CN107367222A - The inductance sensor calibration method and device of current vortex sensor linearity compensation - Google Patents
The inductance sensor calibration method and device of current vortex sensor linearity compensation Download PDFInfo
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- CN107367222A CN107367222A CN201610311974.0A CN201610311974A CN107367222A CN 107367222 A CN107367222 A CN 107367222A CN 201610311974 A CN201610311974 A CN 201610311974A CN 107367222 A CN107367222 A CN 107367222A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
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Abstract
The inductance sensor calibration method of current vortex sensor linearity compensation belongs to Technology of Precision Measurement field with device.For its calibration method with device using two-frequency laser interferometer as motion benchmark, direct current generator carries out grand positioning of using force as grand action-oriented element, linear grating chi as grand dynamic driving element, spherical guide with ball-screw as grand dynamic feedback element；Fine motion fine positioning is carried out as fine motion feedback element with linear grating chi, compensates grand dynamic position error as fine motion director element, two-frequency laser interferometer as fine motion driving element, air-float guide rail using voice coil motor.Pitching and the yaw error of grand mini positioning platform motion are compensated using four current vortex sensors；The present invention can effectively solve the contradiction between calibrating device for displacement sensor stroke and precision, realize the dynamic static calibration of big stroke, high-precision inductance displacement sensor.
Description
Technical field
The invention belongs to Technology of Precision Measurement field, relates generally to a kind of current vortex sensor linearity compensation
Inductance sensor calibration method and device.
Background technology
At present, Chinese large-sized revolution at a high speed equipment does not have ultra precise measurement means, and assembly precision can not ensure,
Efficiency of assembling is low, engine luggine noise etc., and these are all to restrict China's war industry and national economy hair
The great difficult problem of exhibition.Large high-speed revolution equipment refers mainly to all kinds of large-scale high-end gas-turbine units, mainly
Including aero-engine, warship marine gas turbine and high-performance power station combustion engine.At present, Aeroengine Industries
War industry and the mainstay of the national economy industry of World Airways power are turned into.Aero-engine is pursuing height
On the premise of performance, the high quality, high reliability and long service live of product are also pursued, will both ten
Divide difficult and conflicting target to take into account, and be improved simultaneously, be very difficult；In addition
Aero-engine works in extreme environment, and key components and parts are worked under high temperature, high pressure, great loading capacity,
Therefore the difficulty of design and the manufacture of aero-engine further increases.
Engine luggine is a key factor for influenceing aircraft safety, and reacts a weight of engine performance
Want index.Engine turbine component speed is high, quality is big, is a main vibration source of engine.In order to drop
This low influence, except being eliminated during engine dynamic balancing measurement, it is necessary to strictly control its assembling
Process, because engine assembly is dynamically balanced previous step, cause to shake by assembly Form and position error precision is low
Can be amplified when running at high speed by moving by 100 to 1000 times, and beat caused by eliminating concentricity/axiality during assembling can
Largely to reduce dynamically balanced pressure.So the key technology as lifting aero-engine performance,
The accurate measurement of concentricity/axiality or even cylindricity is increasingly taken seriously in aero-engine assembling process.
Sensor is in concentricity/axiality as the extraction element of the sub- surface profile information of aero-engine sound
Accurate measurement to cylindricity is just particularly important, mechanical system and circuit system the institute band of displacement transducer
An important factor for error come is limiting sensor precision, in order to suppress or compensate these errors, it is necessary to align
Displacement sensor carries out calibration process, can be traceable on the benchmark of higher precision.Realize to high accuracy
The calibration of displacement transducer is, it is necessary to design a displacement transducer calibration system with higher precision.Respectively
Stroke between kind displacement transducer also has larger difference, and some displacement transducer strokes can reach tens millis
Even several meters of rice, some then can only achieve several microns of stroke.Therefore, need to make calibration system have big stroke,
High-precision feature could meet the calibration requirements of nano-sensor.But stroke and precision inherently contradiction
, this also increases the design difficulty of calibration system, and there is an urgent need to big stroke, high precision displacement biography at present
The reason for sensor calibration system.
Changchun Institute of Optics, Fine Mechanics and Physics, CAS proposes that a kind of demarcation capacity plate antenna displacement passes
Device (the capacity plate antenna calibration device for displacement sensor of sensor.Publication number：CN104048588A).The dress
Put and be arranged on guiding mechanism front end as displacement datum, sensor tested surface using one-axis laser interferometer, lead
The symmetrical parallel quadrangular mechanism of Planar Mechanisms is used to mechanism, capacity plate antenna displacement transducer is arranged on sensor
Among support base, support base is arranged on micro-displacement adjustment mechanism both sides, and driving is provided with the left end of driver
Device push rod, the guiding mechanism of the driver push rod pushing tow micro-displacement adjustment mechanism do single-degree-of-freedom linear motion,
And then realize the demarcation to capacity plate antenna displacement transducer.The device has problems in that：It is only limited to flat
Plate capacitance displacement sensor is demarcated, and it is smaller to demarcate stroke.
It is (straight that Changzhou Institute of Measurement ＆ Testing Technology proposes a kind of device for linear displacement transducer calibration
Linear movement pick-up auto-calibration device.Publication number：CN103630099A).The device mainly includes one
Pedestal, bilinear guide rail, grating scale, servomotor, vertical lift device are fixed on pedestal；Roller bearing silk
Bar is connected by shaft coupling with servomotor；Leveling device, universal fixturing, locking nut are snapped into one another
And it is connected with vertical lift device；Slidingtype laser mirror support frame, slidingtype laser interference mirror support frame,
Slidingtype two-frequency laser interferometer support frame is fixed on line slideway, wherein steady brace, laser mirror,
Grating rule read sensor is fixed on slidingtype reflector support, and laser interference mirror is fixed on slidingtype and done
Mirror support frame is related to, two-frequency laser interferometer is fixed on slidingtype two-frequency laser interferometer support frame, Ke Yishi
The now automatic calibration to the polytype linear displacement transducer such as rod-pulling type, dragline type and calibration.The device
Have problems in that：Stroke and precision index are not taken into account, precision is relatively low, can not realize high precision displacement
Pick up calibration.
German federal physical technique institute (PTB) and Physik-Instrumente companies cooperate, and develop a kind of use
In the novel sports device of contact type probe displacement transducer dynamic property calibration, the probe displacement transducer can
To use in topography measurement, surface profile measurement and measurement of coordinates.The device has that size is small, and integrated level is high
The characteristics of, system produces motion using piezoelectric ceramic tube, and is measured in real time by a mini optical fibre interferometer,
Measurement feedback to DSP Processor is realized into closed-loop control, therefore, the calibration platform can be traceable to state
Family length standard (Rong Liang, Otto Jusko, Frank Ludicke, Michael Neugebauer.A novel
piezo vibration platform for probe dynamic performance calibration[J].Measurement
Science And Technology,Meas.Sci.Technol.12(2001)1509–1514).The device calibration row
Journey is small, can not realize and big stroke, high-precision displacement transducer are calibrated.
The content of the invention
For above-mentioned the shortcomings of the prior art, propose that a kind of inductance of current vortex sensor linearity compensation passes
Sensor calibration method and device, to solve the contradiction between existing calibrating device for displacement sensor stroke and precision,
Realize the dynamic static calibration of big stroke, high-precision inductance displacement sensor.
The object of the present invention is achieved like this：
A kind of the inductance sensor calibration method and device of the compensation of current vortex sensor linearity, this method and dress
The linearity of inductance displacement sensor can be calibrated by putting；Its feature mainly includes being calibrated displacement transducer, position
Transmission mechanism and displacement datum instrument three parts are moved, the displacement transducer that is calibrated is inductance displacement sensor,
Inductance displacement sensor is gripped using sensor holders arm, adjusts the position of inductance displacement sensor,
Ensure that optical axis where the chaining pin axis of movement of inductance displacement sensor and the measuring beam of two-frequency laser interferometer is total to
Line, sensor support base are arranged on base station, and sensor holders arm is fixed on the side of sensor support base；It is described
Displacement transmission mechanism is made up of grand dynamic locating platform with micro-positioning platform, grand dynamic locating platform by spherical guide,
Direct current generator, ball-screw, grating scale supporting plate, linear grating ruler reading head, linear grating chi composition,
Grand dynamic locating platform is arranged on base station, ensures grand dynamic Positioning platform movement axis and two-frequency laser interferometer
Measuring beam is parallel, and direct current generator installing plate is arranged on base station, and DC motor stator is fixed on direct current generator
On installing plate, bearing be arranged on base station on, the ball-screw is made up of screw rod and nut, screw rod one end with
DC motor rotor is connected, and the other end is fixed on bearing, and the spherical guide sliding block of nut and spherical guide is consolidated
Even, for the spherical guide floor installation of spherical guide on base station, linear grating chi is attached to the ball of spherical guide
Guide rail slide block lateral surface, ensure that linear grating chi is parallel with the axis of movement of spherical guide, grating scale supporting plate
On base station, linear grating ruler reading head is arranged in grating scale supporting plate, and positioned at spherical guide
The outside of spherical guide sliding block, ensure that linear grating ruler reading head is contour and parallel with linear grating chi, fine motion
Locating platform is by air-float guide rail, voice coil motor, micropositioner pinboard, pick up calibration plate and measurement speculum
Composition, micro-positioning platform are arranged on grand dynamic locating platform, ensure the axis of movement of micro-positioning platform with
The measuring beam of two-frequency laser interferometer is parallel, and micropositioner pinboard is arranged on air-float guide rail, and and air supporting
The air-float guide rail sliding block of guide rail is connected, and measurement speculum is located on the optical path of two-frequency laser interferometer, and
On micropositioner pinboard, pick up calibration plate is arranged on the other end on micropositioner pinboard, ensures
It is grand dynamic on the optical axis where measuring beam of the alignment groove in two-frequency laser interferometer on pick up calibration plate
Guide rail pinboard is arranged on the spherical guide sliding block of spherical guide, and the voice coil motor is arranged on grand dynamic guide rail
On pinboard, the air-float guide rail sliding block of voice coil motor mover installing plate and air-float guide rail is connected, voice coil motor
Voice coil motor mover is arranged on voice coil motor mover installing plate, and voice coil motor stator installing plate is arranged on grand dynamic
On guide rail pinboard, the voice coil motor stator of voice coil motor is arranged on voice coil motor stator installing plate, described
The air-float guide rail floor installation of air-float guide rail is on grand dynamic guide rail pinboard；Command displacement transmission mechanism is returned
Zero motion, it is returned to the initial zero of calibrating installation；Command displacement transmission mechanism carries out pressure table motion, makes
It moves to inductance displacement sensor calibration starting point；The displacement datum instrument uses two-frequency laser interferometer,
The measuring beam of two-frequency laser interferometer can provide the displacement datum of whole device, and interferometer bearing is packed in
On base station, two-frequency laser interferometer is packed on interferometer bearing, and current vortex sensor is used for measuring displacement biography
Caused deflection angle and the angle of pitch during mechanism kinematic are passed, the current vortex sensor is distributed arrangement two-by-two
In the spherical guide sliding block both sides of spherical guide, wherein current vortex sensor one is installed with current vortex sensor two
On base station, ensure two current vortex sensors probe it is contour, and with the spherical guide sliding block side of spherical guide
Face is parallel, and the spherical guide sliding block that current vortex sensor three is fixed on spherical guide with current vortex sensor four is another
On one side, ensure contour and parallel with tested metallic plate, the tested gold of two current vortex sensors probe
Category plate is fixed on base station；Command displacement transmission mechanism carries out calibration campaign, is calibrated in inductance displacement sensor
In stroke, 10 points are chosen at equal intervals, when displacement transmission mechanism, which moves to, chooses measurement point, synchronous acquisition
Two-frequency laser interferometer displacement measurement s1', current vortex sensor one measure shift value s2', current vortex sensor
Two measure shift value s3', current vortex sensor three measure shift value s4', current vortex sensor four measure shift value
s5' and inductance displacement sensor shift value s；Shift value s is measured using current vortex sensor one2', current vortex sensing
Device two measures shift value s3', current vortex sensor three measure shift value s4', current vortex sensor four measure displacement
Value s5' to two-frequency laser interferometer displacement measurement s1' compensate, obtain position after two-frequency laser interferometer compensation
Shift measurement value s'；The data collected progress linear fit is obtained into function yi=k × si+ b, wherein, i=1,2 ...,
10, yiFor inductance displacement sensor displacement measurement after fitting, k is fitting coefficient, and b is to be fitted intercept, si
For inductance displacement sensor displacement measurement before fitting, then maximum nonlinearity erron max in stroke is calibrated | yi-si'|
Ratio with gamut is the linearity, wherein, i=1,2 ..., 10, si' to calibrate, stroke is interior to choose measurement point
Locate displacement measurement after two-frequency laser interferometer compensates.
Compared with prior art, it is characteristic of the invention that：
The present invention uses the structure of macro-micro dual-drive, and provides displacement datum with two-frequency laser interferometer,
While improving calibrating installation calibration stroke, moreover it is possible to ensure that calibrating installation has higher precision.Double-frequency laser
Interferometer can monitor posture of the calibrating installation in motion process in real time, utilize electric vortex sensor measuring position
Deflection and the angle of pitch of the transmission mechanism in motion process are moved, monitors calibrating installation in real time in motion process
Posture, line position of going forward side by side move compensation deals, are deflected and pitching band so as to eliminate calibrating installation in motion process
The error come, ensure that calibrating installation calibration accuracy.
Brief description of the drawings：
Fig. 1 is inductance displacement sensor calibrating installation structural representation
Fig. 2 is inductance displacement sensor structural representation
Fig. 3 is pick up calibration plate structure schematic diagram
Fig. 4 is two-frequency laser interferometer structural representation
Fig. 5 is current vortex sensor position arrangement schematic diagram
Fig. 6 is eddy current sensor displacement compensation principle schematic diagram
Fig. 7 is grand dynamic location platform arrangement schematic diagram
Fig. 8 is micro-positioning platform structural representation
Piece number in figure：1-sensor support base, 2-sensor holders arm, 3-inductance displacement sensor, 3a-
Chaining pin, 4-pick up calibration plate, 4a-alignment groove, 5-micropositioner pinboard, 6-air-float guide rail, 6a-
Air-float guide rail base, 6b-air-float guide rail sliding block, 7-measurement speculum, 8-voice coil motor, 8a-voice coil loudspeaker voice coil
Connecting plate for electric motor, 8b-voice coil motor mover, 8c-voice coil motor stator, 8d-voice coil motor installing plate, 9
- two-frequency laser interferometer, 9a-measuring beam, 10-interferometer bearing, 11-base station, 12-spherical guide,
12a-spherical guide sliding block, 12b-spherical guide base, 13-grand dynamic guide rail pinboard, 14-grating scale
Supporting plate, 15-linear grating ruler reading head, 16-linear grating chi, 17-current vortex sensor, 17a-
Current vortex sensor one, 17b-current vortex sensor two, 17c-current vortex sensor three, 17d-current vortex
Sensor four, 17e-tested metallic plate, 18-ball-screw, 18a-screw rod, 18b-nut, 19-straight
Flow motor, 19a-direct current generator installing plate, 19b-DC motor stator, 19c-bearing.
Embodiment
The present invention is described in further detail below in conjunction with the accompanying drawings：
The inductance sensor calibration method and device of a kind of current vortex sensor linearity compensation, methods described with
Device is：Whole device is broadly divided into displacement datum instrument, displacement transmission mechanism and is calibrated displacement transducer
Three parts.Whole device is placed on vibration-isolating platform, is placed under isoperibol.It is described to be calibrated displacement biography
Sensor uses inductance displacement sensor 3, and inductance displacement sensor 3 using sensor holders arm 2 clamp admittedly
It is fixed, the position of inductance displacement sensor 3 is adjusted, ensures the chaining pin 3a axis of movements of inductance displacement sensor 3
Conllinear with optical axis where the measuring beam 9a of two-frequency laser interferometer 9, sensor support base 1 is arranged on base station 11
On, sensor holders arm 2 is fixed on the side of sensor support base 1.The displacement transmission mechanism is using grand micro-
Two-stage drive mode, it is made up of grand dynamic locating platform with micro-positioning platform, grand dynamic locating platform provides big row
Journey coarse positioning, by spherical guide 12, direct current generator 19, ball-screw 18, grating scale supporting plate 14, directly
Line grating ruler reading head 15, linear grating chi 16 are formed, and grand dynamic locating platform is arranged on base station 11, are protected
It is parallel with the measuring beam 9a of two-frequency laser interferometer 9 to demonstrate,prove grand dynamic Positioning platform movement axis, direct current generator peace
Loading board 19a is arranged on base station 11, and DC motor stator 19b is fixed on direct current generator installing plate 19a,
Bearing 19c is arranged on base station 11, and the ball-screw 18 is made up of screw rod 18a and nut 18b, ball
The screw rod 18a one end of leading screw 18 is connected with DC motor rotor, and the other end is fixed on bearing 19c, ball wire
The nut 18b of thick stick 18 and spherical guide 12 spherical guide sliding block 12a are connected, and the ball of spherical guide 12 is led
Flange of rail seat 12b is arranged on base station 11, and linear grating chi 16 is attached to the spherical guide sliding block of spherical guide 12
12a lateral surfaces, ensure that linear grating chi 16 is parallel with the axis of movement of spherical guide 12, grating scale supporting plate
14 are arranged on base station 11, and linear grating ruler reading head 15 is arranged in grating scale supporting plate 14, and is located at
The spherical guide sliding block 12a of spherical guide 12 outside, ensure linear grating ruler reading head 15 and line light
Grid chi 16 is contour and parallel.Micro-positioning platform provides small stroke fine positioning, by air-float guide rail 6, voice coil loudspeaker voice coil electricity
Machine 8, micropositioner pinboard 5, pick up calibration plate 4 and measurement speculum 7 form, micro-positioning platform peace
On grand dynamic locating platform, ensure the axis of movement of micro-positioning platform and the survey of two-frequency laser interferometer 9
It is parallel to measure light beam 9a, micropositioner pinboard 5 is arranged on air-float guide rail 6, and with the air supporting of air-float guide rail 6
Guide rail slide block 6b is connected, and measurement speculum 7 is located on the optical path of two-frequency laser interferometer 9, and installs
On micropositioner pinboard 5, pick up calibration plate 4 is arranged on the other end on micropositioner pinboard 5, protects
Demonstrate,prove the light where measuring beam 9a of the alignment groove 4a on pick up calibration plate 4 in two-frequency laser interferometer 9
On axle, grand dynamic guide rail pinboard 13 is arranged on the spherical guide sliding block 12a of spherical guide 12, the sound
Enclose motor 8 to be arranged on grand dynamic guide rail pinboard 13, voice coil motor mover installing plate 8a and air-float guide rail 6
Air-float guide rail sliding block 6b be connected, the voice coil motor mover 8b of voice coil motor 8 is arranged on voice coil motor mover
On installing plate 8a, voice coil motor stator installing plate 8d is arranged on grand dynamic guide rail pinboard 18, voice coil motor
8 voice coil motor stator 8c is arranged on voice coil motor stator installing plate 8d, the air supporting of the air-float guide rail 6
Guiderail base 6a is arranged on grand dynamic guide rail pinboard 13.Command displacement transmission mechanism carries out back to zero motion,
Displacement transmission mechanism finds the zero-bit of grand dynamic locating platform, and as initial zero, micro-positioning platform moves to
At its half range, as initial zero.Command displacement transmission mechanism carries out pressure table motion, grand dynamic locating platform
From initial zero, high speed and uniform motion before table is pressed, after telogenesis work(is pressed, grand dynamic locating platform
Low speed uniform motion, move to inductance displacement sensor 3 and calibrate stroke starting point.The displacement datum instrument
Using two-frequency laser interferometer 9, the measuring beam 9a of two-frequency laser interferometer 9 can provide whole device
Displacement datum, interferometer bearing 10 are packed on base station 11, and two-frequency laser interferometer 9 is packed in interferometer
On bearing 10, ensure that the measuring beam 9a of two-frequency laser interferometer 9 is put down with displacement transmission mechanism axis of movement
OK.Current vortex sensor 17 is used for measuring caused deflection angle and pitching in displacement transmission mechanism motion process
Angle, the current vortex sensor 17 are arranged in the spherical guide sliding block 12a two of spherical guide 12 two-by-two
Side, the wherein 17a of current vortex sensor one are arranged on base station 11 with the 17b of current vortex sensor two, ensure two
The probe of current vortex sensor is contour, and parallel with the spherical guide sliding block 12a sides of spherical guide 12, electricity
The 17c of the eddy current sensor three and 17d of current vortex sensor four is fixed on the spherical guide sliding block 12a of spherical guide 12
On another side, ensure that two current vortex sensors probe is contour and parallel with tested metallic plate 17e, it is described
Tested metallic plate 17e is fixed on base station 11.Command displacement transmission mechanism carries out calibration campaign, in inductance position
Displacement sensor 3 is calibrated in stroke, chooses ten points at equal intervals, when displacement transmission mechanism moves to selection measurement
During point, the displacement measurement s of synchronous acquisition two-frequency laser interferometer 91', the 14a of current vortex sensor one position
Shift measurement value s2', the 14b of current vortex sensor two displacement measurement s3', the 14c of current vortex sensor three position
Shift measurement value s4', the 14d of current vortex sensor four displacement measurement s5' with the displacement of inductance displacement sensor 3
Value s.According to the 17a of current vortex sensor one displacement measurement s2' surveyed with the 17b of current vortex sensor two displacement
Value s3' understand, if displacement transmission mechanism deflects in motion process around central point O, by known electric whirlpool
The distance between the 17a of flow sensor one and the 17b of current vortex sensor two D, we can calculate its deflection angleAnd then the offset deviation e on the caused measuring beam 9a of deflection can be calculated, carry out
Compensation obtains s'.The data collected progress linear fit is obtained into function yi=k × si+ b, wherein, i=1,2 ...,
10, yiFor the displacement measurement of inductance displacement sensor after fitting 3, k is fitting coefficient, and b is fitting intercept,
siFor the displacement measurement of inductance displacement sensor before fitting 3, then maximum nonlinearity erron max in stroke is calibrated | yi-
si' | the ratio with gamut is the linearity, wherein, i=1,2 ..., 10, si' measured to be chosen in calibration stroke
Displacement measurement after two-frequency laser interferometer 9 compensates at point.
Claims (1)
1. a kind of the inductance sensor calibration method and device of the compensation of current vortex sensor linearity, its feature exist
In：The calibrating installation mainly includes being calibrated displacement transducer, displacement transmission mechanism and displacement datum instrument three
Part, the displacement transducer that is calibrated is inductance displacement sensor (3), and inductance displacement sensor (3) is adopted
Gripped, the position of adjustment inductance displacement sensor (3), ensured with sensor holders arm (2)
Chaining pin (3a) axis of movement of inductance displacement sensor (3) and the measurement light of two-frequency laser interferometer (9)
Optical axis where beam (9a) is conllinear, and sensor support base (1) is arranged on base station (11), sensor holders arm
(2) it is fixed on the side of sensor support base (1)；The displacement transmission mechanism by grand dynamic locating platform with it is micro-
Dynamic locating platform composition, grand dynamic locating platform is by spherical guide (12), direct current generator (19), ball-screw
(18), grating scale supporting plate (14), linear grating ruler reading head (15), linear grating chi (16) composition,
Grand dynamic locating platform is arranged on base station (11), ensures that grand dynamic Positioning platform movement direction is done with double-frequency laser
The measuring beam (9a) of interferometer (9) is parallel, and direct current generator installing plate (19a) is arranged on base station (11),
DC motor stator (19b) is fixed on direct current generator installing plate (19a), and bearing (19c) is arranged on base
On platform (11), the ball-screw (18) is made up of screw rod (18a) and nut (18b), screw rod (18a)
One end is connected with DC motor rotor, and the other end is fixed on bearing (19c), nut (18b) and ball
The spherical guide sliding block (12a) of guide rail (12) is connected, the spherical guide base (12b) of spherical guide (12)
On base station (11), linear grating chi (16) is attached to the spherical guide sliding block of spherical guide (12)
(12a) lateral surface, ensure that linear grating chi (16) is parallel with the direction of motion of spherical guide (12), light
Grid chi supporting plate (14) is arranged on base station (11), and linear grating ruler reading head (15) is arranged on grating
In chi supporting plate (14), and the outside of the spherical guide sliding block (12a) positioned at spherical guide (12), protect
Demonstrate,prove linear grating ruler reading head (15) and linear grating chi (16) it is contour and parallel, micro-positioning platform by
Air-float guide rail (6), voice coil motor (8), micropositioner pinboard (5), pick up calibration plate (4) and measurement
Speculum (7) is formed, and micro-positioning platform is arranged on grand dynamic locating platform, ensures micro-positioning platform
The direction of motion is parallel with the measuring beam (9a) of two-frequency laser interferometer (9), micropositioner pinboard (5)
It is connected, surveys on air-float guide rail (6), and with the air-float guide rail sliding block (6b) of air-float guide rail (6)
Amount speculum (7) is located on the optical path of two-frequency laser interferometer (9), and is arranged on fine motion platform switching
On plate (5), pick up calibration plate (4) is arranged on the other end on micropositioner pinboard (5), ensures to pass
The measuring beam (9a) of alignment groove (4a) on sensor calibration plate (4) in two-frequency laser interferometer (9)
On the optical axis at place, grand dynamic guide rail pinboard (13) is arranged on the spherical guide sliding block of spherical guide (12)
On (12a), the voice coil motor (8) is arranged on grand dynamic guide rail pinboard (13), and voice coil motor moves
Sub- installing plate (8a) and the air-float guide rail sliding block (6b) of air-float guide rail (6) are connected, voice coil motor (8)
Voice coil motor mover (8b) be arranged on voice coil motor mover installing plate (8a) on, voice coil motor stator peace
Loading board (8d) is arranged on grand dynamic guide rail pinboard (18), the voice coil motor stator (8c) of voice coil motor (8)
On voice coil motor stator installing plate (8d), the air-float guide rail base (6a) of the air-float guide rail (6)
On grand dynamic guide rail pinboard (13)；Command displacement transmission mechanism carries out back to zero motion, is returned to
The initial zero of calibrating installation；Command displacement transmission mechanism carries out pressure table motion, causes it to move to inductance displacement
Sensor (3) calibrates starting point；The displacement datum instrument uses two-frequency laser interferometer (9), and double frequency swashs
The measuring beam (9a) of optical interferometer (9) can provide the displacement datum of whole device, interferometer bearing (10)
It is packed on base station (11), two-frequency laser interferometer (9) is packed on interferometer bearing (10), electric whirlpool
Flow sensor (17) is used for measuring caused deflection angle and the angle of pitch in displacement transmission mechanism motion process,
The current vortex sensor (17) is arranged in the spherical guide sliding block (12a) of spherical guide (12) two-by-two
Both sides, wherein current vortex sensor one (17a) are arranged on base station (11) with current vortex sensor two (17b)
On, ensure two current vortex sensors probe it is contour, and with the spherical guide sliding block (12a) of spherical guide (12)
Side is parallel, and current vortex sensor three (17c) is fixed on spherical guide with current vortex sensor four (17d)
(12) on spherical guide sliding block (12a) another side, ensure that two current vortex sensors probe is contour, and
Parallel with tested metallic plate (17e), the tested metallic plate (17e) is fixed on base station (11)；Control
Displacement transmission mechanism carries out calibration campaign, in inductance displacement sensor (3) calibration stroke, chooses at equal intervals
10 points, when displacement transmission mechanism, which moves to, chooses measurement point, synchronous acquisition two-frequency laser interferometer (9)
Displacement measurement s1', current vortex sensor one (17a) measure shift value s2', current vortex sensor two (17b)
Measure shift value s3', current vortex sensor three (17c) measure shift value s4', current vortex sensor four (17d)
Measure shift value s5' and inductance displacement sensor (3) shift value s；Surveyed using current vortex sensor one (17a)
Obtain shift value s2', current vortex sensor two (17b) measure shift value s3', current vortex sensor three (17c)
Measure shift value s4', current vortex sensor four (17d) measure shift value s5' to two-frequency laser interferometer (9)
Displacement measurement s1' compensate, obtain displacement measurement s' after two-frequency laser interferometer (9) compensation；It will adopt
The data collected carry out linear fit and obtain function yi=k × si+ b, wherein, i=1,2 ..., 10, yiTo intend
Inductance displacement sensor (3) displacement measurement after conjunction, k are fitting coefficient, and b is to be fitted intercept, siFor fitting
Preceding inductance displacement sensor (3) displacement measurement, then calibrate maximum nonlinearity erron max in stroke | yi-si'|
Ratio with gamut is the linearity, wherein, i=1,2 ..., 10, si' to calibrate, stroke is interior to choose measurement point
Locate displacement measurement after two-frequency laser interferometer (9) compensates.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610311974.0A CN107367222A (en) | 2016-05-12 | 2016-05-12 | The inductance sensor calibration method and device of current vortex sensor linearity compensation |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610311974.0A CN107367222A (en) | 2016-05-12 | 2016-05-12 | The inductance sensor calibration method and device of current vortex sensor linearity compensation |
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Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
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| CN111203759A (en) * | 2020-01-20 | 2020-05-29 | 重庆大学 | On-line calibration device and method for eddy current sensor machine tool |
| CN111948533A (en) * | 2019-05-17 | 2020-11-17 | 友华科技(香港)有限公司 | Closed-loop motor detection method |
| CN114087972A (en) * | 2021-12-02 | 2022-02-25 | 北京理工大学 | Device for measuring shape error of long hole part |
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| CN108253893B (en) * | 2018-01-23 | 2018-10-12 | 哈尔滨工业大学 | A kind of micro- contact force displacement measuring device of large range high precision and its control method |
| CN108253893A (en) * | 2018-01-23 | 2018-07-06 | 哈尔滨工业大学 | A kind of micro- contact force displacement measuring device of large range high precision and its control method |
| CN108534650A (en) * | 2018-04-04 | 2018-09-14 | 大连理工大学 | The linearity optimization method of the high-precision calibration of current vortex sensor curve of output |
| CN109813207A (en) * | 2019-03-18 | 2019-05-28 | 中国重汽集团大同齿轮有限公司 | A kind of AMT position sensor temperature drift test platform and its correction of temperature drift method |
| CN109813207B (en) * | 2019-03-18 | 2021-05-14 | 中国重汽集团大同齿轮有限公司 | AMT position sensor temperature drift test platform and temperature drift correction method thereof |
| CN110132165A (en) * | 2019-04-23 | 2019-08-16 | 先临三维科技股份有限公司 | Spatial digitizer in the caliberating device and mouth of spatial digitizer |
| CN111948533A (en) * | 2019-05-17 | 2020-11-17 | 友华科技(香港)有限公司 | Closed-loop motor detection method |
| CN111026166B (en) * | 2019-12-20 | 2021-09-21 | 华南理工大学 | Planar two-degree-of-freedom macro-micro composite positioning system and control method |
| CN111026166A (en) * | 2019-12-20 | 2020-04-17 | 华南理工大学 | Planar two-degree-of-freedom macro-micro composite positioning system and control method |
| CN111203759A (en) * | 2020-01-20 | 2020-05-29 | 重庆大学 | On-line calibration device and method for eddy current sensor machine tool |
| CN111203759B (en) * | 2020-01-20 | 2021-06-22 | 重庆大学 | On-line calibration device and method for eddy current sensor machine tool |
| CN114087972A (en) * | 2021-12-02 | 2022-02-25 | 北京理工大学 | Device for measuring shape error of long hole part |
| CN114087972B (en) * | 2021-12-02 | 2022-11-29 | 北京理工大学 | Device for measuring shape error of long hole part |
| CN116222464A (en) * | 2023-05-08 | 2023-06-06 | 江苏省计量科学研究院(江苏省能源计量数据中心) | High-precision linear displacement detection system |
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