WO2024117802A1 - Appareil de traitement de poudre métallique utilisant un plasma et son procédé de traitement - Google Patents

Appareil de traitement de poudre métallique utilisant un plasma et son procédé de traitement Download PDF

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Publication number
WO2024117802A1
WO2024117802A1 PCT/KR2023/019510 KR2023019510W WO2024117802A1 WO 2024117802 A1 WO2024117802 A1 WO 2024117802A1 KR 2023019510 W KR2023019510 W KR 2023019510W WO 2024117802 A1 WO2024117802 A1 WO 2024117802A1
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plasma
electrode body
metal powder
negative electrode
gas
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PCT/KR2023/019510
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English (en)
Korean (ko)
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이용복
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이용복
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  • the plasma generated in the inner area of the electrode body is sprayed in a cone shape through a plasma torch provided in the process chamber and supplied to the central spray area.
  • a 3D (3-Dimension) printer is equipment that uses three-dimensional data about an object to be printed and molds a shape in three dimensions to have the same or similar shape as the object.
  • printing technology using a 3D printer is a technology that manufactures products with a three-dimensional structure by stacking various types of materials such as powder, liquid, wire, and pellets layer by layer. This is a complex process that cannot be realized with existing manufacturing and processing technology. Because shaped parts can be easily manufactured, it has recently been in the world's spotlight as a new processing technology.
  • representative metal 3D printers can be divided into PBF (Powder Bed Fusion) method, DED (Direct Energy Deposition) method, ME (Material Extrusion) method, BJ (Binder Jetting) method, etc.
  • PBF method uses powder ( For example, a 3D shape is formed by repeating the process of laying down one layer (e.g., metal powder, etc.) and melting and pasting it on the sliced 2D area of the 3D shape with a high temperature energy source (e.g., laser beam, electron beam, etc.).
  • a high temperature energy source e.g., laser beam, electron beam, etc.
  • metal powder used in metal 3D printing is known to be relatively expensive, and special metal powder designed for application in fields such as aerospace, defense, and biomechanical is even more expensive. Therefore, metal powder for 3D printing is often reused.
  • new metal powder and recovered metal powder are mixed before 3D printing, and 3D printing is performed using the mixed metal powder. This method is widely used.
  • the plasma generated in the inner area of the electrode body is sprayed in a cone shape through a plasma torch provided in the process chamber and supplied to the central spray area.
  • a process chamber to which metal powder, powder transfer gas, and plasma generation gas are supplied;
  • a plasma torch provided in the process chamber to spray plasma generated in the inner region of the electrode body in a cone shape to perform surface treatment of the metal powder supplied to the central spray region;
  • a cyclone separator that separates the spheroidized metal powder spheroidized according to the surface treatment, the powder transfer gas, and the plasma generating gas; and a storage container for collecting the separated spheroidized metal powder.
  • a metal powder processing device using plasma may be provided, including a storage container for collecting the separated spheroidized metal powder.
  • the plasma torch has a cone shape whose diameter decreases toward the lower end, and the metal powder and powder transfer gas are supplied to the first hollow portion provided in the central portion, 1-1
  • a first negative electrode body provided with a cooling channel; It has a cylindrical tube shape surrounding the first negative electrode body and is inclined corresponding to the outer circumferential surface of the first negative electrode body and is spaced at a preset interval, and the plasma generating gas is supplied to provide a first plasma generation area, 1-2
  • a metal powder processing apparatus using plasma may be provided, including a first power supply means.
  • the plasma torch is provided in the form of a cylindrical tube and includes a second negative electrode body provided with a 2-1 cooling channel;
  • the metal powder and powder transfer gas are supplied to a second hollow part provided in the central part, and the upper part has a cylindrical path corresponding to the diameter of the second negative electrode body so that the second negative electrode body is inserted and the plasma generating gas is supplied.
  • a second positive electrode body having a second plasma generation area having a conical path at the lower end and a 2-2 cooling channel; a second insulator provided on the outer surface of the second positive electrode body; and a second power supply means electrically connected to the second negative electrode body and the second positive electrode body to supply power to generate the plasma.
  • a metal powder processing apparatus using plasma can be provided, including a second power supply means.
  • the metal powder processing apparatus includes at least one additional cyclone separator coupled to a rear end of the cyclone separator to separate relatively smaller-sized powder; and at least one additional storage container for collecting the powder separated through the additional cyclone separator.
  • a metal powder processing device using plasma may be provided, further comprising a.
  • supplying metal powder, powder transfer gas, and plasma generation gas to a process chamber Generating plasma in an area inside the electrode body of a plasma torch provided in the process chamber; performing surface treatment of the metal powder supplied to the central spray area by spraying the generated plasma in a cone shape; Separating the spheroidized metal powder spheroidized according to the surface treatment, the powder transfer gas, and the plasma generating gas through a cyclone separator; And collecting the separated spheroidized metal powder in a storage container.
  • a metal powder processing method using plasma can be provided, including the step.
  • the plasma torch has a cone shape whose diameter decreases toward the lower end, and the metal powder and powder transfer gas are supplied to the first hollow portion provided in the central portion, 1-1
  • a first negative electrode body provided with a cooling channel is provided, has a cylindrical tube shape surrounding the first negative electrode body, and is inclined at a preset interval corresponding to the outer peripheral surface of the first negative electrode body, and the plasma generating gas is supplied to the first negative electrode body.
  • 1 plasma generation area is provided, a first positive electrode body is provided with a 1-2 cooling channel, a first insulator is provided on the outer surface of the first negative electrode body and the first positive electrode body, and the first positive electrode body is provided.
  • a metal powder processing method using plasma may be provided, which includes a first power supply means that is electrically connected to the negative electrode body and the first positive electrode body to supply power.
  • the plasma torch is provided in the form of a cylindrical tube, is provided with a second negative electrode body provided with a 2-1 cooling channel, and the metal powder and powder transfer gas are provided in the central portion. It is supplied to the second hollow part, and the upper part has a cylindrical path corresponding to the diameter of the second negative electrode body and the lower part has a conical path so that the second negative electrode body is inserted and the plasma generating gas is supplied.
  • a second positive electrode body is provided with a 2-2 cooling channel, and a second insulator is provided on the outer surface of the second positive electrode body, and is electrically connected to the second negative electrode body and the second positive electrode body.
  • a method of processing metal powder using plasma may be provided, including a second power supply means that is connected to supply power.
  • the metal powder processing method using plasma further includes the step of circulating and reusing the metal powder transfer gas and the plasma generating gas after collecting the metal powder in the storage container.
  • a metal powder processing method using plasma may be provided.
  • the plasma generated in the inner area of the electrode body is sprayed in a cone shape through a plasma torch provided in the process chamber and supplied to the central spray area.
  • the surface treatment of the metal powder can be effectively performed by separating the plasma generation area and the plasma reaction area, and the metal powder can be effectively spherical to improve the flow of the metal powder, as well as 3D printing.
  • various reactants attached to the surface of the metal powder can be cleaned.
  • FIG. 1 is a diagram illustrating a metal powder processing device using plasma according to an embodiment of the present invention
  • FIGS. 2 to 5 are diagrams for explaining various forms of a plasma torch provided in a metal powder processing apparatus using plasma according to an embodiment of the present invention
  • 6 and 7 are diagrams for explaining another form of a metal powder processing device using plasma according to an embodiment of the present invention.
  • Figure 8 is a flow chart showing the process of processing metal powder using plasma according to another embodiment of the present invention.
  • Figure 1 is a diagram illustrating a metal powder processing device using plasma according to an embodiment of the present invention
  • Figures 2 to 5 show a plasma torch provided in the metal powder processing device using plasma according to an embodiment of the present invention.
  • FIGS. 6 and 7 are drawings for explaining other forms of a metal powder processing apparatus using plasma according to an embodiment of the present invention.
  • the metal powder processing apparatus using plasma includes a process chamber 100, a plasma torch 200, a cyclone separator 300, a storage container 400, etc. It can be included.
  • the process chamber 100 is a chamber in which metal powder, powder transfer gas, and plasma generation gas are supplied to perform spheroidization and cleaning of the metal powder.
  • the inside and outside can be maintained in a sealed state and can be maintained in a vacuum state when necessary.
  • a vacuum pump (not shown) may be provided to maintain the pressure in the range of approximately 10 -3 Torr, and such vacuum pumps may include, for example, a booster pump, a rotary pump, etc.
  • powder transfer gas e.g., argon (Ar) gas, nitrogen (N 2 ) gas, etc.
  • plasma generation gas e.g., argon (Ar) gas, nitrogen (N 2 ) gas, helium (He) gas, mixed gas, etc.
  • the plasma torch 200 is provided in the process chamber 100 and can spray plasma (i.e., thermal plasma) generated in the inner area of the electrode body in a cone shape to perform surface treatment of the metal powder supplied to the central spray area.
  • Thermal plasma is a gas composed of electrons, ions, and neutral particles generated through arc discharge, and the constituent particles can be emitted to have a temperature range of 1000-20000 °C and a speed range of 100-2000 m/s.
  • plasma generation gas is supplied to the area inside the electrode body (i.e., plasma generation area) where thermal plasma is generated, and the thermal plasma generated through this has a cone shape toward the direction of the central spray area (i.e., plasma reaction area). It can be published as .
  • a first negative electrode body 210a, a first positive electrode body 220a, a first insulator 230a, and a first power supply means ( 240a), etc. may be included.
  • the first negative electrode body 210a has a cone shape whose diameter decreases toward the bottom, and metal powder and powder transfer gas can be supplied to the first hollow portion 211a provided in the central portion, and the first power source Power may be supplied by being electrically connected to the supply means 240a.
  • the first hollow portion 211a may be formed penetrating from the upper central portion of the first negative electrode body 210a to the lower portion, and is used to transport metal powder and powder that are introduced into the process chamber 100 and supplied to the upper central portion. Gas may be transferred to the first plasma reaction region B1 located below the first negative electrode body 210a.
  • the first negative electrode body 210a may be provided with a 1-1 cooling channel 212a of a water-cooled structure inside, and the 1-1 cooling channel 212a controls the circulation of the refrigerant inside, During the plasma process, the heated first negative electrode body 210a can be cooled stably and quickly due to the generation of plasma.
  • the first positive electrode body 220a has a cylindrical tube shape surrounding the first negative electrode body 210a and is inclined and spaced apart at a preset interval corresponding to the outer peripheral surface of the first negative electrode body 210a to form a first plasma generation region ( A1) may be provided, and power may be supplied by being electrically connected to the first power supply means 240a.
  • This first plasma generation area (A1) has a uniform diameter or a varying diameter (that is, it narrows from a relatively wide diameter and then narrows again from a relatively wide diameter) along the space between the first negative electrode body (210a) and the first positive electrode body (220a).
  • the plasma generated along this path may be emitted obliquely toward the lower central portion of the first negative electrode body 210a and the first positive electrode body 220a together with the plasma generating gas.
  • the metal powder ( Figure 3(a)) transferred to the central injection area i.e., the first plasma reaction area (B1)
  • the powder surface is cleaned ( Figure 3(b) ))can do.
  • the plasma can be stably generated by dividing the plasma generation area and the reaction area, and the first negative electrode body 210a and the first negative electrode body 210a, as shown in FIG. 4, can be used to maintain a constant reaction with the metal powder. Since the first plasma generation area A1 formed by the positive electrode body 220a is formed in the shape of an inclined cylindrical tube, the plasma emitted into the first plasma reaction area B1 may be emitted in a cone shape.
  • the first positive electrode body 220a may be provided with a 1-2 cooling channel 221a of a water-cooled structure inside, and the 1-2 cooling channel 221a controls the circulation of the refrigerant inside, During the plasma process, the heated first positive electrode body 220a can be cooled stably and quickly due to the generation of plasma.
  • first insulator 230a may be provided on the outer surface of the first negative electrode body 210a and the first positive electrode body 220a, and is in contact with the first hollow portion 211a and the first negative electrode body 210a.
  • first positive electrode body 220a By coating the surface and the outer surface of the first positive electrode body 220a, the inside and outside can be insulated, and through this, it is possible to prevent the metal powder from being contaminated by ions released from the electrode through a plasma reaction.
  • the first insulator 230a is, for example, alumina, zirconia, boron nitride, aluminum nitride, mullite, and rare earth ceramic. At least one selected from among can be used.
  • the first power supply means 240a may be electrically connected to the first negative electrode body 210a and the first positive electrode body 220a to supply power to generate plasma.
  • the plasma torch 200 in another form of the plasma torch 200 as described above, as shown in FIG. 5, it includes a second negative electrode body 210b, a second positive electrode body 220b, a second insulator 230b, and a second power supply means ( 240b), etc. may be included.
  • the second negative electrode body 210b may be provided in the form of a cylindrical tube, and can be inserted and disposed inside the second plasma generation area A2 provided in the second positive electrode body 220b to generate the second plasma. It may be provided with a diameter and thickness corresponding to the area A2, and may be electrically connected to the second power supply means 240b to supply power.
  • the second negative electrode body 210b may be provided with a 2-1 cooling channel 211b of a water-cooled structure inside, and the 2-1 cooling channel 211b is controlled so that the refrigerant circulates inside, During the plasma process, the heated second negative electrode body 210b can be cooled stably and quickly due to the generation of plasma.
  • the second positive electrode body 220b is supplied with metal powder and powder transport gas to the second hollow part 221b provided in the central part, and the upper end is formed with the second negative electrode body 210b so that the second negative electrode body 210b is inserted.
  • ) may be provided with a second plasma generation area (A2) having a cylindrical path corresponding to the diameter and a conical path at the lower end, and may be electrically connected to the second power supply means (240b) to supply power. .
  • plasma may be generated on a cylindrical path at the upper end, and the plasma may be emitted obliquely toward the lower central part of the first positive electrode body 220a along a conical path at the lower end, and this central injection area (That is, the metal powder transferred to the second plasma reaction area (B2)) can be plasma treated to spheroidize the metal powder and at the same time clean the powder surface.
  • a second plasma generation region is formed inside the second positive electrode body 220b so that plasma can be stably generated by dividing the plasma generation region and the reaction region and the reaction with the metal powder can be maintained at a constant level. Since the lower end of (A2) is formed in a cone-shaped path, the plasma emitted into the second plasma reaction area (B2) can be emitted in a cone shape.
  • the second positive electrode body 220b may be provided with a 2-2 cooling channel 222b of a water-cooled structure inside, and the 2-2 cooling channel 222b is controlled so that the refrigerant circulates inside, During the plasma process, the heated second positive electrode body 220a can be cooled stably and quickly due to the generation of plasma.
  • the second insulator 230b may be provided on the outer surface of the second positive electrode body 220b, and the second hollow portion 221b and the surface in contact with the second positive electrode body 220b and the second positive electrode body 220b ) can be coated on the outer surface to insulate the inside and outside, and through this, contamination of the metal powder by ions released from the electrode through plasma reaction can be prevented in advance.
  • the second insulator 230b may use at least one selected from, for example, alumina, zirconia, boron nitride, aluminum nitride, mullite, and rare earth ceramics.
  • the second power supply means 240b may be electrically connected to the second negative electrode body 210b and the second positive electrode body 220b to supply power to generate plasma.
  • each negative electrode body and each positive electrode body of the plasma torch 200 as described above are shown in FIGS. 2 and 3 as having a circular path inside each electrode body, but have a straight path and a partition wall. It goes without saying that not only can it be provided in a form where the input direction and output direction are distinguished based on , but also an applicable structure can be selected and applied among the water cooling channels disclosed previously.
  • the cyclone separator 300 separates the spherical metal powder spheroidized according to surface treatment from the plasma generation gas and powder transfer gas. It has a cylindrical body and is equipped with a diameter that gradually decreases downward, and rotates according to centrifugal force. At the same time as turning movement, it falls according to gravity and takes a spiral shape, thereby maintaining an external swirling flow.
  • the powder particles are separated and can move to the storage container 400 located below depending on their weight.
  • the particle size of this metal powder can be in the size range of approximately 15-45 ⁇ m to be used as a raw material powder for 3D printing in the PBF (powder bed fusion) method, and in the case of DED (direct energy deposition) method, it can be approximately 45 ⁇ m. It can have a size range of -150 ⁇ m.
  • the metal powder having a relatively small weight forms an internal swirling flow along the inner cylindrical tube through an inverted fluid flow to separate the metal powder into a gas (e.g., powder transfer gas, plasma generating gas). etc.) may be discharged together.
  • a gas e.g., powder transfer gas, plasma generating gas.
  • the storage container 400 collects the spheroidized metal powder separated through the cyclone separator 300, and is provided at the lower part of the cyclone separator 300 to collect the spheroidized metal powder that is separated through the cyclone separator 300 and moves downward. and can be saved.
  • the metal powder processing apparatus using plasma may further include at least one additional cyclone separator (300A), at least one additional storage container (400A), etc., as shown in FIG. 6. there is.
  • At least one additional cyclone separator (300A) is coupled to the rear end of the cyclone separator (300) to separate relatively smaller size powder.
  • an additional cyclone separator (300A) may be further provided to collect metal powder of a relatively smaller weight.
  • 1 Metal powders of a relatively smaller size e.g., 1-10 ⁇ m, etc.
  • the size of the primary collected metal powders can be secondaryly separated.
  • At least one additional storage container (400A) collects the powder separated through the additional cyclone separator (300A), and can be additionally provided if an additional cyclone separator (300A) is provided, through which primary collection is carried out.
  • Metal powder with a relatively smaller size e.g., 1-10 ⁇ m, etc.
  • the size of the collected metal powder can be secondaryly collected.
  • the metal powder transfer gas and plasma generation gas are circulated and recovered at the rear end of the cyclone separator 300 for reuse. Additional devices for gas recycling may be provided.
  • the fine powder, powder transfer gas, and plasma generation gas separated through the cyclone separator 300 are moved to the bag chamber 510, and the fine powder is stored in the bag. It can be collected in the back chamber container 520 located at the bottom of the chamber 510, and among these, ultrafine powder and dust can be removed through at least one dust collection filter provided inside the back chamber 510.
  • the powder transport gas and plasma generation gas separated from the fine powder can be flowed into the recycling line through the blower 530 and introduced into the buffer tank 540.
  • the inert gas is supplied to the compressor 550 at a preset flow rate, and the compressor 550 uniformly compresses the supplied inert gas and then supplies it back to the supply gas tank 560, so that the recycled inert gas is stored in the process chamber ( It can be stored in the supply gas tank 560 to be supplied to 100).
  • the plasma generated in the inner area of the electrode body is formed in a cone shape through a plasma torch provided in the process chamber.
  • the surface treatment of the metal powder can be effectively performed by separating the plasma generation area and the plasma reaction area.
  • the metal powder can be treated effectively. Not only can it be effectively spherical, but 3D printing can also clean various reactants attached to the surface of metal powder.
  • Figure 8 is a flow chart showing the process of processing metal powder using plasma according to another embodiment of the present invention.
  • metal powder, powder transfer gas, and plasma generation gas can be supplied to the process chamber 100 (step 810).
  • This process chamber 100 is a chamber where metal powder, powder transfer gas, and plasma generation gas are supplied to perform spheroidization and cleaning of the metal powder, and the inside and outside can be maintained in a sealed state and maintained in a vacuum state when necessary.
  • a vacuum pump (not shown) may be provided to maintain the pressure in the range of approximately 10 -3 Torr, and such vacuum pump may include, for example, a booster pump, a rotary pump, etc.
  • powder transfer gas e.g., argon (Ar) gas, nitrogen (N 2 ) gas, etc.
  • plasma generation gas e.g., Argon (Ar) gas, nitrogen (N 2 ) gas, helium (He) gas, mixed gas, etc.
  • plasma can be generated in the inner area of the electrode body of the plasma torch 200 provided in the process chamber 100 (step 820), and the generated plasma is sprayed in a cone shape to generate metal powder supplied to the central spray area.
  • Surface treatment can be performed (step 830).
  • the plasma torch 200 is provided in the process chamber 100 and sprays plasma (i.e., thermal plasma) generated in the inner area of the electrode body in a cone shape to perform surface treatment of the metal powder supplied to the central spray area.
  • Thermal plasma is a gas composed of electrons, ions, and neutral particles generated through arc discharge, and the constituent particles can be emitted to have a temperature range of 1000-20000 °C and a speed range of 100-2000 m/s.
  • one form of the plasma torch 200 may include a first negative electrode body 210a, a first positive electrode body 220a, a first insulator 230a, a first power supply means 240a, etc.
  • the plasma torch 200 may include a second negative electrode body 210b, a second positive electrode body 220b, a second insulator 230b, and a second power supply means 240b.
  • a third negative electrode body 210c In addition, in another form of the plasma torch 200, a third negative electrode body 210c, a plurality of third positive electrode bodies 220c, a third insulator 230c, a third power supply means 240c, and an inner tube ( 250c), an external tube (260c), etc.
  • the spheroidized metal powder, powder transfer gas, and plasma generation gas spheroidized according to the surface treatment can be separated through the cyclone separator 300 (step 840).
  • this cyclone separator (300) has a cylindrical body with a diameter that gradually decreases downward, and can maintain an external swirl flow by exhibiting a spiral shape while rotating according to centrifugal force and falling according to gravity at the same time.
  • the powder particles are separated and can move to the storage container 400 located below depending on their weight.
  • the particle size of this metal powder can be approximately 15-45 ⁇ m in order to be used as a raw material powder for 3D printing in the PBF method, and in the case of the DED method, it can have a size range of approximately 45-150 ⁇ m. .
  • the metal powder having a relatively small weight forms an internal swirling flow along the inner cylindrical tube through an inverted fluid flow to separate the metal powder into a gas (e.g., powder transfer gas, plasma generating gas). etc.) may be discharged together.
  • a gas e.g., powder transfer gas, plasma generating gas.
  • the separated spheroidized metal powder can be collected in the storage container 400 (step 850).
  • This storage container 400 is provided at the bottom of the cyclone separator 300 and can collect and store the spheroidized metal powder that is separated through the cyclone separator 300 and moves downward.
  • the rear end of the cyclone separator 300 and the process chamber 100 are in communication, so that the metal powder transfer gas and the plasma generation gas can be circulated, recovered, and then reused (step 860).
  • devices for gas recycling may be additionally provided at the rear of the cyclone separator 300, and the fine powder, powder transfer gas, and plasma generation gas separated through the cyclone separator 300 are returned to the back chamber. It is moved to 510, and the fine powder can be collected in the back chamber container 520 located at the lower part of the back chamber 510.
  • the ultra-fine powder and dust are included in at least one item provided inside the back chamber 510. It can be removed through a dust collection filter.
  • the powder transport gas and plasma generation gas separated from the fine powder can be flowed into the recycling line through the blower 530 and introduced into the buffer tank 540.
  • the inert gas is supplied to the compressor 550 at a preset flow rate, and the compressor 550 uniformly compresses the supplied inert gas and then supplies it back to the supply gas tank 560, so that the recycled inert gas is stored in the process chamber ( It can be stored in the supply gas tank 560 to be supplied to 100).
  • the plasma generated in the inner area of the electrode body is formed in a cone shape through a plasma torch provided in the process chamber.
  • the surface treatment of the metal powder can be effectively performed by separating the plasma generation area and the plasma reaction area.
  • the metal powder can be treated effectively. Not only can it be effectively spherical, but 3D printing can also clean various reactants attached to the surface of metal powder.

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  • Engineering & Computer Science (AREA)
  • Manufacture Of Metal Powder And Suspensions Thereof (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Engineering (AREA)
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Abstract

La présente invention concerne un appareil de traitement de poudre métallique utilisant un plasma et son procédé de traitement, l'appareil comprenant : une chambre de traitement, qui est alimentée avec une poudre métallique, un gaz de transfert de poudre et un gaz de génération de plasma ; une torche à plasma, qui est disposée dans la chambre de traitement pour pulvériser du plasma, généré dans la région interne d'un corps d'électrode, en forme de cône pour effectuer un traitement de surface de la poudre métallique fournie à la région de pulvérisation centrale ; un séparateur à cyclone, qui sépare une poudre métallique sphéroïdisée qui est sphéroïdisée par le traitement de surface, le gaz de transfert de poudre et le gaz de génération de plasma ; et un récipient de stockage, qui collecte la poudre métallique sphéroïdisée séparée, de façon à séparer une zone de génération de plasma et une zone de réaction de plasma l'une de l'autre, ce qui permet d'effectuer efficacement le traitement de surface de la poudre métallique, de sphéroïdiser la poudre métallique pour améliorer la fluidité de la poudre métallique, et permettant le nettoyage de divers types de réactifs fixés à la surface de la poudre métallique du fait d'une impression en 3D.
PCT/KR2023/019510 2022-12-01 2023-11-30 Appareil de traitement de poudre métallique utilisant un plasma et son procédé de traitement WO2024117802A1 (fr)

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