WO2024130901A1 - 一种电子级氢氟酸制备用废液回收再利用装置 - Google Patents

一种电子级氢氟酸制备用废液回收再利用装置 Download PDF

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Publication number
WO2024130901A1
WO2024130901A1 PCT/CN2023/087334 CN2023087334W WO2024130901A1 WO 2024130901 A1 WO2024130901 A1 WO 2024130901A1 CN 2023087334 W CN2023087334 W CN 2023087334W WO 2024130901 A1 WO2024130901 A1 WO 2024130901A1
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WO
WIPO (PCT)
Prior art keywords
fixedly connected
waste liquid
hydrofluoric acid
gear
alkali washing
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Application number
PCT/CN2023/087334
Other languages
English (en)
French (fr)
Inventor
吴俊贤
李文斌
罗霜
Original Assignee
福建天甫电子材料有限公司
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Filing date
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Application filed by 福建天甫电子材料有限公司 filed Critical 福建天甫电子材料有限公司
Publication of WO2024130901A1 publication Critical patent/WO2024130901A1/zh

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D29/00—Filters with filtering elements stationary during filtration, e.g. pressure or suction filters, not covered by groups B01D24/00 - B01D27/00; Filtering elements therefor
    • B01D29/01—Filters with filtering elements stationary during filtration, e.g. pressure or suction filters, not covered by groups B01D24/00 - B01D27/00; Filtering elements therefor with flat filtering elements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D29/00—Filters with filtering elements stationary during filtration, e.g. pressure or suction filters, not covered by groups B01D24/00 - B01D27/00; Filtering elements therefor
    • B01D29/62—Regenerating the filter material in the filter
    • B01D29/70—Regenerating the filter material in the filter by forces created by movement of the filter element
    • B01D29/72—Regenerating the filter material in the filter by forces created by movement of the filter element involving vibrations
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D29/00—Filters with filtering elements stationary during filtration, e.g. pressure or suction filters, not covered by groups B01D24/00 - B01D27/00; Filtering elements therefor
    • B01D29/88—Filters with filtering elements stationary during filtration, e.g. pressure or suction filters, not covered by groups B01D24/00 - B01D27/00; Filtering elements therefor having feed or discharge devices
    • B01D29/94—Filters with filtering elements stationary during filtration, e.g. pressure or suction filters, not covered by groups B01D24/00 - B01D27/00; Filtering elements therefor having feed or discharge devices for discharging the filter cake, e.g. chutes
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B7/00—Halogens; Halogen acids
    • C01B7/19—Fluorine; Hydrogen fluoride
    • C01B7/191—Hydrogen fluoride
    • C01B7/195—Separation; Purification

Definitions

  • the invention relates to the technical field of electronic-grade hydrofluoric acid production, and in particular to a waste liquid recovery and reuse device for electronic-grade hydrofluoric acid preparation.
  • Hydrofluoric acid is an aqueous solution of hydrogen fluoride gas, which appears as a clear, colorless, fuming corrosive liquid with a strong irritating odor. Hydrofluoric acid is a weak acid and is extremely corrosive. It can strongly corrode metals, glass and silicon-containing objects. It is generally produced in laboratories using fluorite (the main component is calcium fluoride) and concentrated sulfuric acid. It needs to be sealed in a plastic bottle and stored in a cool place. In the process of preparing hydrofluoric acid, condensed exhaust gas is produced. The exhaust gas is washed with pure water and then washed with calcium hydroxide.
  • a small amount of hydrogen fluoride in the exhaust gas reacts with calcium hydroxide to form a calcium fluoride precipitate. Because calcium hydroxide is strongly alkaline, the calcium fluoride precipitate cannot be cleaned manually, resulting in a waste of calcium hydroxide and increasing the cost of raw materials in the production process of hydrofluoric acid.
  • the purpose of the present invention is to provide a waste liquid recovery and reuse device for the preparation of electronic-grade hydrofluoric acid, aiming to solve the shortcoming that calcium fluoride precipitates in calcium hydroxide cannot be effectively cleaned manually.
  • a waste liquid recycling and reuse device for preparing electronic-grade hydrofluoric acid comprising an alkali washing barrel, a guide block is fixedly connected to the upper end of the inner wall of the alkali washing barrel, an opening is penetrated through the inner wall of the alkali washing barrel, a screening component for filtering the waste liquid after alkali washing of hydrofluoric acid waste gas is arranged inside the alkali washing barrel, a striking component for beating the residual calcium fluoride on the screening component is arranged at the bottom of the screening component, and a collecting component for collecting calcium fluoride is fixedly connected to the outer side of the alkali washing barrel.
  • the screening assembly includes a first rotating shaft, a screening plate, a filter and a support plate.
  • the first rotating shaft is rotatably connected to the inside of the alkali washing barrel
  • the screening plate is fixedly connected to the middle of the first rotating shaft
  • a filter for filtering calcium fluoride is provided in the middle of the screening plate
  • a support plate is fixedly connected to the upper surface of the screening plate on one side close to the first rotating shaft.
  • the striking assembly includes an active chamber, a fixed seat, a fixed frame, a fixed plate, a motor, a first transmission roller, a second transmission roller and a transmission belt.
  • the active chamber is arranged inside the alkali washing barrel
  • the fixed seat is fixedly connected to the lower surface of the screen plate by bolts
  • the fixed frame is fixedly connected to the bottom of the fixed seat
  • the motor is fixedly connected to the outer end of the fixed frame through the fixed plate
  • the first transmission roller is fixedly connected to the output end of the motor
  • the second transmission roller is rotatably connected to the inner end of the fixed frame
  • one end of the transmission belt is transmission-connected to the first transmission roller
  • the other end of the transmission belt is transmission-connected to the second transmission roller.
  • the striking assembly also includes a rotating disk, an eccentric rod, a fixed shaft, a swing rod, a swing groove, a striking head and an electric contact module.
  • the rotating disk is fixedly connected to the inner side of the second transmission roller
  • the eccentric rod is fixedly connected to the inner side of the rotating disk
  • the fixed shaft is fixedly connected to the inner side of the motor
  • the outer end of the swing rod is rotatably connected to the fixed shaft
  • the swing groove is opened in the middle part of the swing rod
  • the middle part of the eccentric rod is movably connected to the inside of the swing groove
  • the striking head is fixedly connected to the upper surface of the inner end of the swing rod
  • the electric contact module is fixedly connected to the inner wall of the alkali washing barrel.
  • the collecting assembly includes a collecting chamber, a collecting port, a second rotating shaft, a sealing plate, a sealing plug, a first gear, a lifting groove, a rotating groove and a second gear.
  • the collecting chamber is fixedly connected to the outer wall of the alkali washing barrel on one side close to the opening
  • the collecting port is arranged at the bottom of the collecting chamber
  • the second rotating shaft is rotatably connected to the inner upper end of the collecting chamber
  • the sealing plate is fixedly connected to the middle part of the second rotating shaft
  • the sealing plug is fixedly connected to the inner surface of the sealing plate
  • the first gear is fixedly connected to the outer end of the second rotating shaft
  • the lifting groove is opened at the connection between the collecting chamber and the alkali washing barrel
  • the rotating groove is opened at the lower end of the lifting groove
  • the second gear is fixedly connected to the outer end of the first rotating shaft
  • the second gear is rotatably connected to the inside of the rotating groove
  • the gear rod is limited and movably connected to the inside of
  • the inner diameter of the filter is larger than the inner diameter of the guide block to prevent the waste liquid from spilling outside the filter during the diversion process.
  • the shape of the support plate is set to be an arc shape, which plays a role in guiding and lifting the calcium fluoride.
  • the motor is electrically connected to an electric contact module to control the on and off of the motor, and the electric contact module is electrically connected to an external power supply of the device.
  • the swing range of the eccentric rod is adapted to the length of the swing groove, and the movement of the eccentric rod inside the swing groove can effectively drive the swing rod to swing up and down.
  • the top of the impact head is configured to have a certain elasticity to prevent damage to the filter when hitting the filter.
  • a recovery device is externally connected to the bottom of the collecting port, and calcium fluoride is struck into the collecting chamber and then enters the recovery device through the collecting port for recovery treatment.
  • the second rotating shaft is connected to an external driving source, and the rotation of the second rotating shaft can be controlled by the driving source.
  • the size of the sealing plug is matched with the size of the opening, so as to seal the inside of the alkali washing barrel.
  • the invention provides a waste liquid recycling and reuse device for preparing electronic-grade hydrofluoric acid. Compared with the prior art, the invention has the following beneficial effects: 1.
  • the waste liquid recycling and reuse device for preparing electronic-grade hydrofluoric acid in the invention can filter calcium fluoride in calcium hydroxide waste liquid through a filter screen, thereby achieving effective filtration of the waste liquid, improving the effectiveness of the device in treating the waste liquid, achieving automated treatment of the waste liquid, and improving the waste liquid treatment efficiency; 2.
  • the waste liquid recycling and reuse device for preparing electronic-grade hydrofluoric acid in the invention can cause the calcium fluoride that is not condensed on the filter screen to fall downward onto a support plate by gravity, and the fallen calcium fluoride can be caused to fall into a collecting chamber through the support plate, thereby achieving the collection of calcium fluoride, effectively solving the problem of automatic collection of calcium fluoride, and improving the effectiveness of the device in treating the waste liquid.
  • the efficiency of calcium fluoride collection is guaranteed; 3.
  • the electronic-grade hydrofluoric acid preparation waste liquid recovery and reuse device of the present invention can swing with the fixed axis as the axis through the swing rod, and the swing rod drives the striking head to beat the filter screen, so that the calcium fluoride remaining on the filter screen is struck toward the inside of the collection chamber, preventing the calcium fluoride from condensing on the filter screen and clogging the filter screen, while also improving the effectiveness of calcium fluoride collection, improving the cleaning quality in the waste liquid treatment link, and ensuring that the precipitate can be recovered and treated in time after the waste liquid is treated; 4.
  • the electronic-grade hydrofluoric acid preparation waste liquid recovery and reuse device of the present invention can enter the inside of the collection chamber through the calcium fluoride, and the calcium fluoride will enter the external recovery device after passing through the collection port, and the recovered calcium fluoride can also be used in other fields, thereby improving the recovery rate of the device in the production process.
  • FIG1 is a perspective schematic diagram of the overall structure of the present invention.
  • FIG. 2 is a schematic top view of the overall structure of the present invention.
  • FIG. 3 is a cross-sectional perspective schematic diagram of the overall internal structure of the present invention.
  • FIG. 4 is a partial three-dimensional schematic diagram of the overall structure of the striking assembly of the present invention.
  • FIG. 5 is an enlarged schematic diagram of the structure at point A in FIG. 4 of the present invention.
  • FIG. 6 is a perspective schematic diagram of the internal structure of the striking assembly of the present invention.
  • FIG. 7 is an enlarged schematic diagram of the structure at point B in FIG. 6 of the present invention.
  • FIG. 8 is a three-dimensional schematic diagram of the peripheral structure of the sealing plate of the present invention.
  • FIG. 9 is a three-dimensional schematic diagram of the internal structure of the collection assembly of the present invention.
  • FIG. 10 is an enlarged schematic diagram of the structure at point C in FIG. 9 of the present invention.
  • the terms “center”, “lateral”, “up”, “down”, “left”, “right”, “vertical”, “horizontal”, “top”, “bottom”, “inside”, “outside” and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present invention.
  • the calcium hydroxide waste liquid after alkali washing is discharged downward.
  • the calcium fluoride in the calcium hydroxide waste liquid is filtered by the screening component 4, and the screening component 4 is driven to flip upward by the collecting component 6, so that the calcium fluoride remaining on the screening component 4 enters the interior of the collecting component 6 for collection, and then the screening component 4 is struck by the striking component 5, and the calcium fluoride condensed on the screening component 4 is struck into the interior of the collecting component 6, and the calcium fluoride collected in the interior of the collecting component 6 is recovered by the collecting device.
  • the screening assembly 4 includes a first rotating shaft 401, a screening plate 402, a filter 403 and a support plate 404.
  • the first rotating shaft 401 is rotatably connected to the inside of the alkali washing barrel 1, and the screening plate 402 is fixedly connected to the middle of the first rotating shaft 401.
  • a filter 403 for filtering calcium fluoride is provided in the middle of the screening plate 402.
  • the inner diameter of the filter 403 is larger than the inner diameter of the guide block 2 to prevent the waste liquid from spilling to a position outside the filter 403 during the diversion process.
  • a support plate 404 is fixedly connected to the upper surface of the screening plate 402 close to the first rotating shaft 401.
  • the shape of the support plate 404 is set to be an arc shape, which plays a role in guiding and lifting the calcium fluoride.
  • the collecting assembly 6 includes a collecting chamber 601, a collecting port 602, a second rotating shaft 603, a sealing plate 604, a sealing plug 605, a first gear 606, a lifting slot 607, a rotating slot 608 and a second gear 609.
  • the collecting chamber 601 is fixedly connected to the outer wall of the alkali washing barrel 1 on one side close to the opening 3.
  • the collecting port 602 is arranged at the bottom of the collecting chamber 601.
  • a recovery device is externally connected to the bottom of the collecting port 602. After the calcium fluoride is struck into the collecting chamber 601, it enters the recovery device through the collecting port 602 for recovery treatment.
  • the second rotating shaft 603 is rotatably connected to the inner upper end of the collecting chamber 601.
  • the second rotating shaft 603 is connected to an external driving source.
  • the rotation of the second rotating shaft 603 can be controlled by the driving source.
  • the sealing plate 604 is fixedly connected to the collecting chamber 601. It is connected to the middle part of the second rotating shaft 603, and the sealing plug 605 is fixedly connected to the inner surface of the sealing plate 604.
  • the size of the sealing plug 605 is adapted to the size of the opening 3 to seal the inside of the alkali washing barrel 1.
  • the first gear 606 is fixedly connected to the outer end of the second rotating shaft 603.
  • the lifting groove 607 is opened at the connection between the collecting chamber 601 and the alkali washing barrel 1.
  • the rotating groove 608 is opened at the lower end of the lifting groove 607.
  • the second gear 609 is fixedly connected to the outer end of the first rotating shaft 401.
  • the second gear 609 is rotatably connected to the inside of the rotating groove 608.
  • the gear rod 610 is limited and movably connected to the inside of the lifting groove 607.
  • the bottom of the gear rod 610 is meshed with the second gear 609, and the top of the gear rod 610 is meshed with the first gear 606.
  • Embodiment 3 As shown in Figures 2 to 7, as a preferred embodiment of the present invention, the striking assembly 5 includes an active chamber 501, a fixed seat 502, a fixed frame 503, a fixed plate 504, a motor 505, a first transmission roller 506, a second transmission roller 507 and a transmission belt 508.
  • the active chamber 501 is arranged inside the alkali washing barrel 1, the fixed seat 502 is fixedly connected to the lower surface of the screening plate 402 by bolts, the fixed frame 503 is fixedly connected to the bottom of the fixed seat 502, the motor 505 is fixedly connected to the outer end of the fixed frame 503 through the fixed plate 504, the motor 505 is electrically connected to the electric contact module 515, which plays a role in controlling the power on and off of the motor 505, the first transmission roller 506 is fixedly connected to the output end of the motor 505, the second transmission roller 507 is rotatably connected to the inner end of the fixed frame 503, one end of the transmission belt 508 is transmission-connected to the first transmission roller 506, and the other end of the transmission belt 508 is transmission-connected to the second transmission roller 507.
  • the striking assembly 5 also includes a rotating disk 509, an eccentric rod 510, a fixed shaft 511, a swing rod 512, a swing slot 513, a striking head 514 and an electric contact module 515.
  • the rotating disk 509 is fixedly connected to the inner side of the second transmission roller 507
  • the eccentric rod 510 is fixedly connected to the inner side of the rotating disk 509
  • the swing range of the eccentric rod 510 is adapted to the length of the swing slot 513
  • the movement of the eccentric rod 510 in the swing slot 513 can effectively drive the swing rod 512 to swing up and down.
  • the fixed shaft 511 is fixedly connected to the motor On the inner side of 505, the outer end of the swing rod 512 is rotatably connected to the fixed shaft 511, the swing groove 513 is opened in the middle of the swing rod 512, the middle part of the eccentric rod 510 is movably connected to the inside of the swing groove 513, the striking head 514 is fixedly connected to the upper surface of the inner end of the swing rod 512, and the top of the striking head 514 is set to have a certain elasticity to prevent the filter 403 from being damaged when striking the filter 403, and the electric contact module 515 is fixedly connected to the inner wall of the alkali washing barrel 1, and the electric contact module 515 is electrically connected to the external power supply of the equipment.
  • the sealing plate 604 In the initial state, the sealing plate 604 is vertically downward, and the sealing plate 604 drives the sealing plug 605 to seal the opening 3.
  • the sealing plate 604 drives the first gear 606 to rotate through the second rotating shaft 603.
  • the first gear 606 makes the gear rod 610 in the highest position.
  • the gear rod 610 drives the screening plate 402 to be in a horizontal state through the lifting slot 607 and the manual first rotating shaft 401.
  • the screening plate 402 drives the fixing frame 503 to be in the lowest position through the fixing seat 502.
  • the rotating disk 509 drives the eccentric rod 510 to be in the lowest position.
  • the eccentric rod 510 drives the swing rod 512 to be in a downward swinging state through the swing slot 513.
  • the swing rod 512 drives the striking head 514 not to contact with the bottom of the filter 403.
  • the calcium hydroxide waste liquid after alkali washing is discharged downward.
  • the calcium fluoride in the calcium hydroxide waste liquid is filtered through the filter screen 403, thereby achieving effective filtration of the waste liquid, improving the effectiveness of the device in treating the waste liquid, achieving automated treatment of the waste liquid, and improving the waste liquid treatment efficiency.
  • the second rotating shaft 603 is driven to rotate by an external driving device, and the second rotating shaft 603 drives the sealing plate 604 to flip upward, and the sealing plate 604 drives the sealing plug 605 to leave the opening 3.
  • the second rotating shaft 603 rotates and drives the first gear 606 to rotate at the same time, because the first gear 606 is meshed with the top of the gear rod 610, and then drives the gear rod 610 during the rotation of the first gear 606. 10 moves upward inside the lifting groove 607, because the bottom of the gear rod 610 is meshed with the second gear 609, the gear rod 610 moves upward and drives the second gear 609 to rotate inside the rotating groove 608, the second gear 609 drives the first rotating shaft 401 to rotate, the first rotating shaft 401 drives the screening plate 402 to flip upward, the screening plate 402 drives the calcium fluoride retained thereon to move upward through the filter screen 403, at this time the calcium fluoride not condensed on the filter screen 403 falls downward onto the supporting plate 404, the supporting plate 404 can make the fallen calcium fluoride fall into the inside of the collecting chamber 601 again, thereby realizing the collection of calcium fluoride, effectively solving the problem of automatic collection of calcium fluoride, and at the same time improving the effectiveness of the equipment for waste liquid
  • the screening plate 402 When the screening plate 402 is flipped upward, it drives the fixing frame 503 to leave the movable chamber 501 and move upward through the fixing seat 502.
  • the motor 505 moves to the same horizontal position as the electric contact module 515. Because the electric contact module 515 is electrically connected to the motor 505, the electric contact module 515 controls the motor 505 to be energized.
  • the motor 505 After the motor 505 is energized, it drives the first transmission roller 506 to rotate.
  • the first transmission roller 506 drives the second transmission roller 507 to rotate through the transmission belt 508.
  • the second transmission roller 507 drives the eccentric rod 510 to rotate through the rotating disk 509.
  • the eccentric rod 510 drives the swing groove 513 to rotate under the action of the internal activity of the swing groove 513.
  • the movable rod 512 swings with the fixed shaft 511 as the axis, and the swing rod 512 drives the striking head 514 to beat the filter 403, so that the calcium fluoride remaining on the filter 403 is struck toward the inside of the collecting chamber 601, thereby preventing the calcium fluoride from condensing on the filter 403 and clogging the filter 403.
  • the effectiveness of calcium fluoride collection is improved, the cleaning quality in the waste liquid treatment link is improved, and the sediment can be recovered in time after the waste liquid is treated.
  • the calcium fluoride enters the inside of the collecting chamber 601, the calcium fluoride will enter the external recovery device through the collecting port 602, and the calcium fluoride can also be used in other fields, thereby improving the recovery rate of the device in the production process.
  • components in the present application are all universal standard components or components well known to those skilled in the art, which effectively solve the problem that calcium fluoride precipitates in calcium hydroxide cannot be effectively cleaned manually.

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Cleaning By Liquid Or Steam (AREA)
  • Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
  • Removal Of Specific Substances (AREA)
  • ing And Chemical Polishing (AREA)

Abstract

本发明适用于电子级氢氟酸生产技术领域，提供了一种电子级氢氟酸制备用废液回收再利用装置，包括碱洗桶，所述碱洗桶的内壁上端固定连接有导流块，所述碱洗桶的内壁贯穿开设有开口，所述碱洗桶的内部设置有用于过滤氢氟酸废气碱洗后废液的筛分组件，所述筛分组件的底部设置有用于拍打筛分组件上残留氟化钙的打击组件，所述碱洗桶的外侧固定连接有用于收集氟化钙的收集组件，所述第一转动轴转动连接在碱洗桶的内部，该电子级氢氟酸制备用废液回收再利用装置能够通过滤网对氢氧化钙废液中的氟化钙进行过滤，进而实现了对废液的有效过滤，提高装置对废液处理的有效性，实现了对废液的自动化处理，提高废液处理效率。

Description

一种电子级氢氟酸制备用废液回收再利用装置 技术领域
本发明涉及电子级氢氟酸生产技术领域，具体是涉及一种电子级氢氟酸制备用废液回收再利用装置。
 背景技术
氢氟酸是氟化氢气体的水溶液，其呈现为一种清澈，无色、发烟的腐蚀性液体，有剧烈刺激性气味，氢氟酸是一种弱酸，具有极强的腐蚀性，能强烈地腐蚀金属、玻璃和含硅的物体，实验室一般用萤石（主要成分为氟化钙）和浓硫酸来制取，需要密封在塑料瓶中，并保存于阴凉处，在制备氢氟酸的过程中，会产生冷凝的尾气，尾气通过纯水进行水洗后再次通过氢氧化钙进行碱洗，尾气中少量的氟化氢与氢氧化钙反应后形成氟化钙沉淀物，因为氢氧化钙具有强碱性，因此无法人工手动对氟化钙沉淀物进行清理，导致氢氧化钙出现浪费的情况，增加氢氟酸生产过程中的原材料成本。
因此，需要提供一种电子级氢氟酸制备用废液回收再利用装置，旨在解决上述问题。
 技术问题
针对现有技术存在的不足，本发明的目的在于提供一种电子级氢氟酸制备用废液回收再利用装置，旨在解决人工手动无法对氢氧化钙中的氟化钙沉淀物进行有效清理的缺点。
 技术解决方案
为实现上述目的，本发明提供如下技术方案：一种电子级氢氟酸制备用废液回收再利用装置，包括碱洗桶，所述碱洗桶的内壁上端固定连接有导流块，所述碱洗桶的内壁贯穿开设有开口，所述碱洗桶的内部设置有用于过滤氢氟酸废气碱洗后废液的筛分组件，所述筛分组件的底部设置有用于拍打筛分组件上残留氟化钙的打击组件，所述碱洗桶的外侧固定连接有用于收集氟化钙的收集组件。
作为本发明进一步的方案，所述筛分组件包括第一转动轴、筛分板、滤网和托板，所述第一转动轴转动连接在碱洗桶的内部，所述筛分板固定连接在第一转动轴的中部，所述筛分板的中部设置有用于过滤氟化钙的滤网，所述筛分板的上表面靠近第一转动轴的一侧固定连接有托板。
作为本发明进一步的方案，所述打击组件包括活动腔、固定座、固定架、固定板、电机、第一传动辊、第二传动辊和传动带，所述活动腔设置在碱洗桶的内部，所述固定座通过螺栓固定连接在筛分板的下表面，所述固定架固定连接在固定座的底部，所述电机通过固定板固定连接在固定架的外侧端，所述第一传动辊固定连接在电机的输出端上，所述第二传动辊转动连接在固定架的内侧端上，所述传动带的一端与第一传动辊传动连接，所述传动带的另一端与第二传动辊传动连接。
作为本发明进一步的方案，所述打击组件还包括转动盘、偏心杆、固定轴、摆动杆、摆动槽、打击头和电触模块，所述转动盘固定连接在第二传动辊的内侧，所述偏心杆固定连接在转动盘的内侧，所述固定轴固定连接在电机的内侧，所述摆动杆的外侧端转动连接在固定轴上，所述摆动槽开设在摆动杆的中部，所述偏心杆的中部活动连接在摆动槽的内部，所述打击头固定连接在摆动杆的内侧端上表面，所述电触模块固定连接在碱洗桶的内壁。
作为本发明进一步的方案，所述收集组件包括收集腔、收集口、第二转动轴、密封板、密封塞、第一齿轮、升降槽、转动槽和第二齿轮，所述收集腔固定连接在碱洗桶的外壁靠近开口的一侧，所述收集口设置在收集腔的底部，所述第二转动轴转动连接在收集腔的内侧上端，所述密封板固定连接在第二转动轴的中部，所述密封塞固定连接在密封板的内侧表面，所述第一齿轮固定连接在第二转动轴的外侧端，所述升降槽开设在收集腔与碱洗桶的连接处，所述转动槽开设在升降槽的下端，所述第二齿轮固定接在第一转动轴的外侧端，所述第二齿轮转动连接在转动槽的内部，所述齿杆限位活动连接在升降槽的内部，齿杆的底部与第二齿轮啮合，所述齿杆的顶部与第一齿轮啮合。
作为本发明进一步的方案，所述滤网的内部直径大于导流块的内部直径，防止废液在导流的过程中洒落到滤网以外的位置，所述托板的形状设置为圆弧形，起到对氟化钙进引导托举的作用。
作为本发明进一步的方案，所述电机与电触模块电性连接，起到控制电机通断电的作用，所述电触模块与设备外接电源电性连接。
作为本发明进一步的方案，所述偏心杆的摆动范围与摆动槽的长度相互适配，偏心杆在摆动槽的内部活动能够有效地带动摆动杆上下摆动，所述打击头的顶部设置为具有一定弹性，防止打击滤网时对滤网造成损伤。
作为本发明进一步的方案，所述收集口的底部外接有回收设备，氟化钙被打击进入到收集腔后通过收集口进入到回收设备中进行回收处理，所述第二转动轴与外接的驱动源连接，通过驱动源能够控制第二转动轴的转动，所述密封塞的尺寸与开口的尺寸相互适配，起到对碱洗桶内部进行密封的作用。
 有益效果
本发明提供的一种电子级氢氟酸制备用废液回收再利用装置，与现有技术相比，本发明的有益效果是：1、本发明中的电子级氢氟酸制备用废液回收再利用装置能够通过滤网对氢氧化钙废液中的氟化钙进行过滤，进而实现了对废液的有效过滤，提高装置对废液处理的有效性，实现了对废液的自动化处理，提高废液处理效率；2、本发明中的电子级氢氟酸制备用废液回收再利用装置能够通过重力使得未凝结在滤网上的氟化钙向下掉落到托板上，通过托板能够使得掉落的氟化钙再掉落到收集腔的内部，进而实现了对氟化钙的收集作用，有效地解决了氟化钙的自动收集问题，同时提高设备对废液处理的有效性，保证了氟化钙收集的效率；3、本发明中的电子级氢氟酸制备用废液回收再利用装置能够通过摆动杆以固定轴为轴心摆动，摆动杆带动打击头对滤网进行拍打，使得残留在滤网上的氟化钙被打击向收集腔的内部，防止氟化钙凝结在滤网上对滤网造成堵塞，同时也提高了氟化钙收集的有效性，提高了废液处理环节中的清理质量，保证了对废液处理后能够及时地进行沉淀物回收处理；4、本发明中的电子级氢氟酸制备用废液回收再利用装置能够通过氟化钙进入到收集腔的内部后，氟化钙会通过收集口后进入后外接的回收装置中，回收后的氟化钙也能够在其他领域进行使用，提高了装置生产过程中的回收利用率。
为更清楚地阐述本发明的结构特征和功效，下面结合附图与具体实施例来对本发明进行详细说明。
 附图说明
图1为本发明整体结构立体示意图。
图2为本发明整体结构俯视示意图。
图3为本发明整体内部结构剖视立体示意图。
图4为本发明打击组件整体结构局部立体示意图。
图5为本发明图4中A处结构放大示意图。
图6为本发明打击组件内部结构立体示意图。
图7为本发明图6中B处结构放大示意图。
图8为本发明密封板周边结构立体示意图。
图9为本发明收集组件内部结构立体示意图。
图10为本发明图9中C处结构放大示意图。
附图标记：1、碱洗桶；2、导流块；3、开口；4、筛分组件；401、第一转动轴；402、筛分板；403、滤网；404、托板；5、打击组件；501、活动腔；502、固定座；503、固定架；504、固定板；505、电机；506、第一传动辊；507、第二传动辊；508、传动带；509、转动盘；510、偏心杆；511、固定轴；512、摆动杆；513、摆动槽；514、打击头；515、电触模块；6、收集组件；601、收集腔；602、收集口；603、第二转动轴；604、密封板；605、密封塞；606、第一齿轮；607、升降槽；608、转动槽；609、第二齿轮；610、齿杆。
 本发明的实施方式
为了使本发明的目的、技术方案及优点更加清楚明白，以下结合附图及实施例，对本发明进行进一步详细说明。应当理解，此处所描述的具体实施例仅仅用以解释本发明，并不用于限定本发明。
在本发明的描述中，术语“中心”、“横向”、“上”、“下”、“左”、“右”、“竖直”、“水平”、“顶”、“底”、“内”、“外”等指示的方位或位置关系为基于附图所示的方位或位置关系，仅是为了便于描述本发明和简化描述，而不是指示或暗示所指的装置或元件必须具有特定的方位、以特定的方位构造和操作，因此不能理解为对本发明的限制。
以下结合具体实施例对本发明的具体实现进行详细描述。
实施例一：如图1至图10所示，为本发明的一个实施例提供的一种电子级氢氟酸制备用废液回收再利用装置，包括碱洗桶1，碱洗桶1的内壁上端固定连接有导流块2，碱洗桶1的内壁贯穿开设有开口3，碱洗桶1的内部设置有用于过滤氢氟酸废气碱洗后废液的筛分组件4，筛分组件4的底部设置有用于拍打筛分组件4上残留氟化钙的打击组件5，碱洗桶1的外侧固定连接有用于收集氟化钙的收集组件6。
优选的，在本实施例中，使用时，在对氢氟酸尾气进行碱洗后，此时碱洗后的氢氧化钙废液向下排放，在排放的过程中，通过筛分组件4对氢氧化钙废液中的氟化钙进行过滤，通过收集组件6带动筛分组件4向上翻转，使得留存在筛分组件4上的氟化钙进入到收集组件6的内部进行收集，再通过打击组件5打击筛分组件4，将筛分组件4上凝结的氟化钙打击进入到收集组件6的内部，在通过收集装置对收集组件6的内部收集的氟化钙进行回收处理。
实施例二：如图1、图2、图3、图4、图6、图8、图9和图10所示，作为本发明的一种优选实施例，筛分组件4包括第一转动轴401、筛分板402、滤网403和托板404，第一转动轴401转动连接在碱洗桶1的内部，筛分板402固定连接在第一转动轴401的中部，筛分板402的中部设置有用于过滤氟化钙的滤网403，滤网403的内部直径大于导流块2的内部直径，防止废液在导流的过程中洒落到滤网403以外的位置，筛分板402的上表面靠近第一转动轴401的一侧固定连接有托板404，托板404的形状设置为圆弧形，起到对氟化钙进引导托举的作用。
收集组件6包括收集腔601、收集口602、第二转动轴603、密封板604、密封塞605、第一齿轮606、升降槽607、转动槽608和第二齿轮609，收集腔601固定连接在碱洗桶1的外壁靠近开口3的一侧，收集口602设置在收集腔601的底部，收集口602的底部外接有回收设备，氟化钙被打击进入到收集腔601后通过收集口602进入到回收设备中进行回收处理，第二转动轴603转动连接在收集腔601的内侧上端，第二转动轴603与外接的驱动源连接，通过驱动源能够控制第二转动轴603的转动，密封板604固定连接在第二转动轴603的中部，密封塞605固定连接在密封板604的内侧表面，密封塞605的尺寸与开口3的尺寸相互适配，起到对碱洗桶1内部进行密封的作用，第一齿轮606固定连接在第二转动轴603的外侧端，升降槽607开设在收集腔601与碱洗桶1的连接处，转动槽608开设在升降槽607的下端，第二齿轮609固定接在第一转动轴401的外侧端，第二齿轮609转动连接在转动槽608的内部，齿杆610限位活动连接在升降槽607的内部，齿杆610的底部与第二齿轮609啮合，齿杆610的顶部与第一齿轮606啮合。
实施例三：如图2至图7所示，作为本发明的一种优选实施例，打击组件5包括活动腔501、固定座502、固定架503、固定板504、电机505、第一传动辊506、第二传动辊507和传动带508，活动腔501设置在碱洗桶1的内部，固定座502通过螺栓固定连接在筛分板402的下表面，固定架503固定连接在固定座502的底部，电机505通过固定板504固定连接在固定架503的外侧端，电机505与电触模块515电性连接，起到控制电机505通断电的作用，第一传动辊506固定连接在电机505的输出端上，第二传动辊507转动连接在固定架503的内侧端上，传动带508的一端与第一传动辊506传动连接，传动带508的另一端与第二传动辊507传动连接。
打击组件5还包括转动盘509、偏心杆510、固定轴511、摆动杆512、摆动槽513、打击头514和电触模块515，转动盘509固定连接在第二传动辊507的内侧，偏心杆510固定连接在转动盘509的内侧，偏心杆510的摆动范围与摆动槽513的长度相互适配，偏心杆510在摆动槽513的内部活动能够有效地带动摆动杆512上下摆动，固定轴511固定连接在电机505的内侧，摆动杆512的外侧端转动连接在固定轴511上，摆动槽513开设在摆动杆512的中部，偏心杆510的中部活动连接在摆动槽513的内部，打击头514固定连接在摆动杆512的内侧端上表面，打击头514的顶部设置为具有一定弹性，防止打击滤网403时对滤网403造成损伤，电触模块515固定连接在碱洗桶1的内壁，电触模块515与设备外接电源电性连接。
工作原理：初始状态下，密封板604处于垂直向下，密封板604带动密封塞605对开口3进行封堵，密封板604通过第二转动轴603带动第一齿轮606转动，第一齿轮606使得齿杆610处于最高位置，齿杆610通过升降槽607手动第一转动轴401带动筛分板402处于水平状态，筛分板402通过固定座502带动固定架503处于最低位置，转动盘509带动偏心杆510处于最低位置，偏心杆510通过摆动槽513带动摆动杆512处于向下摆动的状态，摆动杆512带动打击头514未与滤网403的底部接触。
工作时，在对氢氟酸尾气进行碱洗后，此时碱洗后的氢氧化钙废液向下排放，在排放的过程中，通过滤网403对氢氧化钙废液中的氟化钙进行过滤，进而实现了对废液的有效过滤，提高装置对废液处理的有效性，实现了对废液的自动化处理，提高废液处理效率，当完成对氢氧化钙排放后，此时通过外接的驱动装置带动第二转动轴603转动，第二转动轴603带动密封板604向上翻转，密封板604带动密封塞605离开开口3，第二转动轴603转动的同时带动第一齿轮606转动，因为第一齿轮606与齿杆610的顶部啮合，进而在第一齿轮606转动的过程中带动齿杆610在升降槽607的内部向上运动，因为齿杆610的底部与第二齿轮609啮合，齿杆610向上运动的同时带动第二齿轮609在转动槽608的内部转动，第二齿轮609带动第一转动轴401转动，第一转动轴401带动筛分板402向上翻转，筛分板402通过滤网403带动留存在其上的氟化钙向上运动，此时未凝结在滤网403上的氟化钙向下掉落到托板404上，通过托板404能够使得掉落的氟化钙再掉落到收集腔601的内部，进而实现了对氟化钙的收集作用，有效地解决了氟化钙的自动收集问题，同时提高设备对废液处理的有效性，保证了氟化钙收集的效率。
筛分板402在向上翻转的过程中带动通过固定座502带动固定架503离开活动腔501向上运动，当筛分板402运动到竖直状态时，使得电机505运动到电触模块515同一水平位置，因为电触模块515与电机505电性连接，此时电触模块515控制电机505通电，电机505通电后带动第一传动辊506转动，第一传动辊506通过传动带508带动第二传动辊507转动，第二传动辊507通过转动盘509带动偏心杆510转动，偏心杆510通过在摆动槽513的内部活动的作用下带动摆动杆512以固定轴511为轴心摆动，摆动杆512带动打击头514对滤网403进行拍打，使得残留在滤网403上的氟化钙被打击向收集腔601的内部，防止氟化钙凝结在滤网403上对滤网403造成堵塞，同时也提高了氟化钙收集的有效性，提高了废液处理环节中的清理质量，保证了对废液处理后能够及时地进行沉淀物回收处理，当氟化钙进入到收集腔601的内部后，氟化钙会通过收集口602后进入后外接的回收装置中，氟化钙也能够在其他领域进行使用，提高了装置生产过程中的回收利用率。
需要特别说明的是，本申请中部件均为通用标准件或本领域技术人员通晓的部件，其有效解决了人工手动无法对氢氧化钙中的氟化钙沉淀物进行有效清理的问题。
对于本领域技术人员而言，虽然说明了本发明的几个实施方式以及实施例，但这些实施方式以及实施例是作为例子而提出的，并不意图限定发明的范围。这些新的实施方式能够以其他各种方式实施，在不脱离发明的主旨的范围内能够进行各种省略、替换、变更。这些实施方式及其变形包含在发明的范围及主旨中，并且包含在权利要求书所记载的发明和其等效的范围内。
此外，应当理解，虽然本说明书按照实施方式加以描述，但并非每个实施方式仅包含一个独立的技术方案，说明书的这种叙述方式仅仅是为清楚起见，本领域技术人员应当将说明书作为一个整体，各实施例中的技术方案也可以经适当组合，形成本领域技术人员可以理解的其他实施方式。

Claims (9)

  1. 一种电子级氢氟酸制备用废液回收再利用装置，包括碱洗桶（1），其特征在于，所述碱洗桶（1）的内壁上端固定连接有导流块（2），所述碱洗桶（1）的内壁贯穿开设有开口（3），所述碱洗桶（1）的内部设置有用于过滤氢氟酸废气碱洗后废液的筛分组件（4），所述筛分组件（4）的底部设置有用于拍打筛分组件（4）上残留氟化钙的打击组件（5），所述碱洗桶（1）的外侧固定连接有用于收集氟化钙的收集组件（6）。
  2. 根据权利要求1所述的一种电子级氢氟酸制备用废液回收再利用装置，其特征在于，所述筛分组件（4）包括第一转动轴（401）、筛分板（402）、滤网（403）和托板（404），所述第一转动轴（401）转动连接在碱洗桶（1）的内部，所述筛分板（402）固定连接在第一转动轴（401）的中部，所述筛分板（402）的中部设置有用于过滤氟化钙的滤网（403），所述筛分板（402）的上表面靠近第一转动轴（401）的一侧固定连接有托板（404）。
  3. 根据权利要求2所述的一种电子级氢氟酸制备用废液回收再利用装置，其特征在于，所述打击组件（5）包括活动腔（501）、固定座（502）、固定架（503）、固定板（504）、电机（505）、第一传动辊（506）、第二传动辊（507）和传动带（508），所述活动腔（501）设置在碱洗桶（1）的内部，所述固定座（502）通过螺栓固定连接在筛分板（402）的下表面，所述固定架（503）固定连接在固定座（502）的底部，所述电机（505）通过固定板（504）固定连接在固定架（503）的外侧端，所述第一传动辊（506）固定连接在电机（505）的输出端上，所述第二传动辊（507）转动连接在固定架（503）的内侧端上，所述传动带（508）的一端与第一传动辊（506）传动连接，所述传动带（508）的另一端与第二传动辊（507）传动连接。
  4. 根据权利要求3所述的一种电子级氢氟酸制备用废液回收再利用装置，其特征在于，所述打击组件（5）还包括转动盘（509）、偏心杆（510）、固定轴（511）、摆动杆（512）、摆动槽（513）、打击头（514）和电触模块（515），所述转动盘（509）固定连接在第二传动辊（507）的内侧，所述偏心杆（510）固定连接在转动盘（509）的内侧，所述固定轴（511）固定连接在电机（505）的内侧，所述摆动杆（512）的外侧端转动连接在固定轴（511）上，所述摆动槽（513）开设在摆动杆（512）的中部，所述偏心杆（510）的中部活动连接在摆动槽（513）的内部，所述打击头（514）固定连接在摆动杆（512）的内侧端上表面，所述电触模块（515）固定连接在碱洗桶（1）的内壁。
  5. 根据权利要求2所述的一种电子级氢氟酸制备用废液回收再利用装置，其特征在于，所述收集组件（6）包括收集腔（601）、收集口（602）、第二转动轴（603）、密封板（604）、密封塞（605）、第一齿轮（606）、升降槽（607）、转动槽（608）和第二齿轮（609），所述收集腔（601）固定连接在碱洗桶（1）的外壁靠近开口（3）的一侧，所述收集口（602）设置在收集腔（601）的底部，所述第二转动轴（603）转动连接在收集腔（601）的内侧上端，所述密封板（604）固定连接在第二转动轴（603）的中部，所述密封塞（605）固定连接在密封板（604）的内侧表面，所述第一齿轮（606）固定连接在第二转动轴（603）的外侧端，所述升降槽（607）开设在收集腔（601）与碱洗桶（1）的连接处，所述转动槽（608）开设在升降槽（607）的下端，所述第二齿轮（609）固定接在第一转动轴（401）的外侧端，所述第二齿轮（609）转动连接在转动槽（608）的内部，所述齿杆（610）限位活动连接在升降槽（607）的内部，齿杆（610）的底部与第二齿轮（609）啮合，所述齿杆（610）的顶部与第一齿轮（606）啮合。
  6. 根据权利要求2所述的一种电子级氢氟酸制备用废液回收再利用装置，其特征在于，所述滤网（403）的内部直径大于导流块（2）的内部直径，所述托板（404）的形状设置为圆弧形。
  7. 根据权利要求4所述的一种电子级氢氟酸制备用废液回收再利用装置，其特征在于，所述电机（505）与电触模块（515）电性连接，所述电触模块（515）与设备外接电源电性连接。
  8. 根据权利要求4所述的一种电子级氢氟酸制备用废液回收再利用装置，其特征在于，所述偏心杆（510）的摆动范围与摆动槽（513）的长度相互适配，所述打击头（514）的顶部设置为具有一定弹性。
  9. 根据权利要求5所述的一种电子级氢氟酸制备用废液回收再利用装置，其特征在于，所述收集口（602）的底部外接有回收设备，所述第二转动轴（603）与外接的驱动源连接，所述密封塞（605）的尺寸与开口（3）的尺寸相互适配。
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