CN106274054B - Gas confinement system - Google Patents

Gas confinement system Download PDF

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Publication number
CN106274054B
CN106274054B CN201610692510.9A CN201610692510A CN106274054B CN 106274054 B CN106274054 B CN 106274054B CN 201610692510 A CN201610692510 A CN 201610692510A CN 106274054 B CN106274054 B CN 106274054B
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CN
China
Prior art keywords
gas
component
gas confinement
confinement component
panel
Prior art date
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Application number
CN201610692510.9A
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Chinese (zh)
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CN106274054A (en
Inventor
J.莫克
A.S-K.柯
E.弗伦斯基
S.奥尔德森
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kedihua display technology (Shaoxing) Co., Ltd
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Kateeva Inc
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Priority claimed from US13/720,830 external-priority patent/US8899171B2/en
Application filed by Kateeva Inc filed Critical Kateeva Inc
Publication of CN106274054A publication Critical patent/CN106274054A/en
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Publication of CN106274054B publication Critical patent/CN106274054B/en
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B17/00—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups
    • B05B17/04—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods
    • B05B17/06—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations
    • B05B17/0607—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations generated by electrical means, e.g. piezoelectric transducers
    • B05B17/0638—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations generated by electrical means, e.g. piezoelectric transducers spray being produced by discharging the liquid or other fluent material through a plate comprising a plurality of orifices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J29/00—Details of, or accessories for, typewriters or selective printing mechanisms not otherwise provided for
    • B41J29/38—Drives, motors, controls or automatic cut-off devices for the entire printing mechanism
    • B41J29/393—Devices for controlling or analysing the entire machine ; Controlling or analysing mechanical parameters involving printing of test patterns
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
    • F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
    • F24F3/14—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by humidification; by dehumidification
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
    • F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
    • F24F3/16—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
    • F24F3/167—Clean rooms, i.e. enclosed spaces in which a uniform flow of filtered air is distributed
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
    • H01L21/6719—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the construction of the processing chambers, e.g. modular processing chambers
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B33/00—Electroluminescent light sources
    • H05B33/02—Details
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B33/00—Electroluminescent light sources
    • H05B33/10—Apparatus or processes specially adapted to the manufacture of electroluminescent light sources
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/10—Deposition of organic active material
    • H10K71/12—Deposition of organic active material using liquid deposition, e.g. spin coating
    • H10K71/13—Deposition of organic active material using liquid deposition, e.g. spin coating using printing techniques, e.g. ink-jet printing or screen printing
    • H10K71/135—Deposition of organic active material using liquid deposition, e.g. spin coating using printing techniques, e.g. ink-jet printing or screen printing using ink-jet printing
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/811—Controlling the atmosphere during processing

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Electroluminescent Light Sources (AREA)

Abstract

This teaching is related to each embodiment of gas-tight seal gas confinement component and system, the gas confinement component and system easily can be conveyed and assembled, and be arranged to keep minimum inert gas volume and farthest close to each device and equipment wherein encapsulated.The gas-tight seal gas confinement component of this teaching and each embodiment of system can make gas confinement component by minimize gas confinement component internal capacity and at the same time Optimization Work space to be built in a manner of accommodating the various floor spaces of various OLED print systems.Each embodiment of the gas confinement component so built is also easy to the inside of gas confinement component accessible from the outside during process and easily accessible inside is to safeguard, while minimizes downtime.

Description

Gas confinement system
Cross reference to related applications
This application claims the priority of the U. S. application No. 61/579,233 submitted on December 22nd, 2011.This application It is required that being submitted January 5 and in the U. S. application No. 12/652 as the announcements of US 2010/0201749 on the 12nd of August in 2010, 040 priority, it requires to submit on June 13rd, 2008 and is used as US 2008/0311307 on December 18th, 2008 again The priority of the U. S. application No. 12/139,391 of announcement, and also require the U. S. application No. submitted on January 5th, 2009 61/142,575 priority.All cross references enumerated herein are applied for reference to introducing in full.
Technical field
This teaching is related to each embodiment of gas-tight seal gas confinement component and system, the gas confinement component and is System easily can be conveyed and assembled, and be arranged to keep minimum inert gas volume and farthest approached what is wherein encapsulated Each device and equipment.
Background technology
To the interest of the potential of OLED Display Techniques by OLED Display Technique attribute drives, including the display panel tool showed There is highly saturated color, be high contrast, ultra-thin, quick response and energy efficient.In addition, various substrate materials Material, including flexible polymeric material, can be used for the manufacture of OLED Display Techniques.Although it is used for the small screen application（Mainly honeycomb Phone）Showing for display be used for emphasizing the potential of the technology, but when the manufacture is zoomed to larger breadth still So there is challenge.For example, than 5.5 substrates of Gen（With about 130 cm × 150 cm size）Made in the substrate of bigger OLED display is made still to need to be proved.
Organic Light Emitting Diode（OLED）Device can be printed various organic by using OLED print systems in substrate Film and other materials manufacture.This organic material is susceptible to oxidation and the infringement of other chemical processes.With energy Enough scalings for various size of foundation base and can in inertia, there is no that the mode carried out in the printing environment of particle accommodates OLED print systems may have multiple challenges.Because the facility for printing the printing of large format panel substrate needs substantial amounts of empty Between, so that big facility, which is maintained at, continuously needs gas purification to remove reactive environments material（For example, water vapour and oxygen Gas）And there is significant engineering challenge under the inert environments of organic vapor.Such as, there is provided the big facility being hermetically sealed There may be engineering challenge.In addition, feeding disengaging OLED print systems are with various cables, line and the pipeline of convenient to operate print system There may be challenge, so that gas lock is effectively achieved on environment composition（For example, oxygen and water vapour）'s Horizontal specification because they there may be the notable dead volume that can retain this reactive materials.Additionally, it is desirable to it is maintained at It is easily accessible for this facility in the inert environments of process, to be safeguarded with minimum downtime.Except not having substantially Have outside reactive materials, the printing environment of OLED device needs significantly low particle environments.In this respect, in completely enclosed system In system provide and keep there is no particle environment have can be in atmospheric conditions（Such as in open air, high flow capacity Under laminar flow filter mantle）The particle of progress reduces the unexistent additional challenges of process.
Therefore, it is necessary to multiple embodiments of gas lock, the gas lock can be in inertia, substantially do not have There are in the environment of particle a receiving OLED print systems, and can be readily scalable to be manufactured on various size of foundation base and base material Oled panel, while OLED print systems accessible from the outside and easily accessible inside are also easy to during process, to use minimum Downtime safeguard.
Brief description of the drawings
By reference to attached drawing, by being best understood from for the feature and advantage for obtaining the disclosure, attached drawing is intended to illustrate rather than limits Make this teaching.
Fig. 1 is the gas confinement component of each embodiment and the schematic diagram of system according to this teaching.
Fig. 2 is the left front stereogram of the gas confinement component and system according to each embodiment of this teaching.
Fig. 3 is the front right perspective view according to the gas confinement component of each embodiment of this teaching.
Fig. 4 is the exploded view according to the gas confinement component of each embodiment of this teaching.
Fig. 5 is the exploded front stereogram according to the framing component component of each embodiment of this teaching, it is illustrated that each Panel frame section and section panel.
Fig. 6 A are gloves ported shrouds（gloveport cap）Perspective rear view, and Fig. 6 B are the gas according to this teaching The enlarged drawing of the shoulder screw of the gloves ported shroud of each embodiment of body closed component.
Fig. 7 A are the snap lock latch of gloves ported shroud component（bayonet latch）Amplification stereogram, and Fig. 7 B are The sectional view of gloves ported shroud component, shows that the head of shoulder screw is engaged with the recess in snap lock latch.
Fig. 8 A-8C are the schematic plans for forming each embodiment of the gasket seal of connector.
Fig. 9 A and Fig. 9 B are sealing of the diagram according to the framing component of each embodiment of the gas confinement component of this teaching Each stereogram.
Figure 10 A-10B can be easily torn open for reception with each embodiment of the gas confinement component according to this teaching Unload the related each figure of the sealing of the section panel of maintenance window.
Figure 11 A-11B are the portions for being used to receive insertion panel or window panel with each embodiment according to this teaching Section panel seals related amplification perspective, cut-away view.
Figure 12 A are according to the base portion of each embodiment of this teaching, and the base portion includes disk and rests upon on it multiple Cushion block.Figure 12 B are the amplification stereograms of the cushion block shown in Figure 12 A.
Figure 13 is the wall framing component related with disk of each embodiment and the exploded view of top plate member according to this teaching.
Figure 14 A be according to the stereogram in the structure stage of the gas confinement component of each embodiment of this teaching, wherein, carry Rise device assembly and be in raised position.Figure 14 B are the exploded views of the lifting device assembly shown in Figure 14 A.
Figure 15 is according to the imaginary front perspective view of the gas confinement component of each embodiment of this teaching, shows installation Pipe-line system in gas confinement component internal.
Figure 16 is according to the imaginary top perspective view of the gas confinement component of each embodiment of this teaching, shows installation Pipe-line system in gas confinement component internal.
Figure 17 is according to the imaginary face upwarding stereogram of the gas confinement component of each embodiment of this teaching, shows installation Pipe-line system in gas confinement component internal.
Figure 18 A are the schematic diagrames for showing multi beam cable, line and pipeline etc..Figure 18 B show gas it is inswept be fed it is logical Cross this beam of each embodiment of the pipe-line system according to this teaching.
Figure 19 is schematic diagram, shows the reactive materials being trapped in the dead band of multi beam cable, circuit and pipeline etc.（A） How from the inert gas of inswept pipeline（B）Actively purge, the wiring in bundles passes through the pipeline.
Figure 20 A are the cables for being routed through pipeline according to the gas confinement component of this teaching and each embodiment of system With the imaginary stereogram of pipeline.Figure 20 B are opening shown in Figure 20 A of each embodiment of the gas confinement component according to this teaching The enlarged drawing of mouth, shows the details of the lid for being enclosed in opening.
Figure 21 is the top plate included according to the gas confinement component of each embodiment of this teaching and the lighting system of system View.
Figure 22 is curve map, it is illustrated that according to the gas confinement component of each embodiment and the photograph of system unit of this teaching The LED light spectrum of bright system.
Figure 23 is the front perspective view according to the view of the gas confinement component of each embodiment of this teaching.
Figure 24 illustrates the gas confinement component and related Account Dept according to Figure 23 of each embodiment of this teaching The exploded view of each embodiment of part.
Figure 25 is the gas confinement component of this teaching and the schematic diagram of each embodiment in relation to system unit.
Figure 26 is the gas confinement component of each embodiment and the schematic diagram of system according to this teaching, it is illustrated that passes through gas The embodiment of the gas circulation of body closed component.
Figure 27 is the gas confinement component of each embodiment and the schematic diagram of system according to this teaching, it is illustrated that passes through gas The embodiment of the gas circulation of body closed component.
Figure 28 is the schematic cross-section according to the gas confinement component of each embodiment of this teaching.
Figure 29 is the gas confinement component of each embodiment and the schematic diagram of system according to this teaching.
Figure 30 is the gas confinement component of each embodiment and the schematic diagram of system according to this teaching.
Embodiment
This teaching discloses each embodiment of gas confinement component, and the gas confinement component can sealably be built With gas circulation, filtering and purifying part is formed integrally with to form the gas that can be kept inertia, there is no particle environments Body closed component and system, for needing the process of this environment.This embodiment of gas confinement component and system can incite somebody to action Various reactive materials（Including various reactive ambient gas, such as water vapour and oxygen, and organic vapor）It is every The level of kind of material is maintained at such as 100 ppm or lower, 10 ppm or lower, 1.0 ppm or lower or 0.1 ppm or more It is low.In addition, each embodiment of gas confinement component can provide the low of 3 grades and 4 grades clean room standards meeting ISO 14644 Particle environments.
The those of ordinary skill of every field is contemplated that practicality of the embodiment in each technical field of gas confinement component Property.Although extremely different field（For example, chemistry, biotechnology, new and high technology and pharmaceutical field）This teaching can be benefited from, but It is that OLED is printed for illustrating practicality according to the gas confinement component of this teaching and each embodiment of system.It can accommodate Each embodiment of the gas confinement component system of OLED print systems can provide such as, but not limited to following feature：Sealing warp Cross multiple structures and destructing circulation provide gas-tight seal locking devices, minimize enclosed volume, and during process and It is easy to inside accessible from the outside during maintenance.As then discussed, this feature of each embodiment of gas confinement component can Have the function of to influence, such as, but not limited to, structural integrity to be easy to during process to keep the low of reactive materials Downtime during level, and fast packing volume turnover minimum maintenance cycle.Thus, there is provided oled panel printing The each feature and explanation of practicality can also give various technical fields to provide benefit.
As it was noted above, for example, than 5.5 substrates of Gen（With about 130 cm × 150 cm size）The base of bigger OLED display is manufactured on bottom still to need to be proved.For the flat-panel monitor manufactured by the printing outside OLED, mother glass In the generation of size of foundation base, has been subjected to developing since about early stage the 1990s.The first generation of mother glass substrate（It is expressed as Gen 1）It is the cm of about 30 cm × 40, thus 15 ' ' panels can be produced.About mid-term the 1990s, produces flat-panel monitor The prior art have developed into the mother glass size of foundation base of Gen 3.5, the size with the cm of about 60 cm × 72.
With the propulsion in each generation, the mother glass size production for Gen 7.5 and Gen 8.5 is used for beating outside OLED Print manufacturing process.7.5 mother glasses of Gen have the size of the cm of about 195 cm × 225, and each substrate can cut into eight A 42 ' ' or six 47 ' ' tablets.The mother glass used in Gen 8.5 is about 220 × 250 cm, and each substrate can be with Cut into six 55 ' ' or eight 46 ' ' tablets.OLED flat-panel monitors are to quality（For example, the contrast of purer color, higher Degree, thin, flexible, transparency and energy efficiency）Promise have been carried out, meanwhile, OLED manufacture is limited to 3.5 Hes of Gen in practice Smaller.Currently, OLED printings are considered as to break through the optimal manufacturing technology of the limitation, and allow oled panel to manufacture and be applied not only to The mother glass size of Gen 3.5 and smaller, and it is used for maximum sample glass size, for example, Gen 5.5,7.5 and of Gen Gen 8.5.It will be appreciated by the skilled addressee that a feature of oled panel printing includes that various substrate materials can be used Material, such as, but not limited to, various glass substrate materials and various polymeric base materials.In this respect, use is come to be based on The size that the term of the substrate of glass is recorded can be applied to be suitable for the substrate of any material of OLED printings.
Printed on OLED, according to this teaching, it has been found that keep significantly low-level reactive materials（It is such as but unlimited In the various organic vapors used in environment composition, such as oxygen and water vapour, and OLED ink）Must with providing satisfaction Want the OLED flat-panel monitors of lifetime specification related.Lifetime specification is especially important for oled panel technology, because this and display The device product time limit is directly related；The product specification of all panel technologies is difficult to meet currently for oled panel technology.By means of Each embodiment of the gas confinement component system of this teaching, in order to provide the panel for meeting necessary lifetime specification, every kind of reaction Property material（For example, water vapour, oxygen and organic vapor）Level may remain in such as 100 ppm or lower, 10 Ppm or lower, 1.0 ppm or lower or 0.1 ppm or lower.In addition, OLED printings need to there is no the ring of particle Border.For OLED printings, holding there is no that the environment of particle is especially important, because even very small particle also may be used It can cause the visible defects on oled panel.Currently, OLED display meets that low defect level needed for commercialization has challenge. Keep there is no in completely enclosed system particle environments have can be in atmospheric conditions（Such as in open air, height Under flow laminar flow filter mantle）The particle of progress reduces the unexistent additional challenges of process.Thus, keep lazy in big facility Property, the necessary specification without particle environments may have various challenges.
In every kind of reactive materials（For example, water vapour, oxygen and organic vapor）Level may remain in example As printed OLED faces in 100 ppm or lower, 10 ppm or lower, 1.0 ppm or lower or 0.1 ppm or lower facility Illustrate during the information that the needs of plate can be summarized in table 1 is checked.The data summarized on table 1 are come from for red, green and indigo plant It is every kind of including being carried out with each test sample of big pixel, the organic film component of spin coating device breadth manufacture in color Test.This test sample is significantly more susceptible to manufacture and tests, for various preparations and the rapid evaluation purpose of process.Though Right test sample test should not be obscured with printing the life test of panel, but it can represent various preparations and process to the service life Influence.Result shown in following table represents the change of the process steps of test sample manufacture, wherein, with similarly（But In air rather than in nitrogen environment）The test sample of manufacture is compared, and only spin coating environment is in nitrogen environment（Its In, reactive materials are less than 1 ppm）The test sample change of middle manufacture.
By check in table 1 for the data of test sample that are manufactured under various process environment it will be apparent that especially It is in the case of red and blueness, printing can in environment of the organic film component exposed to reactive materials is efficiently reduced Have on the stability of various EL with thus on the service life and significantly affect.
Table 1：Influence of the inert gas process to the oled panel service life.
Thus, can be in inertia substantially OLED printings are zoomed to Gen 8.5 and bigger provide at the same time from Gen 3.5 There is challenge in terms of the firm closed system for not having to accommodate OLED print systems in the gas confinement environment of particle.It is contemplated that It is that, according to this teaching, this gas lock is by with including, but not limited to, e.g. following attribute：Gas lock can With the easily scalable Optimization Work space to provide for OLED print systems, while the inert gas volume of minimum is provided, and It is also easy to OLED print systems accessible from the outside during process, while easily accessible inside is to use minimum downtime to tie up Shield.
According to each embodiment of this teaching, there is provided a kind of gas of various air-sensitive processes for needing inert environments Body closed component, can include multiple the wall frames and top plate framing component that can be sealed.In certain embodiments, it is more A wall frame and top plate framing component can be tightened together using reusable fastener, such as bolt and threaded hole. For each embodiment of the gas confinement component according to this teaching, multiple framing components, which can be built into, limits gas confinement frame Frame component, each framing component include multiple panel frame sections.
The gas confinement component of this teaching can be designed to so as to the mode of the enclosed volume around minimum system is held Receive system, such as OLED print systems.Each embodiment of gas confinement component can be to minimize in gas confinement component Portion's volume and at the same time Optimization Work space are to accommodate the various floor spaces of various OLED print systems（Footprint, or foot Mark）Mode build.Each embodiment of the gas confinement component so built is also easy to gas accessible from the outside during process The inside of body closed component and easily accessible inside is to safeguard, while minimize downtime.In this respect, according to this teaching Gas confinement component each embodiment can on various OLED print systems various floor space fixed wheels it is wide.According to each A embodiment, once fixed wheel exterior feature framing component is constructed to form gas confinement frame assembly, various types of panels can It is sealably mounted in multiple panel sections including framing component, to complete the installation of gas confinement component.Sealed in gas Close in each embodiment of component, multiple framing components can be manufactured in a position or multiple positions（Including for example but unlimited In multiple wall framing components and at least one top plate framing component）And for multiple faces in panel frame section Plate, and then built in another position.In addition, give conveying for the component of the gas confinement component for building this teaching Property, each embodiment of gas confinement component mount and dismount in which can pass through multiple structures and destructing circulating repetition.
In order to ensure gas lock is hermetically sealed, each embodiment of the gas confinement component of this teaching provides use In combining each framing component to provide frame seal.Pass through the close fit cross part between each framing component（Including pad Piece or other seals）, inside can be adequately sealed, such as gas-tight seal.Once structure completely, the gas confinement group of sealing Part can include internal and multiple internal corner edges, and at least one internal corner edge is arranged on each framing component and adjacent frame At the cross part of component.At least half in one or more of framing component, such as framing component, can be included along one One or more sealant compressible shims that a or multiple respective edges are fixed.One or more of sealant compressible shims can be configured to Gas-tight seal gas confinement component is produced once multiple framing components are combined together and install the panel of airtight body.Sealing Gas confinement component can be formed such that the corner edge of framing component is sealed by multiple sealant compressible shims.For each frame Component, such as, but not limited to interior wall frame surface, roof frame surface, upright side walls frame surface, bottom wall frame surface and It is combined, and can be provided with one or more sealant compressible shims.
For each embodiment of gas confinement component, each framing component can include multiple sections, the multiple portion Section is designed and manufactured to receive any of various panel types that can be sealably mounted in each section, to carry For the panel sealing of the airtight body for each panel.In each embodiment of the gas confinement component of this teaching, each Section frame can have section frame gasket, and the section frame gasket ensures to be installed on each portion by means of selected fastener Each panel in segment frames can be provided for each panel and for building the airtight of gas lock completely The sealing of body.In various embodiments, gas confinement component can have window panel or maintenance control panel in each Wall board In one or more；Wherein, each window panel or maintenance control panel can have at least one gloves port.In gas confinement During component assembles, each gloves port can have attached gloves, so that gloves are extended in inside.According to each Embodiment, each gloves port can have the hardware for being used for installing gloves, wherein, this hardware is around each gloves port Using gasket seal, it provides the sealing of airtight body and is spread with minimizing by the leakage of gloves port or molecule.For this Each embodiment of the gas confinement component of teaching, the hardware are also designed to be easy to the cover and open the gloves end of terminal user Mouthful.
It can be included from multiple framing component knead doughs according to each embodiment of the gas confinement component of this teaching and system Gas confinement component and gas circulation, the filtering and purifying part of plate portion section formation.For gas confinement component and system Each embodiment, pipe-line system can be installed during assembling process.According to each embodiment of this teaching, pipe-line system can be with In the gas confinement frame assembly built from multiple framing components.In various embodiments, pipe-line system can be more A framing component is combined to be installed on before forming gas confinement frame assembly on multiple framing components.Gas confinement component and it is The pipe-line system of each embodiment of system, which can be configured so that from one or more pipe-line system entrances, is drawn into pipe-line system In essentially all gas be moved through each embodiment in gas filtration circuit, for removing gas confinement component and system Internal particulate matter.In addition, the pipe-line system of each embodiment of gas confinement component and system can be configured to gas The entrance and exit of gas purification loop outside closed component is separated from the gas filtration circuit of gas confinement component internal.
For example, gas confinement component and system can have gas circulation and the filtering system in gas confinement component internal System.This self-filtering system can have multiple fan filter units in inside, and can be configured in inside Gas laminar flow is provided.Laminar flow can be from internal top to the direction of internal bottom either any other direction.Although The gas stream produced by the circulatory system needs not be laminar flow, but gas laminar flow can be used to ensure that the thorough of gas in inside With complete turnover.Gas laminar flow can be also used for minimizing turbulent flow, and this turbulent flow is undesirable, because it can cause environment In powder collection in this regions of turbulent flow, so as to prevent filtration system from removing those particles from environment.In addition, in order in inside Middle holding preferred temperature, can provide the heat regulating system using multiple heat exchangers, such as by means of fan or another gas Body circulation device operates, close to fan or another gas-recycling plant, or with fan or another gas-recycling plant knot Close and use.Gas purification loop can be configured to seal from gas by least one gas cleaning components outside locking device Close component internal recyclegas.In this respect, the filtering of gas confinement component internal and the circulatory system with outside gas confinement component The gas purification loop combination in portion can provide the continuous circulation of the notable low particulate inert gas in gas confinement component, It has notable low-level reactive materials.Gas purge system can be configured to keep very low-level being not intended into Point, such as organic solvent and its steam and water, water vapour, oxygen etc..
In addition to setting and being used for gas circulation, filtering and purifying part, pipe-line system can be sized and be shaped to Wherein at least one in receiving electric wire, harness and various fluid containment pipes, it may have a large amount of dead volumes when tying in, Wherein, environment composition（For example, water, water vapour, oxygen etc.）It may be trapped and be difficult to be removed by cleaning system.In some implementations In example, the combination of any of cable, electric wire and harness and fluid containment pipe can be substantially provided in pipe-line system, And can respectively with least one operatively phase in the electrical system, mechanical system and cooling system that are arranged in inside Even.Since gas circulation, filtering and purifying part can be configured so that essentially all circulated inert gas are all aspirated through Pipe-line system, therefore the environment composition being trapped in the dead volume of the various materials that tie in can be held by this material that ties in It is contained in pipe-line system and a large amount of dead volumes from this material that ties in effectively purge.
It may include according to each embodiment of the gas confinement component of this teaching and system from multiple framing components and panel Gas confinement component and gas circulation, the filtering and purifying part of section formation, and additionally include pressurized inert gas again Each embodiment of the circulatory system.This pressurized inert gas recirculating system can make in the operation of OLED print systems With such as then described in more detail for various pneumatic actuating devices and equipment.
According to this teaching, solve multiple engineering challenges, to provide pressurized inert in gas confinement component and system Each embodiment of gas recirculation system.First, no pressurized inert gas recirculating system gas confinement component and Under the typical operation of system, gas confinement component can be maintained at slight positive internal pressure relative to external pressure, so as in gas Prevent outer side gas or air from entering inside when producing any leakage in body closed component and system.For example, for this teaching Each embodiment of gas confinement component and system, under typical operation, the inside of gas confinement component can be relative to closing The surrounding environment of its exterior is maintained at the pressure of the pressure of for example, at least 2 mbarg, for example, at least 4 mbarg, at least 6 The pressure of the pressure of mbarg, at least 8 mbarg, or higher pressure.Pressurized inert gas is kept in gas confinement component system Recirculating system is probably to have challenge, because it has with keeping the slight positive internal pressure of gas confinement component and system to have The dynamic of pass and the balance play persistently carried out, and gas-pressurized is simultaneously continuously introduced into gas confinement component and system. In addition, each device and the variable demand of equipment are likely to form the various gas confinement components of this teaching and the irregular pressure of system Force curve.The gas confinement component that slight positive pressure is maintained at relative to external environment condition holding dynamic pressure is put down under these conditions Weighing apparatus can provide the globality of the OLED print procedures for persistently carrying out.
For each embodiment of gas confinement component and system, according to the pressurized inert gas recirculating system of this teaching It may include each embodiment in pressurized inert gas circuit, at least one of compressor, reservoir and air blower can be used And combinations thereof.Each embodiment of the pressurized inert gas recirculating system of each embodiment including pressurized inert gas circuit There can be the pressure control bypass circulation specially designed, it can be in the gas confinement component and system of this teaching at offer In the inert gas internal pressure for stablizing limit value.In each embodiment of gas confinement component and system, pressurized inert gas The inert gas pressure that body recirculating system can be configured in the reservoir in pressurized inert gas circuit exceedes predetermined threshold value Via pressure control bypass circulation recycling pressurized inert gas during pressure.Threshold pressure can be for example in about 25 psig extremely Between about 200 psig, or specifically in about 75 psig to about 125 psig between, Or specifically in about 90 psig to about 95 psig between.In this respect, have with special design Pressure control bypass circulation each embodiment pressurized inert gas recirculating system this teaching gas confinement component with System may remain in gas-tight seal gas lock the balance with pressurized inert gas recirculating system.
According to this teaching, various devices and equipment can be arranged in inside, and with being returned with various pressurized inert gas Each embodiment of the pressurized inert gas recirculating system on road is in fluid communication, and the pressurized inert gas circuit can use each Kind pressurized-gas source, such as at least one of compressor, air blower and combinations thereof.For this teaching gas lock and Each embodiment of system, low particles generation performance and low-maintenance can be provided using various pneumatically-operated devices and equipment Cost.The example that can be arranged in gas confinement component and internal system and be connected with various pressurized inert gas loop fluids Property device and equipment can include, for example, but not limited to, pneumatic robot, substrate suspending bench, air bearing, air bushing, pressure One or more in contracting air tool, pneumatic actuator, and combinations thereof.Substrate suspending bench and air bearing can be used for grasping Make the various aspects of the OLED print systems of each embodiment of the gas confinement component according to this teaching.For example, use air The substrate suspending bench of bearing technology can be used for printing by substrate feed to the suitable position in printing head chamber and in OLED Support substrate during process.
As it was noted above, each embodiment of substrate suspending bench and air bearing is to being contained in the gas according to this teaching The operation of each embodiment of OLED print systems in closed component is probably useful.As Fig. 1 is directed to gas confinement component It is schematically shown with system 2000, it can be used for using the substrate suspending bench of air bearing technology by substrate feed to printhead Suitable position in chamber and the support substrate during OLED print procedures.In Fig. 1, gas confinement component 1500 can be Load lock system, it can have the inlet chamber 1510 for being used for that substrate to be received by first entrance gate 1512 and 1514, For substrate to be moved to gas confinement component 1500 from inlet chamber 1510, to print.According to each gate of this teaching It can be used for chamber being isolated from each other and isolate from external environment condition.According to this teaching, each gate can from physics gate and Gas curtain selects.
During substrate receive process, gate 1512 can be opened, and gate 1514 may be at closed position, to prevent Only environmental gas enters gas confinement component 1500.Once substrate is received in inlet chamber 1510, gate 1512 and 1514 liang Person can close and inlet chamber 1510 can use inert gas purge, such as nitrogen, any rare gas and its any group Close, until the level of reactive ambient gas be in such as 100 ppm or lower, 10 ppm or lower, 1.0 ppm or lower, Or 0.1 ppm or lower.After the level that environmental gas reaches sufficiently low, gate 1514 can be opened, and 1512 still close Close, to allow substrate 1550 to be transported to gas confinement component chambers 1500 from inlet chamber 1510, as shown in Figure 1.Substrate is from entering Oral chamber 1510 be transported to gas confinement component chambers 1500 can via such as, but not limited to be arranged on chamber 1500 and 1510 In suspending bench.Substrate is transported to gas confinement component chambers 1500 from inlet chamber 1510 can also be via such as, but not limited to Substrate feed robot, substrate 1550 can be placed in the suspending bench in chamber 1500 by it.Substrate 1550 is being beaten It can keep being supported in substrate suspending bench during print process.
Each embodiment of gas confinement component and system 2000 can have by gate 1524 and gas confinement component The outlet chamber 1520 being in fluid communication with system 1500.According to gas confinement component and each embodiment of system 2000, beating After print process is completed, substrate 1550 can be transported to outlet chamber 1520 from gas confinement component 1500 by gate 1524. Substrate from gas confinement component chambers 1500 be transported to outlet chamber 1520 can via such as, but not limited to be arranged on chamber Suspending bench in 1500 and 1520.Substrate is transported to outlet chamber 1520 from gas confinement component chambers 1500 can also be via example Such as but substrate feed robot is not limited to, substrate 1550 can be picked up and will by it from the suspending bench being arranged in chamber 1500 It is transported to chamber 1520.For each embodiment of gas confinement component and system 2000, when gate 1524 is in close stance When putting to prevent that reactive ambient gas from entering gas confinement component 1500, substrate 1550 can be from outlet chamber 1520 via lock Door 1522 is fetched.
Except the inlet chamber including being in fluid communication respectively via gate 1514 and 1524 and gas confinement component 1500 1510 and outlet chamber 1520 load lock system outside, gas confinement component and system 2000 may include system controller 1600.System controller 1600 can include and one or more memory circuitries（It is not shown）One or more processing of connection Device circuit（It is not shown）.System controller 1600 can also be with the load lock including inlet chamber 1510 and outlet chamber 1520 System connectivity, and finally the printing nozzle with OLED print systems connects.Thus, system controller 1600 can coordinate gate 1512nd, 1514,1522 and 1524 opening and closing.System controller 1600 can also be controlled to the printing of OLED print systems The ink distribution of nozzle.Substrate 1550 can be conveyed by each embodiment of the load lock system of this teaching, via for example but It is not limited to the substrate suspending bench and substrate feed robot of the substrate suspending bench or air bearing technology using air bearing technology Combination, load lock system includes the entrance being in fluid communication respectively via gate 1514 and 1524 and gas confinement component 1500 Chamber 1510 and outlet chamber 1520.
Each embodiment of the load lock system of Fig. 1 can also include atmospheric control 1700, it can include true Empty source and inert gas source, can include nitrogen, any rare gas and its any combinations.It is contained in gas confinement component and is Substrate suspension system in system 2000 may include to be generally arranged at multiple vacuum ports and gas bearing ports on flat surfaces. Substrate 1550 can pass through inert gas（For example, nitrogen, any rare gas and its any combinations）Boost in pressure and holding Leave crust.The flowing of outflow bearing volume is completed by means of multiple vacuum ports.Substrate 1550 is in substrate suspending bench Hoverheight becomes generally according to gas pressure and gas flow.The vacuum and pressure of atmospheric control 1700 can be used for Support substrate 1550 during being manipulated in the load lock system of Fig. 1 in gas confinement component 1500, such as during printing.Control System 1700 can be also used for the support substrate 1550 during being conveyed by the load lock system of Fig. 1, load lock system bag Include the inlet chamber 1510 being in fluid communication respectively via gate 1514 and 1524 and gas confinement component 1500 and outlet chamber 1520.In order to control the conveying of substrate 1550 to pass through gas confinement component and system 2000, system controller 1600 passes through valve respectively 1712 and 1722 connect with inert gas source 1710 and vacuum 1720.Unshowned addition of vacuum and inert gas supply connection and Valve can be supplied to gas confinement component and system 2000, by the load lock system diagram of Fig. 1, to further provide for control envelope Various gases and vacuum facility needed for closed loop border.
In order to provide the stereogram of more multidimensional, figure to each embodiment of the gas confinement component according to this teaching and system 2 be the left front stereogram of each embodiment of gas confinement component and system 2000.Fig. 2 is shown including gas confinement component 1500th, the load lock system of 1510 and first gate 1512 of inlet chamber.The gas confinement component and system 2000 of Fig. 2 can wrap Gas purge system 2130 is included, there is notable low-level reactive environments material for being provided to gas confinement system 1500 （Such as water vapour and oxygen）And the constant supply of inert gas of the organic vapor obtained from OLED print procedures.Fig. 2 Gas confinement component and system 2000 also there is controller system 1600, for system control function, as mentioned before.
Fig. 3 is the front right perspective view according to the complete structure gas confinement component 100 of each embodiment of this teaching.Gas Closed component 100 can accommodate one or more gases, for keeping the inert environments in gas confinement component internal.This teaching Gas confinement component and system can be useful in terms of the inert gas environment in keeping inside.Inert gas can be It is not subjected to any gas of chemical reaction under one group of qualifications.Some of inert gas can include nitrogen usually using example Gas, any rare gas and its any combinations.Gas confinement component 100 is configured to surround and protects air-sensitive process, such as Organic Light Emitting Diode is printed using Industrial printing systems（OLED）Ink.It is the example bag of the environmental gas of reactivity to OLED ink Include water vapour and oxygen.As it was noted above, gas confinement component 100 can be configured to keep sealed environment and allow component or beat Print system effectively operates, while avoids polluting, aoxidize and damaging otherwise reactive material and substrate.
As shown in figure 3, each embodiment of gas confinement component may include following element portion, including anterior or the first wall Panel 210 ', left side or the second Wall board（It is not shown）, right side or the 3rd Wall board 230 ', rear portion or the 4th Wall board（Do not show Go out）And ceiling panel 250 ', the gas confinement component can be attached to disk 204, disk 204 is rested upon in base portion（It is not shown）On. As then described in more detail, each embodiment of the gas confinement component 100 of Fig. 1 can be from anterior or the first wall frame 210, left side Or the second wall frame（It is not shown）, right side or the 3rd wall frame 230, rear portion or the 4th Wall board（It is not shown）And top plate frame Frame 250 is built.Each embodiment of top plate frame 250 can include 103 and first top plate frame of fan filter unit lid 105 and first top plate frame pipeline 107 of pipeline.According to the embodiment of this teaching, various types of section panels may be mounted at In any one in multiple panel sections including framing component.In each embodiment of the gas confinement component 100 of Fig. 1, Metal panels section 109 can be welded in framing component during framework establishment.For each of gas confinement component 100 Embodiment, the section panel type mounted and dismounted while several structures and the destructing circulating repetition of gas confinement component can be passed through It may include the insertion panel 110 shown for Wall board 210 ' and the window panel 120 shown for Wall board 230 ' and can Easily disassembled maintenance window 130.
Although can easily disassembled maintenance window 130 may be easy to inside close to locking device 100, can use can Any panel of dismounting is to approach the inside of gas confinement component and system, for repairing and routine maintenance purpose.Maintenance or Repair it is this close to due to for example, by window panel 120 and can easily disassembled maintenance window 130 panel provide it is close And it is different, it can cause terminal user's gloves during use from gas confinement component external close in gas confinement component Portion.For example, any gloves of gloves port 140 are attached to, for example, gloves 142, as shown in Fig. 3 for panel 230, Ke Yi Gas confinement component system causes terminal user close to inside during use.
Fig. 4 illustrates the exploded view of each embodiment of the gas confinement component shown in Fig. 3.Gas confinement component it is each Embodiment can have multiple Wall boards, include the perspective outboard view of anterior Wall board 210 ', the outside of left side wall panel 220 ' Stereogram, the perspective interior view of right side wall panel 230 ', the perspective interior view of rear portion Wall board 240 ', and ceiling panel 250 ' Top perspective view, as shown in figure 3, gas confinement component can be attached to disk 204, disk 204 is rested upon on base portion 202.OLED Print system may be mounted on the top of disk 204, and it is sensitive to environmental condition that print procedure is known.According to this teaching, gas Closed component can be built from framing component, such as wall frame 220, the wall of the wall frame 210 of Wall board 210 ', Wall board 220 ' The top plate frame 250 of the wall frame 230 of panel 230 ', the wall frame 240 of Wall board 240 ' and ceiling panel 250 ', wherein Then multiple section panels can be installed.In this respect, it may be desirable to the gas confinement component that streaming can be Jing Guo this teaching The design of several structures of each embodiment and the section panel mounted and dismounted with deconstructing circulating repetition.Furthermore, it is possible to carry out The fixed wheel exterior feature of gas confinement component 100 is to accommodate the floor space of each embodiment of OLED print systems, to minimize gas Required inert gas volume in body closed component, and make it that terminal user is easily accessible（In gas confinement component validity period Between and during maintenance it is both such）.
Using anterior Wall board 210 ' and left side wall panel 220 ' as an example, each embodiment of framing component can have There is the metal panels section 109 being welded to during framing component is built in framing component.It is inserted into panel 110, window panel 120 and can easily disassembled maintenance window 130 may be mounted in each wall framing component, and can pass through Fig. 4 gas confinement Mount and dismount to several structures of component 100 and destructing circulating repetition.It can be seen that：In Wall board 210 ' and Wall board 220 ' Example in, Wall board can have close to can easily disassembled maintenance window 130 window panel 120.Similarly, as exemplary Shown in rear portion Wall board 240 ', Wall board can have window panel, such as window panel 125, its have two it is adjacent Gloves port 140.For each embodiment of the wall framing component according to this teaching, and for the gas confinement component 100 of Fig. 3 As can be seen that this set of gloves may be easy to from the outside of gas lock close to the element portion in closed system. Therefore, each embodiment of gas lock can provide two or more gloves ports, so that terminal user can be by a left side One or more of gloves and right hand set are stretched into inside and manipulation is internal items, without disturbing the gaseous environment in inside Component.For example, any one in window panel 120 and maintenance window 130 may be positioned such that beneficial to outside gas confinement component Portion is close to the adjusting part in gas confinement component internal.According to window panel（For example, window panel 120 and maintenance window 130）Each embodiment, when be not required terminal user it is close by the gloves of gloves port when, this window may not include hand Cover port and gloves port assembly.
As shown in figure 4, each embodiment of wall and ceiling panel can have multiple insertion panels 110.It can see in Fig. 4 Go out, insertion panel there can be variously-shaped and aspect ratio.In addition to being inserted into panel, ceiling panel 250 ' can have peace Fill, be bolted, being threadedly coupled, fan filter unit lid 103 that is fixed or being otherwise fastened to top plate frame 250 with And first top plate frame pipeline 105 and the second top plate frame pipeline 107.As then described in more detail, with ceiling panel 250 ' The pipe-line system that pipeline 107 is in fluid communication may be mounted in the inside of gas confinement component.According to this teaching, this pipeline system System can be a part for the gas-circulating system of gas confinement component internal, and provides and be used to separately leave gas confinement group The flowing stream of part, for cycling through at least one gas cleaning components of gas confinement component external.
Fig. 5 is the exploded front stereogram of framing component component 200, wherein, wall frame 220 can be built into including panel Complete supplement.Although being not limited to shown design, can be used for illustrating using the framing component component 200 of wall frame 220 According to each embodiment of the framing component component of this teaching.According to this teaching, each embodiment of framing component component can be with It is made of each framing component and the section panel in each frame panel section of each framing component.
According to each embodiment of each framing component component of this teaching, framing component component 200 can include frame Component, such as wall frame 220., can be with for the gas confinement component 100 of each embodiment of gas confinement component, such as Fig. 3 The gas-tight seal envelope of inert environments may not be needed only provide for using the process for the facility being contained in this gas confinement component Device is closed, and needs to there is no the environment of particulate matter.In this respect, use can be used according to the framing component of this teaching In the various sizes metal tube material of each embodiment of structure frame.This metal tube material solves expectation material properties, Including but not limited to, will not degrade to produce the high globality material of particulate matter, and produce with high intensity and with The framing component of optimum weight, easy to be conveyed, built and deconstructed including each frame from one place to another place The gas confinement component of component and panel part section.Those of ordinary skill in the art are it is readily understood that meet appointing for these requirements What material can be used for forming each framing component according to this teaching.
For example, according to each embodiment of the framing component of this teaching, such as framing component component 200, can be from extruding Metal tube is built.According to each embodiment of framing component, frame can be built using aluminium, steel and various metallic composites Component.In various embodiments, can use with such as, but not limited to the following size and with 1/8 " to 1/4 " wall thickness Metal tube：2 " wX2 " h, 4 " wX2 " h and 4 " wX4 " h, to build each embodiment of the framing component according to this teaching.In addition, Various fiber reinforced polymer composites with various pipes or other forms are available, it, which has, includes but not limited to such as Under material properties：Will not degrade to produce the high globality material of particulate matter, and produce with high intensity and with The framing component of optimum weight, easy to be conveyed, built and deconstructed from one place to another place.
On building each framing component from various sizes metal tube material, it is contemplated that, it can weld to form frame Each embodiment of frame weld part.In addition, suitable industry can be used by building each framing component from various sizes structure material Adhesive carries out.Should be letting out by framing component will not be inherently created it is contemplated that building each framing component The mode of flux leakage path carries out.In this respect, for each embodiment of gas confinement component, building each framing component can make Carried out with that will not inherently create by any method of the leakage paths of framing component.In addition, the frame according to this teaching Each embodiment of component, such as the wall frame 220 of Fig. 4, can be painted or coating.For from being for example easy to aoxidize（Wherein, The material formed at surface can form particulate matter）Metal tube material made of framing component each embodiment, can be with Brushed or coating or other surface treatments, such as anodization, to form particulate matter to prevent.
Framing component component, such as the framing component component 200 of Fig. 5, can have framing component, such as wall frame 220. Wall frame 220 can have top 226（Top wall frame backing plate 227 can be fastened thereon）And bottom 228（Base wall frame Frame backing plate 229 can be fastened thereon）.As then described in more detail, the backing plate on framing component surface is that gasket is close A part for envelope system, it is combined with the gasket seal of the panel in framing component section, there is provided for according to this religion The each embodiment for the gas confinement component led it is gas-tight seal.Framing component, such as the wall of the framing component component 200 of Fig. 5 Frame 220, can have multiple panel frame sections, wherein, each section, which can be made into, receives various types of panels, example As but be not limited to insertion panel 110, window panel 120 and can easily disassembled maintenance window 130., can when building framing component To form various types of panel sections.The type of panel section can be included, but not limited to, e.g. for receiving insertion panel 110 insertion panel part section 10, the window panel section 20 for receiving window panel 120 and for receive easily disassembled can tie up Repair the maintenance window panel section 30 of window 130.
Each type of panel section can have the panel part segment frames of receiving panel, and can be arranged to each panel Can sealably it be fastened in each panel section according to this teaching, for building gas-tight seal gas confinement component.Example Such as, in Fig. 5 according to the frame assembly of this teaching is shown, insertion panel part section 10 is shown as with frame 12, window side Plate portion section 20 is shown as being shown as with frame 32 with frame 22, maintenance window panel section 30.For the wall frame of this teaching Each embodiment of frame component, each panel part segment frames can be the metal sheets being connected to sequential welding bead weld in panel section Material, it is gas-tight seal to provide.For each embodiment of wall frame assembly, each panel part segment frames can be by various sheet materials It is made, including the structure material selected from fiber reinforced polymer composites, it can be installed on using suitable industry adhesive In panel section.Teaching as being then related to sealing is described in more detail, and each panel part segment frames, which can have, to be disposed thereon Sealant compressible shim, to ensure that for installing and being fastened on each panel in each panel section airtight body can be formed Sealing.In addition to panel part segment frames, each framing component section can have with positioning panel and in panel section It is firmly fastened to the related hardware of panel.
The each embodiment for being inserted into panel 110 and the panel frame 122 of window panel 120 can be from sheet material structure Build, such as, but not limited to the alloy of aluminium, various aluminium and stainless steel.The attribute of panel material can with for forming framing component The structural material of each embodiment is identical.In this respect, the material for having the attribute for various panel members includes but unlimited In：It will not degrade to produce the high globality material of particulate matter, and produce with high intensity and with optimum weight Panel, in order to be conveyed, built and deconstructed from one place to another place.For example, cellular chip material is each Embodiment can have the required of the panel material for the panel frame 122 for being used as structure insertion panel 110 and window panel 120 Attribute.Cellular chip material can be made of a variety of materials；Metal and metal composite and polymer, and polymer are compound Cellular chip material.When being made from metal material, each embodiment of detachable panel can have the ground connection included in the panel Connection, to ensure that total is grounded in gas confinement component construction.
Give the gas confinement component parts of the gas confinement component for building this teaching can transport properties, this teaching Section panel each embodiment in any one can repeat peace installation and dismantling during use in gas confinement component and system Unload, to approach the inside of gas confinement component.
For example, for receive can easily disassembled maintenance window panel 130 panel section 30 can have one group four pad, One of them is shown as window guiding pad 34.In addition, structure be used for receive can easily disassembled maintenance window panel 130 panel part Section 30 can have one group of four clamping plate 36, its be used for installed in each can easily disassembled maintenance window 130 maintenance Maintenance window 130 is clamped in maintenance window panel section 30 by one group of four acting in opposition toggle clamp 136 on window frame 132 In.In addition, may be mounted at can be on easily disassembled maintenance window frame 132, so that eventually by each in two window handles 138 End subscriber maintenance window 130 easy to removal and installation.Quantity, type and the setting of detachable maintenance window handle can change. In addition, for receive can the maintenance window panel section 30 of easily disassembled maintenance window panel 130 can cause window clip 35 In at least two be selectively installed in each maintenance window panel section 30.Although it is shown in each maintenance window panel The top and bottom of section 30, but at least two window clips can be with fastening maintenance window in panel part segment frames 32 Any mode of mouth 130 is installed.Instrument can be used for disassembling and installing window clip 35, to allow maintenance window 130 to dismantle Install again.
The acting in opposition toggle clamp 136 and the hardware in panel section 30 of maintenance window 130（Including clamping plate 36th, window guiding pad 34 and window clip 35）It can be built by any suitable material and combination of materials.For example, one or more A this element can include at least one metal, at least one ceramics, at least one plastics and combinations thereof.Detachable maintenance window Mouth handle 138 can be built by any suitable material and combination of materials.For example, one or more this elements can be included extremely A kind of few metal, at least one ceramics, at least one plastics, at least one rubber and combinations thereof.Closed window, such as window side The window 124 of plate 120 or the window 134 of maintenance window 130, can include any suitable material and combination of materials.According to this Each embodiment of the gas confinement component of teaching, closed window may include transparent and trnaslucent materials.In gas confinement component Each embodiment in, closed window may include the material based on silica（Such as, but not limited to glass and quartz）It is and various types of The material based on polymer of type（Makrolon, acrylic acid and the vinyl material of such as, but not limited to various ranks）.Ability Domain those of ordinary skill is appreciated that various composition of example window gate material and combinations thereof is also used as according to this teaching Transparent and trnaslucent materials.
In Figure 5 for framing component component 200 as can be seen that can easily disassembled maintenance window panel 130 can have Gloves port with the cover 150.Although show that all gloves ports have outwardly extending gloves in Fig. 3, such as Fig. 5 institutes Show, whether depending on terminal user, need remotely can also be by the cover close to the inside of gas confinement component, gloves port.Such as figure The cover is latched in gloves by each embodiment of the cover assembly shown in 6A-7B securely when terminal user is without using gloves On, and be conveniently accessible at the same time when terminal user is desirable for gloves.
In fig. 6, the cover 150 is shown, it can have inner surface 151, outer surface 153 and can be used for fixed wheel exterior feature The side 152 of grasping.Three shoulder screws 156 extend from the edge 154 of the cover 150.As shown in Figure 6B, each shoulder screw is consolidated It is scheduled in edge 154 so that shank 155 extends setpoint distance from edge 154, so that not joining edge 154 of head 157.Scheming In 7A-7B, gloves port hardware component 160 can be modified to provide cover assembly, it includes being used to be added in locking device Pressure is with relative to the locking mechanism of the cover gloves port when having normal pressure outside locking device.
For each embodiment of the gloves port hardware component 160 of Fig. 6 A, snap clamp can cause the cover 150 to close On gloves port hardware component 160, and the quick connection design of the easily accessible gloves of terminal user is provided at the same time.In Fig. 7 A institutes In the top perspective view of the gloves port hardware component 160 shown, gloves port assembly 160 may include back plate 161 and foreboard 163, Foreboard 163 has threaded screws head 162 and the flange 164 for being used for installing gloves.Snap lock latch is shown on flange 164 166, there is groove 165, for receiving shoulder screw 156（Fig. 6 B）Shoulder screw head 157.Each shoulder screw 156 can be with Each alignment and engagement in the snap lock latch 166 of gloves port hardware component 160.The groove 168 of snap lock latch 166, which has, to be located at The opening 165 of at one end and the lock recess 167 at the other end of groove 168.Once each shoulder screw head 157 is inserted into In each opening 165, the cover 150 can rotate, until the close lock recess 167 of shoulder screw head adjacent groove 168 End.Section shown in Fig. 7 B shows the lock-in feature for the cover gloves when gas confinement component system uses. During use, the internal gas pressure of the inert gas in locking device is more than setting than the pressure of gas confinement component external Amount.Normal pressure can fill gloves（Fig. 3）, so that gloves this teaching gas confinement component during use in the cover During 150 times compressions, shoulder screw head 157 is moved in lock recess 167, so that it is guaranteed that gloves port window is reliably covered Lid.However, terminal user can grasp the cover 150 by the wide side 152 for being used to grasp of fixed wheel, and it is easy when not in use Ground departs from the cover being fastened in snap lock latch.Fig. 7 B also show back plate 161 on the inner surface 131 of window 134 and Foreboard 163 on the outer surface of window 134, two plates all have O-ring packing 169.
As discussed in the following teaching of Fig. 8 A-9B, wall and the section of top plate framing component seal and airtight body Panel frame seal, which combines, provides the gas-tight seal gas confinement group for the air-sensitive process for being used to need inert environments Each embodiment of part.Help to provide the reactive materials of notable low concentration and the gas confinement of significantly low particle environments Component and the component of system can include but is not limited to, gas-tight seal gas confinement component and efficient gas circulation and particle mistake Filter system, including pipe-line system.There is provided for gas confinement component it is effective it is gas-tight seal be probably to have challenge；Especially exist When three framing components form three plane ties together.Thus, three plane ties be sealed in offer be used for can pass through it is several structure and The gas-tight seal aspect of easily installing of the gas confinement component of destructing circulation assembly and disassembly has especially difficult challenge.
In this respect, according to each embodiment of the gas confinement component of this teaching by effective gasket seal of connector with And provide effective gasket seal around load bearing structure component and the gas confinement component built completely and system are provided It is gas-tight seal.It is different from conventional joint sealing, according to the joint sealing of this teaching：1）It is included in top and bottom terminal box bridge joint Head engaging portion（Wherein, three framing components are combined）The adjacent shim section in place is consistent parallel with vertical orientated gasket length Alignment, so that angularly seam alignment and sealing are avoided, 2）There is provided and be used to form length of adjacency along the whole width of connector, so as to increase Area in sealing contact at three plane tie engaging portions, 3）Be designed with backing plate, the backing plate along it is all vertically and horizontally and top The compression stress consistent with three plane tie gasket seal offer of bottom.In addition, the selection of gasket material can influence to provide it is airtight close The validity of envelope, this will be discussed later.
Fig. 8 A-8C are the conventional three plane ties sealing of diagram and the vertical view of the contrast sealed according to three plane ties of this teaching Schematic diagram.According to each embodiment of the gas confinement component of this teaching, there can be such as, but not limited at least four wall frames Component, top plate framing component and disk, it can be bonded to form gas confinement component, thus produce need it is gas-tight seal more A vertical, horizontal and three plane ties.In fig. 8 a, the schematic top plan view of conventional three face gasket seals is formed by the first gasket I, the One gasket I is vertical orientated with gasket II in X-Y plane.As shown in Figure 8 A, by the vertical orientated seam formed in X-Y plane There is the contact length W by gasket width dimension limitation between two sections1.In addition, gasket III（In vertical direction and pad Both piece I and gasket II vertical orientated gasket）Terminal part can abut gasket I and gasket II, by shadow representation.Scheming In 8B, the schematic top plan view of conventional three plane tie gasket seals is formed by the first gasket length I, the first gasket length I and second Gasket length II is vertical, and 45 ° with two length seam faying faces, wherein, it is sewn between two sections to have and is more than gasket The contact length W of material width2.The configuration of similar map 8A, gasket III（Hang down in vertical direction and both gasket I and gasket II Directly）End part can abut gasket I and gasket II, by shadow representation.It is assumed that gasket width is identical in Fig. 8 A and Fig. 8 B, figure The contact length W of 8B2Contact length W more than Fig. 8 A1。
Fig. 8 C are the schematic top plan views according to three plane tie gasket seals of this teaching.First gasket length I can have The shim section I ' formed perpendicular to the direction of gasket length I, wherein, the length that shim section I ' has can be about to be tied The size of the width of the structure member of conjunction, such as the 4 " of each wall framing component of the gas confinement component for forming this teaching 4 " h metal tubes of w X 2 " h or 4 " w X.Gasket II is vertical with gasket I in X-Y plane, and has shim section II ', gasket The stacked length of section II ' and shim section I ' is about the width for the structure member being combined.The width of shim section I ' and II ' Degree is the width of selected compressible pad sheet material.Gasket III is vertical orientated in vertical direction and both gasket I and gasket II. Shim section III ' is the end part of gasket III.Shim section III ' is hung down by shim section III ' and the vertical length of gasket III Straight orientation is formed.Shim section III ' can be formed such that it has the length about the same with shim section I ' and II ', and Width is the thickness of selected compressible pad sheet material.In this respect, the contact length W of three alignment sections shown in Fig. 8 C3 More than having contact length W respectively1And W2Fig. 8 A or Fig. 8 B shown in conventional delta connection sealing.
In this respect, shim section is formed at terminal fitting engaging portion according to three plane tie gasket seals of this teaching Consistent parallel alignment（Otherwise will be the gasket of vertical alignment, as shown in the situation of Fig. 8 A and Fig. 8 B）.Three plane tie gasket seals This consistent parallel alignment of section applies consistent transverse sealing power across the section, to promote what is formed by wall framing component The airtight three plane tie sealing of the top and bottom corner portion of connector.In addition, the consistent alignment gasket of each three plane ties sealing Each section of section is chosen the width for the structure member being about combined, so that the maximum for providing consistent alignment section connects Touch length.In addition, backing plate, all vertical, levels of the backing plate along structure connector are designed with according to the joint sealing of this teaching And three face gasket seal consistent compression stress is provided.Evincible to be, selection provides normal for the example of Fig. 8 A and Fig. 8 B The width for the structure member being combined can be at least by advising the width of the gasket material of three faces sealing.
The exploded perspective of Fig. 9 A is shown before all framing components are combined according to the seal assembly of this teaching 300, so that gasket, which is shown, is in uncompressed state.In figure 9 a, in all parts structure gas envelope from gas confinement component Close in the first step of device, multiple wall framing components, such as wall frame 310, wall frame 350 and top plate frame 370, can be with Sealably combined.According to the framing component of this teaching sealing be to provide gas confinement component once completely build once it is airtight Sealing and offer can pass through several structures of gas confinement component and the pith of the sealing of destructing circulation implementation.Although The example provided in the following teaching of Fig. 9 A-9B is the part for sealing gas closed component, but this area is common Technical staff will be understood that, whole of this teaching suitable for the gas confinement component of this teaching any one.
The first wall frame 310 shown in Fig. 9 A can have medial surface 311,314 and of vertical side of installation backing plate 312 The top surface 315 of backing plate 316 is installed.First wall frame 310 can have the first gasket 320, and the first gasket 320 is arranged on by padding In the space that plate 312 is formed and adhere to the space formed by backing plate 312.It is arranged in the first gasket 320 and is formed by backing plate 312 Space in and adhere to after the space that is formed by backing plate 312 gap 302 left and can extend the vertical of the first gasket 320 Length, as shown in Figure 9 A.As shown in Figure 9 A, submissive gasket 320 can be arranged in the space formed by backing plate 312 and adhere to The space formed by backing plate 312, and can be with vertical gasket length 321, curve gasket length 323 and in inner frame Planar shape is in 90 ° and terminates at the gasket of the vertical side 314 of wall frame 310 with vertical gasket length 321 on component 311 Length 325.In figure 9 a, the first wall frame 310 can have the top surface 315 of installation backing plate 316, so that on surface 315 Space is formed, the second gasket 340 adheres to the space in the space and close to the inward flange 317 of wall frame 310 vertically. Left after the second gasket 340 is arranged in the space formed by backing plate 316 and adheres to the space formed by backing plate 316 Gap 304 can extend the horizontal length of the second gasket 340, as shown in Figure 9 A.In addition, as shown in phantom lines, the length of gasket 340 Degree 345 is as one man parallel with the length 325 of gasket 320 and adjacently aligns.
The second wall frame 350 shown in Fig. 9 A can have external frame side 353, vertical side 354 and installation backing plate 356 top surface 355.Second wall frame 350 can have the first gasket 360, and the first gasket 360 is arranged on by 356 shape of backing plate Into space in and adhere to the space formed by backing plate 356.The space formed by backing plate 356 is arranged in the first gasket 360 In and adhere to after the space that is formed by backing plate 356 gap 306 left and can extend the horizontal length of the first gasket 360, As shown in Figure 9 A.As shown in Figure 9 A, submissive gasket 360 can have vertical length 361, length of curve 363 and and top surface 355 planar shape is in 90 ° and terminates at the length 365 of outer frame members 353.
As shown in the exploded perspective view of Fig. 9 A, the internal frame member 311 of wall frame 310 can be incorporated into wall frame 350 Vertical side 354 to form gas confinement frame assembly structure connector.The close of connector is built on what is so formed Seal, in each embodiment of the gasket seal at the terminal fitting engaging portion according to the wall framing component of this teaching, such as Fig. 9 A Shown, the length 345 of the length 325 of gasket 320, the length 365 of gasket 360 and gasket 340 is adjacently and as one man right Together.In addition, as then described in more detail, each embodiment of the backing plate of this teaching can provide what is instructed for gas-tight seal About the 20% of the compressible pad sheet material of each embodiment of gas confinement component is to the consistent pressure between about 40% deflection Contracting.
Fig. 9 B are illustrated according to the seal assembly 300 of this teaching after the combination of all framing components, so that gasket is shown For compressive state.Fig. 9 B are shown in the first wall frame 310, the second wall frame 350 and top plate frame 370（With imaginary representation Go out）Between top terminals connector engaging portion at formed three plane ties corner sealing details stereogram.Such as Fig. 9 B institutes Show, the gasket space limited by backing plate can determine one fixed width, so as to combine wall frame 310, wall frame 350 and top plate frame After frame 370；As shown in imaginary drawing, for forming vertical, horizontal and three face gasket seals compressible pad sheet materials about Consistent compression between 20% to about 40% deflection ensures the pad at all surface of the joint of wall framing component sealing Piece sealing can provide gas-tight seal.In addition, gasket gap 302,304 and 306（It is not shown）It is dimensioned so that compressible After about the 20% of gasket material to the optimal compression between about 40% deflection, each gasket can be with joint sheet gap, such as For shown in gasket 340 and gasket 360 in Fig. 9 B.Thus, except through limiting, each gasket is set and the space of adhesion carries Outside consistent compression, be designed to each embodiment that the backing plate in gap is provided also assure each compression gasket can comply with by Backing plate limit space in, without by will be formed leakage paths in a manner of compressive state wrinkle swell or in other ways Brokenly it is molded.
According to each embodiment of the gas confinement component of this teaching, various types of section panels can be used and set Compressible pad sheet material sealing on each panel part segment frames.Integration Framework component gasket seal, in each section The position and material that the sealant compressible shim of sealing is formed between panel and panel part segment frames can be provided with little or no The gas-tight seal gas confinement component of gas leakage.In addition, it is used for all types of panels（For example, the insertion panel 110 of Fig. 5, Window panel 120 and can easily disassembled maintenance window 130）Seal Design can be in this panel repeated removal and installation（For It may be needed close to gas confinement component internal, such as in order to safeguard）Durable panel sealing is provided afterwards.
For example, Figure 10 A be show maintenance window panel section 30 and can easily disassembled maintenance window 130 exploded view. As it was noted above, can manufacture can easily disassembled maintenance window 130 for reception for maintenance window panel section 30.Sealed for gas Close each embodiment of component, panel section, such as detachable maintenance control panel section 30, can have panel part segment frames 32 with And it is arranged on the sealant compressible shim 38 on panel part segment frames 32.In various embodiments, with detachable maintenance window panel In section 30 fastening can the related hardware of easily disassembled maintenance window 130 can make it that terminal user is easily installed and pacifies again Dress, and ensure at the same time can easily disassembled maintenance window 130 as desired by needing to be immediately adjacent to gas confinement component internal Terminal user installation and again be installed on panel section 30 in when keep airtight body sealing.Can easily disassembled maintenance window 130 can include rigid window frame 132, it can be by such as, but not limited to for any framing component institute for building this teaching The metal tube material structure stated.Maintenance window 130 can use snap action securing hardware, such as, but not limited to acting in opposition hinge Folder 136 is connect, so that terminal user is easy to disassemble and installation and maintenance window 130 again.Earlier figures 7A- is shown in Figure 10 A The gloves port hardware component 160 of 7B, shows one group of 3 snap lock latch 166.
As shown in the front view of the detachable maintenance window panel section 30 of Figure 10 A, can easily disassembled maintenance window 130 can With with one group of four toggle clamp 136 being fastened on window frame 132.Maintenance window 130 can be positioned at panel section frame Limited in frame 30 at distance, for ensuring the Suitable compression power against gasket 38.Pad 34 is guided using one group of four window, is such as schemed Shown in 10B, it may be mounted in each corner of panel section 30, for positioning maintenance window 130 in panel section 30. In one group of clamping plate 36 can each be configured to receive can easily disassembled maintenance window 136 acting in opposition toggle clamp 136.According to For circulating each embodiment of gas-tight seal maintenance window 130, the machinery of maintenance window frame 132 in several installation and removal Defined position of the intensity with maintenance window 130 relative to sealant compressible shim 38（Pad 34 is guided to provide by a group window）With reference to can To ensure once maintenance window 130 fastens in place, such as, but not limited to cut with scissors using the acting in opposition being fastened in corresponding clamping plate 36 Folder 136 is connect, maintenance window frame 132 can be on panel part segment frames 32 with restriction compression（Pad 34 is guided by a group window Setting）Uniform power is provided.Group window guiding pad 34 is located so that compression stress of the window 130 on gasket 38 about Sealant compressible shim 38 is deflected between 20% to about 40%.In this respect, the structure of maintenance window 130 and panel section 30 Manufacture provides the sealing for airtight body of the maintenance window 130 in panel section 30.As it was noted above, window clip 35 can To be installed in panel section 30 after maintenance window 130 is fastened in panel section 30, and need to tear open in maintenance window 130 Dismantled when unloading.
Acting in opposition toggle clamp 136 can use any appropriate means and means combination to be fastened to and easily disassembled can repair Window frame 132.The example for the suitable fastener means that can be used includes at least one adhesive（Such as, but not limited to, epoxy Resin or cement bonding agent）, at least one bolt, at least one screw, at least one other fastener, at least one groove, extremely A few track, at least one weld part and combinations thereof.Acting in opposition toggle clamp 136 can be directly connected to detachable maintenance window Mouth frame 132 is connected indirectly by adaptor plate.Acting in opposition toggle clamp 136, clamping plate 36, window guiding pad 34 and window Mouth clip 35 can be built by any suitable material and combination of materials.For example, one or more this elements can be included extremely A kind of few metal, at least one ceramics, at least one plastics and combinations thereof.
Except sealing can in addition to easily disassembled maintenance window, the sealing of airtight body can be provided for insertion panel and Window panel.The other types of section panel that can be repeatedly mounted and dismounted in panel section includes, but not limited to, e.g. Insertion panel 110 and window panel 120 shown in Fig. 5.In fig. 5 it can be seen that the panel frame 122 of window panel 120 with Insertion panel 110 is similarly constructed.Thus, according to each embodiment of gas confinement component, for receiving insertion panel and window The manufacture of the panel section of mouth panel can be identical.In this respect, the sealing of insertion panel and window panel can use identical Principle is implemented.
With reference to figure 11A and 11B, and according to each embodiment of this teaching, gas lock（For example, the gas envelope of Fig. 1 Close component 100）Any panel can include one or more insertion panel part sections 10, its can have is configured to receive it is corresponding It is inserted into the frame 12 of panel 110.Figure 11 A are the stereograms for pointing out the amplifier section shown in Figure 11 B.In Figure 11 A, panel is inserted into 110, which are shown relative to insertion frame 12, positions.Insertion panel 110, which is can be seen that, in Figure 11 B is attached to frame 12, wherein, frame Frame 12 can for example be built by metal.In certain embodiments, metal can include aluminium, steel, copper, stainless steel, chromium, alloy and Its combination etc..Multiple blind cutting thread holes 14 can be formed in panel part segment frames 12 are inserted into.Panel part segment frames 12 are built into The gasket 16 being included between insertion panel 110 and frame 12, sealant compressible shim 18 can be set herein.Blind cutting thread hole 14 Can be M5 types.Screw 15 can be received by blind cutting thread hole 14, so as to compress pad between insertion panel 110 and frame 12 Piece 16.Once being fastened in place against gasket 16, insertion panel 110 just forms the close of airtight body in insertion panel part section 10 Envelope.As it was noted above, this panel sealing can be implemented various section panels, include but not limited to, the inserting surface shown in Fig. 5 Plate 110 and window panel 120.
According to each embodiment of the sealant compressible shim according to this teaching, for framing component sealing and panel sealing can Compression gasket material can be selected from various compressible polymeric materials, such as, but not limited to any closed air chamber polymeric material classification, This area is also referred to as expanded rubber material or expansile polymeric material.In brief, closed air chamber polymer is existed with gas confinement It is prepared by the mode in discrete chamber；Wherein each discrete chamber is closed by polymeric material.It is expected for frame and panel component The attribute of the compressible closed air chamber polymerization gasket material of airtight body sealing includes but not limited to, their chemistry to wide scope The chemical attack of material is firm, has extraordinary moisture barrier attribute, is flexible in wide temperature range, and support Resist permanent compressive deformation.Generally speaking, compared with open plenum topology convergence material, closed air chamber polymeric material has higher Dimensional stability, relatively low moisture absorption coefficient and higher-strength.The all kinds polymerization of closed air chamber polymeric material can be made Material includes, but not limited to, e.g.：Silicones, neoprene, ethylene-propylene-diene terpolymer（EPT）（Use three First second diene monomer（EPDM, or ethylene propylene diene rubber）Manufactured polymer and compound）, ethene nitrile, butadiene-styrene rubber（SBR） And its various copolymers and blend.
The expectation material properties of closed air chamber polymer have only been kept during use in the gas chamber for forming block materials Kept when good lossless.In this respect, can exceed that closed air chamber polymer sets specified material specification（For example, more than specified The specification used in temperature or compression zone）Mode can cause the degradation of gasket seal using this material.For sealing In each embodiment of the closed air chamber polymer gasket of section panel in framing component and frame panel section, this material Compression should be no more than about 50% to about 70% deflection between, in order to which optimum performance can be about 20% to about Between 40% deflection.
In addition to closed air chamber compressible pad sheet material, have and be used for structure according to the gas confinement component of this teaching Another example of the compressible pad sheet material classification of the desired properties of embodiment includes hollow extrusion pressing type sealant compressible shim material Classification.Hollow extrusion pressing type gasket material has desired properties as material classification, includes but not limited to, their changes to wide scope It is firm to learn the chemical attack of material, has extraordinary moisture barrier attribute, is flexible in wide temperature range, and Resist permanent compressive deformation.This hollow extrusion pressing type sealant compressible shim material can be with the variously-shaped because counting of wide scope It is existing, such as, but not limited to, U-shaped gas chamber, D-shaped gas chamber, square gas chamber, rectangle gas chamber and the various hollow extruding of conventional shape factor Any of type gasket material.Various hollow extrusion pressing type gasket materials can be by for manufacturing closed air chamber compressible pad sheet material The polymeric material of material is made.Such as, but not limited to, each embodiment of hollow extrusion pressing type gasket can be by silicones, chlorine butadiene Rubber, ethylene-propylene-diene terpolymer（EPT）（Use ethylene propylene diene monomer（EPDM）Manufactured polymer and multiple Compound）, ethene nitrile, butadiene-styrene rubber（SBR）And its various copolymers and blend are made.The pressure of this hollow gas chamber gasket material Contracting should be no more than about 50% deflection, to keep desired properties.
Although those of ordinary skill in the art are it can be readily appreciated that closed air chamber compressible pad sheet material classification and hollow Extrusion pressing type compressible pad sheet material classification is given as examples, but any compressible pad sheet material with desired properties all may be used For sealing the structure member of this teaching offer（Such as various walls and top plate framing component）And sealing panel section frame In each panel.
Can from multiple framing components build gas confinement component, such as the gas confinement component 100 of Fig. 3 and Fig. 4 or Figure 23 and the gas confinement component 1000 of Figure 24 such as then discussed, to minimize damage system unit（Such as, but not limited to, Gasket seal, framing component, pipeline and section panel）Risk.For example, gasket seal is to build gas from multiple framing components It may be susceptible to the component of damage during body locking device.According to each embodiment of this teaching, material and method are arranged to minimum Change or eliminate the risk in structure according to all parts that gas confinement component is damaged during the gas lock of this teaching.
Figure 12 A are gas confinement components（Such as the gas confinement component 100 of Fig. 3）Structure the starting stage stereogram. Although gas confinement component（Such as gas confinement component 100）Structure for the gas confinement component for illustrating this teaching, still Those of ordinary skill will recognize that this teaching is suitable for each embodiment of gas confinement component.As illustrated in fig. 12, exist During the structure starting stage of gas confinement component, multiple cushion blocks are first placed on the disk 204 supported by base portion 202.Cushion block Can be thicker than the compressible pad sheet material being arranged on each wall framing component being installed on disk 204.A series of cushion blocks can To be placed on multiple positions on the periphery edge of disk 204, in the position, each wall frame of gas confinement component during assembling Component can be placed on a series of cushion blocks and close to the position of disk 204, without being contacted with disk 204.It is expected with can protect with Exempt from the compressible pad sheet material being arranged on each wall framing component（In order to 204 sealing purpose of disk）It is subject to the side of any infringement Formula assembles each wall framing component in disk 204.Thus, use cushion block（Each wall board member can be placed on disk on cushion block Initial position on 204）Prevent the compressible pad sheet material being arranged on each wall framing component（In order to form gas with disk 204 Close sealing purpose）It is subject to any infringement.Such as, but not limited to, as illustrated in fig. 12, front circumference edge 201 can have pad 93, 95 and 97, front walls framing component can be rested upon on pad 93,95 and 97；Right periphery edge 205 can have pad 89 and 91, Right side wall framing component can be rested upon on pad 89 and 91；Rear perimeter edge 207 can have two pads, rear wall frame pad It can rest upon on it, illustrated therein is pad 87.Any quantity, type and the combination of cushion block can be used.The common skill in this area Art personnel will be understood that, according to this teaching, cushion block can be positioned on disk 204, although each in Figure 12 A- Figure 14 B is not Different cushion blocks is shown.
For the exemplary cushion block according to each embodiment of this teaching from component framework component assembling gas lock Shown in Figure 12 B, it is the stereogram of the 3rd cushion block 91 irised out shown in part of Fig. 9 A.Exemplary cushion block 91 may include attached It is connected to the cushion block bar of cushion block transverse side 92（strap）90.Cushion block can be made of any suitable material and combination of materials.Example Such as, each cushion block can include the polyethylene of supra polymer weight.Cushion block bar 90 can be by any suitable material and material group Conjunction is made.In certain embodiments, cushion block bar 90 includes nylon material, poly- alkylene material etc..Cushion block 91 has 94 He of top surface Basal surface 96.Cushion block 87,89,93,95,97 and any other cushion block used can be constructed with same or like physical attribute, And same or like material can be included.Cushion block can be placed into the periphery top edge of disk 204 and easy to disassemble to allow to stablize Mode rest upon, clamp or its other modes is conveniently provided.
In the exploded perspective view that Figure 13 is provided, framing component may include that the disk rested upon on base portion 202 can be attached to Front walls frame 210, left side wall frame 220, right side wall frame 230, rear wall frame 240 and top plate or top on 204 Frame 250.OLED print systems 50 may be mounted on the top of disk 204.
Example can be included according to the OLED print systems 50 of the gas confinement component of this teaching and each embodiment of system Such as：Granite base portion；The movable bridge of OLED printing equipments can be supported；From each reality of pressurized inert gas recirculating system The one or more devices and equipment of example extension are applied, for example, substrate suspending bench, air bearing, track, guide rail；For by OLED Film formation material is deposited on the inkjet printer system in substrate, including OLED ink supply subsystem and ink jet-print head；One Or multiple robots etc..The all parts of OLED print systems 50 can be included by providing, each implementation of OLED print systems 50 Example can have various floor spaces and form factor.
OLED ink-jet print systems can include allowing multiple devices of ink droplet reliable arrangement specific location in substrate And equipment.These devices and equipment may include but be not limited to, print head assembly, black transport system, kinematic system, substrate load and Uninstalling system and head maintenance system.Print head assembly includes at least one ink gun, with can be by ink droplet with controlled At least one aperture of speed, speed and size injection.Ink gun is supplied by ink supply system, and ink is supplied to by ink supply system Ink gun.Printing needs the relative motion between print head assembly and substrate.This is completed by means of kinematic system, is typically gantry Frame or separation shaft XYZ system.Print head assembly can move in anchoring base（Portal frame type）, or in separation shaft configuration In the case of, both printhead and substrate can move.In another embodiment, printing station can be fixed, and substrate can be with Moved in X and Y-axis relative to printhead, and Z axis movement provides at substrate or printhead.When printhead is moved relative to substrate When dynamic, ink droplet is sprayed in orthochronous to be deposited on desired locations in substrate.Substrate is loaded using substrate and uninstalling system is inserted into Printer and removed from printer.Depending on printer configuration, this can use mechanical conveyer, substrate suspending bench or have end The robot of actuator completes.Head maintenance system can include multiple subsystems, it allows such as drop volume to demarcate, spray The scraping on injection nozzle surface, start the maintenance task that ink is ejected into useless pond.
According to assembling gas lock this teaching each embodiment, as shown in fig. 13 that front portion or the first wall frame 210th, left side or the second wall frame 220, right side or the 3rd wall frame 230, rear portion or the 4th wall frame 250 and top plate frame 250 can be built together in systematic order, be then attached to the disk 204 being installed on base portion 202.Each reality of framing component Applying example can be positioned on cushion block to prevent damage compressible pad sheet material, as mentioned before using gantry.For example, Using gantry, front walls frame 210 can be rested upon at least three cushion blocks, such as the week of the disk 204 shown in Figure 12 A Pad 93,95 and 97 on side top edge 201.After front walls frame 210 is placed on cushion block, wall frame 220 and wall frame 230 The periphery edge 203 and periphery edge 205 for being arranged on disk 204 respectively can be placed sequentially in succession or in any order On cushion block on.According to each embodiment of this teaching from component framework component assembling gas lock, front walls frame 210 can be placed on cushion block, then left side wall frame 220 and right side wall frame 230 are placed on cushion block so that they are arrived Position is to be bolted or be otherwise fastened to front walls frame 210.In various embodiments, rear wall frame 240 can To be placed on cushion block so that they are in place to be bolted or be otherwise fastened to left side wall frame 220 and right side Wall frame 230.For each embodiment, once wall framing component tightens together to form adjacent wall frame closed component, top Portion's top plate frame 250 is secured to this wall frame closed component to form whole gas closed frame component.For In each embodiment for building this teaching of gas confinement component, in the assembling stage, whole gas closed frame component rests upon To protect the globality of each framing component gasket on the multiple cushion block.
As shown in Figure 14 A, for each embodiment of this teaching for building gas confinement component, gas confinement frame Then component 400 can be positioned so that pad can be removed to prepare gas confinement frame assembly 400 being attached to disk 204.Figure 14A shows that gas confinement frame assembly 400 uses lifting device assembly 402, lifting device assembly 404 and 406 liters of device assembly of lifting Up to lifted from cushion block and leave the position of cushion block.In each embodiment of this teaching, device assembly 402,404 and 406 is lifted It can be attached around the periphery of gas confinement frame assembly 400.After lifting device assembly attaches, the gas built completely seals Each lifting device assembly can be raised or stretch out by activating each lifting device assembly and lift-off cushion block by closing frame assembly, so that Raise gas confinement frame assembly 400.As shown in Figure 14 A, gas confinement frame assembly 400 is shown as being thus lifted to and previously rested upon Above multiple cushion blocks on it.Then the multiple cushion block can be removed from the position that rests upon on disk 204, so that frame is then It can be reduced on disk 204 and be then attached to disk 204.
Figure 14 B be according to the exploded view of the identical lifting device assembly 402 of each embodiment of the lifting device assembly of this teaching, As shown in Figure 11 A.As shown in the figure, lifting device assembly 402 includes wear prevention pad 408, installing plate 410,412 and of first clamp bearing Second clamp bearing 413.First clamp 414 and second clamp 415 are shown as being in line with corresponding clip bearing 412 and 413.Thousand Jin top bent axle 416 is attached to the top of very heavy apical axis 418.Trailer jack 520（trailer jack）It is shown as perpendicular to thousand Jin and is attached to very heavy apical axis 418 at apical axis 418.Jack base portion 422 is shown as a part for the bottom of very heavy apical axis 418. It is foot abutment 424 below jack base portion 422, it is configured to receive the bottom of very heavy apical axis 418 and may be connected to it On.Smooth foot（leveling foot）426 are also shown as and are configured to be received by foot abutment 424.Ordinary skill Personnel can will readily recognize that any means for being suitable for lifting operation may be used to raise gas confinement frame set from cushion block Part, so that cushion block can be removed and intact gas confinement component can be reduced on disk.For example, substitution said one Or multiple lifting device assemblies, such as 402,404 and 406, hydraulic pressure, pneumatically or electrically lifter can be used.
According to each embodiment of this teaching for building gas confinement component, multiple fasteners can be provided and configured Tighten together into by the multiple framing component, and gas confinement frame assembly is then fastened to disk.The multiple fastening Part can include along each edge of each framing component be arranged on corresponding frame component be configured to in multiple framing components One or more fastener portions at position that adjoining frame members intersect.The multiple fastener and sealant compressible shim can be with It is arranged so that sealant compressible shim is arranged close to internal and hardware close to outside when framing component is combined together, so that hardware Multiple leakage paths of the airtight body closed component of this teaching will not be provided.
The multiple fastener may include along multiple bolts at the edge of one or more framing components and along multiple frames Multiple threaded holes at the edge of one or more of frame member different frames component.The multiple fastener may include multiple spiral shells Cap fixing bolt（captured bolt）.The bolt may include the bolt head for the outer surface for being extended the corresponding panel.Spiral shell Bolt can be sunk in the recess in framing component.Clip, screw, rivet, adhesive and other fasteners can be used for frame Component tightens together.Bolt or other fasteners may extend through the outer wall of one or more framing components and into one Or in threaded hole in the side wall or roof of multiple adjoining frame members or other complementary fasteners features.
As seen in figs. 15-17, can pacify for each embodiment for the method for building gas lock, pipe-line system In the interior section combined to form by wall frame and top plate framing component.For each embodiment of gas confinement component, Pipe-line system can be installed during building process.According to each embodiment of this teaching, pipe-line system may be mounted at by more In the gas confinement frame assembly of a framing component structure.In various embodiments, pipe-line system can be in multiple framing components It is installed on before on multiple framing components with reference to form gas confinement frame assembly.Each reality of gas confinement component and system The pipe-line system for applying example can be configured so that and is drawn into from one or more pipe-line system entrances in pipe-line system substantially All gas are all moved through each embodiment in gas filtration circuit, for removing the particulate matter in gas confinement component. In addition, the pipe-line system of each embodiment of gas confinement component and system can be configured to the gas of gas confinement component external The entrance and exit of body purification circuit is separated from gas filtration circuit, and gas filtration circuit is used to remove in gas confinement component Particulate matter.It can be made, such as, but not limited to had big of sheet metal according to each embodiment of the pipe-line system of this teaching The aluminium flake of about 80 mil thickness.
Figure 15 shows imaginary stereogram before the right sides of the piping components 500 of gas confinement component 100.Closed conduct system Component 500 of uniting can have anterior Wall board piping components 510.As shown in the figure, anterior Wall board piping components 510 There can be the anterior Wall board standpipe 516 of the anterior Wall board standpipe 514 and second of front walls panel entry pipeline 512, first, its Both it is in fluid communication with front walls panel entry pipeline 512.First anterior Wall board standpipe 514 is shown as having outlet 515, Outlet 515 is sealably engaged with the top plate pipeline 505 of fan filter unit lid 103.In a similar manner, the second anterior wall Plate standpipe 516 is shown as having outlet 517, and the top plate pipeline 507 of outlet 517 and fan filter unit lid 103 is sealably Engagement.In this respect, anterior Wall board piping components 510, which provide, is used for the inert gas in gas confinement component the bottom of from Portion is circulated, using front walls panel entry pipeline 512, by each anterior Wall board standpipe 514 and 516, and respectively by air Conveying is by outlet 505 and 507, so that air can be filtered for example, by fan filter unit 752.Such as subsequent more detailed institute State, the quantity of fan filter unit, size and dimension can be according to the physical bits of the substrate in the print system during process Put to select.Heat exchanger 742, can be logical by circulation as a part for heat regulating system close to fan filter unit 752 The inert gas for crossing gas confinement component 100 is maintained at preferred temperature.
Right side wall panel piping components 530 can have right side wall panel inlet duct 532, it passes through right side wall The first standpipe of plate 534 and the second standpipe of right side wall panel 536 are in fluid communication with right side wall panel upper pipe 538.Right side wall Plate upper pipe 538 can have the first entrance end 535 and second pipe outlet end 537, the second pipe port of export Portion 537 and the rear wall upper panel pipeline 536 of rear wall piping components 540 are in fluid communication.Left side wall panel pipeline system Unite component 520 can have with for component identical described in right side wall panel component 530, wherein, in Figure 15 it can be seen that passing through First left side wall panel standpipe 524 and left side wall panel upper pipe（It is not shown）The left side wall panel inlet duct of fluid communication 522 and the first left side wall panel standpipe 524.Rear portion Wall board piping components 540 can have rear wall panel entry pipe Road 542, rear wall panel entry pipeline 542 are in fluid communication with left side wall panel component 520 and right side wall panel component 530.This Outside, rear portion Wall board piping components 540 can have rear portion Wall board bottom pipe 544, rear portion Wall board bottom pipe 544 can have rear portion Wall board first entrance 541 and rear portion Wall board second entrance 543.Rear portion Wall board bottom pipe 544 can To be in fluid communication via the first bulkhead 547 and the second bulkhead 549 with rear wall upper panel pipeline 536, the bulkhead structure can For the various beams of such as, but not limited to cable, line and pipeline etc. are fed to inside from the outside of gas confinement component 100. Pipeline tapping 533, which is set, to be used to the beam of cable, line and pipeline etc. removing rear wall upper panel pipeline 536, it can be via Bulkhead 549 passes through upper pipe 536.Bulkhead 547 and bulkhead 549 can be airtight close using removably insertable panel on outside Envelope, as mentioned before.Rear wall upper panel pipeline passes through ventilating opening 545（One corner is shown in Figure 15）With for example but Fan filter unit 754 is not limited to be in fluid communication.In this respect, left side wall panel piping components 520, right side wall panel Piping components 530 and rear portion Wall board piping components 540, which provide, to be used for the inert gas in gas confinement component From bottom cycle, respectively using Wall board inlet duct 522,532 and 542 and front panel lower pipeline 544, it passes through preceding Each standpipe for stating, pipeline, bulkhead passage etc. are in fluid communication with ventilating opening 545, so that air can be for example, by fan filter Device unit 755 filters.Heat exchanger 745, as a part for heat regulating system, can be incited somebody to action close to fan filter unit 755 The inert gas for cycling through gas confinement component 100 is maintained at preferred temperature.
In fig. 15 it is shown that fed by the cable of opening 533.As then described in more detail, the gas envelope of this teaching The each embodiment for closing component is provided for so that the beam of cable, line and pipeline etc. passes through pipe-line system.In order to eliminate this The leakage paths formed around beam, can use and be used to use different size cable, line and the pipelines in compliant materials sealed beam Each method.The pipe I and pipe II for closed pipe system component 500 are also shown in Figure 15, it is shown as fan filter A part for device unit cover 103.Pipe I is provided to the inert gas outlet of extraneous gas cleaning system, and pipe II is provided to gas The purification inert gas of filtering and circulation loop inside closed component 100 returns.
The imaginary top perspective view of closed pipe system component 500 is shown in Figure 16.It can be seen that left side wall panel pipe The symmetric property of road system component 520 and right side wall panel piping components 530.For right side wall panel piping components 530, right side wall panel inlet duct 532 passes through the first standpipe of right side wall panel 534 and the second standpipe of right side wall panel 536 and the right side Sidewall panel upper pipe 538 is in fluid communication.Right side wall panel upper pipe 538 can have the first entrance end 535 With second pipe outlet end 537, the rear portion Wall board of second pipe outlet end 537 and rear wall piping components 540 Upper pipe 536 is in fluid communication.Similarly, left side wall panel piping components 520 can have left side wall panel inlet tube Road 522, left side wall panel inlet duct 522 by the first standpipe of left side wall panel 524 and the second standpipe of left side wall panel 526 with Left side wall panel upper pipe 528 is in fluid communication.Left side wall panel upper pipe 528 can have the first entrance end 525 and second pipe outlet end 527, the rear portion wall of second pipe outlet end 527 and rear wall piping components 540 Plate upper pipe 536 is in fluid communication.In addition, rear portion Wall board piping components can have rear wall panel entry pipeline 542, rear wall panel entry pipeline 542 is in fluid communication with left side wall panel component 520 and right side wall panel component 530.In addition, Rear portion Wall board piping components 540 can have rear portion Wall board bottom pipe 544, rear portion Wall board bottom pipe 544 Can have rear portion Wall board first entrance 541 and rear portion Wall board second entrance 543.Rear portion Wall board bottom pipe 544 can be with It is in fluid communication via the first bulkhead 547 and the second bulkhead 549 with rear wall upper panel pipeline 536.Shown in Figure 15 and Figure 16 Piping components 500 can provide Efficient Cycle of the inert gas from anterior Wall board piping components 510（It is by inertia Gas is recycled to ceiling panel pipeline via front walls Face plate outlet 515 and 517 respectively from anterior Wall board inlet duct 512 505 and 507）And from left side wall panel component 520, right side wall panel component 530 and rear portion Wall board piping components 540 Efficient Cycle（Air is recycled to ventilating opening 545 from inlet duct 522,532 and 542 respectively）.Once inert gas via Ceiling panel pipeline 505 and 507 and ventilating opening 545 are discharged to the closing under the fan filter unit lid 103 of locking device 100 Region, the inert gas so discharged can be filtered by fan filter unit 752 and 754.In addition, the inert gas of circulation Heat exchanger 742 and 744 can be passed through（It is a part for heat regulating system）It is maintained at preferred temperature.
Figure 17 is the imaginary bottom view of closed pipe system component 500.Inlet ductwork component 502 includes fluid each other The front walls panel entry pipeline 512 of connection, left side wall panel inlet duct 522, right side wall panel inlet duct 532 and after Portion's Wall board inlet duct 542.The each inlet duct included for Inlet ductwork component 502, exists along each pipe The equally distributed clear opening in road bottom, multigroup opening are especially emphasized, for the purpose of this teaching, such as anterior Wall board enters Opening 511, the opening 521 of left side wall panel inlet duct 522, the opening of right side wall panel inlet duct 532 of mouth pipeline 512 531 and the opening 541 of right side wall panel inlet duct 542.It can see in the bottom of each inlet duct, this opening carries For effectively being absorbed in locking device 100 for inert gas, for continuous circulation and filtering.Gas confinement component it is each The continuous circulation and filtering of the inert gas of embodiment, which provide, to be used to keep in each embodiment of gas confinement component system It there is no the environment of particle.Each embodiment of gas confinement component system may remain in ISO for particulate matter 4 grades of 14644.Each embodiment of gas confinement component system may remain in for the especially sensitive process of particle contamination 3 grades of specifications of ISO 14644.As it was noted above, pipe I is provided to the inert gas outlet of extraneous gas cleaning system, and pipe II The filtering being provided to inside gas confinement component 100 and the purification inert gas of circulation loop return.
In each embodiment according to the gas confinement component system of this teaching, the beam of cable, line and pipeline etc. can be with Pipeline is fed through, to purge the reactive ambient gas in the dead band for the beam for being trapped in cable, line and pipeline etc., such as water Steam and oxygen.According to this teaching, it has been found that the dead band formed in the beam of cable, line and pipeline forms and retains reactivity The reservoir of material, it can significantly extend so that gas confinement component meets needed for the specification for performing air-sensitive process Time.Each embodiment of gas confinement component and system for this teaching for printing OLED device, various reactivity Material（Including various reactive ambient gas, such as water vapour and oxygen, and organic vapor）In every kind of material all It may remain in such as 100 ppm or lower, 10 ppm or lower, 1.0 ppm or lower or 0.1 ppm or lower.
In order to be understood by how the feeding of the cable of pipeline can cause to reduce the dead appearance from the cable that ties in, line and pipeline etc. Time needed for product purging retention reactive ambient gas, with reference to figure 18A-19.Figure 18 A show the enlarged drawing of beam I, and beam I can To be that may include pipeline（For example, for various ink, solvent etc. to be conveyed to print system（Such as the print system 50 of Figure 13）Pipe Line A）Beam.The beam I of Figure 18 A can also include electric wire（Such as electric wire B）And cable（Such as coaxial cable C）.This pipeline, line Inside is routed to be connected to various devices and equipment together with can tying in cable and from outside（Printed including OLED and be System）.Can be seen that this beam in the shadow region of Figure 18 A can form substantial amounts of dead band D.In the schematic perspective view of Figure 18 B In, when cable, line and bale of pipeline I are fed through pipeline II, inert gas III can continuously sweep the beam.Figure 19's Amplification sectional view shows how the inert gas for continuously sweeping the pipeline that ties in, line and cable can effectively increase from this beam The dead volume of middle formation removes the speed for retaining reactive materials.Reactive materials A leaves dead volume（In Figure 19 by by The overall area that substance A occupies represents）Diffusion rate and dead volume outside（By being occupied by inert gas species B in Figure 19 Overall area represents）Reactive species concentrations be inversely proportional.That is, if the reactive materials in the volume just outside dead volume Concentration is high, then diffusion rate is reduced.If the reactive species concentrations in this region are from just outside dead volume space Volume continuously reduces（By the flowing stream of inert gas, mass action is then passed through）, then reactive materials expand from dead volume Scattered speed increase.In addition, by same principle, inert gas can be spread in dead volume, because retaining reactive thing Matter is effectively removed from these spaces.
Figure 20 A are the stereograms of the back angle of each embodiment of gas confinement component 600, and imaginary drawing passes through return duct 605 enter the inside of gas confinement component 600.For each embodiment of gas confinement component 600, rear portion Wall board 640 can To be configured to provide at the path of for example electric bulkhead with insertion panel 610, insertion panel 610.Cable, line and pipeline etc. Beam can be fed through bulkhead and enter cable wiring conduit, such as the pipeline 632 shown in right side wall panel 630, for this reason, can Dismounting insertion panel has dismantled the beam being routed to exposure in the first cable, line and bale of pipeline conduit entrance 636.From here, The beam can be fed to the inside of gas confinement component 600, and by the inside of gas confinement component 600 in imaginary drawing Return duct 605 show.Each embodiment for the gas confinement component of cable, line and pipeline wiring in bundles can have more In a cable, line and bale of pipeline import, as shown in FIG. 20 A, it illustrates the first beam conduit entrance 634 and for another beam Second beam conduit entrance 636.Figure 20 B show the enlarged drawing of the beam conduit entrance 634 for cable, line and bale of pipeline.Beam tube Road import 634 can have features designed to be formed the opening 631 of sealing with slide lid 633.In various embodiments, opening 631 can To accommodate flexible sealing module, such as the Roxtec Company by being sealed for cable entries are provided, it can accommodate beam In cable, line and the pipeline of various diameters etc..Alternatively, the upper part 637 of the top 635 of slide lid 633 and opening 631 There can be the compliant materials set on each surface, so that compliant materials can be fed through import（Such as, beam tube road into Mouth 634）Beam in cable, line and the pipeline of various sizes diameter etc. around form sealing.
Figure 21 is the bottom view of each embodiment of the ceiling panel of this teaching, such as the gas confinement component of Fig. 3 and is The ceiling panel 250 ' of system 100.According to each embodiment of this teaching of assembling gas lock, lighting device can be installed In ceiling panel（Such as the gas confinement component of Fig. 3 and the ceiling panel 250 ' of system 100）Inside top surface on.Such as Figure 21 Shown, lighting device can be installed on the interior section of each framing component by the top plate frame 250 with interior section 251 On.For example, top plate frame 250 can have two top plate frame sections 40, top plate frame section 40 usually has two top plate frames Set a roof beam in place 42 and 44.Each top plate frame section 40 can have towards the first side 41 of 250 positioned internal of top plate frame and direction Second side 43 of the outside of top plate frame 250 positioning.Each reality according to this teaching for providing illumination for gas lock Example is applied, it is right that illumination component 46 can be installed.Each pair illumination component 46 can include the first illumination component 45 close to the first side 41 With the second illumination component 47 close to the second side 43 of top plate frame section 40.The quantity of illumination component shown in Figure 21, positioning It is exemplary with packet.The quantity of illumination component and packet can be changed with any desired or suitable method.In each implementation In example, illumination component can be installed straightly, and in other embodiments, it is each to may be mounted so that they can be moved to Position and angle.The setting of illumination component is not limited to top panel top plate 433, but in addition to that or replace can be with On the gas confinement component shown in Fig. 3 and any other inner surface of system 100, outer surface and surface combination.
Various illumination components can include any quantity, the lamp of type or combination, such as halogen light lamp, white lamp, incandescence, arc Light lamp or light emitting diode or device（LED）.For example, each illumination component can include 1 LED to about 100 LED, greatly About 10 LED to about 50 LED, or more than 100 LED.LED or other lighting devices can be sent in chromatography, chromatography Outer or its combination any color or color combination.According to each reality of the gas confinement component for inkjet printing OLED material Example is applied, because some materials are to the photaesthesia of some wavelength, thus the light wave of the lighting device in gas confinement component Length can be specifically chosen, and be degraded to avoid material during process.It is, for example, possible to use 4X cool white LED, can also use 4X yellow leds or any combination thereof.The example of 4X cool whites LED be can from IDEC Corporation of Sunnyvale, The LF1B-D4S-2THWW4 that California is obtained.The example for the 4X yellow leds that can be used is can also be from IDEC The LF1B-D4S-2SHY6 that Corporation is obtained.LED or other illumination components can be from the interior section of top plate frame 250 The positioning of any position or suspension on 251 or on another surface of gas confinement component.Illumination component is not limited to LED.Can To use the combination of any suitable illumination component or illumination component.Figure 22 is the curve map of IDEC LED lights spectrum, and shows Peak strength be 100% when with the corresponding x-axis of intensity and and wavelength（Unit：Nanometer）Corresponding y-axis.Show LF1B Huangs Color type, yellow fluorescence lamp, the frequency spectrum of LF1B white type LED, LF1B cool white color type LED and LF1B red types LED.Root According to each embodiment of this teaching, other spectrum and spectral combination can be used.
Recall, each embodiment of gas confinement component can with minimize the internal capacity of gas confinement component and Optimization Work space in a manner of accommodating the various floor spaces of various OLED print systems to build at the same time.The gas so built Each embodiment of closed component be also easy to during process the inside of gas confinement component accessible from the outside and it is easily accessible in Portion minimizes downtime to safeguard.In this respect, can according to each embodiment of the gas confinement component of this teaching It is wide with the various floor space fixed wheels on various OLED print systems.
Those of ordinary skill is appreciated that for framing component structure, panel structure, frame and panel sealing and gas Closed component（For example, the gas confinement component 100 of Fig. 3）This teaching of structure can be applied to various sizes and design Gas confinement component.Such as, but not limited to, the fixed wheel exterior feature gas envelope of this teaching of size of foundation base Gen 3.5 to Gen 10 is covered The each embodiment for closing component can have in about 6 m3To about 95 m3Between internal capacity, and non-fixed wheel can be directed to Wide and with suitable nominal dimension locking device saves volume between about 30% to about 70%.Gas confinement component it is each A embodiment can cause each framing component to be built into the profile provided for gas confinement component, to accommodate OLED printings System be used for its function and at the same time Optimization Work space to minimize inert gas volume, and also allow during process be easy to from It is exterior close to OLED print systems.In this respect, each gas confinement component of this teaching can be laid out and volume side in profile Face changes.
Figure 23 provides the example of the gas confinement component according to this teaching.Gas confinement component 1000 may include forward frame Component 1100, central frame component 1200 and rear frame component 1300.Forward frame component 1100 may include forward frame base Portion 1120, front walls frame 1140 and anterior top plate frame 1160, front walls frame 1140 has the opening for being used for receiving substrate 1142.Central frame component 1200 may include central frame base portion 1220, right end wall frame 1240, midfeather frame 1260 and a left side End wall frame 1280.Rear frame component 1300 may include rear frame base portion 1320, rear wall frame 1340 and rear portion top plate Frame 1360.Region shown in shade shows the available work volume of gas confinement component 1000, it is to can be used for accommodating The volume of OLED print systems.Each embodiment fixed wheel of gas confinement component 1000 is wide to operate air-sensitive process to minimize （For example, OLED print procedures）The volume of required recycling inert gas, and allow to be conveniently accessible to OLED print systems at the same time （During operation remotely or directly by can easily disassembled panel have easy access to）.For covering size of foundation base Gen Each embodiment of the gas confinement component of 3.5 to Gen 10 this teaching, according to the fixed wheel exterior feature gas confinement component of this teaching Each embodiment can have in about 6 m3To about 95 m3Between gas confinement volume, such as, but not limited to about 15 m3To about 30 m3Between, this is probably to have for the OLED printings of such as 8.5 size of foundation base of Gen 5.5 to Gen .
Gas confinement component 1000 can have in this teaching for the institute described in example gases closed component 100 There is feature.Such as, but not limited to, gas confinement component 1000 can use the sealing according to this teaching, pass through several structures to provide Build and deconstruct the gas-tight seal locking device of circulation.Each embodiment of gas confinement system based on gas confinement component 1000 There can be gas purge system, it can be by various reactive materials（Including various reactive ambient gas, such as water vapour And oxygen, and organic vapor）Every kind of material level be maintained at such as 100 ppm or lower, 10 ppm or lower, 1.0 ppm or lower or 0.1 ppm or lower.
In addition, each embodiment of the gas confinement component system based on gas confinement component 1000 can have circulation and Filtration system, its can provide 3 grades and 4 grades clean room standards meeting ISO 14644 without particle environments.In addition, as then Shown in more detail, the gas confinement component based on this teaching（For example, gas confinement component 100 and gas closed component 1000）'s Gas confinement component system can have each embodiment of pressurized inert gas recirculating system, it can be used for operation for example But be not limited to it is following in one or more：Pneumatic robot, substrate suspending bench, air bearing, air bushing, compressed gas work Tool, pneumatic actuator, and combinations thereof.Each embodiment of gas lock and system for this teaching, uses various gas The device and equipment of dynamic operation can provide low particles generation performance and low-maintenance cost.
Figure 24 is the exploded view according to the gas confinement component 1000 of this teaching, it is illustrated that can be constructed to provide airtight Each framing component of sealing gas locking device.As described previously for each implementation of the gas lock 100 of Fig. 3 and Figure 13 Described in example, OLED ink-jet print systems 50 can include allowing ink droplet reliable arrangement in substrate（Such as substrate 60）Upper certain bits The multiple devices and equipment put, show near substrate suspending bench 54.Each portion of OLED print systems 50 can be included by providing Part, each embodiment of OLED print systems 50 can have various floor spaces and form factor.According to OLED inkjet printings Each embodiment of system, various base materials can be used for substrate 60, such as, but not limited to various glass substrate materials and Various polymeric base materials.
According to each embodiment of the gas confinement component of this teaching, as described previously for described in gas lock 100, gas The structure of body closed component can carry out around whole OLED print systems, with minimize the volume of gas confinement component and It is conveniently accessible to inside.In fig. 24, the example of fixed wheel exterior feature can be contemplated OLED print systems 50 and provide.
As shown in figure 24, there may be six isolators in OLED print systems 50, it can be seen that two of which：First 51 and second isolator 53 of isolator, it supports the substrate suspending bench 54 of OLED print systems 50.Except it is equal with visible first every Outside two additional isolators opposite from 51 and second isolator 53 of device, there are two of support OLED print systems base portion 52 Isolator.Closed front base portion 1120 can have the first closed front of the first closed front isolator wall frame 1123 of support Isolator bearing 1121.Second closed front isolator wall frame 1127 is by the second closed front isolator bearing（It is not shown）Branch Support.Similarly, middle sealed end region 1220 can have among first of closing isolator wall frame 1223 among support first Close isolator bearing 1221.Closing isolator wall frame 1227 closes isolator bearing by the second centre among second（Do not show Go out）Support.Finally, after rear closure base portion 1320 can have first of closing isolator wall frame 1323 among support rear portion Portion's closing isolator bearing 1321.Second rear closure isolator wall frame 1327 is by the second rear closure isolator bearing（Not Show）Support.Each embodiment of isolator wall framing component can around each isolator fixed wheel it is wide, so as to minimize every Volume around a isolator supporting member.In addition, shown for each isolator wall frame of base portion 1120,1220 and 1320 Shade panel part section be demountable detachable panel, such as to repair isolator.Closed front component base portion 1120 There can be disk 1122, while middle closed component base portion 1220 can have disk 1222, and rear closure component base portion 1320 There can be disk 1322.When base portion is built to form adjacent base portion completely, OLED print systems, which may be mounted at, to be consequently formed Adjoining disk on, by similar to by OLED print systems 50 installed in Figure 13 disk 204 in a manner of.As it was noted above, wall and Top plate framing component, such as the wall frame 1140 of forward frame component 1100, top plate frame 1160；Central frame component 1200 Wall frame 1240,1260 and 1280；And wall frame 1340, the top plate frame 1360 of rear frame component 1300, then can be with It is combined together around OLED print systems 50.Thus, the gas-tight seal each reality for determining contoured wall framing component of this teaching Apply example and efficiently reduce inert gas volume in gas confinement component 100, and be conveniently accessible to each of OLED print systems at the same time A device and equipment.
According to the gas confinement component and system of this teaching can have gas confinement component internal gas circulation and Filtration system.This self-filtering system can have multiple fan filter units in inside, and can be configured to Gas laminar flow is provided in inside.Laminar flow can be from internal top to the direction of internal bottom either any other side To.Although needing not be laminar flow by the gas stream that the circulatory system produces, gas laminar flow can be used to ensure that in inside The thorough and complete turnover of gas.Gas laminar flow can be also used for minimizing turbulent flow, and this turbulent flow is undesirable, because it can So that the powder collection in environment is in this regions of turbulent flow, so as to prevent filtration system from removing those particles from environment.In addition, In order to keep preferred temperature in inside, the heat regulating system using multiple heat exchangers can be provided, such as by means of fan Or the operation of another gas-recycling plant, close to fan or another gas-recycling plant, or with fan or another gas Circulator is used in combination.Gas purification loop can be configured to by least one gas purification portion outside locking device Part is from gas confinement component internal recyclegas.In this respect, the filtering of gas confinement component internal and the circulatory system and gas Gas purification loop combination outside closed component can provide the notable low particulate inert gas in gas confinement component Continuous circulation, it has notable low-level reactive materials.Gas purge system can be configured to keep very low-level Be not intended to component, such as organic solvent and its steam and water, water vapour, oxygen etc..
Figure 25 is the schematic diagram for showing gas confinement component and system 2100.Gas confinement component and system 2100 it is each A embodiment can include the gas confinement component 1500 according to this teaching, the gas being in fluid communication with gas confinement component 1500 Purification circuit 2130 and at least one heat regulating system 2140.In addition, each embodiment of gas confinement component and system can With with pressurized inert gas recirculating system 2169, it can be with supplying inert gas to operate each device, such as OLED is beaten The substrate suspending bench of print system.Each embodiment of pressurized inert gas recirculating system 2169 can use compressor, air blast Machine and both combinations, it is such as then described in more detail as the source of each embodiment of inert gas recirculating system 2169.This Outside, gas confinement component and system 2100 can have filtering and the circulatory system inside gas confinement component and system 2100 （It is not shown）.
As shown in figure 25, can be incited somebody to action for each embodiment of the gas confinement component according to this teaching, the design of pipeline Cycle through the inert gas of gas purification loop 2130 from the continuous filtering inside each embodiment of gas confinement component and The inert gas of circulation separates.Gas purification loop 2130 includes egress line 2131, it is from gas confinement component 1500 to molten Agent removing component 2132 and then arrive gas purge system 2134.It is cleaned solvent and other reactant gas materials（Such as oxygen Gas and water vapour）Inert gas then pass through inlet line 2133 and return to gas confinement component 1500.Gas purification loop 2130 can also include suitable pipe and connection, and sensor, such as oxygen, water vapour and solvent vapo(u)r sensor.Gas follows Ring element, such as fan, air blower or motor etc., can be independently arranged or be integrally formed in such as gas purge system 2134 In, gas circulation is passed through into gas purification loop 2130.According to each embodiment of gas confinement component, although solvent removes System 2132 and gas purge system 2134 are shown as separate unit in the schematic diagram shown in Figure 25, but solvent removes system 2132 with gas purge system 2134 can be used as single clean unit accommodate together with.Heat regulating system 2140 may include at least One cooler 2141, it can have 2143 He of fluid outlet circuit for being used for being recycled to cooling agent in gas confinement component For making cooling agent return to the fluid inlet circuit 2145 of cooler.
The gas purification loop 2130 of Figure 25 can have the solvent for being arranged on 2134 upstream of gas purge system to remove system System 2132, so that the inert gas circulated from gas confinement component 1500 removes system via egress line 2131 by solvent 2132.According to each embodiment, it can be based on removing system 2132 from by the solvent of Figure 25 that solvent, which removes system 2132, The solvent capture systems of inert gas lyosoption steam.Sorbent bed or multiple beds, such as, but not limited to activated carbon, molecular sieve Deng can effectively remove the various organic vapors of wide scope.For each embodiment of gas confinement component, can adopt With cold capture technique, solvent vapo(u)r in system 2132 is removed to remove solvent.As it was noted above, for the gas according to this teaching Each embodiment of body closed component, can use sensor, such as oxygen, water vapour and solvent vapo(u)r sensor, with monitoring This material is from being continuously circulated through gas confinement component system（For example, the gas confinement component system 2100 of Figure 25）It is lazy Property gas effective removal.Each embodiment that solvent removes system can indicate absorbent（Such as activated carbon, molecular sieve etc.） When capacity is reached, so that sorbent bed or multiple beds can be regenerated or replaced.The regeneration of molecular sieve may include heating molecular sieve, So that molecular sieve is contacted with forming gas, and combinations thereof etc..It is configured to capture each material（Including oxygen, water vapour and solvent） Molecular sieve can be by heating and exposed to the forming gas including hydrogen（E.g., including about 96% nitrogen and 4% The forming gas of hydrogen）And regenerate, the percentage is volume ratio or weight ratio.The physics regeneration of activated carbon can be used lazy Property environment under the similar procedure that heats complete.
Any suitable gas cleaning system may be used to the gas purge system of the gas purification loop 2130 of Figure 25 2134.For example, can be from MBRAUN Inc., of Statham, New Hampshire or Innovative Technology Of Amesbury, the gas purge system that Massachusetts is obtained can be used for being integrally formed in the gas according to this teaching In each embodiment of closed component.Gas purge system 2134 can be used in purification gas closed component and system 2100 One or more inert gases, for example, with all gas environment in purification gas closed component.As it was noted above, in order to make Gas circulation is obtained by gas purification loop 2130, gas purge system 2134 can have gas circulation unit, such as fan, drum Wind turbine or motor etc..In this respect, gas purge system can be selected according to the volume of locking device, it can be limited for making Obtain the volume flow rate that inert gas is moved through gas purge system.For including with until about 4 m3Volume gas The gas confinement component of body closed component and each embodiment of system；Can use can move about 84 m3The gas of/h Cleaning system.For including with until about 10 m3Volume gas confinement component gas confinement component and system Each embodiment；Can use can move about 155 m3The gas purge system of/h.For with about 52-114 m3 Between volume gas confinement component each embodiment；More than one gas purge system can be used.
Any suitable gas filter or purifier can be included in the gas purge system 2134 of this teaching.One In a little embodiments, gas purge system may include two purifiers in parallel, thus a device can take away offline for Safeguard, and another device can be used for continuing system operatio, without interrupting.In certain embodiments, for example, gas purification System may include one or more molecular sieves.In certain embodiments, gas purge system can include at least the first molecular sieve and Second molecular sieve, so that in a molecular sieve impurity saturation or when otherwise thinking sufficiently effective to operate, system Another molecular sieve can be switched to, while regenerates saturation or poorly efficient molecular sieve.Control unit can provide every for determining The operating efficiency of a molecular sieve, for switching between the operation that different molecular sieves, for regenerating one or more molecular sieves, or For its combination.As it was noted above, molecular sieve can be reproduced and reuse.
On the heat regulating system 2140 of Figure 25, at least one fluid cooler 2141 can be set, for cooling gas Gaseous environment in closed component and system 2100.For each embodiment of the gas confinement component of this teaching, fluid cooling Cooling fluid is conveyed to the heat exchanger in locking device by device 2141, wherein, inert gas is by the mistake inside locking device Filter system.At least one fluid cooler can also be arranged in gas confinement component and system 2100, and gas is come from cooling The heat of the equipment of encapsulation in locking device 2100.Such as, but not limited to, at least one fluid cooler may be provided for Gas confinement component and system 2100, the heat of OLED print systems is come from cooling.Heat regulating system 2140 may include hot friendship Change or Peltier device, and there can be various cooling capacities.For example, each implementation for gas confinement component and system Example, cooler can be provided in about 2 kW to the cooling capacity between about 20 kW.Fluid cooler 1136 and 1138 can be with The one or more fluids of cooling.In certain embodiments, fluid cooler can use multiple fluid as cooling agent, such as but It is not limited to, water, antifreezing agent, refrigerant and combinations thereof, as heat-exchange fluid.Suitable No leakage locking connection can be used for connecting It is connected to pass pipe and system unit.
As shown in Figure 26 and Figure 27, one or more fan filter units can be configured to provide by internal gas Substantially laminar flow.According to each embodiment of the gas confinement component according to this teaching, one or more fan units set and lean on First inner surface of nearly gaseous environment locking device, one or more pipe-line system entrances are arranged close to gaseous environment locking device Opposite second inner surface.For example, gaseous environment locking device can include inner top and bottom inner rim, it is one or Multiple fan units can be arranged close to inner top, and one or more of pipe-line system entrances can include being arranged close to bottom Multiple entrance openings of portion's inner rim, it is a part for pipe-line system, as seen in figs. 15-17.
Figure 26 is cut along what the gas confinement component of each embodiment according to this teaching and the length of system 2000 intercepted Face figure.The gas confinement component and system 2000 of Figure 26 may include the gas lock that can accommodate OLED print systems 50 1500 and gas purge system 2130（Referring also to Figure 25）, heat regulating system 2140, filtering and the circulatory system 2150 and pipe Road system 2170.Heat regulating system 2140 may include and cooler outlet circuit 2143 and 2145 fluid of cooler inlet line company Logical fluid cooler 2141.Cooling fluid may exit off fluid cooler 2141, flow through cooler outlet circuit 2143, And heat exchanger is conveyed to, for the gas confinement component and each embodiment of system shown in Figure 26, it can be located at multiple Near each in fan filter unit.Fluid can be entered from the heat exchanger near fan filter unit by cooler Mouth line road 2145 returns to cooler 2141, to be maintained at constant preferred temperature.As it was noted above, 2141 He of cooler outlet circuit Cooler inlet line 2143 is connected with multiple heat exchanger fluids, including first heat exchanger 2142, second heat exchanger 2144 and the 3rd heat exchanger 2146.Each embodiment of gas confinement component and system according to Figure 26, the first heat are handed over Parallel operation 2142,2144 and the 3rd heat exchanger 2146 of second heat exchanger the first fan filter with filtration system 2150 respectively Unit 2152, the second fan filter unit 2154 and 2156 thermal communication of three fan filter unit.
In fig. 26, many arrows show the flowing of round-trip each fan filter unit, and also show including Flowing in the pipe-line system 2170 of first pipe-line system pipe 2173 and second pipe system pipes 2174, simplifies signal such as Figure 26 Shown in figure.First pipe-line system pipe 2173 can be received gas by the first entrance 2171 and can be gone out by the first pipeline Mouth 2175 is discharged.Similarly, second pipe system pipes 2174 can be received gas by second pipe entrance 2172 and by the Two pipe outlets 2176 are discharged.In addition, as shown in figure 26, pipe-line system 2170 is by effectively limiting space 2180 by including The inert gas that portion is again circulated through filtration system 2150 separates, and space 2180 is via gas purification egress line 2131 and gas Body cleaning system 2130 is in fluid communication.The cyclic system of this each embodiment including for the pipe-line system described in Figure 15-17 System provides substantially laminar flow, minimizes turbulent flow, promotes the circulation of the particulate matter of the gaseous environment in locking device inside, has enough to meet the need And filtering, and the circulation of the gas purge system by gas confinement component external is provided.
Figure 27 is the gas confinement component and system 23000 along each embodiment of the gas confinement component according to this teaching Length interception sectional view.Similar with the gas confinement component 2200 of Figure 26, the gas confinement component system 2300 of Figure 27 can Including gas lock 1500, it can accommodate OLED print systems 50 and gas purge system 2130（Referring also to figure 25）, heat regulating system 2140, filtering and the circulatory system 2150 and pipe-line system 2170.For gas confinement component 2300 Each embodiment, heat regulating system 2140 may include and cooler outlet circuit 2143 and 2145 fluid of cooler inlet line company Logical fluid cooler 2141, can connect with multiple heat exchanger fluids, such as the heat of first heat exchanger 2142 and second is handed over Parallel operation 2144, as shown in figure 27.Each embodiment of gas confinement component and system according to Figure 27, each heat exchange Device, such as first heat exchanger 2142 and second heat exchanger 2144, can pass through positioning with the inert gas thermal communication of circulation Close to the first pipe outlet 2175 and the second pipe outlet 2176 of pipe outlet, such as pipe-line system 2170.In this respect, from Entrance（Such as the first entrance 2171 and second pipe entrance 2172 of pipe-line system 2170）Return so as to filtering Inert gas can cycle through the first fan filter unit 2152, second of the filtration system 2150 of such as Figure 27 respectively It is thermally regulated before fan filter unit 2154 and three fan filter unit 2156.
Fan is can be seen that from the arrow in the direction for the inert gas for showing the locking device for cycling through Figure 26 and 27 Filter unit is configured to provide the substantially laminar flow from locking device top down towards bottom.For example, can be from Flanders Corporation, of Washington, North Carolina or Envirco Corporation of Sanford, The fan filter unit that North Carolina are obtained can be used for being formed integral to according to the gas confinement component of this teaching In each embodiment.Each embodiment of fan filter unit can be exchanged by the inert gas of each unit about 350 cubic feet/minutes（CFM）To between about 700 CFM.As shown in figures 26 and 27, since fan filter unit is in simultaneously Join rather than be arranged in series, thus the amount for the inert gas that can be exchanged in the system including multiple fan filter units with The element number used is proportional.Near the bottom of locking device, gas stream is guided towards multiple pipe-line system entrances, is being schemed The first entrance 2171 and second pipe entrance 2172 are schematically illustrated as in 26 and 27.As described previously for Figure 15-17 institute State, entrance is positioned at the approximate bottom of locking device and so that gas flows downward profit from upper fan filter unit In the good turnover of the gaseous environment in locking device, and promote by the gas purge system that is used in combination with locking device The thorough turnover and movement of all gas environment.By using filtering and the circulatory system 2150 so that gaseous environment cycles through pipe Road system and the laminar flow of the gaseous environment in promotion locking device and thoroughly turnover, pipe-line system would circulate through gas purification and return The inert gas flow on road 2130 separates, reactive materials（Such as water and oxygen, and every kind of solvent）Every kind of level in gas It may remain in such as 100 ppm or lower, such as 1.0 ppm or lower, 0.1 ppm in each embodiment of body closed component It is or lower.
According to each embodiment of the gas confinement component system for OLED print systems, the number of fan filter unit Amount can be selected according to the physical location of the substrate in the print system during process.Therefore, although showing in Figure 26 and 27 3 fan filter units are gone out, but the quantity of fan filter unit can change.For example, Figure 28 is along gas confinement The sectional view of the length of component and system 2400 interception, it is similar with the gas confinement component shown in Figure 23 and Figure 24 and system. Gas confinement component and system 2400 may include gas confinement component 1500, it accommodates the OLED printings system being supported on base portion 52 System 50.The substrate suspending bench 54 of OLED print systems be limited to substrate OLED printing during substrate may move through system 2400 stroke.Thus, the filtration system 2150 of gas confinement component and system 2400 has appropriate number of fan filter Unit；With shown in 2151-2155, with during process substrate it is corresponding by the physics stroke of OLED print systems 50.In addition, The fixed wheel exterior feature that the schematic cross sectional representation of Figure 28 has gone out each embodiment of gas lock can be efficiently reduced in OLED Inert gas volume needed for during print procedure, and the inside of gas lock 1500 is conveniently accessible at the same time（In the process phase Between remotely approach, such as using the gloves in each gloves port, or by each in the case of attended operation Kind detachable panel is immediately adjacent to）.
Each embodiment of gas lock and system can use pressurized inert gas recirculating system, for operating Various pneumatic operation devices and equipment.In addition, as it was noted above, the embodiment of the gas confinement component of this teaching can be relative to External environment condition is maintained at slight positive pressure, such as, but not limited in about 2 mbarg between about 8 mbarg.In gas confinement It is probably to have challenge that pressurized inert gas recirculating system is kept in component system, because it has with keeping gas confinement group Part and the slight just related dynamic of internal pressure of system and the balance play persistently carried out, and simultaneously continuously introduce pressurization gas Body is into gas confinement component and system.In addition, each device and the variable demand of equipment are likely to form the various gas of this teaching The irregular pressure curve of body closed component and system.Slight positive pressure will be maintained at relative to external environment condition under these conditions Gas confinement component keeps dynamic pressure to balance the globality that can provide the OLED print procedures for persistently carrying out.
As shown in figure 29, each embodiment of gas confinement component and system 3000 can have extraneous gas circuit 2500, the inert gas source 2509 of the various aspects for integrating and controlling the operation for gas confinement component and system 3000 And clean dry air（CDA）Source 2512.It will be appreciated by the skilled addressee that gas confinement system 3000 can also include Internal particle filters and each embodiment of gas-circulating system and each embodiment of extraneous gas cleaning system, such as above It is described.In addition to the external circuit 2500 for integrating and controlling inert gas source 2509 and CDA sources 2512, gas confinement group Part and system 3000 can have compressor loop 2160, it can may be arranged on gas with supplying inert gas for operating Each device and equipment in 3000 inside of closed component and system.
The compressor loop 2160 of Figure 29 may include compressor 2162,2164 and of the first reservoir for configuring communication Second reservoir 2168.Compressor 2162 can be configured to the inert gas aspirated from gas confinement component 1500 being compressed to the phase Hope pressure.The entrance side of compressor loop 2160 can pass through with valve 2505 and non-return via gas confinement module outlet 2501 The circuit 2503 of valve 2507 is in fluid communication with gas confinement component 1500.Compressor loop 2160 can be in compressor loop 2160 Outlet side on be in fluid communication via extraneous gas circuit 2500 and gas confinement component 1500.Reservoir 2164 can be arranged on Between compressor 2162 and the engaging portion in compressor loop 2160 and extraneous gas circuit 2500, and it can be configured to generation 5 The pressure of psig or higher.Second reservoir 2168 may be in compressor loop 2160, for damping since compressor is lived Plug circulates caused fluctuation with about 60 Hz.For each embodiment of compressor loop 2160, the first reservoir 2164 can be with With the capacity between about 80 gallons to about 160 gallons, and the second reservoir can have about 30 gallons to about 60 Capacity between gallon.According to gas confinement component and each embodiment of system 3000, compressor 2162 can be zero entrance Compressor（zero ingress compressor）.Various types of zero can leak into compressor in no environmental gas To this teaching gas confinement component and system each embodiment in the case of operate.Zero enters each implementation of compressor Example can continuously be run, such as be printed using each device and the OLED of the purposes of equipment that need compressed inert During journey.
Reservoir 2164 can be configured to receive and gather compressed inert from compressor 2162.Reservoir 2164 can be with Compressed inert is supplied to gas confinement component 1500 when needed.For example, reservoir 2164 can provide gas to protect The pressure of all parts of gas confinement component 1500 is held, the one or more in being such as, but not limited to as follows：Pneumatic robot, Substrate suspending bench, air bearing, air bushing, compressed gas instrument, pneumatic actuator, and combinations thereof.As Figure 29 is directed to gas Shown in closed component and system 3000, gas confinement component 1500, which can have, is encapsulated in OLED print systems 50 therein.Such as Shown in Figure 24, OLED print systems 50 can be supported by granite level 52, and can include substrate suspending bench 54, for by substrate It is transported to suitable position and the support substrate during OLED print procedures in printing head chamber.In addition, it is supported on bridge 56 Air bearing 58 can substitute such as linear mechanical bearing use.Each reality of gas lock and system for this teaching Example is applied, low particles generation performance and low-maintenance cost can be provided using various pneumatic operation devices and equipment.Compressor returns Road 2160 can be configured to pressurized inert gas being continuously fed to each device and equipment of gas confinement equipment 3000.Remove Outside supply pressurized inert gas, the substrate suspending bench 54 of OLED print systems 50（It uses air bearing technology）Also use Vacuum system 2550, vacuum system 2550 pass through circuit 2552 and gas confinement component 1500 when valve 2554 is in an open position Connection.
Can be had according to the pressurized inert gas recirculating system of this teaching and be used for compressor loop as shown in figure 29 2160 pressure control bypass circulation 2165, it to compensate the variable demand of gas-pressurized during use, so as to provide this The dynamic equilibrium of the gas confinement component of teaching and each embodiment of system.For the gas confinement component according to this teaching and Each embodiment of system, bypass circulation can keep the constant pressure in reservoir 2164, without disturbing or changing closing dress Put the pressure in 1500.Bypass circulation 2165 can have the first bypass inlet valve on the entrance side of bypass circulation 2165 2162, it is closed, unless using bypass circulation 2165.Bypass circulation 2165 can also have back pressure regulator, it can be Two valves 2163 use when closing.Bypass circulation 2165 can have the second storage being arranged at the outlet side of bypass circulation 2165 Device 2168.Embodiment for the compressor loop 2160 for entering compressor using zero, bypass circulation 2165 can be compensated in gas The small offset of pressure that body closed component and system may occur as time goes by during use.When bypass inlet valve 2161 is in During open position, bypass circulation 2165 can be in fluid communication on the entrance side of bypass circulation 2165 with compressor loop 2160. When bypass inlet valve 2161 is opened, it cannot meet gas confinement component if coming from the inert gas of compressor loop 2160 Needs in 1500 inside, then the inert gas shunted by bypass circulation 2165 can be recycled to compressor.Work as storage When inert gas pressure in device 2164 exceedes predetermined threshold value pressure, compressor loop 2160 is configured to inert gas shunting is logical Cross bypass circulation 2165.The predetermined threshold value pressure of reservoir 2164 is at least about 1 cubic feet/minute（cfm）Flow rate when can With in about 25 psig between about 200 psig, or at least about 1 cubic feet/minute（cfm）Flow rate when can be with In about 50 psig between about 150 psig, or at least about 1 cubic feet/minute（cfm）Flow rate when can be About 75 psig are between about 125 psig, or at least about 1 cubic feet/minute（cfm）Flow rate when can be big About 90 psig are between about 95 psig.
Each embodiment of compressor loop 2160 can use the various compressors in addition to zero enters compressor, example Such as variable speed compressor or the compressor of the state of opening or closing can be controlled in.As it was noted above, zero enters compressor Ensure that no environment reaction material can introduce gas confinement component and system.Thus, prevent environment reaction material from introducing Gas confinement component and the configuration of any compressor of system may be used to compressor loop 2160.According to each embodiment, gas Body closed component and the compressor of system 3,000 2162 can be contained in such as, but not limited to gas-tight seal housing.Enclosure interior Can be configured to inert gas fluid communication, such as formed gas confinement component 1500 inert gas environment it is identical lazy Property gas.For each embodiment of compressor loop 2160, compressor 2162 can be controlled in constant speed to keep constant Pressure.In the other embodiments of compressor loop 2160 of compressor are entered without using zero, compressor 2162 can reach Close during max-thresholds pressure and opened when reaching minimum threshold pressure.
In for gas confinement component and Figure 30 of system 3100, air blower circuit 2170 and blower vacuum circuit 2550 displays are used for the substrate suspending bench 54 for operating OLED print systems 50, it is contained in gas confinement component 1500.As before For described in compressor loop 2160, air blower circuit 2170 can be configured to pressurized inert gas being continuously fed to base text Bottom suspending bench 54.
The gas confinement component of pressurized inert gas recirculating system and each embodiment of system can be used to have There are the various circuits using various pressurized-gas sources, such as at least one of compressor, air blower and combinations thereof.For gas In body closed component and Figure 30 of system 3100, compressor loop 2160 can be in fluid communication with extraneous gas circuit 2500, its Can be for the inert gas applied to high consumption manifold 2525 and low consumption manifold 2513.For being sealed according to the gas of this teaching Each embodiment of component and system is closed, as shown in Figure 29 for gas confinement component and system 3000, height consumption manifold 2525 can be used for inert gas being supplied to various devices and equipment, the one or more in being such as, but not limited to as follows：Base Bottom suspending bench, pneumatic robot, air bearing, air bushing and compressed gas instrument, and combinations thereof.For according to this teaching Gas confinement component and system each embodiment, low consumption manifold 2513 can be used for inert gas being supplied to various dresses Put and equipment, it is such as, but not limited to following in one or more：Isolator and pneumatic actuator and combinations thereof.
For each embodiment of gas confinement component and system 3100, air blower circuit 2170 can be used for pressurizeing lazy Property gas be supplied to each embodiment of substrate suspending bench 54, and the compressor loop being in fluid communication with extraneous gas circuit 2500 2160 can be used for by pressurized inert gas be supplied to it is such as, but not limited to following in one or more：Pneumatic robot, sky Gas bearing, air bushing and compressed gas instrument, and combinations thereof.In addition to supplying pressurized inert gas, air bearing is used The substrate suspending bench 54 of the OLED print systems 50 of technology also uses blower vacuum system 2550, blower vacuum system 2550 Connected when valve 2554 is in an open position by circuit 2552 with gas confinement component 1500.The housing in air blower circuit 2170 2172 can be supplied to inert gas pressurized source the first air blower 2174 of substrate suspending bench 54 and as substrate suspending bench 54 The second air blower 2550 of vacuum source be maintained in inert gas environment.It can manufacture and be suitable as each of substrate suspending bench The attribute of the pressurized inert gas of embodiment or the air blower of vacuum source includes, but not limited to, e.g.：They have high reliability, So that they have low-maintenance cost；With variable speed control；And the volume flow with wide scope（It is capable of providing big About 100 m3/ h to about 2500 m3Each embodiment of volume flow between/h）.Each implementation in air blower circuit 2170 Example can also be with the first isolating valve 2173 at the arrival end of compressor loop 2170 and in compressor loop 2170 2175 and second isolating valve 2177 of check-valves at the port of export.Each embodiment in air blower circuit 2170 can have adjustable Valve 2176（It can be such as but not limited to, sluice valve, butterfly valve, needle valve or globe valve）And for will be from blower assembly The inert gas of 2170 to substrate suspension system 54 is maintained at the heat exchanger 2178 of limiting temperature.
Figure 30 show also figure 29 illustrates extraneous gas circuit 2500, for integrating and controlling the gas for Figure 29 The inert gas of the various aspects of the operation of the gas confinement component and system 3100 of body closed component and system 3000 and Figure 30 Source 2509 and clean dry air（CDA）Source 2512.The extraneous gas circuit 2500 of Figure 29 and Figure 30 can include at least four Mechanical valve.These valves include the first mechanical valve 2502, the second mechanical valve 2504, the 3rd mechanical valve 2506 and the 4th mechanical valve 2508.These each valves are located at the position in each flow circuits, it is allowed to control inert gas（For example, nitrogen, any rare Gas and its any combinations）And air-source（For example, clean dry air（CDA））Both.Inert shell gas circuit 2510 from Inert shell gas source 2509 extends.Inert shell gas circuit 2510 continues linearly to prolong as low consumption manifold line 2152 Stretch, low consumption manifold line 2152 is in fluid communication with low consumption manifold 2513.The first section of cross link 2514 is flowed from first Engaging portion 2516 extends, and the first flowing engaging portion 2516 is located at inert shell gas circuit 2510, low consumption manifold line 2152 At the cross part of the first section of cross link 2514.The first section of cross link 2514 extends to the second flowing engaging portion 2518.Compressor inert gas circuit 2520 extends from the reservoir 2164 of compressor loop 2160 and terminates at the second flowing knot Conjunction portion 2518.CDA circuits 2522 extend from CDA sources 2512 and continue as high consumption manifold line 2524, height consumption manifold line Road 2524 is in fluid communication with height consumption manifold 2525.3rd flow combinations portion 2526 is located at the second section of cross link 2528, clear At clean dry air circuit 2522 and the cross part of high consumption manifold line 2524.The second section of cross link 2528 is from second Dynamic engaging portion 2518 extends to the 3rd flow combinations portion 2526.
Description and reference table 2 as described in extraneous gas circuit 2500, are the general introduction of some each operator schemes below, table 2 It is the form of the valve position of each operator scheme of gas confinement component and system.
Table 2
Table 2 shows procedure schema, wherein, valve state produces only inert gas compressor operator scheme.In process mould Formula, as shown in figure 30 and as shown in the valve state of table 2, the first mechanical valve 2502 and the 3rd mechanical valve 2506 are in close and configure. Second mechanical valve 2504 and the 4th mechanical valve 2508 are in open and configure.Since these specific valves configure, compressed inert quilt Permit flow to both low consumption manifold 2513 and high consumption manifold 2525.Under normal operation, inert shell gas is come from The inert gas in source and the clean dry air for coming from CDA sources are prevented from flowing to low consumption manifold 2513 and high consumption manifold Any one in 2525.
As shown in table 2 and with reference to figure 30, there is the series of valves state for safeguarding and recovering.The gas confinement of this teaching Component can be needed to safeguard every now and then, needed in addition from system failure recovery.In the specific pattern, the second mechanical valve 2504 and Four mechanical valves 2508 are in close and configure.First mechanical valve 2502 and the 3rd mechanical valve 2506 are in open and configure.Inert shell Gas source and CDA sources provide inert gas, to be supplied in low consumption by low consumption manifold 2513 and also be had in convalescence Between be difficult to those components of dead volume for effectively purging.The example of this component includes pneumatic actuator.Comparatively speaking, consumption Those components can supply CDA during maintenance by means of height consumption manifold 2525.Isolated using valve 2504,2508,2530 and pressed Contracting machine prevents reactive materials（For example, oxygen and water vapour）Pollute the inert gas in compressor and reservoir.
After safeguarding or recovering to complete, gas confinement component must be by multiple cycle purges, until reactive environments Material（For example, oxygen and water）Reach enough low-levels of every kind of material, such as 100 ppm or lower, such as 10 ppm or more Low, 1.0 ppm or lower or 0.1 ppm or lower.As shown in table 2 and with reference to figure 30, during purge mode, the 3rd machinery Valve 2506 is closed and the 5th mechanical valve 2530 is also at closing configuration.First mechanical valve 2502, the second mechanical valve 2504 and the 4th Mechanical valve 2508 is in open and configures.Since the specific valve configures, only inert shell gas is allowed to flow and is allowed to flow Move both low consumption manifold 2513 and high consumption manifold 2525.
As shown in table 2 and with reference to figure 30, " no flowing " both pattern and leak-testing pattern is the mould used as needed Formula." no flowing " pattern is with the pattern such as the configuration of lower valve state：First mechanical valve 2502, the second mechanical valve the 2504, the 3rd 2506 and the 4th mechanical valve 2508 of mechanical valve is in closing configuration.The closing configures " no flowing " pattern for causing system, its In, the consumption discrimination of low consumption manifold 2513 or high cannot all be reached by coming from any gas in inert gas, CDA or compressor source Pipe 2525.This " no flow pattern " is probably useful when not in use in system, and can keep idle extending in the period. Leak-testing pattern can be used for the leakage in detecting system.Compressed inert is used exclusively in leak-testing pattern, it will System is isolated so as to the low consumption component to low consumption manifold 2513 from the high consumption manifold 2525 of Figure 30（For example, isolator and Pneumatic actuator）Carry out leak test.In the leak-testing pattern, the first mechanical valve 2502, the 3rd mechanical valve 2506 and Four mechanical valves 2508 are in closing configuration.Only the second mechanical valve 2504 is in open and configures.Therefore, compressed nitrogen can be from Compressor inert gas source 2519 flow to low consumption manifold 2513, and without the gas stream of paramount consumption manifold 2525.
All publications for being mentioned in the specification, patents and patent applicationss are all as each individually disclosed thing, patent It is incorporated by reference herein with all special be incorporated by reference into independently instruction in degree identical like that of patent application.
Although embodiment of the disclosure is being shown and described herein, it will be apparent to one skilled in the art that this reality Example is applied to provide only by exemplary mode.In the case of without departing from the disclosure, those skilled in the art will expect being permitted now Multiple changing type, change and replacement.It should be appreciated that the embodiment of the present disclosure as described herein can be used when putting into practice the disclosure Various alternative solutions.Appended claims are intended to limit the scope of the present disclosure, and thus cover in these claims and its wait Method and structure in the range of valency thing.

Claims (24)

1. a kind of gas confinement component and system, including：
Include the gas confinement component of multiple framing component components, wherein, the framing component component by sealably combine with Limit the inside for accommodating Industrial printing systems；
The gas circulation and filtration system being arranged in the inside, with the circulated inert gas in the inside and from described interior Portion removes particulate matter；
Gas purge system, the gas purge system are configured to the inert gas that purification is contained in the inside；
The conduit assembly being arranged in the inside, wherein, the conduit assembly and the gas circulation and filtration system fluid Connection, and be in fluid communication with gas purge system；And
Beam, the beam are operatively connectable to the Industrial printing systems being contained in the inside of gas confinement component, the beam bag At least one of cable, electric wire, fluid containment pipeline and combinations thereof are included, wherein, the beam is substantially provided in the pipeline In component.
2. gas confinement component according to claim 1 and system, wherein, it is trapped in a variety of in the dead volume of the beam Reactive materials are purged by the inert gas for being aspirated through conduit assembly from dead volume.
3. gas confinement component according to claim 2 and system, wherein, the reactive materials purged from dead volume are by institute State gas purge system purification.
4. gas confinement component according to claim 1 and system, wherein, the gas circulation and filtration system are configured to Substantially laminar flow by internal gas is provided.
5. gas confinement component according to claim 1 and system, wherein, inert gas be selected from nitrogen, rare gas and It is combined.
6. gas confinement component according to claim 1 and system, wherein, gas purge system is configured to the inside In reactive materials in each be maintained at 100 ppm or less.
7. gas confinement component according to claim 1 and system, wherein, gas confinement component surrounds Industrial printing systems Fixed wheel is wide, to minimize the volume of the inside of gas confinement component.
8. gas confinement component according to claim 1 and system, wherein, the volume of the inside of gas confinement component is big About 6 m3To about 95 m3Between.
9. gas confinement component according to claim 1 and system, wherein, Industrial printing systems are configured to processing and are used for The substrate of OLED device manufacture.
10. gas confinement component according to claim 9 and system, wherein, substrate has about Gen 3.5 to about The size of Gen 10.
11. gas confinement component according to claim 10 and system, wherein, substrate has about Gen 5 to about Gen 8 size.
12. a kind of Industrial printing systems, including：
Include the gas confinement component of multiple framing component components, wherein, the framing component component by sealably combine with Limit internal；
The Industrial printing systems being contained in the inside of gas confinement component；
Gas circulation and filtration system, are configured to circulated inert gas and remove particulate matter by print system and from it；
Gas purge system, the gas purge system are configured to purify the inert gas, wherein, the gas purge system It is in fluid communication with the gas circulation and filtration system；
Include the conduit assembly of multiple pipelines, wherein, the conduit assembly is in fluid communication with the gas circulation and filtration system； And
Beam, the beam are operatively connectable to print system, and the beam includes cable, electric wire, fluid containment pipeline and combinations thereof At least one of, wherein, the wiring in bundles is at least one interior in the multiple pipeline.
13. Industrial printing systems according to claim 12, wherein, inert gas be selected from nitrogen, any rare gas and It is combined.
14. Industrial printing systems according to claim 12, wherein, a variety of reactions being trapped in the dead volume of the beam Property material purged by being aspirated through the inert gas of conduit assembly from dead volume.
15. Industrial printing systems according to claim 14, wherein, the reactive materials purged from dead volume are by the gas Body cleaning system purifies.
16. Industrial printing systems according to claim 12, wherein, gas purge system can will be anti-in the inside Each in answering property material is maintained at 100 ppm or less.
17. Industrial printing systems according to claim 12, wherein, gas confinement component is wide around print system fixed wheel, To minimize the volume of gas confinement component.
18. Industrial printing systems according to claim 12, wherein, the volume of gas confinement component is in about 6 m3To big About 95 m3Between.
19. Industrial printing systems according to claim 12, wherein, print system is configured to processing and is used for OLED device system The substrate made.
20. Industrial printing systems according to claim 19, wherein, substrate is 5 scale substrates of about Gen to about Gen The size of 10 scale substrates.
21. gas confinement component according to claim 2 and system, wherein, reactive materials from dead volume purge to prevent Only pollution, oxidation and the damage of the material of Industrial printing systems processing and substrate.
22. gas confinement component according to claim 3 and system, wherein, purged by gas purge system from dead volume Reactive materials include water vapour, oxygen and organic vapor.
23. gas confinement component according to claim 1 and system, wherein, gas purge system is configured to will be described interior Each in reactive materials in portion is maintained at 0.1 ppm or less.
24. gas confinement component according to claim 1 and system, wherein, gas confinement component is uncertain profile and tool Have the 30% to 70% of the locking device of suitable nominal dimension.
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CN107029931B (en) 2020-11-03
CN203666124U (en) 2014-06-25

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