CN203666124U

CN203666124U - Gas enclosing system

Info

Publication number: CN203666124U
Application number: CN201220754157.XU
Authority: CN
Inventors: J·莫克; A·S-K·柯; E·弗伦斯基; S·奥尔德森
Original assignee: Kateeva Inc
Current assignee: Kedihua Display Technology Shaoxing Co ltd
Priority date: 2011-12-22
Filing date: 2012-12-24
Publication date: 2014-06-25
Anticipated expiration: 2022-12-24
Also published as: CN106274054A; CN103171286B; CN107029931A; CN103171286A; CN107029931B; CN106274054B

Abstract

The application relates to a gas enclosing system. The gas enclosing assembly and system can be easily transported and assembled. The gas enclosing system is arranged in such a way that the system maintains a minimum inert gas volume and maximal access to various devices and apparatuses enclosed therein. Various embodiments of the hermetically-sealed gas enclosing assembly and system of the present teachings can have a gas enclosing assembly constructed in a way that the internal volume of a gas enclosing assembly is minimized, and at the same time the working space to accommodate a variety of occupied floor areas of various OLED printing systems is optimized. Various embodiments of the gas enclosing assembly which is constructed this way additionally provide easy access to the interior of the gas enclosing assembly from the exterior during processes and easy access to the interior for maintenance, while downtime can be minimized.

Description

Gas closed system

the cross reference of related application

The application requires the U. S. application No.61/579 submitting on December 22nd, 2011,233 priority.This application requires the U. S. application No.12/652 that submitted to and announced as US2010/0201749 on August 12nd, 2010 January 5,040 priority, it requires again the U. S. application No.12/139 that submits to and announce as US2008/0311307 on December 18th, 2008 on June 13rd, 2008,391 priority, and also require the U. S. application No.61/142 submitting on January 5th, 2009,575 priority.The reference in its entirety of applying for of all cross references of enumerating is herein introduced.

This instruction relates to each embodiment of gas-tight seal gas closed component and system, described gas closed component and system can easily be carried and assemble, and each device and the equipment being arranged to keep minimum inert gas volume and farthest approaching wherein encapsulation.

Background technology

The interest of the potential to OLED Display Technique, by OLED Display Technique attribute drive, comprises that the display floater representing has HI SA highly saturated color, is high-contrast, ultra-thin, quick response and energy efficient.In addition, various base materials, comprise flexible polymeric material, can be for the manufacture of OLED Display Technique.Although for the potential that is used for emphasizing this technology that represents of the display of the small screen application (being mainly cell phone), remain challenge in the time that this manufacture is zoomed to compared with large format.For example, manufacture OLED display on than the larger substrate of Gen5.5 substrate (thering is the size of about 130cm × 150cm) and still need demonstration.

Organic Light Emitting Diode (OLED) device can be by printing various organic films by OLED print system and other material is manufactured in substrate.This organic material may be easy to be subject to the infringement of oxidation and other chemical process.With can convergent-divergent for various size of foundation base and can be in inertia, there is no that mode that the printing environment of particle carries out holds OLED print system and may have multiple challenges.Because need a large amount of spaces for the facility of printing large format panel substrate printing, thereby large facility is remained on and needs continuously to have significant engineering challenge under for example, inert environments with removal reactive environments material (, water vapour and oxygen) and organic vapor of gas purification.For example, provide the large facility being hermetically sealed may there is engineering challenge.In addition, various cables, line and the pipeline of operation print system be fed to turnover OLED print system so that may have challenge, for example, to gas locking device about environment composition (is reached effectively, oxygen and water vapour) the specification of level because they may produce the remarkable dead volume that can hold back this reactive materials.In addition, expectation remains on for this facility of the inert environments of process and is easy to approach, so that with safeguarding minimum downtime.Except there is no reactive materials, the printing environment of OLED device needs significantly low particle environment.In this respect, in complete closed system, provide and the environment that keeps there is no particle have can in atmospheric conditions, (for example, under open air, high flow capacity laminar flow filter mantle) carries out particle reduce the unexistent additional challenges of process.

Therefore; need multiple embodiment of gas locking device; described gas locking device can be in inertia, hold OLED print system in there is no the environment of particle; and easily convergent-divergent to manufacture oled panel on various size of foundation base and base material; during process, be also easy to approach from outside OLED print system simultaneously and be easy to approach inside, so that with safeguarding minimum downtime.

Utility model content

A kind of gas closed system is provided, comprises:

Comprise the gas closed component of multiple framing component assemblies, wherein, described framing component assembly is by sealably in conjunction with to limit inside;

Inert gas environment, described inert gas environment is contained in described inside and comprises all in 100ppm or still less water and the oxygen of level; And

Pressurized inert gas recirculating system, described pressurized inert gas recirculating system comprises:

Compressor loop, described compressor loop comprises and the entrance of described internal fluid communication, and the outlet of described internal fluid communication, comprise the loop path of described entrance and exit, be arranged on the compressor between entrance and exit and be arranged on the reservoir between compressor and outlet along described loop path along described loop path, wherein, described reservoir arrangements becomes to receive and gather the compressed inert that comes from compressor.

A kind of gas closed system is also provided, comprises:

Be arranged on gas circulation and filtration system in described inside, for provide described inside inert gas circulation and from its remove particulate matter;

Gas purge system, described gas purge system is in gas closed component outside, and can make the inert gas being contained in described inside cycle through gas purge system, each the level in the water in described inside and oxygen is remained on to 100ppm or still less;

Be arranged on the pipe-line system assembly in described inside, wherein, described pipe-line system assembly is communicated with gas circulation and filtration system fluid in described inside, and with the gas purge system of gas closed component outside independently fluid be communicated with, thereby all inert gases substantially that cycle through gas circulation and filtration system and gas purge system are all drawn through pipe-line system; And

Bundle, described bundle comprises at least one in cable, electric wire, fluid containment pipeline and combination thereof, wherein, described bundle is arranged in described pipe-line system substantially.

Brief description of the drawings

By reference to accompanying drawing, will obtain the better understanding of feature and advantage of the present disclosure, accompanying drawing is intended to explanation instead of limits this instruction.

Fig. 1 is according to the gas closed component of each embodiment of this instruction and the schematic diagram of system.

Fig. 2 is according to the left front stereogram of the gas closed component of each embodiment of this instruction and system.

Fig. 3 is according to the right front stereogram of the gas closed component of each embodiment of this instruction.

Fig. 4 is according to the exploded view of the gas closed component of each embodiment of this instruction.

Fig. 5 is according to the exploded front stereogram of the framing component assembly of each embodiment of this instruction, illustrates each panel frame portion section and portion's section panel.

Fig. 6 A is the perspective rear view of gloves port cover cap (gloveport cap), and Fig. 6 B is according to the enlarged drawing of the shoulder screw of the gloves port cover cap of each embodiment of the gas closed component of this instruction.

Fig. 7 A is the amplification stereogram of the snap lock latch (bayonet latch) of gloves port cover assembly, and Fig. 7 B is the sectional view of gloves port cover assembly, and the head that shows shoulder screw engages with the recess in snap lock latch.

Fig. 8 A-8C is the schematic plan that is used to form each embodiment of the gasket seal of joint.

Fig. 9 A and Fig. 9 B are that diagram is according to each stereogram of the sealing of the framing component of each embodiment of the gas closed component of this instruction.

Figure 10 A-10B be with according to each embodiment of the gas closed component of this instruction for receiving each relevant figure of the sealing of easy portion's section panel of detachable maintaining window.

Figure 11 A-11B be with according to each embodiment of this instruction for receiving the relevant amplification perspective, cut-away view of the sealing of the portion's section panel that inserts panel or window panel.

Figure 12 A is according to the base portion of each embodiment of this instruction, and described base portion comprises dish and sits multiple cushion blocks of putting thereon.Figure 12 B is the amplification stereogram of the cushion block shown in Figure 12 A.

Figure 13 is according to the wall framing component relevant with dish of each embodiment of this instruction and the exploded view of top plate member.

Figure 14 A is according to the stereogram in the structure stage of the gas closed component of each embodiment of this instruction, and wherein, lifter assembly is in raised position.Figure 14 B is the exploded view of the lifter assembly shown in Figure 14 A.

Figure 15 is according to the imaginary front perspective view of the gas closed component of each embodiment of this instruction, shows the pipe-line system being arranged in gas closed component inside.

Figure 16 is according to the imaginary top perspective view of the gas closed component of each embodiment of this instruction, shows the pipe-line system being arranged in gas closed component inside.

Figure 17 is according to the imaginary face upwarding stereogram of the gas closed component of each embodiment of this instruction, shows the pipe-line system being arranged in gas closed component inside.

Figure 18 A shows the schematic diagram of multi beam cable, line and pipeline etc.Figure 18 B shows that gas is inswept to be fed by according to this bundle of each embodiment of the pipe-line system of this instruction.

Figure 19 is schematic diagram, and how the reactive materials (A) showing in the dead band that is trapped in multi beam cable, circuit and pipeline etc. initiatively purges from the inert gas (B) of inswept pipeline, and described wiring in bundles is by described pipeline.

Figure 20 A is by the cable of pipeline and the imaginary stereogram of pipeline according to the wiring of each embodiment of the gas closed component of this instruction and system.Figure 20 B is according to the enlarged drawing of the opening shown in Figure 20 A of each embodiment of the gas closed component of this instruction, shows the details for being enclosed in the lid on opening.

Figure 21 is the view comprising according to the top board of the illuminator of the gas closed component of each embodiment of this instruction and system.

Figure 22 is curve map, illustrates according to the LED spectrum of the illuminator of the gas closed component of each embodiment of this instruction and system unit.

Figure 23 is according to the front perspective view of the view of the gas closed component of each embodiment of this instruction.

Figure 24 illustrates according to the exploded view of each embodiment of the gas closed component shown in Figure 23 of each embodiment of this instruction and relevant system unit.

Figure 25 is the schematic diagram of the gas closed component of this instruction and each embodiment of relevant system unit.

Figure 26 is according to the gas closed component of each embodiment of this instruction and the schematic diagram of system, illustrates by the embodiment of the gas circulation of gas closed component.

Figure 27 is according to the gas closed component of each embodiment of this instruction and the schematic diagram of system, illustrates by the embodiment of the gas circulation of gas closed component.

Figure 28 is according to the schematic cross-section of the gas closed component of each embodiment of this instruction.

Figure 29 is according to the gas closed component of each embodiment of this instruction and the schematic diagram of system.

Figure 30 is according to the gas closed component of each embodiment of this instruction and the schematic diagram of system.

Table 2 is according to the form of each embodiment of this instruction, shows the valve position that can use the gas closed component in extraneous gas loop and each operator scheme of system.

Detailed description of the invention

This instruction discloses each embodiment of gas closed component; described gas closed component can sealably build and entirety is formed with gas circulation, filtration and purifying part to form gas closed component and the system that can keep inertia, there is no particle environment, for the process of this environment of needs.This embodiment of gas closed component and system can (comprise various reactive ambient gas by various reactive materials, for example water vapour and oxygen, and organic vapor) the level of every kind of material remain on for example 100ppm or lower, 10ppm or lower, 1.0ppm or lower or 0.1ppm or lower.In addition, each embodiment of gas closed component can provide the low particle environment of 3 grades and 4 grades toilet's standards that meet ISO14644.

The those of ordinary skill of every field can expect that the embodiment of gas closed component is in the practicality of each technical field.For example, although extremely this instruction can be benefited from different fields (, chemistry, biotechnology, new and high technology and pharmaceutical field), OLED prints for illustrating according to the practicality of each embodiment of the gas closed component of this instruction and system.Each embodiment that can hold the gas closed component system of OLED print system can provide such as but not limited to following feature: sealing provides gas-tight seal locking device through multiple structures and destructing circulation, minimize enclosed volume, and during process and during safeguarding, be easy to approach inside from outside.As subsequent discussion; this feature of each embodiment of gas closed component can have the impact on function; such as but not limited to; structural integrity makes during process, to be easy to keep the low-level of reactive materials, and the downtime of fast packing volume turnover minimum maintenance cycle period.Thereby, provide each feature and the explanation of the practicality of oled panel printing to provide benefit to various technical fields.

As mentioned before, for example, manufacture OLED display on than the larger substrate of Gen5.5 substrate (thering is the size of about 130cm × 150cm) and still need demonstration.The flat-panel monitor of manufacturing for printing by outside OLED, mother glass size of foundation base for having stood to develop since about nineties in 20th century is early stage.The first generation (being expressed as Gen1) of mother glass substrate is about 30cm × 40cm, thereby can produce 15 " panel.About the mid-90 in 20th century, the prior art of producing flat-panel monitor has developed into the mother glass size of foundation base of Gen3.5, has the size of about 60cm × 72cm.

Along with the propelling in each generation, produce for the printing manufacture process outside OLED for the mother glass size of Gen7.5 and Gen8.5.Gen7.5 mother glass has the size of about 195cm × 225cm, and each substrate can cut into eight 42 " or six 47 " flat board.The mother glass using in Gen8.5 is about 220 × 250cm, and each substrate can cut into six 55 " or eight 46 " flat board.OLED flat-panel monitor for example, is realized the promise of quality (, purer color, higher contrast, thin, flexible, transparency and energy efficiency), and meanwhile, OLED manufactures and is limited in practice Gen3.5 and less.Current, OLED prints the best manufacturing technology that is considered to break through this restriction, and allows oled panel manufacture not only for Gen3.5 and less mother glass size, and for maximum sample glass size, for example, Gen5.5, Gen7.5 and Gen8.5.It will be appreciated by the skilled addressee that the feature that OLED panel is printed comprises and can use various base materials, such as but not limited to, various glass substrate material and various Polymers bottom material.In this respect, come from the size that uses the term of substrate based on glass to record and can be applied to the substrate that is applicable to any material that OLED prints.

Print about OLED, according to this instruction, have been found that keep remarkable low-level reactive materials (such as but not limited to, environment composition, for example oxygen and water vapour, and the various organic vapors that use in OLED China ink) the OLED flat-panel monitor of satisfied necessary life-span specification is relevant with providing.Life-span specification is for oled panel technology particular importance, because this is directly related with the display product time limit; The product specification of all panel technology is current to be difficult to meet for oled panel technology.By means of each embodiment of the gas closed component system of this instruction, for the panel that meets necessary life-span specification is provided, the level of every kind of reactive materials (for example, water vapour, oxygen and organic vapor) can remain on for example 100ppm or lower, 10ppm or lower, 1.0ppm or lower or 0.1ppm or lower.In addition, OLED prints the environment that need to there is no particle.Print for OLED, keep there is no the environment particular importance of particle, even if because very little particle also may cause the visible defects on oled panel.Current, OLED display meets the required low defect level of commercialization challenge.In complete closed system, keep there is no particle environment have can in atmospheric conditions, (for example, under open air, high flow capacity laminar flow filter mantle) carries out particle reduce the unexistent additional challenges of process.Thereby, in large facility, keep inertia, may there are various challenges without the necessary specification of particle environment.

The needs of for example, printing oled panel in the level of every kind of reactive materials (, water vapour, oxygen and organic vapor) can remain on for example 100ppm or lower, 10ppm or lower, 1.0ppm or lower or 0.1ppm or lower facility can illustrate in the time checking the information of general introduction in table 1.On table 1, the data of general introduction come from for every kind in red, green and blueness and are comprising that the each test sample with the organic film composition of large pixel, the manufacture of spin coating device breadth tests.This test sample is easier to Computer-Assisted Design, Manufacture And Test significantly, for the rapid evaluation object of various preparations and process.Although test sample test should not obscured with the life test of printing panel, it can represent various preparations and the impact of process on the life-span.Result shown in following table represents the variation of the process steps of test sample manufacture, wherein, compared with (but in air instead of in nitrogen environment) manufactures similarly test sample, only spin coating environment changes for the test sample of manufacturing in nitrogen environment (wherein, reactive materials is less than 1ppm).

By check that the data for the test sample manufactured in table 1 can be clear under various process environment, especially red and blue in the situation that, in the environment that effectively reduces organic film composition and be exposed to reactive materials, print can on the stability of various EL with thereby the life-span is had to remarkable impact.

Table 1: the impact of inert gas process on the oled panel life-span

Thereby, exist and challenge OLED being printed zoom to Gen8.5 from Gen3.5 and more provide when Datong District aspect the firm closed system that can hold OLED print system inertia there is no the gas enclosed environment of particle.What can imagine is; according to this instruction; this gas locking device comprises the attribute such as but not limited to following by having: gas locking device can be easy to convergent-divergent to be provided for the Optimization Work space of OLED print system; minimum inert gas volume is provided simultaneously; and during process, be also easy to approach OLED print system from outside, be easy to approach inner so that with safeguarding minimum downtime simultaneously.

According to each embodiment of this instruction, provide a kind of for needing the gas closed component of various air-sensitive processes of inert environments, can comprise multiple wall frameworks and the top board framing component that can be sealed.In certain embodiments, multiple wall frameworks and top board framing component can use reusable securing member to tighten together, for example bolt and screwed hole.For according to each embodiment of the gas closed component of this instruction, multiple framing components can be built into and limit gas closed frame assembly, and each framing component comprises multiple panel frame portion section.

The gas closed component of this instruction can be designed to can minimization system the mode containment of enclosed volume around, for example OLED print system.Each embodiment of gas closed component can with the internal capacity of minimum gas closed component and simultaneously Optimization Work space build in the mode of the various floor spaces (footprint, or footprint) of holding various OLED print systems.Each embodiment of the gas closed component so building also during process, be easy to approach from outside the inside of gas closed component and be easy to approach inner to safeguard, simultaneous minimization downtime.In this respect, can be about the various floor space fixed wheel exterior features of various OLED print systems according to each embodiment of the gas closed component of this instruction.According to each embodiment, once the wide framing component of fixed wheel is fabricated to form gas closed frame assembly, various types of panels just can sealably be arranged in the multiple panel part sections that comprise framing component, to complete the installation of gas closed component.In each embodiment of gas closed component, can be a position or multiple position manufacture multiple framing components (comprise such as but not limited to, multiple wall framing components and at least one top board framing component) and for being arranged on multiple panels of panel frame portion section, and then build in another position.In addition, given for build this instruction gas closed component parts can transport properties, each embodiment of gas closed component can be cycled to repeat and mount and dismount through multiple structures and destructing.

Be hermetically sealed in order to ensure gas locking device, each embodiment of the gas closed component of this instruction is provided in conjunction with each framing component so that frame seal to be provided.By the close fit cross part between each framing component (comprising pad or other seal), inside can fully be sealed, for example gas-tight seal.Once build completely, the gas closed component of sealing can comprise inner and multiple inner corners edge, and at least one inner corners edge is arranged on the cross part place of each framing component and adjacent frame member.One or more in framing component, for example at least half in framing component, can comprise the one or more sealant compressible shims fixing along its one or more respective edges.Once described one or more sealant compressible shim can be configured to, multiple framing components combine and panel that airtight body is installed just produces gas-tight seal gas closed component.The gas closed component of sealing can be formed as making the corner edge of framing component to be sealed by multiple sealant compressible shims.For each framing component, such as but not limited to interior wall framework surface, roof framework surface, upright side walls framework surface, diapire framework surface and combination thereof, can be provided with one or more sealant compressible shims.

For each embodiment of gas closed component, each framing component can comprise multiple sections, described multiple sections are designed and manufactured as reception can sealably be arranged on any in the various panel type in each section, to be provided for the panel sealing of airtight body of each panel.In each embodiment of the gas closed component of this instruction, each segment frames can have portion's segment frames pad, thereby described portion segment frames pad is guaranteed to be arranged on by means of selected securing member, each panel in each segment frames can be provided for each panel and for building the sealing of airtight body of gas locking device completely.In each embodiment, gas closed component can have one or more in window panel or maintenance control panel in each Wall board; Wherein, each window panel or maintenance control panel can have at least one gloves port.At gas closed component assembly process, each gloves port can have attached gloves, thereby gloves can extend in inside.According to each embodiment, each gloves port can have the hardware for gloves are installed, and wherein, this hardware uses gasket seal around each gloves port, and it provides the sealing of airtight body to minimize leakage or the molecular diffusion by gloves port.For each embodiment of the gas closed component of this instruction, the gloves port that described hardware is also designed to be easy to cover cap and opens terminal use.

Can comprise from gas closed component and gas circulation, filtration and the purifying part of multiple framing components and the formation of panel part section according to each embodiment of the gas closed component of this instruction and system.For each embodiment of gas closed component and system, pipe-line system can be installed during assembling process.According to each embodiment of this instruction, pipe-line system can be arranged in the gas closed frame assembly building from multiple framing components.In each embodiment, pipe-line system can be at multiple framing components in conjunction with being arranged on multiple framing components before forming gas closed frame assembly.The pipe-line system of each embodiment of gas closed component and system can be arranged to be drawn into all gas substantially pipe-line system and to move through from one or more pipe-line system entrances each embodiment in gas filtration loop, for removing the particulate matter of gas closed component and internal system.In addition, the pipe-line system of each embodiment of gas closed component and system can be configured to the entrance and exit of the gas purification loop of gas closed component outside to separate from the gas filtration loop of gas closed component inside.

For example, gas closed component and system can have gas circulation and the filtration system in gas closed component inside.This self-filtering system can have the multiple fan filter units in inside, and can be configured to provide gas laminar flow in inside.Laminar flow can be direction or any other direction from inner top to inner bottom.Although the gas flow producing by the circulatory system needs not be laminar flow, gas laminar flow can be used for guaranteeing thoroughly and completely having enough to meet the need of inside gas.Gas laminar flow can also be used for minimizing turbulent flow, and this turbulent flow is undesirable, because it can make the particle in environment be collected in this regions of turbulent flow, thereby prevents that filtration system from removing those particles from environment.In addition, in order to keep preferred temperature in inside, can provide the heat regulating system that uses multiple heat exchangers, for example, by means of fan or the operation of another gas-recycling plant, near fan or another gas-recycling plant, or be combined with fan or another gas-recycling plant.Gas purification loop can be configured to by least one the gas purification parts in locking device outside from gas closed component inner loop gas.In this respect, the filtration of gas closed component inside and the circulatory system are combined the continuous circulation that runs through the remarkable low particulate inert gas in gas closed component can be provided with the gas purification loop of gas closed component outside, and it has remarkable low-level reactive materials.Gas purge system can be configured to keep very low-level do not wish composition, such as organic solvent and steam thereof and water, water vapour, oxygen etc.

Except being provided for gas circulation, filtration and purifying part, pipe-line system can sizing and is shaped at least one that hold therein in electric wire, wire harness and various fluid containment pipe, it may have a large amount of dead volumes in the time tying in, wherein, environment composition (for example, water, water vapour, oxygen etc.) may be trapped and be difficult to and be removed by cleaning system.In certain embodiments, the combination of any in cable, electric wire and wire harness and fluid containment pipe can be arranged in pipe-line system substantially, and can be respectively operatively connected with at least one in the electrical system, mechanical system and the cooling system that are arranged in inside.Because gas circulation, filtration and purifying part can be arranged so that all circulated inert gas all aspirate by pipe-line system substantially, the environment composition being therefore trapped in the dead volume of the various materials that tie in can purge from a large amount of dead volumes of this material that ties in effectively by this material that ties in is contained in pipe-line system.

Can comprise from gas closed component and gas circulation, filtration and the purifying part of multiple framing components and the formation of panel part section according to each embodiment of the gas closed component of this instruction and system, and additionally comprise each embodiment of pressurized inert gas recirculating system.This pressurized inert gas recirculating system can be used in the operation of OLED print system, for various pneumatic actuating devices and equipment, as described in more detail subsequently.

According to this instruction, multiple engineering challenges are solved, to each embodiment of pressurized inert gas recirculating system is provided in gas closed component and system.First, do not having under the gas closed component of pressurized inert gas recirculating system and the typical operation of system, gas closed component can remain on slight positive internal pressure with respect to external pressure, to prevent that outside gas or air from entering inside produce any leakage in gas closed component and system time.For example, for the gas closed component of this instruction and each embodiment of system, under typical operation, the inside of gas closed component can for example remain at least pressure of 2mbarg with respect to the surrounding environment of closed system outside, the for example pressure of 4mbarg at least, the at least pressure of 6mbarg, at least pressure of 8mbarg, or high pressure more.In gas closed component system, keep pressurized inert gas recirculating system may have challenge, because it has the dynamic balance play with continue carry out relevant with the slight positive internal pressure that keeps gas closed component and system, and introduces continuously gas-pressurized in gas closed component and system simultaneously.In addition, the variable demand of each device and equipment may form the various gas closed components of this instruction and the irregular pressure curve of system.Under this condition, keep dynamic pressure balance can be provided for continuing the globality of the OLED print procedure carrying out the gas closed component that remains on slight positive pressure with respect to external environment condition.

For each embodiment of gas closed component and system, can comprise each embodiment in pressurized inert gas loop according to the pressurized inert gas recirculating system of this instruction, can use at least one and combination in compressor, reservoir and air blast.Each embodiment that comprises the pressurized inert gas recirculating system of each embodiment in pressurized inert gas loop can have custom-designed pressure control bypass circulation, and it can provide the inert gas internal pressure in stability line definite value in the gas closed component of this instruction and system.In each embodiment of gas closed component and system, when pressurized inert gas recirculating system can be configured to inert gas pressure in the reservoir in pressurized inert gas loop and exceedes predetermined threshold value pressure via pressure control bypass circulation recirculation pressurized inert gas.Threshold pressure can be for example at about 25psig to the about scope between 200psig, or more specifically at about 75psig to the about scope between 125psig, or more specifically at about 90psig to the about scope between 95psig.In this respect, have with this instruction gas closed component and the system of the pressurized inert gas recirculating system of each embodiment of custom-designed pressure control bypass circulation and can remain on the balance in gas-tight seal gas locking device with pressurized inert gas recirculating system.

According to this instruction, various devices and equipment can be arranged in inside, and be communicated with each embodiment fluid of the pressurized inert gas recirculating system with various pressurized inert gas loop, described pressurized inert gas loop can be used various pressurized-gas sources, for example, in compressor, air blast and combination thereof at least one.For the gas locking device of this instruction and each embodiment of system, use various pneumatically-operated devices and equipment can provide low particle to generate performance and low maintenance cost.Can be arranged on the exemplary means and the equipment that in gas closed component and internal system and with various pressurized inert gas loop fluid, are communicated with can comprise, such as but not limited to, one or more in pneumatic robot, substrate suspending bench, air bearing, air lining, Compressed Gas instrument, pneumatic actuator and combination thereof.Substrate suspending bench and air bearing can be for operation according to the various aspects of the OLED print system of each embodiment of the gas closed component of this instruction.For example, use air bearing technology substrate suspending bench can for by substrate feed to the correct position in printhead chamber and during OLED print procedure support base.

As mentioned before, each embodiment of substrate suspending bench and air bearing may be useful to being contained according to the operation of each embodiment of the OLED print system in the gas closed component of this instruction.As Fig. 1 for gas closed component and system 2000 schematically as shown in, use air bearing technology substrate suspending bench can for by substrate feed to the correct position in printhead chamber and during OLED print procedure support base.In Fig. 1, gas closed component 1500 can be load locking system, it can have the entrance chamber 1510 for receive substrate by the

first access hatch

1512 and 1514, for substrate is moved to gas closed component 1500 from entrance chamber 1510, to print.Can be for chamber being isolated from each other and isolating from external environment condition according to each gate of this instruction.According to this instruction, each gate can be selected from physics gate and gas curtain.

During substrate receiving course, gate 1512 can be opened, and gate 1514 can be in the closed position, to prevent that environmental gas from entering gas closed component 1500.Once substrate is received in entrance chamber 1510,

gate

1512 and 1514 both can be closed and entrance chamber 1510 can be used inert gas purge, for example nitrogen, any rare gas and any combination thereof, until the level of reactive ambient gas is in for example 100ppm or lower, 10ppm or lower, 1.0ppm or lower or 0.1ppm or lower.After environmental gas reaches enough low level, gate 1514 can be opened, and 1512 still close, to allow substrate 1550 to be transported to gas closed component chamber 1500 from entrance chamber 1510, as shown in Figure 1.Substrate is transported to gas closed component chamber 1500 from entrance chamber 1510 can be via the suspending bench such as but not limited to being arranged on chamber 1500 and 1510.Substrate is transported to gas closed component chamber 1500 from entrance chamber 1510 can also be via such as but not limited to substrate feed robot, and it can be placed on substrate 1550 in the suspending bench being arranged in chamber 1500.Substrate 1550 is supported in substrate suspending bench can keep during print procedure.

Each embodiment of gas closed component and system 2000 can have the outlet chamber 1520 being communicated with gas closed component and system 1500 fluids by gate 1524.According to each embodiment of gas closed component and system 2000, after print procedure completes, substrate 1550 can be transported to outlet chamber 1520 by gate 1524 from gas closed component 1500.Substrate is transported to outlet chamber 1520 from gas closed component chamber 1500 can be via the suspending bench such as but not limited to being arranged on chamber 1500 and 1520.Substrate is transported to outlet chamber 1520 from gas closed component chamber 1500 can also be via such as but not limited to substrate feed robot, and it can pick up and be transported to chamber 1520 from the suspending bench being arranged at chamber 1500 by substrate 1550.For each embodiment of gas closed component and system 2000, in the closed position when preventing that reactive ambient gas from entering gas closed component 1500 when gate 1524, substrate 1550 can be fetched via gate 1522 from outlet chamber 1520.

Except comprising the load locking system of the entrance chamber 1510 that is communicated with gas closed component 1500 fluids via

gate

1514 and 1524 respectively and outlet chamber 1520, gas closed component and system 2000 can comprise system controller 1600.System controller 1600 can comprise the one or more processor circuit (not shown) that are communicated with one or more memory circuitry (not shown).System controller 1600 can also be communicated with the load locking system that includes oral chamber 1510 and outlet chamber 1520, and is finally communicated with the printing nozzle of OLED print system.Thus, system controller 1600 can be coordinated the opening and closing of

gate

1512,1514,1522 and 1524.System controller 1600 can also be controlled the China ink distribution to the printing nozzle of OLED print system.Substrate 1550 can be carried by each embodiment of the load locking system of this instruction, via substrate suspending bench or the substrate suspending bench of air bearing technology and the combination of substrate feed robot such as but not limited to using air bearing technology, load locking system comprises the entrance chamber 1510 and the outlet chamber 1520 that are communicated with gas closed component 1500 fluids via

gate

1514 and 1524 respectively.

Each embodiment of the load locking system of Fig. 1 can also comprise atmospheric control 1700, and it can comprise vacuum source and inert gas source, can comprise nitrogen, any rare gas and any combination thereof.The substrate suspension system being contained in gas closed component and system 2000 can comprise the gentle axon socket end of the multiple vacuum ports mouth being conventionally arranged on flat surfaces.Substrate 1550 can be passed through boost in pressure and the maintenance of inert gas (for example, nitrogen, any rare gas and any combination thereof) and leave crust.Flowing out flowing of bearing volume completes by means of multiple vacuum ports.The hoverheight of substrate 1550 in substrate suspending bench becomes according to gas pressure and gas flow conventionally.The vacuum of atmospheric control 1700 and pressure can for example, for support base 1550 during the interior manipulation of gas closed component 1500 in the load locking system of Fig. 1, during printing.Control system 1700 can also be used for support base 1550 during the load locking system by Fig. 1 is carried, and load locking system comprises the entrance chamber 1510 and the outlet chamber 1520 that are communicated with gas closed component 1500 fluids via gate 1514 and 1524 respectively.Carry by gas closed component and system 2000 in order to control substrate 1550, system controller 1600 is communicated with inert gas source 1710 and vacuum 1720 by valve 1712 and 1722 respectively.Unshowned addition of vacuum and inert gas supply circuit and valve can offer gas closed component and system 2000, are illustrated by the load locking system of Fig. 1, control required various gas and the vacuum facility of enclosed environment further to provide.

In order to be provided the more stereogram of multidimensional according to each embodiment of the gas closed component of this instruction and system, Fig. 2 is the left front stereogram of each embodiment of gas closed component and system 2000.Fig. 2 shows the load locking system that comprises gas closed component 1500, entrance chamber 1510 and the first gate 1512.Gas closed component and the system 2000 of Fig. 2 can comprise gas purge system 2130, for example, for the constant supply of inert gas of the organic vapor that has remarkable low-level reactive environments material (water vapour and oxygen) and obtain from OLED print procedure being provided to gas closed system 1500.Gas closed component and the system 2000 of Fig. 2 also have controller system 1600, for system control function, as mentioned before.

Fig. 3 is the right front stereogram that builds gas closed component 100 completely according to each embodiment of this instruction.Gas closed component 100 can hold one or more gases, for keeping the inert environments of gas closed component inside.The gas closed component of this instruction and system can be useful aspect the inert gas environment keeping in inside.Inert gas can be any gas without undergoing chemical reaction under one group of qualifications.Some common usage examples of inert gas can comprise nitrogen, any rare gas and any combination thereof.Gas closed component 100 is configured to surround and protection air-sensitive process, for example, use Industrial Printing system print Organic Light Emitting Diode (OLED) China ink.The example that is reactive environmental gas to OLED China ink comprises water vapour and oxygen.As mentioned before, gas closed component 100 can be configured to keep sealed environment and allow parts or print system effectively to operate, and avoids pollution, oxidation and infringement otherwise reactive material and substrate simultaneously.

As shown in Figure 3, each embodiment of gas closed component can comprise with lower component part, comprise front portion or the first Wall board 210 ', left side or the second Wall board (not shown), right side or the 3rd Wall board 230 ', rear portion or wall panel (not shown) and top board panel 250 ', this gas closed component can be attached to dish 204, and dish 204 is sat and put on base portion (not shown).As described in more detail subsequently, each embodiment of the gas closed component 100 of Fig. 1 can build from anterior or the first wall framework 210, left side or the second wall framework (not shown), right side or the 3rd wall framework 230, rear portion or wall panel (not shown) and top board framework 250.Each embodiment of top board framework 250 can comprise fan filter unit lid 103 and the first top board framework pipeline 105 and the first top board framework pipeline 107.According to the embodiment of this instruction, various types of section panels can be arranged in any in the multiple panel part sections that comprise framing component.In each embodiment of the gas closed component 100 of Fig. 1, sheet metal panel part section 109 can be welded in framing component during framework builds.For each embodiment of gas closed component 100, can be cycled to repeat the portion's section panel type mounting and dismounting through several structures of gas closed component and destructing and can comprise the insertion panel 110 illustrating for Wall board 210 ' and the window panel illustrating for Wall board 230 ' 120 and easy detachable maintaining window 130.

Although easily detachable maintaining window 130 can be easy to approach the inside of locking device 100, can use dismountable any panel to approach the inside of gas closed component and system, for repairing and routine maintenance object.Maintenance or this approaching due to by window panel for example 120 and easy approaching and difference of providing of the panel of detachable maintaining window 130 of repairing, it can make terminal use's gloves approach gas closed component inside from gas closed component outside during use.For example, be attached to any gloves of gloves port one 40, for example gloves 142, as in Fig. 3 for as shown in panel 230, can between the gas closed component system operating period, make terminal use approach inner.

Fig. 4 illustrates the exploded view of each embodiment of the gas closed component shown in Fig. 3.Each embodiment of gas closed component can have multiple Wall boards, comprise the outside stereogram of front walls panel 210 ', the outside stereogram of left side wall panel 220 ', the perspective interior view of right side wall panel 230 ', the perspective interior view of rear wall panel 240 ', and the top perspective view of top board panel 250 ', as shown in Figure 3, gas closed component can be attached to dish 204, and dish 204 is sat and put on base portion 202.OLED print system can be arranged on dish 204 tops, and print procedure is known is responsive to environmental condition.According to this instruction, gas closed component can build from framing component, then wall framework 230, the wall framework 240 of Wall board 240 ' and the top board framework 250 of top board panel 250 ' of the wall framework 210 of for example Wall board 210 ', the wall framework 220 of Wall board 220 ', Wall board 230 ', wherein can install multiple section panels.In this respect, can expect that streaming can be cycled to repeat through several structures of each embodiment of the gas closed component of this instruction and destructing the design of the portion's section panel mounting and dismounting.In addition, the fixed wheel exterior feature that can carry out gas closed component 100 is to hold the floor space of each embodiment of OLED print system, so that required inert gas volume in minimum gas closed component, and make terminal use be easy to approach (between the gas closed component operating period and both like this during safeguarding).

Use front walls panel 210 ' and left side wall panel 220 ' as example, each embodiment of framing component can have during framing component builds and is welded to the sheet metal panel part section 109 in framing component.Insert panel 110, window panel 120 and easily detachable maintaining window 130 can be arranged in each wall framing component, and can pass through several structures of gas closed component 100 of Fig. 4 and destructing and be cycled to repeat and mount and dismount.Can find out: in the example of Wall board 210 ' and Wall board 220 ', Wall board can have the close easily window panel 120 of detachable maintaining window 130.Similarly, as shown in exemplary rear wall panel 240 ', Wall board can have window panel, for example window panel 125, and it has two adjacent gloves port ones 40.For according to each embodiment of the wall framing component of this instruction, and can find out for the gas closed component 100 of Fig. 3, this set of gloves can be easy to approach from the outside of gas locking device the parts part in closed system.Therefore, each embodiment of gas locking device can provide two or more gloves ports, thereby terminal use can stretch into left hand cover and right hand cover in inside and manipulate the one or more items in inside, and does not disturb the composition of the gaseous environment in inside.For example, any in window panel 120 and maintenance window 130 can be positioned to be beneficial to from the outside of gas closed component and approach the adjusting part gas closed component inside.For example, according to each embodiment of window panel (, window panel 120 and maintenance window 130), in the time not needing terminal use to approach by the gloves of gloves port, this window can not comprise gloves port and gloves port assembly.

As shown in Figure 4, each embodiment of wall and top board panel can have multiple insertion panels 110.In Fig. 4, can find out, insert panel and can there is various shapes and aspect ratio.Except inserting panel, top board panel 250 ' can have fan filter unit lid 103 and the first top board framework pipeline 105 and the second top board framework pipeline 107 that installations, bolt connect, are threaded, fix or be otherwise fastened to top board framework 250.As described in more detail subsequently, the pipe-line system being communicated with pipeline 107 fluids of top board panel 250 ' can be arranged in the inside of gas closed component.According to this instruction, this pipe-line system can be a part for the gas-circulating system of gas closed component inside, and be provided for separately leaving the mobile stream of gas closed component, for cycling through at least one gas purification parts of gas closed component outside.

Fig. 5 is the exploded front stereogram of framing component assembly 200, and wherein, wall framework 220 can be built into and comprise the completely supplementary of panel.Although shown in being not limited to design, use wall framework 220 framing component assembly 200 can for illustration according to each embodiment of the framing component assembly of this instruction.According to this instruction, each embodiment of framing component assembly can be made up of each framing component and the portion's section panel being arranged in each framework panel part section of each framing component.

According to each embodiment of each framing component assembly of this instruction, framing component assembly 200 can comprise framing component, for example wall framework 220.For each embodiment of gas closed component, the gas closed component 100 of for example Fig. 3, can use the process that is contained in the facility in this gas closed component may not only need to provide the gas-tight seal locking device of inert environments, and need to there is no the environment of particulate matter.In this respect, can use the various sizes metal tube material for each embodiment of construction framework according to the framing component of this instruction.This metal tube material has solved expectation material properties, include but not limited to, the high globality material of particulate matter will can not be demoted to produce, and produce and there is high strength and there is the framing component of optimum weight, be convenient to from the gas closed component that the three unities is carried to another place, structure and destructing comprise each framing component and panel part section.Those of ordinary skill in the art can easily understand, and any material that meets these requirements can be used to form each framing component according to this instruction.

For example, according to each embodiment of the framing component of this instruction, for example framing component assembly 200, can build from extrusion metal pipe.According to each embodiment of framing component, can carry out construction framework member with aluminium, steel and various metallic composite.In each embodiment, can use and have such as but not limited to following size and have 1/8,, to 1/4 " and the metal tube of wall thickness: 2 " w × 2 " h, 4 " w × 2 " h and 4 " w × 4 " h, to build each embodiment according to the framing component of this instruction.In addition, the various fiber reinforced polymer composites with various pipes or other form are available, it has and includes but not limited to following material properties: will can not demote to produce the high globality material of particulate matter, and produce and there is high strength and there is the framing component of optimum weight, be convenient to from the three unities carry to another place, structure and destructing.

About building each framing component from various sizes metal tube material, can imagine, can weld to form each embodiment of frame welding portion.In addition, building each framing component of material construction from various sizes can use suitable industry adhesive to carry out.Can imagine, building each framing component should be to carry out the mode that can not form inherently the leakage paths by framing component.In this respect, for each embodiment of gas closed component, build each framing component and can use any method that can not form inherently the leakage paths by framing component is carried out.In addition,, according to each embodiment of the framing component of this instruction, the wall framework 220 of for example Fig. 4, can be brushed or coating.For from be for example easy to oxidation (wherein, the material forming in surface can form particulate matter) each embodiment of the framing component made of metal tube material, can brush or coating or other surface treatment, for example anodization, to prevent from forming particulate matter.

Framing component assembly, the framing component assembly 200 of for example Fig. 5, can have framing component, for example wall framework 220.Wall framework 220 can have top 226 (top wall framework backing plate 227 can be fastened thereon) and bottom 228 (base wall framework backing plate 229 can be fastened thereon).As described in more detail subsequently, being arranged on the lip-deep backing plate of framing component is a part for gasket seal system, the gasket seal of its panel in being arranged on framing component portion section is combined, and is provided for gas-tight seal according to each embodiment of the gas closed component of this instruction.Framing component, the wall framework 220 of the framing component assembly 200 of for example Fig. 5, can have multiple panel frame portion section, wherein, each section can manufacture and receive various types of panels, such as but not limited to inserting panel 110, window panel 120 and easy detachable maintaining window 130.In the time of construction framework member, can form various types of panel part sections.The type of panel part section can comprise such as but not limited to the inserting surface board section 10 for receiving insertion panel 110, for the window side board section 20 of receive window panel 120 with for receiving the easily maintenance window panel part section 30 of detachable maintaining window 130.

The panel part section of every type can have the panel part segment frames of panel of reception, and can be arranged to each panel and can sealably be fastened to according in each panel part section of this instruction, for building gas-tight seal gas closed component.For example, showing according in Fig. 5 of the frame assembly of this instruction, inserting surface board section 10 is shown as has framework 12, and window side board section 20 is shown as has framework 22, and maintenance window panel part section 30 is shown as has framework 32.For each embodiment of the wall frame assembly of this instruction, each panel part segment frames can be to receive the sheet material in panel part section with sequential welding bead weld, to provide gas-tight seal.For each embodiment of wall frame assembly, each panel part segment frames can be made up of various sheet material, comprises the structure material that is selected from fiber reinforced polymer composites, and it can use suitable industry adhesive to be arranged in panel part section.As described in more detail in related to subsequently the instruction of sealing, each panel part segment frames can have sealant compressible shim disposed thereon, to guarantee for the sealing of installing and be fastened on each panel in each panel part section and can form airtight body.Except panel part segment frames, each framing component portion section can have and is firmly fastened to the relevant hardware of panel with positioning panel and in panel part section.

Each embodiment that inserts the panel frame 122 of panel 110 and window panel 120 can build from sheet material, such as but not limited to aluminium, various aluminium and stainless alloy.The attribute of panel material can be identical with the structural material of each embodiment for forming framing component.In this respect, have for the material of the attribute of various panel members and include but not limited to: will can not demote to produce the high globality material of particulate matter, and produce and there is high strength and there is the panel of optimum weight so that from the three unities carry to another place, structure and destructing.For example, each embodiment of cellular chip material can have the required attribute that inserts the panel material of the panel frame 122 of panel 110 and window panel 120 as structure.Cellular chip material can be made up of various materials; Metal and metal composite and polymer, and polymer composite honeycomb chip material.Each embodiment at detachable panel when metal material is made can have the grounding connection being included in panel, to guarantee total ground connection in the time that gas closed component builds.

Given for build this instruction gas closed component gas closed component parts can transport properties, any in each embodiment of portion's section panel of this instruction can repeat at gas closed component with between the system operating period installation and removal, to approach the inside of gas closed component.

For example, can have one group of four pad for receiving the easily panel part section 30 of detachable maintaining window panel 130, one of them is shown as window guiding pad 34.In addition, build for receiving the easily panel part section 30 of detachable maintaining window panel 130 and can have one group of four clamping plate 36, it can be for using one group of four acting in opposition toggle clamp 136 on the maintenance window framework 132 that is arranged on each easily detachable maintaining window 130 that maintenance window 130 is clamped in maintenance window panel part section 30.In addition, each in two window handles 138 can be arranged on easily on detachable maintaining window frame 132, to make terminal use's maintenance window 130 easy to removal and installation.Quantity, the type of detachable maintenance window handle and arrange and can change.In addition, can make at least two of window clip 35 to be optionally arranged in each maintenance window panel part section 30 for receiving the easily maintenance window panel part section 30 of detachable maintaining window panel 130.Although be presented at top and the bottom of each maintenance window panel part section 30, at least two window clips can be to install in order to any mode of fastening maintenance window 130 in panel part segment frames 32.Instrument can and be installed window clip 35 for dismounting, to allow maintenance window 130 dismountings and again install.

The acting in opposition toggle clamp 136 of maintenance window 130 and the hardware (comprising clamping plate 36, window guiding pad 34 and window clip 35) being arranged in panel part section 30 can be built by any suitable material and combination of materials.For example, one or more this elements can comprise at least one metal, at least one pottery, at least one plastics and combination thereof.Detachable maintenance window handle 138 can be built by any suitable material and combination of materials.For example, one or more this elements can comprise at least one metal, at least one pottery, at least one plastics, at least one rubber and combination thereof.Closed window, the window 124 of for example window panel 120 or the window 134 of maintenance window 130, can comprise any suitable material and combination of materials.According to each embodiment of the gas closed component of this instruction, closed window can comprise transparent and trnaslucent materials.In each embodiment of gas closed component, closed window can comprise material (such as but not limited to glass and quartz) and the various types of material (such as but not limited to Merlon, acrylic acid and the vinyl material of various ranks) based on polymer based on silica.One of ordinary skill in the art will appreciate that, the various compositions of example window material and combination thereof can also be used as according to the transparent and trnaslucent materials of this instruction.

In Fig. 5, can find out for framing component assembly 200, easily detachable maintaining window panel 130 can have the gloves port with cover cap 150.Although show in Fig. 3 that all gloves ports have outward extending gloves, as shown in Figure 5, depend on whether terminal use needs the long-range inside that approaches gas closed component, and gloves port can also be by cover cap.Each embodiment of cover assembly as shown in Fig. 6 A-7B is latched in cover cap on gloves securely in the time that terminal use does not use gloves, and in the time that terminal use wishes to use gloves, is convenient to approach simultaneously.

In Fig. 6 A, show cover cap 150, it can have inner surface 151, outer surface 153 and can the side 152 of fixed wheel exterior feature for grasping.Three shoulder screws 156 extend from the edge 154 of cover cap 150.As shown in Figure 6B, each shoulder screw is fixed in edge 154, makes shank 155 extend setpoint distance from edge 154, thus not joining edge 154 of head 157.In Fig. 7 A-7B, gloves port hardware assembly 160 can be modified to provide cover assembly, it comprise for locking device pressurized when thering is normal pressure with respect to locking device outside the locking mechanism of cover cap gloves port.

For each embodiment of the gloves port hardware assembly 160 of Fig. 6 A, buckle clamping can make cover cap 150 be enclosed on gloves port hardware assembly 160, and provides terminal use to be easy to approach the quick connection design of gloves simultaneously.Overlooking in enlarged drawing of the gloves port hardware assembly 160 shown in Fig. 7 A, gloves port assembly 160 can comprise rear plate 161 and header board 163, and header board 163 has threaded screws head 162 and the flange 164 for gloves are installed.On flange 164, show snap lock latch 166, there is groove 165, for receiving shoulder screw 156 (Fig. 6 B) shoulder screw head 157.Each shoulder screw 156 can align and engage with each in the snap lock latch 166 of gloves port hardware assembly 160.The groove 168 of snap lock latch 166 has the opening 165 that is positioned at one end place and the locking recess 167 that is positioned at the other end place of groove 168.Once each shoulder screw head 157 inserts in each opening 165, cover cap 150 just can rotate, until the end near locking recess 167 of shoulder screw head adjacent channels 168.Sectional view shown in Fig. 7 B shows the lock-in feature for cover cap gloves in the time that gas closed component system is used.During use, the internal gas pressure of the inert gas in locking device is greater than set amount than the pressure of gas closed component outside.Normal pressure can be filled gloves (Fig. 3), thereby at gloves between the operating period of the gas closed component of this instruction during in cover cap 150 lower compression, shoulder screw head 157 moves in locking recess 167, thereby guarantees that gloves port window is by cover cap reliably.But terminal use can grasp cover cap 150 for the side 152 grasping by fixed wheel is wide, and easily departs from the cover cap being fastened in snap lock latch in the time not using.Fig. 7 B also shows the rear plate 161 on the inner surface 131 of window 134 and 163, two plates of the header board on the outer surface of window 134 all have O-ring packing 169.

As what discuss in the following instruction of Fig. 8 A-9B, combine each embodiment of the gas-tight seal gas closed component that is provided for the air-sensitive process that needs inert environments of portion's section panel frame seal of wall and top board framing component seal and airtight body.Contribute to provide the reactive materials of remarkable low concentration and the remarkable low gas closed component of particle environment and the parts of system to include but not limited to; gas-tight seal gas closed component and efficient gas circulation and particle filter system, comprise pipe-line system.Be provided for the effective gas-tight seal of gas closed component and may have challenge; Especially in the time that three framing components form three plane ties together.Thereby three plane ties are sealed in and are provided for having the challenge of difficulty especially through the gas-tight seal aspect of easy installation of the gas closed component of several structures and destructing circulation assembly and disassembly.

In this respect, according to each embodiment of the gas closed component of this instruction by effective gasket seal of joint and build parts at load bearing the gas-tight seal of gas closed component that effective gasket seal provides structure completely and system is around provided.Different from conventional joint sealing, joint sealing according to this instruction: 1) be included in top and bottom terminal frame joint joint portion (wherein, three framing components are combined) locate the consistent parallel aligned with vertical orientated pad length in abutting connection with pad portion section, thereby avoid the alignment of angle seam and sealing, 2) be provided for forming length of adjacency along the whole width of joint, thereby the sealing contact surface that increases by three plane tie joint portion places is long-pending, 3) be designed with backing plate, described backing plate vertically provides consistent compression stress with level and top with bottom three plane tie gasket seals along all.In addition, the selection of gasket material can affect the validity that provides gas-tight seal, and this will be in subsequent discussion.

Fig. 8 A-8C is the schematic top plan view that illustrates the contrast that conventional three plane ties seal and seal according to three plane ties of this instruction.According to each embodiment of the gas closed component of this instruction, can have such as but not limited at least four wall framing components, top board framing component and dish, its can be combined to form gas closed component, thereby produce need gas-tight seal multiple vertically, level and three plane ties.In Fig. 8 A, the schematic top plan view of conventional three gasket seals is formed by the first pad I, and the first pad I is vertical orientated with pad II in X-Y plane.As shown in Figure 8 A, in X-Y plane, between two portion's sections, there is by vertical orientated being sewn on of forming the contact length W being limited by gasket width size ₁.In addition, the terminal part of pad III (at vertical direction and pad I and the vertical orientated pad of pad II) can be in abutting connection with pad I and pad II, by shadow representation.In Fig. 8 B, the schematic top plan view of conventional three plane tie gasket seals is formed by the first pad length I, and the first pad length I is vertical with the second pad length II, and has 45 ° of seam faying faces of two length, wherein, be sewn on and between two portion's sections, there is the contact length W that is greater than gasket material width ₂.The configuration of similar map 8A, the end part of pad III (vertical with pad II with pad I at vertical direction) can be in abutting connection with pad I and pad II, by shadow representation.Suppose that gasket width is identical in Fig. 8 A and Fig. 8 B, the contact length W of Fig. 8 B ₂be greater than the contact length W of Fig. 8 A ₁.

Fig. 8 C is according to the schematic top plan view of the three plane tie gasket seals of this instruction.The first pad length I can have the section I ' of pad portion forming perpendicular to the direction of pad length I, wherein, the length that the section I ' of pad portion has can be approximately the size of the width of combined structure member, be for example used to form the gas closed component of this instruction each wall framing component 4 " w × 2 " h or 4 " w × 4 " h metal tube.Pad II is vertical with pad I in X-Y plane, and has the section II ' of pad portion, and the stacked length of the section II ' of pad portion and the section I ' of pad portion is approximately the width of combined structure member.The width of the section I ' of pad portion and II ' is the width of selected compressible pad sheet material.Pad III is vertical orientated at vertical direction and pad I and pad II.The section III ' of pad portion is the end part of pad III.The section III ' of pad portion is vertical orientated formation of vertical length with pad III by the section III ' of pad portion.The section III ' of pad portion can be formed as making it to have the length approximately identical with II ' with the section I ' of pad portion, and width is the thickness of selected compressible pad sheet material.In this respect, the contact length W of three alignment part sections shown in Fig. 8 C ₃be greater than and there is respectively contact length W ₁and W ₂fig. 8 A or Fig. 8 B shown in the sealing of conventional delta connection.

In this respect, form the consistent parallel aligned (otherwise by the pad that is vertical alignment, as shown in the situation of Fig. 8 A and Fig. 8 B) of pad portion section at terminal fitting joint portion place according to the three plane tie gasket seals of this instruction.This consistent parallel aligned of three plane tie gasket seal portion sections strides across described portion section and applies consistent transverse sealing power, to promote the top of the joint being formed by wall framing component and airtight three plane ties of bottom corners to seal.In addition, the selected width that is approximately combined structure member of each section of the consistent alignment pad portion section of each three plane ties sealings, thus the Maximum Contact length of consistent alignment part section is provided.In addition, be designed with backing plate according to the joint sealing of this instruction, described backing plate along build joint all vertically, level and three gasket seals provide consistent compression stress.Evincible, select the width of the gasket material of three sealings of routine that provide for the example of Fig. 8 A and Fig. 8 B can be at least the width of combined structure member.

The exploded perspective of Fig. 9 A illustrates the black box 300 according to this instruction before all framing components are combined, thereby pad shows in uncompressed state.In Fig. 9 A, building the first step of gas locking device from all parts of gas closed component, multiple wall framing components, for example wall framework 310, wall framework 350 and top board framework 370, can be by sealably combination.Builds that be just hermetically sealed and provide can be through the pith of the sealing of several structures of gas closed component and destructing circulation enforcement completely once be to provide gas closed component according to the framing component sealing of this instruction.Although the example providing in the following instruction of Fig. 9 A-9B is the part for sealing gas closed component, it will be appreciated by the skilled addressee that this instruction be applicable in the gas closed component of this instruction whole any.

The first wall framework 310 shown in Fig. 9 A can have the top surface 315 that the medial surface 311 of backing plate 312, vertically side 314 and installation backing plate 316 are installed.The first wall framework 310 can have the first pad 320, the first pads 320 and is arranged in the space being formed by backing plate 312 and adheres to the space being formed by backing plate 312.In the first pad 320 is arranged on the space being formed by backing plate 312 and adhere to the vertical length that the first pad 320 can be extended in the gap 302 that stays after the space that formed by backing plate 312, as shown in Figure 9 A.As shown in Figure 9 A, submissive pad 320 can be arranged in the space being formed by backing plate 312 and adhere to the space being formed by backing plate 312, and can have vertical pad length 321, curve pad length 323 and planar shape is in 90 ° and end at the pad length 325 of the vertical side 314 of wall framework 310 with vertical pad length 321 on inner frame member 311.In Fig. 9 A, the first wall framework 310 can have the top surface 315 that backing plate 316 is installed, thereby forms space on surface 315, and the second pad 340 vertically adheres to described space in described space and near the inward flange 317 of wall framework 310.In the second pad 340 is arranged on the space being formed by backing plate 316 and adhere to the gap 304 staying after the space that formed by backing plate 316 and can extend the horizontal length of the second pad 340, as shown in Figure 9 A.In addition,, as shown in hacures, the length 345 of pad 340 and the length 325 of pad 320 are as one man parallel and align adjacently.

The second wall framework 350 shown in Fig. 9 A can have the top surface 355 of external frame side 353, vertically side 354 and installation backing plate 356.The second wall framework 350 can have the first pad 360, the first pads 360 and is arranged in the space being formed by backing plate 356 and adheres to the space being formed by backing plate 356.In the first pad 360 is arranged on the space being formed by backing plate 356 and adhere to the gap 306 staying after the space that formed by backing plate 356 and can extend the horizontal length of the first pad 360, as shown in Figure 9 A.As shown in Figure 9 A, submissive pad 360 can have vertical length 361, length of curve 363 and planar shape is in 90 ° and end at the length 365 of outer frame members 353 with top surface 355.

As shown in the exploded perspective view of Fig. 9 A, the inner frame member 311 of wall framework 310 can be incorporated into the vertical side 354 of wall framework 350 to form a structure joint of gas closed frame assembly.About the sealing of the structure joint of such formation, according in each embodiment of the gasket seal at the terminal fitting joint portion place of the wall framing component of this instruction, as shown in Figure 9 A, the length 365 of the length 325 of pad 320, pad 360 and the length 345 of pad 340 are all alignd adjacently and as one man.In addition, as described in more detail subsequently, each embodiment of the backing plate of this instruction can be provided for each embodiment of the gas closed component of gas-tight seal instruction compressible pad sheet material about 20% to the consistent compression between about 40% deflection.

Fig. 9 B illustrate all framing components in conjunction with after according to the black box 300 of this instruction, thereby pad is shown as compressive state.Fig. 9 B shows the stereogram of the details of the corner sealing of three plane ties of the top terminals joint joint portion place formation between the first wall framework 310, the second wall framework 350 and top board framework 370 (illustrating with imaginary drawing).As shown in Figure 9 B, certain width can be determined in the pad space being limited by backing plate, thereby after in conjunction with wall framework 310, wall framework 350 and top board framework 370; As shown in imaginary drawing, be used to form vertically, the compressible pad sheet material of level and three gasket seals about 20% guarantee can provide gas-tight seal at the gasket seal at all surface place of the joint of wall framing component sealing to the consistent compression between about 40% deflection.In addition, pad gap 302,304 and 306 (not shown) be sized to make compressible pad sheet material about 20% to the optimal compression between about 40% deflection, each pad can joint sheet gap, as in Fig. 9 B for as shown in pad 340 and pad 360.Thereby, except providing consistent compression by the space that limits each pad setting and adhesion, each embodiment that is designed to the backing plate that gap is provided also guarantees that each compression gasket can comply with in the space being limited by backing plate, and can be will form mode wrinkling or protuberance or otherwise moulding brokenly in compressive state of leakage paths.

According to each embodiment of the gas closed component of this instruction, various types of section panels can use the sealant compressible shim material seal being arranged on each panel part segment frames.Integration Framework member gasket seal, can provide for the position and the material that form the sealant compressible shim sealing between each section panel and panel part segment frames the gas-tight seal gas closed component that has seldom or there is no Leakage Gas.In addition, for all types of panels (for example, the insertion panel 110 of Fig. 5, window panel 120 and easily detachable maintaining window 130) Seal Design can provide afterwards durable panel sealing in this panel repeated removal and installation (may need in order to approach gas closed component inside, for example, in order to safeguard).

For example, Figure 10 A shows maintenance window panel part section 30 and the easy exploded view of detachable maintaining window 130.As mentioned before, maintenance window panel part section 30 can be manufactured for receiving easily detachable maintaining window 130.For each embodiment of gas closed component, panel part section, for example detachable maintenance surface board section 30, can have panel part segment frames 32 and be arranged on the sealant compressible shim 38 on panel part segment frames 32.In each embodiment, the hardware relevant with fastening easily detachable maintaining window 130 in detachable maintenance window panel part section 30 can make terminal use be convenient to install and again install, and the sealing that keeps airtight body while simultaneously guaranteeing in easy detachable maintaining window 130 directly approaches as required terminal use's installation of gas closed component inside and is again arranged on panel part section 30 by needs.Easily detachable maintaining window 130 can comprise rigidity window frame 132, and it can be built by the metal tube material described in any framing component such as but not limited to for this instruction of structure.Maintenance window 130 can use snap action securing hardware, such as but not limited to acting in opposition toggle clamp 136, to make terminal use be convenient to dismounting and installation and maintenance window 130 again.The gloves port hardware assembly 160 of earlier figures 7A-7B is shown in Figure 10 A, has shown one group of 3 snap lock latch 166.

As shown in the front view of the detachable maintenance window panel part section 30 of Figure 10 A, easily detachable maintaining window 130 can have one group of four toggle clamp 136 being fastened on window frame 132.Maintenance window 130 can be positioned in panel part segment frames 30 and limit distance, for guaranteeing the suitable compression stress against pad 38.Use one group of four windows guiding pad 34, as shown in Figure 10 B, it can be arranged in each bight of panel part section 30, for locating maintenance window 130 in panel part section 30.Each in one group of clamping plate 36 can be configured to receive the easily acting in opposition toggle clamp 136 of detachable maintaining window 136.According to each embodiment for the gas-tight seal maintenance window 130 that circulates in several installation and removal, the mechanical strength of maintenance window framework 132 and maintenance window 130 with respect to the restriction position of sealant compressible shim 38 (providing by a group window guiding pad 34) once put in place in conjunction with guaranteeing that maintenance window 130 is fastening, be fastened on the acting in opposition toggle clamp 136 in corresponding clamping plate 36 such as but not limited to use, maintenance window framework 132 just can provide uniform power with limiting compression (being set by a group window guiding pad 34) on panel part segment frames 32.This group window guiding pad 34 is located so that the compression stress of window 130 on pad 38 deflection sealant compressible shim 38 between about 20% to about 40%.In this respect, the manufacture of the structure of maintenance window 130 and panel part section 30 is provided for the sealing of the airtight body of maintenance window 130 in panel part section 30.As mentioned before, window clip 35 can be arranged in panel part section 30 after maintenance window 130 is fastened in panel part section 30, and dismounting in the time that maintenance window 130 need to be dismantled.

Acting in opposition toggle clamp 136 can use any appropriate means and means combination to be fastened to easily detachable maintaining window frame 132.The example of operable suitable fastener means comprise at least one adhesive (such as but not limited to, epoxy resin or cement bonding agent), at least one bolt, at least one screw, at least one other securing member, at least one groove, at least one track, at least one weld part and combination thereof.Acting in opposition toggle clamp 136 can be directly connected to detachable maintenance window framework 132 or indirectly connect by adaptor plate.Acting in opposition toggle clamp 136, clamping plate 36, window guiding pad 34 and window clip 35 can be built by any suitable material and combination of materials.For example, one or more this elements can comprise at least one metal, at least one pottery, at least one plastics and combination thereof.

Except sealing is easily detachable maintaining window, the sealing of airtight body can also be provided for inserting panel and window panel.Portion's section panel of other type that can repeatedly mount and dismount in panel part section comprises such as but not limited to the insertion panel 110 shown in Fig. 5 and window panel 120.In Fig. 5, can find out, the panel frame 122 of window panel 120 builds similarly with insertion panel 110.Thereby, according to each embodiment of gas closed component, can be identical for the manufacture that receives the panel part section of inserting panel and window panel.In this respect, the sealing of insertion panel and window panel can be used same principle to implement.

With reference to figure 11A and 11B, and according to each embodiment of this instruction, any panel of gas locking device (for example, the gas closed component 100 of Fig. 1) can comprise one or more inserting surface board sections 10, and it can have the framework 12 that is configured to receive corresponding insertion panel 110.Figure 11 A refers to the stereogram of the amplifier section shown in 11B of publishing picture.In Figure 11 A, insertion panel 110 is shown as with respect to inserting framework 12 and locates.Can find out at Figure 11 B, insert panel 110 and be attached to framework 12, wherein, framework 12 can be for example to be built by metal.In certain embodiments, metal can comprise aluminium, steel, copper, stainless steel, chromium, alloy and combination thereof etc.Multiple blind cutting threads hole 14 can form in inserting surface board segment frames 12.Panel part segment frames 12 is built into and is included in the pad 16 inserting between panel 110 and framework 12, and sealant compressible shim 18 can be arranged on here.Blind cutting thread hole 14 can be M5 type.Screw 15 can be received by blind cutting thread hole 14, thereby is inserting compression gasket 16 between panel 110 and framework 12.Once put in place against pad 16 is fastening, insert panel 110 just in the sealing of inserting surface board section 10 interior formation airtight bodies.As mentioned before, this panel sealing can be implemented various portions section panel, includes but not limited to the insertion panel 110 shown in Fig. 5 and window panel 120.

According to each embodiment of the sealant compressible shim according to this instruction, compressible pad sheet material for framing component sealing and panel sealing can be selected from various compressible polymeric materials, such as but not limited to any closed air chamber polymeric material classification, this area is also referred to as expanded rubber material or expanded polymer material.Prepared by the mode that in brief, closed air chamber polymer is enclosed in discrete chamber with gas; Wherein each discrete chamber is sealed by polymeric material.The attribute that is expected to be useful in the compressible closed air chamber polymeric pad sheet material of the airtight body sealing of framework and panel component includes but not limited to, the chemical attack of their chemical substances to wide region is firm, there is extraordinary moisture barrier attribute, in wide temperature range, be resilient, and resist permanent compressive deformation.Generally speaking, compared with opening air chamber structure polymeric material, closed air chamber polymeric material has high dimension stability, compared with low moisture absorption coefficient and higher-strength.The all kinds polymeric material that can make closed air chamber polymeric material comprises such as but not limited to silicones, neoprene, ethylene-propylene-diene terpolymer (EPT) (polymer and the compound that use EPDM diene monomers (EPDM, or ethylene propylene diene rubber) to make), ethene nitrile, butadiene-styrene rubber (SBR) and various copolymer and blend.

The expectation material properties of closed air chamber polymer only remains intact during use when harmless and keeps forming the air chamber of block materials.The mode of in this respect, establishing specified material specification (for example, exceeding the specification using in assigned temperature or compression zone) may exceed closed air chamber polymer is used this material can cause the degradation of gasket seal.In each embodiment of the closed air chamber polymer pad of the portion's section panel for seal frame member and framework panel part section, the compression of this material should be no more than about 50% between about 70% deflection, for optimum performance can be about 20% between about 40% deflection.

Except closed air chamber compressible pad sheet material, have for building according to other another example of the sealant compressible shim material type of the expectation attribute of the embodiment of the gas closed component of this instruction and comprise hollow extrusion die mould sealant compressible shim material classification.Hollow extrusion die mould gasket material has expectation attribute as material classification, include but not limited to, the chemical attack of their chemical substances to wide region is firm, has extraordinary moisture barrier attribute, in wide temperature range, be resilient, and resist permanent compressive deformation.This hollow extrusion die mould compressible pad sheet material can occur with the various form factors of wide region, such as but not limited to, any in U-shaped air chamber, D shape air chamber, square air chamber, rectangle air chamber and various conventional shape factor hollow extrusion die mould gasket material.Various hollow extrusion die mould gasket materials can be by making for the manufacture of the polymeric material of closed air chamber compressible pad sheet material.Such as but not limited to, each embodiment of hollow extrusion die mould pad can be made up of silicones, neoprene, ethylene-propylene-diene terpolymer (EPT) (polymer and the compound that use EPDM diene monomers (EPDM) to make), ethene nitrile, butadiene-styrene rubber (SBR) and various copolymer thereof and blend.The compression of this hollow gas chamber gasket material should be no more than about 50% deflection, to keep expecting attribute.

Those of ordinary skill in the art can easily understand, although closed air chamber sealant compressible shim material classification and hollow extrusion die mould sealant compressible shim material classification are given as examples, have and expect that any compressible pad sheet material of attribute may be used to seal for example, each panel in structure member (various walls and top board framing component) and the sealing surface board segment frames that this instruction provides.

Can build gas closed component from multiple framing components, the gas closed component 100 of for example Fig. 3 and Fig. 4 or as the gas closed component 1000 of Figure 23 of subsequent discussion and Figure 24, so that minimize damage system unit (such as but not limited to, gasket seal, framing component, pipeline and portion's section panel) risk.For example, gasket seal is the parts that may be easy to damage during building gas locking device from multiple framing components.According to each embodiment of this instruction, materials and methods is arranged to minimize or eliminate the risk of damaging all parts of gas closed component during building according to the gas locking device of this instruction.

Figure 12 A is the stereogram of the structure starting stage of gas closed component (the gas closed component 100 of for example Fig. 3).For example, although gas closed component (gas closed component 100) is for illustrating the structure of gas closed component of this instruction, those of ordinary skill can recognize, this instruction is applicable to each embodiment of gas closed component.As shown in Figure 12 A, during the structure starting stage of gas closed component, first multiple cushion blocks are placed on by base portion 202, on the dish 204 of support.Cushion block can be thicker than being arranged on the compressible pad sheet material being installed on each wall framing component coiling on 204.A series of cushion blocks can be placed on multiple positions on the periphery edge that coils 204, and in described position, each wall framing component of assembly process gas closed component can be placed on a series of cushion blocks and near the position of coiling 204, and does not contact with dish 204.Expect protecting so as not to be arranged on compressible pad sheet material on each wall framing component (for dish 204 sealing purposes) be subject to any infringement mode at dish 204 each wall framing components of assembling.Thereby the compressible pad sheet material (in order to form gas-tight seal object with dish 204) that uses cushion block (each Wall board parts can be placed on the initial position on dish 204 on pad is determined) to prevent from being arranged on each wall framing component is subject to any infringement.Such as but not limited to, as shown in Figure 12 A, anterior periphery edge 201 can have pad 93,95 and 97, and front walls framing component can be sat and put on pad 93,95 and 97; Right periphery edge 205 can have pad 89 and 91, and right side wall framing component can be sat and put on pad 89 and 91; Rear portion periphery edge 207 can have two pads, and rear wall framework pad can be sat and put thereon, wherein shows pad 87.Can use any quantity, type and the combination of cushion block.It will be appreciated by the skilled addressee that according to this instruction, cushion block can be positioned on dish 204, although the each not shown different cushion block in Figure 12 A-Figure 14 B.

For from component framework member assembling gas locking device instruct the exemplary cushion block of each embodiment shown in Figure 12 B according to this, it is the stereogram of irising out the 3rd cushion block 91 shown in part of Fig. 9 A.Exemplary cushion block 91 can comprise the pad that is attached to cushion block transverse side 92 bar (strap) 90 of determining.Cushion block can be made up of any suitable material and combination of materials.For example, each cushion block can comprise the polyethylene of supra polymer weight.Cushion block bar 90 can be made up of any suitable material and combination of materials.In certain embodiments, cushion block bar 90 comprises nylon material, poly-alkylene material etc.Cushion block 91 has top surface 94 and basal surface

96.Cushion block

87,89,93,95,97 and any other cushion block using can be with identical or similar physical attribute constructions, and can comprise identical or similar material.Cushion block can be to allow the stable periphery top edge that is placed into dish 204 easy-to-dismount mode sit and put, clamp or its other modes arrange expediently.

In the exploded perspective view providing at Figure 13, framing component can comprise being attached to sits front walls framework 210, left side wall framework 220, right side wall framework 230, rear wall framework 240 and top board or the top frame 250 of putting on the dish 204 on base portion 202.OLED print system 50 can be arranged on dish 204 tops.

For example can comprise according to the OLED print system 50 of each embodiment of the gas closed component of this instruction and system: granite base portion; Can support the movable bridge of OLED printing equipment; The one or more devices and the equipment that extend from each embodiment of pressurized inert gas recirculating system, for example, substrate suspending bench, air bearing, track, guide rail; For OLED film formation material is deposited on to suprabasil inkjet printer system, comprise OLED China ink supply subsystem and ink jet-print head; One or more robots etc.Provide all parts that can comprise OLED print system 50, each embodiment of OLED print system 50 can have various floor spaces and form factor.

OLED ink-jet print system can comprise the multiple devices and the equipment that allow ink droplet to be reliably arranged on ad-hoc location in substrate.These devices and equipment can include but not limited to, print head assembly, black induction system, kinematic system, substrate loading and unloading system and head maintenance system.Print head assembly comprises at least one ink gun, with at least one aperture that ink droplet can be sprayed with controllable rate, speed and size.Ink gun is supplied with by ink supply system, and China ink is offered ink gun by ink supply system.Printing needs the relative motion between print head assembly and substrate.This completes by means of kinematic system, normally portal frame or declutch shaft XYZ system.Print head assembly can move (portal frame type) in anchoring base, or in the situation that declutch shaft configures, printhead and substrate both can be moved.In another embodiment, printing station can be fixed, and substrate can move with respect to printhead at X and Y-axis, and Z axis motion provides in substrate or printhead place.In the time that printhead moves with respect to substrate, ink droplet sprays to be deposited on desired locations in substrate in orthochronous.Substrate is used substrate loading and unloading system insert printer and remove from printer.Depend on printer configuration, this can complete with mechanical conveyer, substrate suspending bench or the robot with end effector.Head maintenance system can comprise multiple subsystems, and it allows such as the scraping on drop volume demarcation, inkjet nozzle surface, starts the maintenance task that China ink is ejected into useless pond.

According to each embodiment of this instruction of assembling gas locking device, anterior or the first wall framework 210, left side or the second wall framework 220, right side or the 3rd wall framework 230, rear portion or wall framework 250 and top board framework 250 as shown in figure 13 can be built together in systematic order, are then attached to the dish 204 being arranged on base portion 202.Each embodiment of framing component can use gantry to be positioned on cushion block to prevent from damaging compressible pad sheet material, as mentioned before.For example, use gantry, front walls framework 210 can be sat and put at least three cushion blocks, for example the pad 93,95 and 97 on the periphery top edge 201 of the dish 204 shown in Figure 12 A.After front walls framework 210 is placed on cushion block, wall framework 220 and wall framework 230 can be placed on the cushion block on periphery edge 203 and the periphery edge 205 that has been arranged on respectively dish 204 in succession or with any order successively.According to each embodiment of this instruction from component framework member assembling gas locking device, front walls framework 210 can be placed on cushion block, subsequently left side wall framework 220 and right side wall framework 230 are placed on cushion block, make them put to be connected by bolt in place or be otherwise fastened to front walls framework 210.In each embodiment, rear wall framework 240 can be placed on cushion block, makes them put to be connected by bolt in place or is otherwise fastened to left side wall framework 220 and right side wall framework 230.For each embodiment, once wall framing component tightens together to form abuts with wall framework closed component, top top board framework 250 just can be fixed to this wall framework closed component to form complete gas closed frame assembly.At each embodiment of this instruction for building gas closed component, in this assembling stage, complete gas closed frame assembly is sat and is put on described multiple cushion blocks to protect the globality of each framing component pad.

As shown in Figure 14 A, for each embodiment of this instruction for building gas closed component, then gas closed frame assembly 400 can be located to pad can remove to prepare gas closed frame assembly 400 is attached to dish 204.Figure 14 A shows gas closed frame assembly 400 and uses lifter assembly 402, lifter assembly 404 and lifter assembly 406 to be increased to the position that promotes and leave cushion block from cushion block.In each embodiment of this instruction, lifter assembly 402,404 and 406 can be attached around the periphery of gas closed frame assembly 400.After lifter assembly is attached, completely build gas closed frame assembly can by activate each lifter assembly with raise or stretch out each lifter assembly and lift from cushion block, thereby rising gas closed frame assembly 400.As shown in Figure 14 A, gas closed frame assembly 400 is shown as and is thus lifted to previous seat and puts multiple cushion blocks top thereon.Then described multiple cushion block can be removed from the seat seated position of coiling 204, thereby then framework can be reduced on dish 204 and then be attached to dish 204.

Figure 14 B is according to the exploded view of the identical lifter assembly 402 of each embodiment of the lifter assembly of this instruction, as shown in Figure 11 A.As shown in the figure, lifter assembly 402 comprises wear prevention pad 408, installing plate 410, first clamp bearing 412 and second clamp bearing 413.First clamp 414 and second clamp 415 are shown as with corresponding clip bearing 412 and 413 and are in line.Jack bent axle 416 is attached to the top of very heavy apical axis 418.Trailer jack 520 (trailer iack) is shown as perpendicular to very heavy apical axis 418 and is attached to very heavy apical axis 418.Jack base portion 422 is shown as a part for the bottom of very heavy apical axis 418.Below jack base portion 422, be foot abutment 424, it is configured to receive the bottom of very heavy apical axis 418 and can be connected thereto.Smoothing foot (1eveling foot) 426 is also illustrated and is configured to be received by foot abutment 424.Those of ordinary skill in the art can easily recognize, any means that are suitable for lifting operation may be used to from cushion block rising gas closed frame assembly, thereby cushion block can be removed and intact gas closed component can be reduced on dish.For example, replace above-mentioned one or more lifter assembly, for example 402,404 and 406, can use hydraulic pressure, pneumatic or electric hoist device.

According to each embodiment of this instruction for building gas closed component, multiple securing members can provide and be configured to described multiple framing components are tightened together, and then gas closed frame assembly are fastened to dish.Described multiple securing member can comprise along each edge of each framing component be arranged on respective frame member be configured to multiple framing components in one or more securing member parts of position of adjacent frame bar-crossing.Described multiple securing member and sealant compressible shim can be arranged so that sealant compressible shim arranges near inside and the close outside of hardware in the time that framing component combines, thereby hardware can not provide multiple leakage paths of the airtight body closed component of this instruction.

Described multiple securing member can comprise along multiple bolts at the edge of one or more framing components and along multiple screwed holes at the edge of the one or more different frames members in multiple framing components.Described multiple securing member can comprise multiple nut set bolts (captured bolt).Described bolt can comprise the bolt head that extends the outer surface that leaves the corresponding panel.Bolt can sink in the recess in framing component.Clip, screw, rivet, adhesive and other securing member can be for tightening together framing component.Bolt or other securing member can extend through the outer wall of one or more framing components and enter in the screwed hole or other complementary fasteners feature in sidewall or the roof of one or more adjacent frame members.

As shown in Figure 15-17, for each embodiment of method that builds gas locking device, pipe-line system can be arranged on by wall framework and top board framing component in conjunction with in the interior section forming.For each embodiment of gas closed component, pipe-line system can be installed during building process.According to each embodiment of this instruction, pipe-line system can be arranged in the gas closed frame assembly being built by multiple framing components.In each embodiment, pipe-line system can be at multiple framing components in conjunction with being arranged on multiple framing components before forming gas closed frame assembly.The pipe-line system of each embodiment of gas closed component and system can be arranged to be drawn into all gas substantially pipe-line system and all to move through from one or more pipe-line system entrances each embodiment in gas filtration loop, for removing the particulate matter in gas closed component.In addition, the pipe-line system of each embodiment of gas closed component and system can be configured to by the entrance and exit of the gas purification loop of gas closed component outside from gas filtration loop separately, and gas filtration loop is for removing the particulate matter in gas closed component.Can be made by sheet metal according to each embodiment of the pipe-line system of this instruction, such as but not limited to the aluminium flake with about 80mil thickness.

Figure 15 shows the right front imaginary stereogram of the pipe-line system assembly 500 of gas closed component 100.Closed pipe system assembly 500 can have front walls panel pipe-line system assembly 510.As shown in the figure, front walls panel pipe-line system assembly 510 can have front walls panel inlet duct 512, the first front walls panel standpipe 514 and the second front walls panel standpipe 516, and it is both communicated with front walls panel inlet duct 512 fluids.The first front walls panel standpipe 514 is shown as has outlet 515, and outlet 515 sealably engages with the top board pipeline 505 of fan filter unit lid 103.In a similar manner, the second front walls panel standpipe 516 is shown as has outlet 517, and outlet 517 sealably engages with the top board pipeline 507 of fan filter unit lid 103.In this respect, front walls panel pipe-line system assembly 510 is provided for the inert gas in gas closed component from bottom cycle, use front walls panel inlet duct 512, by each front walls panel standpipe 514 and 516, and respectively air is carried by outlet 505 and 507, thereby air can filter by for example fan filter unit 752.As described in more detail subsequently, the quantity of fan filter unit, size and dimension can be selected according to the physical location of the substrate in print system during process.Heat exchanger 742, near fan filter unit 752, as a part for heat regulating system, can remain on preferred temperature by the inert gas that cycles through gas closed component 100.

Right side wall panel pipe-line system assembly 530 can have right side wall panel inlet duct 532, and it is communicated with right side wall panel upper pipe 538 fluids by right side wall panel the first standpipe 534 and right side wall panel the second standpipe 536.Right side wall panel upper pipe 538 can have the first entrance end 535 and second pipe outlet end 537, and second pipe outlet end 537 is communicated with rear wall panel upper pipe 536 fluids of rear wall pipe-line system assembly 540.Left side wall panel pipe-line system assembly 520 can have and parts for identical described in right side wall panel assembly 530, wherein, can see at Figure 15 the left side wall panel inlet duct 522 and the first left side wall panel standpipe 524 that are communicated with left side wall panel upper pipe (not shown) fluid by the first left side wall panel standpipe 524.Rear wall panel pipe-line system assembly 540 can have rear wall panel inlet duct 542, and rear wall panel inlet duct 542 is communicated with left side wall panel assembly 520 and right side wall panel assembly 530 fluids.In addition, rear wall panel pipe-line system assembly 540 can have rear wall panel bottom pipe 544, and rear wall panel bottom pipe 544 can have rear wall panel the first entrance 541 and rear wall panel the second entrance 543.Rear wall panel bottom pipe 544 can be communicated with rear wall panel upper pipe 536 fluids via the first bulkhead 547 and the second bulkhead 549, and described bulkhead structure can be for being fed to inside from the outside of gas closed component 100 such as but not limited to the various bundles of cable, line and pipeline etc.Pipeline tapping 533 is provided for the bundle of cable, line and pipeline etc. to shift out rear wall panel upper pipe 536, and it can be via bulkhead 549 through upper pipe 536.Bulkhead 547 and bulkhead 549 can use detachable insertion panel gas-tight seal on outside, as mentioned before.Rear wall panel upper pipe by ventilating opening 545 (an one bight has been shown in Figure 15) be communicated with such as but not limited to fan filter unit 754 fluids.In this respect, left side wall panel pipe-line system assembly 520, right side wall panel pipe-line system assembly 530 and rear wall panel pipe-line system assembly 540 are provided for the inert gas in gas closed component from bottom cycle, use respectively Wall board inlet duct 522,532 and 542 and front panel lower pipeline 544, it is communicated with ventilating opening 545 fluids by aforesaid each standpipe, pipeline, bulkhead passage etc., thereby air can filter by for example fan filter unit 755.Heat exchanger 745, near fan filter unit 755, as a part for heat regulating system, can remain on preferred temperature by the inert gas that cycles through gas closed component 100.

In Figure 15, show by the cable of opening 533 and be fed to.As described in more detail subsequently, each embodiment of the gas closed component of this instruction is provided for making the bundle of cable, line and pipeline etc. to pass through pipe-line system.In order to eliminate the leakage paths forming around this bundle, can use each method of different size cable, line and pipeline for using compliant materials sealed beam.In Figure 15, also show pipe I and pipe II for closed pipe system assembly 500, it is shown as a part for fan filter unit lid 103.Pipe I provide the inert gas outlet to extraneous gas cleaning system, and pipe II provides to the filtration of gas closed component 100 inside and the purification inert gas of closed circuit and returns.

The imaginary top perspective view of closed pipe system assembly 500 has been shown in Figure 16.Can find out the symmetric property of left side wall panel pipe-line system assembly 520 and right side wall panel pipe-line system assembly 530.For right side wall panel pipe-line system assembly 530, right side wall panel inlet duct 532 is communicated with right side wall panel upper pipe 538 fluids by right side wall panel the first standpipe 534 and right side wall panel the second standpipe 536.Right side wall panel upper pipe 538 can have the first entrance end 535 and second pipe outlet end 537, and second pipe outlet end 537 is communicated with rear wall panel upper pipe 536 fluids of rear wall pipe-line system assembly 540.Similarly, left side wall panel pipe-line system assembly 520 can have left side wall panel inlet duct 522, and left side wall panel inlet duct 522 is communicated with left side wall panel upper pipe 528 fluids by left side wall panel the first standpipe 524 and left side wall panel the second standpipe 526.Left side wall panel upper pipe 528 can have the first entrance end 525 and second pipe outlet end 527, and second pipe outlet end 527 is communicated with rear wall panel upper pipe 536 fluids of rear wall pipe-line system assembly 540.In addition, rear wall panel pipe-line system assembly can have rear wall panel inlet duct 542, and rear wall panel inlet duct 542 is communicated with left side wall panel assembly 520 and right side wall panel assembly 530 fluids.In addition, rear wall panel pipe-line system assembly 540 can have rear wall panel bottom pipe 544, and rear wall panel bottom pipe 544 can have rear wall panel the first entrance 541 and rear wall panel the second entrance 543.Rear wall panel bottom pipe 544 can be communicated with rear wall panel upper pipe 536 fluids via the first bulkhead 547 and the second bulkhead 549.Pipe-line system assembly 500 shown in Figure 15 and Figure 16 can provide the Efficient Cycle of inert gas from anterior Wall board pipe-line system assembly 510 (it is recycled to top board panel pipeline 505 and 507 via front walls panel outlet 515 and 517 by inert gas respectively from anterior Wall board inlet duct 512) and from left side wall panel assembly 520, the Efficient Cycle of right side wall panel assembly 530 and rear wall panel pipe-line system assembly 540 is (by air respectively from inlet duct 522, 532 and 542 are recycled to ventilating opening 545).Once inert gas is discharged to the closed area under the fan filter unit lid 103 of locking device 100 via top board panel pipeline 505 and 507 and ventilating opening 545, the inert gas of discharging like this can filter by fan filter unit 752 and 754.In addition, the inert gas of circulation can remain on preferred temperature by heat exchanger 742 and 744 (being a part for heat regulating system).

Figure 17 is the imaginary upward view of closed pipe system assembly 500.Inlet duct system component 502 comprises front walls panel inlet duct 512, left side wall panel inlet duct 522, right side wall panel inlet duct 532 and the rear wall panel inlet duct 542 of fluid communication with each other.The each inlet duct comprising for inlet duct system component 502, exist along each duct bottom is equally distributed and know opening, many group openings are by lay special stress on, for the object of this instruction, as the opening 521 of the opening 511 of front walls panel inlet duct 512, left side wall panel inlet duct 522, the opening 531 of right side wall panel inlet duct 532 and the opening 541 of right side wall panel inlet duct 542.Bottom at each inlet duct can see, this opening is provided for inert gas in the interior effective picked-up of locking device 100, for continuous circulation and filtration.The continuous circulation of the inert gas of each embodiment of gas closed component and the environment that there is no particle filtering in each embodiment that is provided for keeping gas closed component system.Each embodiment of gas closed component system can remain on 4 grades of ISO14644 for particulate matter.Each embodiment of gas closed component system can remain on 3 grades of specifications of ISO14644 for the responsive especially process of particle contamination.As mentioned before, pipe I provide the inert gas outlet to extraneous gas cleaning system, and pipe II provides to the filtration of gas closed component 100 inside and the purification inert gas of closed circuit and returns.

According in each embodiment of the gas closed component system of this instruction, the bundle of cable, line and pipeline etc. can be fed to by pipeline, for example, to purge the reactive ambient gas in the dead band of the bundle that is trapped in cable, line and pipeline etc., water vapour and oxygen.According to this instruction, have been found that the dead band that forms forms the reservoir of the reactive materials of holding back in the bundle of cable, line and pipeline, it can extend significantly and makes gas closed component meet the required time of specification of execution air-sensitive process.For the gas closed component of this instruction for printing OLED device and each embodiment of system, various reactive materials (comprise various reactive ambient gas, for example water vapour and oxygen, and organic vapor) in every kind of material can remain on for example 100ppm or lower, 10ppm or lower, 1.0ppm or lower or 0.1ppm or lower.

To purge and hold back the required time of reactive ambient gas in order to understand to be fed to can how to cause reducing from the dead volume of the cable that ties in, line and pipeline etc. by the cable of pipeline, with reference to figure 18A-19.Figure 18 A shows the enlarged drawing of bundle I, and bundle I can be the bundle that can comprise pipeline (for example,, for various China inks, solvent etc. being flowed to the pipeline A of print system (as the print system 50 of Figure 13)).The bundle I of Figure 18 A can also comprise electric wire (for example electric wire B) and cable (for example coaxial cable C).Together with this pipeline, line and cable can tie in and from outside, route to inner to be connected to various devices and equipment (comprising OLED print system).Shadow region at Figure 18 A can find out, this bundle can form a large amount of dead band D.In the schematic perspective view of Figure 18 B, in the time that cable, line and bale of pipeline I are fed to by pipeline II, inert gas III inswept described bundle continuously.How the amplification sectional view of Figure 19 can increase the speed of removing the reactive materials of holding back from the dead volume of this intrafascicular formation effectively if showing the inert gas of the inswept pipeline that ties in, line and cable continuously.The reactive species concentrations that reactive materials A leaves (representing by the overall area being occupied by inert gas substance B in Figure 19) outside the diffusion rate and dead volume of dead volume (representing by the overall area being occupied by substance A in Figure 19) is inversely proportional to.,, if the concentration of reactive materials is high in the volume outside dead volume just, diffusion rate reduces so.If the reactive species concentrations in this region reduces (by the mobile stream of inert gas, so pass through mass action) continuously from the volume dead volume space just, reactive materials increases from the speed of dead volume diffusion so.In addition, by same principle, inert gas can be spread in dead volume, because institute's reactive materials of holding back is removed from these spaces effectively.

Figure 20 A is the stereogram in the rear bight of each embodiment of gas closed component 600, and imaginary drawing enters the inside of gas closed component 600 through Returning pipe 605.For each embodiment of gas closed component 600, rear wall panel 640 can have the panel 610 of insertion, inserts panel 610 and is configured to provide the path to for example electric bulkhead.The bundle of cable, line and pipeline etc. can be fed to and enter cable wiring conduit by bulkhead, for example, at the pipeline 632 shown in right side wall panel 630, for this reason, detachably insert panel and dismantled to expose the bundle routing in the first cable, line and bale of pipeline conduit entrance 636.From here, described bundle can be fed to the inside of gas closed component 600, and illustrates by the Returning pipe 605 in the inside of gas closed component 600 in imaginary drawing.Each embodiment of the gas closed component connecting up for cable, line and bale of pipeline can have more than one cable, line and bale of pipeline import, and as shown in FIG. 20 A, it shows the first bundle conduit entrance 634 and the second bundle conduit entrance 636 for another bundle.Figure 20 B shows the enlarged drawing for the bundle conduit entrance 634 of cable, line and bale of pipeline.Bundle conduit entrance 634 can have the opening 631 that is designed to form with slide lid 633 sealing.In each embodiment, opening 631 can hold flexible sealing module, for example, provided by the Roxtec Company sealing for cable entries, and it can hold cable, line and the pipeline etc. of intrafascicular various diameters.Alternatively, the top 635 of slide lid 633 and the top part 637 of opening 631 can have and be arranged on each lip-deep compliant materials, thereby compliant materials can around form sealing at cable, line and the pipeline etc. that are fed to the intrafascicular various sizes diameter by import (as, bundle conduit entrance 634).

Figure 21 is the upward view of each embodiment of the top board panel of this instruction, the gas closed component of for example Fig. 3 and the top board panel 250 ' of system 100.According to each embodiment of this instruction of assembling gas locking device, lighting device for example can be arranged on, in the inside top surface of top board panel (the gas closed component of Fig. 3 and the top board panel 250 ' of system 100).As shown in figure 21, the top board framework 250 that has an interior section 251 can be arranged on lighting device on the interior section of each framing component.For example, top board framework 250 can have two top board frame section sections 40, and top board frame section section 40 has two top board Vierendeel girders 42 and 44 conventionally.Each top board frame section section 40 can have towards the first side 41 of top board framework 250 positioned internal with towards outside the second side 43 of locating of top board framework 250.For provide for gas locking device illumination according to each embodiment of this instruction, illumination component 46 can be installed right.Every pair of illumination component 46 can comprise the second illumination component 47 near the first illumination component 45 of the first side 41 and the second side 43 of close top board frame section section 40.Quantity, location and the grouping of the illumination component shown in Figure 21 are exemplary.The quantity of illumination component and grouping can change with any expectation or suitable method.In each embodiment, illumination component can be installed straightly, and in other embodiments, can be mounted to and make them can move to each position and angle.In addition or replace and can be positioned on any other inner surface, outer surface and surface combination of the gas closed component shown in Fig. 3 and system 100 setting of illumination component is not limited to top panel top board 433, but.

Various illumination components can comprise lamp or the combination of any quantity, type, for example halogen light modulation, white lamp, incandescence, arc lamp or light emitting diode or device (LED).For example, each illumination component can comprise that 1 LED is to about 100 LED, and about 10 LED are about 50 LED extremely, or are greater than 100 LED.LED or other lighting device can send in chromatogram, chromatogram outer or any color or the color combination of its combination.According to each embodiment of the gas closed component for inkjet printing OLED material, because the photaesthesia of some materials to some wavelength, thereby the optical wavelength that is arranged on the lighting device in gas closed component can specifically be selected, to avoid material degradation during process.For example, the cold White LED of 4X be can use, 4X yellow led or its any combination also can be used.The example of the cold White LED of 4X is can be from IDEC Corporation of Sunnyvale, the LF1B-D4S-2THWW4 that California obtains.The example of operable 4X yellow led is the LF1B-D4S-2SHY6 that also can obtain from IDEC Corporation.LED or other illumination component can be from the interior sections of top board framework 250 251 or another lip-deep location, any position of gas closed component or suspend.Illumination component is not limited to LED.Can use the combination of any suitable illumination component or illumination component.Figure 22 is the curve map of IDEC LED spectrum, and shows x axle corresponding with intensity in the time that peak strength is 100% and the y axle corresponding with wavelength (unit: nanometer).Show the frequency spectrum of the yellow type of LF1B, yellow fluorescence lamp, LF1B white type LED, the cold white type LED of LF1B and the red type LED of LF1B.According to each embodiment of this instruction, can use other spectrum and spectral combination.

Recall, each embodiment of gas closed component can with the internal capacity of minimum gas closed component and simultaneously Optimization Work space build in the mode of the various floor spaces of holding various OLED print systems.Each embodiment of the gas closed component so building also during process, be easy to approach from outside the inside of gas closed component and be easy to approach inner to safeguard, simultaneous minimization downtime.In this respect, can be about the various floor space fixed wheel exterior features of various OLED print systems according to each embodiment of the gas closed component of this instruction.

Those of ordinary skill is appreciated that, this instruction that is used for the structure of framing component structure, panel structure, framework and panel sealing and gas closed component (for example, the gas closed component 100 of Fig. 3) can be applied to the gas closed component with various sizes and design.Such as but not limited to, each embodiment of containing the wide gas closed component of fixed wheel of this instruction of size of foundation base Gen3.5 to Gen10 can have at about 6m ³to about 95m ³between internal capacity, and can for uncertain profile and have suitable nominal dimension locking device save volume between about 30% to about 70%.Each embodiment of gas closed component can make each framing component be built into the profile that is provided for gas closed component, so that hold OLED print system for its function and simultaneously Optimization Work space to minimize inert gas volume, and also allow to be convenient to approach from outside OLED print system during process.In this respect, each gas closed component of this instruction can change aspect profile layout and volume.

Figure 23 provides according to the example of the gas closed component of this instruction.Gas closed component 1000 can comprise forward frame assembly 1100, central frame assembly 1200 and rear frame assembly 1300.Forward frame assembly 1100 can comprise forward frame base portion 1120, front walls framework 1140 and anterior top board framework 1160, and front walls framework 1140 has the opening 1142 for receiving substrate.Central frame assembly 1200 can comprise central frame base portion 1220, right-hand member wall framework 1240, midfeather framework 1260 and left end wall framework 1280.Rear frame assembly 1300 can comprise rear frame base portion 1320, rear wall framework 1340 and rear portion top board framework 1360.Region shown in shade shows the available work volume of gas closed component 1000, and it is the volume that can be used for holding OLED print system.Each embodiment fixed wheel of gas closed component 1000 is wide for example, for (minimizing operation air-sensitive process, OLED print procedure) volume of required recirculation inert gas, and allow to be convenient to approach OLED print system (remotely or directly easily approaching by can easily dismantling panel during operation) simultaneously.For each embodiment of gas closed component of this instruction of containing size of foundation base Gen3.5 to Gen10, can have at about 6m according to each embodiment of the wide gas closed component of the fixed wheel of this instruction ³to about 95m ³between gas enclosed volume, such as but not limited at about 15m ³to about 30m ³between, for the OLED of for example Gen5.5 to Gen8.5 size of foundation base prints, this may be useful.

Gas closed component 1000 can have all features of recording for example gases closed component 100 in this instruction.Such as but not limited to, gas closed component 1000 can use the sealing according to this instruction, so that the gas-tight seal locking device through several structures and destructing circulation to be provided.Each embodiment of gas closed system based on gas closed component 1000 can have gas purge system, it can (comprise various reactive ambient gas by various reactive materials, for example water vapour and oxygen, and organic vapor) the level of every kind of material remain on for example 100ppm or lower, 10ppm or lower, 1.0ppm or lower or 0.1ppm or lower.

In addition, each embodiment of the gas closed component system based on gas closed component 1000 can have circulation and filtration system, its can provide meet ISO14644 3 grades and 4 grades toilet's standards without particle environment.In addition, as subsequently more in detail as shown in, gas closed component based on this instruction (for example, gas closed component 100 and gas closed component 1000) gas closed component system can there is each embodiment of pressurized inert gas recirculating system, its can for operational example as but be not limited to lower one or more: pneumatic robot, substrate suspending bench, air bearing, air lining, Compressed Gas instrument, pneumatic actuator and combination thereof.For the gas locking device of this instruction and each embodiment of system, use various pneumatically-operated devices and equipment can provide low particle to generate performance and low maintenance cost.

Figure 24 is according to the exploded view of the gas closed component 1000 of this instruction, illustrates each framing component that can be fabricated to provide gas-tight seal gas locking device.As above for as described in each embodiment of the gas locking device 100 of Fig. 3 and Figure 13, OLED ink-jet print system 50 can comprise the multiple devices and the equipment that allow ink droplet to be reliably arranged on the upper ad-hoc location of substrate (for example substrate 60), near substrate suspending bench 54, illustrates.Provide all parts that can comprise OLED print system 50, each embodiment of OLED print system 50 can have various floor spaces and form factor.According to each embodiment of OLED ink-jet print system, various base materials can be for substrate 60, such as but not limited to various glass substrate material and various Polymers bottom material.

According to each embodiment of the gas closed component of this instruction, as above for as described in gas locking device 100, the structure of gas closed component can carry out around whole OLED print system, with the volume of minimum gas closed component and be convenient to approach inner.In Figure 24, the example of fixed wheel exterior feature can consider that OLED print system 50 provides.

As shown in figure 24, in OLED print system 50, can there are six isolators, can see wherein two: the first isolator 51 and the second isolator 53, it supports the substrate suspending bench 54 of OLED print system 50.Except two all relative with the second isolator 53 with visible the first isolator 51 additional isolator, there are two isolators that support OLED print system base portion 52.Closed front base portion 1120 can have the first closed front isolator bearing 1121 that supports the first closed front isolator wall framework 1123.The second closed front isolator wall framework 1127 is supported by the second closed front isolator bearing (not shown).Similarly, sealing base portion 1220 in centre can have the first middle sealing isolator bearing 1221 that supports sealing isolator wall framework 1223 in the middle of first.In the middle of second, sealing isolator wall framework 1227 is supported by the second middle sealing isolator bearing (not shown).Finally, rear closure base portion 1320 can have the first rear closure isolator bearing 1321 that supports the middle sealing in rear portion isolator wall framework 1323.The second rear closure isolator wall framework 1327 is supported by the second rear closure isolator bearing (not shown).Each embodiment of isolator wall framing component can be around each isolator fixed wheel exterior feature, thereby minimize each isolator supporting member volume around.In addition be demountable detachable panel for the shadow surface board section shown in each isolator wall framework of base portion 1120,1220 and 1320, for example, so that maintenance isolator.Closed front assembly base portion 1120 can have dish 1122, and simultaneously middle closed component base portion 1220 can have dish 1222, and rear closure assembly base portion 1320 can have dish 1322.In the time that base portion builds to form in abutting connection with base portion completely, OLED print system can be arranged on thus in the abuts tray forming, and to be similar to, OLED print system 50 is arranged on to the mode on the dish 204 of Figure 13.As mentioned before, wall and top board framing component, the wall framework 1140 of for example forward frame assembly 1100, top board framework 1160; The wall framework 1240,1260 and 1280 of central frame assembly 1200; And the wall framework 1340 of rear frame assembly 1300, top board framework 1360, then can around OLED print system 50, combine.Thereby gas-tight seal each embodiment that determines contoured wall framing component of this instruction reduces the inert gas volume in gas closed component 100 effectively, and is convenient to approach each device and the equipment of OLED print system simultaneously.

Can there is gas circulation and the filtration system in gas closed component inside according to the gas closed component of this instruction and system.This self-filtering system can have the multiple fan filter units in inside, and can be configured to provide gas laminar flow in inside.Laminar flow can be direction or any other direction from inner top to inner bottom.Although the gas flow producing by the circulatory system needs not be laminar flow, gas laminar flow can be used for the thorough and turnover completely of the gas of guaranteeing inside.Gas laminar flow can also be used for minimizing turbulent flow, and this turbulent flow is undesirable, because it can make the particle in environment be collected in this regions of turbulent flow, thereby prevents that filtration system from removing those particles from environment.In addition, in order to keep preferred temperature in inside, can provide the heat regulating system that uses multiple heat exchangers, for example, by means of fan or the operation of another gas-recycling plant, near fan or another gas-recycling plant, or be combined with fan or another gas-recycling plant.Gas purification loop can be configured to by least one the gas purification parts in locking device outside from gas closed component inner loop gas.In this respect, the filtration of gas closed component inside and the circulatory system are combined the continuous circulation that runs through the remarkable low particulate inert gas in gas closed component can be provided with the gas purification loop of gas closed component outside, and it has remarkable low-level reactive materials.Gas purge system can be configured to keep very low-level do not wish composition, such as organic solvent and steam thereof and water, water vapour, oxygen etc.

Figure 25 shows the schematic diagram of gas closed component and system 2100.Each embodiment of gas closed component and system 2100 can comprise the gas purification loop 2130 and at least one heat regulating system 2140 that are communicated with according to the gas closed component 1500 of this instruction, with gas closed component 1500 fluids.In addition, each embodiment of gas closed component and system can have pressurized inert gas recirculating system 2169, and it can install to operate each by supplying inert gas, the substrate suspending bench of for example OLED print system.Each embodiment of pressurized inert gas recirculating system 2169 can use compressor, air blast and both combinations, as the source of each embodiment of inert gas recirculating system 2169, as described in more detail subsequently.In addition, gas closed component and system 2100 can have filtration and the circulatory system (not shown) in gas closed component and system 2100 inside.

As shown in figure 25, for according to each embodiment of the gas closed component of this instruction, the design of pipeline can be by the inert gas that cycles through gas purification loop 2130 from the inert gas of the inner continuous filtration of each embodiment at gas closed component and circulation separately.Gas purification loop 2130 comprises egress line 2131, and it is from gas closed component 1500 to removal of solvents parts 2132 and then to gas purge system 2134.The inert gas that is cleaned solvent and other reactant gas material (for example oxygen and water vapour) then returns to gas closed component 1500 by entrance circuit 2133.Gas purification loop 2130 can also comprise suitable pipe and connection, and sensor, for example oxygen, water vapour and solvent vapo(u)r sensor.Gas circulation unit, such as fan, air blast or motor etc., for example can independently arrange or be integrally formed in gas purge system 2134, with by gas circulation by gas purification loop 2130.According to each embodiment of gas closed component, although removal of solvents system 2132 and gas purge system 2134 are shown as separate unit in the schematic diagram shown in Figure 25, removal of solvents system 2132 and gas purge system 2134 can be used as together with single clean unit is contained in.Heat regulating system 2140 can comprise at least one cooler 2141, its can have for by circulate coolant to the fluid issuing circuit 2143 of gas closed component with for making cooling agent return to the fluid intake circuit 2145 of cooler.

The gas purification loop 2130 of Figure 25 can have the removal of solvents system 2132 of the gas purge system of being arranged on 2134 upstreams, thereby the inert gas circulating from gas closed component 1500 passes through removal of solvents system 2132 via egress line 2131.According to each embodiment, removal of solvents system 2132 can be the solvent capture systems of the inert gas lyosoption steam of the removal of solvents system 2132 based on from by Figure 25.Sorbent bed or multiple beds, such as but not limited to active carbon, molecular sieve etc., can remove the various organic vapors of wide region effectively.For each embodiment of gas closed component, can adopt cold capture technique, to remove the solvent vapo(u)r in removal of solvents system 2132.As mentioned before, for according to each embodiment of the gas closed component of this instruction, can use sensor, for example oxygen, water vapour and solvent vapo(u)r sensor, for example to monitor this material, from cycling through continuously effective removal of inert gas of gas closed component system (, the gas closed component system 2100 of Figure 25).Each embodiment of removal of solvents system can indicate absorbent (such as active carbon, molecular sieve etc.) when to arrive capacity, thereby sorbent bed or multiple bed can regenerate or change.The regeneration of molecular sieve can comprise heating molecular sieve, and molecular sieve is contacted with forming gas, and combination etc.Be configured to catch each material (comprising oxygen, water vapour and solvent) molecular sieve can by heat and be exposed to comprise hydrogen forming gas (for example, comprise the forming gas of the hydrogen of about 96% nitrogen and 4%) and regenerate, described percentage is volume ratio or weight ratio.The physics regeneration of active carbon can be used the similar procedure heating under inert environments to complete.

Any suitable gas cleaning system may be used to the gas purge system 2134 of the gas purification loop 2130 of Figure 25.For example, can be from MBRAUN Inc., of Statham, New Hampshire or Innovative Technology of Amesbury, the gas purge system that Massachusetts obtains can be used for being integrally formed in according in each embodiment of the gas closed component of this instruction.Gas purge system 2134 can be for one or more inert gases in Purge gas closed component and system 2100, for example, and with all gas environment in Purge gas closed component.As mentioned before, in order to make gas circulation pass through gas purification loop 2130, gas purge system 2134 can have gas circulation unit, such as fan, air blast or motor etc.In this respect, gas purge system can be selected according to the volume of locking device, and it can be defined for the volume flow rate that makes inert gas move through gas purge system.Have until about 4m for comprising ³the gas closed component of gas closed component and each embodiment of system of volume; Can use and can move about 84m ³the gas purge system of/h.Have until about 10m for comprising ³the gas closed component of gas closed component and each embodiment of system of volume; Can use and can move about 155m ³the gas purge system of/h.For thering is about 52-114m ³between each embodiment of gas closed component of volume; Can use more than one gas purge system.

Any suitable gas filter or purifier can be included in the gas purge system 2134 of this instruction.In certain embodiments, gas purge system can comprise two purifiers in parallel, thus device can take away for safeguarding by off-line, and another device can be for the operation of continuation system, and does not interrupt.In certain embodiments, for example, gas purge system can comprise one or more molecular sieves.In certain embodiments, gas purge system can at least comprise the first molecular sieve and the second molecular sieve, thereby saturated or otherwise think that can not enough effectively operate time, system can be switched to another molecular sieve, the molecular sieve of simultaneously regenerate saturated or poor efficiency at molecular sieve impurity.Control module can be provided for determining the operating efficiency of each molecular sieve, for switching between the operation at different molecular sieve, and for one or more molecular sieves of regenerating, or for its combination.As mentioned before, molecular sieve can be reproduced and reuse.

About the heat regulating system 2140 of Figure 25, at least one fluid cooler 2141 can be set, for the gaseous environment in refrigerating gas closed component and system 2100.For each embodiment of the gas closed component of this instruction, cooling fluid is flowed to the heat exchanger in locking device by fluid cooler 2141, and wherein, inert gas is through the filtration system of locking device inside.At least one fluid cooler can also be arranged in gas closed component and system 2100, with the heat of the cooling equipment that comes from the 2100 interior encapsulation of gas locking device.Such as but not limited to, at least one fluid cooler can also be provided for gas closed component and system 2100, with the cooling heat that comes from OLED print system.Heat regulating system 2140 can comprise heat exchange or Peltier device, and can have various cooling capacities.For example, for each embodiment of gas closed component and system, cooler can be provided in about 2kW to the cooling capacity between about 20kW.Fluid cooler 1136 and 1138 can cooling one or more fluids.In certain embodiments, fluid cooler can use multiple fluid as cooling agent, such as but not limited to, water, antifreezing agent, cold-producing medium and combination thereof, as heat-exchange fluid.Suitable connects and can close pipe and system unit for being connected with without leaking locking.

As shown in Figure 26 and Figure 27, one or more fan filter units can be configured to provide the roughly laminar flow by inner gas.According to each embodiment of the gas closed component according to this instruction, one or more fan units arrange the first inner surface near gaseous environment locking device, and one or more pipe-line system entrances arrange relative the second inner surface near gaseous environment locking device.For example, gaseous environment locking device can comprise inner top and bottom inner rim, described one or more fan unit can arrange near inner top, described one or more pipe-line system entrance can comprise the multiple entrance openings that arrange near bottom inner rim, it is a part for pipe-line system, as shown in Figure 15-17.

Figure 26 is along the sectional view intercepting according to the length of the gas closed component of each embodiment of this instruction and system 2000.The gas closed component of Figure 26 and system 2000 can comprise gas locking device 1500 and gas purge system 2130 (also referring to Figure 25), heat regulating system 2140, filtration and the circulatory system 2150 and the pipe-line system 2170 that can hold OLED print system 50.Heat regulating system 2140 can comprise the fluid cooler 2141 being communicated with cooler outlet circuit 2143 and cooler entrance circuit 2145 fluids.Cooling fluid can leave fluid cooler 2141, flow through cooler outlet circuit 2143, and flow to heat exchanger, for each embodiment of the gas closed component shown in Figure 26 and system, it can be arranged near multiple fan filter units each.Fluid can return to cooler 2141 by cooler entrance circuit 2145 near heat exchanger fan filter unit, to remain on constant preferred temperature.As mentioned before, cooler outlet circuit 2141 and cooler entrance circuit 2143 are communicated with multiple heat exchanger fluid, comprise the first heat exchanger 2142, the second heat exchanger 2144 and the 3rd heat exchanger 2146.According to each embodiment of the gas closed component shown in Figure 26 and system, the first heat exchanger 2142, the second heat exchanger 2144 and the 3rd heat exchanger 2146 respectively with the first fan filter unit 2152, the second fan filter unit 2154 and three fan filter unit 2156 thermal communications of filtration system 2150.

In Figure 26, many arrows show and come and go flowing of each fan filter unit, and also show flowing in the pipe-line system 2170 that comprises the first pipe-line system pipe 2173 and second pipe system pipes 2174, as shown in the rough schematic view of Figure 26.The first pipe-line system pipe 2173 can and can be discharged by the first pipe outlet 2175 by the first entrance 2171 receiver gases.Similarly, second pipe system pipes 2174 can export 2176 discharges by second pipe entrance 2172 receiver gases and by second pipe.In addition, as shown in figure 26, pipe-line system 2170 is by restriceted envelope 2180 effectively and by the inert gas that again cycles through filtration system 2150 in inside separately, space 2180 is communicated with gas purge system 2130 fluids via gas purification egress line 2131.Provide roughly laminar flow this comprising for the circulatory system of each embodiment of the pipe-line system described in Figure 15-17, minimize turbulent flow, promote circulation, turnover and the filtration of the particulate matter of the gaseous environment in locking device inside, and provide by the circulation of the gas purge system of gas closed component outside.

Figure 27 is along the sectional view intercepting according to the length of the gas closed component of each embodiment of the gas closed component of this instruction and system 23000.Similar with the gas closed component 2200 of Figure 26, the gas closed component system 2300 of Figure 27 can comprise gas locking device 1500, and it can hold OLED print system 50 and gas purge system 2130 (also referring to Figure 25), heat regulating system 2140, filtration and the circulatory system 2150 and pipe-line system 2170.For each embodiment of gas closed component 2300, heat regulating system 2140 can comprise the fluid cooler 2141 being communicated with cooler outlet circuit 2143 and cooler entrance circuit 2145 fluids, can be communicated with multiple heat exchanger fluid, for example the first heat exchanger 2142 and the second heat exchanger 2144, as shown in figure 27.According to each embodiment of the gas closed component shown in Figure 27 and system, each heat exchanger, for example the first heat exchanger 2142 and the second heat exchanger 2144, can with circulation inert gas thermal communication, by locating near pipe outlet, the first pipe outlet 2175 of for example pipe-line system 2170 and second pipe outlet 2176.In this respect, for example, return so that the inert gas filtering can be by thermal conditioning before the first fan filter unit 2152, the second fan filter unit 2154 and the three fan filter unit 2156 of filtration system 2150 that cycles through respectively for example Figure 27 from entrance (the first entrance 2171 and the second pipe entrance 2172 of pipe-line system 2170).

Can find out from the arrow of direction of the inert gas that shows the locking device that cycles through Figure 26 and 27, the roughly laminar flow towards bottom is provided provide from locking device top downwards fan filter unit.For example, can be from Flanders Corporation, of Washington, North caroIina or Envirco Corporation of Sanford, the fan filter unit that North Carolina obtains can be used for being formed integral to according in each embodiment of the gas closed component of this instruction.Each embodiment of fan filter unit can exchange between about 350 cubic feet/point (CFM) the extremely about 700CFM by the inert gas of each unit.As shown in Figure 26 and 27, because fan filter unit arranges in parallel instead of series connection, thereby the amount of inert gas that can exchange in the system that comprises multiple fan filter units and the element number of use proportional.Near the bottom of locking device, gas flow guides towards multiple pipe-line system entrances, is schematically illustrated as the first entrance 2171 and second pipe entrance 2172 in Figure 26 and 27.As above for as described in Figure 15-17, entrance is positioned to the roughly bottom of locking device and makes gas flow downward and be beneficial to the good turnover of the gaseous environment in locking device from top fan filter unit, and promote thorough turnover and the movement of all gas environment of the gas purge system by being combined with locking device.Have enough to meet the need with thorough by the laminar flow that use is filtered and the circulatory system 2150 makes gaseous environment cycle through the gaseous environment in pipe-line system and promotion locking device, pipe-line system is separated the inert gas flow that cycles through gas purification loop 2130, the level of every kind of reactive materials (for example water and oxygen, and every kind of solvent) can remain on for example 100ppm or lower, for example 1.0ppm or lower, 0.1ppm or lower in each embodiment of gas closed component.

According to each embodiment of the gas closed component system for OLED print system, the quantity of fan filter unit can be selected according to the physical location of the substrate in print system during process.Therefore,, although 3 fan filter units have been shown in Figure 26 and 27, the quantity of fan filter unit can change.For example, Figure 28 is the sectional view intercepting along the length of gas closed component and system 2400, and the gas closed component shown in itself and Figure 23 and Figure 24 and system class are seemingly.Gas closed component and system 2400 can comprise gas closed component 1500, and it holds the OLED print system 50 being supported on base portion 52.During the OLED that the substrate suspending bench 54 of OLED print system is limited to substrate prints, substrate can move through the stroke of system 2400.Thereby the filtration system 2150 of gas closed component and system 2400 has the fan filter unit of suitable quantity; Shown in 2151-2155, corresponding by the physics stroke of OLED print system 50 with substrate during process.In addition, the fixed wheel exterior feature that the schematic cross sectional representation of Figure 28 has gone out each embodiment of gas locking device can reduce inert gas volume required during OLED print procedure effectively, and the inside of being convenient to approach gas locking device 1500 (remotely approaches during process simultaneously, for example use the gloves that are arranged in each gloves port, or directly approach by various detachable panels in the situation that of attended operation).

Each embodiment of gas locking device and system can use pressurized inert gas recirculating system, for operating various pneumatic operation devices and equipment.In addition, as mentioned before, the embodiment of the gas closed component of this instruction can remain on slight positive pressure with respect to external environment condition, such as but not limited between the extremely about 8mbarg of about 2mbarg.In gas closed component system, keep pressurized inert gas recirculating system may have challenge, because it has the dynamic balance play with continue carry out relevant with the slight positive internal pressure that keeps gas closed component and system, and introduces continuously gas-pressurized in gas closed component and system simultaneously.In addition, the variable demand of each device and equipment may form the various gas closed components of this instruction and the irregular pressure curve of system.Under this condition, keep dynamic pressure balance can be provided for continuing the globality of the OLED print procedure carrying out the gas closed component that remains on slight positive pressure with respect to external environment condition.

As shown in figure 29, each embodiment of gas closed component and system 3000 can have extraneous gas loop 2500, for integrating and control inert gas source 2509 and clean dry air (CDA) source 2512 for the various aspects of the operation of gas closed component and system 3000.It will be appreciated by the skilled addressee that gas closed system 3000 can also comprise that internal particle filters and each embodiment of gas-circulating system and each embodiment of extraneous gas cleaning system, as mentioned before.Except the external circuit 2500 for integrating and control inert gas source 2509 and CDA source 2512, gas closed component and system 3000 can have compressor loop 2160, it can supplying inert gas, for operating each device and the equipment that may be arranged on gas closed component and system 3000 inside.

The compressor loop 2160 of Figure 29 can comprise the compressor 2162, the first reservoir 2164 and the second reservoir 2168 that are configured to fluid connection.Compressor 2162 can be configured to the inert gas aspirating from gas closed component 1500 to be compressed to desired pressure.The entrance side of compressor loop 2160 can be communicated with gas closed component 1500 fluids by the circuit 2503 with valve 2505 and check-valves 2507 via gas closed component outlet 2501.Compressor loop 2160 can be communicated with gas closed component 1500 fluids via extraneous gas loop 2500 on the outlet side of compressor loop 2160.Reservoir 2164 can be arranged between compressor 2162 and compressor loop 2160 and the joint portion in extraneous gas loop 2500, and can be configured to produce 5psig or higher pressure.The second reservoir 2168 can be in compressor loop 2160, for damping because compressor piston is with about 60Hz fluctuation causing that circulates.For each embodiment of compressor loop 2160, the first reservoir 2164 can have the capacity between about 80 gallons to about 160 gallons, and the second reservoir can have the capacity between about 30 gallons to about 60 gallons.According to each embodiment of gas closed component and system 3000, compressor 2162 can be zero to enter compressor (zero ingress compressor).Various types of zero enter compressor can in the case of do not have environmental gas leak into the gas closed component of this instruction and each embodiment of system in operate.Zero each embodiment that enters compressor can move continuously, for example, during utilization needs the OLED print procedure of each device of compressed inert and the purposes of equipment.

Reservoir 2164 can be configured to receive and gather compressed inert from compressor 2162.Reservoir 2164 can be supplied to compressed inert gas closed component 1500 when needed.For example, reservoir 2164 can provide gas to keep the pressure of all parts of gas closed component 1500, such as but not limited to as lower one or more: pneumatic robot, substrate suspending bench, air bearing, air lining, Compressed Gas instrument, pneumatic actuator and combination thereof.If Figure 29 is for as shown in gas closed component and system 3000, gas closed component 1500 can have the OLED print system 50 being encapsulated in wherein.As shown in figure 24, OLED print system 50 can be supported by granite level 52, and can comprise substrate suspending bench 54, for by substrate feed to printhead chamber correct position and during OLED print procedure support base.In addition the air bearing 58 being supported on bridge 56, can replace for example linear mechanical bearing use.For the gas locking device of this instruction and each embodiment of system, use various pneumatic operation devices and equipment can provide low particle to generate performance and low maintenance cost.Compressor loop 2160 can be configured to pressurized inert gas to be supplied to continuously each device and the equipment of gas provision for sealing 3000.Except supplied with pressurized inert gas, the substrate suspending bench 54 (it uses air bearing technology) of OLED print system 50 is also used vacuum system 2550, and vacuum system 2550 is communicated with gas closed component 1500 by circuit 2552 in the time that valve 2554 is in an open position.

Can there is the pressure control bypass circulation 2165 for compressor loop 2160 as shown in figure 29 according to the pressurized inert gas recirculating system of this instruction, it is in order to compensate during use the variable demand of gas-pressurized, thereby the dynamic equilibrium of the gas closed component of this instruction and each embodiment of system is provided.For according to each embodiment of the gas closed component of this instruction and system, bypass circulation can keep the constant pressure in reservoir 2164, and does not disturb or change the pressure in locking device 1500.Bypass circulation 2165 can have the first bypass inlet valve 2162 on the entrance side that is positioned at bypass circulation 2165, and it is closed, unless used bypass circulation 2165.Bypass circulation 2165 can also have back pressure regulator, and it can use in the time that second valve 2163 is closed.Bypass circulation 2165 can have second reservoir 2168 at the outlet side place that is arranged on bypass circulation 2165.For using zero embodiment that enters the compressor loop 2160 of compressor, bypass circulation 2165 can compensate gas closed component and between the system operating period along with the time is through the little skew of contingent pressure.In the time that bypass inlet valve 2161 is in an open position, bypass circulation 2165 can be communicated with compressor loop 2160 fluids on the entrance side of bypass circulation 2165.In the time that bypass inlet valve 2161 is opened, can not meet the needs in gas closed component 1500 inside if come from the inert gas of compressor loop 2160, the inert gas of shunting by bypass circulation 2165 so can be recycled to compressor.In the time that the inert gas pressure in reservoir 2164 exceedes predetermined threshold value pressure, compressor loop 2160 is configured to inert gas shunting by bypass circulation 2165.The predetermined threshold value pressure of reservoir 2164 can be approximately between the extremely about 200psig of 25psig in the time of the flow rate of at least about 1 cubic feet/point (cfm), or can be approximately between the extremely about 150psig of 50psig in the time of the flow rate of at least about 1 cubic feet/point (cfm), or can be at about 75psig to approximately between 125psig in the time of the flow rate of at least about 1 cubic feet/point (cfm), or can be at about 90psig to approximately between 95psig in the time of the flow rate of at least about 1 cubic feet/point (cfm).

Each embodiment of compressor loop 2160 can use the various compressors that enter compressor except zero, and for example variable speed compressor maybe can be controlled in the compressor of the state of opening or closing.As mentioned before, zero enter compressor and guarantee not have environment reaction material can introduce gas closed component and system.Thereby, prevent that any compressor configuration of environment reaction material introducing gas closed component and system may be used to compressor loop 2160.According to each embodiment, the compressor 2162 of gas closed component and system 3000 can be contained in such as but not limited in gas-tight seal housing.Enclosure interior can be configured to be communicated with inert gas source fluid, for example, form the identical inert gas of the inert gas environment of gas closed component 1500.For each embodiment of compressor loop 2160, compressor 2162 can be controlled at constant speed to keep constant pressure.Not using zero to enter in other embodiment of compressor loop 2160 of compressor, compressor 2162 can cut out and open in the time reaching minimum threshold pressure in the time reaching max-thresholds pressure.

At the Figure 30 for gas closed component and system 3100, the substrate suspending bench 54 that air blast loop 2170 and blower vacuum loop 2550 show for operating OLED print system 50, it is contained in gas closed component 1500.As above, for as described in compressor loop 2160, air blast loop 2170 can be configured to pressurized inert gas to be supplied to continuously substrate suspending bench 54.

Can use the gas closed component of pressurized inert gas recirculating system and each embodiment of system can there is the various loops that use various pressurized-gas sources, for example, in compressor, air blast and combination thereof at least one.At the Figure 30 for gas closed component and system 3100, compressor loop 2160 can be communicated with extraneous gas loop 2500 fluids, and it can be for the inert gas that is applied to high flow rate manifold 2525 and low consumption manifold 2513.For according to each embodiment of the gas closed component of this instruction and system, as shown in the Figure 29 for gas closed component and system 3000, high flow rate manifold 2525 can be for inert gas being supplied to various devices and equipment, such as but not limited to as lower one or more: substrate suspending bench, pneumatic robot, air bearing, air lining and Compressed Gas instrument and combination thereof.For according to each embodiment of the gas closed component of this instruction and system, low consumption manifold 2513 can be for inert gas being supplied to various devices and equipment, such as but not limited to as lower one or more: isolator and pneumatic actuator and combination thereof.

For each embodiment of gas closed component and system 3100, air blast loop 2170 can be for pressurized inert gas being supplied to each embodiment of substrate suspending bench 54, and the compressor loop 2160 being communicated with extraneous gas loop 2500 fluids can for pressurized inert gas is supplied to such as but not limited to as lower one or more: pneumatic robot, air bearing, air lining and Compressed Gas instrument and combination thereof.Except supplied with pressurized inert gas, use the substrate suspending bench 54 of the OLED print system 50 of air bearing technology also to use blower vacuum system 2550, blower vacuum system 2550 is communicated with gas closed component 1500 by circuit 2552 in the time that valve 2554 is in an open position.The housing 2172 in air blast loop 2170 can be supplied to inert gas pressurized source the first air blast 2174 of substrate suspending bench 54 and remain in inert gas environment as the second air blast 2550 of the vacuum source of substrate suspending bench 54.The attribute that can manufacture the pressurized inert gas of each embodiment that is suitable as substrate suspending bench or the air blast of vacuum source comprise such as but not limited to: they have high reliability, make them have low maintenance cost; There is variable speed control; And the volume flow with wide region (can provide at about 100m ³/ h is to about 2500m ³each embodiment of volume flow between/h).Each embodiment in air blast loop 2170 can also have at first isolating valve 2173 at the arrival end place of compressor loop 2170 and at check-valves 2175 and second isolating valve 2177 at the port of export place of compressor loop 2170.Each embodiment in air blast loop 2170 can have adjustable valve 2176 (can be such as but not limited to sluice valve, butterfly valve, needle valve or globe valve) and for remaining on the heat exchanger 2178 of limiting temperature from blower assembly 2170 to the inert gas of substrate suspension system 54.

Figure 30 shows also extraneous gas loop 2500 shown in Figure 29, for integrating and control inert gas source 2509 and clean dry air (CDA) source 2512 for the various aspects of the operation of the gas closed component of Figure 29 and the gas closed component of system 3000 and Figure 30 and system 3100.The extraneous gas loop 2500 of Figure 29 and Figure 30 can comprise at least four mechanical valve.These valves comprise the first mechanical valve 2502, the second mechanical valve 2504, the 3rd mechanical valve 2506 and the 4th mechanical valve 2508.These each valves are arranged in the position of each flow circuits, allow control inert gas (for example, nitrogen, any rare gas and any combination thereof) and air-source (for example, clean dry air (CDA)) both.Housing inert gas circuit 2510 extends from housing inert gas source 2509.Housing inert gas circuit 2510 continues to extend linearly as low consumption manifold line 2152, and low consumption manifold line 2152 is communicated with low consumption manifold 2513 fluids.Cross link First section 2514 is extended from the first mobile joint portion 2516, and the first mobile joint portion 2516 is positioned at the cross part place of housing inert gas circuit 2510, low consumption manifold line 2152 and cross link First section 2514.Cross link First section 2514 extends to the second mobile joint portion 2518.Compressor inert gas circuit 2520 from the reservoir 2164 of compressor loop 2160 extend and end at second flow joint portion 2518.CDA circuit 2522 extends from CDA source 2512 and continues as high flow rate manifold line 2524, and high flow rate manifold line 2524 is communicated with high flow rate manifold 2525 fluids.The 3rd flow combinations portion 2526 is positioned at the cross part place of second section 2528 of cross link, clean dry air circuit 2522 and high flow rate manifold line 2524.Second section 2528 of cross link extends to the 3rd flow combinations portion 2526 from the second mobile joint portion 2518.

About description and the reference table 2 in extraneous gas loop 2500, be below the general introduction of some each operator schemes, table 2 is forms of the valve position of each operator scheme of gas closed component and system.

The form of table 2 shows procedure schema, and wherein, valve state produces only inert gas compressor operator scheme.In procedure schema, as shown in figure 30 and as shown in the valve state of table 2, the first mechanical valve 2502 and the 3rd mechanical valve 2506 are in closing configuration.The second mechanical valve 2504 and the 4th mechanical valve 2508 are in opening configuration.Due to these concrete valves configurations, compressed inert be allowed to flow to low consumption manifold 2513 and high flow rate manifold 2525 both.Under normal operation, the clean dry air that comes from the inert gas of housing inert gas source and come from CDA source is prevented from flowing to any in low consumption manifold 2513 and high flow rate manifold 2525.

As shown in table 2 and with reference to Figure 30, there is the series of valves state for safeguarding and recovering.The gas closed component of this instruction can safeguard every now and then, in addition need to be from system failure recovery.In this concrete pattern, the second mechanical valve 2504 and the 4th mechanical valve 2508 are in closing configuration.The first mechanical valve 2502 and the 3rd mechanical valve 2506 are in opening configuration.Housing inert gas source and CDA source provide inert gas, to be supplied in low consumption by low consumption manifold 2513 and also to have those parts that are during restoration difficult to the dead volume effectively purging.The example of this parts comprises pneumatic actuator.Comparatively speaking, those parts of consumption can be supplied CDA by means of high flow rate manifold 2525 during

safeguarding.Use valve

2504,2508,2530 isolation compressors to prevent that reactive materials (for example, oxygen and water vapour) from polluting the inert gas in compressor and reservoir.

After safeguarding or having recovered, gas closed component must be by multiple cycle purge, for example, until reactive environments material (, oxygen G&W) reach the enough low-level of every kind of material, for example 100ppm or lower, for example 10ppm or lower, 1.0ppm or lower or 0.1ppm or lower.As shown in table 2 and with reference to Figure 30, during purge mode, the 3rd mechanical valve 2506 close and the 5th mechanical valve 2530 also in closing configuration.The first mechanical valve 2502, the second mechanical valve 2504 and the 4th mechanical valve 2508 are in opening configuration.Due to this concrete valve configuration, only housing inert gas be allowed to flow and be allowed to flow to low consumption manifold 2513 and high flow rate manifold 2525 both.

As shown in table 2 and with reference to Figure 30, " without flowing " pattern and leak-testing pattern are the patterns using as required." without flowing " pattern is the pattern with following valve state configuration: the first mechanical valve 2502, the second mechanical valve 2504, the 3rd mechanical valve 2506 and the 4th mechanical valve 2508 are all in closing configuration.This closes " without flowing " pattern that configuration causes system, and wherein, any gas coming from inert gas, CDA or compressor source all can not arrive low consumption manifold 2513 or high flow rate manifold 2525.This " without flow pattern " may be useful in the time that system is not used, and can within the prolongation period, keep idle.Leak-testing pattern can be for detection of the leakage in system.Leak-testing pattern is used compressed inert exclusively, and it is isolated system for example, so that the low consumption parts to low consumption manifold 2513 (, isolator and pneumatic actuator) carry out leak test from the high flow rate manifold 2525 of Figure 30.In this leak-testing pattern, the first mechanical valve 2502, the 3rd mechanical valve 2506 and the 4th mechanical valve 2508 are all in closing configuration.Only the second mechanical valve 2504 is in opening configuration.Therefore, compressed nitrogen can flow to low consumption manifold 2513 from compressor inert gas source 2519, and there is no the gas flow to high flow rate manifold 2525.

Table 2

All publications, patent and the patent application of mentioning in this description all indicate specially and independently by reference to identical degree introducing as each independent publication, patent and patent application on by reference to being incorporated herein.

Although show herein and described embodiment of the present disclosure, those skilled in the art are by clear, this embodiment only provides by way of example.Do not departing from situation of the present disclosure, those skilled in the art will expect now many modification, variation and substitute.Should be understood that, in the time putting into practice the disclosure, can adopt the various replacement schemes of disclosure embodiment as herein described.Attached claim is intended to limit the scope of the present disclosure, and is encompassed in thus the method and structure within the scope of these claims and equivalent thereof.

Claims

1. a gas closed system, comprising:

2. gas closed system according to claim 1, also comprises:

Pressure control bypass circulation, wherein, bypass circulation entrance is communicated with compressor loop path fluid via bypass inlet valve, and the position that bypass exports between bypass inlet valve and compressor is communicated with compressor loop path fluid.

3. according to claim 1 or gas closed system claimed in claim 2, also comprise:

Air blast loop, described air blast loop comprises and the entrance of described internal fluid communication, and the outlet of described internal fluid communication, comprise the loop path of described entrance and exit, be arranged on the adjustable valve between air blast and outlet along described loop path.

4. gas closed system according to claim 3, wherein, the pressure that described compressor loop is configured to the inert gas environment in reservoir recycles pressurized inert gas via pressure control bypass while exceeding predetermined threshold value pressure.

5. gas closed system according to claim 4, wherein, the pressure that described compressor loop is configured to the inert gas environment in reservoir recycles pressurized inert gas via pressure control bypass while exceeding the predetermined threshold value pressure between 25psig to 200psig.

6. gas closed system according to claim 3, also comprise the equipment being arranged in described inside, described equipment is by using the pressurized inert gas being produced by pressurized inert gas recirculating system to operate, wherein, described equipment can be with lower one or more: pneumatic robot, substrate suspending bench, air bearing, air lining, Compressed Gas instrument, pneumatic actuator and combination thereof.

7. gas closed system according to claim 3, wherein, the seal forming for the framing component assembly of each sealably combination is gasket seal.

8. gas closed system according to claim 7, wherein, is made up of closed air chamber polymer pad sheet material for the pad of the framing component assembly that seals each sealably combination.

9. gas closed system according to claim 3, wherein, each framing component assembly comprises the framing component with multiple panel part sections, wherein, each panel part section has the panel being sealably arranged in each panel part section.

10. gas closed system according to claim 9, wherein, the seal forming for the each panel being sealably arranged in each panel part section of framing component comprises gasket seal.

11. gas closed systems according to claim 10, wherein, are made up of closed air chamber polymer pad sheet material for the pad of each panel of each panel part section of seal frame member.

12. gas closed systems according to claim 3, wherein, gas locking device is hermetically sealed.

13. 1 kinds of gas closed systems, comprising:

14. gas closed systems according to claim 13, also comprise:

15. gas closed systems according to claim 14, also comprise the equipment being arranged in described inside, described equipment is by using the pressurized inert gas being produced by pressurized inert gas recirculating system to operate, wherein, described equipment can be with lower one or more: pneumatic robot, substrate suspending bench, air bearing, air lining, Compressed Gas instrument, pneumatic actuator and combination thereof.