ZA746246B - Improvements relating to high-voltage liquid-cooled apparatus and supply leads therefor - Google Patents
Improvements relating to high-voltage liquid-cooled apparatus and supply leads thereforInfo
- Publication number
- ZA746246B ZA746246B ZA00746246A ZA746246A ZA746246B ZA 746246 B ZA746246 B ZA 746246B ZA 00746246 A ZA00746246 A ZA 00746246A ZA 746246 A ZA746246 A ZA 746246A ZA 746246 B ZA746246 B ZA 746246B
- Authority
- ZA
- South Africa
- Prior art keywords
- improvements relating
- supply leads
- voltage liquid
- cooled apparatus
- leads therefor
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Analytical Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
- Plasma Technology (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB4758273A GB1478464A (en) | 1973-10-11 | 1973-10-11 | Reactive sputtering apparatus and supply leads therefor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| ZA746246B true ZA746246B (en) | 1976-05-26 |
Family
ID=10445503
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| ZA00746246A ZA746246B (en) | 1973-10-11 | 1974-10-01 | Improvements relating to high-voltage liquid-cooled apparatus and supply leads therefor |
Country Status (9)
| Country | Link |
|---|---|
| US (1) | US3962530A (xx) |
| JP (1) | JPS5078577A (xx) |
| CA (1) | CA1030487A (xx) |
| DE (1) | DE2447280A1 (xx) |
| FR (1) | FR2247814B1 (xx) |
| GB (1) | GB1478464A (xx) |
| NL (1) | NL7413324A (xx) |
| SE (1) | SE7412362L (xx) |
| ZA (1) | ZA746246B (xx) |
Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS51157267U (xx) * | 1975-06-10 | 1976-12-15 | ||
| JPS53135102U (xx) * | 1977-03-22 | 1978-10-26 | ||
| DE3306870A1 (de) * | 1983-02-26 | 1984-08-30 | Leybold-Heraeus GmbH, 5000 Köln | Vorrichtung zum herstellen von schichten mit rotationssymmetrischem dickenprofil durch katodenzerstaeubung |
| DE3725571A1 (de) * | 1987-08-01 | 1989-02-09 | Leybold Ag | Vorrichtung zum herstellen von schichten mit gleichmaessigem dickenprofil auf substraten durch kathodenzerstaeubung |
| DE3810175A1 (de) * | 1988-03-25 | 1989-10-05 | Elektronische Anlagen Gmbh | Kathodenzerstaeubungsvorrichtung |
| DE4241927C2 (de) * | 1992-12-11 | 1994-09-22 | Max Planck Gesellschaft | Zur Anordnung in einem Vakuumgefäß geeignete selbsttragende isolierte Elektrodenanordnung, insbesondere Antennenspule für einen Hochfrequenz-Plasmagenerator |
| US5736670A (en) * | 1994-09-28 | 1998-04-07 | Westinghouse Electric Corporation | Flexible gas tight electrical connection for generators |
| US6087591A (en) * | 1995-04-26 | 2000-07-11 | Nguyen; Phu D. | Insulated electrical conductors |
| US6134778A (en) * | 1998-07-15 | 2000-10-24 | Tyco Submarine Systems Ltd. | Method of connecting a wire to an electrical device |
| CN106935460B (zh) * | 2015-12-30 | 2018-09-28 | 核工业西南物理研究院 | 一种离子源放电室阴极灯丝杆的连接和冷却结构 |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE596392C (de) * | 1931-06-21 | 1934-05-05 | Max Weiset Dr Ing | Endverschluss fuer Einleiterbleikabel |
| US2483301A (en) * | 1944-10-31 | 1949-09-27 | Rca Corp | Cooled, high-frequency electric cable |
| GB648558A (en) * | 1948-09-10 | 1951-01-10 | Gen Electric Co Ltd | Improvements in or relating to electric plugs and sockets |
| GB1025628A (en) * | 1963-11-07 | 1966-04-14 | Steelweld Ltd | Improvements in and relating to stranded wire electrical conductor cables with terminal lugs |
| JPS4413338Y1 (xx) * | 1965-05-18 | 1969-06-03 |
-
1973
- 1973-10-11 GB GB4758273A patent/GB1478464A/en not_active Expired
-
1974
- 1974-10-01 US US05/510,965 patent/US3962530A/en not_active Expired - Lifetime
- 1974-10-01 SE SE7412362A patent/SE7412362L/xx unknown
- 1974-10-01 ZA ZA00746246A patent/ZA746246B/xx unknown
- 1974-10-01 DE DE19742447280 patent/DE2447280A1/de not_active Withdrawn
- 1974-10-02 CA CA210,590A patent/CA1030487A/en not_active Expired
- 1974-10-10 NL NL7413324A patent/NL7413324A/xx not_active Application Discontinuation
- 1974-10-10 FR FR747434059A patent/FR2247814B1/fr not_active Expired
- 1974-10-11 JP JP49116231A patent/JPS5078577A/ja active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| DE2447280A1 (de) | 1975-04-17 |
| FR2247814B1 (xx) | 1979-02-09 |
| US3962530A (en) | 1976-06-08 |
| NL7413324A (nl) | 1975-04-15 |
| SE7412362L (xx) | 1975-04-14 |
| CA1030487A (en) | 1978-05-02 |
| JPS5078577A (xx) | 1975-06-26 |
| GB1478464A (en) | 1977-06-29 |
| FR2247814A1 (xx) | 1975-05-09 |
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