JP4562488B2 - Metal mask position alignment method and apparatus - Google Patents

Description

  The present invention includes extremely thin and different regions of rigidity, such as a metal mask having a mask portion having a large number of minute openings, which is used for a vapor deposition mask used in an organic EL element manufacturing process. The present invention relates to a technique for fixing a metal mask to a frame-like frame in a flat state without distortion, and more particularly, to a method and apparatus for taking a position alignment of the metal mask when fixing the metal mask to the frame.

  Conventionally, vacuum vapor deposition is performed in the manufacture of organic EL elements, and a metal mask having a mask portion having a structure in which a large number of elongated fine slits that allow vapor deposition are arranged in parallel is used as the vapor deposition mask. In vapor deposition, the metal mask is attached to a frame having a large rigidity having an opening larger than that of the mask by a magnet or the like. However, in recent years, when the patterning has been miniaturized and the slits formed in the mask portion have become finer and the metal mask itself has become thinner, the metal mask is simply fixed to the frame using a magnet or the like. However, there is a problem that the mask portion is distorted or sag, and the slit accuracy cannot be maintained. Therefore, the present applicant first developed a metal mask holding jig that can hold the metal mask in the slit direction of the mask portion with the metal mask attached to the frame-shaped frame. (See Patent Document 1). By using this holding jig, it is possible to hold the thin line portion constituting the slit of the mask portion in a state of being pulled in the longitudinal direction, so that the slit can be held in a straight line and at a constant pitch, and high-definition patterning is possible. Is obtained.

  However, the metal mask described in Patent Document 1 has a problem that productivity is poor because only one mask portion is formed on one metal mask. In order to increase productivity, a multifaceted metal mask in which a plurality of mask portions are formed on a single metal mask may be used. However, in a multifaceted metal mask, simply holding both ends and pulling the metal mask Even if the entire width of the mask is pulled evenly, the mask portion and the non-mask portion have different rigidity, so that the mask portion is distorted and slack, a desired slit pattern cannot be obtained, and the positional accuracy of each mask portion is poor. Turned out to be. For example, in the case of a multi-face mask for vapor deposition used for manufacturing an organic EL element, a total pitch of ± 10 μm or less may be required for the position of each mask portion, but it is difficult to achieve such dimensional accuracy. .

  Therefore, as a result of studying to solve this problem, each of the four sides of the metal mask is gripped by a plurality of clamps, tension is applied to the metal mask by each clamp, and the tension is adjusted for each clamp. Thus, the present inventors have found that the metal mask can be made flat without wrinkles and sagging, and the slits of each mask portion can be held linearly and at a constant pitch. In addition, tension is applied to the metal mask to make it flat, and the metal mask is fixed to the frame-like frame by spot welding, etc., so that the metal mask is tensioned and flat even after the clamp is removed. Therefore, it has been found that a multi-face mask can be held without distortion and sagging using a frame having a simple structure.

By the way, when tension is applied to each of the four sides of the metal mask and the frame is fixed to the frame, the elongation generated in the metal mask is not necessarily uniform simply by adjusting the tension so that there is no wrinkle or slack in the metal mask. Therefore, the positions of the plurality of mask portions formed on the metal mask may be shifted from the proper positions. That is, the plurality of mask portions need to be accurately positioned at predetermined pitches in the vertical direction and the horizontal direction, respectively, but an error in the pitch becomes large, or the arrangement may be twisted as a whole. there were. In order to prevent this, a length measuring device that can measure the position of several mask parts with high tension (micron order) in the XY direction (vertical and horizontal directions) with tension applied to the metal mask. It is sufficient to adopt a method in which the tension is adjusted so as to obtain an appropriate position. However, this method has the following problems: (1) the length measuring device is expensive, (2) it takes time to measure the length, so that the work efficiency is poor, and (3) it is impossible to manage the positions of a plurality of locations at once. there were.
JP 2003-68453 A

  The present invention has been made in view of such a situation, and when a tension is applied to a metal mask such as a multi-face mask for vapor deposition so that there is no distortion or sagging, the equipment is less expensive than a length measuring device. A metal mask position alignment method and apparatus capable of managing the positions of a plurality of locations in the metal mask so as to be at appropriate positions with high accuracy in a shorter time than when using a length measuring device. The task is to do.

The invention according to the claims 1 was made to solve the above problems, the four sides of each of the plurality of locations of the metal mask marked with alignment marks in advance a plurality of locations, gripped by a plurality of clamps, each clamp A glass scale having a tension step for applying tension to the metal mask by driving in an extending direction of the metal mask, and a reference mark indicating a reference position for a plurality of alignment marks applied to the metal mask. A step of arranging at a measurement position close to the upper surface, and a tension adjustment step of adjusting tensions by the plurality of clamps so that alignment marks formed at a plurality of locations of the metal mask are aligned with reference marks of the glass scale. Metal mask position alignment with How to the gist.

  According to a second aspect of the present invention, in the metal mask position alignment method according to the first aspect, prior to the tension adjusting step, at least one of the metal mask and the glass scale is moved in the vertical and horizontal directions and in the rotational direction to perform rough positioning. It is set as the structure which has the process to perform.

  According to a third aspect of the present invention, in the metal mask position alignment method according to the first or second aspect, the alignment marks are respectively formed in the vicinity of the four corners of the effective area of the metal mask. is there.

  The invention according to claim 4 includes a plurality of tension units arranged so that tension can be applied by gripping a plurality of locations on each of the four sides of the metal mask with alignment marks in a plurality of locations in advance, A glass scale having a reference mark indicating a reference position with respect to a plurality of alignment marks applied to the metal mask, and the glass scale is held and separated above the metal mask held by the plurality of tension units Glass scale holding and raising / lowering means for raising and lowering to a standby position and a measurement position close to the upper surface of the metal mask, and imaging for imaging an overlapping portion of alignment marks formed at a plurality of locations of the metal mask and the reference mark of the glass scale Means provided by the plurality of tension units. The ® down the gist metal mask position alignment device and a individually adjustable adjustment means.

  According to a fifth aspect of the present invention, in the metal mask position alignment apparatus according to the fourth aspect, the plurality of tension units are mounted on the X, Y, and θ stages, and the metal mask and the glass are placed on the X, Y, and θ stages. In this configuration, coarse positioning with the scale can be performed.

  The invention according to claim 6 is the metal mask position alignment apparatus according to claim 4 or 5, wherein the metal mask is provided with four alignment marks, and the alignment marks correspond to the four alignment marks. Four image pickup means are provided, and each alignment mark can be picked up at the same time.

  According to the method and apparatus of the present invention described above, the glass scale is positioned close to the upper surface of the metal mask in a state where tension is applied to the four sides of the metal mask, and a plurality of alignment marks and the glass scale reference of the metal mask are placed. By observing the overlapping state of the marks, you can see whether the position where the metal mask alignment mark is attached is the appropriate position, and put the glass scale reference mark on the metal mask alignment mark. By adjusting the tension applied to the metal mask so that it fits, the position in the metal mask can be aligned with the appropriate position with high accuracy, and alignment can be achieved, for example, multiple mask parts are formed on the metal mask The position of each mask part in the specified position with high accuracy It can be. When performing this alignment, it is only necessary to match the alignment mark on the metal mask with the reference mark on the glass scale. Therefore, the judgment is easy, the tension of the metal mask can be adjusted easily, and the adjustment can be done in a short time. Is possible. Further, since a length measuring device is unnecessary, the function can be satisfied with an inexpensive device, which is economically advantageous.

  The present invention can be applied to any metal mask that needs to be kept flat without distortion or sagging, but is particularly suitable as a multi-face mask for vapor deposition for manufacturing an organic EL element that requires precision. It is preferable to apply to the metal mask to be used. Hereinafter, a preferred embodiment of the present invention will be described by taking a metal mask used as a multi-face mask for vapor deposition in manufacturing an organic EL element as an example. FIG. 1 is a schematic perspective view of a main part of a metal mask position alignment device (hereinafter abbreviated as an alignment device) according to an embodiment of the present invention, and FIGS. 2 and 3 are schematic sectional views showing the alignment device in different operating states. 4 is a schematic plan view showing a plurality of tension units provided in the alignment apparatus and a metal mask held by the tension units, FIG. 5 is a schematic side view of the tension unit, and FIG. 6 is a metal mask handled by the alignment apparatus. FIG. 7 is a schematic perspective view showing a metal mask and a frame after frame attachment, and FIG. 7 is a schematic perspective view showing a frame-like frame for fixing the frame.

  In FIG. 6, reference numeral 1 denotes a right-sided quadrilateral metal mask used as a vapor deposition mask, which is formed by arranging a plurality of mask portions 2 vertically and horizontally. Each mask portion 2 is provided with a large number of minute openings allowing vapor deposition. The shape and arrangement of the openings in each mask part 2 are arbitrary. For example, there are examples in which elongated slit-like openings are arranged in parallel, short openings are arranged in the vertical direction, and are arranged in parallel. Can do. A frame 3 having a large rigidity for attaching the metal mask 1 includes an opening 4 having a size including a region (referred to as an effective region) in which a large number of mask portions 2 of the metal mask 1 are formed. The metal mask 1 is made larger in both the vertical and horizontal directions than the frame 3, and an easy cutting line 5 that can be easily cut by bending is formed at a position substantially corresponding to the outer peripheral edge of the frame 3. The easy cutting line 5 has a strength that can withstand a tensile force applied to the metal mask 1. Furthermore, cross marks 6a, 6b, 6c and 6d are formed as alignment marks in the metal mask 1 in the vicinity of the four corners of the effective area where the plurality of mask portions 2 are formed. Details of the cross marks 6a, 6b, 6c, and 6d will be described later. The thickness of the metal mask 1, the dimensions of the mask portion 2, the dimensions of a large number of minute openings formed thereon are not particularly limited, but as a typical example, the thickness of the metal mask 1 is 30 to 200 μm. The dimensions of the mask portion 2 are 50 to 70 mm in length, 30 to 50 mm in width, 40 to 100 μm in width of the opening, 80 to 150 μm in width of the non-porous portion between the openings arranged in parallel, etc. it can.

  1 to 4, an alignment apparatus generally indicated by reference numeral 10 includes a support base 11, an X, Y, θ stage 12 held on the support base 11 so that the upper surface 12 a is horizontal, A plurality of tension units 13 are provided on the upper surface 12 a of the X, Y, θ stage 12 so as to be able to grip and apply tension on each of the four sides of the metal mask 1. The X, Y, θ stage 12 can adjust the position of the horizontal upper surface 12a in the vertical direction (X direction) and the horizontal direction (Y direction) in the horizontal plane, and also rotates in the direction of rotation about the vertical axis at the center ( The position can also be adjusted in the θ direction.

As shown in an enlarged view in FIG. 5, each tension unit 13 includes a base member 15, a clamp 17 movably held on the base member 15 via a linear guide 16, and a drive for reciprocating the clamp 17. Means 18 and the like are provided. Here, an air cylinder is used as the driving means 18, but a hydraulic cylinder, a servo motor, or the like may be used instead of the air cylinder. The clamp 17 is a toggle mechanism that pivots the movable claw 17b to hold the metal mask 1 between the fixed claw 17a, the movable claw 17b, and the movable claw 17b while pressing the movable claw 17b strongly against the fixed claw 17a. And an air cylinder (both not shown). As can be clearly seen from FIG. 5 , each tension unit 13 is viewed from the side, and the clamp 17 holding one side of the metal mask 1 is driven by the driving means 18 in the extending direction of the metal mask 1. It is arranged so that tension can be applied to the mask 1, and when seen in a plan view as can be clearly understood from FIG. 4, a plurality of portions on each side of the metal mask 1 are clamped by a plurality of tension units 13. 17 is arranged so that it can be gripped and tension can be applied in the direction perpendicular to the sides. Further, the clamps 17 of the plurality of tension units 13 arranged so as to hold each side of the metal mask 1 are arranged in accordance with the mask part 2 and the non-mask part of the metal mask 1, and accordingly, the metal mask A region extending in the vertical direction and a region extending in the horizontal direction in which one mask portion 2 is formed, and a region extending in the vertical direction without the mask portion and a region extending in the horizontal direction are each pulled by a separate clamp 17 to apply tension. Is possible.

  The driving means 18 provided in each of the plurality of tension units 13 has adjusting means (not shown) for individually adjusting the driving force by the driving means so that the tension applied to the metal mask 1 can be individually adjusted. Is provided. More specifically, an air supply pipe is connected to the air cylinder constituting the drive means 18, and a regulator capable of individually adjusting the supply pressure to each air cylinder is provided as an adjustment means in the air supply pipe. It has been. Note that air is supplied to the air supply pipes connected to these air cylinders via a common on-off valve so that the drive means (air cylinders) 18 of all the tension units 13 can be operated simultaneously. A speed controller is also provided in the air supply piping to each air cylinder so that the operation timing of each air cylinder can be adjusted.

  2 and 5, the base member 15 of the tension unit 13 is provided with a frame support 20 that supports the frame 3. The frame support 20 places the frame 3 thereon, thereby positioning the frame 3 at a predetermined position in the horizontal plane, and the upper surface of the frame 3 is held by the clamp 17 and applied to the tension applied to the metal mask 1. It arrange | positions so that it can also position in an up-down direction so that it may become a position which touches substantially.

  In FIG. 1 to FIG. 4, the alignment apparatus 10 is further held by a tension unit 13, and a moving table 23 that is held horizontally by a side frame 22 fixed to the support table 11. A moving device (not shown) that reciprocates between a predetermined position above the metal mask 1 and a standby position that leaves the metal mask 1, and a glass scale holding elevating means 24 held on the moving table 23, , A glass scale 25 held by the glass scale holding / lifting means 24, four imaging means 26 held by the moving table 23, and the like.

  As shown in FIG. 8 and FIG. 9A, the glass scale 25 is formed with a large number of reference lines 27 at a constant pitch (for example, at a pitch of 10 mm) on the surface of a transparent glass substrate, and between the reference lines. Cross marks 28 are formed at a constant pitch in the vertical and horizontal directions. The line width of the reference line 27 is not particularly limited, but is set to about 20 μm. The reference lines 27 formed vertically and horizontally act as reference marks indicating the reference positions of the cross marks 6a, 6b, 6c, 6d that are alignment marks formed on the metal mask 1. That is, the four cross marks 6a, 6b, 6c, and 6d of the metal mask 1 are intersected with the reference line 27 of the glass scale 25 (intersections in the regions indicated by A, B, C, and D in this embodiment). Accordingly, the positions of the four cross marks 6a, 6b, 6c, and 6d of the metal mask 1 can be positioned at predetermined positions, and the effective area of the metal mask 1 can be positioned at the predetermined positions. In other words, the positions of the four cross marks 6a, 6b, 6c and 6d on the metal mask 1 are adjusted by adjusting the tension applied to the metal mask 1 so that the cross marks 6a, 6b, 6c and 6d are formed on the glass scale 25. It is determined so that the metal mask 1 is stretched without distortion or deflection and each mask portion 2 is positioned at a predetermined position when matched with the intersection of the reference lines 27 at A, B, C, and D. ing. Here, the formation positions of the cross marks 6a, 6b, 6c, and 6d are set near the four corners of the effective area where the many mask portions 2 are formed as shown in FIG. This is preferable because the position can be appropriately adjusted with high accuracy and the position of each mask portion 2 can also be adjusted appropriately, but is not limited to this position. Further, the number of cross marks formed on the metal mask 1 can be increased or decreased as appropriate.

  The means for forming the cross mark 6 formed on the metal mask 1 (indicated by reference numeral 6 in the case of a general description unrelated to the position of the cross mark) is not particularly limited, but preferably formed by half etching. To do. As shown in FIG. 9, the cross mark 6 is formed to have a line width wider than the line width of the reference line 27 of the glass scale 25. As shown in FIG. When the vertical and horizontal reference lines 27 are correctly overlapped and imaged and enlarged and displayed on the monitor 30, the cross mark 6 lines appear on both sides of the reference line 27, which are recognized by visual observation or image processing. I can do it. The line width of the cross mark 6 may be selected to be about 50 μm when the line width of the reference line 27 is 20 μm. The length of the cross mark 6 only needs to be long enough to be recognized by visual observation on the monitor 30 or image processing, and may be about 250 μm, for example.

  In FIG. 1 to FIG. 3, the glass scale holding / lifting means 24 is configured such that the reference line 27 formed on the glass scale 25 is parallel to the metal mask 1 stretched below the glass scale 25. 1 so that the side facing 1 is held. Further, the glass scale holding elevating means 24 has a standby position (position shown in FIG. 2) where the glass scale 25 is separated above the metal mask 1 and a measurement position (position shown in FIG. 3) close to the upper surface of the metal mask 1. It has a function to move up and down. Here, when the glass scale 25 is lowered to the measurement position, the glass scale 25 is set to a non-contact position so that trouble does not occur due to contact with the metal mask 1. It is preferable that the cross mark 6 of the metal mask 1 be as close as possible so that the imaging means 26 can capture the image. For this reason, the distance between the glass scale 25 lowered to the measurement position and the metal mask 1 is set to about 50 to 200 μm, preferably about 50 to 100 μm.

  The imaging means 26 can image the reference line 27 of the glass scale 25 and the cross mark 6 of the metal mask 1, and a CCD camera is used in this embodiment. The CCD camera 26 can capture the intersections of the reference lines 27 of the glass scale 25 corresponding to the four cross marks 6a, 6b, 6c, and 6d (intersections of the areas A, B, C, and D shown in FIG. 8). The depth of focus is determined so that the cross mark 6 of the metal mask 1 and the reference line 27 of the glass scale 25 at the measurement position can be simultaneously imaged.

  Next, an alignment operation performed by the alignment apparatus 10 having the above configuration will be described. The frame 3 is held by the frame supports 20 of the plurality of tension units 13 in a state where the moving table 23 holding the glass scale 25 is in the standby position off the upper side of the X, Y, θ stage 12, and then The metal mask 1 is placed on top, and the four sides thereof are held by the clamps 17 of the plurality of tension units 13. This state is the state shown in FIG. At this time, the metal mask 1 is positioned with respect to the frame 3 using a plurality of positioning pins (not shown). Next, the moving base 23 moves above the X, Y, θ stage 12 and stops at a predetermined position (see FIG. 2). Next, pressurized air is sent to driving means (air cylinder) 18 connected to each clamp 17 to move each clamp 17 in a direction away from the metal mask 1, and the metal mask 1 is moved in both vertical and horizontal directions by a number of clamps. A small tension is applied so that the metal mask 1 is stretched. Thereafter, the positioning pin is removed so that a large tension can be applied to the metal mask 1 without hindrance. Even if the positioning pins are removed from the metal mask 1, the position of the metal mask 1 with respect to the frame 3 does not change much, and the desired positioning accuracy of the metal mask 1 with respect to the frame 3 is maintained.

  Next, the glass scale holding / lifting device 24 lowers the glass scale 25 to the measurement position close to the upper surface of the metal mask 1 and stops at that position. Next, imaging is started by the CCD camera 26 and an image is displayed on the monitor 30. While confirming this, the operator adjusts the X, Y, and θ stages 12 to move the position of the metal mask 1 in the X, Y, and θ directions, and the cross marks 6a, 6b, 6c, and 6d of the metal mask 1 are moved. Is roughly positioned at the corresponding intersection of the reference line 27 of the glass scale 25. After the rough positioning, the X, Y, and θ stages 12 are fixed in their positions, and the driving force of the driving means 18 of the plurality of tension units 13 that apply tension to the metal mask 1 is confirmed while checking with the monitor 30. To adjust the tension applied to the metal mask 1 so that the cross marks 6a, 6b, 6c, and 6d coincide with the intersections of the corresponding reference lines 27. When all the cross marks 6a, 6b, 6c, 6d coincide with the intersections of the corresponding reference lines 27, the plurality of mask portions 2 formed on the metal mask 1 are respectively positioned at predetermined positions. . Further, the metal mask 1 is in a flat state without distortion or sagging, and a large number of openings of the mask portion 2 are aligned in parallel. That is, the metal mask position alignment is completed.

  Thereafter, with the tension applied to the metal mask 1, the glass scale 25 is returned to the upper standby position, and the moving table 23 is also returned to the standby position outside the metal mask 1, and the metal mask 1 is attached to the frame 3. Spot welding using a laser or the like (not shown) (see reference numeral 33 in FIG. 4) and fixing. Thereafter, the metal mask 1 is removed from the clamp 17, and the peripheral portion of the metal mask 1 is removed using the easy cutting line 5. By the above, as shown in FIG. 7, the vapor deposition mask apparatus 8 of the structure which fixed the metal mask 1 to the flame | frame 3 can be manufactured.

  In the vapor deposition mask device 8 obtained, the metal mask 1 is kept in a state in which there is no distortion or sagging, and a large number of openings of the mask part 2 are accurately aligned in parallel, and the position of each mask part is also It is kept within a predetermined dimensional accuracy. Thus, by performing vapor deposition using the vapor deposition mask device 8, it is possible to accurately perform vapor deposition of a fine pattern with multiple faces.

  The preferred embodiment of the present invention has been described above, but the present invention is not limited to this embodiment, and can be changed as appropriate within the scope of the claims. For example, in the above-described embodiment, when the tension applied to the metal mask 1 is adjusted, it is determined whether or not the overlap of the intersection of the cross mark 6 of the metal mask 1 and the reference line 27 of the glass scale 25 coincides. Although the monitor 30 is visually observed, a signal from the CCD camera 26 may be determined by image processing instead of visual observation. In the above-described embodiment, the CCD camera 26 is provided corresponding to each cross mark 6. However, the present invention is not limited to this, and one or two CCD cameras 26 should be used to image the CCD camera 26. You may take the method of moving to a position and using it. However, if the CCD camera 26 is provided corresponding to each cross mark 6 as in the illustrated embodiment, the tension adjustment can be performed while monitoring all the cross marks 6, and the tension adjustment is easy. And the advantage that it can be performed quickly is obtained.

  Furthermore, in the above-described embodiment, the cross mark 6 is used as the alignment mark formed on the metal mask 1, but the alignment mark is not limited to the cross mark, and a reference mark (for example, a reference mark) formed on the glass scale 25 is used. Any mark can be used as long as it can be aligned with the line 27). For example, a square mark may be used. In addition, the alignment mark is not limited to a single mark that can indicate the position in the vertical direction and the horizontal direction, such as a cross mark or a square mark, but is simply a horizontal line or a vertical line. In addition, those indicating only the position in the vertical direction or those indicating only the position in the horizontal direction may be used in appropriate combination. Furthermore, in the above-described embodiment, a large number of reference lines 27 are formed as a reference mark on the glass scale 25 in a lattice shape. However, it is not necessary to provide a large number of reference lines 27 provided on the glass scale 25 in this manner. A reference line 27 that passes only the areas A, B, C, and D in FIG. 8 may be used. Further, a cross mark may be formed in the areas A, B, C, and D in FIG. It may be a reference mark. In addition, when the thing which formed many reference | standard lines 27 in the grid | lattice form like the illustrated glass scale 25, the advantage which can respond to a metal mask of various sizes will be acquired.

  Furthermore, in the above-described embodiment, the alignment marks (cross marks 6) are formed at four locations on the metal mask 1, but the number of alignment mark formation locations can be increased or decreased as appropriate. If positioning in only the direction or only in the horizontal direction is sufficient, the alignment marks may be changed to be formed only in two places separated in the vertical direction or only in two places separated in the horizontal direction.

  Furthermore, in the above-described embodiment, the tension unit 13 that supports the metal mask 1 is held on the X, Y, and θ stages 12 in order to perform the rough positioning of the metal mask 1 and the glass scale 25. The glass scale holding elevating device 24 holding the glass scale 25 may be held on the X, Y, and θ stages. In some cases, coarse positioning may be omitted, and alignment of the cross mark and the reference line may be performed only by tension adjustment. However, as described in the embodiment, if rough alignment is performed, there is an advantage that tension adjustment for alignment between the cross mark and the reference line becomes easy.

The schematic perspective view of the principal part of the alignment apparatus which concerns on embodiment of this invention 1 is a schematic cross-sectional view showing the alignment apparatus shown in FIG. 1 in a state where the glass scale is in the upper standby position. 1 is a schematic cross-sectional view showing the alignment apparatus shown in FIG. 1 in a state where the glass scale is in a measurement position close to the upper surface of the metal mask. FIG. 1 is a schematic plan view showing a plurality of tension units provided in the alignment apparatus shown in FIG. 1 and a metal mask held by the tension units. Schematic side view of tension unit FIG. 1 is a schematic perspective view showing a metal mask handled by the alignment apparatus shown in FIG. 1 and a frame-like frame for fixing the metal mask. Schematic perspective view of a vapor deposition mask device formed by fixing a metal mask to a frame Schematic plan view of metal mask and glass scale (A) is a schematic plan view showing an enlarged intersection region of a reference line formed on a glass scale, (b) is a schematic plan view showing an enlarged cross mark formed on a metal mask, (c) Is a schematic front view showing a state where an overlapping area of cross marks at the intersection of the reference laminate is imaged and displayed on a monitor

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Metal mask 2 Mask part 3 Frame 4 Opening 5 Easy cutting line 6, 6a, 6b, 6c, 6d Cross mark (alignment mark)
DESCRIPTION OF SYMBOLS 8 Deposition mask apparatus 10 Alignment apparatus 11 Support stand 12 X, Y, (theta) stage 13 Tension unit 15 Base member 16 Linear motion guide 17 Clamp 17a Fixed claw 17b Movable claw 18 Driving means (air cylinder)
20 Frame support 22 Side frame 23 Moving table 24 Glass scale holding / lifting means 25 Glass scale 26 Imaging means (CCD camera)
27 Reference line (reference mark)
30 Monitor 33 Spot welding

Claims (6)

A plurality of locations on each of the four sides of the metal mask with alignment marks in advance at a plurality of locations are each gripped by a plurality of clamps, and each clamp is driven in the extending direction of the metal mask to apply tension to the metal mask. A tensioning step, a step of arranging a glass scale having a reference mark indicating a reference position for a plurality of alignment marks applied to the metal mask at a measurement position close to the upper surface of the metal mask, and a plurality of the metal masks A metal mask position alignment method comprising: a tension adjustment step of adjusting tensions by the plurality of clamps so that alignment marks formed at the locations are aligned with reference marks of the glass scale.   The metal mask position alignment method according to claim 1, further comprising a step of rough positioning by moving at least one of the metal mask and the glass scale in the vertical and horizontal directions and in the rotational direction prior to the tension adjusting step.   3. The metal mask position alignment method according to claim 1, wherein the alignment marks are formed in the vicinity of four corners of the effective area of the metal mask.   A plurality of tension units arranged so that tension can be applied by holding a plurality of locations on each of the four sides of the metal mask with alignment marks at a plurality of locations in advance, and a plurality of tension units applied to the metal mask A glass scale having a reference mark indicating a reference position with respect to the alignment mark, and a stand-by position above the metal mask that holds the glass scale and is held by the plurality of tension units and close to the upper surface of the metal mask A glass scale holding / lifting means for moving up and down to the measured position, an imaging means for picking up an overlapping portion of an alignment mark formed at a plurality of locations of the metal mask and a reference mark of the glass scale, and the plurality of tension units The tension applied by each can be adjusted individually Metal mask position alignment device and a regulating means.   The metal mask position alignment apparatus according to claim 4, wherein the plurality of tension units are mounted on an X, Y, and θ stage.   6. The metal according to claim 4, wherein alignment marks are provided at four locations on the metal mask, and four imaging devices are provided corresponding to the alignment marks at four locations. Mask position alignment device.

Images