CN107228638A - The method and apparatus measured simultaneously based on the five degree of freedom error that beam drift is compensated - Google Patents
The method and apparatus measured simultaneously based on the five degree of freedom error that beam drift is compensated Download PDFInfo
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- CN107228638A CN107228638A CN201710423368.2A CN201710423368A CN107228638A CN 107228638 A CN107228638 A CN 107228638A CN 201710423368 A CN201710423368 A CN 201710423368A CN 107228638 A CN107228638 A CN 107228638A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
- G01B11/27—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes for testing the alignment of axes
- G01B11/272—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes for testing the alignment of axes using photoelectric detection means
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- Length Measuring Devices By Optical Means (AREA)
Abstract
The present invention proposes a kind of method and apparatus measured simultaneously based on the five degree of freedom error that beam drift is compensated, and the high-precision measuring method measurement accuracy simultaneously to solve existing guide rail five degree of freedom is low, measurement range is small, poor anti jamming capability problem；Collimation lens, prism assemblies, polarization splitting prism, quarter-wave plate are set between laser and the right-angle prism for being coated with beam splitting coating, realize the processing to incident light and reflected light, the information of the reflected light and transmitted light after beam splitting is received and measured by 4 quadrant detector and Position-Sensitive Detector, realizes the measurement of the angle of pitch, deflection angle and rolling angle error, horizontal direction straightness error, vertical direction straightness error and light drift compensation.The present invention utilizes dual-beam variate, realizes error separate, enhances antijamming capability, few using optics, light source power is low, with low cost；Optical texture is simple, and easy to operate, movable part can be easy to in-site measurement without cable；Angle resolution is higher.
Description
Technical field
The present invention relates to the technical field of Photoelectric Detection, and in particular to a kind of to be missed based on the five degree of freedom that beam drift is compensated
The method and apparatus of difference measurement simultaneously, it is possible to achieve be particularly difficult to the measurement of the rolling angle error of measurement.
Background technology
Mechanical guide kinematic pair all includes three linearity errors：Site error vertically and straight perpendicular to two of axial direction
Dimension error, and three pivotings angular error：The angle of pitch, deflection angle and roll angle.If instrument and lathe are at this
There is Abbe arm on a little corresponding directions of geometric moving error, these geometric moving errors will result in Abbe error and influence them
Processing or measurement accuracy.At present, the main diminution Abbe arm from structure of Abbe error is reduced or eliminated, is carried by the suggestion of not Lay grace
High guide rail kinematic accuracy and error correction, and the influence of Abbe error is reduced or eliminated by Ai Pengsitan principles from structure.
Due to the limitation of mechanical structure and physical dimension, almost all of three coordinate measuring machine and lathe have Abbe arm.Therefore, accurately
Measurement these geometric moving errors be very important for the accuracy assessment and error correction of instrument and lathe.Using right angle
The lathe or three coordinate measuring machine of coordinate system have 21 geometric error parameters, wherein 18 errors can use ready-made interference
Instrument is measured, including is most difficult to 3 rolling angle errors of measurement.
There are following several optical means for the high-acruracy survey of guide rail five degree of freedom：
1. the mensuration based on diffractive technology, five degree of freedom simultaneous measurement method based on hololens [JBergin M T,
Bartolotta C S.Multi-axis optical alignment system including A spatial
Filter, U.S. Patent number：3701602.1972], this method is simple, element is few, cost is low, but the measurement pair of its roll angle
The stability requirement of light beam is very high, and its measurement accuracy is not high.Five degree of freedom based on plane diffraction grating is while measuring method
[Miller J M, Barton R O.Multi-axis alignment apparatus, U.S. Patent number：
4804270.1989] measurement accuracy is relatively low, and it moves fixed cell connection cable, limits the convenience of measurement.What Kim was proposed
Six degree of freedom based on diffraction grating is while measuring method [Kim J A, Kim K C, Bae E W, et al.Six-degree-
of-freedom displacement measurement system using a diffraction grating[J]
.Review of Scientific Instruments, 2000] measurement accuracy is relatively low, and the diverging of diffraction light causes system
Measurement range only has several millimeters, is not suitable for in-site measurement.
2. the measuring method based on laser interference with collimation, Bruce L. et al. propose it is a kind of based on 2 directional lights five from
By degree while measuring system [Thomas B L, Bass H M, Loftus L K, et al.Laser aligned five-axis
Position measurement device, U.S. Patent number：US5798828.1998.], this method system architecture is simple, only
Adjust the distance between detector and can reach different Measurement Resolutions.But the collimation of two-beam line and hot spot uniformity are very
Hardly possible adjustment, can cause measurement error, and mobile fixed cell tape cable, it has not been convenient to the dynamic measurement of High Speed NC Machine Tools.Lau is carried
A kind of five degree of freedom or six degree of freedom gone out is while measuring system [Lau K C, Liu Y Q.Five-axis/six-axis
laser measuring system:EP, U.S. Patent number：US6049377 [P] .2000], the measuring precision is high, is mesh
Unique commercial multiple degrees of freedom measuring system simultaneously on former world, but system mobile unit tape cable is connected, and is unsuitable for scene
High speed and long range measurements, while the rolling angle measurement of the system also needs to electrolevel, it is impossible to apply in vertical axes
The measurement of roll angle, and involve great expense.Method [Liu C H, the Jywe W that a kind of six degree of freedom that Liu is proposed is measured simultaneously
Y,Hsu C C,et al.Development of a laser-based high-precision six-degrees-of-
freedom motion errors measuring system for linear stage[J].Review of
Scientific Instruments, 2005] and a kind of five degree of freedom for proposing of Kuang C et al. measuring method [Kuang simultaneously
C,Hong E,Ni J.A high-precision five-degree-of-freedom measurement system
based on laser collimator and interferometry techniques[J].Review of
Scientific Instruments, 2007] and a kind of method that measures simultaneously of five degree of freedom for proposing of Huang P et al.
[Huang P,Li Y,Wei H,et al.Five-degrees-of-freedom measurement system based on
a monolithic prism and phase-sensitive detection technique.[J].Applied
Optics, 2013], these methods be also based on the measuring method that laser interference and laser alignment combines have measurement accuracy compared with
Height, integrated level is higher, and measurement range is big, but measuring system volume is big, the persistent fever of light source can cause laser drift and
The problems such as antijamming capability is poor.
3. based on the measuring method of laser grating interference, Liu C H et al. propose a kind of five degree of freedom while the side of measurement
Method [Liu C H, Huang H L, Lee H W.Five-degrees-of-freedom diffractive laser
Encoder. [J] .Applied Optics, 2009] and a kind of simple six degree of freedoms for proposing of Lee measuring method [Lee simultaneously
C B,Kim G H,Lee S K.Design and construction of a single unit multi-function
optical encoder for a six-degree-of-freedom motion error measurement in an
Ultraprecision linear stage [J] .Measurement Science＆Technology, 2011], the above method
Laser grating interference technique is based on, measuring principle and system architecture are simpler, but the size of accurate diffraction grating is limited, because
This measurement range is smaller.
The content of the invention
For existing guide rail five degree of freedom high-precision measuring method measurement accuracy is low, measurement range is small, antijamming capability
Poor the problems such as, the present invention proposes a kind of method and apparatus measured simultaneously based on the five degree of freedom error that beam drift is compensated, light
Learn simple and compact for structure, be easy to practical operation, precision, stability and economy are preferable.
In order to solve the above-mentioned technical problem, the technical scheme is that：A kind of five based on beam drift compensation is free
The method that error is measured simultaneously is spent, its step is as follows：
Step one：Laser sends laser, the outgoing after collimation lens is collimated；Light beam after collimation lens is collimated
After Amici prism outgoing, light beam is incided positioned at test platform by isolator, polarization splitting prism, quarter-wave plate
On be coated with the inclined edge surfaces of the right-angle prism of beam splitting coating；
Step 2：The reflected beams for being coated with the right-angle prism of beam splitting coating are returned, the light beam polarization after quarter-wave plate
Direction changes, then again after polarization splitting prism beam splitting, by the position sensing detection positioned at condenser lens focal plane
Device is received, when pitching and beat occur for platform to be measured, focus spot position hair of the reflected beams on Position-Sensitive Detector
Changing, the photosignal of Position-Sensitive Detector output is after signal processing circuit, and feeding processing terminal is obtained comprising sharp
The angle of pitch to be measured of light light beam drift error and deflection angle error measure；
Step 3：Transmitted light beam after beam splitting is carried out into the right-angle prism for being coated with beam splitting coating, through the right angle for being coated with beam splitting coating
Projected after the right-angle side refraction of prism, 4 quadrant detector is reached after optical splitter beam splitting, when occurring straightness error to be measured,
Facula position of the transmitted light beam on 4 quadrant detector changes, and the photosignal of 4 quadrant detector output passes through signal
After process circuit, feeding processing terminal obtains the horizontal direction straightness error value to be measured drifted about comprising laser beam；
Step 4：The reflected beams of the right-angle prism of beam splitting coating will be coated with and penetrated into after being coated with the right-angle prism of beam splitting coating
The transmitted light beam gone out is split through different beam splitters respectively, and two different 4 quadrant detectors receive the light after beam splitting
Rolling angle measurement is realized after beam, calculus of differences；
Step 5：The reflected beams of the right-angle prism of beam splitting coating will be coated with and penetrated into after being coated with the right-angle prism of beam splitting coating
The transmitted light beam gone out is split through different beam splitters respectively, and light beam arrives separately at two positioned at two condenser lens focal planes
Individual Position-Sensitive Detector simultaneously carries out obtaining light drift amount after reception processing, calculus of differences, realizes light drift compensation；
Step 6：The right-angle prism for being coated with beam splitting coating is rotated by 90 °, laser sends laser, collimated by collimation lens
Outgoing afterwards, outgoing beam is translated up by Amici prism and right-angle prism, and the light beam after translation passes through isolator, polarization spectro
Prism, quarter-wave plate incide being coated with the inclined edge surfaces of the right-angle prism of beam splitting coating on test platform, through being coated with
After the right-angle prism transmission of beam splitting coating, four-quadrant is reached after quarter-wave plate and polarization splitting prism reflection, beam splitter transmission
Detector and reception processing are limited, the measurement of vertical direction straightness error is realized.
The method of the measurement of the horizontal direction straightness error is：When the right-angle prism for being coated with beam splitting coating is moved along guide rail is surveyed
When dynamic, the straightness error Δ x of tested guide rail will make the right-angle prism for being coated with beam splitting coating occur corresponding displacement x, by right-angled edge
Mirror characteristic understands that spot displacement of the collimated light beam returned through its transmission on 4 quadrant detector is 2 Δ x.
In the step 6 vertical line degree is contained through being coated with the light beam returned after the right-angle prism of beam splitting coating is transmitted
Information, when the right-angle prism for being coated with beam splitting coating is moved along survey guide rail, the straightness error Δ y of tested guide rail will make to be coated with beam splitting
Corresponding displacement y occurs for the right-angle prism of film；From right-angle prism characteristic, the right-angle prism through being coated with beam splitting coating transmits return
Collimated light beam again through quarter-wave plate, polarization splitting prism, beam splitter, received by 4 quadrant detector, four-quadrant visit
The spot displacement for the generation surveyed on device is 2 Δ y, realizes that vertical line degree is measured.
The device that a kind of five degree of freedom error based on beam drift compensation is measured simultaneously, including fixed cell and mobile list
Member, mobile unit is fixed on test platform；The mobile unit includes being coated with the right-angle prism of beam splitting coating, is coated with beam splitting coating
Right-angle prism is fixed on the measuring table moved along guide rail；The fixed cell is included by laser, collimation lens, prism group
Part, polarization splitting prism, quarter-wave plate, isolator, beam splitter, 4 quadrant detector, Position-Sensitive Detector, focusing are saturating
Mirror and signal processing circuit, collimation lens, prism assemblies, isolator, polarization splitting prism and quarter-wave plate are set gradually
On light between laser and the right-angle prism for being coated with beam splitting coating；The beam splitter includes beam splitter I and beam splitter II, four
Quadrant detector includes 4 quadrant detector I and 4 quadrant detector II, and Position-Sensitive Detector includes Position-Sensitive Detector I
With Position-Sensitive Detector II, condenser lens includes condenser lens I and condenser lens II, and beam splitter I and condenser lens I are set successively
Put on the light of the transmitted light beam for the right-angle prism for being coated with beam splitting coating, Position-Sensitive Detector I is arranged on Jiao of condenser lens I
In plane, 4 quadrant detector II is arranged in the light path of beam splitter I；Beam splitter II and 4 quadrant detector I are arranged on polarization
In the light path of Amici prism, condenser lens II and Position-Sensitive Detector II are arranged in the light path of beam splitter II, position sensing
Detector II is arranged on the focal plane of condenser lens II；The Position-Sensitive Detector I, Position-Sensitive Detector II, four-quadrant
Limit detector I and 4 quadrant detector II are connected with signal processing circuit, and signal processing circuit is connected with processing terminal.
The right-angle prism of beam splitting coating that is coated with is fixed on the rotating device that can be rotated by 90 °, and rotating device is fixed on survey
Measure on platform.
The prism assemblies include Amici prism and right-angle prism, and right-angle prism is arranged on the top of Amici prism.
The laser is the laser of He-Ne lasers or semiconductor laser；The collimation lens be simple lens or
Lens group.
The present invention sets collimation lens, prism assemblies, polarization point between laser and the right-angle prism for being coated with beam splitting coating
Light prism, quarter-wave plate, realize the processing to incident light and reflected light, are detected by 4 quadrant detector and position sensing
Device receives and measured the information of the reflected light and transmitted light after beam splitting, realizes the angle of pitch, deflection angle and rolling angle error, level side
The measurement of compensation is floated to straightness error, vertical direction straightness error and light.The present invention is coated with the straight of beam splitting coating using one
Angle prism is Sensitive Apparatus, using dual-beam variate, realizes error separate, enhances antijamming capability；Position is used
Sensing detector is put, light drift compensation is realized；A fixed rotating device of 90 degree of right-angle prism has been used, vertical direction is realized
The measurement of straightness error；Few using optics, light source power is low, with low cost；Optical texture is simply compact, operation side
Just, movable part can be easy to in-site measurement without cable；Angle resolution is up to 0.3 ", even more high.
Brief description of the drawings
In order to illustrate more clearly about the embodiment of the present invention or technical scheme of the prior art, below will be to embodiment or existing
There is the accompanying drawing used required in technology description to be briefly described, it should be apparent that, drawings in the following description are only this
Some embodiments of invention, for those of ordinary skill in the art, on the premise of not paying creative work, can be with
Other accompanying drawings are obtained according to these accompanying drawings.
Fig. 1 is structural representation of the invention.
The positive structure diagram that Fig. 2 is rotated by 90 ° for Fig. 1 of the present invention right-angle prism.
Fig. 3 is Fig. 2 of the present invention partial elevational enlarged diagram.
In figure, 1 is laser, and 2 be collimation lens, and 3 be prism assemblies, 31 Amici prisms, 32 right-angle prisms, and 4 be polarization
Amici prism, 5 be quarter-wave plate, and 6 be the right-angle prism for being coated with beam splitting coating, and 7 be beam splitter I, and 8 be condenser lens I, and 9 are
Position-Sensitive Detector I, 10 be beam splitter II, and 11 be 4 quadrant detector I, and 12 be 4 quadrant detector II, and 13 is saturating to focus on
Mirror II, 14 be Position-Sensitive Detector II, and 15 be isolator, and 16 be signal processing circuit, and 17 be computer, and 101 be fixed single
Member, 102 be mobile unit.
Embodiment
Below in conjunction with the accompanying drawing in the embodiment of the present invention, the technical scheme in the embodiment of the present invention is carried out clear, complete
Site preparation is described, it is clear that described embodiment is only a part of embodiment of the invention, rather than whole embodiments.It is based on
Embodiment in the present invention, it is every other that those of ordinary skill in the art are obtained under the premise of creative work is not paid
Embodiment, belongs to the scope of protection of the invention.
As shown in figure 1, a kind of method measured based on the five degree of freedom error that beam drift is compensated simultaneously, its step is such as
Under：
Step one：Laser sends laser, the outgoing after collimation lens is collimated；Light beam after collimation lens is collimated
After Amici prism outgoing, light beam is incided positioned at test platform by isolator, polarization splitting prism, quarter-wave plate
On be coated with the inclined edge surfaces of the right-angle prism of beam splitting coating.
As depicted in figs. 1 and 2, the right-angle prism 6 for being coated with beam splitting coating is integrally fixed on test platform, can be straight along being tested
The movement of line guide rail, beam splitting coating is positioned only at the side being coated with the hypotenuse of the right-angle prism 6 of beam splitting coating, provided with the straight of beam splitting coating
Incident beam can be divided into two beams by the sidepiece of angle prism 6：A branch of reflected light and through Beam.The laser that laser 1 is sent,
By collimation lens 2 collimation outgoing after, respectively through the beam splitting of Amici prism 31, isolator 15 select now required transmission light beam, partially
The shake outgoing of Amici prism 4, quarter-wave plate 5 is impinged perpendicularly on and is coated with the right-angle prism 6 of beam splitting coating.Into being coated with beam splitting coating
Right-angle prism 6 on incident beam can be by beam splitting, a branch of inclined edge surfaces through being coated with the right-angle prism 6 of beam splitting coating, which reflect, directly to be returned
Return, contain the angle of pitch and beat angle information；Another beam, which enters to be coated with after the inclined edge surfaces of the right-angle prism 6 of beam splitting coating, to be transmitted, warp
Cross and transmitted after being coated with the refraction of the right-angle side of the right-angle prism 6 of beam splitting coating from its inclined edge surfaces, the light beam is parallel with incident ray,
It comprises light drift information caused by roll angle, the angle of pitch, horizontal linear degree and environment.
If the direction vector for impinging perpendicularly on the incident light being coated with the right-angle prism 6 of beam splitting coating is I0=[0 0-1]T,
From Nen Method of Using Vector-matrix, when measuring table rest, light after the reflection and transmission of the right-angle prism 6 through being coated with beam splitting coating
The direction vector of beam is respectively：
I1=[0 0 1]T, (1),
I2=[0 0 1]T, (2)；
When measuring table is moved, the right-angle prism 6 for being coated with beam splitting coating is moved, if it distinguishes around x, y, z axle
There are α, β, γ an anglec of rotation, α is that the angle of pitch, β are that deflection angle, γ are roll angle, and the positive and negative of corner around reference axis defers to the right side
Hand rule.Being coated with spin matrix of the right-angle prism 6 of beam splitting coating on x, y, z axle is respectively：
In the case of the equal very little of α, β, γ, the influence of rotational order can be neglected, omit high-order it is a small amount of after, be coated with beam splitting coating
The spin matrix of right-angle prism 6 be：
If the normal direction vector for being coated with each reflecting surface of the right-angle prism 6 of beam splitting coating is N=[Nx, Ny, Nz], it reflects
Matrix is：
After measuring table movement, there is NR=RN, the then the reflected beams after reflectingDirection vector be：
Wherein,For the vector of the first row composition in reflection matrix M.Incident light I0Into refractive index being coated with point for n
After the right-angle prism 6 of beam film, its direction vector is：
It is being coated with the direction vector in the right-angle prism 6 of beam splitting coating after primary event：
Direction vector in the right-angle prism 6 for be coated with beam splitting coating after two secondary reflections is：
Through being coated with the transmitted light beam that the right-angle prism 6 of beam splitting coating is returnedDirection vector be：
Step 2：The reflected beams for being coated with the right-angle prism 6 of beam splitting coating return through quarter-wave plate 5 and polarization spectro
After prism 4, by the reception of Position-Sensitive Detector II 14 positioned at the focal plane of condenser lens 13, the angle of pitch can be achieved and deflection angle is missed
Difference measurements.
After the reflected beams are returned through quarter-wave plate 5 and polarization splitting prism 4, reflected, enter by polarization splitting prism 4
Beam splitter II 10, the directional light of the beam splitting of beam splitter II 10 is by condenser lens II 8, and in-position sensing detector II 14 is received.
The reflected beams for being coated with the right-angle prism of beam splitting coating contain the angle of pitch, beat angle information, are moved when along tested guide rail
Pitching or beat, contrast equation (1) and (6) formula occur for the dynamic right-angle prism for being coated with beam splitting coating, then the light beam through its reflection
To occur its 2 times angle deflection, in the picture point on Position-Sensitive Detector corresponding displacement occurs for line focus lens focus,
Have：
dy≈2fα,dx≈2fβ, (11)
In formula, f is the focal length of lens, dxAnd dyThe respectively displacement in picture point x-axis and y-axis direction on Position-Sensitive Detector.
The photosignal of Position-Sensitive Detector output is after signal processing circuit, and feeding processing terminal is obtained comprising laser beam drift
The angle of pitch to be measured of shift error and deflection angle error measure.Then：
α≈dy/ (2f), β ≈ dx/ (2f), (12)
It is that the angle of pitch and beat angular measurement can be achieved by (12) formula.
Step 3：Transmitted light beam after beam splitting is carried out into the right-angle prism for being coated with beam splitting coating, through the right angle for being coated with beam splitting coating
Projected after the right-angle side refraction of prism, 4 quadrant detector is reached after optical splitter beam splitting and reception processing is carried out, level is realized
The measurement of direction straightness error.
The transmitted light of the return of right-angle prism 6 of beam splitting coating is coated with through the beam splitting of beam splitter I 7, the vertical light after beam splitting reaches four
Quadrant detector II 12.When occurring straightness error to be measured, facula position of the transmitted light beam on 4 quadrant detector occurs
Change, the photosignal of 4 quadrant detector output is after signal processing circuit, and feeding processing terminal, which is obtained, includes laser light
The horizontal direction straightness error value to be measured of line drift.
When the right-angle prism for being coated with beam splitting coating is moved along tested guide rail, the straightness error Δ x of tested guide rail will make plating
Corresponding displacement x occurs for the right-angle prism for having beam splitting coating, and from right-angle prism characteristic, the collimated light beam returned through its transmission exists
Spot displacement on 4 quadrant detector is 2 Δ x, and horizontal linear degree is that measurement can be achieved.
Step 4：The reflected beams of the right-angle prism of beam splitting coating will be coated with and penetrated into after being coated with the right-angle prism of beam splitting coating
The transmitted light beam gone out is split through different beam splitters respectively, and two different 4 quadrant detectors receive the light after beam splitting
Rolling angle measurement is realized after beam, calculus of differences.
The light beam that return is projected after the transmission of the right-angle prism 6 of beam splitting coating is coated with, roll angle, the angle of pitch, level is contained straight
Light drift information caused by dimension and environment.If being coated with the hypotenuse a length of L, incident light I of the right-angle prism 6 of beam splitting coating0With going out
Penetrate light I2Between distance be d, from formula (2), (7)~(9) formula, transmitted light beam after measuring table is movedInjection is coated with point
During the right-angle prism 6 of beam film, in y directions, displacement is：
Δ y=d γ-L α/n； (13).
If the initial distance for the 4 quadrant detector II 12 being coated with the right-angle prism 6 to transmitted light beam of beam splitting coating is z0,
It is Δ z that measuring table, which is moved along the z-axis distance, and contrast equation (2) and (9) formula are understood, are coated with the right-angle prism 6 of beam splitting coating with measurement
After platform movement, transmitted light beamSame the reflected beamsThe change of -2 α luffing angles is equally there occurs, it reaches Quadrant detector
Displacement during device II 12 in y directions is：
Δy1=Δ y+ (z0+ Δ z) (- 2 α)=d γ+Δ y2(14),
In formula, Δ y2=(- 2 α) (z0+Δz+L/2n) (15)。
From formula (1) and (6) formula, Δ y2Can be by the right-angled edge with being coated with beam splitting coating, 6 at a distance of z0+ Δ z+L/2n's is anti-
4 quadrant detector I 11 on irradiating light beam receives the reflected beamsTo obtain, then：Realize rolling angle measurement.
Step 5：The reflected beams of the right-angle prism of beam splitting coating will be coated with and penetrated into after being coated with the right-angle prism of beam splitting coating
The transmitted light beam gone out is split through different beam splitters respectively, and two light beams are arrived separately at positioned at two condenser lens focal planes
Two Position-Sensitive Detectors and carry out obtaining angular light drift amount after reception processing, calculus of differences, then surveyed in former each error
Measurement error on the basis of value caused by angular light drift amount, obtains high-precision error measuring value, and then realize light drift compensation.
Step 6：The right-angle prism for being coated with beam splitting coating is rotated by 90 °, laser sends laser, collimated by collimation lens
Outgoing afterwards, outgoing beam is translated up by Amici prism and right-angle prism, and the light beam after translation passes through isolator, polarization spectro
Prism, quarter-wave plate incide being coated with the inclined edge surfaces of the right-angle prism of beam splitting coating on test platform, through being coated with
After the right-angle prism transmission of beam splitting coating, four-quadrant is reached after quarter-wave plate and polarization splitting prism reflection, beam splitter transmission
Detector and reception processing are limited, the measurement of vertical direction straightness error is realized.
As shown in figure 3, isolator 15 is moved up, the rear side of the horizontal direction of right-angle prism 32 is arranged on.Laser 1 is sent out
After the collimated collimation of lens 2 outgoing of laser gone out, the light beam impinges perpendicularly on rotation 90 through prism assemblies 3, quarter-wave plate 5
That spends is coated with the right-angle prism 6 of beam splitting coating.Contained in light beam through being returned after the transmission of right-angle prism 6 for being coated with beam splitting coating vertical
Straight linearity information, when the right-angle prism 6 for being coated with beam splitting coating is moved along survey guide rail, the straightness error Δ y of tested guide rail will
The right-angle prism 6 for being coated with beam splitting coating is set to occur corresponding displacement y.From right-angle prism characteristic, through the right angle for being coated with beam splitting coating
The collimated light beam that the transmission of prism 6 is returned is visited again through quarter-wave plate 5, polarization splitting prism 4, beam splitter II 10 by four-quadrant
Survey device and receive I 11, the spot displacement of the generation on 4 quadrant detector I 11 is 2 Δ y, realizes that vertical line degree is measured.
A kind of device measured simultaneously based on the five degree of freedom error that beam drift is compensated, including fixed cell 101 and shifting
Moving cell 102, mobile unit 102 is fixed on test platform；The mobile unit 102 includes being coated with the right-angle prism of beam splitting coating
6, the right-angle prism 6 for being coated with beam splitting coating is fixed on the measuring table moved along guide rail；The fixed cell 101 is included by laser
Device 1, collimation lens 2, prism assemblies 3, polarization splitting prism 4, quarter-wave plate 5, isolator 15, beam splitter, four-quadrant are visited
Survey device, Position-Sensitive Detector, condenser lens and signal processing circuit 16, collimation lens 2, prism assemblies 3, isolator 15, partially
Shake Amici prism 4 and quarter-wave plate 5 is successively set on light between laser 1 and the right-angle prism 6 for being coated with beam splitting coating
On；The beam splitter includes beam splitter I 7 and beam splitter II 10, and 4 quadrant detector includes 4 quadrant detector I 11 and four-quadrant
Detector II 12, Position-Sensitive Detector includes Position-Sensitive Detector I 9 and Position-Sensitive Detector II 14, condenser lens bag
Condenser lens I 8 and condenser lens II 13 are included, beam splitter I 7 and condenser lens I 8 are successively set on the right-angle prism for being coated with beam splitting coating
On the light of 6 transmitted light beam, Position-Sensitive Detector I 9 is arranged on the focal plane of condenser lens I 8,4 quadrant detector II
12 are arranged in the light path of beam splitter I 7；Beam splitter II 10 and 4 quadrant detector I 11 are arranged on the light path of polarization splitting prism 4
On, condenser lens II 13 and Position-Sensitive Detector II 14 are arranged in the light path of beam splitter II 10, Position-Sensitive Detector II
14 are arranged on the focal plane of condenser lens II 13；The Position-Sensitive Detector I 9, Position-Sensitive Detector II 14, four-quadrant
Detector I 11 and 4 quadrant detector II 12 are connected with signal processing circuit 16, signal processing circuit 16 and computer 17
It is connected.
Preferably, the right-angle prism 6 for being coated with beam splitting coating is fixed on the rotating device that can be rotated by 90 °, and rotating device is fixed
On measuring table, the right-angle prism 6 for being coated with beam splitting coating can be rotated by 90 ° by rotating device.The prism assemblies 3 include dividing
Light prism 31 and right-angle prism 32, right-angle prism 32 are arranged on the top of Amici prism 31.Institute's laser 1 is He-Ne lasers
Or the laser of semiconductor laser；The collimation lens 2 is simple lens or lens group.
The foregoing is merely illustrative of the preferred embodiments of the present invention, is not intended to limit the invention, all essences in the present invention
God is with principle, and any modification, equivalent substitution and improvements made etc. should be included in the scope of the protection.
Claims (7)
1. a kind of method measured simultaneously based on the five degree of freedom error that beam drift is compensated, it is characterised in that its step is as follows：
Step one：Laser sends laser, the outgoing after collimation lens is collimated；Light beam after collimation lens is collimated passes through
After Amici prism outgoing, light beam is incided on platform to be tested by isolator, polarization splitting prism, quarter-wave plate
Be coated with the inclined edge surfaces of the right-angle prism of beam splitting coating；
Step 2：The reflected beams for being coated with the right-angle prism of beam splitting coating are returned, the light beam polarization direction after quarter-wave plate
Change, then connect again after polarization splitting prism beam splitting by the Position-Sensitive Detector positioned at condenser lens focal plane
Receive, when pitching and beat occur for platform to be measured, focus spot position of the reflected beams on Position-Sensitive Detector becomes
Change, the photosignal of Position-Sensitive Detector output is after signal processing circuit, and feeding processing terminal, which is obtained, includes laser light
The angle of pitch to be measured of line drift error and the error measure of deflection angle；
Step 3：Transmitted light beam after beam splitting is carried out into the right-angle prism for being coated with beam splitting coating, through the right-angle prism for being coated with beam splitting coating
Right-angle side refraction after project, reach 4 quadrant detector after optical splitter beam splitting, when occur straightness error to be measured when, transmission
Facula position of the light beam on 4 quadrant detector changes, and the photosignal of 4 quadrant detector output passes through signal transacting
After circuit, feeding processing terminal obtains the horizontal direction straightness error value to be measured drifted about comprising laser beam；
Step 4：The reflected beams of the right-angle prism of beam splitting coating will be coated with and entered and be coated with what is projected after the right-angle prism of beam splitting coating
Transmitted light beam is split through different beam splitters respectively, and two different 4 quadrant detectors receive the light beam after beam splitting, poor
Partite transport realizes rolling angle measurement after calculating；
Step 5：The reflected beams of the right-angle prism of beam splitting coating will be coated with and entered and be coated with what is projected after the right-angle prism of beam splitting coating
Transmitted light beam is split through different beam splitters respectively, and light beam is arrived separately at positioned at two positions of two condenser lens focal planes
Put sensing detector and carry out obtaining light drift amount after reception processing, calculus of differences, realize light drift compensation；
Step 6：The right-angle prism for being coated with beam splitting coating is rotated by 90 °, laser sends laser, gone out after collimation lens is collimated
Penetrate, outgoing beam is translated up by Amici prism and right-angle prism, and the light beam after translation passes through isolator, polarization spectro rib
Mirror, quarter-wave plate incide being coated with the inclined edge surfaces of the right-angle prism of beam splitting coating on test platform, through being coated with point
After the right-angle prism transmission of beam film, four-quadrant is reached after quarter-wave plate and polarization splitting prism reflection, beam splitter transmission
Detector and reception processing, realize the measurement of vertical direction straightness error.
2. the method according to claim 1 measured simultaneously based on the five degree of freedom error that beam drift is compensated, its feature
It is, the method for the measurement of the horizontal direction straightness error is：When the right-angle prism for being coated with beam splitting coating is moved along guide rail is surveyed
When, the straightness error of tested guide railThe right-angle prism for being coated with beam splitting coating will be made to occur corresponding displacement, by right-angle prism
Characteristic understands that spot displacement of the collimated light beam returned through its transmission on 4 quadrant detector is。
3. the method according to claim 1 measured simultaneously based on the five degree of freedom error that beam drift is compensated, its feature
It is, vertical line degree letter is contained through being coated with the light beam returned after the right-angle prism of beam splitting coating is transmitted in the step 6
Breath, when the right-angle prism for being coated with beam splitting coating is moved along survey guide rail, the straightness error of tested guide railIt will make to be coated with beam splitting coating
Right-angle prism occur corresponding displacement；From right-angle prism characteristic, the right-angle prism through being coated with beam splitting coating transmits what is returned
Collimated light beam through quarter-wave plate, polarization splitting prism, beam splitter, is received by 4 quadrant detector again, in Quadrant detector
The spot displacement of generation on device is, realize that vertical line degree is measured.
4. a kind of device measured simultaneously based on the five degree of freedom error that beam drift is compensated, it is characterised in that including fixed single
Member（101）And mobile unit（102）, mobile unit（102）It is fixed on test platform；The mobile unit（102）Including plating
There is the right-angle prism of beam splitting coating（6）, it is coated with the right-angle prism of beam splitting coating（6）It is fixed on the measuring table moved along guide rail；Institute
State fixed cell（101）Including by laser（1）, collimation lens（2）, prism assemblies（3）, polarization splitting prism（4）, four/
One wave plate（5）, isolator（15）, beam splitter, 4 quadrant detector, Position-Sensitive Detector, condenser lens and signal transacting electricity
Road（16）, collimation lens（2）, prism assemblies（3）, isolator（15）, polarization splitting prism（4）And quarter-wave plate（5）According to
It is secondary to be arranged on laser（1）With the right-angle prism for being coated with beam splitting coating（6）Between light on；The beam splitter includes beam splitter I
（7）With beam splitter II（10）, 4 quadrant detector include 4 quadrant detector I（11）With 4 quadrant detector II（12）, position
Sensing detector includes Position-Sensitive Detector I（9）With Position-Sensitive Detector II（14）, condenser lens include condenser lens I
（8）With condenser lens II（13）, beam splitter I（7）With condenser lens I（8）It is successively set on the right-angle prism for being coated with beam splitting coating（6）
Transmitted light beam light on, Position-Sensitive Detector I（9）It is arranged on condenser lens I（8）Focal plane on, Quadrant detector
Device II（12）It is arranged on beam splitter I（7）Light path on；Beam splitter II（10）With 4 quadrant detector I（11）It is arranged on polarization point
Light prism（4）Light path on, condenser lens II（13）With Position-Sensitive Detector II（14）It is arranged on beam splitter II（10）Light
Lu Shang, Position-Sensitive Detector II（14）It is arranged on condenser lens II（13）Focal plane on；The Position-Sensitive Detector I
（9）, Position-Sensitive Detector II（14）, 4 quadrant detector I（11）With 4 quadrant detector II（12）With signal transacting electricity
Road（16）It is connected, signal processing circuit（16）With processing terminal（17）It is connected.
5. the device according to claim 4 measured simultaneously based on the five degree of freedom error that beam drift is compensated, its feature
It is, the right-angle prism for being coated with beam splitting coating（6）It is fixed on the rotating device that can be rotated by 90 °, rotating device is fixed on survey
Measure on platform.
6. the device according to claim 4 measured simultaneously based on the five degree of freedom error that beam drift is compensated, its feature
It is, the prism assemblies（3）Including Amici prism（31）And right-angle prism（32）, right-angle prism（32）It is arranged on Amici prism
（31）Top.
7. the device according to claim 4 measured simultaneously based on the five degree of freedom error that beam drift is compensated, its feature
It is, the laser（1）For He-Ne lasers or the laser of semiconductor laser；The collimation lens（2）It is simple lens
Or lens group.
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