask 1 can be pushed to turn the metal mask 1 by a small angle. In the embodiment shown in the drawings, one fine adjustment mechanism 27 is provided to turn the metal mask 1 only in one direction. However, if necessary, the fine adjustment mechanism further turns the metal mask 1 in the opposite direction. May be provided. Although not shown, a laser welding apparatus for spot welding the metal mask 1 to the frame 3 is also provided.

  Next, a metal mask setting operation by the metal mask setting device 23 having the above configuration and a metal mask frame applying operation by the mask frame applying device 10 will be described. First, the frame 3 is held by the frame supports 20 of the plurality of tension units 13, and then the clamps 17 of the plurality of tension units 13 are opened on the glass scale 25, the frame 3, and the fixing claws 17 a of the clamps 17. Put the metal mask 1 on it. At this time, the approximate position of the metal mask 1 is positioned with respect to the frame 3 using positioning pins (not shown). Next, the illumination device 26 is turned on and the mask portion 2 at an appropriate position is visually observed. At this time, if the opening 33 of the mask portion 2 of the metal mask 1 is arranged so as to extend in the vertical direction as shown in FIG. 10A, the opening of the mask portion 2 is the glass below it. When inclined with respect to the mark formed on the scale 25, as shown in FIGS. 10B and 10C, interference fringes due to transmitted light extend in a direction perpendicular to the longitudinal direction of the opening. Appear as follows. The distance between the interference fringes increases as the inclination angle between the opening and the mark decreases. Therefore, for example, when an interference fringe as shown in FIG. 10B has occurred, the adjustment screw 36 of the fine adjustment mechanism 27 is turned and the vicinity of the corner of the metal mask 1 is pushed with the tip of the adjustment screw 36. The metal mask 1 is swiveled little by little, and the metal mask 1 is swung until the interval between the interference fringes widens and finally the interference fringes disappear and the entire density becomes uniform. Note that when the metal mask 1 is turned by pushing the vicinity of the corner of the metal mask 1 with the tip of the adjustment screw 36, if the interval between the interference fringes is narrowed, the inclination angle is increased. The metal mask 1 may be rotated in the reverse direction and turned back by hand, and then the adjustment by the adjustment screw 36 may be performed again.

  As described above, when the metal mask 1 is turned to an arrangement angle at which interference fringes are eliminated, the opening of the metal mask 1 becomes exactly parallel to the mark 31 of the glass scale 25, and therefore the opening is pulled by the tension unit 13. It is exactly parallel to the direction. Thus, the angle adjustment work for the metal mask 1 is completed.

  Next, the four sides of the metal mask 1 whose angle has been adjusted are held by the clamps 17 of the plurality of tension units 13. This state is the state shown in FIG. Next, pressurized air is sent to driving means (air cylinder) 18 connected to each clamp 17 to move each clamp 17 in a direction away from the metal mask 1, and the metal mask 1 is moved in both vertical and horizontal directions by a number of clamps. Tension is applied so that the metal mask 1 is stretched and the tension by the plurality of tension units 13 is adjusted so that the metal mask 1 is flat without distortion or sagging and the opening of the mask portion 2 is parallel. Make sure they are aligned.

  Thereafter, with the tension applied to the metal mask 1, the metal mask 1 is spot welded to the frame 3 (see reference numeral 40 in FIG. 4) by a laser welding apparatus (not shown) and fixed. Thereafter, the metal mask 1 is removed from the clamp 17, and the peripheral portion of the metal mask 1 is removed using the easy cutting line 5. By the above, as shown in FIG. 7, the vapor deposition mask apparatus 8 of the structure which fixed the metal mask 1 to the flame | frame 3 can be manufactured.

  In the obtained vapor deposition mask device 8, the metal mask 1 is kept in a state in which there is no distortion or sagging, and the openings of the mask portion 2 are accurately aligned in parallel in a predetermined direction. The position is also kept within a predetermined dimensional accuracy. Thus, by performing vapor deposition using the vapor deposition mask device 8, it is possible to accurately perform vapor deposition of a fine pattern with multiple faces.

  In the above-described embodiment, the illumination device 26 is provided on the side of the mask mounting table 24. However, the present invention is not limited to this configuration, and as shown in FIG. It is good also as a structure which provides the illuminating device 26A and illuminates the glass scale 25 whole surface.

  The preferred embodiment of the present invention has been described above, but the present invention is not limited to this embodiment, and it is needless to say that the present invention can be appropriately changed within the scope of the claims.

The schematic perspective view of the principal part of the mask frame sticking apparatus provided with the metal mask setting apparatus which concerns on embodiment of this invention Schematic side view showing a part of the mask frame application device in cross section Schematic side view of the tension unit provided in the mask frame pasting device of FIG. FIG. 2 is a schematic plan view showing a plurality of tension units provided in the mask frame pasting apparatus of FIG. 2 and a metal mask held by the tension units. Schematic side view partially showing in cross section a mask frame pasting device provided with a metal mask setting device according to another embodiment The schematic perspective view which shows the metal mask handled with the mask frame sticking apparatus shown in FIG. 1, and the frame-shaped frame which fixes it Schematic perspective view of a vapor deposition mask device formed by fixing a metal mask to a frame Schematic perspective view showing metal mask and glass scale (A) is a schematic plan view showing an opening formed in a metal mask in an enlarged manner, and (b) is a schematic plan view showing an enlarged mark formed in a glass scale. (A) is a schematic plan view showing the mask part of the metal mask, (b) and (c) are the mask part when the glass scale mark and the opening part of the metal mask are inclined under the mask part. Schematic plan view showing the resulting interference fringes (A) is a schematic plan view showing a state in which tension is applied to the four sides of the metal mask, and (b) is a schematic plan view exaggeratingly showing a state in which the metal mask is set inclined with respect to the pulling direction.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Metal mask 2 Mask part 3 Frame 4 Opening 5 Easy cut line 8 Deposition mask apparatus 10 Mask frame sticking apparatus 11 Support stand 13 Tension unit 15 Base member 16 Direct motion guide 17 Clamp 17a Fixed claw 17b Movable claw 18 Driving means (air cylinder) )
20 Frame support 23 Metal mask setting device 24 Mask stand 25 Glass scale 26, 26A Illumination device 27 Fine adjustment mechanism 30 Pattern portion 31 Mark 33 Opening portion 35 Base 36 Adjustment screw 40 Spot welding portion

Claims (5)

  A method of setting a metal mask having a large number of elongated openings arranged in parallel to a mask handling apparatus for handling the metal mask, wherein the metal mask has the same pitch in the width direction as a large number of openings of the metal mask, and A glass scale having a pattern portion formed of a large number of linear marks formed so as to extend in the same direction as the opening is previously positioned with respect to the mask handling apparatus so that the linear marks are in a predetermined direction. And the step of positioning the metal mask on the glass scale, illuminating the glass scale and the metal mask from below, observing the interference fringes generated by the transmitted light from above, and generating the interference fringes A metal mask setting method comprising a metal mask angle adjustment step of adjusting an arrangement angle of the metal mask so as not to occur   A mask frame in which the mask handling device grips the four sides of the metal mask with a plurality of clamps, applies tension to the metal mask to prevent distortion and sagging, and fixes the frame to a frame-shaped frame in that state. The metal mask setting method according to claim 1, wherein the metal mask setting method is a pasting apparatus. An apparatus for setting a metal mask having a large number of elongated openings arranged in parallel to a mask handling apparatus that handles the metal mask, and having the same pitch in the width direction as the multiple openings of the metal mask, A glass scale provided with a pattern portion comprising a large number of linear marks formed so as to extend in the same direction as the opening, and arranged so that the linear marks are in a predetermined direction with respect to the mask handling apparatus; A metal mask setting device comprising an illumination device for irradiating the glass scale from the back side.   4. The metal mask setting device according to claim 3, further comprising a fine adjustment mechanism for finely adjusting an arrangement angle of the metal mask arranged on the glass scale.   The mask handling device is a mask frame pasting device provided with a plurality of tension units arranged so that tension can be applied by holding a plurality of locations on each of the four sides of the metal mask with a clamp. The metal mask setting device according to claim 3 or 4.

Images