ZA8792B - Process and apparatus for analyzing a gaseous mixture and a visible emission spectra generator therefor - Google Patents

Process and apparatus for analyzing a gaseous mixture and a visible emission spectra generator therefor

Info

Publication number
ZA8792B
ZA8792B ZA8792A ZA8792A ZA8792B ZA 8792 B ZA8792 B ZA 8792B ZA 8792 A ZA8792 A ZA 8792A ZA 8792 A ZA8792 A ZA 8792A ZA 8792 B ZA8792 B ZA 8792B
Authority
ZA
South Africa
Prior art keywords
analyzing
gaseous mixture
emission spectra
visible emission
generator therefor
Prior art date
Application number
ZA8792A
Other languages
English (en)
Inventor
David Wadlow
Original Assignee
Boc Group Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Boc Group Inc filed Critical Boc Group Inc
Publication of ZA8792B publication Critical patent/ZA8792B/xx

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/66—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light electrically excited, e.g. electroluminescence
    • G01N21/68—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light electrically excited, e.g. electroluminescence using high frequency electric fields
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/66—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light electrically excited, e.g. electroluminescence
    • G01N21/69—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light electrically excited, e.g. electroluminescence specially adapted for fluids, e.g. molten metal

Landscapes

  • Health & Medical Sciences (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
  • Investigating Or Analysing Materials By The Use Of Chemical Reactions (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
ZA8792A 1986-01-17 1987-01-07 Process and apparatus for analyzing a gaseous mixture and a visible emission spectra generator therefor ZA8792B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US82245786A 1986-01-17 1986-01-17

Publications (1)

Publication Number Publication Date
ZA8792B true ZA8792B (en) 1987-10-28

Family

ID=25236090

Family Applications (1)

Application Number Title Priority Date Filing Date
ZA8792A ZA8792B (en) 1986-01-17 1987-01-07 Process and apparatus for analyzing a gaseous mixture and a visible emission spectra generator therefor

Country Status (6)

Country Link
EP (1) EP0233694A3 (xx)
JP (1) JPS62217145A (xx)
AU (1) AU588959B2 (xx)
CA (1) CA1264382A (xx)
GB (1) GB2185573A (xx)
ZA (1) ZA8792B (xx)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4801209A (en) * 1986-01-17 1989-01-31 The Boc Group, Inc. Process and apparatus for analyzing a gaseous mixture and a visible emission spectrum generator therefor
FI98410C (fi) * 1993-12-16 1997-06-10 Instrumentarium Oy Kaasuseosten analysointiin käytettävä mittausanturi ja mittausjärjestely
DE19505104A1 (de) * 1995-02-15 1996-08-22 Patent Treuhand Ges Fuer Elektrische Gluehlampen Mbh Verfahren und Anordnung zur Bestimmung der Reinheit und/oder des Drucks von Gasen für elektrische Lampen
DE19651208C2 (de) * 1996-12-10 1999-05-27 Boehringer Ingelheim Kg Verfahren und Vorrichtung zur zerstörungsfreien Dichtigkeitsprüfung von mit Flüssigkeit gefüllten Behältnissen
JP4580119B2 (ja) * 2001-03-30 2010-11-10 大陽日酸株式会社 ガス中の不純物分析方法及び装置
DE102004061269A1 (de) * 2004-12-10 2006-06-14 Siemens Ag Verfahren zum Reinigen eines Werkstückes mit Halogenionen
WO2008107166A1 (de) 2007-03-07 2008-09-12 Carl Zeiss Smt Ag Verfahren zum reinigen einer euv-lithographievorrichtung, verfahren zur messung der restgasatmosphäre bzw. der kontamination sowie euv-lithographievorrichtung

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2670649A (en) * 1949-06-04 1954-03-02 Cons Eng Corp Spectroscopic analysis of a gas mixture excited by a high-frequency electric field
FR1062975A (fr) * 1952-09-15 1954-04-28 Air Liquide Procédé et dispositif pour l'analyse des gaz
US3025745A (en) * 1953-06-30 1962-03-20 Beckman Instruments Inc Method and apparatus for analyzing gases
US2967451A (en) * 1957-04-04 1961-01-10 Waters Corp Method and apparatus for gas analysis
DE1149923B (de) * 1957-09-14 1963-06-06 Siemens Ag Verfahren zur Bestimmung des Anteils einer Komponente eines Gas- oder Dampfgemisches
US3610759A (en) * 1967-06-14 1971-10-05 Mercantile Safe Deposit And Tr Method and apparatus for analyzing atomic spectra of gas samples
US3951607A (en) * 1974-11-29 1976-04-20 Searle Cardio-Pulmonary Systems Inc. Gas analyzer
US4083367A (en) * 1976-07-28 1978-04-11 Andros Incorporated Method and apparatus for pulmonary function analysis
US4309187A (en) * 1979-10-25 1982-01-05 University Of Virginia Alumni Patents Foundation Metastable energy transfer for analytical luminescence

Also Published As

Publication number Publication date
EP0233694A2 (en) 1987-08-26
JPS62217145A (ja) 1987-09-24
GB2185573A (en) 1987-07-22
AU6756687A (en) 1987-07-23
CA1264382A (en) 1990-01-09
EP0233694A3 (en) 1989-07-26
GB8701093D0 (en) 1987-02-18
AU588959B2 (en) 1989-09-28

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