CN103528526A - Morphology compensation type three-optical-axis linear displacement laser interferometer calibration method and device - Google Patents
Morphology compensation type three-optical-axis linear displacement laser interferometer calibration method and device Download PDFInfo
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Abstract
The invention discloses a morphology compensation type three-optical-axis linear displacement laser interferometer calibration method and device, and belongs to the technical field of laser measurement. A calibrated laser interferometer measurement light beam is caused to pass through a middle through hole of a three-axis hollow laser interferoscope group and is arranged on the center position of three parallel standard measurement light beams distributed in a regular triangular prism side edge mode in parallel; in a plane vertical to the three standard measurement light beams, the difference of the environment interference degree between the three standard measurement light beams and the calibrated laser interferometer measurement light beam is small in an equilateral triangle area formed by the projection points of the three standard measurement light beams in the plane; the air refractive index average value of the three standard measurement light beams is approximate to the air refractive index value of the calibrated laser interferometer measurement light beam; a measurement error caused by the surface morphology of a target reflecting mirror reflecting surface is compensated into a linear displacement measurement result to guarantee the accuracy of a linear displacement measurement value.
Description
Technical field
The invention belongs to laser measuring technique field, relate generally to a kind of laser interferometer calibration steps and device.
Background technology
Laser interferometry displacement of the lines technology is the canonical measure technology that precision is very high, be widely used in the fields such as accurate and ultraprecise machining, microelectronics equipment, nanometer technology industrial equipment and defence equipment, in order to guarantee the accuracy of laser interferometer measurement displacement of the lines, need scientific and effective displacement of the lines laser interferometer calibration steps and device.The general thinking of lubber-line displacement lasers interferometer is to adopt the higher displacement of the lines laser interferometer of accuracy class to calibrate, and when both precision is close, is called comparison.In actual alignment work, displacement of the lines laser interferometer has suitable precision mostly, thereby the calibration of displacement of the lines laser interferometer is realized by comparison.At present, the general calibration steps of displacement of the lines laser interferometer has parallel type, formula and altogether light path formula (Liao Chengqing face-to-face, Zhu little Ping, Wang Weichen, Du Hua. the research of laser interferometer length measurement precision calibration steps. modern surveying and laboratory room managing, 2005,1:6-7).
Fig. 1 is parallel type laser interferometer calibrating installation structural representation, canonical measure mirror and be calibrated and measure mirror and be arranged on same movable platform, and when sports platform moves, the light paths of two cover laser interferometer measurement light beams increase simultaneously and reduce.Because two cover laser interferometer are parallel, place, two-way light is affected by environment similar, and air refraction is less to two-way influence of light, but because the vertical range between two-way light is larger, when therefore two cover laser interferometer are calibrated, Abbe error is larger.
Fig. 2 is face-to-face formula laser interferometer calibrating installation structural representation, canonical measure mirror and being calibrated measures that mirror is aspectant to be arranged on sports platform, its advantage is that two cover laser interferometer measurement beam axis can tune to almost on same measurement axis, both Abbe errors are very little, shortcoming is that the near-end due to an interferometer is another far-end, both light paths not etc., are not subject to the interference of environment different, and air refraction is inconsistent on the light path impact of two cover laser interferometer.
2011, China National Measuring Science Research Inst. sets up domestic first 80 meters of big-length laser interfering meter measuring device (Leng Yu states, Tao Lei, Xu Jian. two-frequency laser interferometer system accuracy and analysis of Influential Factors based on 80m measurement mechanism. metering and measuring technology, 2011, 38 (9): 47-49), accepted standard device is that the length of three Agilent5530 types is put apart from two-frequency laser interferometer is parallel, become three path laser interferometers, the laser interferometer being calibrated is placed in the middle of them, thereby calibration, this scheme belongs to the derivative schemes of parallel type calibration steps, and measure owing to adopting three road light simultaneously, therefore the Abbe error in the time of can compensating measure, but put owing to being that three laser instruments are parallel, therefore three road sign locating tab assembly light locus are far away, the every road sign locating tab assembly of the measurement electrical distance electrical distance that is calibrated laser interferometer is also far away, all optical paths are subject to the impact of environment different, air refraction is inconsistent on all optical path impacts, cause calibration measurement result inaccurate.
Fig. 3 is common light path formula laser interferometer calibrating installation structural representation, and altogether light path formula is different from parallel type laser interferometer calibrating installation is that two laser instruments become the 90 degree mode of turning back with receiver, and two cover laser interferometer share interference mirror group and measurement mirror.Because two cover laser interferometer share an interference mirror group and measure mirror, cannot determine shared interference mirror group and measure mirror and belong to standard laser interferometer component or belong to and be calibrated standard laser interferometer component, therefore not, that in accurate meaning, two calibrations of overlapping laser interferometer are calibrated.
1985, Dr-Ing H.-H.Schussler makes full use of space distribution (Dr-Ing H.-H.Schussler.Comparison and calibration oflaser interferometer systems.Measurement, 1985,3 (4): 175-184), multipair displacement of the lines laser interferometer is carried out to common light path calibration.Owing to just increasing the quantity of light path laser interferometer altogether, so the method also has the shortcoming of light path formula laser interferometer calibrating installation altogether above-mentioned.
Summary of the invention
For Abbe error larger in above-mentioned existing displacement of the lines laser interferometer calibrating installation, serious air refraction inconsistency be not the problem that in accurate meaning, two cover laser interferometer are calibrated, the present invention proposes and has researched and developed compensation three optical axis displacement lasers interferometer calibration steps and the devices of pattern, this invention makes canonical measure light beam and is calibrated laser interferometer measurement light beam vertical range very little, thereby can reduce Abbe error, reduce the impact of air refraction inconsistency, and be that in accurate meaning, two cover laser interferometer are calibrated.
Object of the present invention is achieved through the following technical solutions:
Compensation three optical axis displacement lasers interferometer calibration stepss, the method step is as follows:
(1) the output light of standard laser interferometer laser instrument forms three canonical measure light beams that are parallel to each other through three axle hollow laser interference mirror groups, article three, canonical measure light beam incides on the level crossing of interstitial hole with regular triangular prism incline distribution form, part light with level crossing displacement information in every canonical measure light beam is reflected back toward after three axle hollow laser interference mirror groups, according to what obtain, distinguish three corresponding interference signals with three canonical measure light beams from three axle hollow laser interference mirror groups, can obtain three shift values that the level crossing of interstitial hole moves along canonical measure beam direction, the remainder light of every canonical measure light beam is through there being the level crossing of interstitial hole to be transmitted on three light-beam position detectors,
(2) the output light that is calibrated laser interferometer laser instrument forms and is calibrated laser interferometer measurement light beam through being calibrated laser interferometer interference mirror group, be calibrated laser interferometer measurement light beam through the intermediate throughholes of three axle hollow laser interference mirror groups, parallel with three canonical measure light beams, and equate with the distance of every canonical measure light beam, being calibrated laser interferometer measurement light beam incides and is calibrated on laser interferometer catoptron, be calibrated after laser interferometer interference mirror group being reflected back toward, according to the interference signal obtaining from be calibrated laser interferometer interference mirror group, can obtain being calibrated the shift value that laser interferometer catoptron moves along canonical measure beam direction,
Article (3) three, canonical measure light beam and be calibrated laser interferometer measurement light beam initial incoming position coordinate separately on the target mirror plane of incidence and be respectively (x
1, y
1), (x
2, y
2), (x
3, y
3) and (x
4, y
4), on the target mirror plane of incidence, the initial incoming position coordinate of every measuring beam is through after the coordinate displacement (x, y) of two-dimensional directional, and the displacement measurement causing because of target mirror reflecting surface shape characteristic is respectively function z
1(x
1+ x, y
1+ y), z
2(x
2+ x, y
2+ y), z
3(x
3+ x, y
3+ y) and z
4(x
4+ x, y
4+ y);
(4) sports platform along in canonical measure beam direction to-and-fro movement process with the derivative displacement of random two-dimensional direction in perpendicular to canonical measure beam plane, with at the uniform velocity or non-at the uniform velocity sampling rate, three of synchronized sampling standard laser interferometers are measured shift value and are calibrated laser interferometer measurement shift value, are respectively S
1, S
2, S
3and S
4the derivative coordinate displacement value of three light-beam position detectors synchronizing detection to three canonical measure beam and focus two-dimensional directional on the target mirror plane of incidence, ask for three coordinate displacement values arithmetic mean (x ', y ') as the derivative coordinate displacement value of every measuring beam, the displacement measurement errors that target mirror reflecting surface shape characteristic is caused compensates to be measured in shift value, obtains S
1-z
1(x
1+ x ', y
1+ y '), S
2-z
2(x
2+ x ', y
2+ y '), S
3-z
3(x
3+ x ', y
3+ y ') and S
4-z
4(x
4+ x ', y
4+ y '), get S
1-z
1(x
1+ x ', y
1+ y '), S
2-z
2(x
2+ x', y
2+ y ') and S
3-z
3(x
3+ x', y
3+ y ') mean value and S
4-z
4(x
4+ x ', y
4+ y ') poor, obtain some sampled measurements error amounts.
The compensation three optical axis displacement lasers interferometer calibrating installations of a kind of pattern, comprising that standard laser interferometer laser instrument and three are configured in can receive the locational receiver of standard laser interferometer interference signal, and wire is connected three receivers respectively with standard laser interferometer signal disposal system; On standard laser interferometer laser instrument output light path, dispose can allowing of intermediate throughholes and be calibrated the three axle hollow standard laser interference mirror groups that laser interferometer measurement light beam passes; Three axle hollow standard laser interference mirror group one side arrangement guide rails, sports platform is fitted on guide rail, the level crossing of interstitial hole is installed on sports platform, in level crossing interstitial hole, install and be calibrated laser interferometer catoptron, be calibrated laser interferometer catoptron and form by the level crossing of interstitial hole the target mirror that the plane of incidence is coplanar and relative position is fixing; Three light-beam position detector configuration are having after the level crossing regional transmission of interstitial hole, and lay respectively on three parallel standards measuring beam transmitted light paths; In three axle hollow standard laser interference mirror group opposite sides configurations, be calibrated laser interferometer interference mirror group and be calibrated laser interferometer laser instrument, described in be calibrated laser interferometer interference mirror group and be positioned at and be calibrated on laser interferometer laser instrument output light path; Be calibrated laser interferometer receiver and be configured in and can receive on the position that is calibrated laser interferometer interference signal, wire will be calibrated laser interferometer receiver and be calibrated laser interferometer signal disposal system and be connected.
The present invention has following characteristics and good result:
(1) compare with parallel type laser interferometer calibrating installation, owing to being calibrated laser interferometer measurement light beam by the intermediate throughholes of three axle hollow laser interference mirror groups, the vertical range being calibrated between laser interferometer measurement optical axis and parallel standards optical axis is shorter, both light paths are more approaching, and when therefore two cover laser interferometer are calibrated, Abbe error is very little.
(2) compare with face-to-face formula laser interferometer calibrating installation, in the plane perpendicular to three canonical measure light beams, in the equilateral triangle region being formed at this plane projection point by three canonical measure light beams, article three, canonical measure light beam and be calibrated laser interferometer measurement light beam and be subject to the degree difference of environmental interference very little, the air refraction mean value of three canonical measure light beams approaches the air refraction value that is calibrated laser interferometer measurement light beam.
(3) light path formula laser interferometer calibrating installation is compared together, shares interference mirror group and measures mirror, and standard laser interferometer component and to be calibrated standard laser interferometer component ownership clear and definite, is that in accurate meaning, two cover laser interferometer are calibrated.
(4) three light-beam position detectors can be measured the derivative displacement of three relative target mirrors of canonical measure light beam random two-dimensional direction in perpendicular to canonical measure beam plane, after there is derivative displacement, the measurement displacement error that target mirror reflecting surface surface topography causes compensates in linear movement measuring result, guarantees the accuracy of linear movement measuring value.
Accompanying drawing explanation
Fig. 1 is parallel type laser interferometer calibrating installation structural representation
Fig. 2 is face-to-face formula laser interferometer calibrating installation structural representation
Fig. 3 is for being total to light path formula laser interferometer calibrating installation structural representation
Fig. 4 is the compensation three optical axis displacement lasers interferometer calibrating installation structural representations of pattern
Fig. 5 for the level crossing by interstitial hole be calibrated hot spot position distribution schematic diagram on the plane of incidence of the target mirror that laser interferometer catoptron forms
In figure: 1 standard laser interferometer laser instrument, 2 three axle hollow standard laser interference mirror groups, 3, 4, article 5 three, parallel standards measuring beam, 6 have the level crossing of interstitial hole, 7, 8, 9 standard laser interferometer receivers, 10 standard signal disposal systems, 11 are calibrated laser interferometer laser instrument, 12 are calibrated laser interferometer interference mirror group, 13 are calibrated laser interferometer measurement light beam, 14 intermediate throughholes, 15 are calibrated laser interferometer catoptron, 16 are calibrated laser interferometer receiver, 17 are calibrated laser interferometer signal disposal system, 18 sports platforms, 19 guide rails, 20, 21, 22 3 light-beam position detectors, 23, 24, article 25 3, parallel standards measuring beam facula position, 26 are calibrated laser interferometer beam and focus position.
Embodiment
Below in conjunction with accompanying drawing, the specific embodiment of the invention is described in further detail.
The compensation three optical axis displacement lasers interferometer calibrating installations of a kind of pattern, comprise that standard laser interferometer laser instrument 1 and three are configured in the locational receiver 7,8,9 of interference signal that can receive respectively three parallel standards measuring beam 3,4,5 correspondences, wire is connected three receivers 7,8,9 respectively with standard laser interferometer signal disposal system 10; On standard laser interferometer laser instrument 1 output light path, dispose can allowing of intermediate throughholes 14 and be calibrated the three axle hollow standard laser interference mirror groups 2 that laser interferometer measurement light beam 13 passes; Three axle hollow standard laser interference mirror group 2 one side arrangement guide rails 19, sports platform 18 is fitted on guide rail 19, the level crossing 6 of interstitial hole is installed on sports platform 18, in level crossing 6 interstitial holes, install and be calibrated laser interferometer catoptron 15, be calibrated laser interferometer catoptron 15 and form by the level crossing 6 of interstitial hole the target mirror that the plane of incidence is coplanar and relative position is fixing; Three light- beam position detectors 20,21,22 are configured in after level crossing 6 regional transmissions of interstitial hole, and lay respectively on three parallel standards measuring beams, 3,4,5 transmitted light paths; In three axle hollow standard laser interference mirror group 2 opposite sides configurations, be calibrated laser interferometer interference mirror group 12 and be calibrated laser interferometer laser instrument 11, described in be calibrated laser interferometer interference mirror group 12 and be positioned at and be calibrated on laser interferometer laser instrument 11 output light paths; Be calibrated laser interferometer receiver 16 and be configured in and can receive on the position that is calibrated laser interferometer interference signal, wire will be calibrated laser interferometer receiver 16 and be calibrated laser interferometer signal disposal system 17 and be connected.
Described three parallel standards measuring beams 3,4,5 are with to be calibrated laser interferometer measurement light beam 13 all vertical with the target mirror plane of incidence.
The intermediate throughholes 14 of three described axle hollow standard laser interference mirror groups 2 comprises arbitrary shape, and number is one or more.
Described every parallel standards measuring beam 3,4,5 and be calibrated laser interferometer measurement light beam 13 and had respectively the level crossing 6 of interstitial hole and be calibrated laser interferometer catoptron 15 reflection once or once.
The described laser interferometer catoptron 15 that is calibrated comprises level crossing, prism of corner cube, right-angle prism.
Compensation three optical axis displacement lasers interferometer calibration stepss, the method step is as follows:
(1) the output light of standard laser interferometer laser instrument 1 forms through three axle hollow laser interference mirror groups 2 three canonical measure light beams 3 that are parallel to each other, 4, 5, article three, canonical measure light beam 3, 4, 5 incide on the level crossing 6 of interstitial hole with regular triangular prism incline distribution form, part light with level crossing 6 displacement informations in every canonical measure light beam is reflected back toward after three axle hollow laser interference mirror groups 2, according to from three axle hollow laser interference mirror groups 2, obtain with three canonical measure light beams 3, 4, three interference signals corresponding to 5 difference, can obtain the level crossing 6 of interstitial hole along canonical measure light beam 3, 4, three shift values of 5 direction motions, every canonical measure light beam 3, 4, 5 remainder light is through there being the level crossing 6 of interstitial hole to be transmitted to three light- beam position detectors 20, 21, on 22,
(2) the output light that is calibrated laser interferometer laser instrument 11 forms and is calibrated laser interferometer measurement light beam 13 through being calibrated laser interferometer interference mirror group 12, be calibrated laser interferometer measurement light beam 13 through the intermediate throughholes 14 of three axle hollow laser interference mirror groups 2, with three canonical measure light beams 3, 4, 5 is parallel, and equate with the distance of every canonical measure light beam, being calibrated laser interferometer measurement light beam 13 incides and is calibrated on laser interferometer catoptron 15, be calibrated after laser interferometer interference mirror group 12 being reflected back toward, according to the interference signal obtaining from be calibrated laser interferometer interference mirror group 12, can obtain being calibrated laser interferometer catoptron 15 along canonical measure light beam 3, 4, the shift value of 5 direction motions,
Article (3) three, canonical measure light beam 3,4,5 and be calibrated laser interferometer measurement light beam 13 initial incoming position coordinate separately on the target mirror plane of incidence and be respectively (x
1, y
1), (x
2, y
2), (x
3, y
3) and (x
4, y
4), on the target mirror plane of incidence, the initial incoming position coordinate of every measuring beam is through after the coordinate displacement (x, y) of two-dimensional directional, and the displacement measurement causing because of target mirror reflecting surface shape characteristic is respectively function z
1(x
1+ x, y
1+ y), z
2(x
2+ x, y
2+ y), z
3(x
3+ x, y
3+ y) and z
4(x
4+ x, y
4+ y);
(4) sports platform 18 along in canonical measure light beam 3,4,5 direction to-and-fro movement processes with the derivative displacement of random two-dimensional direction in perpendicular to canonical measure light beam 3,4,5 planes, with at the uniform velocity or non-at the uniform velocity sampling rate, three of synchronized sampling standard laser interferometers are measured shift value and are calibrated laser interferometer measurement shift value, are respectively S
1, S
2, S
3and S
4the derivative coordinate displacement value of three light- beam position detector 20,21,22 synchronizing detections to three canonical measure beam and focus two-dimensional directional on the target mirror plane of incidence, ask for three coordinate displacement values arithmetic mean (x ', y ') as the derivative coordinate displacement value of every measuring beam, the displacement measurement errors that target mirror reflecting surface shape characteristic is caused compensates to be measured in shift value, obtains S
1-z
1(x
1+ x ', y
1+ y '), S
2-z
2(x
2+ x ', y
2+ y '), S
3-z
3(x
3+ x ', y
3+ y ') and S
4-z
4(x
4+ x ', y
4+ y '), get S
1-z
1(x
1+ x ', y
1+ y '), S
2-z
2(x
2+ x ', y
2+ y ') and S
3-z
3(x
3+ x ', y
3+ y ') mean value and S
4-z
4(x
4+ x ', y
4+ y ') poor, obtain some sampled measurements error amounts.
Canonical measure beam and focus position 23, 24, 25 is respectively three parallel standards measuring beams 3 successively, 4, 5 incide the position of the level crossing 6 of interstitial hole, being calibrated laser interferometer beam and focus position 26 is to be calibrated the position that 13 incidents of laser interferometer measurement light beam are calibrated laser interferometer catoptron 15, from position distribution, can find out that being calibrated laser interferometer beam and focus position 26 is in canonical measure beam and focus position 23, 24, 25 center point, i.e. three parallel standards measuring beams 3, 4, 5 will be calibrated laser interferometer measurement light beam 13 is clamped in center.
Claims (6)
1. compensation three optical axis displacement lasers interferometer calibration stepss of pattern, is characterized in that the method step is as follows:
(1) the output light of standard laser interferometer laser instrument forms three canonical measure light beams that are parallel to each other through three axle hollow laser interference mirror groups, article three, canonical measure light beam incides on the level crossing of interstitial hole with regular triangular prism incline distribution form, part light with level crossing displacement information in every canonical measure light beam is reflected back toward after three axle hollow laser interference mirror groups, according to what obtain, distinguish three corresponding interference signals with three canonical measure light beams from three axle hollow laser interference mirror groups, can obtain three shift values that the level crossing of interstitial hole moves along canonical measure beam direction, the remainder light of every canonical measure light beam is through there being the level crossing of interstitial hole to be transmitted on three light-beam position detectors,
(2) the output light that is calibrated laser interferometer laser instrument forms and is calibrated laser interferometer measurement light beam through being calibrated laser interferometer interference mirror group, be calibrated laser interferometer measurement light beam through the intermediate throughholes of three axle hollow laser interference mirror groups, parallel with three canonical measure light beams, and equate with the distance of every canonical measure light beam, being calibrated laser interferometer measurement light beam incides and is calibrated on laser interferometer catoptron, be calibrated after laser interferometer interference mirror group being reflected back toward, according to the interference signal obtaining from be calibrated laser interferometer interference mirror group, can obtain being calibrated the shift value that laser interferometer catoptron moves along canonical measure beam direction,
Article (3) three, canonical measure light beam and be calibrated laser interferometer measurement light beam initial incoming position coordinate separately on the target mirror plane of incidence and be respectively (x
1, y
1), (x
2, y
2), (x
3, y
3) and (x
4, y
4), on the target mirror plane of incidence, the initial incoming position coordinate of every measuring beam is through after the coordinate displacement (x, y) of two-dimensional directional, and the displacement measurement causing because of target mirror reflecting surface shape characteristic is respectively function z
1(x
1+ x, y
1+ y), z
2(x
2+ x, y
2+ y), z
3(x
3+ x, y
3+ y) and z
4(x
4+ x, y
4+ y);
(4) sports platform along in canonical measure beam direction to-and-fro movement process with the derivative displacement of random two-dimensional direction in perpendicular to canonical measure beam plane, with at the uniform velocity or non-at the uniform velocity sampling rate, three of synchronized sampling standard laser interferometers are measured shift value and are calibrated laser interferometer measurement shift value, are respectively S
1, S
2, S
3and S
4the derivative coordinate displacement value of three light-beam position detectors synchronizing detection to three canonical measure beam and focus two-dimensional directional on the target mirror plane of incidence, ask for three coordinate displacement values arithmetic mean (x ', y ') as the derivative coordinate displacement value of every measuring beam, the displacement measurement errors that target mirror reflecting surface shape characteristic is caused compensates to be measured in shift value, obtains S
1-z
1(x
1+ x ', y
1+ y '), S
2-z
2(x
2+ x ', y
2+ y '), S
3-z
3(x
3+ x', y
3+ y ') and S
4-z
4(x
4+ x ', y
4+ y '), get S
1-z
1(x
1+ x', y
1+ y '), S
2-z
2(x
2+ x', y
2+ y ') and S
3-z
3(x
3+ x', y
3+ y ') mean value and S
4-z
4(x
4+ x ', y
4+ y ') poor, obtain some sampled measurements error amounts.
2. compensation three optical axis displacement lasers interferometer calibrating installations of pattern, comprising that standard laser interferometer laser instrument (1) and three are configured in can receive the locational receiver of standard laser interferometer interference signal (7,8,9), and wire is connected three receivers (7,8,9) respectively with standard laser interferometer signal disposal system (10); It is characterized in that disposing can allowing of intermediate throughholes (14) and be calibrated the three axle hollow standard laser interference mirror groups (2) that laser interferometer measurement light beam (13) passes on standard laser interferometer laser instrument (1) output light path; Three axle hollow standard laser interference mirror group (2) one side arrangement guide rails (19), sports platform (18) is fitted on guide rail (19), the level crossing (6) of interstitial hole is installed on sports platform (18), in level crossing (6) interstitial hole, install and be calibrated laser interferometer catoptron (15), be calibrated laser interferometer catoptron (15) and have the level crossing (6) of interstitial hole to form the target mirror that the plane of incidence is coplanar and relative position is fixing; Three light-beam position detectors (20,21,22) are configured in after level crossing (6) regional transmission of interstitial hole, and lay respectively on three parallel standards measuring beams (3,4,5) transmitted light path; In three axle hollow standard laser interference mirror group (2) opposite sides configurations, be calibrated laser interferometer interference mirror group (12) and be calibrated laser interferometer laser instrument (11), described in be calibrated laser interferometer interference mirror group (12) and be positioned at and be calibrated on laser interferometer laser instrument (11) output light path; Be calibrated laser interferometer receiver (16) and be configured in and can receive on the position that is calibrated laser interferometer interference signal, wire will be calibrated laser interferometer receiver (16) and be calibrated laser interferometer signal disposal system (17) and be connected.
3. compensation three optical axis displacement lasers interferometer calibrating installations of pattern according to claim 2, is characterized in that described three parallel standards measuring beams (3,4,5) and to be calibrated laser interferometer measurement light beam (13) all vertical with the target mirror plane of incidence.
4. compensation three optical axis displacement lasers interferometer calibrating installations of pattern according to claim 2, the intermediate throughholes (14) that it is characterized in that three described axle hollow standard laser interference mirror groups (2) comprises that arbitrary shape, number are one or more.
5. compensation three optical axis displacement lasers interferometer calibrating installations of pattern according to claim 2, is characterized in that described every parallel standards measuring beam (3,4,5) and are calibrated laser interferometer measurement light beam (13) being had respectively the level crossing (6) of interstitial hole and being calibrated that laser interferometer catoptron (15) reflects once or once.
6. the compensation three optical axis displacement lasers interferometer calibrating installations of pattern according to claim 2, is characterized in that the described laser interferometer catoptron (15) that is calibrated comprises level crossing, prism of corner cube, right-angle prism.
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