CN210346614U - Calibration system for laser alignment receiving and transmitting integrated straightness accuracy measurement - Google Patents
Calibration system for laser alignment receiving and transmitting integrated straightness accuracy measurement Download PDFInfo
- Publication number
- CN210346614U CN210346614U CN201921423004.5U CN201921423004U CN210346614U CN 210346614 U CN210346614 U CN 210346614U CN 201921423004 U CN201921423004 U CN 201921423004U CN 210346614 U CN210346614 U CN 210346614U
- Authority
- CN
- China
- Prior art keywords
- laser
- pyramid prism
- laser interferometer
- interferometer
- position detector
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Abstract
The utility model discloses a calibration system for laser collimation receiving and transmitting integrated straightness measurement; the laser-based displacement measurement device comprises a straightness measurement mechanism, a laser interferometer laser head, a laser interferometer interference mirror, a laser interferometer pyramid prism and a displacement table, wherein the straightness measurement mechanism consists of a laser, a two-dimensional position detector, a fixed end base and the pyramid prism; the laser interferometer pyramid prism is placed on the displacement table, the displacement table can horizontally move along the x direction, and the laser interferometer interference mirror is placed between the laser head of the laser interferometer and the laser interferometer pyramid prism, so that laser interference in the laser head of the laser interferometer is realized, and displacement measurement of the displacement table is realized.
Description
Technical Field
The utility model belongs to the technical field of instrument and meter, especially a calibration system that laser collimation receiving and dispatching integral type straightness accuracy was measured.
Background
The machining precision of the numerical control machine tool is one of main indexes for measuring the performance of the machine tool, and the quality of parts is directly influenced. With the continuous improvement of the precision requirement of the parts in the mechanical manufacturing industry, the general attention of experts and scholars in various countries is paid to how to improve the machining precision of the numerical control machine tool. The error measurement compensation method reduces the error of the machine tool by measuring the original error of the machine tool and solving an error compensation value by using a space error model, and is an economic and effective method. The common three-axis numerical control machine tool has 21 geometric errors which are respectively six-degree-of-freedom errors corresponding to all axes and orthogonal errors between every two axes, and the six-degree-of-freedom errors comprise positioning errors, two-dimensional straightness errors, pitching angles, yaw angles and rolling angles, so that the straightness errors occupy an important proportion in total errors, and the high-precision straightness measurement is very important for solving the machine tool space errors.
The static calibration system of machine tool errors is mature, but the dynamic measurement and traceability of machine tool errors still represent an urgent industrial problem to be solved in the world today. The laser interferometer is a common instrument for measuring geometric errors of a numerical control machine tool, can measure linearity with high precision and continuously based on the laser interference principle, but needs to be installed and adjusted before each measurement, has long measurement period, cannot be integrated in the numerical control machine tool due to factors such as high manufacturing cost and large volume, and can only be used for off-line measurement and calibration of machine tool errors. When the laser autocollimator and the level meter are used for measuring the straightness, the laser autocollimator and the level meter are matched with a bridge plate for use, the product of the length and the angle of the bridge plate is the straightness error of a measuring point, the operation is complex, the error measuring point is limited, and the laser autocollimator and the level meter can only be used for offline measuring and calibrating the machine tool error. The laser beam collimation measurement directly utilizes the linearity of the laser beam, can quickly measure the straightness of the machine tool, and is convenient to integrate in a machine tool system due to simple structure and low cost, thereby realizing the online measurement of the straightness error of the machine tool.
When straightness is measured based on a laser collimation principle, the laser is installed at the fixed end, and the position of the laser is unchanged during measurement. The linearity measuring structure can be divided into two types according to the installation position of the position detector. One structure is that the pyramid prism is installed on the object to be measured, the emitted laser is reflected to the fixed end by the retro-reflection characteristic of the pyramid prism, the detector is installed at the fixed end to receive the emitted laser, and the structure is called as a transmitting-receiving integrated structure; in another structure, the position detector is directly arranged on the object to be detected for receiving the emergent laser, and the structure is called as a transmitting-receiving split type. The receiving and transmitting integrated straightness measuring structure is widely applied due to the simple structure.
The calibration of the position detector is vital to the linearity measurement, the precision of the linearity measurement is determined, the linearity measurement in the document ' research on simultaneous measurement of errors in five degrees of freedom of laser ' (True-Stat, Master's academic thesis, Beijing university of transportation, 2012) is a receiving and transmitting integrated structure, the position detector is calibrated by using a grating length measuring instrument and a displacement platform, and most of the deviation between the calibrated linearity error and a grating ruler is not more than +/-1 mu m. The position detector is calibrated using a laser Doppler interferometer and a displacement stage in the document "Low cost, compact 4-DOF measurement system with active compensation of beam and linear drift" (Y. Huang, K.C.Fan, W.Sun, S.Liu. Opt.express vol.26, pp.17185,2018.) with the calibrated residual within + -0.5 μm. The calibration in the two articles has good effect, but the influence of errors introduced by a calibration system on a calibration result is not mentioned.
SUMMERY OF THE UTILITY MODEL
The utility model aims at overcoming not enough among the prior art, provide a calibration system that laser alignment receiving and dispatching integral type straightness accuracy was measured. The calibration system uses a laser interferometer and a displacement table to calibrate the linearity measurement structure; establishing a calibration error model through a calibration system structure, and analyzing the influence of the error of the calibration system on a calibration result; and the influence of the error of the calibration system on the calibration result is reduced.
The utility model aims at realizing through the following technical scheme:
a calibration system for laser collimation receiving and transmitting integrated straightness measurement comprises a straightness measurement mechanism, a laser interferometer laser head, a laser interferometer interference mirror, a laser interferometer pyramid prism and a displacement table, wherein the straightness measurement mechanism comprises a laser, a two-dimensional position detector, a fixed end base and the pyramid prism;
the laser interferometer laser head is arranged between the laser interferometer laser head and the laser interferometer corner cone prism, so that laser in the laser interferometer laser head is interfered to realize displacement measurement of the displacement table; the displacement table moves along the x direction to calibrate the x direction of the two-dimensional position detector, and the two-dimensional position detector rotates by 90 degrees to calibrate the z direction of the two-dimensional position detector.
Compared with the prior art, the utility model discloses a beneficial effect that technical scheme brought is:
(1) the utility model establishes an error model of the calibration system for the calibration system based on laser collimation receiving and transmitting integrated straightness measurement, analyzes the error caused by Abbe error and pyramid prism parallel plate effect calibration, and provides a thought for reducing the error of the calibration system and realizing high-precision straightness calibration;
(2) the utility model discloses according to the analytic result of calibration system error model itself, provided and based on the high accuracy calibration mode of laser collimation receiving and dispatching integral type straightness accuracy measurement, the calibration is regularly through the abbe off-normal of adjustment laser interferometer, eliminates the error that abbe error and the parallel plate effect of pyramid prism brought, improves calibration accuracy.
Drawings
Fig. 1 is a partial structural schematic diagram of straightness measurement by a calibration system.
Fig. 2 is a schematic structural diagram of the calibration system.
FIG. 3 is a schematic diagram of an angular error of the stage during movement during calibration.
Fig. 4 is a schematic view of abbe's deviation in calibration.
Fig. 5 is an expanded schematic view of the corner cube prism.
Fig. 6 is a schematic diagram of the laser path change when the unfolded parallel plate of the corner cube rotates.
Fig. 7 is a schematic diagram showing the change of the position of the emitted laser light when the corner cube prism rotates.
FIG. 8 is a schematic view of Abbe offset adjustment of the calibration system.
Detailed Description
The present invention will be described in further detail with reference to the following drawings and specific embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.
Firstly, a calibration system structure based on laser collimation receiving and transmitting integrated straightness measurement is built;
as shown in fig. 1, the straightness measuring structure based on the laser collimation transmitting-receiving integrated type is composed of a laser 1, a two-dimensional position detector 2, a fixed end base 3 and a pyramid prism 4, wherein the laser 1 and the two-dimensional position detector 2 are simultaneously fixed on the fixed end base 3, emergent laser 5 of the laser 1 irradiates the pyramid prism 4, retro-reflected laser 6 passing through the pyramid prism 4 irradiates the two-dimensional position detector 2, and the pyramid prism 4 can be placed on an object to be measured to realize straightness measurement;
as shown in fig. 2, the calibration system is composed of a laser-collimation-based, receiving-transmitting integrated measurement structure, a laser interferometer laser head 7, a laser interferometer interference mirror 8, a laser interferometer pyramid prism 9 and a displacement table 12; based on the laser collimation receiving and dispatching integrated measuring structure, the pyramid prism 4 is arranged on the displacement table 12, the emergent laser 5 of the laser 1 is parallel to the y direction of the coordinate system and irradiates the pyramid prism 4, and the retro-reflection laser 6 passing through the pyramid prism irradiates the two-dimensional position detector 2; the laser interferometer pyramid prism 9 is placed on the displacement table 12, the emergent laser 10 of the laser interferometer laser head 7 is parallel to the x direction of the coordinate system and irradiates the laser interferometer pyramid prism 9, the retro-reflected laser 11 passing through the laser interferometer pyramid prism 9 is received by the laser interferometer laser head 7, the laser interferometer interference mirror 8 is placed between the laser interferometer laser head 7 and the laser interferometer pyramid prism 9, and the laser in the laser interferometer laser head 7 is interfered so as to realize displacement measurement of the displacement table 12; the two-dimensional position detector 2 needs to calibrate two directions of x and z, the displacement table 12 moves along the x direction in the figure to calibrate the x direction of the two-dimensional position detector 2, and when calibrating the z direction of the two-dimensional position detector 2, the two-dimensional position detector 2 is rotated by 90 degrees, the embodiment takes the x direction of the two-dimensional position detector 2 as an example for calibrating, and the z direction calibration is not repeated;
establishing an error model based on a laser collimation receiving and transmitting integrated straightness measuring and calibrating system structure;
when a calibration system error model is established, a laser incidence surface center O of the pyramid prism 4 is considered as a laser incidence surface center based on a laser collimation receiving and transmitting integrated straightness measuring point1The straightness measuring point using the laser interferometer is regarded as the laser incident surface center O of the laser interferometer corner cube 92As shown in fig. 3, the error includes abbe error introduced during calibration and error caused by the parallel plate effect of the corner cube 4, and the model establishing step is as follows:
a. abbe error is calculated, and as shown in FIG. 4, there are three angular errors, ε, of rotation about the x-direction, when the stage 12 is moved along the x-axisxxE.g. rotating in the y directionyxE.g. rotated in the z directionzxThe positive and negative judgment of the angle follows a right-hand spiral rule; there are three Abbe deviations, respectively the x-direction Abbe deviation LxxAbbe bias L in y-directionyxAbbe deviation L in z-directionzxThe positive and negative of the Abbe deviation are determined by the direction of the corresponding coordinate axis, and the direction of the Abbe deviation is positive if the direction of the coordinate axis is consistent with the direction of the coordinate axis, and the direction of the Abbe deviation is negative if the direction of the coordinate axis is consistent with the; when the displacement table 12 is moved in the process,angle epsilonzx、εyxAnd Abbe offset Lyx、LzxResulting Abbe error deltaxx1Represented by (1);
δxx1＝-εzxLyx+εyxLzx(1)
b. calculating errors caused by the parallel plate effect of the pyramid prism 4, as shown in fig. 5, the pyramid prism 4 is provided with three reflecting surfaces, the reflecting surfaces are named as a reflecting surface 1, a reflecting surface 2 and a reflecting surface 3 according to the sequence of passing laser, the pyramid prism 4 is unfolded according to the sequence of passing laser through the reflecting surfaces, the laser can equivalently be regarded as passing parallel plates through the pyramid prism 4, the height of the pyramid prism 4 is h, and the thickness of the parallel plates is 2 h;
the direction of the laser beam 5 emitted from the laser 1 is not changed, and when the displacement table 12 is changed angularly, epsilonzxWill bring calibration errors when the parallel plate rotates epsilon along the z-axiszxThe Abbe error is analyzed to be O1Point and O2Error of point, so that here the parallel plate is analyzed around the center O of the laser incidence surface1The error due to the rotation is, as shown in FIG. 6, a schematic drawing of the developed parallel flat plate without the rotation ε for easy observation of the change in the position of the retroreflected laser beam 6zxThe central line of the parallel flat plate is O1O′1Rotated epsilonzxThen, the center line of the parallel flat plate is O1O″1，O′1Point and O1The distance of the point in the x direction is | O1O″1|x(ii) a The emitted laser beam 5 enters from point A, the retroreflected laser beam 6 exits from point A', and the rotation εzxThen, the position of the incident point A of the emitted laser beam 5 is unchanged, the emission point of the retroreflected laser beam 6 is translated to the point A ', and the distance between the point A' and the point A 'in the x direction is | A'x(ii) a After the corner cube prism 4 rotates, the retroreflected laser light is translated in the x direction by Δ xlCausing straightness measurement errors, as shown in fig. 7; no angle epsilon of the pyramid prism 4 without changing the outgoing laser 5zxIn the meantime, the translation distance of the retro-reflected laser 6 in the x direction is 2 times that of the pyramid prism 4 in the x direction, and the effect of the parallel plate effect of the pyramid prism 4 on the calibration is opposite to the effect of the abbe error on the calibration, so that the pyramid prism 4 is flatThe error due to the row plate effect is deltaxx2Expressed by formula (2), wherein n represents the refractive index of the corner cube 3;
c. calculating a total calibration system error model deltaxxAbbe error delta from calibrationxx1Error delta caused by plate effect parallel to pyramid prism 4xx2Composition, represented by (3);
step three, providing a high-precision calibration method based on a calibration system error model;
adjusting Abbe deviation to Lzx＝0、
Therefore, the error of the calibration system is 0, and the calibration precision is improved; as shown in FIG. 8, a spacer 13 is placed below the laser interferometer corner cube 9 such that Lzx0, the laser interferometer corner cube 9 is adjusted in the y-direction so that
The present invention is not limited to the above-described embodiments. The above description of the embodiments is intended to describe and illustrate the technical solutions of the present invention, and the above embodiments are merely illustrative and not restrictive. Without departing from the spirit of the invention and the scope of the appended claims, the person skilled in the art can make many changes in form and detail within the teaching of the invention.
Claims (1)
1. A calibration system for laser collimation receiving and transmitting integrated straightness measurement is characterized by comprising a straightness measurement mechanism, a laser interferometer laser head (7), a laser interferometer interference mirror (8), a laser interferometer pyramid prism (9) and a displacement table (12), wherein the straightness measurement mechanism consists of a laser (1), a two-dimensional position detector (2), a fixed end base (3) and the pyramid prism (4), the laser (1) and the two-dimensional position detector (2) are fixed on the fixed end base (3), emergent laser (5) of the laser (1) irradiates the pyramid prism (4), retro-reflection laser (6) passing through the pyramid prism (4) irradiates the two-dimensional position detector (2), and the pyramid prism (4) is placed on the displacement table (12);
the laser interferometer pyramid prism (9) is placed on a displacement table (12), the displacement table (12) can move horizontally in the x direction, outgoing laser (10) of a laser head (7) of the laser interferometer is parallel to the x direction of a coordinate system and irradiates the laser interferometer pyramid prism (9), retro-reflected laser (11) passing through the laser interferometer pyramid prism (9) is received by the laser interferometer laser head (7), a laser interferometer interference mirror (8) is placed between the laser interferometer laser head (7) and the laser interferometer pyramid prism (9), and laser interference in the laser interferometer laser head (7) is enabled to achieve displacement measurement of the displacement table (12); the displacement table (12) moves along the x direction to calibrate the x direction of the two-dimensional position detector (2), and the z direction of the two-dimensional position detector (2) can be calibrated after the two-dimensional position detector (2) is rotated by 90 degrees.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921423004.5U CN210346614U (en) | 2019-08-29 | 2019-08-29 | Calibration system for laser alignment receiving and transmitting integrated straightness accuracy measurement |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921423004.5U CN210346614U (en) | 2019-08-29 | 2019-08-29 | Calibration system for laser alignment receiving and transmitting integrated straightness accuracy measurement |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN210346614U true CN210346614U (en) | 2020-04-17 |
Family
ID=70176573
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201921423004.5U Active CN210346614U (en) | 2019-08-29 | 2019-08-29 | Calibration system for laser alignment receiving and transmitting integrated straightness accuracy measurement |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN210346614U (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110455226A (en) * | 2019-08-29 | 2019-11-15 | 天津大学 | A kind of calibration system and method for the transmitting-receiving integrated straight line degree measurement of laser alignment |
| CN112066961A (en) * | 2020-09-15 | 2020-12-11 | 成都明杰科技有限公司 | Abbe error control system for precision measurement |
| CN113566745A (en) * | 2021-07-30 | 2021-10-29 | 上海无线电设备研究所 | High-precision roll angle measuring device and method based on laser collimation technology |
| CN114413793A (en) * | 2022-01-18 | 2022-04-29 | 广东省科学院智能制造研究所 | Laser collimation device |
-
2019
- 2019-08-29 CN CN201921423004.5U patent/CN210346614U/en active Active
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110455226A (en) * | 2019-08-29 | 2019-11-15 | 天津大学 | A kind of calibration system and method for the transmitting-receiving integrated straight line degree measurement of laser alignment |
| CN110455226B (en) * | 2019-08-29 | 2024-04-30 | 天津大学 | Calibration system and method for laser collimation transceiving integrated straightness measurement |
| CN112066961A (en) * | 2020-09-15 | 2020-12-11 | 成都明杰科技有限公司 | Abbe error control system for precision measurement |
| CN113566745A (en) * | 2021-07-30 | 2021-10-29 | 上海无线电设备研究所 | High-precision roll angle measuring device and method based on laser collimation technology |
| CN113566745B (en) * | 2021-07-30 | 2024-02-20 | 上海无线电设备研究所 | High-precision roll angle measuring device and method based on laser collimation technology |
| CN114413793A (en) * | 2022-01-18 | 2022-04-29 | 广东省科学院智能制造研究所 | Laser collimation device |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN210346614U (en) | Calibration system for laser alignment receiving and transmitting integrated straightness accuracy measurement | |
| US11543234B2 (en) | Measurement method for geometric errors of numerical control turntable based on four-station laser tracer system | |
| CN110455226B (en) | Calibration system and method for laser collimation transceiving integrated straightness measurement | |
| CN204007645U (en) | A kind of caliberating device of star sensor benchmark prism square alignment error | |
| CN108287338A (en) | Laser range finder verification system based on error cancellation principle and its calibration method | |
| CN102879182B (en) | Method for measuring off-axis aspheric surface eccentricity by laser tracker | |
| CN102288132B (en) | Method for measuring vertex curvature radius deviation of aspheric surface by using laser tracking instrument | |
| CN107228638A (en) | The method and apparatus measured simultaneously based on the five degree of freedom error that beam drift is compensated | |
| CN207180619U (en) | Three-dimensional small angle error simultaneous measuring apparatus based on beam drift compensation | |
| CN109470176B (en) | High-precision three-dimensional angle measuring method and device based on double gratings | |
| CN104154881B (en) | Measuring method for parallelism error of shaft hole end face of telescope four-way | |
| CN103134660A (en) | Method acquiring telescope primary and secondary mirror alignment error based on astigmatism decomposition | |
| CN111044077B (en) | Calibration method between star sensor measurement coordinate system and star sensor cube mirror coordinate system | |
| CN102519397A (en) | Method for measuring curvature radius of optical spherical surface | |
| CN1075202A (en) | Optical gauge | |
| CN109631767A (en) | Range unit and distance measuring method | |
| US20230384090A1 (en) | High-precision dual-axis laser inclinometer based on wavefront homodyne interference and measuring method | |
| CN110666592A (en) | Transmit-receive split type five-degree-of-freedom measuring device with optical path drift compensation and method | |
| CN111998775A (en) | Device for high-precision real-time measurement of moving sliding table posture | |
| CN108332686B (en) | A kind of detection device and method of conical mirror cone angle | |
| CN211072866U (en) | Take receiving and dispatching split type five degree of freedom measuring device of light path drift compensation | |
| Liu et al. | New method for large-scale dimensional metrology using laser tracker system | |
| CN106225730A (en) | Portable combined zeroing high-precision laser big working distance autocollimation and method | |
| CN103792648B (en) | Interfere microcobjective optical system | |
| Liu et al. | Robust five-degree-of-freedom measurement system with self-compensation and air turbulence protection |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |