CN103528508B - Morphology compensation type double-optical-axis angular displacement laser interferometer calibration method and device - Google Patents
Morphology compensation type double-optical-axis angular displacement laser interferometer calibration method and device Download PDFInfo
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- CN103528508B CN103528508B CN201310475890.7A CN201310475890A CN103528508B CN 103528508 B CN103528508 B CN 103528508B CN 201310475890 A CN201310475890 A CN 201310475890A CN 103528508 B CN103528508 B CN 103528508B
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Abstract
The invention discloses a morphology compensation type double-optical-axis angular displacement laser interferometer calibration method and device, and belongs to the technical field of laser measurement. Two calibrated laser interferometer measurement light beams are caused to pass through a middle through hole of a double-axis hollow laser interferoscope group and are arranged on the middle positions of two parallel standard measurement light beams in parallel; the standard measurement light beams and the calibrated laser interferometer measurement light beams have a small vertical distance; the standard measurement light beams and the calibrated laser interferometer measurement light beams have the similar air refractive index value; a measurement displacement error caused by the surface morphology of a target reflecting mirror reflecting surface is compensated into an angular displacement measurement result to guarantee the accuracy of an angular displacement measurement value.
Description
Technical field
The invention belongs to laser measuring technique field, relate generally to a kind of laser interferometer calibration method and device.
Background technology
Angular displacement laser interferometer is the standard assay techniques that precision is very high, be widely used in the fields such as accurate and ultraprecise machining, microelectronics equipment, nanometer technology industrial equipment and defence equipment, may be used for the monitoring of micrometric displacement parts, mobile platform and litho machine angle variable quantity.Angular displacement laser interferometer can provide very high measuring accuracy, and can relative pivot angle in kinetic measurement campaign, this is the unique advantage of other instruments of difference, in order to ensure the accuracy that angular displacement laser interferometer is measured, scientificlly and effectively to carry out calibration extremely important for diagonal displacement laser interferometer.The realization of angular displacement laser interferometer is the linear displacement laser interferometer linear displacement laser interferometer on monochromatic light road being modified into multi-pass, can obtain the changing value of an anglec of rotation by measuring two the light path relative optical path changes obtained.Calibration steps and the device of angular displacement laser interferometer are not proposed in current documents and materials, but because angular displacement laser interferometer is the derivative schemes that linear displacement laser interferometer is measured, so angular displacement laser interferometer calibration can adopt the calibration steps of linear displacement laser interferometer: parallel type (Leng Yu state, Tao Lei, Xu Jian is based on the two-frequency laser interferometer system accuracy of 80m measurement mechanism and analysis of Influential Factors. metering and measuring technology, 2011, 38 (9): 47-49), back-to-back formula (Liao Chengqing, Zhu little Ping, Wang Weichen, Du Hua. the research of laser interferometer length measurement precision calibration steps. modern surveying and laboratory room managing, 2005, 1:6-7) with common light path type (Dr-Ing H.-H.Schussler.Comparison and calibration oflaser interferometer systems.Measurement, 1985, 3 (4): 175-184), therefore angular displacement laser interferometer calibrating installation also has the shortcoming of linear displacement laser interferometer calibrating installation: larger Abbe error, serious air refraction inconsistency and be not on denotation two cover laser interferometer calibrate.
Summary of the invention
For Abbe error larger in above-mentioned existing angular displacement laser interferometer calibrating installation, serious air refraction inconsistency be not that on denotation, two cover laser interferometer carry out the problem of calibrating, the present invention proposes and have developed pattern compensation pair of optical angle displacement laser interferometer calibration method and device, this invention makes canonical measure light beam and is calibrated laser interferometer measurement beam orthogonal apart from very little, thus the impact of Abbe error, reduction air refraction inconsistency can be reduced, and be that on denotation, two cover laser interferometer are calibrated.
Object of the present invention is achieved through the following technical solutions:
A kind of pattern compensation pair of optical angle displacement laser interferometer calibration method, the method step is as follows:
(1) the output light of standard laser interferometer laser instrument forms two the canonical measure light beams be parallel to each other through twin shaft hollow laser interference mirror group, and all incide on the level crossing of interstitial hole, in the plane perpendicular to two canonical measure light beams, Article 1, the connecting line segment M and between Article 2 canonical measure light beam projecting location point is long is A, after being reflected back toward twin shaft hollow laser interference mirror group with the part light of level crossing displacement information in every bar canonical measure light beam, according to the interference signal obtained from twin shaft hollow laser interference mirror group, obtain connecting line segment M place straight line and changing value the arctan ((a of level crossing plane of incidence angle having interstitial hole
1-a
2)/A), wherein, a
1and a
2the linear movement measuring value of Article 1 and Article 2 standard continent amount beam feeding sputtering area on the level crossing being respectively interstitial hole, the remainder light of every bar canonical measure light beam is transmitted on two light-beam position detectors through there being the level crossing of interstitial hole,
(2) the output light being calibrated laser interferometer laser instrument forms two of being parallel to each other be calibrated laser interferometer measurement light beam through being calibrated laser interferometer interference mirror group, be calibrated the intermediate throughholes that laser interferometer two measuring beams all pass twin shaft hollow laser interference mirror group, parallel with two canonical measure light beams, and all incide and be calibrated on laser interferometer plane mirror, in the plane perpendicular to two canonical measure light beams, Article 1 and Article 2 to be calibrated connecting line segment m between laser interferometer measurement light beam projecting location point long be B, connecting line segment m and connecting line segment M conllinear, article two, be calibrated after laser interferometer measurement beam reflection returns and be calibrated laser interferometer interference mirror group with what be calibrated laser interferometer plane mirror displacement information, according to from being calibrated the interference signal obtained in laser interferometer interference mirror group, obtain connecting line segment m place straight line and changing value the arctan ((b being calibrated laser interferometer plane mirror plane of incidence angle
1-b
2)/B), wherein, b
1and b
2be respectively and be calibrated the linear movement measuring value that Article 1 and Article 2 on laser interferometer plane mirror are calibrated laser interferometer measurement beam feeding sputtering area,
(3) the original incident position coordinates that Article 1, Article 2 canonical measure light beam and Article 1, Article 2 are calibrated laser interferometer measurement light beam respective on the target mirror plane of incidence is respectively (x
1, y
1), (x
2, y
2), (x
3, y
3) and (x
4, y
4), on the target mirror plane of incidence, the original incident position coordinates of every bar measuring beam is after coordinate displacement (x, y), and the linear movement measuring value caused because of target mirror reflecting surface shape characteristic is respectively function z
1(x
1+ x, y
1+ y), z
2(x
2+ x, y
2+ y), z
3(x
3+ x, y
3+ y) and z
4(x
4+ x, y
4+ y), sports platform carry out any sense of rotation low-angle beat and with the derivative displacement in random two-dimensional direction in the plane perpendicular to canonical measure light beam, with at the uniform velocity or non-at the uniform velocity sampling rate, synchronized sampling standard laser interferometer variable angle value arctan ((a
1-a
2)/A) and be calibrated laser interferometer variable angle value arctan ((b
1-b
2)/B), the synchronizing detection of two light-beam position detectors is to the derivative coordinate displacement value of two canonical measure beam and focus two-dimensional directional on the target mirror plane of incidence, ask for two coordinate displacement values arithmetic mean (x ', y ') as the derivative coordinate displacement value of every bar measuring beam, the linear movement measuring error compensation caused by target mirror reflecting surface shape characteristic, in variable angle value, obtains arctan{ [(a
1-z
1(x
1+ x ', y
1+ y '))-(a
2-z
2(x
2+ x ', y
2+ y '))]/A} and arctan{ [(b
1-z
3(x
3+ x ', y
3+ y '))-(b
2-z
4(x
4+ x ', y
4+ y '))]/B}, finally obtain a series of angular displacement calibration measurement error amount arctan{ [(a
1-z
1(x
1+ x ', y
1+ y '))-(a
2-z
2(x
2+ x ', y
2+ y '))]/A}-arctan{ [(b
1-z
3(x
3+ x ', y
3+ y '))-(b
2-z
4(x
4+ x ', y
4+ y '))]/B}.
A kind of pattern compensation pair of optical angle displacement laser interferometer calibrating installation, comprise standard laser interferometer laser instrument, can receive the receiver on standard laser interferometer interference signal position, receiver is connected with standard laser interferometer signal disposal system by wire; Standard laser interferometer laser instrument output light path is configured with can allowing of intermediate throughholes and is calibrated the twin shaft hollow standard laser interference mirror group that laser interferometer measurement light beam passes; Twin shaft hollow standard laser interference mirror group side arrangement guide rail, sports platform is fitted on guide rail, sports platform is provided with the level crossing of interstitial hole, install in level crossing interstitial hole and be calibrated laser interferometer plane mirror, be calibrated laser interferometer plane mirror and form by the level crossing of interstitial hole the target mirror that the coplanar and relative position of the plane of incidence fixes; Two light-beam position detector configuration are having after the level crossing regional transmission of interstitial hole, and lay respectively on two parallel standards measuring beam transmitted light paths; Be calibrated laser interferometer interference mirror group and be calibrated laser interferometer laser instrument in the configuration of twin shaft hollow standard laser interference mirror group opposite side, described in be calibrated laser interferometer interference mirror group and be positioned at and be calibrated on laser interferometer laser instrument output light path; Being calibrated laser interferometer receiver is configured on the position that can receive and be calibrated laser interferometer interference signal, and wire will be calibrated laser interferometer receiver and be calibrated laser interferometer signal disposal system and be connected.
The present invention has following characteristics and good result:
(1) owing to being calibrated the intermediate throughholes of laser interferometer measurement light beam by twin shaft hollow laser interference mirror group, be calibrated the vertical range measured between optical axis and parallel standards optical axis very short, closely, therefore during two cover laser interferometer calibrations, Abbe error is very little for both light paths.
(2) in the plane perpendicular to two canonical measure light beams, by two canonical measure light beams in the line segment region that this plane projection point is formed, article two, canonical measure light beam and two to be calibrated laser interferometer measurement light beam very little by the degree difference of environmental interference, canonical measure light beam be calibrated laser interferometer measurement light beam air refraction value closely.
(3) not having the interference mirror group that shares and measure mirror, standard laser interferometer component and to be calibrated standard laser interferometer component ownership clear and definite, is that two cover laser interferometer on denotation are calibrated.
(4) two light-beam position detectors can measure two canonical measure light beam relative target catoptrons deriving displacement perpendicular to random two-dimensional direction in canonical measure beam plane, after the derivative displacement of generation, the measurement displacement error that target mirror mirror surface pattern causes compensates in angle displacement measurement result, ensures the accuracy of angle displacement measurement value.
Accompanying drawing explanation
Fig. 1 is pattern compensation pair of optical angle displacement laser interferometer calibrating installation structural representation
Fig. 2 is by the level crossing of interstitial hole and hot spot position distribution schematic diagram on the plane of incidence being calibrated the target mirror that laser interferometer plane mirror forms
In figure: 1 standard laser interferometer laser instrument, 2 twin shaft hollow standard laser interference mirror groups, 3, article 4 two, parallel standards measuring beam, 5 level crossings having an interstitial hole, 6 standard laser interferometer receivers, 7 standard signal disposal systems, 8 are calibrated laser interferometer laser instrument, 9 are calibrated laser interferometer interference mirror group, 10, article 11 two, be calibrated laser interferometer measurement light beam, 12 intermediate throughholes, 13 are calibrated laser interferometer plane mirror, 14 are calibrated laser interferometer receiver, 15 are calibrated laser interferometer signal disposal system, 16 sports platforms, 17 guide rails, 18, 19 two light-beam position detectors, 20, article 21 two, parallel standards measuring beam facula position, 22, article 23 two, be calibrated laser interferometer beam and focus position.
Embodiment
Below in conjunction with accompanying drawing, the specific embodiment of the invention is described in further detail.
A kind of pattern compensation pair of optical angle displacement laser interferometer calibrating installation, comprise standard laser interferometer laser instrument 1, can receive the receiver 6 on standard laser interferometer interference signal position, receiver 6 is connected with standard laser interferometer signal disposal system 7 by wire; Standard laser interferometer laser instrument 1 output light path is configured with can allowing of intermediate throughholes 12 and is calibrated the twin shaft hollow standard laser interference mirror group 2 that laser interferometer measurement light beam 10,11 passes; Twin shaft hollow standard laser interference mirror group 2 side arrangement guide rail 17, sports platform 16 is fitted on guide rail 17, sports platform 16 is provided with the level crossing 5 of interstitial hole, install in level crossing 5 interstitial hole and be calibrated laser interferometer plane mirror 13, be calibrated laser interferometer plane mirror 13 and form the fixing target mirror of the coplanar and relative position of the plane of incidence by the level crossing 5 of interstitial hole; Two light-beam position detectors 18,19 are configured in after level crossing 5 regional transmission of interstitial hole, and lay respectively on two parallel standards measuring beams 3,4 transmitted light path; Be calibrated laser interferometer interference mirror group 9 in the configuration of twin shaft hollow standard laser interference mirror group 2 opposite side and be calibrated laser interferometer laser instrument 8, described in be calibrated laser interferometer interference mirror group 9 and be positioned at and be calibrated on laser interferometer laser instrument 8 output light path; Being calibrated laser interferometer receiver 14 is configured on the position that can receive and be calibrated laser interferometer interference signal, and wire will be calibrated laser interferometer receiver 14 and be calibrated laser interferometer signal disposal system 15 and be connected.
The intermediate throughholes 12 of described twin shaft hollow standard laser interference mirror group 2 comprises arbitrary shape, and number is one or more.
Described every bar parallel standards measuring beam 3,4 and every bar be calibrated laser interferometer measurement light beam 10,11 had the level crossing 5 of interstitial hole respectively and be calibrated laser interferometer plane mirror 13 reflect once or once more than.
Described standard laser interferometer receiver 6 and the number being calibrated laser interferometer receiver 14 are one or more respectively.
A kind of pattern compensation pair of optical angle displacement laser interferometer calibration method, the method step is as follows:
(1) the output light of standard laser interferometer laser instrument 1 forms two the canonical measure light beams 3 be parallel to each other through twin shaft hollow laser interference mirror group 2, 4, and all incide on the level crossing 5 of interstitial hole, perpendicular to two canonical measure light beams 3, in the plane of 4, Article 1, the connecting line segment M and between Article 2 canonical measure light beam projecting location point is long is A, after being reflected back toward twin shaft hollow laser interference mirror group 2 with the part light of level crossing 5 displacement information in every bar canonical measure light beam, according to the interference signal obtained from twin shaft hollow laser interference mirror group 2, obtain connecting line segment M place straight line and changing value the arctan ((a of level crossing 5 plane of incidence angle having interstitial hole
1-a
2)/A), wherein, a
1and a
2the linear movement measuring value of Article 1 and Article 2 canonical measure beam feeding sputtering area on the level crossing 5 being respectively interstitial hole, the remainder light of every bar canonical measure light beam 3,4 is transmitted on two light-beam position detectors 18,19 through there being the level crossing 5 of interstitial hole,
(2) the output light being calibrated laser interferometer laser instrument 8 forms two of being parallel to each other be calibrated laser interferometer measurement light beam 10 through being calibrated laser interferometer interference mirror group 9, 11, be calibrated laser interferometer two measuring beams 10, 11 intermediate throughholes 12 of all passing twin shaft hollow laser interference mirror group 2, with two canonical measure light beams 3, 4 is parallel, and all incide and be calibrated on laser interferometer plane mirror 13, perpendicular to two canonical measure light beams 3, in the plane of 4, Article 1 and Article 2 to be calibrated connecting line segment m between laser interferometer measurement light beam projecting location point long be B, connecting line segment m and connecting line segment M conllinear, article two, be calibrated laser interferometer measurement light beam 10 with what be calibrated laser interferometer plane mirror 13 displacement information, 11 be reflected back and be calibrated laser interferometer interference mirror group 9 after, according to from being calibrated the interference signal obtained in laser interferometer interference mirror group 9, obtain connecting line segment m place straight line and changing value the arctan ((b being calibrated laser interferometer plane mirror 13 plane of incidence angle
1-b
2)/B), wherein, b
1and b
2be respectively and be calibrated the linear movement measuring value that Article 1 and Article 2 on laser interferometer plane mirror 13 are calibrated laser interferometer measurement beam feeding sputtering area,
(3) the original incident position coordinates that Article 1, Article 2 canonical measure light beam and Article 1, Article 2 are calibrated laser interferometer measurement light beam respective on the target mirror plane of incidence is respectively (x
1, y
1), (x
2, y
2), (x
3, y
3) and (x
4, y
4), on the target mirror plane of incidence, the original incident position coordinates of every bar measuring beam is after coordinate displacement (x, y), and the linear movement measuring value caused because of target mirror reflecting surface shape characteristic is respectively function z
1(x
1+ x, y
1+ y), z
2(x
2+ x, y
2+ y), z
3(x
3+ x, y
3+ y) and z
4(x
4+ x, y
4+ y), sports platform 16 carry out any sense of rotation low-angle beat and with the derivative displacement in random two-dimensional direction in the plane perpendicular to canonical measure light beam 3,4, with at the uniform velocity or non-at the uniform velocity sampling rate, synchronized sampling standard laser interferometer variable angle value arctan ((a
1-a
2)/A) and be calibrated laser interferometer variable angle value arctan ((b
1-b
2)/B), the synchronizing detection of two light-beam position detectors 18,19 is to the derivative coordinate displacement value of two canonical measure light beams 3,4 hot spot two-dimensional directional on the target mirror plane of incidence, ask for two coordinate displacement values arithmetic mean (x ', y ') as the derivative coordinate displacement value of every bar measuring beam, the linear movement measuring error compensation caused by target mirror reflecting surface shape characteristic, in variable angle value, obtains arctan{ [(a
1-z
1(x
1+ x ', y
1+ y '))-(a
2-z
2(x
2+ x ', y
2+ y '))]/A} and arctan{ [(b
1-z
3(x
3+ x ', y
3+ y '))-(b
2-z
4(x
4+ x ', y
4+ y '))]/B}, finally obtain a series of angular displacement calibration measurement error amount arctan{ [(a
1-z
1(x
1+ x ', y
1+ y '))-(a
2-z
2(x
2+ x ', y
2+ y '))]/A}-arctan{ [(b
1-z
3(x
3+ x ', y
3+ y '))-(b
2-z
4(x
4+ x ', y
4+ y '))]/B}.
Canonical measure beam and focus position 20, 21 is two parallel standards measuring beams 3 successively respectively, 4 positions inciding the level crossing 5 of interstitial hole, be calibrated laser interferometer beam and focus position 22, 23 is be calibrated laser interferometer measurement light beam 10, 11 incidences are calibrated the position of laser interferometer plane mirror 13, can find out from position distribution and be calibrated laser interferometer beam and focus position 22, 23 are in canonical measure beam and focus position 20, the centre of 21, i.e. two parallel standards measuring beams 3, 4 will be calibrated laser interferometer measurement light beam 10, 11 are clamped in centre position.
Claims (5)
1. pattern compensation pair of optical angle displacement laser interferometer calibration method, is characterized in that the method step is as follows:
(1) the output light of standard laser interferometer laser instrument forms two the canonical measure light beams be parallel to each other through twin shaft hollow laser interference mirror group, and all incide on the level crossing of interstitial hole, in the plane perpendicular to two canonical measure light beams, Article 1, the connecting line segment M and between Article 2 canonical measure light beam projecting location point is long is A, after being reflected back toward twin shaft hollow laser interference mirror group with the part light of level crossing displacement information in every bar canonical measure light beam, according to the interference signal obtained from twin shaft hollow laser interference mirror group, obtain connecting line segment M place straight line and changing value the arctan ((a of level crossing plane of incidence angle having interstitial hole
1-a
2)/A), wherein, a
1and a
2. the linear movement measuring value of Article 1 and Article 2 canonical measure beam feeding sputtering area on the level crossing being respectively interstitial hole, the remainder light of every bar canonical measure light beam is transmitted on two light-beam position detectors through there being the level crossing of interstitial hole,
(2) the output light being calibrated laser interferometer laser instrument forms two of being parallel to each other be calibrated laser interferometer measurement light beam through being calibrated laser interferometer interference mirror group, be calibrated the intermediate throughholes that laser interferometer two measuring beams all pass twin shaft hollow laser interference mirror group, parallel with two canonical measure light beams, and all incide and be calibrated on laser interferometer plane mirror, in the plane perpendicular to two canonical measure light beams, Article 1 and Article 2 to be calibrated connecting line segment m between laser interferometer measurement light beam projecting location point long be B, connecting line segment m and connecting line segment M conllinear, article two, be calibrated after laser interferometer measurement beam reflection returns and be calibrated laser interferometer interference mirror group with what be calibrated laser interferometer plane mirror displacement information, according to from being calibrated the interference signal obtained in laser interferometer interference mirror group, obtain connecting line segment m place straight line and changing value the arctan ((b being calibrated laser interferometer plane mirror plane of incidence angle
1-b
2)/B), wherein, b
1and b
2be respectively and be calibrated the linear movement measuring value that Article 1 and Article 2 on laser interferometer plane mirror are calibrated laser interferometer measurement beam feeding sputtering area,
(3) the original incident position coordinates that Article 1, Article 2 canonical measure light beam and Article 1, Article 2 are calibrated laser interferometer measurement light beam respective on the target mirror plane of incidence is respectively (x
1, y
1), (x
2, y
2), (x
3, y
3) and (x
4, y
4), on the target mirror plane of incidence, the original incident position coordinates of every bar measuring beam is after coordinate displacement (x, y), and the linear movement measuring value caused because of target mirror reflecting surface shape characteristic is respectively function z
1(x
1+ x, y
1+ y), z
2(x
2+ x, y
2+ y), z
3(x
3+ x, y
3+ y) and z
4(x
4+ x, y
4+ y), sports platform carry out any sense of rotation low-angle beat and with the derivative displacement in random two-dimensional direction in the plane perpendicular to canonical measure light beam, with at the uniform velocity or non-at the uniform velocity sampling rate, synchronized sampling standard laser interferometer variable angle value arctan ((a
1-a
2)/A) and be calibrated laser interferometer variable angle value arctan ((b
1-b
2)/B), the synchronizing detection of two light-beam position detectors is to the derivative coordinate displacement value of two canonical measure beam and focus two-dimensional directional on the target mirror plane of incidence, ask for two coordinate displacement values arithmetic mean (x ', y ') as the derivative coordinate displacement value of every bar measuring beam, the linear movement measuring error compensation caused by target mirror reflecting surface shape characteristic, in variable angle value, obtains arctan{ [(a
1-z
1(x
1+ x ', y
1+ y '))-(a
2-z
2(x
2+ x ', y
2+ y '))]/A} and arctan{ [(b
1-z
3(x
3+ x ', y
3+ y '))-(b
2-z
4(x
4+ x ', y
4+ y '))]/B}, finally obtain a series of angular displacement calibration measurement error amount arctan{ [(a
1-z
1(x
1+ x ', y
1+ y '))-(a
2-z
2(x
2+ x ', y
2+ y '))]/A}-arctan{ [(b
1-z
3(x
3+ x ', y
3+ y '))-(b
2-z
4(x
4+ x ', y
4+ y '))]/B}.
2. a pattern compensation pair of optical angle displacement laser interferometer calibrating installation, comprise standard laser interferometer laser instrument (1), can receive the receiver (6) on standard laser interferometer interference signal position, receiver (6) is connected with standard laser interferometer signal disposal system (7) by wire; It is characterized in that being configured with can allowing of intermediate throughholes (12) on standard laser interferometer laser instrument (1) output light path and be calibrated twin shaft hollow standard laser interference mirror group (2) that laser interferometer measurement light beam (10,11) passes; Twin shaft hollow standard laser interference mirror group (2) side arrangement guide rail (17), sports platform (16) is fitted on guide rail (17), sports platform (16) is provided with the level crossing (5) of interstitial hole, install in level crossing (5) interstitial hole and be calibrated laser interferometer plane mirror (13), be calibrated laser interferometer plane mirror (13) and have the level crossing of interstitial hole (5) the composition plane of incidence coplanar and the target mirror that relative position is fixing; Two light-beam position detectors (18,19) are configured in after level crossing (5) regional transmission of interstitial hole, and lay respectively on two parallel standards measuring beams (3,4) transmitted light path; Be calibrated laser interferometer interference mirror group (9) in the configuration of twin shaft hollow standard laser interference mirror group (2) opposite side and be calibrated laser interferometer laser instrument (8), described in be calibrated laser interferometer interference mirror group (9) and be positioned at and be calibrated on laser interferometer laser instrument (8) output light path; Being calibrated laser interferometer receiver (14) is configured on the position that can receive and be calibrated laser interferometer interference signal, and wire will be calibrated laser interferometer receiver (14) and be calibrated laser interferometer signal disposal system (15) and be connected.
3. pattern according to claim 2 compensation pair of optical angle displacement laser interferometer calibrating installation, it is characterized in that the intermediate throughholes (12) of described twin shaft hollow standard laser interference mirror group (2) comprises arbitrary shape, number is one or more.
4. pattern according to claim 2 compensation pair of optical angle displacement laser interferometer calibrating installation, is characterized in that described every bar parallel standards measuring beam (3,4) and every bar are calibrated laser interferometer measurement light beam (10,11) and are had the level crossing of interstitial hole (5) respectively and be calibrated more than laser interferometer plane mirror (13) reflection once or once.
5. pattern according to claim 2 compensation pair of optical angle displacement laser interferometer calibrating installation, the number that it is characterized in that described standard laser interferometer receiver (6) and be calibrated laser interferometer receiver (14) is one or more respectively.
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| CN1657865A (en) * | 2004-02-20 | 2005-08-24 | 安捷伦科技有限公司 | System and method of using a side-mounted interferometer to acquire position information |
| CN103267581A (en) * | 2013-05-17 | 2013-08-28 | 中山大学 | Spectrum shearing interferometer suitable for measuring shaped pulses |
-
2013
- 2013-10-11 CN CN201310475890.7A patent/CN103528508B/en active Active
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1657865A (en) * | 2004-02-20 | 2005-08-24 | 安捷伦科技有限公司 | System and method of using a side-mounted interferometer to acquire position information |
| CN103267581A (en) * | 2013-05-17 | 2013-08-28 | 中山大学 | Spectrum shearing interferometer suitable for measuring shaped pulses |
Non-Patent Citations (2)
| Title |
|---|
| 基于80m测量装置的双频激光干涉仪系统精度及影响因素分析;冷玉国等;《计量与测试技术》(第09期);第47-49页 * |
| 激光干涉仪测长精度校准方法的研究;廖澄清等;《现代测量与实验室管理》;20050126(第01期);第6-7页第1-4节 * |
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