JP2004311335A - Method and device for frame-sticking metal thin plate - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide technology for fixing a metal thin plate 11 on which a plurality of openings 12 with a plurality of slits are arranged, to a frame without any looseness or distortion. <P>SOLUTION: Each side of the metal thin plate 11 is held by a plurality of clamps 23 arranged separately for an area facing the opening part 12, and for an area facing the not-opening part. The clamp is pulled in a direction perpendicular to each side of the metal thin plate using an air cylinder 24. By adjusting pulling force by each clamp to hold the metal thin layer 11 in a plane status without any looseness or distortion and fix it to the frame. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a metal sheet having extremely thin regions having different rigidities, such as a metal sheet having an opening having a large number of slits, which is used for a vapor deposition mask used in an organic EL element manufacturing process. The present invention relates to a method and an apparatus for fixing a frame to a frame in a flat state without distortion.
[0002]
[Prior art]
[Patent Document 1] Japanese Unexamined Patent Application Publication No. 2003-68453 [Patent Document 2] Japanese Unexamined Patent Application Publication No. 2003-68445 Conventionally, vacuum evaporation has been performed in the production of organic EL devices, and a large number of slits are provided as an evaporation mask. A sheet metal having an opening is used. In vapor deposition, the vapor deposition mask was attached to a highly rigid frame having an opening larger than the opening by a magnet or the like. However, in recent years, as the patterning has become finer and the slits formed in the openings have become finer and the thickness of the vapor deposition mask itself has become thinner, the vapor deposition mask has been simply fixed to the frame using a magnet or the like. In this case, the opening may be distorted or sagged, and the slit accuracy may not be maintained. In view of this, the present applicant has previously developed a jig for holding a deposition mask capable of holding the deposition mask in a state of being pulled in the slit direction of the opening while attaching the deposition mask to the frame (Patent Reference 1). By using this holding jig, it is possible to hold the thin line portion forming the slit of the opening in a state where it is pulled in the longitudinal direction, so that the slit can be held linearly and at a constant pitch, and high definition patterning is possible. Is obtained.
[0003]
However, the vapor deposition mask described in Patent Literature 1 has a problem that productivity is poor because only one opening is formed in one vapor deposition mask. Therefore, in order to increase the productivity, as shown in FIG. 5, a multi-faced mask 1 in which a plurality of openings 2 are formed in one vapor deposition mask may be used. It is considered that it is sufficient to hold the movable clamp 4 in a state of being pulled in the slit direction of the opening 2 as indicated by an arrow, by gripping with the clamp 4. However, in the multi-face mask 1 having a large number of openings 2, when the both ends of the mask 1 are gripped by the clamps 3 and 4 and pulled, the openings and the non-opening portions are formed even though the entire width of the mask is evenly pulled. It has been found that, because of the different rigidities, the openings are distorted or sagged, a desired slit pattern cannot be obtained, and the positional accuracy of each opening is also deteriorated. For example, in the case of a multi-face mask for vapor deposition used for manufacturing an organic EL element, a total pitch of ± 10 μm or less may be required for the position of each opening, but it is difficult to achieve such dimensional accuracy. .
[0004]
Therefore, as a solution to this problem, the present applicant first superimposes a first metal mask in which a plurality of openings are formed and a second metal mask in which a large number of fine slits are formed in a wide area. A multi-face mask apparatus capable of forming a mask, attaching the first metal mask and the second metal mask to a frame, and holding the second metal mask stretched in the slit direction has been developed (Patent Document 2). reference). In this multi-face mask device, the slit is formed over almost the entire width of the second metal mask, so the entire metal mask can be pulled uniformly to align the slits in parallel. Is obtained.
[0005]
[Problems to be solved by the invention]
However, the multi-face mask apparatus described in Patent Document 2 uses two metal masks, and furthermore, has a structure in which tension is applied to the metal mask in a state where the metal mask is mounted on a frame. There is a problem that it is complicated. Therefore, if a single multi-face mask having the structure shown in FIG. 5 can be held in a state where the opening is free from distortion and slack and a desired dimensional accuracy can be secured, the multi-face mask is then remounted. By fixing the frame to a highly rigid frame by spot welding or the like, the multi-face mask can be held in a state without distortion or slack using a frame having a simple structure.
[0006]
The present invention has been made in view of such a situation, and has a plurality of openings with a large number of slits, such as a multi-faced mask for vapor deposition, a metal sheet having regions with different stiffness, distortion and the like. An object of the present invention is to provide a method of fixing a frame to a frame in a state where there is no slack and an opening or the like is maintained at a desired dimensional accuracy, and an apparatus used for implementing the method.
[0007]
[Means for Solving the Problems]
In the method for attaching a metal sheet to a frame according to the present invention, when fixing a rectangular metal sheet to a frame, each of at least two sides of the metal sheet facing each other is gripped by a plurality of clamps, and each clamp is attached to the clamp. The metal thin plate is stretched flat by pulling in a direction perpendicular to the side gripped by the above, and is fixed to a frame in this state. In this manner, a plurality of clamps are arranged at least on each of two sides of the metal sheet facing each other, and a tensile force is applied to a plurality of locations on each side. It is possible to pull the metal sheet with a tension suitable for the rigidity of the region, thereby holding the metal sheet in a state where there is no distortion or slack and having an opening in a position where a desired dimensional accuracy is maintained if the metal sheet has an opening. The metal sheet can be fixed to the frame using spot welding or the like in a state where there is no distortion or sag and the opening and the like are maintained at a desired dimensional accuracy.
[0008]
Here, it is preferable to dispose the clamp on each side of the sheet metal because the sheet metal can be pulled to a state without further distortion or slack. The arrangement of the clamp may be appropriately determined according to the distribution of the rigidity of the metal sheet. The metal sheet has a rectangular opening provided with a large number of slits, such as a multi-face mask used for manufacturing an organic EL device. In the case of a configuration in which the portions are formed side by side, it is preferable to arrange a plurality of clamps in accordance with the opening and the non-opening. With this configuration, the opening and the non-opening having greatly different stiffness can be pulled by separate clamps, respectively, so that the thin metal plate can be held in a state without extremely warping or sagging.
[0009]
A frame sticking device according to the present invention includes a plurality of clamps disposed on each side of a rectangular thin metal plate to be fixed to a frame so as to grip at least a plurality of locations on each of two opposite sides. And a driving means for moving the metal sheet in a direction perpendicular to the side gripped by the clamp to exert a tensile force on the metal sheet. According to this configuration, at least two sides of the metal sheet are pulled by a plurality of clamps, and when the metal sheet has no distortion or slack and an opening is provided, the position where the opening is maintained at a desired dimensional accuracy is provided. By fixing the metal sheet to the frame by spot welding or the like in this state, the metal sheet is fixed to the frame in a state where there is no distortion or slack and the opening or the like is maintained at a desired dimensional accuracy. be able to.
[0010]
Also in this case, it is preferable to dispose the clamp on each side of the sheet metal because the sheet metal can be further pulled without any distortion or slack. In the case where the metal sheet has a configuration in which rectangular openings having a large number of slits are arranged, the plurality of clamps are arranged in accordance with the opening and the non-opening of the metal sheet. It is preferable that the sheet metal be kept in a very free state without warping or sagging.
[0011]
The driving means for moving the clamps is preferably provided independently for each clamp, and it is preferable that the tension can be adjusted for each clamp because it is possible to precisely adjust the tension to the metal thin plate. However, the present invention is not limited to this. The plurality of clamps on each side may be divided into a plurality of sets, and a common driving unit may be connected to the clamps in each set, or the same tensile force may be applied to the clamps in each set. Good.
[0012]
BEST MODE FOR CARRYING OUT THE INVENTION
The present invention is applicable to any metal sheet that needs to be maintained in a flat state without warping or sagging, but as a multi-face mask for vapor deposition for manufacturing an organic EL element particularly requiring precision. It is preferably applied to the metal sheet used. Hereinafter, a preferred embodiment of the present invention will be described with reference to a thin metal plate used as a multi-face mask for vapor deposition in manufacturing an organic EL device. FIG. 1 is a schematic plan view of a frame attaching apparatus for a metal sheet according to an embodiment of the present invention, FIG. 2 is a schematic cross-sectional view of a part of the apparatus, and FIG. FIG. 4 is a schematic perspective view showing the metal sheet and the frame after the frame is attached. In FIG. 3, reference numeral 11 denotes a rectangular metal thin plate used as a vapor deposition mask, in which a plurality of openings 12 having a large number of slits are formed in a matrix. Reference numeral 13 denotes a frame having a large rigidity for mounting the thin metal plate 11, and has an opening 14 having a size including a region in which the plurality of openings 12 of the thin metal plate 11 are formed. The metal sheet 11 is made large in both the vertical and horizontal directions with respect to the frame 13, and forms an easy-cutting line 15 that can be easily cut by bending at a position substantially corresponding to the outer peripheral edge of the frame 13. . The easy-cutting line 15 has strength enough to withstand the tensile force applied to the metal sheet 11. The thickness of the metal sheet 11, the size of the opening 12, the size of the slit formed therein, and the like are not particularly limited, but as typical examples, the thickness of the metal sheet 11 is 30 to 200 μm, and the dimension of the opening is May have a length of 50 to 70 mm, a width of 30 to 50 mm, a width of the slit of 50 to 100 μm, and a width of a thin metal wire constituting the slit of 100 to 150 μm.
[0013]
In FIGS. 1 and 2, a metal sheet frame attaching apparatus generally denoted by reference numeral 20 includes a support 21 and fixing means (not shown) for fixing and holding the frame 13 at a predetermined position on the support 21. And a plurality of clamps 23 arranged on the frame 13 so that the four sides of the metal sheet 11 placed on the frame 13 can be clamped, and a plurality of clamps 23 are arranged on each side. And a driving means 24 for moving the metal sheet 11 in a perpendicular direction to exert a tensile force on the metal sheet 11. Here, the clamp 23 includes a clamp body 27 movably held by a linear guide 26, a fixed claw 28 fixed to the clamp body 27, a movable claw 29 rotatably provided on the clamp body 27, An air cylinder (not shown) that opens and closes the claw 29 via a toggle mechanism (not shown) is provided, and the thin metal plate 11 is gripped by the fixed claw 28 and the movable claw 29. The mechanism for holding the metal sheet of the clamp 23 is not limited to the mechanism using the fixed claws 28 and the movable claws 29 as shown in the figure, but may be changed as appropriate, and may be a mechanism using screws. As can be clearly understood from FIG. 1, the plurality of clamps 23 provided on the four sides of the sheet metal 11 are arranged so as to correspond to the opening 12 and the non-opening of the sheet metal 11, and accordingly, A vertically extending region and a laterally extending region in which the opening 12 is formed, and a vertically extending region and a laterally extending region having no opening can be pulled by separate clamps 23, respectively.
[0014]
The driving means 24 connected to each clamp 23 is arbitrary as long as it can apply a desired tensile force to the metal sheet 11 via each clamp 23, and in this embodiment, an air cylinder is used. . A regulator is connected to each of the air cylinders constituting the driving means 24 so that the pulling force can be adjusted separately. In addition, air supply pipes are connected to these air cylinders via a common on-off valve so that all the air cylinders can be operated at the same time. A speed controller is also provided in the air supply pipe to the cylinder. The driving unit 24 is not limited to an air cylinder, but may be a hydraulic cylinder, a servomotor, or the like.
[0015]
Next, an operation of fixing a thin metal plate to a frame using the frame sticking device 20 having the above configuration will be described. As shown in FIG. 2, the frame 13 is attached to a predetermined position on the support table 21, and then the thin metal plate 11 is placed thereon, and four sides thereof are gripped by the plurality of clamps 23. This state is the state shown in FIG. Next, pressurized air is sent to an air cylinder constituting the driving means 24 connected to each clamp 23 to move each clamp 23 in the vertical and horizontal directions as indicated by arrows. Thereby, the metal thin plate 11 is pulled in the vertical and horizontal directions by the many clamps 23. In this state, the surface state of the metal sheet 11 is visually inspected, and if there is any distortion or slack, the air pressure supplied to the air cylinder connected to the clamp 23 pulling the area is adjusted, and the metal sheet 11 is distorted. It is adjusted to a flat state without slack and a state where the slits of the opening 12 are aligned in parallel. Further, the position of each opening 12 formed in the thin metal plate 11 is inspected, and the pressure of air supplied to each air cylinder is adjusted so that each opening enters a position within a predetermined dimensional accuracy. As described above, the metal sheet 11 can be set in a state where there is no distortion or slack and each opening is located within a predetermined dimensional accuracy range. Thereafter, in this state, the metal sheet 11 is spot-welded to the frame 13 using a laser or the like (see reference numeral 33) and fixed. Thereafter, the clamp 23 is removed from the metal sheet 11, and the peripheral portion of the metal sheet 11 is removed using the easy-cutting line 15. As described above, as shown in FIG. 4, the vapor deposition mask device 35 having the configuration in which the thin metal plate 11 is fixed to the frame 13 can be manufactured.
[0016]
In the obtained vapor deposition mask device 35, the metal sheet 11 is kept in a state where there is no distortion or slack, and the slits of the openings 12 are kept exactly in parallel with each other. It is kept within dimensional accuracy. Thus, by performing vapor deposition using the vapor deposition mask device 35, it is possible to accurately vapor-deposit a fine pattern.
[0017]
In the above-described embodiment, the plurality of clamps 23 are connected to the driving means 24 each composed of a separate air cylinder, so that each clamp 23 can individually adjust the tensile force applied to the thin metal plate 11. In this configuration, since the tensile force applied to the metal sheet 11 can be precisely adjusted, the advantage that the metal sheet 11 which is likely to be distorted or sagged can be pulled and held in an extremely flat state can be obtained. Without limitation, for example, when using a metal thin plate that can be relatively easily pulled and held in a flat state, a plurality of clamps arranged on each side, for example, a first set of clamps corresponding to the opening, Divide the clamps corresponding to the non-opening into the second set and divide them into a plurality of sets, connect a common air cylinder to each set of clamps, or supply air to the air cylinders connected to each set of clamps. The air pressure may be adjusted commonly. Further, the clamps 23 arranged on each side of the thin metal plate 11 are not necessarily arranged in accordance with each of the opening 12 and the non-opening. May be changed, or more clamps may be used so that a more finely divided area can be gripped. In any case, according to the characteristics of the metal sheet to be used, the number of divisions and the position of the clamp may be determined so that the metal sheet can be pulled and held in a state without distortion or slack. Further, in the above-described embodiment, the plurality of clamps 23 are arranged on each of the four sides of the metal thin plate 11, but the present invention is not limited to this, and the plurality of clamps 23 may be arranged only on the two sides facing each other. You may. However, in this case, it is desirable to arrange clamps at both ends in the same direction as the slit so that the slits of the opening 12 can be aligned in parallel.
[0018]
【The invention's effect】
As described above, the present invention can hold a metal sheet having regions with different stiffness by pulling it in a flat state without distortion or bending, in which an opening exists, and Position can be maintained within a desired dimensional accuracy, and there is an effect that the metal sheet can be fixed to the frame in a state where there is no distortion or slack and an opening or the like is maintained at a desired dimensional accuracy. are doing. Then, by using the present invention for a device requiring high positional accuracy, such as a multi-face mask used for manufacturing an organic EL device, a desired high accuracy can be ensured, and a high-precision deposition mask device is used. Can also be produced.
[Brief description of the drawings]
FIG. 1 is a schematic plan view of a frame attaching apparatus for a metal sheet according to an embodiment of the present invention. FIG. 2 is a schematic cross-sectional view of a part of the frame attaching apparatus shown in FIG. FIG. 4 is a schematic perspective view showing a metal thin plate and a frame handled by the apparatus. FIG. 4 is a schematic perspective view showing a vapor deposition mask device formed by attaching a metal thin plate to a frame. FIG. Schematic plan view showing the state of being gripped and pulled by a clamp [Description of reference numerals]
DESCRIPTION OF SYMBOLS 11 Metal thin plate 12 Opening 13 Frame 14 Opening 15 Easy cutting line 20 Metal thin plate frame sticking device 21 Support base 23 Clamp 24 Drive means (air cylinder)
26 linear guide 27 clamp body 28 fixed claw 29 movable claw 33 spot welding 35 evaporation mask device

Claims (7)

In fixing the rectangular metal sheet to the frame, at least two sides of the metal sheet facing each other are gripped by a plurality of clamps, and each clamp is pulled in a direction perpendicular to the side gripped by the clamp. A method for attaching a metal sheet to a frame, wherein the metal sheet is flattened and fixed to a frame in this state. When fixing the rectangular metal sheet to the frame, each of the four sides of the metal sheet is gripped by a plurality of clamps, and each of the clamps is pulled in a direction perpendicular to the side gripped by the clamp. A method for attaching a thin metal plate to a frame, wherein the thin plate is stretched flat and fixed to the frame in this state. The metal thin plate is formed by arranging rectangular openings having a large number of slits, and the plurality of clamps are arranged in accordance with the openings and the non-openings. Or the method of attaching a thin metal sheet to a frame according to 2. A plurality of clamps arranged on each side of the rectangular metal sheet to be fixed to the frame so as to grip at least a plurality of locations on each of the two opposed sides, and the side gripped by the clamps. A driving means for moving the metal sheet at right angles to the metal sheet to apply a tensile force to the metal sheet. A plurality of clamps arranged on each side of the rectangular metal sheet to be fixed to the frame so as to grip a plurality of positions on each of the four sides, and each clamp is fixed to the side gripped by the clamp. And a driving means for moving the metal sheet in a perpendicular direction to apply a tensile force to the metal sheet. The metal sheet has a configuration in which rectangular openings having a large number of slits are formed side by side, and the plurality of clamps are arranged in accordance with the openings and the non-openings. Item 6. A metal sheet frame attaching device according to item 4 or 5. 7. The apparatus according to claim 4, wherein the driving means is capable of adjusting a pulling force for each clamp.

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