CN106274054A

CN106274054A - Gas confinement system

Info

Publication number: CN106274054A
Application number: CN201610692510.9A
Authority: CN
Inventors: J.莫克; A.S-K.柯; E.弗伦斯基; S.奥尔德森
Original assignee: Kateeva Inc
Current assignee: Kedihua display technology (Shaoxing) Co., Ltd
Priority date: 2011-12-22
Filing date: 2012-12-24
Publication date: 2017-01-04
Anticipated expiration: 2032-12-24
Also published as: CN103171286B; CN107029931A; CN103171286A; CN107029931B; CN106274054B; CN203666124U

Abstract

This teaching relates to each embodiment of gas-tight seal gas confinement assembly and system, described gas confinement assembly and system can easily carry and assemble, and are arranged to keep minimum noble gas volume and farthest close to each device wherein encapsulated and equipment.The gas-tight seal gas confinement assembly of this teaching and each embodiment of system can make gas confinement assembly by minimize gas confinement assembly internal capacity and simultaneously Optimization Work space to build in the way of accommodating the various floor spaces of various OLED print systems.Each embodiment of the gas confinement assembly so built also is prone to the inside of gas confinement assembly accessible from the outside and easily accessible inside to safeguard during process, minimizes downtime simultaneously.

Description

Gas confinement system

Cross-Reference to Related Applications

This application claims the priority of the U. S. application No. 61/579,233 submitted to for 22nd in December in 2011.This application requirement In the U. S. application No. 12/652,040 that January 5 submitted to and announced as US 2010/0201749 on August 12nd, 2010 Priority, its require again on June 13rd, 2008 submit to and within 18th, announce as US 2008/0311307 in December in 2008 The priority of U. S. application No. 12/139,391, and also require in the U. S. application No. 61/ that on January 5th, 2009 submits to The priority of 142,575.Applying for reference to introducing in full of all cross references enumerated herein.

Technical field

This teaching relates to each embodiment of gas-tight seal gas confinement assembly and system, described gas confinement assembly and be System can easily carry and assemble, and is arranged to keep minimum noble gas volume and farthest close to wherein encapsulating Each device and equipment.

Background technology

To the interest of the potential of OLED Display Technique by OLED Display Technique attribute drive, including the display floater tool represented There is highly saturated color, be high-contrast, respond and energy efficient ultra-thin, quick.Additionally, various substrate materials Material, including flexible polymeric material, may be used for the manufacture of OLED Display Technique.Although applying (mainly honeycomb for the small screen Phone) the representing for emphasizing the potential of this technology of display, but when this manufacture being zoomed to larger amplitude face still So there is challenge.Such as, the substrate bigger than Gen 5.5 substrate (there is the size of about 130 cm × 150 cm) is made Make OLED display still to need to be proved.

Organic Light Emitting Diode (OLED) device can print various organic by using OLED print system in substrate Thin film and other material manufacture.This organic material is susceptible to the infringement of oxidation and other chemical process.With energy Enough scalings for various size of foundation base and can inertia, there is no granule printing environment in the mode that carries out accommodate OLED print system is likely to be of multiple challenge.Because the facility printed for printing large format panel substrate needs substantial amounts of sky Between, thus big facility is maintained at and needs gas purification to remove reactive environments material (such as, water vapour and oxygen continuously Gas) and the inert environments of organic vapor under there is significant engineering challenge.Such as, it is provided that the big facility being hermetically sealed It is likely to be of engineering challenge.Additionally, feeding turnover OLED print system is to operate various cables, line and the pipeline of print system It is likely to be of challenge, in order to gas lock is effectively achieved about environment composition (such as, oxygen and water vapour) The specification of level, because they may produce the notable dead volume that can retain this reactive materials.Additionally, it is desirable to be maintained at This facility in the inert environments of process is easily accessible, in order to safeguard with minimum downtime.Except substantially not having Outside responding property material, the printing environment of OLED device needs the lowest particle environments.In this respect, in completely enclosed system Thering is provided in system and keep the environment that there is no granule to have can be (such as at open air, high flow capacity in atmospheric condition Under laminar flow filter mantle) granule that carries out reduces the unexistent additional challenges of process.

Accordingly, it would be desirable to multiple embodiments of gas lock, described gas lock can be in inertia, substantially do not have There is receiving OLED print system in the environment of granule, and can be readily scalable to manufacture on various size of foundation base and base material Oled panel, is also easy to OLED print system accessible from the outside and easily accessible inside during process simultaneously, in order to by minimum Downtime safeguard.

Accompanying drawing explanation

By with reference to accompanying drawing, obtaining being best understood from of the feature and advantage of the disclosure, accompanying drawing is intended to explanation rather than limit Make this teaching.

Fig. 1 is the gas confinement assembly according to this each embodiment instructed and the schematic diagram of system.

Fig. 2 is the left front axonometric chart of the gas confinement assembly according to this each embodiment instructed and system.

Fig. 3 is the front right perspective view of the gas confinement assembly according to this each embodiment instructed.

Fig. 4 is the exploded view of the gas confinement assembly according to this each embodiment instructed.

Fig. 5 is the exploded front axonometric chart of the framing component assembly according to this each embodiment instructed, it is illustrated that each Panel frame section and section panel.

Fig. 6 A is the perspective rear view of glove ported shroud (gloveport cap), and Fig. 6 B is the gas instructed according to this The enlarged drawing of the shoulder screw of the glove ported shroud of each embodiment of body closed component.

Fig. 7 A is the amplification stereogram of the snap lock latch (bayonet latch) of glove ported shroud assembly, and Fig. 7 B is The sectional view of glove ported shroud assembly, it is shown that the head of shoulder screw engages with the recess in snap lock latch.

Fig. 8 A-8C is the schematic plan of each embodiment of the gasket seal for forming joint.

Fig. 9 A and Fig. 9 B is the sealing of the framing component illustrating each embodiment according to this gas confinement assembly instructed Each axonometric chart.

Figure 10 A-10B is can easily tearing open for reception of each embodiment with the gas confinement assembly instructed according to this Unload maintenance window section panel seal relevant each figure.

Figure 11 A-11B be with each embodiment instructed according to this for receiving insertion panel or the portion of window panel Section panel seal relevant amplification perspective, cut-away view.

Figure 12 A is the base portion according to this each embodiment instructed, described base portion include dish and rest upon thereon multiple Cushion block.Figure 12 B is the amplification stereogram of the cushion block shown in Figure 12 A.

Figure 13 is the wall framing component relevant with dish according to this each embodiment instructed and the exploded view of top plate member.

Figure 14 A is the axonometric chart building the stage of the gas confinement assembly according to this each embodiment instructed, and wherein, carries Rise device assembly and be in raised position.Figure 14 B is the exploded view of the lifter assembly shown in Figure 14 A.

Figure 15 is the imaginary front perspective view of the gas confinement assembly according to this each embodiment instructed, it is shown that install Tubing in gas confinement component internal.

Figure 16 is the imaginary top perspective view of the gas confinement assembly according to this each embodiment instructed, it is shown that install Tubing in gas confinement component internal.

Figure 17 is the imaginary face upwarding stereogram of the gas confinement assembly according to this each embodiment instructed, it is shown that install Tubing in gas confinement component internal.

Figure 18 A shows the schematic diagram of multi beam cable, line and pipeline etc..Figure 18 B show gas inswept be fed logical Cross this bundle of each embodiment according to this tubing instructed.

Figure 19 is schematic diagram, it is shown that be trapped in the reactive materials (A) in the dead band of multi beam cable, circuit and pipeline etc. How from the noble gas (B) of inswept pipeline actively purging, described wiring in bundles passes through described pipeline.

Figure 20 A is the cable being routed through pipeline of each embodiment of gas confinement assembly and the system instructed according to this Imaginary axonometric chart with pipeline.Figure 20 B is opening shown in Figure 20 A of each embodiment according to this gas confinement assembly instructed The enlarged drawing of mouth, it is shown that the details of the lid for being enclosed on opening.

Figure 21 is the top board of the illuminator including gas confinement assembly and system according to this each embodiment instructed View.

Figure 22 is curve chart, it is illustrated that according to gas confinement assembly and the photograph of system unit of this each embodiment instructed The LED light spectrum of bright system.

Figure 23 is the front perspective view of the view of the gas confinement assembly according to this each embodiment instructed.

Figure 24 illustrates the gas confinement assembly shown in the Figure 23 according to this each embodiment instructed and relevant Account Dept The exploded view of each embodiment of part.

Figure 25 is the schematic diagram of each embodiment of the gas confinement assembly of this teaching and relevant system unit.

Figure 26 is the gas confinement assembly according to this each embodiment instructed and the schematic diagram of system, it is illustrated that by gas The embodiment of the gas circulation of body closed component.

Figure 27 is the gas confinement assembly according to this each embodiment instructed and the schematic diagram of system, it is illustrated that by gas The embodiment of the gas circulation of body closed component.

Figure 28 is the schematic cross-section of the gas confinement assembly according to this each embodiment instructed.

Figure 29 is the gas confinement assembly according to this each embodiment instructed and the schematic diagram of system.

Figure 30 is the gas confinement assembly according to this each embodiment instructed and the schematic diagram of system.

Detailed description of the invention

This teaching discloses each embodiment of gas confinement assembly, and described gas confinement assembly can sealably build Inertia can be kept with being formed integrally with gas circulation, filtration and purifying part with formation, there is no the gas of particle environments Body closed component and system, for needing the process of this environment.This embodiment of gas confinement assembly and system can be by Various reactive materials (including various reactive ambient gas, such as water vapour and oxygen, and organic vapor) every The level of kind of material is maintained at such as 100 ppm or lower, 10 ppm or lower, 1.0 ppm or lower or 0.1 ppm or more Low.Additionally, each embodiment of gas confinement assembly can provide 3 grades and 4 grades clean room standards low meeting ISO 14644 Particle environments.

The those of ordinary skill of every field is it is contemplated that the embodiment of gas confinement assembly is in the practicality of each technical field Property.Although this teaching can be benefited from the most different fields (such as, chemistry, biotechnology, new and high technology and pharmaceutical field), but It it is the OLED practicality that is printed for illustrating each embodiment of the gas confinement assembly instructed according to this and system.Can accommodate Each embodiment of the gas confinement component system of OLED print system can provide such as but not limited to following feature: seals warp Cross multiple structure and destructing circulation provide the locking device of gas-tight seal, minimize enclosed volume, and during process and Inside accessible from the outside it is prone to during maintenance.As discussed subsequently, this feature of each embodiment of gas confinement assembly can There is the impact on function, such as but not limited to, structural integrity makes to be prone to keep the low of reactive materials during process Level, and fast packing volume turnover minimize the downtime during maintenance cycle.Thus, it is provided that oled panel prints Each feature of practicality and explanation provide benefit can also to various technical fields.

As it was noted above, such as, at the base bigger than Gen 5.5 substrate (there is the size of about 130 cm × 150 cm) Manufacture OLED display still to need to be proved at the end.For by the flat faced display printing manufacture outside OLED, mother glass In the generation of size of foundation base, has stood to develop since about 20 nineties in century are in early days.The first generation of mother glass substrate (is expressed as Gen 1) it is about 30 cm × 40 cm, thus 15 ' can be produced ' panel.About 20 the mid-90s in century, produce flat faced display Prior art have developed into the mother glass size of foundation base of Gen 3.5, there is the size of about 60 cm × 72 cm.

Along with the propelling in each generation, the mother glass size for Gen 7.5 and Gen 8.5 produces beating outside OLED Print manufacture process.Gen 7.5 mother glass has the size of about 195 cm × 225 cm, and each substrate can cut into eight Individual 42 ' ' or six 47 ' ' flat board.The mother glass used in Gen 8.5 is about 220 × 250 cm, and each substrate is permissible Cut into six 55 ' ' or eight 46 ' ' flat board.OLED flat faced display is to quality (such as, purer color, higher contrast Degree, thin, flexible, transparency and energy efficiency) promise have been carried out, meanwhile, OLED manufactures and is limited to Gen 3.5 He in practice Less.Currently, OLED prints the optimal manufacturing technology being considered as to break through this restriction, and allows oled panel manufacture to be applied not only to Gen 3.5 and less mother glass size, and for maximum sample glass size, such as, Gen 5.5, Gen 7.5 and Gen 8.5.It will be appreciated by the skilled addressee that the feature that oled panel prints includes using various substrate material Material, such as but not limited to, various glass substrate material and various polymeric base material.In this respect, come from use based on The size that the term of the substrate of glass is recorded can apply to be applicable to the substrate of any material that OLED prints.

Print about OLED, according to this teaching, it has been found that keep notable low-level reactive materials (such as but not limit In, the various organic vapors used in environment composition, such as oxygen and water vapour, and OLED ink) meeting with offer must The OLED flat faced display wanting lifetime specification is relevant.Lifetime specification for oled panel technology particular importance because this with display The device product time limit is directly related；The product specification of all panel technology is difficult to meet currently for oled panel technology.By means of Each embodiment of the gas confinement component system of this teaching, in order to provide the panel meeting necessary lifetime specification, every kind of reaction The level of property material (such as, water vapour, oxygen and organic vapor) may remain in such as 100 ppm or lower, 10 Ppm or lower, 1.0 ppm or lower or 0.1 ppm or lower.Additionally, OLED prints needs there is no the ring of granule Border.For OLED prints, keep the environment particular importance that there is no granule, even if because the least granule also may be used The visible defects on oled panel can be caused.Currently, needed for OLED display meets commercialization, low defect level has challenge. Keeping there is no that particle environments has in completely enclosed system can be (such as at open air, height in atmospheric condition Under flow laminar flow filter mantle) granule that carries out reduces the unexistent additional challenges of process.Thus, in big facility, keep lazy Property, necessary specification without particle environments are likely to be of various challenge.

Level at every kind of reactive materials (such as, water vapour, oxygen and organic vapor) may remain in example As the facility of 100 ppm or lower, 10 ppm or lower, 1.0 ppm or lower or 0.1 ppm or lower prints OLED face The explanation during information that the needs of plate can be summarized in checking table 1.On table 1, the data of general introduction come from for red, green and blue In color every kind is carried out with each test sample of big pixel, the organic film composition of spin coating device breadth manufacture including Test.This test sample is significantly more susceptible to manufacture and test, for the rapid evaluation purpose of various preparations and process.Though So test sample test should not obscured with the life test printing panel, but it can represent that various preparation and process are to the life-span Impact.Result shown in following table represents the change of the process steps that test sample manufactures, wherein, with similarly (but In air rather than in nitrogen environment) test sample that manufactures compares, and only spin coating environment is at nitrogen environment (its In, reactive materials is less than 1 ppm) the middle test sample change manufactured.

By check in table 1 for the data of test sample that manufacture under various process environment it will be apparent that especially In the case of red and blueness, efficiently reduce organic film composition be exposed in the environment of reactive materials printing can On the stability of various EL with thus the life-span is had appreciable impact.

Table 1: the noble gas process impact on the oled panel life-span.

Thus, providing when being printed and zoom to Gen 8.5 and more Datong District from Gen 3.5 by OLED can in inertia substantially There is no the gas confinement environment of granule accommodates the firm closed system aspect challenge of OLED print system.It is contemplated that It is that, according to this teaching, this gas lock includes, but not limited to, e.g. following attribute by having: gas lock can With easily scalable to provide the Optimization Work space for OLED print system, provide minimum noble gas volume simultaneously, and Being also easy to OLED print system accessible from the outside during process, the most easily accessible inside is to tie up with minimum downtime Protect.

Each embodiment instructed according to this, it is provided that a kind of for needing the gas of the various air-sensitive processes of inert environments Body closed component, may be configured to multiple wall frameworks and the top board framing component being sealed.In certain embodiments, many Individual wall framework and top board framing component can use reusable securing member to tighten together, such as bolt and screwed hole. Each embodiment of gas confinement assembly for instructing according to this, multiple framing components can be built into restriction gas confinement frame Frame assembly, each framing component includes multiple panel frame section.

The gas confinement assembly of this teaching can be to be designed to hold in the way of can minimizing the enclosed volume around system Receive system, such as OLED print system.Each embodiment of gas confinement assembly can be to minimize in gas confinement assembly Portion's volume and simultaneously Optimization Work space are to accommodate various floor spaces (footprint, or foot of various OLED print systems Mark) mode build.Each embodiment of the gas confinement assembly so built also is prone to gas accessible from the outside during process The inside of body closed component and easily accessible inside, to safeguard, minimize downtime simultaneously.In this respect, according to this teaching Each embodiment of gas confinement assembly can be wide about the various floor space fixed wheels of various OLED print systems.According to respectively Individual embodiment, once fixed wheel exterior feature framing component is constructed to form gas confinement frame assembly, and various types of panels are the most permissible It is sealably mounted in the multiple panel sections including framing component, to complete the installation of gas confinement assembly.Seal at gas Close in each embodiment of assembly, multiple framing components can be manufactured in a position or multiple position and (include such as but do not limit In, multiple wall framing components and at least one top board framing component) and it is used for multiple be arranged in panel frame section Plate, and then build in another position.Additionally, give carrying of the parts of the gas confinement assembly for building this teaching Character, each embodiment of gas confinement assembly repeatedly can mount and dismount through multiple structures and destructing circulation.

Being hermetically sealed in order to ensure gas lock, each embodiment of the gas confinement assembly of this teaching provides to be used In combining each framing component to provide frame seal.(pad is included by the close fit cross part between each framing component Sheet or other sealing member), inside can be adequately sealed, such as gas-tight seal.Build the most completely, the gas confinement group of sealing Part can include internal and multiple inner corners edge, and at least one inner corners edge is arranged on each framing component and adjacent frame At the cross part of component.One or more in framing component, such as at least half in framing component, can include along one One or more sealant compressible shims that individual or multiple respective edges are fixed.The one or more sealant compressible shim can be configured to Combine once multiple framing components and the panel of airtight body be installed with regard to generation gas-tight seal gas confinement assembly.Seal Gas confinement assembly can be formed such that the corner edge of framing component is sealed by multiple sealant compressible shims.For each framework Component, such as but not limited to interior wall framework surface, roof framework surface, upright side walls framework surface, diapire framework surface and A combination thereof, can be provided with one or more sealant compressible shim.

For each embodiment of gas confinement assembly, each framing component can include multiple section, the plurality of portion Section is designed and manufactured to receive any one in the various panel type can being sealably mounted in each section, to carry Panel sealing for the airtight body for each panel.In each embodiment of this gas confinement assembly instructed, each Section framework can have section framework pad, and described section framework pad guarantees to be arranged on each portion by means of selected securing member Each panel in segment frames can provide for each panel with thus for building the airtight of gas lock completely The sealing of body.In various embodiments, gas confinement assembly can have window panel or maintenance control panel in each Wall board In one or more；Wherein, each window panel or maintenance control panel can have at least one glove port.At gas confinement During assembling components, each glove port can have attached glove, thus glove extend in inside.According to each Embodiment, each glove port can have the hardware for installing glove, and wherein, this hardware is around each glove port Using gasket seal, it provides the sealing of airtight body to minimize the leakage by glove port or molecule diffusion.For this Each embodiment of the gas confinement assembly of teaching, described hardware is also designed to be prone to cover cap and open the glove end of terminal use Mouthful.

The gas confinement assembly instructed according to this and each embodiment of system can include from multiple framing component dough-making powder Gas confinement assembly and gas that plate section is formed circulate, filter and purifying part.For gas confinement assembly and system Each embodiment, tubing can be installed during assembling process.Each embodiment instructed according to this, tubing is permissible It is arranged in the gas confinement frame assembly that multiple framing components build.In various embodiments, tubing can be many Individual framing component combines and was arranged on multiple framing component before forming gas confinement frame assembly.Gas confinement assembly and be The tubing of each embodiment of system can be configured so that and is drawn into tubing from one or more tubing entrances In essentially all gas be moved through each embodiment in gas filtration loop, be used for removing gas confinement assembly and system Internal particulate matter.Additionally, the tubing of each embodiment of gas confinement assembly and system can be configured to gas The entrance and exit of the gas purification loop outside closed component separates from the gas filtration loop of gas confinement component internal.

Such as, the gas that gas confinement assembly and system can have in gas confinement component internal circulates and filters system System.This self-filtering system can have the multiple fan filter units in inside, and can be configured in inside Gas laminar flow is provided.Laminar flow can be to the direction of internal bottom or other direction any from internal top.Although The gas stream produced by blood circulation needs not be laminar flow, but gas laminar flow can be used to ensure that the thorough of gas in inside Have enough to meet the need completely.Gas laminar flow can be also used for minimizing turbulent flow, and this turbulent flow is undesirable, because it is so that environment In powder collection in this regions of turbulent flow, thus prevent filtration system from removing those granules from environment.Additionally, in order in inside Middle holding preferred temperature, it is provided that use the heat regulating system of multiple heat exchanger, such as by means of fan or another gas Body circulating device operates, and near fan or another gas-recycling plant, or ties with fan or another gas-recycling plant Close and use.Gas purification loop can be configured to by sealing from gas at least one gas cleaning components outside locking device Close component internal recyclegas.In this respect, outside the filtration of gas confinement component internal and blood circulation are with gas confinement assembly The gas purification loop in portion combines the continuous circulation that can provide the notable low particulate inert gas run through in gas confinement assembly, It has notable low-level reactive materials.Gas purge system can be configured to keep the most low-level and is not intended to into Point, such as organic solvent and steam thereof and water, water vapour, oxygen etc..

Except being provided for gas circulation, filtering and in addition to purifying part, tubing can be with sizing and being shaped to Wherein accommodating at least one in electric wire, wire harness and various fluid containment pipe, it is likely to be of a large amount of dead volume when tying in, Wherein, environment composition (such as, water, water vapour, oxygen etc.) may be trapped and be difficult to be removed by cleaning system.Implement at some In example, the combination of any one and fluid containment pipe in cable, electric wire and wire harness can be substantially provided in tubing, And can respectively with the operatively phase of at least one in the electrical system being arranged in inside, mechanical system and cooling system Even.Owing to gas circulation, filtration and purifying part can be configured so that essentially all circulated inert gas is all aspirated through Tubing, being therefore trapped in the environment composition in the dead volume of the various material that ties in can hold by making this material that ties in Effectively purge from a large amount of dead volumes of this material that ties in being contained in tubing.

The gas confinement assembly instructed according to this and each embodiment of system can include from multiple framing components and panel Gas confinement assembly and gas that section is formed circulate, filter and purifying part, and additionally include pressurized inert gas again Each embodiment of blood circulation.This pressurized inert gas recirculating system can make in the operation of OLED print system With, for various pneumatic actuating devices and equipment, as the most described in more detail.

According to this teaching, solve multiple engineering challenge, in order in gas confinement assembly and system, provide pressurized inert Each embodiment of gas recirculation system.First, do not have pressurized inert gas recirculating system gas confinement assembly and Under the typical operation of system, gas confinement assembly can be maintained at slight positive internal pressure relative to external pressure, in order at gas Prevent outer side gas or air from entering when body closed component and system produce any leakage internal.Such as, this is instructed Each embodiment of gas confinement assembly and system, under typical operation, the inside of gas confinement assembly can be relative to closing The surrounding of its exterior is maintained at the pressure of for example, at least 2 mbarg, the pressure of for example, at least 4 mbarg, and at least 6 The pressure of mbarg, the pressure of at least 8 mbarg, or higher pressure.Pressurized inert gas is kept in gas confinement component system Recirculating system is probably challenge, has with the slight positive internal pressure keeping gas confinement assembly and system because it has The balance play dynamically and persistently carried out closed, and simultaneously continuously introduce gas-pressurized in gas confinement assembly and system. Additionally, the variable demand of each device and equipment is likely to be formed the various gas confinement assemblies of this teaching and the irregular pressure of system Force curve.Dynamic pressure is kept to put down the gas confinement assembly being maintained at slight positive pressure relative to external environment condition under these conditions Weighing apparatus can provide the globality of the OLED print procedure for persistently carrying out.

For each embodiment of gas confinement assembly and system, the pressurized inert gas recirculating system instructed according to this Each embodiment in pressurized inert gas loop can be included, it is possible to use at least one in compressor, reservoir and aerator And combinations thereof.Each embodiment of pressurized inert gas recirculating system including each embodiment in pressurized inert gas loop Can have custom-designed Stress control bypass circulation, it can be in this gas confinement assembly instructed and system at offer Noble gas internal pressure in stability line definite value.In each embodiment of gas confinement assembly and system, pressurized inert gas The inert gas pressure that body recirculating system can be configured in the reservoir in pressurized inert gas loop exceedes predetermined threshold value Via Stress control bypass circulation recirculation pressurized inert gas during pressure.Threshold pressure can such as at about 25 psig extremely In the range of between about 200 psig, or specifically in the range of between about 75 psig to about 125 psig, Or in the range of between about 90 psig to about 95 psig.In this respect, have with specialized designs Stress control bypass circulation each embodiment pressurized inert gas recirculating system this teaching gas confinement assembly and System may remain in the balance in gas-tight seal gas lock with pressurized inert gas recirculating system.

According to this teaching, various devices and equipment can be arranged in inside, and return with having various pressurized inert gas Each embodiment fluid communication of the pressurized inert gas recirculating system on road, described pressurized inert gas loop can use respectively Plant at least one in pressurized-gas source, such as compressor, aerator and combinations thereof.The gas lock that this is instructed and Each embodiment of system, uses various pneumatically-operated device and equipment can provide low particles generation performance and low-maintenance Cost.The example that gas confinement assembly connects can be arranged on in internal system and with various pressurized inert gas loop fluid Property device and equipment can include, for example, but not limited to, pneumatic robot, substrate suspending bench, air bearing, air lining, pressure In contracting air tool, pneumatic actuator one or more, and combinations thereof.Substrate suspending bench and air bearing may be used for behaviour Make the various aspects of the OLED print system of each embodiment according to this gas confinement assembly instructed.Such as, air is used The substrate suspending bench of bearing technology may be used for printing by the correct position in substrate feed to printhead chamber and at OLED Substrate is supported during process.

As it was noted above, each embodiment of substrate suspending bench and air bearing is to being contained in the gas instructed according to this The operation of each embodiment of the OLED print system in closed component is probably useful.If Fig. 1 is for gas confinement assembly Schematically shown with system 2000, use the substrate suspending bench of air bearing technology to may be used for substrate feed to printhead Correct position in chamber and support substrate during OLED print procedure.In FIG, gas confinement assembly 1500 can be Load lock system, it can have for the inlet chamber 1510 by the first access hatch 1512 and 1514 reception substrate, For substrate is moved to gas confinement assembly 1500 from inlet chamber 1510, in order to print.Each gate instructed according to this May be used for being isolated from each other by chamber and isolating from external environment condition.According to this teaching, each gate can from physics gate and Gas curtain selects.

During substrate reception process, gate 1512 can be opened, and gate 1514 may be at closed position, in order to anti- Only environmental gas enters gas confinement assembly 1500.Once substrate receives in inlet chamber 1510, gate 1512 and 1514 liang Person can close and inlet chamber 1510 can use inert gas purge, such as nitrogen, any rare gas and any group Close, until the level of reactive ambient gas be in such as 100 ppm or lower, 10 ppm or lower, 1.0 ppm or lower, Or 0.1 ppm or lower.After environmental gas reaches of a sufficiently low level, gate 1514 can be opened, and 1512 still close Close, to allow substrate 1550 to be transported to gas confinement component chambers 1500 from inlet chamber 1510, as shown in Figure 1.Substrate is from entering Oral chamber 1510 is transported to gas confinement component chambers 1500 can be via such as but not limited to being arranged on chamber 1500 and 1510 In suspending bench.Substrate from inlet chamber 1510 be transported to gas confinement component chambers 1500 can also via such as but not limited to Substrate feed robot, substrate 1550 can be placed in the suspending bench in chamber 1500 by it.Substrate 1550 is being beaten Can keep during print process being supported in substrate suspending bench.

Each embodiment of gas confinement assembly and system 2000 can have by gate 1524 and gas confinement assembly Outlet chamber 1520 with system 1500 fluid communication.According to each embodiment of gas confinement assembly and system 2000, beating After print process completes, substrate 1550 can be transported to outlet chamber 1520 from gas confinement assembly 1500 by gate 1524. Substrate is transported to outlet chamber 1520 from gas confinement component chambers 1500 can be via such as but not limited to being arranged on chamber Suspending bench in 1500 and 1520.Substrate is transported to outlet chamber 1520 from gas confinement component chambers 1500 can also be via example Such as, but not limited to, substrate feed robot, substrate 1550 can be picked up in the suspending bench being arranged at chamber 1500 and will by it It is transported to chamber 1520.For each embodiment of gas confinement assembly and system 2000, when gate 1524 is in close stance When putting to prevent reactive ambient gas from entering gas confinement assembly 1500, substrate 1550 can be from outlet chamber 1520 via lock Door 1522 is fetched.

Except including the inlet chamber being in fluid communication with gas confinement assembly 1500 respectively via gate 1514 and 1524 1510 and outlet chamber 1520 load lock system outside, gas confinement assembly and system 2000 can include system controller 1600.System controller 1600 can include the one or more process connected with one or more memory circuitry (not shown) Device circuit (not shown).System controller 1600 can also with include inlet chamber 1510 and the load lock of outlet chamber 1520 System connectivity, and finally connect with the printing nozzle of OLED print system.Thus, system controller 1600 can coordinate gate 1512, the opening and closing of 1514,1522 and 1524.System controller 1600 can also control the printing to OLED print system The ink distribution of nozzle.Substrate 1550 can by each embodiment conveying of the load lock system of this teaching, via such as but It is not limited to use the substrate suspending bench of air bearing technology or the substrate suspending bench of air bearing technology and substrate feed robot Combination, load lock system includes entrance via gate 1514 and 1524 with gas confinement assembly 1500 fluid communication respectively Chamber 1510 and outlet chamber 1520.

Each embodiment of the load lock system of Fig. 1 can also include atmospheric control 1700, and it can include very Empty source and inert gas source, can include nitrogen, any rare gas and any combination thereof.It is contained in gas confinement assembly and is Substrate suspension system in system 2000 can include multiple vacuum ports and the gas bearing ports being generally arranged on flat surfaces. Substrate 1550 can pass through boost in pressure and the holding of noble gas (such as, nitrogen, any rare gas and any combination thereof) Leave crust.The flowing flowing out bearing volume completes by means of multiple vacuum ports.Substrate 1550 is in substrate suspending bench Hoverheight becomes generally according to gas pressure and gas flow.Vacuum and the pressure of atmospheric control 1700 may be used for The load lock system of Fig. 1 supports substrate 1550, such as in gas confinement assembly 1500 during manipulation during printing.Control System 1700 can be also used for supporting substrate 1550, load lock system bag by the load lock system of Fig. 1 during being carried Include the inlet chamber 1510 and outlet chamber being in fluid communication with gas confinement assembly 1500 respectively via gate 1514 and 1524 1520.Carrying by gas confinement assembly and system 2000 to control substrate 1550, system controller 1600 passes through valve respectively 1712 connect with inert gas source 1710 and vacuum 1720 with 1722.Unshowned addition of vacuum and noble gas supply connection and Valve can be supplied to gas confinement assembly and system 2000, by the load lock system diagram of Fig. 1, to further provide for controlling envelope Various gases needed for closed loop border and vacuum facility.

In order to provide the axonometric chart of more multidimensional, figure to each embodiment of gas confinement assembly and the system instructed according to this 2 is the left front axonometric chart of each embodiment of gas confinement assembly and system 2000.Fig. 2 shows and includes gas confinement assembly 1500, inlet chamber 1510 and the load lock system of the first gate 1512.Gas confinement assembly and the system 2000 of Fig. 2 can be wrapped Include gas purge system 2130, for providing to gas confinement system 1500, there is notable low-level reactive environments material (such as water vapour and oxygen) and the constant supply of noble gas of organic vapor obtained from OLED print procedure.Fig. 2 Gas confinement assembly and system 2000 also there is controller system 1600, for system control function, as mentioned before.

Fig. 3 is the front right perspective view building gas confinement assembly 100 completely according to this each embodiment instructed.Gas Closed component 100 can accommodate one or more gases, for keeping the inert environments in gas confinement component internal.This teaching Gas confinement assembly and system can be useful in terms of keeping the inert gas environment in inside.Noble gas can be Without undergoing any gas of chemical reaction under one group of qualifications.Some of noble gas generally use example can include nitrogen Gas, any rare gas and any combination thereof.Gas confinement assembly 100 is configured to surround and protection air-sensitive process, such as Industrial printing systems is used to print Organic Light Emitting Diode (OLED) ink.It it is the example bag of reactive environmental gas to OLED ink Include water vapour and oxygen.As it was noted above, gas confinement assembly 100 can be configured to keep sealed environment and allow parts or beat Print system operates effectively, avoids polluting, aoxidizing and damage otherwise reactive material and substrate simultaneously.

As it is shown on figure 3, each embodiment of gas confinement assembly can include following element portion, including front portion or the first wall Panel 210 ', left side or the second Wall board (not shown), right side or the 3rd Wall board 230 ', rear portion or the 4th Wall board (do not show Go out) and ceiling panel 250 ', this gas confinement assembly can be attached to dish 204, and dish 204 rests upon on base portion (not shown). As the most described in more detail, each embodiment of the gas confinement assembly 100 of Fig. 1 can be from anterior or the first wall framework 210, left side Or the second wall framework (not shown), right side or the 3rd wall framework 230, rear portion or the 4th Wall board (not shown) and top board frame Frame 250 builds.Each embodiment of top board framework 250 can include fan filter unit lid 103 and the first top board framework Pipeline 105 and the first top board framework pipeline 107.The embodiment instructed according to this, various types of section panels may be mounted at Including in any one in multiple panel sections of framing component.In each embodiment of the gas confinement assembly 100 of Fig. 1, Metal panels section 109 can be welded in framing component during framework establishment.For each of gas confinement assembly 100 Embodiment, the section panel type that repeatedly can mount and dismount through several structures of gas confinement assembly and destructing circulation The insertion panel 110 illustrated for Wall board 210 ' and the window panel 120 illustrated for Wall board 230 ' and can be included Easily disassembled maintenance window 130.

Although the inside close to locking device 100 can be may be easy to easily disassembled maintenance window 130, can but can use Any panel of dismounting is with the inside close to gas confinement assembly and system, for repairing and routine maintenance purpose.Maintenance or Repair this close to due to by such as window panel 120 and can the panel of easily disassembled maintenance window 130 provide close And different, itself so that terminal use's glove during use from gas confinement component external close in gas confinement assembly Portion.Such as, be attached to any glove of glove port 140, such as glove 142, as in Fig. 3 for shown in panel 230, Ke Yi Make terminal use close to internal between gas confinement component system validity period.

Fig. 4 illustrates the exploded view of each embodiment of the gas confinement assembly shown in Fig. 3.Each of gas confinement assembly Embodiment can have multiple Wall board, including the perspective outboard view of front walls panel 210 ', the outside of left side wall panel 220 ' Axonometric chart, the perspective interior view of right side wall panel 230 ', the perspective interior view of rear wall panel 240 ', and ceiling panel 250 ' Top perspective view, as it is shown on figure 3, gas confinement assembly can be attached to dish 204, dish 204 rests upon on base portion 202.OLED Print system may be mounted on dish 204 top, and print procedure is known is sensitive to environmental condition.According to this teaching, gas Closed component can build from framing component, the wall framework 210 of such as Wall board 210 ', the wall framework 220 of Wall board 220 ', wall The wall framework 230 of panel 230 ', the wall framework 240 of Wall board 240 ' and the top board framework 250 of ceiling panel 250 ', wherein Then multiple section panel can be installed.In this respect, it may be desirable to streaming can be through the gas confinement assembly of this teaching The design of the section panel that several structures of each embodiment and destructing circulation repeatedly mount and dismount.Furthermore, it is possible to carry out The floor space of wide each embodiment to accommodate OLED print system of the fixed wheel of gas confinement assembly 100, in order to minimum activating QI Noble gas volume required in body closed component, and make terminal use easily accessible (in gas confinement assembly validity period Between and the most such during safeguarding).

Use front walls panel 210 ' and left side wall panel 220 ' can have as example, each embodiment of framing component There is the metal panels section 109 being welded in framing component during framing component builds.Insert panel 110, window panel 120 and can may be mounted in each wall framing component by easily disassembled maintenance window 130, and can be through the gas confinement of Fig. 4 Several structures and the destructing circulation of assembly 100 repeatedly mount and dismount.It can be seen that at Wall board 210 ' and Wall board 220 ' Example in, Wall board can have near can the window panel 120 of easily disassembled maintenance window 130.Similarly, as exemplary Shown in rear wall panel 240 ', Wall board can have window panel, such as window panel 125, its have two adjacent Glove port 140.Each embodiment of wall framing component for instructing according to this, and for the gas confinement assembly 100 of Fig. 3 It can be seen that this set of glove may be easy to from the outside of gas lock close to the element portion in closed system. Therefore, each embodiment of gas lock can provide two or more glove ports, thus terminal use can be by a left side Glove and right hand set stretch in inside and manipulate the one or more items in inside, and do not disturb the gaseous environment in inside Composition.Such as, any one in window panel 120 and maintenance window 130 may be positioned such that beneficially from gas confinement assembly Portion is close to the adjusting part in gas confinement component internal.According to window panel (such as, window panel 120 and maintenance window 130) each embodiment, when need not terminal use by the glove of glove port close to time, this window may not include hands Set port and glove port assembly.

As shown in Figure 4, each embodiment of wall and ceiling panel can have multiple insertion panel 110.Can see in the diagram Go out, insert panel and can have variously-shaped and aspect ratio.In addition to inserting panel, ceiling panel 250 ' can have peace Dress, bolt connect, threaded, fixing or be otherwise fastened to the fan filter unit lid 103 of top board framework 250 with And first top board framework pipeline 105 and the second top board framework pipeline 107.As the most described in more detail, with ceiling panel 250 ' The tubing of pipeline 107 fluid communication may be mounted in the inside of gas confinement assembly.According to this teaching, this pipeline system System can be a part for the gas-circulating system of gas confinement component internal, and provides for separately leaving gas confinement group The flowing stream of part, for cycling through at least one gas cleaning components of gas confinement component external.

Fig. 5 is the exploded front axonometric chart of framing component assembly 200, and wherein, wall framework 220 can be built into and include panel The most supplementary.Although being not limited to shown design, but the framing component assembly 200 of wall framework 220 is used to may be used for illustrating Each embodiment according to this framing component assembly instructed.According to this teaching, each embodiment of framing component assembly is permissible It is made up of each framing component and the section panel being arranged in each frame panel section of each framing component.

According to each embodiment of this each framing component assembly instructed, framing component assembly 200 can include framework Component, such as wall framework 220.For each embodiment of gas confinement assembly, the gas confinement assembly 100 of such as Fig. 3, permissible The process using the facility being contained in this gas confinement assembly may not need only provide for the gas-tight seal envelope of inert environments Close device, and need there is no the environment of particulate matter.In this respect, use can be used according to this framing component instructed Various sizes metal tube material in each embodiment building framework.This metal tube material solves expectation material properties, Include but not limited to, will not demote to produce the high globality material of particulate matter, and generation has high intensity and has The framing component of optimum weight, it is simple to carry out carrying from the three unities to another place, build and destructing includes each framework The gas confinement assembly of component and panel section.Those of ordinary skill in the art are it is readily understood that meet appointing of these requirements What material may be used for forming each framing component instructed according to this.

Such as, according to each embodiment of this framing component instructed, such as framing component assembly 200, can be from extruding Metal tube builds.Each embodiment according to framing component, it is possible to use aluminum, steel and various metallic composite build framework Component.In various embodiments, it is possible to use have such as but not limited to following size and have 1/8 " to 1/4 " wall thickness Metal tube: 2 " wX2 " h, 4 " wX2 " h and 4 " wX4 " h, to build according to each embodiment of this framing component instructed.Additionally, The various fiber reinforced polymer composites with various pipe or other form are available, its have include but not limited to as Under material properties: will not demote to produce the high globality material of particulate matter, and produce and there is high intensity and have The framing component of optimum weight, it is simple to carry out carrying, build and deconstructing from the three unities to another place.

About from various sizes each framing component of metal tube material construction, it is contemplated that, can weld to form frame Each embodiment of frame weld part.Additionally, build each framing component of material construction from various sizes can use suitable industry Binding agent is carried out.Should be so that letting out by framing component will not be inherently created it is contemplated that build each framing component The mode of flux leakage path is carried out.In this respect, for each embodiment of gas confinement assembly, building each framing component can make Carry out by any method of the leakage paths that will not inherently create by framing component.Additionally, the framework instructed according to this Each embodiment of component, the wall framework 220 of such as Fig. 4, can be painted or coating.For from being such as prone to oxidation (wherein, The material formed in surface can form particulate matter) each embodiment of framing component of making of metal tube material, permissible Carrying out brushing or coating or other surface process, such as anodization, to prevent from forming particulate matter.

The framing component assembly 200 of framing component assembly, such as Fig. 5, can have framing component, such as wall framework 220. Wall framework 220 can have top 226(top wall framework backing plate 227 and can be fastened thereon) and bottom 228(base wall frame Frame backing plate 229 can be fastened thereon).As the most described in more detail, the backing plate being arranged on framing component surface is that pad is close A part for envelope system, it is combined with the gasket seal of the panel being arranged in framing component section, it is provided that for according to this religion The gas-tight seal of each embodiment of the gas confinement assembly led.The wall of the framing component assembly 200 of framing component, such as Fig. 5 Framework 220, can have multiple panel frame section, and wherein, each section can be made into the various types of panels of reception, example Such as, but not limited to, insert panel 110, window panel 120 and can easily disassembled maintenance window 130.When building framing component, can To form various types of panel sections.The type of panel section can include, but not limited to, e.g. for receiving insertion panel 110 insert panel section 10, for receiving the window panel section 20 of window panel 120 and can easily disassembled tie up for reception Repair the maintenance window panel section 30 of window 130.

Each type of panel section can have the panel part segment frames of receiving panel, and can be arranged to each panel Can sealably be fastened to, according in this each panel section instructed, be used for building gas-tight seal gas confinement assembly.Example As, in the Fig. 5 showing the frame assembly instructed according to this, insert panel section 10 and be shown as that there is framework 12, window side Plate section 20 is shown as having framework 22, and maintenance window panel section 30 is shown as having framework 32.The wall frame that this is instructed Each embodiment of frame assembly, each panel part segment frames can be to receive the metal sheet in panel section with sequential welding bead weld Material, to provide gas-tight seal.For each embodiment of wall frame assembly, each panel part segment frames can be by various sheet material Making, including the structure material selected from fiber reinforced polymer composites, it can use suitable industry adhesive to be arranged on In panel section.Teaching as related to subsequently sealing is described in more detail, and each panel part segment frames can have and is disposed thereon Sealant compressible shim, to guarantee for installing and each panel of being fastened in each panel section can form airtight body Seal.In addition to panel part segment frames, each framing component section can have and positioning panel and in panel section It is firmly fastened to the hardware that panel is relevant.

Each embodiment of the panel frame 122 inserting panel 110 and window panel 120 can be from sheet material structure Build, such as but not limited to aluminum, various aluminum and stainless alloy.The attribute of panel material can with for constituting framing component The structural material of each embodiment is identical.In this respect, there is the material for the attribute of various panel members include but do not limit In: will not demote to produce the high globality material of particulate matter, and generation has high intensity and has optimum weight Panel, in order to carry out carrying, build and deconstructing from the three unities to another place.Such as, each of cellular chip material Embodiment can have the required of the panel material of the panel frame 122 being used as structure insertion panel 110 and window panel 120 Attribute.Cellular chip material can be made up of various materials；Metal and metal composite and polymer, and polymer is combined Cellular chip material.When making from metal material, each embodiment of detachable panel can have the ground connection included in the panel Connect, to guarantee the total ground connection when gas confinement component construction.

Give gas confinement assembly for building this teaching gas confinement component parts can transport properties, this teaching Section panel each embodiment in any one can repeat to pacify installation and dismantling during gas confinement assembly and system use Unload, with the inside close to gas confinement assembly.

Such as, the panel section 30 of easily disassembled maintenance window panel 130 can have one group four pads for receiving, One of them is shown as window and guides pad 34.Additionally, build for receive can the panel part of easily disassembled maintenance window panel 130 Section 30 can have one group of four clamping plate 36, its be used for being arranged on each can the maintenance of easily disassembled maintenance window 130 Maintenance window 130 is clamped in maintenance window panel section 30 by one group of four back action toggle clamp 136 on window frame 132 In.Additionally, each in two window handles 138 may be mounted at can be on easily disassembled maintenance window framework 132, so that eventually End subscriber maintenance window easy to removal and installation 130.The detachable quantity of maintenance window handle, type and arrange and can change. Additionally, for receive can the maintenance window panel section 30 of easily disassembled maintenance window panel 130 so that window clip 35 In at least two be selectively installed in each maintenance window panel section 30.Although display is at each maintenance window panel The top of section 30 and bottom, but at least two window clip can be with in order to fastening maintenance window in panel part segment frames 32 Any mode of mouth 130 is installed.Instrument may be used for dismounting and installs window clip 35, in order to allow maintenance window 130 to dismantle Again install.

The back action toggle clamp 136 of maintenance window 130 and the hardware being arranged in panel section 30 (include clamping plate 36, window guides pad 34 and window clip 35) can be built by any suitable material and combination of materials.Such as, one or many Individual this element can include at least one metal, at least one pottery, at least one plastics and combinations thereof.Detachably keep in repair window Mouth handle 138 can be built by any suitable material and combination of materials.Such as, one or more this elements can include to Few a kind of metal, at least one pottery, at least one plastics, at least one rubber and combinations thereof.Closed window, such as window side The window 124 of plate 120 or the window 134 of maintenance window 130, can include any suitable material and combination of materials.According to this Each embodiment of the gas confinement assembly of teaching, closed window can include transparent and trnaslucent materials.At gas confinement assembly Each embodiment in, closed window can include material based on Silicon stone (such as but not limited to glass and quartz) and various types of The material based on polymer (such as but not limited to Merlon, acrylic acid and the vinyl material of various ranks) of type.Ability Territory those of ordinary skill various compositions being appreciated that example window gate material and combinations thereof are also used as instructing according to this Transparent and trnaslucent materials.

In Figure 5 for framing component assembly 200 it can be seen that can have by easily disassembled maintenance window panel 130 Glove port with cover cap 150.Although Fig. 3 showing, all glove ports have outward extending glove, but such as Fig. 5 institute Show, depend on terminal use the need of remotely close to the inside of gas confinement assembly, glove port can also be by cover cap.Such as figure Cover cap is latched in glove securely by each embodiment of the cover assembly shown in 6A-7B when terminal use does not uses glove On, and be conveniently accessible to when terminal use is desirable for glove simultaneously.

In fig. 6, it is shown that cover cap 150, its can have inner surface 151, outer surface 153 and can with fixed wheel wide for The side 152 grasped.Three shoulder screw 156 extend from the edge 154 of cover cap 150.As shown in Figure 6B, each shoulder screw is solid It is scheduled in edge 154 so that shank 155 extends setpoint distance from edge 154, thus head 157 not joining edge 154.At figure In 7A-7B, glove port hardware assembly 160 can be modified to provide cover assembly, and it includes for being added at locking device Pressure is with relative to the locking mechanism of cover cap glove port when having normal pressure outside locking device.

For each embodiment of the glove port hardware assembly 160 of Fig. 6 A, snap clamp is so that cover cap 150 is closed On glove port hardware assembly 160, and simultaneously provide the easily accessible glove of terminal use quickly couple design.In Fig. 7 A institute In the top perspective view of the glove port hardware assembly 160 shown, glove port assembly 160 can include back plate 161 and header board 163, Header board 163 has the threaded screws head 162 for installing glove and flange 164.Flange 164 shows snap lock latch 166, there is groove 165, be used for receiving shoulder screw 156(Fig. 6 B) shoulder screw head 157.Each shoulder screw 156 can be with Each alignment in the snap lock latch 166 of glove port hardware assembly 160 and joint.The groove 168 of snap lock latch 166 has and is positioned at The opening 165 of end and be positioned at the locking recess 167 at the other end of groove 168.The most each shoulder screw head 157 inserts In each opening 165, cover cap 150 just can rotate, until the close locking recess 167 of shoulder screw head adjacent groove 168 End.Sectional view shown in Fig. 7 B shows for the lock-in feature of cover cap glove when gas confinement component system uses. During use, the internal gas pressure of the noble gas in locking device is more than setting than the pressure of gas confinement component external Amount.Normal pressure can fill glove (Fig. 3), thus glove during the use of this gas confinement assembly instructed at cover cap During 150 times compressions, shoulder screw head 157 moves to lock in recess 167, so that it is guaranteed that glove port window is reliably covered Lid.But, terminal use can grasp cover cap 150 by fixed wheel exterior feature for the side 152 grasped, and the easiest Ground departs from the cover cap being fastened in snap lock latch.Fig. 7 B also show the back plate 161 on the inner surface 131 of window 134 and Header board 163 on the outer surface of window 134, two plates all have O-ring packing 169.

Such as discuss in the following teaching of Fig. 8 A-9B, wall and top board framing component sealing member and the section of airtight body Panel frame sealing member combines provides the gas-tight seal gas confinement group of the air-sensitive process for needing inert environments Each embodiment of part.Contribute to providing the reactive materials of notable low concentration and the gas confinement of the lowest particle environments The parts of assembly and system can include but not limited to, gas-tight seal gas confinement assembly and efficient gas circulation and granule mistake Filter system, including tubing.The effective gas-tight seal for gas confinement assembly is provided to be probably challenge；Especially exist When three framing components form three plane ties together.Thus, three plane ties be sealed in offer for can through several structures and The gas-tight seal aspect of easily installing of the gas confinement assembly of destructing circulation assembly and disassembly has especially difficult challenge.

In this respect, according to each embodiment of this gas confinement assembly instructed by effective gasket seal of joint with And build the gas confinement assembly providing around parts effective gasket seal and providing to build completely and system at load bearing Gas-tight seal.Joint sealings that are different from conventional joint sealing, that instruct according to this: 1) it is included in top and bottom terminal framework connects Head joint portion (wherein, three framing components are combined) place adjoins the consistent parallel of shim section and vertical orientated pad length Alignment, thus avoid angularly stitching alignment and sealing, 2) provide the whole width being used for along joint to form length of adjacency, thus increase Be in sealing contact area at three plane tie joint portions, 3) be designed with backing plate, described backing plate along all vertically and horizontally and top Consistent compression stress is provided with bottom three plane tie gasket seal.Additionally, the selection of gasket material can affect provides airtight close The effectiveness of envelope, this will be discussed later.

Fig. 8 A-8C is the vertical view that conventional three plane ties of diagram seal the contrast sealed with three plane ties instructed according to this Schematic diagram.According to each embodiment of this gas confinement assembly instructed, can have such as but not limited at least four wall framework Component, top board framing component and dish, it can be bonded to form gas confinement assembly, thus produce and need gas-tight seal many Individual vertical, level and three plane ties.In fig. 8 a, the schematic top plan view of conventional three gasket seals is formed by the first pad I, the One pad I is vertical orientated with pad II in X-Y plane.As shown in Figure 8 A, by the vertical orientated seam formed in X-Y plane Have between two sections by the contact length W of gasket width dimension limitation₁.Additionally, pad III(is at vertical direction and pad The pad that sheet I and pad II is vertical orientated) terminal part can adjoin pad I and pad II, by shadow representation.At figure In 8B, the schematic top plan view of conventional three plane tie gasket seals is formed by the first pad length I, the first pad length I and second Pad length II is vertical, and has 45 ° of seam faying faces of two length, wherein, is sewn between two sections and has more than pad The contact length W of material width₂.The configuration of similar map 8A, pad III(hangs down with pad I and pad II at vertical direction End portion directly) can adjoin pad I and pad II, by shadow representation.Assuming that gasket width is identical in Fig. 8 A and Fig. 8 B, figure The contact length W of 8B₂Contact length W more than Fig. 8 A₁。

Fig. 8 C is the schematic top plan view according to these three plane tie gasket seals instructed.First pad length I can have Being perpendicular to the shim section I ' that the direction of pad length I is formed, wherein, the length that shim section I ' has can be about and be tied The size of the width of the structure member closed, such as forming the 4 of each wall framing component of the gas confinement assembly of this teaching " W X 2 " h or 4 " w X 4 " h metal tube.Pad II is vertical with pad I in X-Y plane, and has shim section II ', pad Section II ' it is about the width of combined structure member with the stacked length of shim section I '.The width of shim section I ' and II ' Degree is the width of selected compressible pad sheet material.Pad III is vertical orientated with pad I and pad II at vertical direction. Shim section III ' is the end portion of pad III.Shim section III ' is hung down by the vertical length of shim section III ' and pad III Directly it is orientated formation.Shim section III ' can be formed such that it has the length about the same with shim section I ' and II ', and Width is the thickness of selected compressible pad sheet material.In this respect, the contact length W of three shown in Fig. 8 C alignment section₃ More than being respectively provided with contact length W₁And W₂Fig. 8 A or Fig. 8 B shown in conventional delta connection seal.

In this respect, at terminal fitting joint portion, shim section is formed according to these three plane tie gasket seals instructed Consistent parallel alignment (will be otherwise the pad of vertical alignment, as shown in the situation of Fig. 8 A and Fig. 8 B).Three plane tie gasket seals This consistent parallel alignment of section strides across described section and applies consistent transverse sealing power, is formed by wall framing component with promotion The top of joint and airtight three plane ties of bottom corners seal.Additionally, the pad that unanimously aligns that each three plane ties seal Each section of section is chosen the width of the most combined structure member, thus provides the maximum of consistent alignment section to connect Touch length.Additionally, be designed with backing plate according to this joint sealing instructed, described backing plate is along all vertical, the level building joint And the compression stress that three gasket seal offers are consistent.Evincible, select for the example of Fig. 8 A and Fig. 8 B be given normal The width of the gasket material advising three face seals can be at least the width of combined structure member.

The exploded perspective of Fig. 9 A illustrates the black box instructed before all framing components are combined according to this 300, thus pad shows and is in uncompressed state.In figure 9 a, gas envelope is being built from all parts of gas confinement assembly Closing in the first step of device, multiple wall framing components, such as wall framework 310, wall framework 350 and top board framework 370, permissible Sealably combined.It is to provide gas confinement assembly the most airtight once build completely according to the sealing of this framing component instructed Seal and provide the pith of the sealing can implemented through several structures of gas confinement assembly and destructing circulation.Although The example be given in the following teaching of Fig. 9 A-9B is the part for sealing gas closed component, but this area is common Skilled artisan will appreciate that, this teaching be applicable to the gas confinement assembly of this teaching whole any one.

The first wall framework 310 shown in Fig. 9 A can have the installation medial surface 311 of backing plate 312, vertical side 314 and The top surface 315 of backing plate 316 is installed.First wall framework 310 can have the first pad 320, and the first pad 320 is arranged on by padding Plate 312 formed space in and adhere to the space formed by backing plate 312.It is arranged at the first pad 320 and is formed by backing plate 312 Space in and the gap 302 that adheres to stay after the space that formed by backing plate 312 can extend the vertical of the first pad 320 Length, as shown in Figure 9 A.As shown in Figure 9 A, submissive pad 320 can be arranged in the space formed by backing plate 312 and adhere to The space formed by backing plate 312, and can have vertical pad length 321, curve pad length 323 and at inner frame On component 311 in 90 ° with vertical pad length 321 planar shape and terminate at the pad of vertical side 314 of wall framework 310 Length 325.In figure 9 a, the first wall framework 310 can have the top surface 315 installing backing plate 316, thus on surface 315 Forming space, the second pad 340 vertically adheres to described space in described space and near the inward flange 317 of wall framework 310. Stay after the second pad 340 is arranged in the space formed by backing plate 316 and adheres to the space formed by backing plate 316 Gap 304 can extend the horizontal length of the second pad 340, as shown in Figure 9 A.Additionally, as shown in phantom lines, the length of pad 340 Degree 345 is the most parallel with the length 325 of pad 320 and aligns adjacently.

The second wall framework 350 shown in Fig. 9 A can have external frame side 353, vertical side 354 and install backing plate The top surface 355 of 356.Second wall framework 350 can have the first pad 360, and the first pad 360 is arranged on by backing plate 356 shape Become space in and adhere to the space formed by backing plate 356.It is arranged on the space formed by backing plate 356 at the first pad 360 In and the gap 306 that adheres to stay after the space that formed by backing plate 356 can extend the horizontal length of the first pad 360, As shown in Figure 9 A.As shown in Figure 9 A, submissive pad 360 can have vertical length 361, length of curve 363 and and top surface 355 planar shape is in 90 ° and terminates at the length 365 of outer frame members 353.

As shown in the exploded perspective view of Fig. 9 A, the internal frame member 311 of wall framework 310 can be incorporated into wall framework 350 Vertical side 354 with formed gas confinement frame assembly a structure joint.The close of joint is built about so formed Envelope, in each embodiment of the gasket seal at the terminal fitting joint portion of the wall framing component instructed according to this, such as Fig. 9 A Shown in, the length 345 of the length 325 of pad 320, the length 365 of pad 360 and pad 340 is the most adjacently and the most right Together.Additionally, as the most described in more detail, each embodiment of the backing plate of this teaching can provide for this teaching of gas-tight seal About the 20% of the compressible pad sheet material of each embodiment of gas confinement assembly is to the consistent pressure between about 40% deflection Contracting.

Fig. 9 B illustrates the black box 300 instructed after all framing components combine according to this, thus pad shows For compressive state.Fig. 9 B shows at first wall framework the 310, second wall framework 350 and top board framework 370(with imaginary representation Go out) between top terminals joint joint portion at the axonometric chart of details of the corner sealing of three plane ties that formed.Such as Fig. 9 B institute Show, backing plate the pad space limited may determine that one fixed width, thus is combining wall framework 310, wall framework 350 and top board frame After frame 370；As shown in imaginary drawing, for forming the compressible pad sheet material of vertical, level and three gasket seals about Consistent compression between 20% to about 40% deflection guarantees the pad at all surface of the joint of wall framing component sealing Sheet seals can provide gas-tight seal.Additionally, pad gap 302,304 and 306(is not shown) it is dimensioned so that compressible About the 20% of gasket material to after the optimal compression between about 40% deflection, each pad can with joint sheet gap, as For shown in pad 340 and pad 360 in Fig. 9 B.Thus, except the space arranged by each pad of restriction and adhere to is carried Outside consistent compression, be designed to provide each embodiment of the backing plate in gap also assure that each compression gasket can comply with by In the space that backing plate limits, without wrinkling in compressive state in the way of by is formationed leakage paths or swell or otherwise Molding brokenly.

According to each embodiment of this gas confinement assembly instructed, various types of section panels can use setting Sealant compressible shim material seal on each panel part segment frames.Integration Framework component gasket seal, in each section Form the position of the sealant compressible shim of sealing between panel and panel section framework and material can provide have little or no The gas-tight seal gas confinement assembly of gas leakage.Additionally, for all types of panels (such as, Fig. 5 insertion panel 110, Window panel 120 and can easily disassembled maintenance window 130) Seal Design can be in this panel repeated removal with install and (be May need, such as in order to safeguard close to gas confinement component internal) after provide durable panel to seal.

Such as, Figure 10 A shows maintenance window panel section 30 and can the exploded view of easily disassembled maintenance window 130. As it was noted above, maintenance window panel section 30 can manufacture can easily disassembled maintenance window 130 for reception.Gas is sealed Close each embodiment of assembly, panel section, such as detachable maintenance control panel section 30, can have panel part segment frames 32 with And the sealant compressible shim 38 being arranged on panel part segment frames 32.In various embodiments, with at detachable maintenance window panel In section 30 fastening can the relevant hardware of easily disassembled maintenance window 130 so that terminal use is easily installed and again pacifies Dress, and guarantee to be immediately adjacent to gas confinement component internal as desired by needs by easily disassembled maintenance window 130 simultaneously Terminal use install and keep the sealing of airtight body when being again arranged in panel section 30.Can easily disassembled maintenance window 130 can include rigidity window frame 132, and it can be by such as but not limited to for any framing component institute building this teaching The metal tube material construction stated.Maintenance window 130 can use snap action securing hardware, cuts with scissors such as but not limited to back action Connect folder 136, in order to make terminal use readily accessible and installation and maintenance window 130 again.Figure 10 A shows earlier figures 7A- The glove port hardware assembly 160 of 7B, it is shown that one group of 3 snap lock latch 166.

As shown in the front view of the detachable maintenance window panel section 30 of Figure 10 A, can easily disassembled maintenance window 130 can To have one group of four toggle clamp 136 being fastened on window frame 132.Maintenance window 130 can be positioned at panel section frame Frame 30 limits distance, for guaranteeing the Suitable compression power against pad 38.One group of four window is used to guide pad 34, such as figure Shown in 10B, it may be mounted in each corner of panel section 30, for positioning maintenance window 130 in panel section 30. Each in one group of clamping plate 36 can be configured to receive can the back action toggle clamp 136 of easily disassembled maintenance window 136.According to For each embodiment at several installation and removal circulation gas-tight seal maintenance windows 130, the machinery of maintenance window framework 132 Combining can relative to the defined position (guiding pad 34 offer by a group window) of sealant compressible shim 38 for intensity and maintenance window 130 To guarantee that once maintenance window 130 fastening puts in place, such as but not limited to using the back action hinge being fastened in corresponding clamping plate 36 Connecing folder 136, maintenance window framework 132 just can be with limiting compression (by a group window guiding pad 34 on panel part segment frames 32 Set) uniform power is provided.This group window guides pad 34 to be located so that the window 130 compression stress on pad 38 is about Sealant compressible shim 38 is deflected between 20% to about 40%.In this respect, the structure of maintenance window 130 and panel section 30 Manufacture and the sealing for the maintenance window 130 airtight body in panel section 30 is provided.As it was noted above, window clip 35 can It is arranged on after being fastened in panel section 30 at maintenance window 130 in panel section 30, and needs to tear open at maintenance window 130 Dismantle when unloading.

Back action toggle clamp 136 can use any appropriate means and means combination to be fastened to easily disassembled to keep in repair Window frame 132.The example of the suitable fastener means that can use includes that at least one binding agent is (such as but not limited to, epoxy Resin or cement bonding agent), at least one bolt, at least one screw, at least one other securing member, at least one groove, extremely Few track, at least one weld part and combinations thereof.Back action toggle clamp 136 can be directly connected to detachably keep in repair window Mouthful framework 132 or indirectly connected by adaptor plate.Back action toggle clamp 136, clamping plate 36, window guide pad 34 and window Mouth clip 35 can be built by any suitable material and combination of materials.Such as, one or more this elements can include to Few a kind of metal, at least one pottery, at least one plastics and combinations thereof.

Except seal can in addition to easily disassembled maintenance window, the sealing of airtight body can be provided for inserting panel and Window panel.The other type of section panel that repeatedly can mount and dismount in panel section includes, but not limited to, e.g. Insertion panel 110 shown in Fig. 5 and window panel 120.In fig. 5 it can be seen that the panel frame 122 of window panel 120 with Insert panel 110 to be similarly constructed.Thus, according to each embodiment of gas confinement assembly, it is used for receiving insertion panel and window The manufacture of the panel section of actinal surface plate can be identical.In this respect, the sealing inserting panel and window panel can use identical Principle is implemented.

With reference to Figure 11 A and 11B, and each embodiment instructed according to this, gas lock (such as, the gas envelope of Fig. 1 Close assembly 100) any panel can include one or more insertion panel section 10, its can have be configured to receive corresponding Insert the framework 12 of panel 110.Figure 11 A refers to publish picture the axonometric chart of the amplifier section shown in 11B.In Figure 11 A, insert panel 110 are shown relative to insert framework 12 positions.At Figure 11 B it can be seen that insert panel 110 to be attached to framework 12, wherein, frame Frame 12 can be such as to be built by metal.In certain embodiments, metal can include aluminum, steel, copper, rustless steel, chromium, alloy and A combination thereof etc..Multiple blind cutting thread holes 14 can be formed in inserting panel section framework 12.Panel part segment frames 12 is built into Being included in the pad 16 inserted between panel 110 and framework 12, sealant compressible shim 18 can be arranged on here.Blind cutting thread hole 14 It can be M5 type.Screw 15 can be received by blind cutting thread hole 14, thus is inserting compression pad between panel 110 and framework 12 Sheet 16.Once put in place against pad 16 fastening, insert panel 110 in inserting panel section 10, just form the close of airtight body Envelope.As it was noted above, various section panels can be implemented by this panel sealing, include but not limited to, the inserting surface shown in Fig. 5 Plate 110 and window panel 120.

According to each embodiment of the sealant compressible shim instructed according to this, seal for framing component and panel sealing can Compression gasket material can be selected from various compressible polymeric materials, such as but not limited to any closed air chamber polymeric material classification, This area is also referred to as expanded rubber material or expansile polymeric material.In brief, closed air chamber polymer exists with gas confinement Prepared by the mode in discrete chamber；The most each discrete chamber is closed by polymeric material.It is expected to be useful in framework and panel component The attribute of the compressible closed air chamber polymeric pad sheet material that airtight body seals includes but not limited to, they chemistry to wide scope The chemical attack of material is firm, has extraordinary moisture barrier attribute, is resilient, and supports in wide temperature range Anti-permanent compressive deformation.Generally speaking, compared with open plenum topology convergence material, closed air chamber polymeric material has higher Dimensional stability, relatively low moisture absorption coefficient and higher-strength.The all kinds polymerization of closed air chamber polymeric material can be made Material includes, but not limited to, e.g.: silicones, neoprene, ethylene-propylene-diene terpolymer (EPT) (use three Unit's second diene monomer (EPDM, or ethylene propylene diene rubber) polymer of making and complex), ethylene nitrile, butadiene-styrene rubber (SBR) And various copolymer and blend.

The expectation material properties of closed air chamber polymer has only kept during use at the air chamber constituting block materials Keep time the most lossless.In this respect, can exceed that closed air chamber polymer sets specified material specification and (such as, exceedes in appointment The specification used in temperature or compression zone) mode use this material can cause the degradation of gasket seal.Seal being used for In each embodiment of the closed air chamber polymer pad of the section panel in framing component and frame panel section, this material Compression should less than about 50% to about 70% deflection between, in order to optimum performance can be about 20% to about Between 40% deflection.

In addition to closed air chamber compressible pad sheet material, have for building according to this gas confinement assembly instructed Another example of the compressible pad sheet material classification of the expectation attribute of embodiment includes hollow extrusion die mould compressible pad sheet material Classification.Hollow extrusion die mould gasket material has expectation attribute as material classification, includes but not limited to, they changes to wide scope The chemical attack learning material is firm, has extraordinary moisture barrier attribute, is resilient in wide temperature range, and Resist permanent compressive deformation.This hollow extrusion die mould compressible pad sheet material can variously-shaped because counting with wide scope Existing, such as but not limited to, U-shaped air chamber, D-shaped air chamber, square air chamber, rectangle air chamber and the extruding of various conventional shape factor hollow Any one in type gasket material.Various hollow extrusion die mould gasket materials can manufacture closed air chamber compressible pad sheet material by being used for The polymeric material of material is made.Such as but not limited to, each embodiment of hollow extrusion die mould pad can be by silicones, chlorine butadiene Rubber, ethylene-propylene-diene terpolymer (EPT) (use the polymer that ethylene propylene diene monomer (EPDM) is made with multiple Compound), ethylene nitrile, butadiene-styrene rubber (SBR) and various copolymer thereof and blend make.The pressure of this hollow gas chamber gasket material Contracting should be less than about 50% deflection, in order to keeps expectation attribute.

Although those of ordinary skill in the art are it can be readily appreciated that closed air chamber compressible pad sheet material classification and hollow Extrusion pressing type compressible pad sheet material classification is given as examples, but any compressible pad sheet material with expectation attribute all may be used For sealing structure member (the most various walls and top board framing component) and the sealing panel section framework that this teaching provides In each panel.

Can from multiple framing components build gas confinement assembly, such as Fig. 3 and Fig. 4 gas confinement assembly 100 or The gas confinement assembly 1000 of Figure 23 and Figure 24 as discussed subsequently, in order to minimize damage system unit (such as but not limited to, Gasket seal, framing component, pipeline and section panel) risk.Such as, gasket seal is to build gas from multiple framing components May be susceptible to the parts damaged during body locking device.Each embodiment instructed according to this, material and method are arranged to minimum Change or eliminate the risk of all parts damaging gas confinement assembly during building the gas lock instructed according to this.

Figure 12 A is the axonometric chart building the starting stage of gas confinement assembly (the gas confinement assembly 100 of such as Fig. 3). Although gas confinement assembly (such as gas confinement assembly 100) is for illustrating the structure of the gas confinement assembly of this teaching, but Those of ordinary skill will be consequently realised that, this teaching is applicable to each embodiment of gas confinement assembly.As illustrated in fig. 12, exist During the structure starting stage of gas confinement assembly, multiple cushion blocks are first placed on the dish 204 that supported by base portion 202.Cushion block Can be thicker than the compressible pad sheet material being arranged on each wall framing component being installed on dish 204.A series of cushion blocks can To be placed on multiple positions on the periphery edge of dish 204, in described position, each wall framework of gas confinement assembly during assembling Component can be placed on a series of cushion block and near the position of dish 204, and does not contacts with dish 204.Expect with can protect with The compressible pad sheet material exempting to be arranged on each wall framing component (in order to dish 204 sealing purpose) by the side of any infringement Formula assembles each wall framing component at dish 204.Thus, (each Wall board parts can be placed on dish on cushion block to use cushion block Initial position on 204) prevent the compressible pad sheet material being arranged on each wall framing component (in order to form gas with dish 204 Close sealing purpose) by any infringement.Such as but not limited to, as illustrated in fig. 12, front circumference edge 201 can have pad 93, 95 and 97, front walls framing component can rest upon on pad 93,95 and 97；Right periphery edge 205 can have pad 89 and 91, Right side wall framing component can rest upon on pad 89 and 91；Rear perimeter edge 207 can have two pads, rear wall framework pad Can rest upon thereon, illustrated therein is pad 87.Any quantity, type and the combination of cushion block can be used.The common skill in this area Art personnel it will be appreciated that according to this teaching, cushion block can be positioned on dish 204, although in Figure 12 A-Figure 14 B the most not Different cushion blocks is shown.

The exemplary cushion block of each embodiment is instructed according to this for assemble gas lock from component framework component Shown in Figure 12 B, it is the axonometric chart irising out the 3rd cushion block 91 shown in part of Fig. 9 A.Exemplary cushion block 91 can include attached Link the cushion block bar (strap) 90 of cushion block transverse side 92.Cushion block can be made up of any suitable material and combination of materials.Example As, each cushion block can include the polyethylene of supra polymer weight.Cushion block bar 90 can be by any suitable material and material group Conjunction is made.In certain embodiments, cushion block bar 90 includes nylon material, poly-alkylene material etc..Cushion block 91 has top surface 94 He Basal surface 96.Cushion block 87,89,93,95,97 and other cushion block any used can construct with same or like physical attribute, And same or like material can be included.Cushion block can be to allow stably to be placed into the periphery top edge of dish 204 and readily accessible Mode rest upon, clamp or its other modes are conveniently provided.

In the exploded perspective view that Figure 13 provides, framing component can include can being attached to rest upon the dish on base portion 202 Front walls framework 210, left side wall framework 220, right side wall framework 230, rear wall framework 240 and top board on 204 or top Framework 250.OLED print system 50 may be mounted on dish 204 top.

The gas confinement assembly instructed according to this and the OLED print system 50 of each embodiment of system can include example As: granite base portion；The movable bridge of OLED printing equipment can be supported；From each reality of pressurized inert gas recirculating system Execute one or more devices and equipment that example extends, such as, substrate suspending bench, air bearing, track, guide rail；For by OLED Film formation material is deposited on suprabasil inkjet printer system, including OLED ink supply subsystem and ink jet-print head；One Or multiple robots etc..Providing all parts that can include OLED print system 50, each of OLED print system 50 is implemented Example can have various floor space and form factor.

OLED ink-jet print system can include allowing ink droplet reliable arrangement multiple devices of ad-hoc location in substrate And equipment.These devices and equipment may include but be not limited to, print head assembly, ink induction system, motor system, substrate load and Uninstalling system and head maintenance system.Print head assembly includes at least one ink gun, with can be by ink droplet with controlled Speed, speed and at least one aperture of size injection.Ink gun is supplied by ink supply system, and ink is supplied to by ink supply system Ink gun.Print the relative motion needed between print head assembly and substrate.This completes by means of motor system, it is common that gantry Frame or separation axle XYZ system.Print head assembly can move (portal frame type) in anchoring base, or in point off-axis configuration In the case of, printhead and substrate both can be moved.In another embodiment, printing station can be fixed, and substrate is permissible Move relative to printhead at X and Y-axis, and Z axis motion provides at substrate or printhead.When printhead moves relative to substrate Time dynamic, ink droplet sprays in orthochronous to be deposited on desired locations in substrate.Substrate uses substrate loading and uninstalling system to insert Printer and removing from printer.Depending on that printer configures, this can be by machinery carrier, substrate suspending bench or have end The robot of executor completes.Head maintenance system can include multiple subsystem, and it allows such as drop volume to demarcate, spray Ink is ejected into the maintenance task in useless pond by the scraping on injection nozzle surface, startup.

According to each embodiment of this teaching assembling gas lock, anterior as shown in fig. 13 that or the first wall framework 210, left side or the second wall framework 220, right side or the 3rd wall framework 230, rear portion or the 4th wall framework 250 and top board framework 250 can be built together in systematic order, are then attached to the dish 204 being arranged on base portion 202.Each of framing component is real Executing example can use gantry to be positioned on cushion block to prevent from damaging compressible pad sheet material, as mentioned before.Such as, Using gantry, front walls framework 210 can rest upon at least three cushion block, such as the week of the dish 204 shown in Figure 12 A Pad 93,95 and 97 on limit top edge 201.After front walls framework 210 is placed on cushion block, wall framework 220 and wall framework 230 Periphery edge 203 and the periphery edge 205 being arranged on dish 204 can be placed sequentially in succession or in any order On cushion block on.According to each embodiment of this teaching assembling gas lock from component framework component, front walls framework 210 can be placed on cushion block, left side wall framework 220 and right side wall framework 230 are placed on cushion block subsequently so that they arrive Position is to be bolted connection or to be otherwise fastened to front walls framework 210.In various embodiments, rear wall framework 240 can To be placed on cushion block so that they put in place be bolted connection or be otherwise fastened to left side wall framework 220 and right side Wall framework 230.For each embodiment, once wall framing component tightens together to form adjacent wall framework closed component, top Portion's top board framework 250 is secured to this wall framework closed component to form whole gas closed frame assembly.It is being used for In each embodiment of this teaching building gas confinement assembly, in this assembling stage, whole gas closed frame assembly rests upon To protect the globality of each framing component pad on the plurality of cushion block.

As shown in Figure 14 A, for each embodiment of this teaching for building gas confinement assembly, gas confinement framework Then assembly 400 can be positioned so that pad can be removed to prepare gas confinement frame assembly 400 is attached to dish 204.Figure 14A shows that gas confinement frame assembly 400 uses lifter assembly 402, lifter assembly 404 and lifter assembly 406 liters Up to promote and leave the position of cushion block from cushion block.In this each embodiment instructed, lifter assembly 402,404 and 406 Can attach around the periphery of gas confinement frame assembly 400.After lifter assembly is attached, the gas envelope built completely Close frame assembly and with rising or each lifter assembly can be stretched out and lift-off cushion block by activating each lifter assembly, thus Raise gas confinement frame assembly 400.As shown in Figure 14 A, gas confinement frame assembly 400 is shown as being thus lifted to previously rest upon Above multiple cushion blocks thereon.Then the plurality of cushion block can be removed the position that rests upon from dish 204, thus framework is then Can be reduced on dish 204 and be then attached to dish 204.

Figure 14 B is the exploded view of the identical lifter assembly 402 of each embodiment according to this lifter assembly instructed, As shown in Figure 11 A.As it can be seen, lifter assembly 402 includes wear prevention pad 408, installing plate 410, first clamp bearing 412 and Second clamp bearing 413.First clamp 414 and second clamp 415 are shown as being in line with corresponding clip bearing 412 and 413.Thousand Jin top bent axle 416 is attached to the top of very heavy apical axis 418.Trailer jack 520(trailer jack) it is shown as perpendicular to thousand Jin apical axis 418 and be attached to very heavy apical axis 418.Jack base portion 422 is shown as a part for the bottom of very heavy apical axis 418. Being foot abutment 424 below jack base portion 422, it is configured to receive the bottom of very heavy apical axis 418 and may be connected to it On.Smoothing foot (leveling foot) 426 is also shown as and is configured to be received by foot abutment 424.Ordinary skill Personnel can will readily recognize that, any means being suitable for lifting operation may be used to raise gas confinement frame set from cushion block Part, thus cushion block can be removed and intact gas confinement assembly can be reduced on dish.Such as, said one is replaced Or multiple lifter assembly, such as 402,404 and 406, it is possible to use hydraulic pressure, pneumatically or electrically lifter.

According to each embodiment of this teaching for building gas confinement assembly, multiple securing members can provide and configure Become to be tightened together by the plurality of framing component, and then gas confinement frame assembly is fastened to dish.The plurality of fastening Part can include being arranged on along each edge of each framing component corresponding frame component be configured to in multiple framing components One or more fastener portion of the position that adjoining frame members intersects.The plurality of securing member and sealant compressible shim are permissible It is arranged so that sealant compressible shim is arranged close to inside and hardware is close outside when framing component combines, thus hardware Multiple leakage paths of the airtight body closed component of this teaching will not be provided.

The plurality of securing member can include multiple bolts at the edge along one or more framing components and along multiple frames Multiple screwed holes at the edge of the one or more different frames components in frame member.The plurality of securing member can include multiple spiral shell Bolt (captured bolt) fixed by cap.Described bolt can include the bolt head being extended the outer surface of the corresponding panel.Spiral shell Bolt can sink in the recess in framing component.Clip, screw, rivet, binding agent and other securing member may be used for framework Component tightens together.Bolt or other securing member may extend through the outer wall of one or more framing component and enter one Or in screwed hole in the sidewall of multiple adjoining frame members or roof or other complementary fasteners feature.

As seen in figs. 15-17, for building each embodiment of the method for gas lock, tubing can be pacified It is contained in and is combined in the interior section formed by wall framework and top board framing component.For each embodiment of gas confinement assembly, Tubing can be installed during building process.Each embodiment instructed according to this, tubing may be mounted at by many In the gas confinement frame assembly that individual framing component builds.In various embodiments, tubing can be at multiple framing components It is arranged on multiple framing component in conjunction with before forming gas confinement frame assembly.Each of gas confinement assembly and system is real Execute the tubing of example to can be configured so that and be drawn into tubing substantially from one or more tubing entrances All gas is all moved through each embodiment in gas filtration loop, for removing the particulate matter in gas confinement assembly. Additionally, the tubing of each embodiment of gas confinement assembly and system can be configured to the gas of gas confinement component external From gas filtration loop separately, gas filtration loop is for removing in gas confinement assembly for the entrance and exit of body purification circuit Particulate matter.Each embodiment according to this tubing instructed can be made up of sheet metal, big such as but not limited to having The aluminium flake of about 80 mil thickness.

Figure 15 shows the right front imagination axonometric chart of the piping components 500 of gas confinement assembly 100.Closed conduct system System assembly 500 can have front walls panel piping components 510.As it can be seen, front walls panel piping components 510 Can have front walls panel entry pipeline the 512, first front walls panel standpipe 514 and the second front walls panel standpipe 516, its Both it is in fluid communication with front walls panel entry pipeline 512.First front walls panel standpipe 514 is shown as having outlet 515, Outlet 515 sealably engages with the top board pipeline 505 of fan filter unit lid 103.In a similar manner, the second anterior wall Plate standpipe 516 is shown as having outlet 517, and the top board pipeline 507 of outlet 517 and fan filter unit lid 103 is sealably Engage.In this respect, front walls panel piping components 510 provides and is used for the noble gas in gas confinement assembly the end of from Portion is circulated, and uses front walls panel entry pipeline 512, by each front walls panel standpipe 514 and 516, and respectively by air Carry by outlet 505 and 507, thus air can be filtered by such as fan filter unit 752.Such as more detailed institute subsequently Stating, the quantity of fan filter unit, size and dimension can be according to the physical bit of the substrate in print system during process Put and select.Heat exchanger 742 is near fan filter unit 752, as a part for heat regulating system, and can be logical by circulation The noble gas crossing gas confinement assembly 100 is maintained at preferred temperature.

Right side wall panel piping components 530 can have right side wall panel inlet duct 532, and it passes through right side wall Plate the first standpipe 534 and right side wall panel the second standpipe 536 are in fluid communication with right side wall panel upper pipe 538.Right side wall Plate upper pipe 538 can have the first entrance end 535 and second pipe outlet end 537, the second pipe port of export Portion 537 is in fluid communication with the rear wall upper panel pipeline 536 of rear wall piping components 540.Left side wall panel pipeline system System assembly 520 can have and for parts identical described in right side wall panel assembly 530, wherein, at Figure 15 it can be seen that pass through The left side wall panel entry pipeline that first left side wall panel standpipe 524 is in fluid communication with left side wall upper panel pipeline (not shown) 522 and the first left side wall panel standpipe 524.Rear wall panel piping components 540 can have rear wall panel entry pipe Road 542, rear wall panel entry pipeline 542 is in fluid communication with left side wall panel assembly 520 and right side wall panel assembly 530.This Outward, rear wall panel piping components 540 can have rear wall panel bottom pipe 544, rear wall panel bottom pipe 544 can have rear wall panel the first entrance 541 and rear wall panel the second entrance 543.Rear wall panel bottom pipe 544 can To be in fluid communication with rear wall upper panel pipeline 536 via the first bulkhead 547 and the second bulkhead 549, described bulkhead structure can For being fed to inside such as but not limited to the various bundles of cable, line and pipeline etc. from the outside of gas confinement assembly 100. Pipeline tapping 533 is provided for the bundle of cable, line and pipeline etc. is removed rear wall upper panel pipeline 536, and it can be via Bulkhead 549 is through upper pipe 536.Bulkhead 547 and bulkhead 549 can use removably insertable panel airtight close on outside Envelope, as mentioned before.Rear wall upper panel pipeline is by showing one corner in vent 545(Figure 15) and such as but It is not limited to fan filter unit 754 be in fluid communication.In this respect, left side wall panel piping components 520, right side wall panel Piping components 530 and rear wall panel piping components 540 provide for by the noble gas in gas confinement assembly From bottom cycle, using Wall board inlet duct 522,532 and 542 and front panel lower pipeline 544 respectively, it is by front Each standpipe of stating, pipeline, bulkhead passage etc. are in fluid communication with vent 545, thus air can pass through such as fan filter Device unit 755 filters.Heat exchanger 745 is near fan filter unit 755, as a part for heat regulating system, and can be by The noble gas cycling through gas confinement assembly 100 is maintained at preferred temperature.

In fig. 15 it is shown that fed by the cable of opening 533.As the most described in more detail, the gas envelope of this teaching Each embodiment closing assembly provides for making the bundle of cable, line and pipeline etc. pass through tubing.In order to eliminate this The leakage paths that bundle is around formed, it is possible to use for using different size cable, line and the pipeline in compliant materials sealed beam Each method.Also show pipe I and pipe II for closed pipe system assembly 500 in Figure 15, it is shown as fan filter A part for device unit cover 103.Pipe I provides the inert gas outlet to extraneous gas cleaning system, and pipe II provides to gas Filtration and the purification noble gas of closed circuit within closed component 100 return.

Figure 16 shows the imaginary top perspective view of closed pipe system assembly 500.Can be seen that left side wall panel pipe Road system component 520 and the symmetric property of right side wall panel piping components 530.For right side wall panel piping components 530, right side wall panel inlet duct 532 is by right side wall panel the first standpipe 534 and right side wall panel the second standpipe 536 and the right side Sidewall panel upper pipe 538 is in fluid communication.Right side wall panel upper pipe 538 can have the first entrance end 535 With second pipe outlet end 537, second pipe outlet end 537 and the rear wall panel of rear wall piping components 540 Upper pipe 536 is in fluid communication.Similarly, left side wall panel piping components 520 can have left side wall panel entry pipe Road 522, left side wall panel entry pipeline 522 by left side wall panel the first standpipe 524 and left side wall panel the second standpipe 526 with Left side wall upper panel pipeline 528 is in fluid communication.Left side wall upper panel pipeline 528 can have the first entrance end 525 and second pipe outlet end 527, the rear portion wall of second pipe outlet end 527 and rear wall piping components 540 Plate upper pipe 536 is in fluid communication.Additionally, rear wall panel piping components can have rear wall panel entry pipeline 542, rear wall panel entry pipeline 542 is in fluid communication with left side wall panel assembly 520 and right side wall panel assembly 530.Additionally, Rear wall panel piping components 540 can have rear wall panel bottom pipe 544, rear wall panel bottom pipe 544 Can have rear wall panel the first entrance 541 and rear wall panel the second entrance 543.Rear wall panel bottom pipe 544 is permissible It is in fluid communication with rear wall upper panel pipeline 536 via the first bulkhead 547 and the second bulkhead 549.Shown in Figure 15 and Figure 16 Piping components 500 can provide noble gas, and from the Efficient Cycle of anterior Wall board piping components 510, (it is by inertia Gas is recycled to ceiling panel pipeline via front walls Face plate outlet 515 and 517 respectively from anterior Wall board inlet duct 512 505 and 507) and from left side wall panel assembly 520, right side wall panel assembly 530 and rear wall panel piping components 540 Efficient Cycle (air is recycled to vent 545 from inlet duct 522,532 and 542 respectively).Once noble gas via Ceiling panel pipeline 505 and 507 and vent 545 be discharged to the closing under the fan filter unit lid 103 of locking device 100 Region, the noble gas so discharged can be filtered by fan filter unit 752 and 754.Additionally, the noble gas of circulation Can be a part for heat regulating system by heat exchanger 742 and 744() it is maintained at preferred temperature.

Figure 17 is the imaginary upward view of closed pipe system assembly 500.Inlet ductwork assembly 502 includes fluid each other Connection front walls panel entry pipeline 512, left side wall panel entry pipeline 522, right side wall panel inlet duct 532 and after Portion's Wall board inlet duct 542.The each inlet duct included for Inlet ductwork assembly 502, exists along each pipe What road bottom even was distributed understands opening, and many group openings are emphasized especially, and the purpose instructed for this, as front walls panel enters The mouth opening 511 of pipeline 512, the opening 521 of left side wall panel entry pipeline 522, the opening of right side wall panel inlet duct 532 531 and the opening 541 of right side wall panel inlet duct 542.In the bottom of each inlet duct it will be seen that this opening carries For effectively absorbing in locking device 100 for noble gas, for circulation continuously and filtration.Each of gas confinement assembly In the circulation continuously of the noble gas of embodiment and filtration provide each embodiment for keeping gas confinement component system There is no the environment of granule.Each embodiment of gas confinement component system may remain in ISO for particulate matter 4 grades of 14644.Each embodiment of gas confinement component system may remain in for the process that particle contamination is especially sensitive 3 grades of specifications of ISO 14644.As it was noted above, pipe I offer is to the inert gas outlet of extraneous gas cleaning system, and pipe II The purification noble gas provided to the filtration within gas confinement assembly 100 and closed circuit returns.

In each embodiment of the gas confinement component system instructed according to this, the bundle of cable, line and pipeline etc. is permissible It is fed through pipeline, in order to the reactive ambient gas in the dead band of the bundle that purging is trapped in cable, line and pipeline etc., such as water Steam and oxygen.According to this teaching, it has been found that the dead band formed in the bundle of cable, line and pipeline forms retained reactivity The reservoir of material, its can extend significantly so that gas confinement assembly meet perform air-sensitive process specification needed for Time.Gas confinement assembly and each embodiment of system, various reactivities for this teaching for printing OLED device Every kind of material in material (including various reactive ambient gas, such as water vapour and oxygen, and organic vapor) is all May remain in such as 100 ppm or lower, 10 ppm or lower, 1.0 ppm or lower or 0.1 ppm or lower.

In order to be understood by the cable of pipeline feeds how to cause the minimizing dead appearance from the cable that ties in, line and pipeline etc. Long-pending purging retains the time needed for reactive ambient gas, with reference to Figure 18 A-19.Figure 18 A shows the enlarged drawing of bundle I, and bundle I can Being to include that pipeline is (such as, for various ink, solvent etc. flow to the pipe of print system (such as the print system 50 of Figure 13) Line A) bundle.The bundle I of Figure 18 A can also include electric wire (such as electric wire B) and cable (such as coaxial cable C).This pipeline, line Route to inside together with can tying in cable and from outside and (include that OLED prints system to be connected to various device and equipment System).In the shadow region of Figure 18 A it can be seen that this bundle can form substantial amounts of dead band D.Schematic perspective view at Figure 18 B In, when cable, line and bale of pipeline I are fed through pipeline II, noble gas III can continuously sweep described bundle.Figure 19's Amplification sectional view shows that the noble gas continuously sweeping the pipeline that ties in, line and cable can increase the most effectively from this bundle The dead volume of middle formation removes the speed of retained reactive materials.Reactive materials A leave dead volume (in Figure 19 by by The overall area that substance A occupies represents) diffusion rate and dead volume outer (by being occupied by inert gas species B in Figure 19 Overall area represents) reactive species concentrations be inversely proportional to.If that is, reactive materials in the just volume outside dead volume Concentration is high, then diffusion rate reduces.If the reactive species concentrations in this region is from just dead volume space Volume reduces (by the flowing stream of noble gas, then pass through mass action) continuously, then reactive materials expands from dead volume The speed dissipated increases.Additionally, by same principle, noble gas can be spread in dead volume, because being retained reactive thing Matter is removed from these spaces effectively.

Figure 20 A is the axonometric chart of the back angle of each embodiment of gas confinement assembly 600, and imaginary drawing passes return duct 605 inside entering gas confinement assembly 600.For each embodiment of gas confinement assembly 600, rear wall panel 640 can To have insertion panel 610, insert panel 610 and be configured to provide at the path of such as electrically bulkhead.Cable, line and pipeline etc. Bundle can be fed through bulkhead and enter cable wiring conduit, the such as pipeline 632 shown in right side wall panel 630, to this end, can Dismounting is inserted panel and has been dismantled the bundle routing in the first cable, line and bale of pipeline conduit entrance 636 with exposure.From here, Described bundle can be fed to the inside of gas confinement assembly 600, and by the inside of gas confinement assembly 600 in imaginary drawing Return duct 605 illustrate.Each embodiment for the gas confinement assembly of cable, line and bale of pipeline wiring can have many In a cable, line and bale of pipeline import, as shown in FIG. 20 A, it illustrates the first bundle conduit entrance 634 and restraint for another Second bundle conduit entrance 636.Figure 20 B shows the enlarged drawing of the bundle conduit entrance 634 for cable, line and bale of pipeline.Beam tube Road import 634 can have features designed to form, with slide lid 633, the opening 631 sealed.In various embodiments, opening 631 can To accommodate flexible sealing module, such as, being provided by the Roxtec Company sealed for cable entries, it can accommodate bundle In the cable of various diameters, line and pipeline etc..Alternatively, the top 635 of slide lid 633 and the upper part 637 of opening 631 Can have the compliant materials arranged on each surface, thus compliant materials can (e.g., beam tube road enters being fed through import Mouthfuls 634) the cable of various sizes diameter, line and pipelines in bundle etc. are around formed and seal.

Figure 21 is the gas confinement assembly of the upward view of each embodiment of the ceiling panel of this teaching, such as Fig. 3 and is The ceiling panel 250 ' of system 100.According to each embodiment of this teaching assembling gas lock, illuminator can be installed In the inside top surface of ceiling panel (the gas confinement assembly of such as Fig. 3 and the ceiling panel 250 ' of system 100).Such as Figure 21 Shown in, illuminator can be arranged on the interior section of each framing component by the top board framework 250 with interior section 251 On.Such as, top board framework 250 can have two top board framework sections 40, and top board framework section 40 is generally of two top board frames Set a roof beam in place 42 and 44.Each top board framework section 40 can have the first side 41 towards top board framework 250 positioned internal and towards Second side 43 of the outside location of top board framework 250.For providing each reality instructed according to this of illumination for gas lock Execute example, illumination component 46 can be installed right.Every pair of illumination component 46 can include the first illumination component 45 near the first side 41 The second illumination component 47 with the second side 43 near top board framework section 40.The quantity of the illumination component shown in Figure 21, location It is exemplary with packet.The quantity of illumination component and packet can be with any desired or suitable method changes.Implement at each In example, illumination component can be installed straightly, and in other embodiments, may be mounted so that they can move to each Position and angle.The setting of illumination component is not limited to top panel top board 433, but in addition to that or replace permissible It is positioned in the gas confinement assembly shown in Fig. 3 and other inner surface any of system 100, outer surface and surface combination.

Various illumination components can include any quantity, the lamp of type or combination, such as halogen light modulation, white lamp, incandescence, arc Light modulation or light emitting diode or device (LED).Such as, each illumination component can include 1 LED to about 100 LED, greatly About 10 LED to about 50 LED, or more than 100 LED.LED or other illuminator can send in chromatograph, chromatograph Outer or any color of a combination thereof or color combination.Each according to the gas confinement assembly for inkjet printing OLED material is real Execute example, because the photaesthesia that some materials are to some wavelength, thus it is arranged on the light wave of the illuminator in gas confinement assembly Length can be specifically chosen, and during avoiding process, material is demoted.It is, for example possible to use 4X cool white LED, it is possible to use 4X yellow led or its any combination.The example of 4X cool white LED be can from IDEC Corporation of Sunnyvale, The LF1B-D4S-2THWW4 that California obtains.The example of the 4X yellow led that can use is can also be from IDEC The LF1B-D4S-2SHY6 that Corporation obtains.LED or other illumination component can be from the interior sections of top board framework 250 Any location positioning on 251 or on another surface of gas confinement assembly or suspension.Illumination component is not limited to LED.Can To use any suitable illumination component or the combination of illumination component.Figure 22 is the curve chart of IDEC LED light spectrum, and shows X-axis that peak strength is corresponding with intensity when being 100% and the y-axis corresponding with wavelength (unit: nanometer).Show that LF1B is yellow Color type, yellow fluorescence lamp, LF1B white type LED, LF1B cool white type LED and the frequency spectrum of LF1B redness type LED.Root Each embodiment instructed according to this, it is possible to use other spectrum and spectral combination.

Recall, each embodiment of gas confinement assembly can with minimize gas confinement assembly internal capacity and Optimization Work space builds in the way of accommodating the various floor spaces of various OLED print systems simultaneously.The gas so built Each embodiment of closed component be also prone to during process gas confinement assembly accessible from the outside inside and easily accessible in Portion, to safeguard, minimizes downtime simultaneously.In this respect, each embodiment according to this gas confinement assembly instructed can Wide with the various floor space fixed wheels about various OLED print systems.

Those of ordinary skill is appreciated that for framing component structure, panel structure, framework and panel sealing and gas This teaching of the structure of closed component (such as, the gas confinement assembly 100 of Fig. 3) can apply to have various sizes and design Gas confinement assembly.Such as but not limited to, contain the fixed wheel exterior feature gas envelope of this teaching of size of foundation base Gen 3.5 to Gen 10 Each embodiment closing assembly can have at about 6 m³To about 95 m³Between internal capacity, and can be for non-fixed wheel Wide and there is the locking device of suitable nominal dimension save volume between about 30% to about 70%.Gas confinement assembly each Individual embodiment provides the profile for gas confinement assembly so that each framing component is built into, in order to accommodates OLED and prints System for its function and simultaneously Optimization Work space to minimize noble gas volume, and also allow for being easy to during process from Outside close to OLED print system.In this respect, each gas confinement assembly of this teaching can be in profile layout and volume side Face changes.

Figure 23 provides the example according to this gas confinement assembly instructed.Gas confinement assembly 1000 can include forward frame Assembly 1100, central frame assembly 1200 and rear frame assembly 1300.Forward frame assembly 1100 can include forward frame base Portion 1120, front walls framework 1140 and anterior top board framework 1160, front walls framework 1140 has the opening for receiving substrate 1142.Central frame assembly 1200 can include central frame base portion 1220, right-hand member wall framework 1240, midfeather framework 1260 and a left side End wall framework 1280.Rear frame assembly 1300 can include rear frame base portion 1320, rear wall framework 1340 and rear portion top board Framework 1360.Region shown in shade shows the available work volume of gas confinement assembly 1000, and it is to can be used for accommodating The volume of OLED print system.Each embodiment fixed wheel exterior feature of gas confinement assembly 1000 is for minimizing operation air-sensitive process The volume of the recirculation noble gas needed for (such as, OLED print procedure), and allow to be conveniently accessible to OLED print system simultaneously (the most remotely or directly by can easily disassembled panel have easy access to).For containing size of foundation base Gen Each embodiment of the gas confinement assembly of this teaching of 3.5 to Gen 10, the fixed wheel exterior feature gas confinement assembly instructed according to this Each embodiment can have at about 6 m³To about 95 m³Between gas confinement volume, such as but not limited to about 15 m³To about 30 m³Between, for the OLED of such as Gen 5.5 to Gen 8.5 size of foundation base prints, this has been probably ?.

Gas confinement assembly 1000 can have in this teaching for the institute described in example gases closed component 100 There is feature.Such as but not limited to, gas confinement assembly 1000 can use the sealing instructed according to this, to provide through several structures Build and deconstruct the gas-tight seal locking device of circulation.Each embodiment of gas confinement system based on gas confinement assembly 1000 Can have gas purge system, various reactive materials (can be included various reactive ambient gas, such as water vapour by it And oxygen, and organic vapor) the level of every kind of material be maintained at such as 100 ppm or lower, 10 ppm or lower, 1.0 ppm or lower or 0.1 ppm or lower.

Additionally, each embodiment of gas confinement component system based on gas confinement assembly 1000 can have circulation and Filtration system, its can provide meet ISO 14644 3 grades and 4 grades clean room standards without particle environments.Additionally, as subsequently Shown in more detail, based on this gas confinement assembly instructed (such as, gas confinement assembly 100 and gas closed component 1000) Gas confinement component system can have each embodiment of pressurized inert gas recirculating system, and it may be used for operating such as But be not limited to following in one or more: pneumatic robot, substrate suspending bench, air bearing, air lining, compressed gas work Tool, pneumatic actuator, and combinations thereof.The gas lock instructed for this and each embodiment of system, use various gas Device and the equipment of dynamic operation can provide low particles generation performance and low-maintenance cost.

Figure 24 is the exploded view according to this gas confinement assembly 1000 instructed, it is illustrated that can be constructed to provide airtight Seal each framing component of gas lock.Each enforcement as described previously for the gas lock 100 of Fig. 3 and Figure 13 Described in example, OLED ink-jet print system 50 can include allowing ink droplet reliable arrangement in the upper certain bits of substrate (such as substrate 60) The multiple devices put and equipment, illustrate near substrate suspending bench 54.Provide each portion that can include OLED print system 50 Part, each embodiment of OLED print system 50 can have various floor space and form factor.According to OLED inkjet printing Each embodiment of system, various base materials may be used for substrate 60, such as but not limited to various glass substrate material and Various polymeric base material.

According to each embodiment of this gas confinement assembly instructed, as described previously for described in gas lock 100, gas The structure of body closed component can be carried out around whole OLED print system, with minimize gas confinement assembly volume and It is conveniently accessible to inside.In fig. 24, the example that fixed wheel is wide can consider that OLED print system 50 provides.

As shown in figure 24, OLED print system 50 can exist six isolators, it can be seen that two of which: first Isolator 51 and the second isolator 53, it supports the substrate suspending bench 54 of OLED print system 50.Except all with visible first every Outside two additional isolator that device 51 is relative with the second isolator 53, there are support OLED print system base portion 52 two Isolator.Closed front base portion 1120 can have the first closed front supporting the first closed front isolator wall framework 1123 Isolator bearing 1121.Second closed front isolator wall framework 1127 is propped up by the second closed front isolator bearing (not shown) Support.Similarly, middle sealed end region 1220 can have in the middle of the first of support first middle closing isolator wall framework 1223 Close isolator bearing 1221.Close isolator wall framework 1227 in the middle of second (not shown by the second middle isolator bearing of closing Go out) support.Finally, after rear closure base portion 1320 can have the first of the middle closing in support rear portion isolator wall framework 1323 Portion closes isolator bearing 1321.Second rear closure isolator wall framework 1327 is by the second rear closure isolator bearing (not Illustrate) support.Each embodiment of isolator wall framing component can around each isolator fixed wheel wide, thus minimize every Volume around individual isolator supporting member.Additionally, each isolator wall framework for base portion 1120,1220 and 1320 illustrates Shade panel section be demountable detachable panel, such as so as maintenance isolator.Closed front assembly base portion 1120 Can have dish 1122, middle closed component base portion 1220 can have dish 1222, and rear closure assembly base portion 1320 Can have dish 1322.When base portion builds completely to form adjacent base portion, OLED print system may be mounted at and is consequently formed Adjacent dish on, in the way of being similar to be arranged on the dish 204 of Figure 13 OLED print system 50.As it was noted above, wall and The wall framework 1140 of top board framing component, such as forward frame assembly 1100, top board framework 1160；Central frame assembly 1200 Wall framework 1240,1260 and 1280；And the wall framework 1340 of rear frame assembly 1300, top board framework 1360, the most permissible Combine around OLED print system 50.Thus, each reality of contoured wall framing component is determined in the gas-tight seal of this teaching Execute the noble gas volume that example efficiently reduces in gas confinement assembly 100, and simultaneously facilitate close to OLED print system each Individual device and equipment.

The gas confinement assembly instructed according to this and system can have gas confinement component internal gas circulate and Filtration system.This self-filtering system can have the multiple fan filter units in inside, and can be configured to Inside provides gas laminar flow.Laminar flow can be to the direction of internal bottom or other side any from internal top To.Although the gas stream produced by blood circulation needs not be laminar flow, but gas laminar flow can be used to ensure that in inside Thoroughly and completely having enough to meet the need of gas.Gas laminar flow can be also used for minimizing turbulent flow, and this turbulent flow is undesirable, because it can So that the powder collection in environment is in this regions of turbulent flow, thus prevent filtration system from removing those granules from environment.Additionally, In order to keep preferred temperature in inside, it is provided that use the heat regulating system of multiple heat exchanger, such as by means of fan Or the operation of another gas-recycling plant, near fan or another gas-recycling plant, or with fan or another gas Circulating device is used in combination.Gas purification loop can be configured to by least one the gas purification portion outside locking device Part is from gas confinement component internal recyclegas.In this respect, the filtration of gas confinement component internal and blood circulation and gas Gas purification loop outside closed component combines can provide the notable low particulate inert gas running through in gas confinement assembly Continuous circulation, it has notable low-level reactive materials.Gas purge system can be configured to keep very low-level Be not intended to composition, such as organic solvent and steam thereof and water, water vapour, oxygen etc..

Figure 25 shows gas confinement assembly and the schematic diagram of system 2100.Gas confinement assembly and system 2100 each Individual embodiment can include gas confinement assembly 1500 and the gas of gas confinement assembly 1500 fluid communication instructed according to this Purification circuit 2130 and at least one heat regulating system 2140.Additionally, each embodiment of gas confinement assembly and system can To have pressurized inert gas recirculating system 2169, it can be beaten to operate each device, such as OLED with supplying inert gas The substrate suspending bench of print system.Each embodiment of pressurized inert gas recirculating system 2169 can use compressor, air blast Machine and both combinations, as the source of each embodiment of noble gas recirculating system 2169, as the most described in more detail.This Outward, gas confinement assembly and system 2100 can have in the filtration within gas confinement assembly and system 2100 and blood circulation (not shown).

As shown in figure 25, each embodiment of the gas confinement assembly for instructing according to this, the design of pipeline can be by Cycle through the noble gas of gas purification loop 2130 from each embodiment of gas confinement assembly internal filter continuously and The noble gas of circulation is separately.Gas purification loop 2130 includes egress line 2131, its from gas confinement assembly 1500 to molten Agent removing component 2132 and then arrive gas purge system 2134.It is cleaned solvent and other reactant gas material (such as oxygen Gas and water vapour) noble gas then return gas confinement assembly 1500 by inlet line 2133.Gas purification loop 2130 can also include properly managing and connecting, and sensor, such as oxygen, water vapour and solvent vapo(u)r sensor.Gas follows Ring element, such as fan, aerator or motor etc., can be independently arranged or be integrally formed in such as gas purge system 2134 In, gas to be cycled through gas purification loop 2130.Each embodiment according to gas confinement assembly, although solvent is removed System 2132 and gas purge system 2134 are shown as separate unit in the schematic diagram shown in Figure 25, but system removed by solvent 2132 can be contained in as single clean unit with gas purge system 2134 together with.Heat regulating system 2140 can include at least One cooler 2141, it can have fluid issuing circuit 2143 He for being recycled to by coolant in gas confinement assembly For making coolant return the fluid intake circuit 2145 of cooler.

The gas purification loop 2130 of Figure 25 can have be arranged on gas purge system 2134 upstream solvent remove system System 2132, thus remove system via egress line 2131 by solvent from the noble gas of gas confinement assembly 1500 circulation 2132.According to each embodiment, system 2132 removed by solvent can be to remove system 2132 based on from by the solvent of Figure 25 The solvent capture systems of noble gas lyosoption steam.Sorbent bed or multiple beds, such as but not limited to activated carbon, molecular sieve Deng, can effectively remove the various organic vapors of wide scope.For each embodiment of gas confinement assembly, can adopt Use cold capture technique, to remove the solvent vapo(u)r in solvent removal system 2132.As it was noted above, for the gas instructed according to this Each embodiment of body closed component, it is possible to use sensor, such as oxygen, water vapour and solvent vapo(u)r sensor, with monitoring This material is from being continuously circulated through the lazy of gas confinement component system (such as, the gas confinement component system 2100 of Figure 25) Property gas effective removal.Solvent is removed each embodiment of system and be may indicate that absorbent (such as activated carbon, molecular sieve etc.) When arrive capacity, thus sorbent bed or multiple bed can regenerate or change.The regeneration of molecular sieve can include heating molecular sieve, Molecular sieve is contacted with forming gas, and combinations thereof etc..It is configured to capture each material (including oxygen, water vapour and solvent) Molecular sieve can by heating and being exposed to include hydrogen forming gas (such as, including about 96% nitrogen and 4% The forming gas of hydrogen) and regenerate, described percentage ratio is volume ratio or weight ratio.The physics regeneration of activated carbon can use lazy Property environment under heating similar procedure complete.

Any suitable gas cleaning system may be used to the gas purge system of the gas purification loop 2130 of Figure 25 2134.Such as, can be from MBRAUN Inc., of Statham, New Hampshire or Innovative Technology The gas purge system that of Amesbury, Massachusetts obtain can be used for being integrally formed in the gas instructed according to this In each embodiment of closed component.Gas purge system 2134 may be used for purifying in gas confinement assembly and system 2100 One or more noble gases, such as, to purify all gas environment in gas confinement assembly.As it was noted above, in order to make Obtaining gas and cycle through gas purification loop 2130, gas purge system 2134 can have gas circulation unit, such as fan, drum Blower fan or motor etc..In this respect, gas purge system can select according to the volume of locking device, and it can limit and be used for making Obtain noble gas and be moved through the volume flow rate of gas purge system.For including having up to about 4 m³The gas of volume The gas confinement assembly of body closed component and each embodiment of system；Can use and can move about 84 m³The gas of/h Cleaning system.For including having up to about 10 m³The gas confinement assembly of gas confinement assembly of volume and system Each embodiment；Can use and can move about 155 m³The gas purge system of/h.For having about 52-114 m³ Between each embodiment of gas confinement assembly of volume；More than one gas purge system can be used.

Any suitable gas filter or purifier can be included in the gas purge system 2134 of this teaching.One In a little embodiments, gas purge system can include two purifiers in parallel, thus device can with off-line take away for Safeguard, and another device may be used for the operation of continuation system, and do not interrupt.In certain embodiments, such as, gas purification System can include one or more molecular sieve.In certain embodiments, gas purge system can at least include the first molecular sieve and Second molecular sieve, thus saturated at molecular sieve impurity or otherwise think when can not sufficiently effective operate, system Another molecular sieve can be switched to, regenerate the saturated or molecular sieve of poor efficiency simultaneously.Control unit can provide and be used for determining often The operating efficiency of individual molecular sieve, switches between the operation at different molecular sieve, is used for regenerating one or more molecular sieve, or For a combination thereof.As it was noted above, molecular sieve can be reproduced and reuse.

About the heat regulating system 2140 of Figure 25, at least one fluid cooler 2141 can be set, be used for cooling down gas Gaseous environment in closed component and system 2100.For each embodiment of this gas confinement assembly instructed, fluid cools down Cooling fluid is flowed to the heat exchanger in locking device by device 2141, and wherein, noble gas is through the mistake within locking device Filter system.At least one fluid cooler can also be arranged in gas confinement assembly and system 2100, comes from gas with cooling The heat of the equipment of encapsulation in locking device 2100.Such as but not limited to, at least one fluid cooler may be provided for Gas confinement assembly and system 2100, come from the heat of OLED print system with cooling.Heat regulating system 2140 can include heat friendship Change or Peltier device, and can have various cooling capacity.Such as, for each enforcement of gas confinement assembly and system Example, cooler can be provided in the cooling capacity between about 2 kW to about 20 kW.Fluid cooler 1136 and 1138 is permissible Cool down one or more fluids.In certain embodiments, fluid cooler can use multiple fluid as coolant, such as but Being not limited to, water, antifreezing agent, cold-producing medium and combinations thereof, as heat-exchange fluid.Suitably No leakage locking connection may be used for even It is connected to close pipe and system unit.

As shown in Figure 26 and Figure 27, one or more fan filter units can be configured to provide the gas by internal Substantially laminar flow.According to each embodiment of the gas confinement assembly instructed according to this, one or more fan units arrange and lean on First inner surface of nearly gaseous environment locking device, one or more tubing entrances are arranged close to gaseous environment locking device Relative second inner surface.Such as, gaseous environment locking device can include inner top and bottom inner rim, one or Multiple fan units can be arranged close to inner top, and the one or more tubing entrance can include being arranged close to the end Multiple entrance openings of portion's inner rim, it is a part for tubing, as seen in figs. 15-17.

Figure 26 is cutting of the length intercepting along the gas confinement assembly according to this each embodiment instructed and system 2000 Face figure.The gas confinement assembly of Figure 26 and system 2000 can include the gas lock that can accommodate OLED print system 50 1500 and gas purge system 2130(referring also to Figure 25), heat regulating system 2140, filter and blood circulation 2150 and pipe Road system 2170.Heat regulating system 2140 can include connecting with cooler outlet circuit 2143 and cooler inlet line 2145 fluid Logical fluid cooler 2141.Cooling fluid may exit off fluid cooler 2141, flows by cooler outlet circuit 2143, And flow to heat exchanger, for the gas confinement assembly shown in Figure 26 and each embodiment of system, it may be located at multiple Near each in fan filter unit.Fluid can be entered by cooler by the heat exchanger near fan filter unit Mouth circuit 2145 returns cooler 2141, to be maintained at constant preferred temperature.As it was noted above, cooler outlet circuit 2141 He Cooler inlet line 2143 connects with multiple heat exchanger fluid, including first heat exchanger the 2142, second heat exchanger 2144 and the 3rd heat exchanger 2146.According to the gas confinement assembly shown in Figure 26 and each embodiment of system, the first heat is handed over Parallel operation the 2142, second heat exchanger 2144 and the 3rd heat exchanger 2146 respectively with the first fan filter of filtration system 2150 Unit the 2152, second fan filter unit 2154 and three fan filter unit 2156 thermal communication.

In fig. 26, many arrows show the flowing of each fan filter unit round, and also show and including Flowing in the tubing 2170 of the first tubing pipe 2173 and second pipe system pipes 2174, the simplification such as Figure 26 is illustrated Shown in figure.First tubing pipe 2173 can be received gas by the first entrance 2171 and can be gone out by the first pipeline Mouth 2175 is discharged.Similarly, second pipe system pipes 2174 can receive gas and by the by second pipe entrance 2172 Two pipe outlets 2176 are discharged.Additionally, as shown in figure 26, tubing 2170 by effectively limit space 2180 and will including Portion is again circulated through the noble gas of filtration system 2150 separately, and space 2180 is via gas purification egress line 2131 and gas Body cleaning system 2130 is in fluid communication.The cyclic system of this each embodiment included for the tubing described in Figure 15-17 System provides substantially laminar flow, minimizes turbulent flow, promotes the circulation of particulate matter of gaseous environment in locking device inside, turnover And filtration, and offer is by the circulation of the gas purge system of gas confinement component external.

Figure 27 is the gas confinement assembly along each embodiment according to this gas confinement assembly instructed and system 23000 Length intercept sectional view.Similar with the gas confinement assembly 2200 of Figure 26, the gas confinement component system 2300 of Figure 27 can Including gas lock 1500, it can accommodate OLED print system 50 and gas purge system 2130(referring also to figure 25), heat regulating system 2140, filtration and blood circulation 2150 and tubing 2170.For gas confinement assembly 2300 Each embodiment, heat regulating system 2140 can include connecting with cooler outlet circuit 2143 and cooler inlet line 2145 fluid Logical fluid cooler 2141, can connect with multiple heat exchanger fluid, and the such as first heat exchanger 2142 and the second heat are handed over Parallel operation 2144, as shown in figure 27.According to the gas confinement assembly shown in Figure 27 and each embodiment of system, each heat exchange Device, the such as first heat exchanger 2142 and the second heat exchanger 2144, can be with the noble gas thermal communication of circulation, by location The first pipe outlet 2175 and second pipe outlet 2176 near pipe outlet, such as tubing 2170.In this respect, from Entrance (the first entrance 2171 of such as tubing 2170 and second pipe entrance 2172) return in case filter Noble gas can be at the first fan filter unit 2152, second of the filtration system 2150 cycling through such as Figure 27 respectively It is thermally regulated before fan filter unit 2154 and three fan filter unit 2156.

Arrow from the direction of the noble gas showing the locking device cycling through Figure 26 and 27 is it can be seen that fan Filter unit is configured to provide from locking device top down towards the substantially laminar flow of bottom.Such as, can be from Flanders Corporation, of Washington, North Carolina or Envirco Corporation of Sanford, The fan filter unit that North Carolina obtains can be used for being formed integral to according to this gas confinement assembly instructed In each embodiment.Each embodiment of fan filter unit can exchange the noble gas by each unit about 350 cubic feet/minute (CFM) are between about 700 CFM.As shown in figures 26 and 27, it is in also due to fan filter unit Connection rather than be arranged in series, thus the amount of the noble gas that can exchange in the system including multiple fan filter unit and The element number used is proportional.At the near-bottom of locking device, gas stream guides towards multiple tubing entrances, at figure The first entrance 2171 and second pipe entrance 2172 it is schematically illustrated as in 26 and 27.As described previously for Figure 15-17 institute State, entrance is positioned at the approximate bottom of locking device and gas is flowed downward profit from upper fan filter unit The good turnover of the gaseous environment in locking device, and promote gas purge system by being used in combination with locking device Thoroughly having enough to meet the need and mobile of all gas environment.Gaseous environment is made to cycle through pipe by using to filter with blood circulation 2150 The laminar flow of the gaseous environment in road system and promotion locking device and thoroughly turnover, tubing would circulate through gas purification and returns Separately, the level of every kind of reactive materials (such as water and oxygen, and every kind of solvent) is at gas for the inert gas flow on road 2130 Each embodiment of body closed component may remain in such as 100 ppm or lower, such as 1.0 ppm or lower, 0.1 ppm Or it is lower.

According to each embodiment of the gas confinement component system for OLED print system, the number of fan filter unit Amount can select according to the physical location of the substrate in print system during process.Therefore, although show in Figure 26 and 27 Go out 3 fan filter units, but the quantity of fan filter unit can change.Such as, Figure 28 is along gas confinement The sectional view that the length of assembly and system 2400 intercepts, it is similar with the gas confinement assembly shown in Figure 23 and Figure 24 and system. Gas confinement assembly and system 2400 can include gas confinement assembly 1500, and it accommodates the OLED being supported on base portion 52 and prints system System 50.The substrate suspending bench 54 of OLED print system be limited to substrate OLED print during substrate may move through system The stroke of 2400.Thus, the filtration system 2150 of gas confinement assembly and system 2400 has appropriate number of fan filter Unit；Shown in 2151-2155, corresponding by the physics stroke of OLED print system 50 with substrate during process.Additionally, The schematic cross sectional representation of Figure 28 has gone out the fixed wheel exterior feature of each embodiment of gas lock and can efficiently reduce at OLED Noble gas volume required during print procedure, and simultaneously facilitate the inside close to gas lock 1500 (in the process phase Between the most close, such as use and be arranged on the glove in each glove port, or by each in the case of attended operation Plant detachable panel to be immediately adjacent to).

Each embodiment of gas lock and system can use pressurized inert gas recirculating system, is used for operating Various pneumatic operation devices and equipment.Additionally, as it was noted above, the embodiment of the gas confinement assembly of this teaching can be relative to External environment condition is maintained at slight positive pressure, such as but not limited between about 2 mbarg to about 8 mbarg.At gas confinement Pressurized inert gas recirculating system is kept to be probably challenge in component system, because it has and keeps gas confinement group The balance play dynamically and persistently carried out that the slight positive internal pressure of part and system is relevant, and simultaneously continuously introduce to add and calm the anger Body is in gas confinement assembly and system.Additionally, the variable demand of each device and equipment is likely to be formed the various gas of this teaching Body closed component and the irregular pressure curve of system.Slight positive pressure will be maintained under these conditions relative to external environment condition Gas confinement assembly keeps dynamic pressure balance can provide the globality of the OLED print procedure for persistently carrying out.

As shown in figure 29, each embodiment of gas confinement assembly and system 3000 can have extraneous gas loop 2500, for integrating and controlling for gas confinement assembly and the inert gas source 2509 of the various aspects of the operation of system 3000 With clean dry air (CDA) source 2512.It will be appreciated by the skilled addressee that gas confinement system 3000 can also include Internal particle filters each embodiment with gas-circulating system and each embodiment of extraneous gas cleaning system, as above Described.Except in addition to integrating and controlling the external circuit 2500 in inert gas source 2509 and CDA source 2512, gas confinement group Part and system 3000 can have compressor loop 2160, and it can may be arranged on gas with supplying inert gas for operation Each device in closed component and system 3000 inside and equipment.

The compressor loop 2160 of Figure 29 can include compressor the 2162, first reservoir 2164 and being configured to fluid communication Second reservoir 2168.Compressor 2162 can be configured to the noble gas aspirated from gas confinement assembly 1500 is compressed to the phase Hope pressure.The entrance side of compressor loop 2160 can be via gas confinement module outlet 2501 by having valve 2505 and non-return The circuit 2503 of valve 2507 is in fluid communication with gas confinement assembly 1500.Compressor loop 2160 can be at compressor loop 2160 Outlet side on be in fluid communication with gas confinement assembly 1500 via extraneous gas loop 2500.Reservoir 2164 can be arranged on Between the joint portion in compressor 2162 and compressor loop 2160 and extraneous gas loop 2500, and can be configured to produce 5 Psig or higher pressure.Second reservoir 2168 may be in compressor loop 2160, lives due to compressor for damping Fill in and circulate, with about 60 Hz, the fluctuation caused.For each embodiment of compressor loop 2160, the first reservoir 2164 is permissible There is the capacity between about 80 gallons to about 160 gallons, and the second reservoir can have about 30 gallons to about 60 Capacity between Jia Lun.According to each embodiment of gas confinement assembly and system 3000, compressor 2162 can be zero entrance Compressor (zero ingress compressor).Various types of zero enters compressor can leak not having environmental gas Operate in the case of in the gas confinement assembly instructed to this and each embodiment of system.Zero each enforcement entering compressor Example can be run continuously, and the such as OLED in the purposes utilizing each device and the equipment needing compressed inert is printed During journey.

Reservoir 2164 can be configured to receive from compressor 2162 and gather compressed inert.Reservoir 2164 is permissible When needed compressed inert is supplied to gas confinement assembly 1500.Such as, reservoir 2164 can provide gas to protect Hold the pressure of all parts of gas confinement assembly 1500, such as but not limited to one or more in following: pneumatic robot, Substrate suspending bench, air bearing, air lining, compressed gas instrument, pneumatic actuator, and combinations thereof.If Figure 29 is for gas Shown in closed component and system 3000, gas confinement assembly 1500 can have and is encapsulated in OLED print system 50 therein.As Shown in Figure 24, OLED print system 50 can be supported by granite level 52, and can include substrate suspending bench 54, for by substrate It is transported to correct position and support substrate during OLED print procedure in printhead chamber.Additionally, be supported on bridge 56 Air bearing 58 can replace such as linear mechanical bearing and use.The gas lock that this is instructed and each reality of system Execute example, use various pneumatic operation device and equipment can provide low particles generation performance and low-maintenance cost.Compressor returns Road 2160 can be configured to be continuously fed to pressurized inert gas each device and the equipment of gas confinement equipment 3000.Remove Outside supply pressurized inert gas, substrate suspending bench 54(of OLED print system 50 its use air bearing technology) also use Vacuum system 2550, vacuum system 2550 passes through circuit 2552 and gas confinement assembly 1500 when valve 2554 is in an open position Connection.

Can have as shown in figure 29 for compressor loop according to the pressurized inert gas recirculating system that this is instructed The Stress control bypass circulation 2165 of 2160, it is in order to compensate the variable demand of gas-pressurized during use, thus provides this The gas confinement assembly of teaching and the dynamic equilibrium of each embodiment of system.For the gas confinement assembly instructed according to this and Each embodiment of system, bypass circulation can keep the constant pressure in reservoir 2164, and do not disturb or change closing dress Put the pressure in 1500.Bypass circulation 2165 can have the first bypass inlet valve on the entrance side being positioned at bypass circulation 2165 2162, it is closed, unless used bypass circulation 2165.Bypass circulation 2165 can also have back pressure regulator, and it can be Use when two valves 2163 cut out.Bypass circulation 2165 can have the second storage at the outlet side being arranged on bypass circulation 2165 Device 2168.For using the embodiment of the compressor loop 2160 of zero entrance compressor, bypass circulation 2165 can compensate at gas Over time through the little skew of contingent pressure during body closed component and system use.When bypass inlet valve 2161 is in During open position, bypass circulation 2165 can be in fluid communication with compressor loop 2160 on the entrance side of bypass circulation 2165. When bypass inlet valve 2161 is opened, the noble gas if from compressor loop 2160 can not meet gas confinement assembly Needs in 1500 inside, then the noble gas shunted by bypass circulation 2165 can be recycled to compressor.Work as storage When inert gas pressure in device 2164 exceedes predetermined threshold value pressure, compressor loop 2160 is configured to logical for noble gas shunting Cross bypass circulation 2165.The predetermined threshold value pressure of reservoir 2164 can when the flow rate of at least about 1 cubic feet/minute (cfm) With between about 25 psig to about 200 psig or permissible when the flow rate of at least about 1 cubic feet/minute (cfm) Between about 50 psig to about 150 psig, or can be when the flow rate of at least about 1 cubic feet/minute (cfm) Between about 75 psig to about 125 psig, or can be greatly when the flow rate of at least about 1 cubic feet/minute (cfm) Between about 90 psig to about 95 psig.

Each embodiment of compressor loop 2160 can use the various compressors in addition to zero enters compressor, example The compressor of the state of opening or closing maybe can be controlled in such as variable speed compressor.As it was noted above, zero enters compressor Guarantee do not have environment reaction material can introduce gas confinement assembly and system.Thus, prevent environment reaction material from introducing Any compressor configuration of gas confinement assembly and system may be used to compressor loop 2160.According to each embodiment, gas The compressor 2162 of body closed component and system 3000 can be contained in such as but not limited in gas-tight seal housing.Enclosure interior Can be configured to and noble gas fluid communication, such as the inert gas environment of formation gas confinement assembly 1500 is identical lazy Property gas.For each embodiment of compressor loop 2160, compressor 2162 can control in constant speed to keep constant Pressure.In not using the other embodiments of compressor loop 2160 of zero entrance compressor, compressor 2162 can reach Close during max-thresholds pressure and open when minimizing threshold pressure.

In the Figure 30 for gas confinement assembly and system 3100, aerator loop 2170 and blower vacuum loop 2550 displays are for operating the substrate suspending bench 54 of OLED print system 50, and it is contained in gas confinement assembly 1500.As front Literary composition is for described in compressor loop 2160, and aerator loop 2170 can be configured to pressurized inert gas is continuously fed to base End suspending bench 54.

The gas confinement assembly of pressurized inert gas recirculating system and each embodiment of system can be used to have There are the various loops using various pressurized-gas sources, such as at least one in compressor, aerator and combinations thereof.For gas In Figure 30 of body closed component and system 3100, compressor loop 2160 can be in fluid communication with extraneous gas loop 2500, its Can be for being applied to high consumption manifold 2525 and the noble gas of low consumption manifold 2513.For the gas envelope instructed according to this Close each embodiment of assembly and system, as shown in the Figure 29 for gas confinement assembly and system 3000, high consumption manifold 2525 may be used for being supplied to noble gas various device and equipment, such as but not limited to one or more in following: base End suspending bench, pneumatic robot, air bearing, air lining and compressed gas instrument, and combinations thereof.For according to this teaching Gas confinement assembly and each embodiment of system, low consumption manifold 2513 may be used for being supplied to noble gas various dress Put and equipment, such as but not limited to one or more in following: isolator and pneumatic actuator and combinations thereof.

For each embodiment of gas confinement assembly and system 3100, aerator loop 2170 may be used for pressurization lazy Property gas be supplied to each embodiment of substrate suspending bench 54, and with the compressor loop of extraneous gas loop 2500 fluid communication 2160 may be used for being supplied to pressurized inert gas such as but not limited to one or more in following: pneumatic robot, sky Gas bearing, air lining and compressed gas instrument, and combinations thereof.In addition to supply pressurized inert gas, use air bearing The substrate suspending bench 54 of the OLED print system 50 of technology also uses blower vacuum system 2550, blower vacuum system 2550 Connected with gas confinement assembly 1500 by circuit 2552 when valve 2554 is in an open position.The housing in aerator loop 2170 2172 the first aerators 2174 that noble gas pressurized source can be supplied to substrate suspending bench 54 and be used as substrate suspending bench 54 The second aerator 2550 of vacuum source be maintained in inert gas environment.Each that be suitable as substrate suspending bench can be manufactured The attribute of the pressurized inert gas of embodiment or the aerator of vacuum source includes, but not limited to, e.g.: they have high reliability, Them are made to have low-maintenance cost；There is variable speed control；And the volume flow with wide scope (can provide greatly About 100 m³/ h to about 2500 m³Each embodiment of volume flow between/h).Each of aerator loop 2170 is implemented Example can also have the first isolating valve 2173 at the arrival end of compressor loop 2170 and at compressor loop 2170 Check-valves 2175 at the port of export and the second isolating valve 2177.Each embodiment in aerator loop 2170 can have scalable Valve 2176(can be such as but not limited to, sluice valve, butterfly valve, needle valve or globe valve) and for will be from blower assembly 2170 are maintained at the heat exchanger 2178 of limiting temperature to the noble gas of substrate suspension system 54.

Figure 30 shows the extraneous gas loop 2500 that also figure 29 illustrates, for integrating and controlling the gas for Figure 29 The noble gas of the various aspects of the operation of body closed component and the gas confinement assembly of system 3000 and Figure 30 and system 3100 Source 2509 and clean dry air (CDA) source 2512.The extraneous gas loop 2500 of Figure 29 and Figure 30 can include at least four Mechanical valve.These valves include the first mechanical valve the 2502, second mechanical valve the 2504, the 3rd mechanical valve 2506 and the 4th mechanical valve 2508.These each valves are positioned at the position in each flow circuits, it is allowed to control noble gas (such as, nitrogen, any rare Gas and any combination thereof) and air source (such as, clean dry air (CDA)) both.Inert shell gas circuit 2510 from Inert shell gas source 2509 extends.Inert shell gas circuit 2510 continues to prolong linearly as low consumption manifold line 2152 Stretching, low consumption manifold line 2152 is in fluid communication with low consumption manifold 2513.Cross link the first section 2514 is from the first flowing Joint portion 2516 extends, and the first flowing joint portion 2516 is positioned at inert shell gas circuit 2510, low consumption manifold line 2152 At the cross part of cross link the first section 2514.Cross link the first section 2514 extends to the second flowing joint portion 2518.Compressor noble gas circuit 2520 extends from the reservoir 2164 of compressor loop 2160 and terminates at the second flowing knot Conjunction portion 2518.CDA circuit 2522 extends from CDA source 2512 and consumes manifold line 2524 as height and continues, high consumption manifold line Road 2524 is in fluid communication with the high manifold 2525 that consumes.3rd flow combinations portion 2526 is positioned at cross link the second section 2528, clear At clean dry air circuit 2522 and the high cross part consuming manifold line 2524.Cross link the second section 2528 is from second Dynamic joint portion 2518 extends to the 3rd flow combinations portion 2526.

About description and the reference table 2 in extraneous gas loop 2500, the following is the general introduction of some each operator schemes, table 2 It it is the form of the valve position of each operator scheme of gas confinement assembly and system.

Table 2

Table 2 shows procedure schema, and wherein, valve state produces only inert gas compressor operator scheme.At process mould Formula, as shown in figure 30 and as shown in the valve state of table 2, the first mechanical valve 2502 and the 3rd mechanical valve 2506 are in closedown configuration. Second mechanical valve 2504 and the 4th mechanical valve 2508 are in and open configuration.Owing to these concrete valves configure, compressed inert quilt Permit flow to low consumption manifold 2513 and high consumption both manifolds 2525.Under normal operation, inert shell gas is come from The noble gas in source and the clean dry air coming from CDA source are prevented from flowing to low consumption manifold 2513 and high consumption manifold Any one in 2525.

As shown in table 2 and with reference to Figure 30, there is the series of valves state for safeguarding and recover.The gas confinement of this teaching Assembly can need to safeguard every now and then, needs from system failure recovery in addition.In this concrete pattern, the second mechanical valve 2504 and Four mechanical valve 2508 are in closedown configuration.First mechanical valve 2502 and the 3rd mechanical valve 2506 are in and open configuration.Inert shell Gas source and CDA source provide noble gas, are in low consumption to be supplied to by low consumption manifold 2513 and also have in convalescent period Between be difficult to those parts of dead volume of effectively purging.The example of this parts includes pneumatic actuator.Comparatively speaking, consumption Those parts can consume manifold 2525 by means of height during safeguarding and supply CDA.Use valve 2504,2508,2530 isolation pressure Contracting machine prevents reactive materials (such as, oxygen and water vapour) from polluting the noble gas in compressor and reservoir.

After safeguarding or having recovered, gas confinement assembly must be by multiple cycle purge, until reactive environments Material (such as, oxygen and water) reaches the of a sufficiently low level of every kind of material, such as 100 ppm or lower, such as 10 ppm or more Low, 1.0 ppm or lower or 0.1 ppm or lower.As shown in table 2 and with reference to Figure 30, during purge mode, the 3rd machinery Valve 2506 cuts out and the 5th mechanical valve 2530 is also at closing configuration.First mechanical valve the 2502, second mechanical valve 2504 and the 4th Mechanical valve 2508 is in opens configuration.Owing to this concrete valve configures, only inert shell gas is allowed to flowing and is allowed to stream Move low consumption manifold 2513 and high consumption both manifolds 2525.

As shown in table 2 and with reference to Figure 30, " without flowing " pattern and leak-testing pattern are the moulds used as required Formula." without flowing " pattern is the pattern with the configuration of following valve state: first mechanical valve the 2502, second mechanical valve the 2504, the 3rd Mechanical valve 2506 and the 4th mechanical valve 2508 are in closing configuration.This closedown configuration causes " without flowing " pattern of system, its In, come from any gas in noble gas, CDA or compressor source and all can not arrive low consumption manifold 2513 or high consumption discrimination Pipe 2525.This " without flow pattern " is probably useful when system does not uses, and can keep the free time in extending the period. Leak-testing pattern may be used for the leakage in detecting system.Leak-testing pattern is used exclusively compressed inert, and it will System from Figure 30 high consume manifold 2525 isolate in case to the low consumption parts of low consumption manifold 2513 (such as, isolator and Pneumatic actuator) carry out leak test.In this leak-testing pattern, the first mechanical valve 2502, the 3rd mechanical valve 2506 and Four mechanical valve 2508 are in closing configuration.Only the second mechanical valve 2504 is in and opens configuration.Therefore, compressed nitrogen can be from Compressor inert gas source 2519 flow to low consumption manifold 2513, and does not has the gas stream of paramount consumption manifold 2525.

All publications of mentioning in this description, patents and patent applications are all as each individually disclosed thing, patent It is incorporated by reference in the most identical degree being incorporated by reference into herein with instruction independently all specially with patent application.

Although embodiment of the disclosure being shown and described herein, but it will be apparent to one skilled in the art that this reality Execute example to provide only by the mode of example.In the case of without departing from the disclosure, those skilled in the art are now it is appreciated that permitted Multiple changing type, change and substitute.It should be appreciated that disclosure embodiment as herein described can be used when putting into practice the disclosure Various replacement schemes.Claims be intended to limit the scope of the present disclosure, and thus contain these claim and etc. Method and structure in the range of valency thing.

Claims

1. gas confinement assembly and a system, including:

Including the gas confinement assembly of multiple framing component assemblies, wherein, described framing component assembly sealably combined with Limit internal；

The gas circulation being arranged in described inside and filtration system, remove with circulated inert gas in described inside and from it Particulate matter；

Gas purge system, described gas purge system is configured to purify the noble gas being contained in described inside；

It is arranged on the piping components in described inside, wherein, described piping components and the circulation of described gas and filtration System fluid connects, and is in fluid communication with gas purge system；And

Bundle, described bundle is operatively connectable to the equipment being contained in gas confinement assembly, and described bundle includes cable, electric wire, stream Body accommodates at least one in pipeline and combinations thereof, and wherein, described bundle is substantially provided in described tubing.

Gas confinement assembly the most according to claim 1 and system, wherein, be trapped in the dead volume of described bundle is multiple Reactive materials is purged from dead volume by the noble gas being aspirated through tubing.

Gas confinement assembly the most according to claim 2 and system, wherein, from the reactive materials of dead volume purging by institute State gas purge system to purify.

Gas confinement assembly the most according to claim 1 and system, wherein, the circulation of described gas and filtration system are configured to Substantially laminar flow by internal gas is provided.

Gas confinement assembly the most according to claim 1 and system, wherein, noble gas is selected from nitrogen, any rare gas Body and combinations thereof.

Gas confinement assembly the most according to claim 1 and system, wherein, gas purge system can be by described inside Reactive materials in each of be maintained at 100 ppm or less.

Gas confinement assembly the most according to claim 1 and system, wherein, described bundle is operatively connectable to be contained in gas Industrial printing systems in the inside of body closed component.

Gas confinement assembly the most according to claim 7 and system, wherein, gas confinement assembly is around print system fixed wheel Wide, in order to minimize the volume of gas confinement assembly.

Gas confinement assembly the most according to claim 7 and system, wherein, the volume of gas confinement assembly is at about 6 m³ To about 95 m³Between.

Gas confinement assembly the most according to claim 7 and system, wherein, print system is configured to process for OLED The substrate that device manufactures.

11. gas confinement assembly according to claim 10 and systems, wherein, substrate be about Gen 5 scale substrates extremely The size of about Gen 10 scale substrates.

12. 1 kinds of Industrial printing systems, including:

It is contained in the Industrial printing systems in the inside of gas confinement assembly；

Gas circulation and filtration system, be configured to circulated inert gas by print system and from its removal particulate matter；

Gas purge system, described gas purge system is configured to purify described noble gas, wherein, described gas purge system With the circulation of described gas and filtration system fluid communication；

Including the piping components of multiple pipelines, wherein, described piping components and the circulation of described gas and filtration system Fluid communication；And

Bundle, described bundle is operatively connectable to print system, and described bundle includes cable, electric wire, fluid containment pipeline and combinations thereof In at least one, wherein, at least one in the plurality of pipeline of described wiring in bundles.

13. Industrial printing systems according to claim 12, wherein, noble gas selected from nitrogen, any rare gas and A combination thereof.

14. Industrial printing systems according to claim 12, wherein, the multiple reaction being trapped in the dead volume of described bundle Property material purged from dead volume by being aspirated through the noble gas of tubing.

15. Industrial printing systems according to claim 14, wherein, from the reactive materials of dead volume purging by described gas Body cleaning system purifies.

16. Industrial printing systems according to claim 12, wherein, gas purge system can anti-by described inside It is maintained at 100 ppm or less each of in answering property material.

17. Industrial printing systems according to claim 12, wherein, gas confinement assembly is wide around print system fixed wheel, To minimize the volume of gas confinement assembly.

18. Industrial printing systems according to claim 12, wherein, the volume of gas confinement assembly is at about 6 m³To greatly About 95 m³Between.

19. Industrial printing systems according to claim 12, wherein, print system is configured to process for OLED device system The substrate made.

20. Industrial printing systems according to claim 19, wherein, substrate is about Gen 5 scale substrates to about Gen The size of 10 scale substrates.