CN103499278A - Method and device for calibrating morphology compensation type four-optical-axis linear displacement laser interferometer - Google Patents
Method and device for calibrating morphology compensation type four-optical-axis linear displacement laser interferometer Download PDFInfo
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Abstract
The invention relates to a method and a device for calibrating a morphology compensation type four-optical-axis linear displacement laser interferometer and belongs to the technical field of laser measurement. According to the invention, a measurement beam of the calibrated laser interferometer passes through a middle through hole of a four-axis hollow laser interference mirror set and the measurement beam of the calibrated laser interferometer is placed in parallel at the middle position among four parallel standard measurement beams distributed in a side edge form of a regular quadrangular prism; in a plane vertical to the four standard measurement beams and in a square region formed by projection points of the four standard measurement beams in the plane, difference between the degrees that the four standard measurement beams and the measurement beam of the calibrated laser interferometer are interfered by the environment is small and the average value of the air refractive indexes of the four standard measurement beams is approximate to the value of the air refractive index of the measurement beam of the calibrated laser interferometer; a measurement error caused by the surface morphology of the reflecting surface of a target reflector is compensated into a linear displacement measurement result so as to ensure accuracy of a linear displacement measurement value.
Description
Technical field
The invention belongs to the laser measuring technique field, relate generally to a kind of laser interferometer calibration steps and device.
Background technology
Laser interferometry displacement of the lines technology is the canonical measure technology that precision is very high, be widely used in the accurate and fields such as ultraprecise machining, microelectronics equipment, nanometer technology industrial equipment and defence equipment, in order to guarantee the accuracy of laser interferometer measurement displacement of the lines, need scientific and effective displacement of the lines laser interferometer calibration steps and device.The general thinking of lubber-line displacement lasers interferometer is to adopt the higher displacement of the lines laser interferometer of accuracy class to calibrate, and when both precision is close, is called comparison.In actual alignment work, the displacement of the lines laser interferometer has suitable precision mostly, thereby the calibration of displacement of the lines laser interferometer is realized by comparison.At present, the general calibration steps of displacement of the lines laser interferometer has parallel type, formula and light path formula (Liao Chengqing face-to-face altogether, Zhu little Ping, Wang Weichen, Du Hua. the research of laser interferometer length measurement precision calibration steps. modern surveying and laboratory room managing, 2005,1:6-7).
Fig. 1 is parallel type laser interferometer calibrating installation structural representation, canonical measure mirror and be calibrated and measure mirror and be arranged on same movable platform, and when sports platform moves, the light paths of two cover laser interferometer measurement light beams increase simultaneously and reduce.Because two cover laser interferometer are parallel, place, two-way light is affected by environment similar, and air refraction is less to the two-way influence of light, but, because the vertical range between two-way light is larger, when therefore two cover laser interferometer are calibrated, Abbe error is larger.
Fig. 2 is face-to-face formula laser interferometer calibrating installation structural representation, canonical measure mirror and being calibrated measures that mirror is aspectant to be arranged on sports platform, its advantage is that two cover laser interferometer measurement beam axis can tune to almost on same measurement axis, both Abbe errors are very little, shortcoming is that the near-end due to an interferometer is another far-end, both light paths do not wait, and are subject to the interference difference of environment, and air refraction is inconsistent on the light path impact of two cover laser interferometer.
2011, China National Measuring Science Research Inst. sets up domestic first 80 meters big-length laser interfering meter measuring devices (cold beautiful state, Tao Lei, Xu Jian. two-frequency laser interferometer system accuracy and analysis of Influential Factors based on the 80m measurement mechanism. metering and measuring technology, 2011, 38 (9): 47-49), the accepted standard device is that the length of three Agilent5530 types is put apart from two-frequency laser interferometer is parallel, become three path laser interferometers, the laser interferometer be calibrated is placed in the middle of them, thereby calibration, this scheme belongs to the derivative schemes of parallel type calibration steps, and measure owing to adopting three road light simultaneously, therefore the Abbe error in the time of can compensating measure, but put owing to being that three laser instruments are parallel, therefore three road sign locating tab assembly light locus are far away, the every road sign locating tab assembly of the measurement electrical distance electrical distance that is calibrated laser interferometer is also far away, all optical paths are subject to the difference that affects of environment, air refraction is inconsistent on all optical path impacts, cause the calibration measurement result inaccurate.
Fig. 3 is common light path formula laser interferometer calibrating installation structural representation, and altogether the light path formula is different from parallel type laser interferometer calibrating installation is that two laser instruments become the 90 degree mode of turning back with receiver, and two cover laser interferometer share interference mirror group and measurement mirror.Because two cover laser interferometer share an interference mirror group and measure mirror, can't determine shared interference mirror group and measure mirror and belong to the standard laser interferometer component or belong to and be calibrated the standard laser interferometer component, therefore, not that on accurate meaning, two calibrations of overlapping laser interferometer are calibrated.
1985, Dr-Ing H.-H.Schussler takes full advantage of space distribution (Dr-Ing H.-H.Schussler.Comparison and calibration oflaser interferometer systems.Measurement, 1985,3 (4): 175-184), multipair displacement of the lines laser interferometer is carried out to common light path calibration.Owing to just increasing the quantity of light path laser interferometer altogether, so the method also has the shortcoming of light path formula laser interferometer calibrating installation altogether above-mentioned.
Summary of the invention
For Abbe error larger in above-mentioned existing displacement of the lines laser interferometer calibrating installation, serious air refraction inconsistency be not the problem that on accurate meaning, two cover laser interferometer are calibrated, the present invention proposes and has researched and developed compensation four optical axis displacement lasers interferometer calibration steps and the devices of pattern, this invention makes the canonical measure light beam and is calibrated laser interferometer measurement light beam vertical range very little, thereby can reduce Abbe error, reduce the impact of air refraction inconsistency, and be that on accurate meaning, two cover laser interferometer are calibrated.
Purpose of the present invention is achieved through the following technical solutions:
The compensation four optical axis displacement lasers interferometer calibration stepss of a kind of pattern, the method step is as follows:
(1) the output light of standard laser interferometer laser instrument forms four canonical measure light beams that are parallel to each other through four axle hollow laser interference mirror groups, article four, the canonical measure light beam incides on the level crossing of interstitial hole with four-prism incline distribution form, after being reflected back toward four axle hollow laser interference mirror groups with the part light of level crossing displacement information in every canonical measure light beam, distinguish four corresponding interference signals according to what obtain with four canonical measure light beams from four axle hollow laser interference mirror groups, can obtain four shift values that the level crossing of interstitial hole moves along the canonical measure beam direction, the level crossing of remainder light through interstitial hole is arranged of every canonical measure light beam is transmitted on four light-beam position detectors,
(2) the output light that is calibrated the laser interferometer laser instrument forms and is calibrated the laser interferometer measurement light beam through being calibrated laser interferometer interference mirror group, be calibrated the intermediate throughholes of laser interferometer measurement light beam through four axle hollow laser interference mirror groups, parallel with four canonical measure light beams, and equate with the distance of every canonical measure light beam, being calibrated the laser interferometer measurement light beam incides and is calibrated on the laser interferometer catoptron, after being reflected back toward and being calibrated laser interferometer interference mirror group, according to the interference signal obtained from be calibrated laser interferometer interference mirror group, can obtain being calibrated the shift value that the laser interferometer catoptron moves along the canonical measure beam direction,
Article (3) four, canonical measure light beam and be calibrated laser interferometer measurement light beam initial incoming position coordinate separately on the target mirror plane of incidence and be respectively (x
1, y
1), (x
2, y
2), (x
3, y
3), (x
4, y
4) and (x
5, y
5), on the target mirror plane of incidence, the initial incoming position coordinate of every measuring beam is through after the coordinate displacement (x, y) of two-dimensional directional, and the displacement measurement caused because of target mirror reflecting surface shape characteristic is respectively function z
1(x
1+ x, y
1+ y), z
2(x
2+ x, y
2+ y), z
3(x
3+ x, y
3+ y), z
4(x
4+ x, y
4+ y) and z
5(x
5+ x, y
5+ y);
(4) sports platform along in canonical measure beam direction to-and-fro movement process with the derivative displacement of random two-dimensional direction in perpendicular to the canonical measure beam plane, with at the uniform velocity or non-at the uniform velocity sampling rate, synchronized sampling standard laser interferometer four measuring shift value and be calibrated the laser interferometer measurement shift value, be respectively S
1, S
2, S
3, S
4and S
5the derivative coordinate displacement value of four light-beam position detectors synchronizing detection to four canonical measure beam and focus two-dimensional directional on the target mirror plane of incidence, ask for four coordinate displacement values arithmetic mean (x ', y ') as the derivative coordinate displacement value of every measuring beam, the displacement measurement errors that target mirror reflecting surface shape characteristic is caused compensates to be measured in shift value, obtains S
1-z
1(x
1+ x ', y
1+ y '), S
2-z
2(x
2+ x', y
2+ y '), S
3-z
3(x
3+ x ', y
3+ y '), S
4-z
4(x
4+ x', y
4+ y ') and S
5-z
5(x
5+ x ', y
5+ y '), get S
1-z
1(x
1+ x ', y
1+ y '), S
2-z
2(x
2+ x ', y
2+ y '), S
3-z
3(x
3+ x', y
3+ y ') and S
4-z
4(x
4+ x ', y
4+ y ') mean value and S
5-z
5(x
5+ x ', y
5+ y ') poor, obtain some sampled measurements error amounts.
The compensation four optical axis displacement lasers interferometer calibrating installations of a kind of pattern, comprising that standard laser interferometer laser instrument and four are configured in can receive the locational receiver of standard laser interferometer interference signal, and wire is connected four receivers respectively with standard laser interferometer signal disposal system; Dispose can allowing of intermediate throughholes and be calibrated the four axle hollow standard laser interference mirror groups that the laser interferometer measurement light beam passes on standard laser interferometer laser instrument output light path; Four axle hollow standard laser interference mirror group one side arrangement guide rails, sports platform is fitted on guide rail, the level crossing of interstitial hole is installed on sports platform, install in the level crossing interstitial hole and be calibrated the laser interferometer catoptron, be calibrated the laser interferometer catoptron and form by the level crossing of interstitial hole the target mirror that the plane of incidence is coplanar and relative position is fixing; Four light-beam position detector configuration are in the level crossing regional transmission back that interstitial hole is arranged, and lay respectively on four parallel standards measuring beam transmitted light paths; Be calibrated laser interferometer interference mirror group and be calibrated the laser interferometer laser instrument in four axle hollow standard laser interference mirror group opposite sides configurations, the described laser interferometer interference mirror group that is calibrated is positioned at and is calibrated on laser interferometer laser instrument output light path; Be calibrated the laser interferometer receiver and be configured in and can receive on the position that is calibrated the laser interferometer interference signal, wire will be calibrated the laser interferometer receiver and be calibrated the laser interferometer signal disposal system and be connected.
The present invention has following characteristics and good result:
(1) with parallel type laser interferometer calibrating installation, compare, owing to being calibrated the laser interferometer measurement light beam by the intermediate throughholes of four axle hollow laser interference mirror groups, the vertical range be calibrated between laser interferometer measurement optical axis and parallel standards optical axis is shorter, both light paths are more approaching, and when therefore two cover laser interferometer are calibrated, Abbe error is very little.
(2) with face-to-face formula laser interferometer calibrating installation, compare, in the plane perpendicular to four canonical measure light beams, in the square area formed at this plane projection point by four canonical measure light beams, article four, canonical measure light beam and be calibrated the laser interferometer measurement light beam and be subject to the degree difference of environmental interference very little, the air refraction mean value of four canonical measure light beams approaches the air refraction value that is calibrated the laser interferometer measurement light beam.
(3) light path formula laser interferometer calibrating installation is compared together, shares the interference mirror group and measures mirror, and standard laser interferometer component and to be calibrated standard laser interferometer component ownership clear and definite, be that on accurate meaning, two cover laser interferometer are calibrated.
(4) four light-beam position detectors can be measured the derivative displacement of four relative target mirrors of canonical measure light beam random two-dimensional direction in perpendicular to the canonical measure beam plane, derivative displacement occurs after, the measurement displacement error that target mirror reflecting surface surface topography causes compensates in the linear movement measuring result, guarantees the accuracy of linear movement measuring value.
The accompanying drawing explanation
Fig. 1 is parallel type laser interferometer calibrating installation structural representation
Fig. 2 is face-to-face formula laser interferometer calibrating installation structural representation
Fig. 3 is for being total to light path formula laser interferometer calibrating installation structural representation
Fig. 4 is the compensation four optical axis displacement lasers interferometer calibrating installation structural representations of pattern
Fig. 5 is hot spot position distribution schematic diagram on the level crossing by interstitial hole and the plane of incidence that is calibrated the target mirror that the laser interferometer catoptron forms
In figure: 1 standard laser interferometer laser instrument, 2 four axle hollow standard laser interference mirror groups, 3, 4, 5, article 6 four, parallel standards measuring beam, 7 have the level crossing of interstitial hole, 8, 9, 10, 11 standard laser interferometer receivers, 12 standard signal disposal systems, 13 are calibrated the laser interferometer laser instrument, 14 are calibrated laser interferometer interference mirror group, 15 are calibrated the laser interferometer measurement light beam, 16 intermediate throughholes, 17 are calibrated the laser interferometer catoptron, 18 are calibrated the laser interferometer receiver, 19 are calibrated the laser interferometer signal disposal system, 20 sports platforms, 21 guide rails, 22, 23, 24, 25 4 light-beam position detectors, 26, 27, 28, article 29 4, parallel standards measuring beam facula position, 30 are calibrated laser interferometer beam and focus position.
Embodiment
Below in conjunction with accompanying drawing, the specific embodiment of the invention is described in further detail.
The compensation four optical axis displacement lasers interferometer calibrating installations of a kind of pattern, comprising that standard laser interferometer laser instrument 1 and four are configured in can receive the locational receiver 8,9,10,11 of standard laser interferometer interference signal, and wire is connected four receivers 8,9,10,11 respectively with standard laser interferometer signal disposal system 12; Dispose can allowing of intermediate throughholes 16 and be calibrated the four axle hollow standard laser interference mirror groups 2 that laser interferometer measurement light beam 15 passes on standard laser interferometer laser instrument 1 output light path; Four axle hollow standard laser interference mirror group 2 one side arrangement guide rails 21, sports platform 20 is fitted on guide rail 21, the level crossing 7 of interstitial hole is installed on sports platform 20, install in level crossing 7 interstitial holes and be calibrated laser interferometer catoptron 17, be calibrated laser interferometer catoptron 17 and form by the level crossing 7 of interstitial hole the target mirror that the plane of incidence is coplanar and relative position is fixing; Four light-beam position detectors 22,23,24,25 are configured in the level crossing 7 regional transmission back of interstitial hole, and lay respectively on four parallel standards measuring beams, 3,4,5,6 transmitted light paths; Be calibrated laser interferometer interference mirror group 14 and be calibrated laser interferometer laser instrument 13 in four axle hollow standard laser interference mirror group 2 opposite sides configurations, the described laser interferometer interference mirror group 14 that is calibrated is positioned at and is calibrated on laser interferometer laser instrument 13 output light paths; Be calibrated laser interferometer receiver 18 and be configured in and can receive on the position that is calibrated the laser interferometer interference signal, wire will be calibrated laser interferometer receiver 18 and be calibrated laser interferometer signal disposal system 19 and be connected.
Described four parallel standards measuring beams 3,4,5,6 are with to be calibrated laser interferometer measurement light beam 15 all vertical with the target mirror plane of incidence.
The intermediate throughholes 16 of described four axle hollow standard laser interference mirror groups 2 comprises arbitrary shape, and number is one or more.
Described every parallel standards measuring beam 3,4,5,6 and be calibrated laser interferometer measurement light beam 15 and the level crossing 7 of interstitial hole arranged respectively and be calibrated laser interferometer catoptron 17 reflection once or once.
The described laser interferometer catoptron 17 that is calibrated comprises level crossing, prism of corner cube, right-angle prism.
The compensation four optical axis displacement lasers interferometer calibration stepss of a kind of pattern, the method step is as follows:
(1) the output light of standard laser interferometer laser instrument 1 forms through four axle hollow laser interference mirror groups 2 four canonical measure light beams 3 that are parallel to each other, 4, 5, 6, article four, canonical measure light beam 3, 4, 5, 6 incide on the level crossing 7 of interstitial hole with four-prism incline distribution form, after being reflected back toward four axle hollow laser interference mirror groups 2 with the part light of level crossing 7 displacement informations in every canonical measure light beam, according to from four axle hollow laser interference mirror groups 2, obtain with four canonical measure light beams 3, 4, 5, four interference signals corresponding to 6 difference, can obtain the level crossing 7 of interstitial hole along canonical measure light beam 3, 4, 5, four shift values of 6 direction motions, the level crossing 7 of the remainder light of every canonical measure light beam through interstitial hole is arranged is transmitted to four light-beam position detectors 22, 23, 24, on 25,
(2) the output light that is calibrated laser interferometer laser instrument 13 forms and is calibrated laser interferometer measurement light beam 15 through being calibrated laser interferometer interference mirror group 14, be calibrated the intermediate throughholes 16 of laser interferometer measurement light beam 15 through four axle hollow laser interference mirror groups 2, with four canonical measure light beams 3, 4, 5, 6 is parallel, and equate with the distance of every canonical measure light beam, being calibrated laser interferometer measurement light beam 15 incides and is calibrated on laser interferometer catoptron 17, after being reflected back toward and being calibrated laser interferometer interference mirror group 14, according to the interference signal obtained from be calibrated laser interferometer interference mirror group 14, can obtain being calibrated laser interferometer catoptron 17 along canonical measure light beam 3, 4, 5, the shift value of 6 direction motions,
Article (3) four, canonical measure light beam 3,4,5,6 and be calibrated laser interferometer measurement light beam 15 initial incoming position coordinate separately on the target mirror plane of incidence and be respectively (x
1, y
1), (x
2, y
2), (x
3, y
3), (x
4, y
4) and (x
5, y
5), on the target mirror plane of incidence, the initial incoming position coordinate of every measuring beam is through after the coordinate displacement (x, y) of two-dimensional directional, and the displacement measurement caused because of target mirror reflecting surface shape characteristic is respectively function z
1(x
1+ x, y
1+ y), z
2(x
2+ x, y
2+ y), z
3(x
3+ x, y
3+ y), z
4(x
4+ x, y
4+ y) and z
5(x
5+ x, y
5+ y);
(4) sports platform 20 along in canonical measure light beam 3,4,5,6 direction to-and-fro movement processes with the derivative displacement of random two-dimensional direction in perpendicular to canonical measure light beam 3,4,5,6 planes, with at the uniform velocity or non-at the uniform velocity sampling rate, synchronized sampling standard laser interferometer four measuring shift value and be calibrated the laser interferometer measurement shift value, be respectively S
1, S
2, S
3, S
4and S
5the derivative coordinate displacement value of four light-beam position detector 22,23,24,25 synchronizing detections to four a canonical measure light beam 3,4,5,6 hot spots two-dimensional directional on the target mirror plane of incidence, ask for four coordinate displacement values arithmetic mean (x ', y ') as the derivative coordinate displacement value of every measuring beam, the displacement measurement errors that target mirror reflecting surface shape characteristic is caused compensates to be measured in shift value, obtains S
1-z
1(x
1+ x ', y
1+ y '), S
2-z
2(x
2+ x ', y
2+ y '), S
3-z
3(x
3+ x ', y
3+ y '), S
4-z
4(x
4+ x ', y
4+ y ') and S
5-z
5(x
5+ x ', y
5+ y '), get S
1-z
1(x
1+ x ', y
1+ y '), S
2-z
2(x
2+ x ', y
2+ y '), S
3-z
3(x
3+ x ', y
3+ y ') and S
4-z
4(x
4+ x ', y
4+ y ') mean value and S
5-z
5(x
5+ x ', y
5+ y ') poor, obtain some sampled measurements error amounts.
Canonical measure beam and focus position 26, 27, 28, 29 is respectively four parallel standards measuring beams 3 successively, 4, 5, 6 incide the position of the level crossing 7 of interstitial hole, being calibrated laser interferometer beam and focus position 30 is to be calibrated the position that 15 incidents of laser interferometer measurement light beam are calibrated laser interferometer catoptron 17, can find out that from position distribution being calibrated laser interferometer beam and focus position 30 is in canonical measure beam and focus position 26, 27, 28, 29 center point, i.e. four parallel standards measuring beams 3, 4, 5, 6 will be calibrated laser interferometer measurement light beam 15 is clamped in center.
Claims (6)
1. compensation four optical axis displacement lasers interferometer calibration stepss of pattern is characterized in that the method step is as follows:
(1) the output light of standard laser interferometer laser instrument forms four canonical measure light beams that are parallel to each other through four axle hollow laser interference mirror groups, article four, the canonical measure light beam incides on the level crossing of interstitial hole with four-prism incline distribution form, after being reflected back toward four axle hollow laser interference mirror groups with the part light of level crossing displacement information in every canonical measure light beam, distinguish four corresponding interference signals according to what obtain with four canonical measure light beams from four axle hollow laser interference mirror groups, can obtain four shift values that the level crossing of interstitial hole moves along the canonical measure beam direction, the level crossing of remainder light through interstitial hole is arranged of every canonical measure light beam is transmitted on four light-beam position detectors,
(2) the output light that is calibrated the laser interferometer laser instrument forms and is calibrated the laser interferometer measurement light beam through being calibrated laser interferometer interference mirror group, be calibrated the intermediate throughholes of laser interferometer measurement light beam through four axle hollow laser interference mirror groups, parallel with four canonical measure light beams, and equate with the distance of every canonical measure light beam, being calibrated the laser interferometer measurement light beam incides and is calibrated on the laser interferometer catoptron, after being reflected back toward and being calibrated laser interferometer interference mirror group, according to the interference signal obtained from be calibrated laser interferometer interference mirror group, can obtain being calibrated the shift value that the laser interferometer catoptron moves along the canonical measure beam direction,
Article (3) four, canonical measure light beam and be calibrated laser interferometer measurement light beam initial incoming position coordinate separately on the target mirror plane of incidence and be respectively (x
1, y
1), (x
2, y
2), (x
3, y
3), (x
4, y
4) and (x
5, y
5), on the target mirror plane of incidence, the initial incoming position coordinate of every measuring beam is through after the coordinate displacement (x, y) of two-dimensional directional, and the displacement measurement caused because of target mirror reflecting surface shape characteristic is respectively function z
1(x
1+ x, y
1+ y), z
2(x
2+ x, y
2+ y), z
3(x
3+ x, y
3+ y), z
4(x
4+ x, y
4+ y) and z
5(x
5+ x, y
5+ y);
(4) sports platform along in canonical measure beam direction to-and-fro movement process with the derivative displacement of random two-dimensional direction in perpendicular to the canonical measure beam plane, with at the uniform velocity or non-at the uniform velocity sampling rate, synchronized sampling standard laser interferometer four measuring shift value and be calibrated the laser interferometer measurement shift value, be respectively S
1, S
2, S
3, S
4and S
5the derivative coordinate displacement value of four light-beam position detectors synchronizing detection to four canonical measure beam and focus two-dimensional directional on the target mirror plane of incidence, ask for four coordinate displacement values arithmetic mean (x ', y ') as the derivative coordinate displacement value of every measuring beam, the displacement measurement errors that target mirror reflecting surface shape characteristic is caused compensates to be measured in shift value, obtains S
1-z
1(x
1+ x ', y
1+ y '), S
2-z
2(x
2+ x ', y
2+ y '), S
3-z
3(x
3+ x ', y
3+ y '), S
4-z
4(x
4+ x', y
4+ y ') and S
5-z
5(x
5+ x ', y
5+ y '), get S
1-z
1(x
1+ x ', y
1+ y '), S
2-z
2(x
2+ x ', y
2+ y'), S
3-z
3(x
3+ x ', y
3+ y ') and S
4-z
4(x
4+ x', y
4+ y ') mean value and S
5-z
5(x
5+ x', y
5+ y ') poor, obtain some sampled measurements error amounts.
2. compensation four optical axis displacement lasers interferometer calibrating installations of pattern, comprising that standard laser interferometer laser instrument (1) and four are configured in can receive the locational receiver of standard laser interferometer interference signal (8,9,10,11), and wire is connected four receivers (8,9,10,11) respectively with standard laser interferometer signal disposal system (12); It is characterized in that disposing can allowing of intermediate throughholes (16) and be calibrated the four axle hollow standard laser interference mirror groups (2) that laser interferometer measurement light beam (15) passes on standard laser interferometer laser instrument (1) output light path; Four axle hollow standard laser interference mirror group (2) one side arrangement guide rails (21), sports platform (20) is fitted on guide rail (21), the level crossing (7) of interstitial hole is installed on sports platform (20), install and be calibrated laser interferometer catoptron (17) in level crossing (7) interstitial hole, be calibrated laser interferometer catoptron (17) and have the level crossing (7) of interstitial hole to form the target mirror that the plane of incidence is coplanar and relative position is fixing; Four light-beam position detectors (22,23,24,25) are configured in level crossing (7) the regional transmission back of interstitial hole, and lay respectively on four parallel standards measuring beams (3,4,5,6) transmitted light path; Be calibrated laser interferometer interference mirror group (14) and be calibrated laser interferometer laser instrument (13) in four axle hollow standard laser interference mirror group (2) opposite sides configurations, the described laser interferometer interference mirror group (14) that is calibrated is positioned at and is calibrated on laser interferometer laser instrument (13) output light path; Be calibrated laser interferometer receiver (18) and be configured in and can receive on the position that is calibrated the laser interferometer interference signal, wire will be calibrated laser interferometer receiver (18) and be calibrated laser interferometer signal disposal system (19) and be connected.
3. compensation four optical axis displacement lasers interferometer calibrating installations of pattern according to claim 2, is characterized in that described four parallel standards measuring beams (3,4,5,6) and to be calibrated laser interferometer measurement light beam (15) all vertical with the target mirror plane of incidence.
4. compensation four optical axis displacement lasers interferometer calibrating installations of pattern according to claim 2, the intermediate throughholes (16) that it is characterized in that described four axle hollow standard laser interference mirror groups (2) comprises that arbitrary shape, number are one or more.
5. compensation four optical axis displacement lasers interferometer calibrating installations of pattern according to claim 2, is characterized in that described every parallel standards measuring beam (3,4,5,6) and be calibrated laser interferometer measurement light beam (15) level crossing (7) of interstitial hole being arranged respectively and being calibrated laser interferometer catoptron (17) reflection once or once.
6. the compensation four optical axis displacement lasers interferometer calibrating installations of pattern according to claim 2, is characterized in that the described laser interferometer catoptron (17) that is calibrated comprises level crossing, prism of corner cube, right-angle prism.
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| CN107367223A (en) * | 2016-05-12 | 2017-11-21 | 哈尔滨工业大学 | The inductance sensor calibration method and device of capacitance sensor bit shift compensation |
| CN107367222A (en) * | 2016-05-12 | 2017-11-21 | 哈尔滨工业大学 | The inductance sensor calibration method and device of current vortex sensor linearity compensation |
| CN114370817A (en) * | 2022-01-12 | 2022-04-19 | 中国测试技术研究院机械研究所 | Device and method for calibrating ball arm instrument |
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| CN107367222A (en) * | 2016-05-12 | 2017-11-21 | 哈尔滨工业大学 | The inductance sensor calibration method and device of current vortex sensor linearity compensation |
| CN114370817A (en) * | 2022-01-12 | 2022-04-19 | 中国测试技术研究院机械研究所 | Device and method for calibrating ball arm instrument |
| CN114370817B (en) * | 2022-01-12 | 2023-08-15 | 中国测试技术研究院机械研究所 | Device and method for calibrating club instrument |
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