ZA200209795B - Method of manufacture of an ink jet printhead having a moving nozzle with an externally arranged actuator. - Google Patents

Method of manufacture of an ink jet printhead having a moving nozzle with an externally arranged actuator. Download PDF

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Publication number
ZA200209795B
ZA200209795B ZA200209795A ZA200209795A ZA200209795B ZA 200209795 B ZA200209795 B ZA 200209795B ZA 200209795 A ZA200209795 A ZA 200209795A ZA 200209795 A ZA200209795 A ZA 200209795A ZA 200209795 B ZA200209795 B ZA 200209795B
Authority
ZA
South Africa
Prior art keywords
nozzle
pct
layer
substrate
ink
Prior art date
Application number
ZA200209795A
Other languages
English (en)
Inventor
Kia Silverbrook
Original Assignee
Silverbrook Res Pty Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Silverbrook Res Pty Ltd filed Critical Silverbrook Res Pty Ltd
Publication of ZA200209795B publication Critical patent/ZA200209795B/en

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/14Structure thereof only for on-demand ink jet heads
    • B41J2/14427Structure of ink jet print heads with thermal bend detached actuators
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/1626Manufacturing processes etching
    • B41J2/1628Manufacturing processes etching dry etching
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/1631Manufacturing processes photolithography
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/1637Manufacturing processes molding
    • B41J2/1639Manufacturing processes molding sacrificial molding
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/164Manufacturing processes thin film formation
    • B41J2/1642Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/164Manufacturing processes thin film formation
    • B41J2/1645Manufacturing processes thin film formation thin film formation by spincoating
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/164Manufacturing processes thin film formation
    • B41J2/1646Manufacturing processes thin film formation thin film formation by sputtering
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1648Production of print heads with thermal bend detached actuators
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/14Structure thereof only for on-demand ink jet heads
    • B41J2/14427Structure of ink jet print heads with thermal bend detached actuators
    • B41J2002/14435Moving nozzle made of thermal bend detached actuator
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/14Structure thereof only for on-demand ink jet heads
    • B41J2/14427Structure of ink jet print heads with thermal bend detached actuators
    • B41J2002/14443Nozzle guard
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00Metal working
    • Y10T29/49Method of mechanical manufacture
    • Y10T29/49401Fluid pattern dispersing device making, e.g., ink jet
ZA200209795A 2000-05-24 2002-12-03 Method of manufacture of an ink jet printhead having a moving nozzle with an externally arranged actuator. ZA200209795B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/AU2000/000579 WO2001089840A1 (en) 2000-05-24 2000-05-24 Method of manufacture of an ink jet printhead having a moving nozzle with an externally arranged actuator

Publications (1)

Publication Number Publication Date
ZA200209795B true ZA200209795B (en) 2003-07-30

Family

ID=3700807

Family Applications (1)

Application Number Title Priority Date Filing Date
ZA200209795A ZA200209795B (en) 2000-05-24 2002-12-03 Method of manufacture of an ink jet printhead having a moving nozzle with an externally arranged actuator.

Country Status (10)

Country Link
US (5) US7169316B1 (de)
EP (1) EP1301345B1 (de)
JP (1) JP4380962B2 (de)
CN (2) CN100398321C (de)
AT (1) ATE367266T1 (de)
AU (2) AU4731400A (de)
DE (1) DE60035618T2 (de)
IL (1) IL166921A (de)
WO (1) WO2001089840A1 (de)
ZA (1) ZA200209795B (de)

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US6513908B2 (en) 1997-07-15 2003-02-04 Silverbrook Research Pty Ltd Pusher actuation in a printhead chip for an inkjet printhead
AUPP398798A0 (en) 1998-06-09 1998-07-02 Silverbrook Research Pty Ltd Image creation method and apparatus (ij43)
US6792754B2 (en) 1999-02-15 2004-09-21 Silverbrook Research Pty Ltd Integrated circuit device for fluid ejection
US6526658B1 (en) 2000-05-23 2003-03-04 Silverbrook Research Pty Ltd Method of manufacture of an ink jet printhead having a moving nozzle with an externally arranged actuator
DE60035618T2 (de) * 2000-05-24 2008-07-03 Silverbrook Research Pty. Ltd., Balmain Herstellungsverfahren für einen tintenstrahldruckkopf mit bewegender düse und externem betätiger
US7938341B2 (en) 2004-12-13 2011-05-10 Optomec Design Company Miniature aerosol jet and aerosol jet array
US7674671B2 (en) 2004-12-13 2010-03-09 Optomec Design Company Aerodynamic jetting of aerosolized fluids for fabrication of passive structures
US7605009B2 (en) * 2007-03-12 2009-10-20 Silverbrook Research Pty Ltd Method of fabrication MEMS integrated circuits
TWI482662B (zh) 2007-08-30 2015-05-01 Optomec Inc 機械上一體式及緊密式耦合之列印頭以及噴霧源
EP2738531B1 (de) * 2012-12-03 2015-09-16 AViTA Corporation Multimodale Temperaturmessvorrichtung
US20170348903A1 (en) * 2015-02-10 2017-12-07 Optomec, Inc. Fabrication of Three-Dimensional Materials Gradient Structures by In-Flight Curing of Aerosols
WO2016130709A1 (en) 2015-02-10 2016-08-18 Optomec, Inc. Fabrication of three-dimensional structures by in-flight curing of aerosols
CN106903996B (zh) 2017-03-09 2020-05-29 京东方科技集团股份有限公司 打印设备
US10632746B2 (en) 2017-11-13 2020-04-28 Optomec, Inc. Shuttering of aerosol streams

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DE3445720A1 (de) 1984-12-14 1986-06-19 Siemens AG, 1000 Berlin und 8000 München Anordnung zum ausstoss von einzeltroepfchen aus austrittsoeffnungen eines tintenschreibkopfes
JPS61215059A (ja) 1985-03-22 1986-09-24 Toshiba Corp インクジエツト記録装置
DE3688797T2 (de) 1985-08-13 1993-11-04 Matsushita Electric Ind Co Ltd Tintenstrahldrucker.
US4975718A (en) 1987-09-03 1990-12-04 Matsushita Electric Industrial Co., Ltd. Ink jet recording apparatus
EP0398031A1 (de) * 1989-04-19 1990-11-22 Seiko Epson Corporation Tintenstrahlkopf
US5255016A (en) 1989-09-05 1993-10-19 Seiko Epson Corporation Ink jet printer recording head
US5051761A (en) 1990-05-09 1991-09-24 Xerox Corporation Ink jet printer having a paper handling and maintenance station assembly
US5136310A (en) 1990-09-28 1992-08-04 Xerox Corporation Thermal ink jet nozzle treatment
US5278585A (en) * 1992-05-28 1994-01-11 Xerox Corporation Ink jet printhead with ink flow directing valves
US5374792A (en) 1993-01-04 1994-12-20 General Electric Company Micromechanical moving structures including multiple contact switching system
JPH0867005A (ja) * 1994-08-31 1996-03-12 Fujitsu Ltd インクジェットヘッド
US5665249A (en) 1994-10-17 1997-09-09 Xerox Corporation Micro-electromechanical die module with planarized thick film layer
US5570959A (en) 1994-10-28 1996-11-05 Fujitsu Limited Method and system for printing gap adjustment
EP0974466B1 (de) 1995-04-19 2003-03-26 Seiko Epson Corporation Tintenstrahlaufzeichnungskopf und Verfahren zu seiner Herstellung
US6234607B1 (en) 1995-04-20 2001-05-22 Seiko Epson Corporation Ink jet head and control method for reduced residual vibration
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Also Published As

Publication number Publication date
US20110090285A1 (en) 2011-04-21
ATE367266T1 (de) 2007-08-15
CN100398321C (zh) 2008-07-02
US20090237449A1 (en) 2009-09-24
US7547095B2 (en) 2009-06-16
CN1198726C (zh) 2005-04-27
JP4380962B2 (ja) 2009-12-09
US7887161B2 (en) 2011-02-15
EP1301345A4 (de) 2004-11-17
IL166921A (en) 2010-05-31
JP2003534168A (ja) 2003-11-18
DE60035618D1 (de) 2007-08-30
US20070080980A1 (en) 2007-04-12
AU4731400A (en) 2001-12-03
WO2001089840A1 (en) 2001-11-29
US20120069096A1 (en) 2012-03-22
AU2000247314B2 (en) 2004-10-21
DE60035618T2 (de) 2008-07-03
US8382251B2 (en) 2013-02-26
CN1452554A (zh) 2003-10-29
US8070260B2 (en) 2011-12-06
AU2000247314C1 (en) 2005-10-06
EP1301345B1 (de) 2007-07-18
EP1301345A1 (de) 2003-04-16
US7169316B1 (en) 2007-01-30
CN1651244A (zh) 2005-08-10

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