CN110666592A - Transmit-receive split type five-degree-of-freedom measuring device with optical path drift compensation and method - Google Patents
Transmit-receive split type five-degree-of-freedom measuring device with optical path drift compensation and method Download PDFInfo
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Abstract
The invention discloses a receiving and transmitting split type five-degree-of-freedom measuring device with optical path drift compensation and a method thereof, wherein the measuring device comprises a laser transmitting end consisting of a laser, a first prism reflector, a first spectroscope, a second prism reflector, a fourth spectroscope, a second convex lens, a second two-dimensional position sensitive detector, a third convex lens and a third two-dimensional position sensitive detector; the laser receiving end is composed of a third beam splitter, a first four-quadrant detector, a first convex lens, a first two-dimensional position sensitive detector and a second four-quadrant detector; when the measuring device is used, the laser transmitting end is arranged at a fixed position of a shaft to be measured of the numerical control machine tool, and the laser receiving end is arranged on a sliding table of the shaft to be measured of the numerical control machine tool; the invention can realize the simultaneous measurement of the pitch angle, the yaw angle, the roll angle, the horizontal straightness and the vertical straightness, and realize the remote measurement; the influence of laser angle drift on five-degree-of-freedom measurement can be eliminated, and the measurement precision is improved.
Description
Technical Field
The invention belongs to the technical field of precision measurement and the field of optical engineering, and particularly relates to a transmitting-receiving split type five-degree-of-freedom measuring device with optical path drift compensation and a method thereof.
Background
The machining precision of the numerical control machine tool is one of main indexes for measuring the performance of the machine tool, and the quality of parts is directly influenced. With the continuous improvement of the precision requirement of the parts in the mechanical manufacturing industry, the general attention of experts and scholars in various countries is paid to how to improve the machining precision of the numerical control machine tool. The error measurement compensation method reduces the error of the machine tool by measuring the original error of the machine tool and solving an error compensation value by using a space error model, and is an economic and effective method. The common three-axis numerical control machine tool has 21 geometric errors, namely a six-degree-of-freedom error corresponding to each axis and an orthogonal error between every two axes, wherein the six-degree-of-freedom error comprises a positioning error, a two-dimensional straightness error, a pitch angle, a yaw angle and a roll angle. The rapid and effective measurement of the machine tool error is the key for improving the machining precision of the numerical control machine tool.
The static calibration system of machine tool errors is mature, but the dynamic measurement and traceability of machine tool errors still represent an urgent industrial problem to be solved in the world today. At present, some mature machine tool error static measuring instruments exist in the market, for example, a laser interferometer is a common instrument for measuring the geometric error of a numerical control machine tool, measurement is based on the laser interference principle, but only one degree of freedom can be measured in each measurement, the installation and adjustment process is complex, the measurement period is long, and the laser interferometer can only be used for offline measurement and calibration of machine tool errors due to the fact that the laser interferometer cannot be integrated in the numerical control machine tool due to factors such as high manufacturing cost and large size; XM-60 multi-beam laser interferometer produced by Renysha company of UK can measure 6 degree of freedom errors simultaneously along a linear axis, but is difficult to integrate in a numerical control machine tool due to high manufacturing cost; the laser Doppler displacement measuring instrument of the American photodynamic company measures four diagonals by a step-by-step body diagonal measuring method, identifies three positioning errors, six straightness errors and three verticality errors of three axes of a machine tool, and is difficult to integrate in a numerical control machine tool due to high manufacturing cost and complex measuring and installing process. In many colleges and universities in China, multi-degree-of-freedom measurement is taken as an important subject of the measurement field for research, but most of the multi-degree-of-freedom measurement is in a laboratory stage, and in the literature, "the research on a linear guide rail laser six-degree-of-freedom geometric motion error simultaneous measurement method and system" (true star, doctor's academic thesis, Beijing university of transportation, 2016), six-degree-of-freedom measurement is realized based on the combination of laser interference and laser collimation, and the measurement precision is improved by utilizing the common-path light drift measurement and compensation principle; in the document "Lowcost, compact 4-DOF measurement system with active compensation of beam shaped drift" (y. huang, k.c.fan, w.sun, s.liu. opt. express vol.26, pp.17185, 2018), four-degree-of-freedom measurement is realized based on the laser collimation and auto-collimation principle, and compensation is realized by measuring the laser angle drift. The measuring device which realizes the multi-degree-of-freedom measurement and can be integrated in the numerical control machine tool is very important for the dynamic measurement of machine tool errors, and further enhanced research is needed.
The method for realizing multi-degree-of-freedom measurement based on the laser collimation and auto-collimation principles is simple in structure, easy to integrate and low in cost. The laser of the method is arranged at the fixed end and used for emitting laser, and the position of the laser is unchanged during measurement. According to the installation position of the position detector, the multi-degree-of-freedom measurement structure can be divided into two types. One structure is that reflecting elements such as a pyramid prism and a plane mirror are arranged on a measured object, laser emitted by a laser is reflected to a fixed end by using the reflection characteristics of the elements such as the pyramid prism and the plane mirror, a detector is arranged at the fixed end and used for receiving the laser, and the structure is called as a transmitting-receiving integrated structure; in another structure, the position detector is directly arranged on a measured object to directly receive the emergent laser, and the structure is called as a transmitting-receiving split type. The optical path of the receiving and transmitting integrated measuring structure and the receiving and transmitting split measuring structure is half of the optical path of the receiving and transmitting integrated measuring structure, and long-distance measurement is facilitated. Most machine tools are provided with grating scales, the precision is about 1-2 mu m, and therefore the requirement of dynamic measurement of machine tool errors can be met by measuring the five-degree-of-freedom errors of a single shaft of the machine tool except for positioning errors. When the laser collimation characteristic is used for measurement, the angle drift of laser has serious interference on the measurement precision, and the measurement of the angle drift of the laser and the compensation can effectively improve the error measurement precision. For a large-scale machine tool with long stroke, a five-degree-of-freedom measuring device which can compensate laser angle drift, is suitable for remote measurement, is convenient to integrate into a numerical control machine tool and has low cost is needed, so that high-precision, remote and online multi-degree-of-freedom measurement is realized.
Disclosure of Invention
The invention aims to overcome the defects in the prior art and provides a transmitting-receiving split type five-degree-of-freedom measuring device with optical path drift compensation and a method thereof.
The purpose of the invention is realized by the following technical scheme:
a receiving and transmitting split type five-degree-of-freedom measuring device with optical path drift compensation comprises a laser, a first prism reflector, a first spectroscope, a second spectroscope, a third spectroscope, a first four-quadrant detector, a first convex lens, a first two-dimensional position sensitive detector, a second prism reflector, a fourth spectroscope, a second four-quadrant detector, a second convex lens, a second two-dimensional position sensitive detector, a third convex lens and a third two-dimensional position sensitive detector;
the laser, the first prism reflector, the first spectroscope, the second prism reflector, the fourth spectroscope, the second convex lens, the second two-dimensional position sensitive detector, the third convex lens and the third two-dimensional position sensitive detector form a laser emitting end;
the third beam splitter, the first four-quadrant detector, the first convex lens, the first two-dimensional position sensitive detector and the second four-quadrant detector form a laser receiving end; when the measuring device is used, the laser transmitting end is arranged at a fixed position of a shaft to be measured of the numerical control machine tool, and the laser receiving end is arranged on a sliding table of the shaft to be measured of the numerical control machine tool;
the laser device emits laser, the laser is reflected by the first prism reflector and then is divided into two laser beams by the first spectroscope, the laser passing through the first spectroscope is divided into two laser beams by the second spectroscope, the laser passing through the second spectroscope is divided into two laser beams by the third spectroscope, and the laser passing through the third spectroscope irradiates the first four-quadrant detector, so that the measurement of horizontal straightness and vertical straightness is realized and is used as a two-dimensional straightness measurement result of the measuring device; laser reflected by the third beam splitter is focused on the first two-dimensional position sensitive detector through the first convex lens to realize measurement of a pitch angle and a yaw angle; the laser reflected by the second spectroscope is focused on a second two-dimensional position sensitive detector through a second convex lens to realize the measurement of the laser angle drift through the second spectroscope; the measuring device only utilizes the straightness of the second four-quadrant detector in the vertical direction and combines the straightness of the first four-quadrant detector in the vertical direction to realize the roll angle measurement; and laser reflected by the fourth spectroscope is focused on a third two-dimensional position sensitive detector through a third convex lens, so that the measurement of the laser angle drift through the fourth spectroscope is realized.
The other technical scheme provided by the invention is as follows: a transmitting-receiving split type five-degree-of-freedom measurement method is used for realizing five-degree-of-freedom measurement of a pitch angle, a yaw angle, a roll angle, a horizontal straightness and a vertical straightness, and specifically comprises the following steps:
a. the measurement of the pitch angle and the yaw angle is realized, and when the laser receiving end has the pitch angle epsilonxWhen the light spot on the first two-dimensional position sensitive detector moves delta y along the y-axis direction8The focal length of the first convex lens is f7Angle of pitch epsilonxRepresented by formula (1):
when the laser receiving end has a deflection angle epsilonyWhen the light spot on the first two-dimensional position sensitive detector moves delta z along the z-axis direction8The focal length of the first convex lens is f7Angle of deflection epsilonyRepresented by formula (2):
b. realize the measurement of horizontal straightness and vertical straightness, when excitedThe horizontal straightness delta exists at the light receiving endxWhen the light spot on the first four-quadrant detector moves delta x along the x-axis direction6Horizontal straightness deltaxRepresented by formula (3):
δx＝-Δx6(3)
when the first four-quadrant detector at the laser receiving end has vertical straightness deltayWhen the light spot on the first four-quadrant detector moves by delta y along the y-axis direction6Horizontal straightness deltayRepresented by formula (4):
δy＝-Δy6(4)
c. the roll angle measurement is realized, and when the first four-quadrant detector at the laser receiving end has the vertical straightness deltayAnd has a roll angle epsilonzWhen the light spot on the second four-quadrant detector moves by delta y along the y-axis direction11Angle of roll epsilonzRepresented by formula (5):
the invention provides another technical scheme as follows: a method for measuring and compensating the angle drift of a light path influences the measurement of a pitch angle, a yaw angle, a horizontal straightness, a vertical straightness and a roll angle when laser passing through a second spectroscope drifts; when the laser penetrating through the second spectroscope drifts, the vertical straightness measurement at the second four-quadrant detector is influenced, and further the roll angle measurement is influenced; the method comprises the following steps:
a. when the y-axis of the laser passing through the second spectroscope has an angle drift thetay4Then, the light spot on the second two-dimensional position sensitive detector moves by delta z along the z-axis13The focal length of the second convex lens is f12Laser angle drift thetay4Represented by formula (6):
compensated yaw angle epsilony' represented by formula (7):
considering laser angle drift thetay4When the horizontal straightness is affected, it is considered that the laser beam rotates at the center position of the second beam splitter and the laser beam angle before the center of the second beam splitter shifts by θy4Neglecting the influence on the horizontal straightness, and if the distance from the center of the second spectroscope to the first four-quadrant detector is l, the compensated horizontal straightness deltax' is represented by (8):
b. when the laser x-axis passing through the second spectroscope has an angle drift thetax4Then, the light spot on the second two-dimensional position sensitive detector moves by delta y along the y axis13The focal length of the second convex lens is f12Laser angle drift thetax4Represented by formula (9):
compensated pitch angle epsilonx' represented by formula (10):
considering laser angle drift thetax4When the vertical straightness is affected, the laser is considered to rotate at the center position of the second beam splitter, and the laser angle before the center of the second beam splitter shifts by thetax4Neglecting the influence on the vertical straightness, and if the distance from the center of the second spectroscope to the first four-quadrant detector is l, the compensated vertical straightness deltay' is represented by (11):
c. when the x-axis of the laser passing through the fourth spectroscope has an angle drift thetax10When it is, thirdLight spot on the two-dimensional position sensitive detector moves delta y along the y axis15The focal length of the third convex lens is f14Laser angle drift thetax10Represented by formula (12):
laser angle drift thetax10When the vertical straightness of the second four-quadrant detector is influenced and the roll angle is further influenced, the laser is considered to rotate at the center of the fourth light splitting mirror, and the laser angle in front of the center of the fourth light splitting mirror drifts by thetax10Neglecting the influence on the vertical straightness, and if the distance from the center of the fourth light splitting mirror to the second four-quadrant detector is l, the compensated roll angle epsilonz' represented by formula (13):
compared with the prior art, the technical scheme of the invention has the following beneficial effects:
1. the receiving and transmitting split type five-degree-of-freedom measuring device with the optical path drift compensation, provided by the invention, has the advantages that the mechanical space is fully utilized, the structure is compact, the size is small, the device can be integrated in a numerical control machine tool, and the online measurement is realized;
2. the invention provides a transmitting-receiving split type five-degree-of-freedom measuring method, which realizes simultaneous measurement of a pitch angle, a yaw angle, a roll angle, horizontal straightness and vertical straightness, adopts a split type measuring structure, overcomes the defects of long optical path and easiness in influence of air disturbance of an integrated measuring structure, and realizes remote measurement;
3. the invention provides a method for measuring and compensating optical path angle drift, which eliminates the influence of laser angle drift on five-degree-of-freedom measurement and improves the measurement precision by measuring the optical path angle drift and deducing a measurement formula of the compensated five-degree-of-freedom.
Drawings
Fig. 1 is an overall structure diagram of a transmitting-receiving split type five-degree-of-freedom measuring device with optical path drift compensation.
Fig. 2 is a front view of the change of the spot position on the first two-dimensional position-sensitive detector when the laser receiving end has a pitch angle.
Fig. 3 is a side view of the spot position change on the first two-dimensional position sensitive detector when the laser receiving end has a pitch angle.
FIG. 4 is a front view of the spot position change on the first two-dimensional position sensitive detector when a yaw angle exists at the laser receiving end.
FIG. 5 is a side view of the change in spot position on the first two-dimensional position sensitive detector when a yaw angle exists at the laser receiving end.
FIG. 6 is a graph showing the change of spot position on the first four-quadrant detector when there is horizontal straightness at the laser receiving end.
FIG. 7 is a diagram showing the position change of the light spot on the first four-quadrant detector when the vertical straightness exists at the laser receiving end.
Fig. 8 is a diagram of the position change of the light spot on the first four-quadrant detector and the second four-quadrant detector when the laser receiving end has a roll angle.
FIG. 9 is a diagram showing the optical path change when the laser beam transmitted from the laser emitting end through the second beam splitter has an angular shift on the y-axis.
FIG. 10 is a diagram showing the position change of the light spot on the second two-dimensional position-sensitive detector when the laser beam transmitted from the laser emitting end through the second beam splitter has an angular shift in the x-axis.
Fig. 11 is a diagram showing the change of the optical path of the laser beam transmitted through the second beam splitter 4 when the x-axis of the laser beam transmitted through the second beam splitter at the laser emitting end is shifted in angle.
FIG. 12 is a diagram showing the position change of the light spot on the third two-dimensional position-sensitive detector when the x-axis of the laser beam transmitted from the laser emitting end through the fourth beam splitter is shifted in angle.
FIG. 13 is a diagram showing the change of the optical path of the laser beam transmitted by the fourth beam splitter when the x-axis of the laser beam transmitted by the laser emitting end through the fourth beam splitter is shifted in angle.
In the figure: 1 is a laser, 2 is a first prism reflector, 3 is a first spectroscope, 4 is a second spectroscope, 5 is a third spectroscope, 6 is a first four-quadrant detector, 7 is a first convex lens, 8 is a first two-dimensional position-sensitive detector, and 9 is a second prism reflectorA mirror, 10 is a fourth spectroscope, 11 is a second four-quadrant detector, 12 is a second convex lens, 13 is a second two-dimensional position sensitive detector, 14 is a third convex lens, 15 is a third two-dimensional position sensitive detector, 16 is a laser emitting end, 17 is a laser receiving end, f7Is the focal length of the first convex lens 7, f12Is the focal length of the second convex lens 12, f14Is the focal length, Δ y, of the first convex lens 148Is the amount of movement of the spot on the first two-dimensional position-sensitive detector 8 along the y-axis, az8Is the amount of movement, deltax, of the spot on the first two-dimensional position-sensitive detector 8 along the z-axis6Is the amount of movement of the spot on the first four-quadrant detector 6 along the x-axis, ay6Is the amount of movement of the spot on the first four-quadrant detector 6 along the y-axis, ay11Is the amount of movement of the spot on the second four-quadrant detector 11 along the y-axis, az13Is the amount of movement of the spot on the second two-dimensional position-sensitive detector 13 along the z-axis, ay13Is the amount of movement of the spot on the second two-dimensional position-sensitive detector 13 along the y-axis, ay15Is the amount of movement of the spot on the third two-dimensional position-sensitive detector 15 along the y-axisxTo a pitch angle, epsilonyIs a yaw angle, epsilonzIs a roll angle, deltaxIs a horizontal straightness, δyIs a vertical straightness, thetay4The drift angle, theta, of the laser light transmitted through the second beam splitter 4 along the y-axisx4The drift angle, θ, of the laser light transmitted through the second beam splitter 4 along the x-axisx10In order to obtain the drift angle of the laser beam passing through the fourth beam splitter 10 along the x-axis, d is the distance between the first four-quadrant detector 6 and the second four-quadrant detector 11, and l is the distance from the center of the second beam splitter 4 to the first four-quadrant detector 6 and the distance from the center of the fourth beam splitter 10 to the second four-quadrant detector 11.
Detailed Description
The invention is described in further detail below with reference to the figures and specific examples. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.
The embodiment of the invention consists of the following parts:
the first part is a receiving and transmitting split type five-degree-of-freedom measuring device with optical path drift compensation;
as shown in fig. 1, the transmitting/receiving split five-degree-of-freedom measuring device with optical path drift compensation is composed of a laser 1, a first prism reflector 2, a first beam splitter 3, a second beam splitter 4, a third beam splitter 5, a first four-quadrant detector 6, a first convex lens 7, a first two-dimensional position sensitive detector 8, a second prism reflector 9, a fourth beam splitter 10, a second four-quadrant detector 11, a second convex lens 12, a second two-dimensional position sensitive detector 13, a third convex lens 14 and a third two-dimensional position sensitive detector 15; the laser device 1, the first prism reflector 2, the first spectroscope 3, the second spectroscope 4, the second prism reflector 9, the fourth spectroscope 10, the second convex lens 12, the second two-dimensional position sensitive detector 13, the third convex lens 14 and the third two-dimensional position sensitive detector 15 form a laser emitting end 16; the third beam splitter 5, the first four-quadrant detector 6, the first convex lens 7, the first two-dimensional position sensitive detector 8 and the second four-quadrant detector 11 form a laser receiving end 17; when the measuring device is used, the laser emitting end 16 is installed at the fixed position of a shaft to be measured of the numerical control machine tool, and the laser receiving end 17 is installed on a sliding table of the shaft to be measured of the numerical control machine tool.
The laser 1 emits laser, the laser is reflected by a first prism reflector 2, then is divided into two laser beams through a first spectroscope 3, the laser passing through the first spectroscope 3 is divided into two laser beams through a second spectroscope 4, the laser passing through the second spectroscope 4 is divided into two laser beams through a third spectroscope 5, and the laser passing through the third spectroscope 5 is irradiated on a first four-quadrant detector 6, so that the measurement of horizontal linearity and vertical linearity is realized and is used as a two-dimensional linearity measurement result of the device; laser reflected by the third beam splitter 5 is focused on a first two-dimensional position sensitive detector 8 through a first convex lens 7, so that measurement of a pitch angle and a yaw angle is realized; the laser reflected by the second beam splitter 4 is focused on a second two-dimensional position sensitive detector 13 through a second convex lens 12, so that the laser angle drift measurement penetrating through the second beam splitter 4 is realized; the laser reflected by the first spectroscope 3 is reflected by the second prism reflector 9, the laser reflected by the second prism reflector 9 is divided into two beams of laser after passing through the fourth spectroscope 10, the laser after passing through the fourth spectroscope 10 irradiates on the second four-quadrant detector 11, and the measurement of the horizontal straightness and the vertical straightness is realized, and the device only utilizes the vertical straightness of the second four-quadrant detector 11 and combines the vertical straightness of the first four-quadrant detector 6 to realize the roll angle measurement; the laser reflected by the fourth spectroscope 10 is focused on a third two-dimensional position sensitive detector 15 through a third convex lens 14, so that the measurement of the laser angle drift through the fourth spectroscope 10 is realized;
the second part provides a transmitting-receiving split type five-degree-of-freedom measuring method aiming at the measuring device structure of the first part;
the five-degree-of-freedom measurement comprises the measurement of a pitch angle, a yaw angle, a roll angle, horizontal straightness and vertical straightness, and is realized by the following steps:
a. the measurement of the pitch angle and the yaw angle is realized, and when the laser receiving end 17 has the pitch angle epsilonxWhen the light spot on the first two-dimensional position-sensitive detector 8 moves along the y-axis direction by delta y, as shown in fig. 2 and 38The focal length of the first convex lens 7 is f7Angle of pitch epsilonxRepresented by formula (1):
when the laser receiving end 17 has a deflection angle epsilonyWhen the light spot on the first two-dimensional position-sensitive detector 8 moves along the z-axis direction by Δ z, as shown in fig. 4 and 58The focal length of the first convex lens 7 is f7Angle of deflection epsilonyRepresented by formula (2):
b. the measurement of horizontal straightness and vertical straightness is realized, and when the laser receiving end 17 has the horizontal straightness deltaxWhen the light spot moves in the x-axis direction, as shown in fig. 6, the light spot on the first four-quadrant detector 6 moves by deltax6Horizontal straightness deltaxRepresented by formula (3):
δx＝-Δx6(3)
when the vertical straightness delta exists at the first four-quadrant detector 6 of the laser receiving end 17yWhen the light spot on the first four-quadrant detector 6 moves along the y-axis direction by delta y, as shown in fig. 76Horizontal straightness deltayRepresented by formula (4):
δy＝-Δy6(4)
c. roll angle measurement is realized, and when the vertical straightness delta exists at the first four-quadrant detector 6 of the laser receiving end 17yAnd has a roll angle epsilonzAt this time, as shown in FIG. 8, the light spot on the second four-quadrant detector 11 moves by Δ y in the y-axis direction11Angle of roll epsilonzRepresented by formula (5):
the third part is used for providing a method for measuring and compensating the angle drift of the optical path aiming at the structure of the measuring device of the first part;
when the laser penetrating through the second spectroscope 4 drifts, the measurement of a pitch angle, a yaw angle, a horizontal straightness, a vertical straightness and a roll angle is influenced; when the laser passing through the second spectroscope 10 drifts, the vertical straightness measurement at the second four-quadrant detector 11 is influenced, and further the roll angle measurement is influenced; the measurement of the angle drift of the optical path and the compensation are realized by the following steps:
a. when the laser light passing through the second beam splitter 4 has an angular y-axis shift thetay4When, as shown in fig. 9, the light spot on the second two-dimensional position sensitive detector 13 moves along the z-axis by Δ z13The focal length of the second convex lens 12 is f12Laser angle drift thetay4Represented by formula (6):
compensated yaw angle epsilony' represented by formula (7):
considering laser angle drift thetay4When the horizontal straightness is affected, it is considered that the laser beam rotates at the center position of the second beam splitter 4 and the laser beam angle shifts by θ before the center of the second beam splitter 4y4The influence on the horizontal straightness is ignored, the distance from the center of the second spectroscope 4 to the first four-quadrant detector 6 is l, and the compensated horizontal straightness deltax' is represented by (8):
b. when the x-axis of the laser beam transmitted through the second beam splitter 4 is shifted by an angle thetax4In time, as shown in fig. 10 and 11, the light spot on the second two-dimensional position sensitive detector 13 moves by Δ y along the y-axis13The focal length of the second convex lens 12 is f12Laser angle drift thetax4Represented by formula (9):
compensated pitch angle epsilonx' represented by formula (10):
considering laser angle drift thetax4When the vertical straightness is affected, it is considered that the laser beam rotates at the center position of the second beam splitter 4 and the laser beam angle shifts by θ before the center of the second beam splitter 4x4The influence on the vertical straightness is ignored, the distance from the center of the second spectroscope 4 to the first four-quadrant detector 6 is l, and the compensated vertical straightness deltay' is represented by (11):
c. when the x-axis of the laser beam passing through the fourth beam splitter 10 has an angle shift thetax10In time, as shown in fig. 12 and 13, the light spot on the third two-dimensional position sensitive detector 15 moves by Δ y along the y-axis15Third, aConvex lens 14 has focal length f14Laser angle drift thetax10Represented by formula (12):
laser angle drift thetax10When the vertical straightness of the second four-quadrant detector 11 is affected and the roll angle is further affected, the laser is considered to rotate at the center of the fourth light splitter 10, and the laser angle drifts theta before the center of the fourth light splitter 10x10Neglecting the influence on the vertical straightness, and if the distance from the center of the fourth spectroscope 10 to the second four-quadrant detector 11 is l, the compensated roll angle epsilonz' is represented by (13):
the present invention is not limited to the above-described embodiments. The foregoing description of the specific embodiments is intended to describe and illustrate the technical solutions of the present invention, and the above specific embodiments are merely illustrative and not restrictive. Those skilled in the art can make many changes and modifications to the invention without departing from the spirit and scope of the invention as defined in the appended claims.
Claims (3)
1. A receiving and transmitting split type five-degree-of-freedom measuring device with optical path drift compensation is characterized by comprising a laser (1), a first prism reflector (2), a first spectroscope (3), a second spectroscope (4), a third spectroscope (5), a first four-quadrant detector (6), a first convex lens (7), a first two-dimensional position sensitive detector (8), a second prism reflector (9), a fourth spectroscope (10), a second four-quadrant detector (11), a second convex lens (12), a second two-dimensional position sensitive detector (13), a third convex lens (14) and a third two-dimensional position sensitive detector (15);
the laser device (1), the first prism reflector (2), the first spectroscope (3), the second spectroscope (4), the second prism reflector (9), the fourth spectroscope (10), the second convex lens (12), the second two-dimensional position sensitive detector (13), the third convex lens (14) and the third two-dimensional position sensitive detector (15) form a laser emitting end (16);
the third spectroscope (5), the first four-quadrant detector (6), the first convex lens (7), the first two-dimensional position-sensitive detector (8) and the second four-quadrant detector (11) form a laser receiving end (17); when the measuring device is used, a laser transmitting end (16) is arranged at a fixed position of a shaft to be measured of the numerical control machine tool, and a laser receiving end (17) is arranged on a sliding table of the shaft to be measured of the numerical control machine tool;
the laser device (1) emits laser, the laser is reflected by the first prism reflector (2) and then is divided into two laser beams through the first spectroscope (3), the laser passing through the first spectroscope (3) is divided into two laser beams through the second spectroscope (4), the laser passing through the second spectroscope (4) is divided into two laser beams through the third spectroscope (5), and the laser passing through the third spectroscope (5) is irradiated onto the first four-quadrant detector (6), so that the measurement of horizontal straightness and vertical straightness is realized and is used as a two-dimensional straightness measurement result of the measuring device;
laser reflected by the third beam splitter (5) is focused on a first two-dimensional position sensitive detector (8) through a first convex lens (7) to realize measurement of a pitch angle and a yaw angle;
laser light reflected by the second spectroscope (4) is focused on a second two-dimensional position sensitive detector (13) through a second convex lens (12), and laser angle drift measurement of the laser light penetrating through the second spectroscope (4) is realized;
the laser reflected by the first spectroscope (3) is reflected by a second prism reflector (9), the laser reflected by the second prism reflector (9) is divided into two beams of laser after passing through a fourth spectroscope (10), the laser passing through the fourth spectroscope (10) irradiates a second four-quadrant detector (11), and the measurement of horizontal straightness and vertical straightness is realized, and the measuring device only utilizes the vertical straightness of the second four-quadrant detector (11) and combines the vertical straightness of the first four-quadrant detector (6) to realize roll angle measurement;
laser light reflected by the fourth spectroscope (10) is focused on a third two-dimensional position sensitive detector (15) through a third convex lens (14), and laser angle drift measurement of the laser light penetrating through the fourth spectroscope (10) is achieved.
2. A transmitting and receiving split type five-degree-of-freedom measuring method is based on the transmitting and receiving split type five-degree-of-freedom measuring device of claim 1, and is used for realizing five-degree-of-freedom measurement of a pitch angle, a yaw angle, a roll angle, a horizontal straightness and a vertical straightness, and specifically comprises the following steps:
a. the measurement of the pitch angle and the yaw angle is realized, and when the laser receiving end (17) has the pitch angle epsilonxWhen the light spot on the first two-dimensional position sensitive detector (8) moves delta y along the y-axis direction8The focal length of the first convex lens (7) is f7Angle of pitch epsilonxRepresented by formula (1):
when the laser receiving end (17) has a deflection angle epsilonyWhen the light spot on the first two-dimensional position sensitive detector (8) moves delta z along the z-axis direction8The focal length of the first convex lens (7) is f7Angle of deflection epsilonyRepresented by formula (2):
b. the measurement of horizontal straightness and vertical straightness is realized, and when the laser receiving end (17) has horizontal straightness deltaxWhen the light spot on the first four-quadrant detector (6) moves delta x along the x-axis direction6Horizontal straightness deltaxRepresented by formula (3):
δx＝-Δx6(3)
when the first four-quadrant detector (6) of the laser receiving end (17) has vertical straightness deltayWhen the light spot on the first four-quadrant detector (6) moves delta y along the y-axis direction6Horizontal straightness deltayRepresented by formula (4):
δy＝-Δy6(4)
c. roll angle measurement is realized, and when the first four-quadrant detector (6) of the laser receiving end (17) has vertical straightness deltayAnd has a roll angle epsilonzWhile the light spot on the second four-quadrant detector (11) moves by delta y along the y-axis direction11Angle of roll epsilonzRepresented by formula (5):
3. a method for measuring and compensating the angle drift of an optical path is based on the receiving and transmitting split type five-degree-of-freedom measuring device of claim 1, and is characterized in that when laser passing through a second spectroscope (4) drifts, the measurement of a pitch angle, a yaw angle, a horizontal straightness, a vertical straightness and a roll angle is influenced; when the laser penetrating through the second spectroscope (10) drifts, the vertical straightness measurement at the second four-quadrant detector (11) is influenced, and further the roll angle measurement is influenced; the method comprises the following steps:
a. when the y-axis of the laser passing through the second spectroscope (4) has an angle drift thetay4When the light spot on the second two-dimensional position sensitive detector (13) moves delta z along the z-axis13The focal length of the second convex lens (12) is f12Laser angle drift thetay4Represented by formula (6):
compensated yaw angle epsilony' represented by formula (7):
considering laser angle drift thetay4When the horizontal straightness is affected, it is considered that the laser beam rotates at the center position of the second beam splitter (4) and the laser angle before the center of the second beam splitter (4) shifts by thetay4The influence on the horizontal straightness is ignored, and the center of the second spectroscope (4) reaches the first four imagesThe distance of the limit detector (6) is l, and the horizontal straightness delta after compensation is carried outx' is represented by (8):
b. when the laser x-axis passing through the second spectroscope (4) has an angle drift thetax4When the light spot on the second two-dimensional position sensitive detector (13) moves delta y along the y axis13The focal length of the second convex lens (12) is f12Laser angle drift thetax4Represented by formula (9):
compensated pitch angle epsilonx' represented by formula (10):
considering laser angle drift thetax4When the vertical straightness is affected, the laser beam is considered to rotate at the center position of the second beam splitter (4), and the laser angle before the center of the second beam splitter (4) drifts by thetax4The influence on the vertical straightness is ignored, the distance from the center of the second spectroscope (4) to the first four-quadrant detector (6) is l, and the compensated vertical straightness delta is obtainedy' is represented by (11):
c. when the x-axis of the laser passing through the fourth spectroscope (10) has an angle shift thetax10In the process, the light spot on the third two-dimensional position sensitive detector (15) moves delta y along the y axis15The focal length of the third convex lens (14) is f14Laser angle drift thetax10Represented by formula (12):
laser angle drift thetax10When the vertical straightness of the second four-quadrant detector (11) is influenced and the roll angle is further influenced, the laser is considered to rotate at the central position of the fourth light-splitting mirror (10), and the laser angle drifts theta before the center of the fourth light-splitting mirror (10)x10The influence on the vertical straightness is ignored, the distance from the center of the fourth light-splitting mirror (10) to the second four-quadrant detector (11) is l, and the compensated roll angle epsilonz' represented by formula (13):
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| CN111857043A (en) * | 2020-07-03 | 2020-10-30 | 天津大学 | Synchronous acquisition system and acquisition method for three-axis five-degree-of-freedom measuring head data of machine tool |
| CN114111577A (en) * | 2021-11-24 | 2022-03-01 | 华进半导体封装先导技术研发中心有限公司 | Monolithic integrated high-precision high-speed double-light spot synchronous position detector structure |
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| CN111857043A (en) * | 2020-07-03 | 2020-10-30 | 天津大学 | Synchronous acquisition system and acquisition method for three-axis five-degree-of-freedom measuring head data of machine tool |
| CN114111577A (en) * | 2021-11-24 | 2022-03-01 | 华进半导体封装先导技术研发中心有限公司 | Monolithic integrated high-precision high-speed double-light spot synchronous position detector structure |
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