JP2005135827A - Light-emitting element base plate and image display device using the same - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a light-emitting element base plate restraining discharge of flat panel display displaying an image by irradiation of electron emitted from an electron source on a light-emitting element like phosphor. <P>SOLUTION: The light-emitting element base plate having a light-emitting member is composed of a base plate having a light-emitting element layer including a plurality of light-emitting areas on a surface thereof, a conductive film covering the light-emitting element layer, and an insulator film covering the conductive film so as to be arranged on the plurality of light-emitting areas. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  The present invention relates to a light emitter substrate for an image display device using an electron beam such as a field emission display (FED), and an image display device using the light emitter substrate.

  Image display devices such as CRTs are actively researched as they are required to have a larger size. In recent years, a display using a field emission electron-emitting device or a surface conduction electron-emitting device as a thin image display device has been developed (see Patent Document 1, Patent Document 2, and Patent Document 3).

  Patent Document 3 discloses a multi-electron beam source as shown in FIG. 11, for example. In the figure, reference numeral 4001 schematically shows a surface conduction electron-emitting device, 4102 is a column-direction wiring, 4103 is a row-direction wiring, and constitutes a multi-electron beam source wired in a simple matrix. FIG. 11 shows the structure of a cathode ray tube (also referred to as an image display panel) using this multi-electron beam source, and an outer container bottom 4001 provided with the multi-electron beam source 4101 (note that A side plate 4003 (which may also be described as a support frame or an outer container frame), and a face plate 4002 including a phosphor layer 4201 and a metal back 4203. In addition, the phosphor layer 4201 on the face plate 4002 is provided with a phosphor that is excited by an electron beam to emit light and a black matrix that suppresses reflection of external light and prevents color mixture of the phosphor. Further, a high voltage is applied to the phosphor layer 4201 and the metal back 4203 from the high voltage introduction terminal 4005 to form an anode electrode.

The image display apparatus as described above applies a high voltage (also referred to as an acceleration voltage or an anode voltage) to the metal back 4203 which is a part of the anode electrode, and between the rear plate 4001 and the face plate 4002. An image is formed by generating an electric field, accelerating the electrons emitted from the electron beam source 4101, exciting the phosphor, and emitting light. Here, since the luminance of the image display device greatly depends on the acceleration voltage, it is necessary to increase the acceleration voltage in order to increase the luminance. In order to reduce the thickness of the image display device, it is necessary to reduce the thickness of the image display panel. Therefore, the distance between the rear plate 4001 and the face plate 4002 must be reduced. As a result, a considerably high electric field is generated between the rear plate 4001 and the face plate 4002.
JP 2002-343241 A Japanese Patent No. 3343060 Japanese Patent No. 2903295

  However, the display panel described above has the following problems.

  FIG. 12 is a schematic view showing a cross section of the display panel described above.

  The image display device includes a rear plate 2001 having an electron beam source 2101 and a face plate 2002 having a metal back 2103 as an anode electrode, and an acceleration voltage Va is applied to the anode electrode 2203. Here, the anode electrode 2203 is insulated by a vacuum gap between the face plate 2002 and the rear plate 2001. Here, the dimension of the vacuum gap defines the depth of the image display panel, and is preferably smaller. However, when the depth of the display panel is reduced, even if the same voltage is applied to the anode electrode 2203, the electric field intensity, which is a value obtained by dividing the same voltage by the distance, increases, and the probability of discharge increases. When the discharge occurs, the image quality of the image display apparatus may be significantly deteriorated, which is a serious problem in improving the reliability of the image display apparatus.

  Here, since electrons emitted from the electron beam source 2101 on the rear plate 2001 must fly to the face plate 2002, the inside of the image display device surrounded by the rear plate, the face plate, and the side wall is kept in a vacuum. There is a need.

  The causes of discharge in vacuum are as follows: (1) Electron emission due to electric field concentration occurs in the minute protrusions existing on the cathode (here, the rear plate), and the minute protrusions are heated by Joule heat due to the current flowing through the minute protrusions. (Cathode heating theory), or the opposite anode (face plate in this case) is heated by electron collision (Anode heating theory), leading to discharge. (2) Clamps / microparticles adhering to the electrode are static. For example, it is released and accelerated by electric power and collides with the electrode, and the electrode and particles are heated, leading to discharge (clamp theory).

  When the size of the image display panel is increased, there is a high possibility that foreign matter particles mixed in during the manufacturing process and member dropouts falling off the members are mixed in as the area increases. Therefore, the larger the display panel is, the greater the influence of the discharge due to the clamp theory / foreign particles in (2).

Therefore, the present invention has been made to solve the above-described problems, that is,
A light emitter substrate having a light emitting member,
(A) a substrate having a phosphor layer including a plurality of light emitting regions on its surface;
(B) a conductive film covering the phosphor layer;
(C) an insulator film covering the conductive film so as to be disposed on the plurality of light emitting regions;
It is characterized by having.

The present invention is further characterized in that the volume resistivity of the insulator film is 1 × 10 ⁶ Ωcm or more.

  Further, the present invention is further characterized in that the thickness of the insulator film is 0.1 μm or more and 2 μm or less.

The present invention is further characterized in that the insulator film is made of a material selected from SiO ₂ , Al ₂ O ₃ , ZrO ₂ , and TiO ₂ .

  Further, the present invention is characterized in that the light emitting layer further includes a member having a plurality of openings, and a phosphor disposed in each of the plurality of openings.

  Further, the present invention is further characterized in that the insulator film is composed of an aggregate of a plurality of insulator particles.

  Further, the present invention is further characterized in that a part of the plurality of insulator particles has a getter material on the surface thereof.

  The present invention is further characterized in that the conductive film is composed of a plurality of conductive films arranged in the row direction at intervals.

  Further, in the present invention, each of the plurality of conductive films arranged on the substrate and in the region where the light emitting layer is not arranged is commonly used via the first resistor. It is also characterized by having a common electrode to be connected.

  In the present invention, each of the plurality of conductive films is further connected to the common electrode via the first resistor at an end in a column direction which is a direction perpendicular to the row direction. It is also characterized by

  The present invention is further characterized in that the plurality of conductive films are formed of a single film in which conductive regions and insulating regions are alternately connected in series.

  The present invention is also characterized by an image display device using the light emitter substrate.

  According to the present invention, a pressure-reduced state is maintained between at least a rear plate having an electron beam source and a face plate having a light emitter that emits light by electron beam irradiation and an anode electrode for applying an electron acceleration voltage. In the flat-panel image display device, it is possible to reduce the influence of electric discharge caused by foreign particles present in the reduced pressure space, and it is possible to obtain an image display device with high yield and high reliability.

  An image display device that maintains a vacuum state (reduced pressure state) between an anode substrate (face plate) and an electron source substrate (rear plate) and applies a high voltage between the anode and the electron source, as in the present invention. In this case, as described above, when foreign particles exist in the space between the face plate and the rear plate, discharge due to the foreign particles may occur.

  Discharge due to foreign particles is charged when the foreign particles are charged by the electric field in the image display panel and are subjected to Coulomb force, so that the foreign particles are accelerated to obtain energy and collide with the counter substrate, and the electrodes and particles are heated. It is thought that it came to.

  Here, when the particle size (radius) of the spherical particles is r, and the voltage between the gaps sandwiched between the parallel plate electrodes is V / electric field is E (E = V / d where the gap is d), the particles The charged charge amount q (absolute value) is expressed by the following formula 1.

  Here, ε is the dielectric constant of the medium (here, vacuum). The amount of charge induced is negative when the particles are attached to the cathode side, and is positive when the particles are attached to the anode side. When the particles are charged, they receive energy from the electric field and begin to fly toward the counter substrate. When it collides with the electrode of the counter substrate, the particles bounce back and at the same time are charged to the opposite sign (exchange the charge), so they fly again toward the counter electrode. Therefore, it is considered that when the charged charge amount of the particles is increased, the energy of the particles is increased and the discharge is easily caused.

  Therefore, in the present invention, as shown in FIG. 1, an insulating film 1205 that prevents charging of particles is provided on the surface of the metal back 1203 that is an anode electrode (conductive film) of the face plate 1002, thereby forming particles. Cannot exchange charges upon collision with the anode electrode, and can limit the energy that the particles can obtain. As a result, discharge by particles can be limited.

  The function required for the insulating film 1205 provided on the surface of the metal back 1203 is to first prevent the particles from being charged. For this purpose, when the particles try to make contact with the face plate, it is necessary to have a current limiting property to prevent the opposite sign from being exchanged during the operation time when the particles collide with the metal back 1203. It is. That is, when the particles contact the face plate, if the resistance value between the particles and the metal back is greater than a certain value, the amount of charge exchanged during contact of the particles with the face plate can be prevented. Therefore, by providing an insulator film on the metal back, which is a conductive film provided on the top surface of the phosphor layer of the faceplate, it is possible to limit the charge exchange of the particles, and as a result, prevent the discharge caused by the particles and ensure reliability. An image display device with high performance can be obtained.

The requirement for the insulator film includes a resistance value felt by the particles. The resistance value between the particles and the metal back that is the anode electrode is determined by the volume resistivity and thickness of the insulating film. As a result of intensive studies by the inventors, it is possible to suppress discharge due to particles by setting the volume resistivity of the insulator film to 1 × 10 ⁶ Ωcm or more.

  In terms of thickness, due to the configuration of the image display device, electrons emitted from the electron emission source of the rear plate 1001 are accelerated by the acceleration voltage between the rear plate and the face plate and fly toward the face plate. The accelerated electrons lose energy in the metal back and the insulator film and collide with the phosphor to cause the phosphor to emit light and form an image. Here, when the thickness of the metal back and the insulator film is 2 μm or more, the energy loss of electrons in the insulator film is too large to allow the phosphor to emit light. Therefore, the thickness of the insulator film is desirably 2 μm or less.

  In addition, the insulator film thickness necessary for suppressing the charging of the particles is preferably 0.1 μm or more because the particles are charged by the tunneling action ignoring the volume resistivity if it is too thin. .

  By providing the insulator film as described above on the metal back, it is possible to obtain a highly reliable light-emitting substrate and image display device in which discharge due to foreign particles is suppressed.

  The image display panel of the present invention may be provided with a getter in order to keep the inside in a vacuum. As the getter material, a metal vapor deposition film such as Ba is often used. Further, since the exhaust effect by the getter increases as the surface area of the getter increases, it may be deposited on the metal back of the FP. In that case, even if the insulating film as described above is provided, the metal film is deposited, so that the resistance value perceived by the particles becomes small, and charging becomes easy.

  Therefore, if the insulating particles are adhered on the metal back, the getter's metal vapor deposition film can be produced discontinuously, so that the charge amount of the foreign particles can be suppressed.

  Moreover, the discharge current at the time of discharging can be suppressed by dividing the metal back into strips and reducing the capacitance per strip. The region to be divided is preferably a region where no phosphor is provided in terms of the function of the metal back. Further, each divided metal back is irradiated with an electron beam from the opposed rear plate, and a current flows. If the voltage drop due to the flowing current differs greatly depending on the divided metal back line, the uniformity may be poor. Therefore, each divided metal back is preferably connected to a common electrode connected to an external power source via a resistor. In that case, the above-mentioned insulating layer or insulating particles are in the metal back division region (non-light emitting region), so that the energy loss of the electron beam contributing to light emission can be minimized.

  Exemplary embodiments of the present invention will be described in detail below with reference to the drawings. However, the dimensions, materials, shapes, relative arrangements, and the like of the components described in this embodiment are not intended to limit the scope of the present invention to those unless otherwise specified. Absent.

[Embodiment 1]
The first embodiment of the present invention will be described below with reference to FIG. 1 and FIG.

  FIG. 2 is a perspective view of the display panel used in this embodiment, and a part of the panel is cut away to show the internal structure.

  In the figure, reference numeral 1001 denotes an outer container bottom (which may also be referred to as a rear plate), 1003 a side wall, and 1002 a face plate, and 1001 to 1003 are used to keep the inside of the display panel in a vacuum state. A container is formed. Here, the interval (gap) between the rear plate 1001 and the face plate 1002 was set to 2 mm.

  Here, N × M surface conduction electron-emitting devices 1101 are formed on the rear plate 1001. (N and M are positive integers of 2 or more and are appropriately set according to the target number of display pixels. In this embodiment, N = 240 and M = 80.) The surface conduction electron-emitting devices are simply matrix-wired by M row-direction wirings 1103 and N column-direction wirings 1102. The portion constituted by 1101 to 1103 is called a multi-electron beam source. Although the surface conduction electron-emitting device is used here, it is needless to say that other electron-emitting devices such as a field emission electron-emitting device using carbon nanotubes can be used.

  In addition, the face plate 1002 has a metal back 1203 that is an anode electrode that encloses the phosphor film 1201, and an anode potential is supplied through the high-pressure introduction unit 1005. The high voltage take-out section is provided with a high voltage introduction terminal (not shown) on the face plate side and is connected to a high voltage power source 1006.

  FIG. 1 is a cross-sectional view of the display panel used in this embodiment.

Here, the face plate 1002 is provided with an insulator film 1205 on the metal back 1203 which is a feature of the present invention. As a material for the insulator film 1205, it is sufficient that the insulator film 1205 has a resistance value that inhibits the charging of the particles. However, in this embodiment, SiO2 that can be easily formed and has a high volume resistivity is used. In this embodiment, SiO2 is used as the insulator film. However, the present invention is not limited to this. For example, an oxide film such as alumina, zirconia, or titania may be used, or a nitride film such as AlN, GeN, or BN. Etc. Further, as the insulator film SiO2 of this embodiment example, a SiO2 film having a thickness of 1 [mu] m was formed by CVD. Similarly, a 1 μm-thick SiO 2 film was formed on the volume resistivity measurement pattern by CVD, and the volume resistivity was measured and found to be 3 × 10 ¹⁶ [Ω · cm].

  When a high voltage of 10 kV was applied to the image display device thus obtained, no discharge occurred over a long period of time, and a stable image could be displayed.

  Next, the multi-electron beam source used for the display panel will be described.

  As long as the multi-electron beam source used in the image display apparatus of the present invention is an electron source in which the cold cathode elements are arranged in a simple matrix or a ladder, there is no limitation on the material, shape or manufacturing method of the cold cathode elements. Therefore, for example, a cold cathode device such as a surface conduction electron-emitting device, FE type, or MIM type can be used.

  However, a surface conduction electron-emitting device is particularly preferable among these cold cathode devices under the circumstances where a display device having a large display screen and a low price is required. In other words, in the FE type, the relative position and shape of the emitter cone and the gate electrode greatly affect the electron emission characteristics, and thus an extremely high-precision manufacturing technique is required. However, this increases the area and reduces the manufacturing cost. It will be a disadvantageous factor to achieve. Further, in the MIM type, it is necessary to make the insulating layer and the upper electrode thin and uniform, but this is also a disadvantageous factor in achieving a large area and a reduction in manufacturing cost. In that respect, since the surface conduction electron-emitting device is relatively simple to manufacture, it is easy to increase the area and reduce the manufacturing cost. Further, the inventors have found that among the surface conduction electron-emitting devices, those in which the electron emission portion or its peripheral portion is formed of a fine particle film are particularly excellent in electron emission characteristics and can be easily manufactured. Therefore, it can be said that it is most suitable for use as a multi-electron beam source of a high-luminance and large-screen image display device. Therefore, in the display panel of the above embodiment, a surface conduction electron-emitting device in which the electron emission portion or its peripheral portion is formed from a fine particle film is used.

  Next, a method for manufacturing a display panel of an image display device to which the present invention is applied will be described with a specific example.

(Rear plate process)
<Formation of wiring and electrodes>
A 0.5 [μm] SiO ₂ layer is formed on the surface of the washed soda glass by sputtering, and an element electrode 1105 of a surface conduction electron-emitting device is formed by using a sputtering film forming method and a photolithography method. The material is a laminate of 5 [nm] Ti and 100 [nm] Ni. The element electrode spacing was 2 [μm] (FIG. 6A).

  Subsequently, an Ag paste was printed in a predetermined shape and baked to form column-direction wirings 1102. The column-direction wiring 1102 is extended to the outside of the electron source formation region and serves as an electron source driving wiring. The wiring 1102 has a width of 100 [μm] and a thickness of about 10 [μm] (FIG. 6B).

  Next, an insulating layer 1106 is formed by a printing method using a paste containing PbO as a main component and a glass binder. This insulates the column-direction wiring 1102 from the row-direction wiring 1103 described later, and is formed to have a thickness of about 20 [μm]. Note that a notch is provided in the portion of the element electrode 1105 to connect the row direction wiring 1103 and the element electrode (FIG. 6C).

  Subsequently, row direction wirings 1103 are formed on the insulating layer 1106 (FIG. 6D). The method is the same as that in the case of the column direction wiring 1102. The row direction wiring 1103 has a width of 300 [μm] and a thickness of about 10 [μm].

<Preparation of electron beam source>
Subsequently, an element film 1104 made of PdO fine particles is formed. The element film 1104 is formed by forming a Cr film by sputtering on a substrate (rear plate) 1001 on which row / column-direction wirings 1102 and 1103 are formed, and corresponding to the shape of the element film 1104 by photolithography. An opening is formed in the Cr film. Subsequently, a solution of an organic Pd compound (ccp-4230: manufactured by Okuno Pharmaceutical Co., Ltd.) was applied and baked in the atmosphere at 300 [° C.] for 12 minutes to form a PdO fine particle film, and then the Cr The film is removed by wet etching, and an element film 1104 having a predetermined shape is formed by lift-off (FIG. 6E).

  Next, the rear plate 1001 is connected to a vacuum exhaust device (not shown) and exhausted. When the pressure in the apparatus becomes 10-4 [Pa] or less, a forming process is performed. The forming process was performed by applying a pulse voltage having a gradually increasing peak value to the row direction wiring for each row in the row direction. The pulse interval was 10 [sec] and the pulse width was 1 [msec]. In addition, the current value of the forming pulse is measured, the resistance value of the electron-emitting device is measured at the same time, and when the resistance value per element exceeds 1 [MΩ], the forming process for the row is terminated. Move on to the next line. This is repeated to complete the forming process for all rows.

  Next, an activation process is performed. Prior to this treatment, the vacuum device is evacuated by an ion pump while maintaining the pressure at 200 [° C.], and the pressure is reduced to 10 −5 [Pa] or less. Subsequently, acetone is introduced into the vacuum apparatus. The introduction amount was adjusted so that the pressure was 1.3 × 10 −2 [Pa]. Subsequently, a pulse voltage is applied to the row direction wiring. The pulse waveform is a rectangular wave pulse with a peak value of 16 [V], the pulse width is 100 [μsec], and the row direction wiring to which pulses are applied at intervals of 125 [μsec] is switched to the adjacent row, and the row direction is sequentially increased. Repeatedly applying a pulse to each wiring. As a result, pulses are applied to each row at intervals of 10 [msec]. As a result of this processing, a deposited film containing carbon as a main component is formed in the vicinity of the electron emission portion of each electron emission device, and the device current If and the emission current Ie increase. In this manner, an electron beam source 1101 of the image display device was manufactured.

(Face plate process)
Using a glass paste and a paste containing a black pigment, a matrix-like black matrix 1202 as shown in FIG. 10A was produced with a thickness of 10 μm by screen printing. Here, the black matrix 1202 is used for preventing color mixing of the phosphor, preventing color shift even if the beam is slightly deviated, and absorbing external light to improve image contrast. Provided. In this embodiment, the black matrix is produced by the screen printing method. However, the present invention is not limited to this, and may be produced by using, for example, a photolithography method. Further, as a material of the black matrix 1102, a paste containing a glass paste and a black pigment is used. However, the material is not limited to this, and for example, carbon black may be used. In this embodiment, the black matrix 1102 is formed in a matrix shape as shown in FIG. 10A. However, the black matrix 1102 is not limited to this. It may be an array of shapes (not shown) or other arrangements.

Next, as shown in FIG. 10 (a), three colors of phosphors are applied three times for each color by screen printing using red, blue, and green phosphor paste at the openings of the black matrix 1202. Separately produced. In the present embodiment, the phosphor film is produced by using the screen printing method, but it is not limited to this, and it may be produced by, for example, a photolithography method. The phosphor is a P22 phosphor used in the field of CRT, and is red (P22-Re ₃ ; Y ₂ O ₂ S: Eu ³⁺ ), blue (P22-B ₂ ; ZnS: Ag, Al), green Although (P22-GN ₄ ; ZnS: Cu, Al) is used, it is of course not limited thereto, and other phosphors may be used.

  Next, a resin intermediate film is produced by a filming process known in the field of cathode ray tubes, a metal vapor deposition film (Al in this embodiment) is produced, and finally the resin intermediate layer is thermally decomposed and removed. Thus, a metal back having a thickness of 100 nm was produced. Thereafter, the insulator film 1205 which is a feature of the present invention was produced as described above.

(Integration (sealing) process)
When assembling an airtight container, it is necessary to seal the joints of each member in order to maintain sufficient strength and airtightness. For example, frit glass is applied to the joints, and in the air or in a nitrogen atmosphere, Celsius. Sealing was achieved by baking at 400 to 500 degrees for 10 minutes or more. A method for evacuating the inside of the hermetic container will be described later.

  Further, in order to evacuate the inside of the hermetic container to a vacuum, after assembling the hermetic container, an exhaust pipe (not shown) and a vacuum pump are connected, and the inside of the hermetic container is reduced to a degree of vacuum of about 10 to the fifth power [Pa]. Exhaust. Thereafter, the exhaust pipe is sealed. In order to maintain the degree of vacuum in the hermetic container, a getter film (not shown) is formed at a predetermined position in the hermetic container immediately before or after sealing. A getter film is a film formed by, for example, heating and vapor-depositing a getter material mainly composed of Ba by a heater or high-frequency heating, and the inside of the hermetic container is 1 × 10 6 by the adsorption action of the getter film. The degree of vacuum is maintained at a minus third power or a negative fifth power of 1 × 10 [Pa].

[Embodiment 2]
The second embodiment of the present invention will be described below with reference to FIG. However, in the second and subsequent embodiments, since the same image display apparatus as that in the first embodiment is used, only the characteristic portions in the present embodiment will be described below.

In the display panel maintained in a vacuum by the rear plate 1001, the side wall 1003, and the face plate 1002 as in the first embodiment, the face plate 1002 includes an insulator on the metal back 1203, which is a feature of the present invention, and in a non-light emitting region A membrane 1205 is provided. As a material of the insulator film 1205, SiO ₂ is used as in the first embodiment, but it is not limited to this. Further, the insulator film 1205 of this embodiment example was formed to a thickness of 5 μm by CVD with masking SiO ₂ .

When a high voltage of 10 kV was applied to the image display device thus obtained, no discharge occurred for a long time, and a stable image could be displayed. Further, since there is no SiO _{2 in} the light emitting region of the face plate 1002, there is no energy loss of the electron beam due to the SiO ₂ film, so that a bright and high-contrast good image can be obtained.

[Embodiment 3]
The third embodiment of the present invention will be described below with reference to FIG. However, in the second and subsequent embodiments, since the same image display apparatus as that in the first embodiment is used, only the characteristic portions in the present embodiment will be described below.

In the display panel maintained in vacuum by the rear plate 1001, the side wall 1003, and the face plate 1002 as in the first embodiment, the insulating particles 1206, which are the features of the present invention, are disposed on the metal back 1203 of the face plate 1002. ing. The material of the insulator particles 1206 may be any material as long as the volume resistivity is approximately 1 × 10 ⁶ or more, but here, SiO ₂ particles having a particle diameter of 3 μm were used. The particle diameter may remain in the image display panel and may be considered based on the particle diameter that may cause discharge, and it is preferable to use a particle diameter of about several μm to several tens of μm. In addition, regarding the adhesion of the insulating particles 1206, it is sufficient that the insulating particles 1206 are struggling with a force stronger than the Coulomb force applied to the insulating particles 1206, but in this embodiment, an extremely small amount of water glass is blended when the particles are dispersed. The back 1203 and the insulating particles 1206 are bonded.

  When a high voltage of 10 kV was applied to the image display device thus obtained, no discharge occurred for a long time, and a stable image could be displayed.

[Embodiment 4]
Hereinafter, a fourth embodiment of the present invention will be described with reference to FIG. However, in the second and subsequent embodiments, since the same image display apparatus as that in the first embodiment is used, only the characteristic portions in the present embodiment will be described below.

  In the display panel maintained in a vacuum by the rear plate 1001, the side wall 1003, and the face plate 1002 as in the third embodiment, the insulating particles 1206, which is a feature of the present invention, are disposed on the metal back 1203 of the face plate 1002. ing. A getter film 1207 is provided on the metal back 1203 and the insulator particles 1206 in order to keep the inside of the image display panel in a vacuum. As a material for the getter film, it is sufficient that gas molecules in the image display panel can be effectively adsorbed. In this embodiment, a Ba film is provided. In addition, Ti and the like may be used because they have good gas molecule adsorption characteristics. As described above, even when the conductive getter film is provided on the face plate 1002 side, the getter film is discontinuous because of the presence of the insulator particles 1206, and the charge amount of the foreign particles can be limited.

  When a high voltage of 10 kV was applied to the image display device thus obtained, no discharge occurred for a long time, and a stable image could be displayed.

[Embodiment 5]
A fifth embodiment of the present invention will be described below with reference to FIGS. However, in the second and subsequent embodiments, since the same image display apparatus as that in the first embodiment is used, only the characteristic portions in the present embodiment will be described below.

  6 is a schematic cross-sectional view of the image area of the image display device of the present invention cut along a plane parallel to the column direction. FIG. 7 shows the face plate 1002 of the image display device of the present invention on the inner surface of the image display panel. It is a typical top view of the row direction termination part of an image field.

  In the display panel maintained in vacuum by the rear plate 1001, the side wall 1003, and the face plate 1002 as in the first embodiment, the face plate 1002 is supplied with power to the strip-shaped metal back 1208 and the strip-shaped metal back 1208. A common electrode 1211, a resistor 1210 that electrically connects the common electrode 1211 and each of the strip-shaped metal backs 1208, and a high-resistance or insulating strip-shaped metal that is hardly electrically connected to the strip-shaped metal back 1208 A back part 1209 is provided. By providing the metal back in a strip shape, the amount of charge flowing into the rear plate 1001 during discharge can be reduced, the discharge current can be reduced, and damage due to discharge can be reduced. Further, by having the common electrode 1211 and the resistor 1210, the respective strips are connected with an appropriate resistance value, and it is possible to limit the current flowing from the other regions into the discharged strip portion, and at the same time at the normal time ( When displaying an image), the potential can be made substantially the same. In addition, by having the high-resistance or insulating strip-shaped metal back dividing portion 1209 between the strip-shaped metal backs 1209, it is possible to restrict the current from flowing into the discharged strip portions from other regions.

  For the production of the strip-shaped metal back 1208, a method of depositing aluminum as a metal back only on a necessary portion by masking may be used, or aluminum is vapor-deposited on the entire surface and a portion that is not necessary such as lift-off or laser trimming is removed later. It can also be obtained in such a way. The common electrode 1211 was formed using a thick film process such as screen printing using a conductive paste containing silver particles. Similarly, the resistor 1210 was formed by using a thick paste process such as screen printing using a resistor paste containing ruthenium oxide. In addition, as the high-resistance or insulating strip-shaped metal back dividing portion 1209, the black matrix described in the first embodiment can be screen printed using an insulating material (including a low-melting glass and a black pigment). Produced.

  By using such a face plate 1002, the charged charge amount of the foreign particles can be limited by the high-resistance or insulating strip-shaped metal back dividing portion 1209, and the discharge due to the foreign particles can be limited. Further, the strip-shaped metal back 1208 can reduce damage during discharge.

  When a high voltage of 10 kV was applied to the image display device thus obtained, no discharge occurred for a long time, and a stable image could be displayed. In addition, discharge was generated when the applied voltage was forcibly increased to 15 kV, but a highly reliable image display apparatus in which there was almost no damage due to discharge and the image quality was not deteriorated could be obtained.

[Embodiment 6]
The sixth embodiment of the present invention will be described below with reference to FIGS. 8 and 9. However, in the present embodiment example, the same image display apparatus as that of the embodiment example 5 is used, and therefore, only the characteristic part in the present embodiment example will be described below.

  FIG. 8 is a schematic cross-sectional view of the image area of the image display device according to the present invention cut along a plane parallel to the column direction. FIG. 9 shows the face plate 1002 of the image display device according to the present invention on the inner surface of the image display panel. It is a typical top view of the row direction termination part of an image field.

  In the display panel maintained in vacuum by the rear plate 1001, the side wall 1003, and the face plate 1002 as in the first embodiment, the face plate 1002 is supplied with power to the strip-shaped metal back 1208 and the strip-shaped metal back 1208. A common electrode 1211, a resistor 1210 that electrically connects the common electrode 1211 and each of the strip-shaped metal backs 1208, and a high-resistance or insulating strip-shaped metal that is hardly electrically connected to the strip-shaped metal back 1208 A back part 1209 is provided.

  In addition, the image display panel of the present invention is provided with a getter film on the face plate 1002 in order to keep the inside in a vacuum. As a material for the getter film, it is sufficient that gas molecules in the image display panel can be effectively adsorbed. In this embodiment, a Ba film is provided. In addition, Ti and the like may be used because they have good gas molecule adsorption characteristics. Since the getter film as described above has conductivity, when the film is formed on the high-resistance or insulating strip-shaped metal back dividing portion 1209, the strip-shaped metal back 1208 is electrically connected to each other. Therefore, as in the third embodiment, the insulating particles 1206 are provided in the high-resistance or insulating strip-shaped metal back dividing portion 1209 so that the getter film can be made discontinuous. Connection can be prevented. As the material of the insulator particles 1206, as in the third embodiment, SiO2 particles having a particle diameter of 3 μm were used. As for the place where the insulator particles 1206 are provided, the above-mentioned purpose can be achieved even with the entire inner surface of the face plate 1002, but by providing only the non-light emitting portion, the energy loss of the electron beam due to the insulator particles 1206 can be eliminated. Therefore, it was provided in the strip-shaped metal back dividing part 1209 of a high resistance body or an insulator.

  When a high voltage of 10 kV was applied to the image display device thus obtained, no discharge occurred for a long time, and a stable image could be displayed. In addition, discharge was generated when the applied voltage was forcibly increased to 15 kV, but a highly reliable image display apparatus in which there was almost no damage due to discharge and the image quality was not deteriorated could be obtained.

1 is a schematic cross-sectional view showing an image display device according to a first embodiment of the present invention. 1 is a schematic perspective view showing an image display device according to a first embodiment of the present invention with a part cut away. It is typical sectional drawing which showed the image display apparatus of the 2nd Example of this invention. It is typical sectional drawing which showed the image display apparatus of the example of 3rd Embodiment of this invention. It is typical sectional drawing which showed the image display apparatus of the 4th Example of this invention. It is typical sectional drawing which showed the image display apparatus of the 5th Example of this invention. It is the typical top view which showed the faceplate inner surface row direction edge part of the image display apparatus of the 5th Example of this invention. It is typical sectional drawing which showed the image display apparatus of the 6th Example of this invention. It is the typical top view which showed the faceplate inner surface row direction edge part of the image display apparatus of the 6th Example of this invention. It is the typical top view which showed the fluorescent substance arrangement | sequence of the faceplate of a display panel. It is the perspective view which notched and showed a part of display panel of the conventional image display apparatus. It is a typical sectional view of an image display panel.

Explanation of symbols

1001 Rear plate 1002 Face plate 1003 Side wall 1004 Atmospheric pressure support structure (spacer)
DESCRIPTION OF SYMBOLS 1005 High voltage introduction part 1006 High voltage power supply 1101 Electron beam source 1102 Column direction wiring 1103 Row direction wiring 1104 (Surface electric type electron emission) element film 1201 Phosphor film 1202 Black matrix 1203 Metal back 1205 Insulating film formation 1206 Insulating particle 1207 Getter film 1208 Strip-shaped metal back 1209 High-resistance or insulating strip-shaped metal back dividing portion 1210 Resistor 1211 Common electrode

Claims (12)

A light emitter substrate having a light emitting member used in an image display device,
(A) a substrate having a phosphor layer including a plurality of light emitting regions on its surface;
(B) a conductive film covering the phosphor layer;
(C) an insulator film covering the conductive film so as to be disposed on the plurality of light emitting regions;
A phosphor substrate characterized by comprising: The phosphor substrate according to claim 1, wherein a volume resistivity of the insulator film is 1 × 10 ⁶ Ωcm or more.   3. The light emitter substrate according to claim 1, wherein the insulator film has a thickness of 0.1 μm to 2 μm. 4. The light emitter substrate according to claim 1, wherein the insulator film is made of a material selected from SiO ₂ , Al ₂ O ₃ , ZrO ₂ , and TiO ₂ .   The light emitter substrate according to any one of claims 1 to 4, wherein the light emitter layer includes a member having a plurality of openings and a phosphor disposed in each of the plurality of openings.   6. The light emitter substrate according to claim 1, wherein the insulator film is made of an aggregate of a plurality of insulator particles.   The phosphor substrate according to claim 6, wherein a part of the plurality of insulator particles has a getter material on a surface thereof.   The light emitting substrate according to claim 1, wherein the conductive film includes a plurality of conductive films arranged in the row direction at intervals.   The light emitter substrate is further connected in common to each of the plurality of conductive films disposed on the substrate in a region where the light emitter layer is not disposed via a first resistor. The light emitter substrate according to claim 8, further comprising a common electrode.   Each of the plurality of conductive films is connected to the common electrode via the first resistor at an end in a column direction which is a direction perpendicular to the row direction. Item 10. The light emitter substrate according to Item 9.   The light emitting substrate according to claim 9 or 10, wherein the plurality of conductive films are formed of one film in which conductive regions and insulating regions are alternately connected in series.   An image display device comprising a light emitter substrate and a substrate having an electron-emitting device, wherein the light emitter substrate is the light emitter substrate according to any one of claims 1 to 11.

Images