WO2024095431A1 - Gripping target object transfer apparatus and cleaning apparatus - Google Patents

Gripping target object transfer apparatus and cleaning apparatus Download PDF

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Publication number
WO2024095431A1
WO2024095431A1 PCT/JP2022/041097 JP2022041097W WO2024095431A1 WO 2024095431 A1 WO2024095431 A1 WO 2024095431A1 JP 2022041097 W JP2022041097 W JP 2022041097W WO 2024095431 A1 WO2024095431 A1 WO 2024095431A1
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WO
WIPO (PCT)
Prior art keywords
nozzle
suction nozzle
gripping
grasped
tray
Prior art date
Application number
PCT/JP2022/041097
Other languages
French (fr)
Japanese (ja)
Inventor
芽未 伊藤
嘉人 伊藤
Original Assignee
株式会社Fuji
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社Fuji filed Critical 株式会社Fuji
Priority to PCT/JP2022/041097 priority Critical patent/WO2024095431A1/en
Publication of WO2024095431A1 publication Critical patent/WO2024095431A1/en

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    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K13/00Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
    • H05K13/04Mounting of components, e.g. of leadless components

Definitions

  • This specification relates to a device for transferring objects to be grasped and a cleaning device.
  • Patent Document 1 discloses a nozzle management device equipped with a nozzle transfer device that transfers the suction nozzle from the nozzle tray to the nozzle pallet (or from the nozzle pallet to the nozzle tray) using a holding chuck. At this time, the suction nozzle is accommodated in the mounting holes of the nozzle tray and the nozzle pallet.
  • this specification discloses a device for transferring objects to be grasped and a cleaning device that can reliably determine whether the placement state of an object to be grasped is normal or not.
  • This specification discloses a device for transferring objects to be grasped, the device comprising a gripping device for gripping an object to be grasped, a placement tray on which the object to be grasped can be placed, and a determination unit that determines whether the placement state of the object to be grasped placed on the placement tray by the gripping device is normal or not.
  • the determination unit is able to determine whether the placement state of the object to be grasped placed on the placement tray by the gripping device is normal or not. Therefore, it is possible to reliably determine whether the placement state of the object to be grasped is normal or not.
  • FIG. 1 is a schematic configuration diagram of a component mounter 10 according to the present disclosure.
  • 2 is a schematic diagram of a mounting head 26.
  • FIG. FIG. 2 is a schematic diagram of a suction nozzle 60.
  • 13 is a plan view showing the nozzle tray 76 with the mounting holes in a closed state.
  • FIG. FIG. 13 is a plan view showing the nozzle tray 76 with the mounting holes open.
  • 11 is a cross-sectional view showing the nozzle tray 76 with the mounting holes closed.
  • FIG. 11 is a cross-sectional view showing a nozzle tray 76 with mounting holes including suction nozzles 60 in a closed state.
  • FIG. FIG. 2 is a schematic diagram of a nozzle management device 80.
  • FIG. 2 is a schematic diagram of a gripping chuck 128.
  • FIG. 2 is a plan view showing the nozzle pallet 110 with the mounting holes in a closed state.
  • FIG. 2 is a plan view showing the nozzle pallet 110 with the mounting holes open.
  • 11 is a cross-sectional view of a portion of the nozzle pallet 110 showing a state in which a large-sized suction nozzle 60c is placed in a placement hole 110c2.
  • FIG. 11 is a cross-sectional view of a portion of the nozzle pallet 110 showing a state in which a medium-sized suction nozzle 60b is placed in a placement hole 110c2.
  • FIG. 11 is a cross-sectional view of a portion of the nozzle pallet 110 showing a state in which a medium-sized suction nozzle 60b is placed in a placement hole 110c3.
  • FIG. 2 is a block diagram showing a nozzle management device 80.
  • 10 is a flowchart showing a program executed by a control device 80a shown in FIG. 9.
  • FIG. 11 is a plan view showing a case where the suction nozzle 60 is normally placed.
  • 13 is a plan view showing a case where the suction nozzle 60 is placed in an abnormal rotation state.
  • FIG. 13 is a plan view showing a case where the suction nozzle 60 is abnormally tilted when placed.
  • the component mounter 10 includes a mounter main body 20, a board transport device (hereinafter, sometimes referred to as a transport device) 22, a mounting head moving device (hereinafter, sometimes referred to as a moving device) 24, a mounting head 26, a component supply device (hereinafter, sometimes referred to as a supply device) 28, and a nozzle station 30.
  • the mounter main body 20 includes a frame section and a beam section.
  • the transport device 22 includes two conveyor devices 40, 42 arranged side by side, each of which transports the substrate S along a transport direction (left-right direction).
  • the width of the conveyor devices 40, 42 along the substrate width direction (front-rear direction) is variable.
  • the substrate S is held at a predetermined position by a substrate holding device (not shown).
  • the moving device 24 is a device that moves the mounting head 26.
  • the moving device 24 includes a pair of left and right Y-axis guide rails 20c that are provided on the upper stage of the mounting machine main body 20 so as to extend along the board width direction, a Y-axis slider 20d that is spanned between the pair of Y-axis guide rails 20c, an X-axis guide rail 20a that is provided on the Y-axis slider 20d so as to extend along the transport direction, and an X-axis slider 20b that is attached to the X-axis guide rail 20a.
  • the X-axis slider 20b is driven by an X-axis actuator (not shown), and the Y-axis slider 20d is driven by a Y-axis actuator (not shown).
  • the mounting head 26 is attached to the X-axis slider 20b, and moves in the horizontal direction by being driven by the X-axis actuator and the Y-axis actuator.
  • the mounting head 26 is fitted with multiple suction nozzles 60 for mounting components (electronic components) P to a board S.
  • the mounting head 26 is, for example, a rotary head, and includes a head body 26a with multiple holders 26b arranged in the circumferential direction, an R-axis actuator 26c for rotating the head body 26a (revolving the holders 26b), a ⁇ -axis actuator 26d for rotating (spinning) the holders 26b, and a Z-axis actuator 26e for raising and lowering the holders 26b.
  • a replaceable suction nozzle 60 is fitted to the tip of the holder 26b.
  • the suction nozzle 60 is connected to a positive and negative pressure supply device (not shown) through negative pressure air and positive pressure air passages.
  • the suction nozzle 60 sucks and holds the part P by negative pressure, and releases the held part P by positive pressure. That is, the suction nozzle 60 sucks and holds the part P in a releasable manner.
  • the suction nozzle 60 includes a body tube 64, a flange portion 66, a suction tube 68, and a locking pin 70.
  • the body tube 64 is cylindrical, and the flange portion 66 is fixed to the outer circumferential surface of the body tube 64 so as to protrude from it.
  • the suction tube 68 is shaped like a thin pipe, and is held by the body tube 64 so as to be movable along the axial direction while extending downward from the lower end of the body tube 64.
  • the latch pin 70 is provided at the upper end of the body tube 64 so as to extend in the radial direction of the body tube 64.
  • the suction nozzle 60 is attached to the mounting head 26 in a one-touch, detachable manner using the latch pin 70.
  • the mounting head 26 also has a built-in spring (not shown), which applies an elastic force to the suction tube 68 of the suction nozzle 60 attached to the mounting head 26. As a result, the suction tube 68 is biased in a direction extending downward from the lower end of the body tube 64 by the elastic force of the spring built into the mounting head 26.
  • a 2D code 74 is also attached to the top surface of the flange portion 66.
  • the 2D code 74 indicates, as individual information, the ID (identification) of the suction nozzle 60, the manner of air blowing (for example, the air blowing direction, the air blowing time, and the number of times air blowing is repeated), and the like.
  • a barcode or an RF tag may be attached to the top surface of the flange portion 66.
  • a reader for acquiring individual information from the RF tag is attached to the transfer head 120 (see FIG. 5) of the nozzle management device 80 described below.
  • a notch (cutout) 75 is provided on the outer periphery of the flange portion 66, and this notch 75 engages with a short pin 76e erected on the stepped surface 76d of the nozzle tray 76 (or a short pin 110e erected on the stepped surface 110d of the nozzle pallet 110), which will be described later.
  • These notches 75 and pins 76e (pins 110e) ensure that the suction nozzle 60 can only be placed in a specific orientation, and also prevent the suction nozzle 60 from rotating when placed on the nozzle tray 76 (or nozzle pallet 110).
  • suction nozzles 60 that differ from each other in size and shape, and this component mounter 10 can also attach several types of suction nozzles 60 of different sizes to the holder 26b, and this component mounter 10 can automatically replace these several types of nozzles depending on the component P to be sucked and held.
  • the suction nozzle 60 used varies depending on the electric circuit (substrate S with components P mounted) to be manufactured.
  • the multiple suction nozzles 60 used in the component mounter 10 are placed on a nozzle tray 76 in a nozzle station 30 provided in the component mounter 10 next to the component supply device 16.
  • the supply device 28 is removably mounted on a feeder table (not shown) installed at the front of the component mounter 10.
  • the supply device 28 is a feeder-type supply device and has multiple tape feeders 72.
  • the tape feeder 72 is equipped with a carrier tape in which components are housed in multiple cavities formed at predetermined intervals, a reel around which the carrier tape is wound, and a tape feeding device that unwinds and feeds out the carrier tape from the reel.
  • the nozzle station 30 has a nozzle tray 76 (hereinafter, may be simply referred to as a "tray").
  • the nozzle tray 76 accommodates a plurality of suction nozzles 60.
  • the suction nozzles 60 attached to the mounting head 26 are replaced with the suction nozzles 60 accommodated in the nozzle tray 76 as necessary.
  • the nozzle tray 76 is detachable from the nozzle station 30, and the suction nozzles 60 accommodated in the nozzle tray 76 can be collected and the nozzle tray 76 can be replenished with suction nozzles 60 outside the component mounter 10 (for example, by a nozzle management device 80).
  • the tray 76 functions as a nozzle mount for placing the suction nozzle 60 (it may also be called a mount tray on which the suction nozzle 60 can be placed), and is generally plate-shaped as shown in FIG. 4. More specifically, the tray 76 includes a base plate 76a and a cover plate 76b that covers the upper surface of the base plate 76a, and the cover plate 76b is able to slide to a certain extent relative to the base plate 76a.
  • FIG. 4A shows a state in which the cover plate 76b is misaligned with respect to the base plate 76a
  • FIG. 4B shows a state in which the cover plate 76b is exactly overlapping the base plate 76a.
  • the cover plate 76b is able to slide between the positions in each of these two states.
  • the base plate 76a is provided with 12 mounting holes 76c, each of which constitutes a mounting portion. More specifically, the tray 76 is capable of mounting two types of suction nozzles 60 of different sizes, and is provided with four mounting holes 76c for mounting the larger suction nozzle 60 and eight mounting holes 76c for mounting the smaller suction nozzle 60.
  • the mounting holes 76c are stepped holes whose inner walls have different depths, and the stepped surface 76d is the surface on which the flange portion 66 of the suction nozzle 60 is placed.
  • the inner diameter of the mounting hole 76c in the upper surface of the base plate 76a i.e., the maximum inner diameter, is slightly larger than the outer diameter of the flange portion 66, and the mounting hole 76c is configured to restrict radial displacement (misalignment) of the suction nozzle 60 at the outer periphery of the flange portion 66.
  • the depth to the step surface 76d is set so that the flange portion 66 of the suction nozzle 60 placed in the mounting hole 76c does not interfere with the cover plate 76b.
  • the suction nozzle 60 shown in the figure has a flange portion 66 that is thinner than the depth to the step surface 76d, and when the suction nozzle 60 is placed in the mounting hole 76c, the upper surface of the flange portion 66 does not protrude from the upper surface of the base plate 76a of the tray 76.
  • the cover plate 76b is provided with a cutout hole 76f corresponding to the mounting hole 76c of the base plate 76a.
  • This cutout hole 76f is composed of a circular hole portion 76f1 and a slot portion 76f2 extending from one side of the circular hole portion 76f1.
  • the inner diameter of each circular hole portion 76f1 is approximately equal to the maximum inner diameter of the corresponding mounting hole 76c.
  • the width of the slot portion 76f2 is somewhat larger than the outer diameter of the body tube 64 of the suction nozzle 60 placed in the corresponding mounting hole 76c.
  • the suction nozzle 60 When the mounting hole is open, the suction nozzle 60 can be placed in and removed from the mounting hole 76c.
  • closing the mounting hole causes the body tube 64 of the suction nozzle 60 to pass through the slot portion 76f2 of the extraction hole 76f, while most of the upper surface of the flange portion 66 is covered by the cover plate 76b. In this state, the suction nozzle 60 is prevented from coming off the mounting hole 76c.
  • the tray 76 is provided with a mechanism that includes the cover plate 76b, that is, a nozzle removal prevention mechanism known as a shutter mechanism 170.
  • the cover plate 76b is biased by a spring (not shown) so that the mounting hole is closed, and the mounting hole is opened by sliding the cover plate 76b with a force exceeding the biasing force of the spring.
  • This sliding is performed by a cover sliding mechanism (not shown) arranged in the nozzle station 30.
  • the mounting hole open state is achieved by controlling the cover sliding mechanism by the control device of the component mounter 10, and the attachment of the suction nozzle 60 to the holder 26b of the mounting head 26, the removal of the suction nozzle 60 from the holder 26b, and the replacement of the attached suction nozzle 60 with another suction nozzle 60 are all performed.
  • the tray 76 is detachable from the nozzle station 30.
  • the tray 76 with the suction nozzle 60 placed on it can be set in the nozzle station 30.
  • the suction nozzle 60 that was used can be removed from the nozzle station 30 along with the tray 76. Therefore, the tray 76 contributes greatly to speeding up the changeover of the component mounter 10.
  • a 2D code (not shown) is attached to one corner of the base plate 76a as an identifier for recognizing the unique information of the tray 76. This 2D code indicates the ID of the tray 76 as a type of unique information, and the ID is used to manage the tray 76 individually.
  • the suction nozzle 60 and tray 76 described above are used in the component mounter 10.
  • the management machine in the embodiment shown below is intended not only for the suction nozzle 60 used in the component mounter 10, but also for the suction nozzle 60 used in other mounting machines.
  • the tray 76 is an example of a tray 76 used in the component mounter 10, and the component mounter 10 can also use other trays 76 of different types. Furthermore, the tray 76 used varies depending on the mounting machine. As will be explained later, the management machine in the embodiment also manages suction nozzles 60 that are placed or will be placed on other trays 76.
  • the nozzle management device 80 is a device for managing the suction nozzles 60, and as shown in Fig. 5, has a management device main body 90, a pallet storage device 92, a nozzle transfer device 94, a nozzle inspection device 96, a nozzle cleaning device 98, and a nozzle drying device 100.
  • the management device main body 90 comprises a frame section 102 and a beam section 104 suspended from the frame section 102.
  • the frame section 102 has a hollow structure, and the pallet storage device 92 is disposed within the frame section 102, with the upper end of the pallet storage device 92 exposed on the upper surface of the frame section 102.
  • the pallet storage device 92 includes a plurality of pallet placement shelves 106 and a support arm 108.
  • the pallet placement shelves 106 are shelves for placing nozzle pallets (hereinafter, sometimes simply referred to as "pallets") 110, and the plurality of pallet placement shelves 106 are arranged vertically inside the frame section 102.
  • the pallets 110 store a plurality of suction nozzles 60.
  • the support arm 108 moves vertically in front of the plurality of pallet placement shelves 106 and approaches and moves away from the pallet placement shelves 106 by the operation of an arm movement device (not shown).
  • an arm movement device not shown
  • the pallets 110 are stored in the pallet placement shelves 106 and removed from the pallet placement shelves 106 by the support arm 108.
  • the pallets 110 removed from the pallet placement shelves 106 are moved to the upper surface side of the frame section 102 by the upward movement of the support arm 108.
  • the nozzle transfer device 94 is a device for transferring the suction nozzle 60 between the tray 76 and the pallet 110, and is disposed in the beam section 104.
  • the nozzle transfer device 94 has a transfer head 120 and a head moving device 122.
  • a camera 126 facing downward, a gripping chuck 128 for gripping the suction nozzle 60, and an air supply device 130 are attached to the lower end surface of the transfer head 120.
  • the camera 126 is a first imaging device that captures images of the suction nozzles 60 placed on the pallet 110 or the tray 76 (loading tray).
  • the pallet 110 functions as a nozzle mount for mounting the suction nozzle 60 (or may be called a mount tray on which the suction nozzle 60 can be mounted), and as shown in Fig. 7, like the tray 76 described above, is configured to include a base plate 110a and a cover plate 110b that covers the upper surface of the base plate 110a.
  • Fig. 7A shows a state in which the cover plate 110b is misaligned with respect to the base plate 110a
  • Fig. 7B shows a state in which the cover plate 110b is exactly overlapped with the base plate 110a.
  • the cover plate 110b is slidable between the positions in these two states.
  • the management device 80 treats the three sizes of suction nozzles 60 as objects to be managed, and all three types of suction nozzles 60 can be placed on the pallet 110.
  • the three types of suction nozzles 60 differ from one another in shape and can be classified into three types based on the outer diameter of the flange portion 66. Specifically, they can be classified into a small size suction nozzle 60a (not shown), a medium size suction nozzle 60b shown in FIG. 8B, and a large size suction nozzle 60c shown in FIG. 8A.
  • the base plate 110a is provided with mounting holes 110c, each of which constitutes a mounting portion, in the same manner as the tray 76. Specifically, 40 mounting holes 110c1 in which small-sized suction nozzles 60a are mounted, and 28 mounting holes 110c2 in which large-sized suction nozzles 60 are mounted are provided, with the suction nozzles 60a being mounted in the mounting holes 110c1, and the suction nozzles 60b, 60c being mounted in the mounting holes 110c2.
  • the mounting hole 110c1 is similar to the mounting hole 76c of the tray 76 described above, and has one step surface 110d and pin 110e, so a description thereof will be omitted here.
  • the mounting hole 110c2 is a stepped hole whose inner wall has different depth dimensions, and more specifically, is a stepped hole having two step surfaces 110d1 and 110d2. As shown in FIG. 8A, the large-sized suction nozzle 60c is placed on the step surface 110d1 located at the top, while as shown in FIG. 8B, the medium-sized suction nozzle 60b is placed on the step surface 110d2 located at the bottom.
  • both of the stepped surfaces 110d1 and 110d2 are surfaces on which the suction nozzle 60 is placed, and the mounting hole 110c2 is configured so that the inner wall has different internal dimensions in the depth direction, and the flange portions 66 of multiple types of suction nozzles 60, each of which has a different outer diameter of the flange portion 66, can be fitted at positions of different depths.
  • the mounting hole 110c2 is configured to regulate the radial displacement (displacement) of each of the suction nozzles 60 at the outer periphery of the flange portion 66, and both of the stepped surfaces 110d1 and 110d2 have pins 110e that engage with the notches 75 of the flange portion 66 to prevent the suction nozzle 60 from rotating.
  • a mounting hole 110c3 that is a tapered hole in which the inner dimension of the inner wall gradually decreases in the axial direction, i.e., in the depth direction, as shown in FIG. 8C.
  • the flange portions 66 of multiple types of suction nozzles 60 are configured to fit at different depths.
  • the figure shows a state in which a medium-sized suction nozzle 60b is placed, and when a large-sized suction nozzle 60c is placed, it will be placed in a position above the suction nozzle 60b.
  • the cover plate 110b is provided with holes 110f1 and 110f2, each having a circular hole portion 110g and a slot portion 110h, corresponding to the mounting holes 110c1 and 110c2 of the base plate 110a, similar to the tray 76.
  • the center of each mounting hole 110c coincides with the center of the circular hole portion 110g of the corresponding hole 110f, realizing the mounting hole open state described above, and in the state shown in FIG. 7A, the center of each mounting hole 110c coincides with the center of the arc at the tip of the slot portion 110h of the corresponding hole 110f, realizing the mounting hole closed state.
  • the pallet 110 is also provided with a mechanism including the cover plate 110b for preventing the suction nozzle 60 from coming off, that is, a nozzle coming off prevention mechanism called a shutter mechanism 170 (see FIG. 9).
  • a mechanism including the cover plate 110b for preventing the suction nozzle 60 from coming off that is, a nozzle coming off prevention mechanism called a shutter mechanism 170 (see FIG. 9).
  • the cover plate 110b is biased by a spring (not shown) so that the mounting hole is closed, and the mounting hole is opened by sliding the cover plate 110b with a force exceeding the biasing force of the spring using a cylinder (not shown).
  • the pallet 110 has a 2D code (not shown) attached to one corner of the base plate 110a as an identifier for recognizing the unique information of the pallet 110.
  • This 2D code indicates the ID of the pallet 110 as a type of unique information, and the ID is used to manage the pallet 110 individually.
  • the gripping chuck 128 is a chuck device (i.e., a gripping device) for releasably gripping an object to be gripped.
  • the gripping chuck 128 has a plurality of gripping jaws 132 (three in this embodiment) and a gripping chuck main body 134.
  • the gripping chuck 128 grips the suction nozzle 60, which is the object to be gripped, at the body tube 64 by bringing the gripping jaws 132 close to each other, and releases the gripped suction nozzle 60 by moving the gripping jaws 132 apart.
  • the gripping jaws 132 are arranged at a predetermined angle (120 degrees in this embodiment).
  • the number of gripping jaws 132 is not limited to three, and may be two or four as long as there are multiple jaws. In this case, it is preferable that the gripping jaws 132 are arranged at a predetermined angle according to the number of jaws (90 degrees in the case of four jaws).
  • a suction nozzle 60 is used as the object to be grasped by the gripping device, it is not limited to a suction nozzle 60, and any member that has a cylindrical or other tubular part and can be grasped by a chuck device can be used.
  • the head moving device 122 is an XYZ type moving device that moves the transfer head 120 in the front-back, left-right, and up-down directions on the frame section 102.
  • a fixed stage 131 for setting the nozzle tray 76 is provided on the upper surface of the front side of the frame section 102, and the suction nozzle 60 is transferred between the nozzle tray 76 set on the fixed stage 131 and the nozzle pallet 110 supported by the support arm 108 of the pallet storage device 92.
  • the nozzle inspection device 96 has a camera 140, a load cell 142, and a joint 146.
  • the camera 140 is disposed on the upper surface of the frame portion 102 facing upward, and the tip of the suction nozzle 60 is inspected using the camera 140.
  • the suction nozzle 60 to be inspected is held by the gripping chuck 128, and the suction nozzle 60 held by the gripping chuck 128 is imaged from below by the camera 140. In this way, image data of the tip of the suction nozzle 60 is obtained, and the condition of the tip of the suction nozzle 60 is inspected based on the image data.
  • the load cell 142 is disposed next to the camera 140, and is used to inspect the expansion and contraction state of the tip of the suction nozzle 60 (in other words, the sliding property of the suction tube 68).
  • the suction nozzle 60 to be inspected is held by the gripping chuck 128, and the tip of the suction nozzle 60 held by the gripping chuck 128 is abutted against the load cell 142.
  • the tip of the suction nozzle 60 is capable of expanding and contracting, and the expansion and contraction state of the tip of the suction nozzle 60 is inspected based on the load measured by the load cell 142.
  • the joint 146 is also disposed on the underside of the air supply device 130, and air is supplied from the air supply device 130. An air flow inspection of the suction nozzle 60 is then performed using air supplied from the air supply device 130 to the joint 146.
  • the joint 146 is moved above the suction nozzle 60 placed on the cleaning pallet 158, which will be described later, by the operation of the head moving device 122.
  • the joint 146 is then connected to the suction nozzle 60 to be inspected, and air is supplied from the air supply device 130. At this time, the air pressure is measured, and an air flow inspection of the suction nozzle 60 is performed based on the air pressure.
  • a number of disposal boxes 148 are provided on the upper surface of the frame portion 102, and suction nozzles 60 determined to be defective by the above inspection are disposed of in the disposal boxes 148.
  • suction nozzles 60 determined to be normal by the above inspection are returned to the nozzle tray 76 set on the fixed stage 131 or the nozzle pallet 110.
  • the nozzle cleaning device 98 is a device that cleans and dries the suction nozzles 60, and is disposed next to the pallet storage device 92.
  • the nozzle cleaning device 98 is equipped with a cleaning and drying mechanism 150 and a cleaning pallet moving mechanism 152.
  • the cleaning and drying mechanism 150 is a mechanism that cleans and dries the suction nozzles 60 inside.
  • the cleaning pallet moving mechanism 152 is a mechanism that moves the cleaning pallet 158 between an exposed position where the cleaning pallet 158 is exposed (the position where the cleaning pallet 158 is illustrated in Figure 5) and the interior of the cleaning and drying mechanism 150.
  • the nozzle drying device 100 is a device that dries the suction nozzle 60 and is disposed next to the cleaning pallet 158 that is positioned in the exposed position.
  • the nozzle management device 80 includes a control device 80a.
  • the control device 80a is a control device that drives and controls the pallet storage device 92, the nozzle transfer device 94, the nozzle inspection device 96, the nozzle cleaning device 98, and the nozzle drying device 100.
  • the control device 80a drives the nozzle transfer device 94 (the gripping chuck 128) to transfer the suction nozzle 60, determines whether the placement state of the suction nozzle 60 placed on the placement tray by the gripping chuck 128 is normal (determination unit), and when it is determined that the placement state is not normal, restores the placement state of the suction nozzle 60 to the normal state (recovery unit).
  • control device 80a is connected to an input device 80b, a display device 80c, a storage device 80d, a camera (imaging device) 126, a nozzle transfer device 94 (head moving device 122, gripping chuck 128), and a shutter mechanism 170.
  • the input device 80b is provided on the front of the nozzle management device 80 and allows the operator (user) to input various settings and instructions to the control device 80a.
  • the display device 80c is provided on the front of the nozzle management device 80 and displays information such as the operating status and maintenance status to the operator.
  • the storage device 80d stores data related to the control of the nozzle management device 80, such as the control program (machining program), parameters used in the control program, data related to various settings and instructions, imaging data, etc. (storage unit).
  • the control device 80a has a microcomputer (not shown), which is equipped with an input/output interface, a CPU, a RAM, and a ROM (all not shown), each of which are connected via a bus.
  • the CPU executes various programs to obtain data, detection signals, control information, etc. from the input device 80b, the storage device 80d, the camera 126, and the shutter mechanism 170, and controls the display device 80c, the nozzle transfer device 94, and the shutter mechanism 170.
  • the RAM temporarily stores variables necessary for executing the programs, and the ROM stores the programs.
  • the control device 80a includes a judgment unit 80a1 and a recovery unit 80a2.
  • the judgment unit 80a1 judges whether the placement state of the suction nozzle 60 placed on the placement tray by the gripping chuck 128 is normal or not.
  • the recovery unit 80a2 recovers the placement state of the suction nozzle 60 to the normal state when the judgment unit 80a1 judges that the placement state is not normal.
  • step S102 the control device 80a transfers the suction nozzle 60 of the tray 76 to the pallet 110. Specifically, the control device 80a drives the head moving device 122 to move the gripping chuck 128 directly above the suction nozzle 60 to be transferred. Next, the control device 80a lowers the gripping chuck 128 to grip the suction nozzle 60, and then raises it to the raised position while still gripping it.
  • the control device 80a drives the shutter mechanism 170 to open the cover plate 110b to the mounting hole open state, thereby opening the shutter.
  • the control device 80a drives the head moving device 122 to move the gripping chuck 128 gripping the suction nozzle 60 directly above the mounting hole 110c of the transfer destination of the pallet 110.
  • the gripping chuck 128 is lowered to the lowered position (released position) to release (insert) the suction nozzle 60 into the transfer destination mounting hole 110c, and then the gripping chuck 128 that is not gripping the suction nozzle 60 is raised to the raised position.
  • step S104 the control device 80a uses the camera 126 to capture an image of the placement state of the suction nozzle 60 in the placement hole 110c.
  • the control device 80a can store the captured image data in the storage device 80d.
  • step S106 the control device 80a performs a determination as to whether the placement state of the suction nozzle 60 placed in the placement hole 110c of the pallet 110 (placement tray) by the gripping chuck 128 is normal or not (determination unit).
  • the control device 80a makes the above-mentioned judgment based on the imaging results (imaging data) captured by the camera 126 (first imaging device).
  • the control device 80a makes the above-mentioned judgment based on imaging data relating to a predetermined location (part) of the pallet 110 or a predetermined location (part) of the suction nozzle 60.
  • the pin 110e is preferable as the predetermined location of the pallet 110
  • the upper end of the body tube 64 is preferable as the predetermined location of the suction nozzle 60
  • the inner tube 64a of the body tube 64 is even more preferable.
  • step S106 the control device 80a determines whether the placement of the nozzle 60 is normal or abnormal.
  • the control device 80a identifies (recognizes) the pin 110e from the imaging data (image data), and also identifies the upper end and notch 75 of the body tube 64 (or inner tube 64a). Based on the presence or absence of the identified pin 110e, the control device 80a then determines whether the nozzle 60 is not in a normal rotation position but is in an abnormal rotation position deviated from the normal rotation position, that is, whether there is a rotation abnormality, calculates the center coordinate P1 of the identified body tube 64, and determines whether the nozzle 60, i.e., the body tube 64, is tilted abnormally, based on the calculated coordinates.
  • the control device 80a can identify the pin 110e from the image data as shown in FIG. 11A, and can calculate the center coordinates of the body tube 64. Note that the latch pin 70 and 2D code 74 are omitted in FIG. 11.
  • the controller 80a detects the presence of the recognized pin 110e, it can determine that the pin 110e is contained within the notch 75 of the nozzle 60, and determines that the nozzle 60 is in a normal rotation position. Furthermore, if the calculated central coordinates of the body tube 64 match the pre-stored design values, the controller 80a determines that the nozzle 60, i.e., the body tube 64, is not tilted and is normal (normal tilt state). In this way, if the controller 80a detects the presence of the recognized pin 110e and the central coordinates of the body tube 64 match the design values, the controller 80a determines that the placement of the nozzle 60 is normal.
  • control device 80a can identify the notch 75, it can calculate the center coordinate of the notch 75 and calculate the rotational deviation angle ⁇ from the calculated center coordinate of the notch 75, the center coordinate of the body tube 64, and the design value of the pin 110e (a value stored in advance). The control device 80a also verifies that the calculated center coordinate of the body tube 64 is within an allowable range for the design value. If it is not within the allowable range, it can be determined that the nozzle 60 has an abnormal tilt, as described below.
  • the control device 80a determines that the nozzle 60, i.e., the body tube 64, is not tilted and is normal. On the other hand, if the recognized pin 110e is not present, it can be determined that the pin 110e is not contained within the notch 75 of the nozzle 60, and the nozzle 60 is determined to be in an abnormal rotation position. In this way, even if the center coordinates of the body tube 64 match the design values, if the recognized pin 110e is not present, the control device 80a determines that the nozzle 60 is placed in an abnormal rotation position.
  • the control device 80a can calculate the center coordinate P1 of the body tube 64 (a value shifted from the design value P1ref) from the image data shown in FIG. 11C. Note that if the pin 110e is housed within the notch 75, the pin 110e is also imaged, but if the flange portion 66 of the nozzle 60 covers the pin 110e, the pin 110e cannot be imaged at all.
  • the control device 80a determines that the nozzle 60, i.e., the body tube 64, is not tilted and is normal. On the other hand, if the calculated center coordinate P1 of the body tube 64 is not within the tolerance range of the pre-stored design value P1ref (if there is a central axis misalignment), the control device 80a determines that the nozzle 60, i.e., the body tube 64, is tilted and has an abnormal tilt.
  • the nozzle 60 will tilt because the flange portion 66 comes into contact with the upper end of the pin 110e, so it is estimated that the probability of determining that there is an abnormal tilt is relatively high. Therefore, it is also possible to check only for the central axis deviation of the nozzle 60 without checking for the presence or absence of the pin 110e.
  • step S108 When the control device 80a judges that the nozzle 60 to be judged is in a normal state, the control device 80a advances the program to step S108, and closes the shutter by driving the shutter mechanism 170 to close the cover plate 110b in the mounting hole. At this time, since the nozzle 60 is normally placed in the mounting hole 110c of the pallet 110, even if the shutter is closed, the cover plate 110b does not close. In addition, since the shutter is closed every time the nozzle 60 is placed, the placed nozzle 60 is covered by the cover plate 110b, and it is possible to reliably prevent the nozzle 60 in a normal state from becoming abnormal or jumping out.
  • the open/closed state of the shutter can be detected by an open sensor provided at the open end of the cover plate 110b to detect the open state, and a close sensor provided at the closed end of the cover plate 110b to detect the closed state. If the close sensor does not detect the closed state when a close command to close the shutter is executed, it is possible to determine whether the shutter is closed. If the open sensor does not detect the open state when an open command to open the shutter is executed, it is possible to determine whether the shutter is open.
  • control device 80a returns the program to step S102 and performs a judgment on the next nozzle 60 to be judged. In this way, the control device 80a performs the above judgment every time a nozzle 60 is placed on the pallet 110 (loading tray). The control device 80a also repeats the processing of steps S102 to S108 until it has finished judging all of the nozzles 60.
  • step S106 determination unit 80a1
  • the control device 80a restores the placement state of the nozzle 60 to the normal state (recovery unit).
  • the control device 80a uses the gripping chuck 128 to restore the placement state of the nozzle 60.
  • step S110 the control device 80a determines whether the number of abnormality determinations has reached a predetermined number (for example, Na times), and if the number of abnormality determinations is equal to or greater than the predetermined number, the control device 80a determines "YES" in step S110 and advances the program to step S114 to perform an error stop process.
  • the error stop process is a process for transmitting an error and stopping the transfer of the nozzle 60.
  • step S110 determines "NO" in step S110 and advances the program to step S112 to perform rotation correction processing.
  • step S112 the control device 80a drives the head moving device 122 to move the gripping chuck 128 directly above the suction nozzle 60 that requires rotation correction processing (that has been determined to have a rotation abnormality).
  • the control device 80a lowers the gripping chuck 128 to grip the suction nozzle 60, and raises it to the raised position while still gripping it.
  • control device 80a drives the head moving device 122 to rotate the nozzle 60, which is in the abnormal rotation position, by the rotation deviation angle ⁇ calculated as described above to the normal rotation position, thereby correcting the rotation position of the nozzle 60.
  • the gripping chuck 128 is lowered to the lowered position (released position) to release (insert) the suction nozzle 60 into the destination mounting hole 110c, and then the gripping chuck 128 that is not gripping the suction nozzle 60 is raised to the raised position.
  • control device 80a returns the program to step S104 and after, captures an image of the placement state of the nozzle 60 that has been restored (step S104), and determines the placement state based on the captured image data (step S106).
  • step S116 Similar to step S110 described above, the control device 80a determines whether the number of abnormality judgments has reached a predetermined number (e.g., Na times), and if the number of abnormality judgments is equal to or greater than the predetermined number Na, the control device 80a determines "YES" in step S116, advances the program to step S114, and carries out error stop processing.
  • a predetermined number e.g., Na times
  • step S116 the control device 80a determines "NO" in step S116, advances the program to step S118 and onward, and performs tilt correction (re-gripping) processing.
  • step S118 the control device 80a drives the head moving device 122 to move the gripping chuck 128 directly above the suction nozzle 60 that requires tilt correction processing (determined to have an abnormal tilt).
  • the control device 80a lowers the gripping chuck 128 to grip the suction nozzle 60, and then releases it to re-grrip the suction nozzle 60.
  • the control device 80a may image the placement state of the suction nozzle 60 using an imaging device and perform the above-mentioned determination based on the imaging result.
  • control device 80a repeats the re-gripping a predetermined number of times (for example, Nb times). If the number of re-gripping times is less than the predetermined number Nb, the control device 80a judges "NO" in step S120, returns the program to step S118, and re-gripping the suction nozzle 60. On the other hand, if the number of re-gripping times is equal to or greater than the predetermined number Nb, the control device 80a judges "YES" in step S120, returns the program to step S104 and subsequent steps, images the placement state of the recovered nozzle 60 (step S104), and determines the placement state based on the image data (step S106). After performing re-gripping Nb times, the control device 80a raises the gripping chuck 128 that is not gripping the suction nozzle 60 to the raised position.
  • a predetermined number of times for example, Nb times.
  • the device that includes the above-mentioned gripping chuck 128 (gripping device), pallet 110 (loading tray), and judgment unit 80a1 and that transfers the suction nozzle 60 (grasped object) is the gripping object transfer device, and in this embodiment, this corresponds to the nozzle management device 80 that includes the gripping object transfer device.
  • the nozzle management device 80 includes the above-mentioned gripping object transfer device and the nozzle cleaning device 98 that cleans the suction nozzle 60 (grasped object), it can be said to be the cleaning device disclosed in this specification.
  • the nozzle management device 80 judges the placement state of the suction nozzle 60, but the component mounter 10 may also perform this judgment.
  • the component mounter 10 is capable of gripping the suction nozzle 60 at the tip of the holder 26b, an imaging device 25 (first imaging device) that images the suction nozzle 60 placed on the nozzle tray 76 is provided at the lower end of the mounting head 26, and a control device (not shown) that judges the placement state of the suction nozzle 60 based on the image data is provided.
  • the control device judges the placement state of the suction nozzle 60 placed on the nozzle tray 76 by the holder 26b, similarly to the control device 80a.
  • the imaging device 25 is for imaging the mark attached to the board S.
  • an imaging device is used to image the placement state of the suction nozzle 60 placed on the placement tray, and the above judgment is made based on the imaging results (image data).
  • a three-dimensional measuring device may be used to measure the placement state of the suction nozzle 60 placed on the placement tray, and the above judgment may be made based on the measurement results (measurement data).
  • Three-dimensional measuring devices include contact type (touch probe) and non-contact type (scanning laser probe type or optical type).
  • a first imaging device e.g., a CCD camera
  • a second imaging device 126a capable of capturing an image of a wider imaging range than the standard imaging range may also be used.
  • An example of the second imaging device is a CCD camera with a wide-angle lens.
  • the second imaging device 126a is capable of capturing an image of multiple suction nozzles 60 placed on the loading tray at once.
  • the control device 80a performs the above judgment based on the image captured by the second image capture device 126a.
  • the control device 80a does not perform the above judgment of the placement state every time the suction nozzle 60 is released (inserted into the placement hole 110c), but can perform the above judgment after transferring (inserting) all (or a part of multiple) of the suction nozzles 60 to be placed (transferred) into the placement hole 110c.
  • the control device 80a transfers all of the suction nozzles 60 to be placed (transferred).
  • the control device 80a captures images of the multiple suction nozzles 60 placed on the pallet 110 at once.
  • control device 80a performs the above judgment for each suction nozzle 60. Furthermore, the control device 80a performs recovery processing for the suction nozzles 60 determined to be in an abnormal state, grouping them by abnormality type. Thereafter, the shutter closing processing is performed in the same manner as in the above step S108.
  • the placement state is determined each time the suction nozzle 60 is released (inserted into the placement hole 110c), but after multiple suction nozzles 60 are transferred, the first imaging device may be used to image the suction nozzles 60 all at once, and the above-described determination may be made based on the imaging results.
  • the gripping object transfer device (nozzle management device 80) according to the embodiment described above comprises a gripping device (gripping chuck 128) for gripping the gripping object (suction nozzle 60), a loading tray (tray 76 or pallet 110) on which the suction nozzle 60 can be placed, and a judgment unit 80a1 (control device 80a: step S106) that judges whether the loading condition of the suction nozzle 60 placed on the pallet 110 (or tray 76) by the gripping chuck 128 is normal or not.
  • the judgment unit 80a1 (control device 80a: step S106) can judge whether the placement state of the suction nozzle 60 placed on the pallet 110 (or tray 76) by the gripping chuck 128 is normal or not. Therefore, it can be reliably judged whether the placement state of the suction nozzle 60 is normal or not.
  • this embodiment further includes a first imaging device (camera 126) that images the suction nozzle 60 placed on the pallet 110 (or tray 76), and the determination unit 80a1 (controller 80a: step S106) performs the above determination based on the image captured by the camera 126.
  • a first imaging device camera 1266 that images the suction nozzle 60 placed on the pallet 110 (or tray 76)
  • the determination unit 80a1 controls the above determination based on the image captured by the camera 126.
  • the judgment unit 80a1 (controller 80a: step S106) makes the above judgment based on the image capturing results of a predetermined location on the pallet 110 (or tray 76) or a predetermined location on the suction nozzle 60. This makes it possible to obtain the image capturing results simply and stably, and therefore makes it possible to reliably make the above judgment.
  • the judgment unit 80a1 (controller 80a: step S106) performs the above judgment each time the suction nozzle 60 is placed on the pallet 110 (or tray 76). This makes it possible to reliably perform the steps from transferring the suction nozzle 60 to the above judgment one by one.
  • this embodiment further includes a recovery unit 80a2 (controller 80a: steps S112 and S118) that restores the placement state of the suction nozzle 60 to a normal state when the determination unit 80a1 (controller 80a: step S106) determines that the suction nozzle 60 is not normal. This makes it possible to reliably restore the suction nozzle 60 that is placed in an abnormal state to a normal state.
  • the recovery unit 80a2 uses the gripping chuck 128 to restore the placement state of the suction nozzle 60. This makes it possible to restore the suction nozzle 60 to a normal state without increasing costs by using existing equipment.
  • this embodiment further includes a second imaging device 126a capable of simultaneously capturing an image of multiple suction nozzles 60 placed on the pallet 110 (or tray 76), and the determination unit 80a1 performs the above-mentioned determination based on the image captured by the second imaging device 126a. This simplifies the imaging process, making it possible to perform the above-mentioned determination while reducing the overall man-hours.
  • the object to be grasped is a suction nozzle 60 that releasably suctions an electronic component. This makes it possible to reliably determine whether the placement state of the suction nozzle 60 is normal in a device in which the suction nozzle 60 is replaceable.
  • the cleaning device (nozzle management device 80) is equipped with the above-mentioned gripping object transfer device, and cleans the suction nozzle 60.
  • suction nozzle 60 can be applied not only to suction nozzle 60, but also to any cylindrical or columnar object, such as tubes, piping, and workpieces of machine tools and articulated robots.
  • this specification also discloses the technical idea of changing "the grasped object transfer device described in claim 1" to "the grasped object transfer device described in any one of claims 1 to 3" in claim 4, the technical idea of changing “the grasped object transfer device described in claim 1” to “the grasped object transfer device described in any one of claims 1 to 4" in claim 5, and the technical idea of changing "the grasped object transfer device described in claim 1" to "the grasped object transfer device described in any one of claims 1 to 7" in claim 8.
  • 25...imaging device first imaging device
  • 60...suction nozzle object to be grasped
  • 76...nozzle tray mounting tray
  • 80...nozzle management device object to be grasped transfer device, cleaning device
  • 80a...control device step S106...determination unit, step S112, step S118...recovery unit
  • 80a1...determination unit 80a2...recovery unit
  • 110...nozzle pallet mounting tray
  • 126...camera first imaging device
  • 126a...second imaging device 128...gripping chuck (gripping device)
  • P...electronic component P...electronic component.

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  • Microelectronics & Electronic Packaging (AREA)
  • Supply And Installment Of Electrical Components (AREA)

Abstract

This gripping target object transfer apparatus comprises: a gripping device for gripping a gripping target object; a placement tray on which the gripping target object can be placed; and a determination unit that determines whether the placement state of the gripping target object placed on the placement tray by the gripping device is normal.

Description

把持対象物移載装置及び洗浄装置Grasping object transfer device and cleaning device
 本明細書は、把持対象物移載装置及び洗浄装置に関する。 This specification relates to a device for transferring objects to be grasped and a cleaning device.
 把持対象物移載装置の一形式として、特許文献1には、吸着ノズルを保持チャックによってノズルトレイからノズルパレットに(またはノズルパレットからノズルトレイに)移載するノズル移載装置を備えたノズル管理装置が開示されている。このとき、吸着ノズルは、ノズルトレイ及びノズルパレットの載置穴に収容されるようになっている。 As one type of gripping object transfer device, Patent Document 1 discloses a nozzle management device equipped with a nozzle transfer device that transfers the suction nozzle from the nozzle tray to the nozzle pallet (or from the nozzle pallet to the nozzle tray) using a holding chuck. At this time, the suction nozzle is accommodated in the mounting holes of the nozzle tray and the nozzle pallet.
国際公開第2016/016929号International Publication No. 2016/016929
 上述した特許文献1に記載されているノズル管理装置においては、吸着ノズル(把持対象物)を載置穴に収容させることはできるものの、吸着ノズルが載置穴に正常状態にて収容(載置)されているか否かを確実に判定することが要請されている。 In the nozzle management device described in Patent Document 1 mentioned above, although it is possible to accommodate the suction nozzle (object to be grasped) in the mounting hole, there is a demand for reliable determination as to whether the suction nozzle is normally accommodated (mounted) in the mounting hole.
 このような事情に鑑みて、本明細書は、把持対象物の載置状態が正常であるか否かを確実に判定することができる把持対象物移載装置及び洗浄装置を開示する。 In light of these circumstances, this specification discloses a device for transferring objects to be grasped and a cleaning device that can reliably determine whether the placement state of an object to be grasped is normal or not.
 本明細書は、把持対象物を把持するための把持装置と、前記把持対象物が載置可能である載置トレイと、前記把持装置によって前記載置トレイに載置された前記把持対象物の載置状態が正常であるか否かの判定を実施する判定部と、を備えた把持対象物移載装置を開示する。 This specification discloses a device for transferring objects to be grasped, the device comprising a gripping device for gripping an object to be grasped, a placement tray on which the object to be grasped can be placed, and a determination unit that determines whether the placement state of the object to be grasped placed on the placement tray by the gripping device is normal or not.
 本開示によれば、判定部が把持装置によって載置トレイに載置された把持対象物の載置状態が正常であるか否かの判定を実施することが可能となる。よって、把持対象物の載置状態が正常であるか否かを確実に判定することができる。 According to the present disclosure, the determination unit is able to determine whether the placement state of the object to be grasped placed on the placement tray by the gripping device is normal or not. Therefore, it is possible to reliably determine whether the placement state of the object to be grasped is normal or not.
本開示に係る部品実装機10の概略構成図である。1 is a schematic configuration diagram of a component mounter 10 according to the present disclosure. 装着ヘッド26の概略構成図である。2 is a schematic diagram of a mounting head 26. FIG. 吸着ノズル60の概略構成図である。FIG. 2 is a schematic diagram of a suction nozzle 60. 載置穴閉状態であるノズルトレイ76を示す平面図である。13 is a plan view showing the nozzle tray 76 with the mounting holes in a closed state. FIG. 載置穴開状態であるノズルトレイ76を示す平面図である。FIG. 13 is a plan view showing the nozzle tray 76 with the mounting holes open. 載置穴閉状態であるノズルトレイ76を示す断面図である。11 is a cross-sectional view showing the nozzle tray 76 with the mounting holes closed. FIG. 吸着ノズル60を含む載置穴閉状態であるノズルトレイ76を示す断面図である。11 is a cross-sectional view showing a nozzle tray 76 with mounting holes including suction nozzles 60 in a closed state. FIG. ノズル管理装置80の概略構成図である。FIG. 2 is a schematic diagram of a nozzle management device 80. 把持チャック128の概略構成図である。FIG. 2 is a schematic diagram of a gripping chuck 128. 載置穴閉状態であるノズルパレット110を示す平面図である。FIG. 2 is a plan view showing the nozzle pallet 110 with the mounting holes in a closed state. 載置穴開状態であるノズルパレット110を示す平面図である。FIG. 2 is a plan view showing the nozzle pallet 110 with the mounting holes open. 載置穴110c2に大きいサイズの吸着ノズル60cが載置された状態を示すノズルパレット110の一部の断面図である。11 is a cross-sectional view of a portion of the nozzle pallet 110 showing a state in which a large-sized suction nozzle 60c is placed in a placement hole 110c2. FIG. 載置穴110c2に中間サイズの吸着ノズル60bが載置された状態を示すノズルパレット110の一部の断面図である。11 is a cross-sectional view of a portion of the nozzle pallet 110 showing a state in which a medium-sized suction nozzle 60b is placed in a placement hole 110c2. FIG. 載置穴110c3に中間サイズの吸着ノズル60bが載置された状態を示すノズルパレット110の一部の断面図である。11 is a cross-sectional view of a portion of the nozzle pallet 110 showing a state in which a medium-sized suction nozzle 60b is placed in a placement hole 110c3. FIG. ノズル管理装置80を示すブロック図である。FIG. 2 is a block diagram showing a nozzle management device 80. 図9に示す制御装置80aにて実施されるプログラムを表すフローチャートである。10 is a flowchart showing a program executed by a control device 80a shown in FIG. 9. 吸着ノズル60の載置状態が正常である場合の平面図である。FIG. 11 is a plan view showing a case where the suction nozzle 60 is normally placed. 吸着ノズル60の載置状態が回転異常である場合の平面図である。13 is a plan view showing a case where the suction nozzle 60 is placed in an abnormal rotation state. FIG. 吸着ノズル60の載置状態が傾き異常である場合の平面図である。13 is a plan view showing a case where the suction nozzle 60 is abnormally tilted when placed. FIG.
 以下、本開示に係る把持対象物移載装置及び洗浄装置が適用された吸着ノズル(以下、ノズルと称する場合がある。)60を管理するノズル管理装置80の一例について図面を参照しながら説明する。最初に、吸着ノズル60を有する部品実装機10について説明する。部品実装機10は、図1に示すように、実装機本体20、基板搬送装置(以下、搬送装置と称する場合がある。)22、装着ヘッド移動装置(以下、移動装置と称する場合がある。)24、装着ヘッド26、部品供給装置(以下、供給装置と称する場合がある。)28、及び、ノズルステーション30を備えている。実装機本体20は、フレーム部とビーム部とを備えている。 Below, an example of a nozzle management device 80 that manages a suction nozzle (hereinafter, sometimes referred to as a nozzle) 60 to which the grasped object transfer device and cleaning device according to the present disclosure are applied will be described with reference to the drawings. First, a component mounter 10 having a suction nozzle 60 will be described. As shown in FIG. 1, the component mounter 10 includes a mounter main body 20, a board transport device (hereinafter, sometimes referred to as a transport device) 22, a mounting head moving device (hereinafter, sometimes referred to as a moving device) 24, a mounting head 26, a component supply device (hereinafter, sometimes referred to as a supply device) 28, and a nozzle station 30. The mounter main body 20 includes a frame section and a beam section.
 搬送装置22は、それぞれ基板Sを搬送方向(左右方向)に沿って搬送する互いに並設された2つのコンベア装置40,42を備えている。尚、コンベア装置40,42の基板幅方向(前後方向)に沿った幅は変更可能である。また、基板Sは、所定の位置において、基板保持装置(図示省略)によって保持される。 The transport device 22 includes two conveyor devices 40, 42 arranged side by side, each of which transports the substrate S along a transport direction (left-right direction). The width of the conveyor devices 40, 42 along the substrate width direction (front-rear direction) is variable. The substrate S is held at a predetermined position by a substrate holding device (not shown).
 移動装置24は、装着ヘッド26を移動させる装置である。移動装置24は、図1に示すように、実装機本体20の上段部に基板幅方向に沿って延在するように設けられた左右一対のY軸ガイドレール20cと、一対のY軸ガイドレール20cに架け渡されたY軸スライダ20dと、Y軸スライダ20dに搬送方向に沿って延在するように設けられたX軸ガイドレール20aと、X軸ガイドレール20aに装着されたX軸スライダ20bと、を備えている。X軸スライダ20bは、X軸アクチュエータ(不図示)によって駆動され、Y軸スライダ20dは、Y軸アクチュエータ(不図示)によって駆動される。装着ヘッド26は、X軸スライダ20bに取り付けられており、X軸アクチュエータおよびY軸アクチュエータの駆動により水平方向に沿って移動する。 The moving device 24 is a device that moves the mounting head 26. As shown in FIG. 1, the moving device 24 includes a pair of left and right Y-axis guide rails 20c that are provided on the upper stage of the mounting machine main body 20 so as to extend along the board width direction, a Y-axis slider 20d that is spanned between the pair of Y-axis guide rails 20c, an X-axis guide rail 20a that is provided on the Y-axis slider 20d so as to extend along the transport direction, and an X-axis slider 20b that is attached to the X-axis guide rail 20a. The X-axis slider 20b is driven by an X-axis actuator (not shown), and the Y-axis slider 20d is driven by a Y-axis actuator (not shown). The mounting head 26 is attached to the X-axis slider 20b, and moves in the horizontal direction by being driven by the X-axis actuator and the Y-axis actuator.
 装着ヘッド26は、部品(電子部品)Pを基板Sに装着するための吸着ノズル60が複数装着されている。装着ヘッド26は、図2に示すように、例えばロータリヘッドであり、周方向に複数のホルダ26bが配列されたヘッド本体26aと、ヘッド本体26aを回転(ホルダ26bを公転)させるR軸アクチュエータ26cと、ホルダ26bを回転(自転)させるθ軸アクチュエータ26dと、ホルダ26bを上下に昇降させるZ軸アクチュエータ26eと、を備えている。ホルダ26bの先端部には、吸着ノズル60が交換可能に装着されている。 The mounting head 26 is fitted with multiple suction nozzles 60 for mounting components (electronic components) P to a board S. As shown in FIG. 2, the mounting head 26 is, for example, a rotary head, and includes a head body 26a with multiple holders 26b arranged in the circumferential direction, an R-axis actuator 26c for rotating the head body 26a (revolving the holders 26b), a θ-axis actuator 26d for rotating (spinning) the holders 26b, and a Z-axis actuator 26e for raising and lowering the holders 26b. A replaceable suction nozzle 60 is fitted to the tip of the holder 26b.
(吸着ノズル)
 吸着ノズル60は、負圧エア、正圧エア通路を介して、正負圧供給装置(図示省略)に通じている。吸着ノズル60は、負圧によって部品Pを吸着保持し、保持した部品Pを正圧によって解放(リリース)する。すなわち、吸着ノズル60は、部品Pを解放可能に吸着する。具体的に、吸着ノズル60は、図3に示すように、胴体筒64とフランジ部66と吸着管68と掛止ピン70とを備えている。胴体筒64は、円筒状をなし、フランジ部66は、胴体筒64の外周面に張り出すようにして固定されている。吸着管68は、細いパイプ状をなし、胴体筒64の下端部から下方に向かって延び出した状態で、胴体筒64に軸線方向に沿って移動可能に保持されている。
(Suction nozzle)
The suction nozzle 60 is connected to a positive and negative pressure supply device (not shown) through negative pressure air and positive pressure air passages. The suction nozzle 60 sucks and holds the part P by negative pressure, and releases the held part P by positive pressure. That is, the suction nozzle 60 sucks and holds the part P in a releasable manner. Specifically, as shown in FIG. 3, the suction nozzle 60 includes a body tube 64, a flange portion 66, a suction tube 68, and a locking pin 70. The body tube 64 is cylindrical, and the flange portion 66 is fixed to the outer circumferential surface of the body tube 64 so as to protrude from it. The suction tube 68 is shaped like a thin pipe, and is held by the body tube 64 so as to be movable along the axial direction while extending downward from the lower end of the body tube 64.
 掛止ピン70は、胴体筒64の径方向に延びるように、胴体筒64の上端部に設けられている。吸着ノズル60は、掛止ピン70を利用して、装着ヘッド26にワンタッチで着脱可能に取り付けられる。また、装着ヘッド26には、バネ(図示省略)が内蔵されており、そのバネは、装着ヘッド26に取り付けられる吸着ノズル60の吸着管68に、弾性力を付与する。これにより、その吸着管68は、装着ヘッド26に内蔵されたバネの弾性力によって、胴体筒64の下端部から下方に延び出す方向に付勢されている。 The latch pin 70 is provided at the upper end of the body tube 64 so as to extend in the radial direction of the body tube 64. The suction nozzle 60 is attached to the mounting head 26 in a one-touch, detachable manner using the latch pin 70. The mounting head 26 also has a built-in spring (not shown), which applies an elastic force to the suction tube 68 of the suction nozzle 60 attached to the mounting head 26. As a result, the suction tube 68 is biased in a direction extending downward from the lower end of the body tube 64 by the elastic force of the spring built into the mounting head 26.
 また、フランジ部66の上面には、2Dコード74が付されている。2Dコード74には、個別情報として、吸着ノズル60のID(identification)や、エアの吹き付けの態様(例えば、エアの吹き付け方向、エアの吹き付けの時間、エアの吹き付けの繰り返し回数)等が示されている。なお、2Dコード74に代えて、バーコード又はRFタグがフランジ部66の上面に付されてもよい。但し、RFタグがフランジ部66の上面に付される場合には、RFタグから個別情報を取得するためのリーダが、後述するノズル管理装置80の移載ヘッド120(図5参照)に取り付けられる。 A 2D code 74 is also attached to the top surface of the flange portion 66. The 2D code 74 indicates, as individual information, the ID (identification) of the suction nozzle 60, the manner of air blowing (for example, the air blowing direction, the air blowing time, and the number of times air blowing is repeated), and the like. Note that instead of the 2D code 74, a barcode or an RF tag may be attached to the top surface of the flange portion 66. However, if an RF tag is attached to the top surface of the flange portion 66, a reader for acquiring individual information from the RF tag is attached to the transfer head 120 (see FIG. 5) of the nozzle management device 80 described below.
 また、フランジ部66の外周には、ノッチ(切欠き)75が設けられており、そのノッチ75は、後述するノズルトレイ76の段差面76dに立設された短いピン76e(またはノズルパレット110の段差面110dに立設された短いピン110e)と係合する。それらノッチ75およびピン76e(ピン110e)により、吸着ノズル60は特定の向きにしか載置できないようになっており、また、ノズルトレイ76(またはノズルパレット110)に載置された状態における吸着ノズル60の回転が防止されている。 Furthermore, a notch (cutout) 75 is provided on the outer periphery of the flange portion 66, and this notch 75 engages with a short pin 76e erected on the stepped surface 76d of the nozzle tray 76 (or a short pin 110e erected on the stepped surface 110d of the nozzle pallet 110), which will be described later. These notches 75 and pins 76e (pins 110e) ensure that the suction nozzle 60 can only be placed in a specific orientation, and also prevent the suction nozzle 60 from rotating when placed on the nozzle tray 76 (or nozzle pallet 110).
 図では、一種類のものしか示していないが、吸着ノズル60は、サイズおよび形状において互いに異なる複数種のものが存在し、本部品実装機10でも、サイズにおいて異なるいくつかの種類の吸着ノズル60をホルダ26bに取り付け可能となっており、本部品実装機10では、吸着保持する部品Pに応じて、それらいくつかの種類のノズルを、自動で交換可能とされている。ちなみに、製造する電気回路(基板Sに部品Pが装着されたもの)に応じて使用される吸着ノズル60は異なる。また、部品実装機10において使用される複数の吸着ノズル60は、部品供給装置16の傍らにおいて部品実装機10に設けられたノズルステーション30に、ノズルトレイ76に載置された状態で配置されている。 Although only one type is shown in the figure, there are several types of suction nozzles 60 that differ from each other in size and shape, and this component mounter 10 can also attach several types of suction nozzles 60 of different sizes to the holder 26b, and this component mounter 10 can automatically replace these several types of nozzles depending on the component P to be sucked and held. Incidentally, the suction nozzle 60 used varies depending on the electric circuit (substrate S with components P mounted) to be manufactured. Also, the multiple suction nozzles 60 used in the component mounter 10 are placed on a nozzle tray 76 in a nozzle station 30 provided in the component mounter 10 next to the component supply device 16.
 供給装置28は、図1に示すように、部品実装機10の前部に設置された図示しないフィーダ台に着脱可能に装着されている。供給装置28は、フィーダ型の供給装置であり、複数のテープフィーダ72を有している。テープフィーダ72は、所定間隔置きに形成された複数のキャビティにそれぞれ部品が収容されたキャリアテープと、キャリアテープが巻回されたリールと、リールからキャリアテープを巻き解して送り出すテープ送り装置と、を備えている。 As shown in FIG. 1, the supply device 28 is removably mounted on a feeder table (not shown) installed at the front of the component mounter 10. The supply device 28 is a feeder-type supply device and has multiple tape feeders 72. The tape feeder 72 is equipped with a carrier tape in which components are housed in multiple cavities formed at predetermined intervals, a reel around which the carrier tape is wound, and a tape feeding device that unwinds and feeds out the carrier tape from the reel.
(ノズルトレイ)
 ノズルステーション30は、図1に示すように、ノズルトレイ76(以下、単に「トレイ」と言う場合がある)を有している。ノズルトレイ76には、複数の吸着ノズル60が収容されている。このノズルステーション30では、装着ヘッド26に取り付けられている吸着ノズル60と、ノズルトレイ76に収容されている吸着ノズル60との交換等が、必要に応じて行われる。また、ノズルトレイ76は、ノズルステーション30に着脱可能であり、ノズルトレイ76に収容された吸着ノズル60の回収や、ノズルトレイ76への吸着ノズル60の補給等を部品実装機10の外部(例えば、ノズル管理装置80)において行うことが可能である。
(Nozzle tray)
1, the nozzle station 30 has a nozzle tray 76 (hereinafter, may be simply referred to as a "tray"). The nozzle tray 76 accommodates a plurality of suction nozzles 60. In the nozzle station 30, the suction nozzles 60 attached to the mounting head 26 are replaced with the suction nozzles 60 accommodated in the nozzle tray 76 as necessary. The nozzle tray 76 is detachable from the nozzle station 30, and the suction nozzles 60 accommodated in the nozzle tray 76 can be collected and the nozzle tray 76 can be replenished with suction nozzles 60 outside the component mounter 10 (for example, by a nozzle management device 80).
 トレイ76は、吸着ノズル60を載置させるためのノズル載置器(吸着ノズル60が載置可能である載置トレイと言ってもよい。)として機能するものであり、図4に示すように、概して板状をなしている。詳しく言えば、トレイ76は、ベースプレート76aと、ベースプレート76aの上面を覆うカバープレート76bとを含んで構成されており、カバープレート76bは、ベースプレート76aに対してある程度の範囲で摺動可能とされている。図4Aは、カバープレート76bがベースプレート76aに対してズレた状態を示しており、図4Bは、カバープレート76bがベースプレート76aにちょうど重なった状態を示している。カバープレート76bはそれら2つの状態の各々における位置の間で摺動可能とされている。 The tray 76 functions as a nozzle mount for placing the suction nozzle 60 (it may also be called a mount tray on which the suction nozzle 60 can be placed), and is generally plate-shaped as shown in FIG. 4. More specifically, the tray 76 includes a base plate 76a and a cover plate 76b that covers the upper surface of the base plate 76a, and the cover plate 76b is able to slide to a certain extent relative to the base plate 76a. FIG. 4A shows a state in which the cover plate 76b is misaligned with respect to the base plate 76a, and FIG. 4B shows a state in which the cover plate 76b is exactly overlapping the base plate 76a. The cover plate 76b is able to slide between the positions in each of these two states.
 断面図である図4Cおよび吸着ノズル60が載置された状態を示す部分断面図である図4Dをも参照して説明すれば、ベースプレート76aには、それぞれが載置部を構成する12個の載置穴76cが設けられている。詳しく言えば、本トレイ76には、互いにサイズの異なる2種の吸着ノズル60を載置することができ、大きなサイズの吸着ノズル60を載置するための4つの載置穴76cと、小さなサイズの吸着ノズル60を載置するための8つの載置穴76cとが設けられている。載置穴76cは、内周壁の寸法が深さにおいて異なる段付き穴とされており、段差面76dが、吸着ノズル60のフランジ部66が載置される面とされている。 Referring also to the cross-sectional view of FIG. 4C and the partial cross-sectional view of FIG. 4D showing the state in which the suction nozzle 60 is placed, the base plate 76a is provided with 12 mounting holes 76c, each of which constitutes a mounting portion. More specifically, the tray 76 is capable of mounting two types of suction nozzles 60 of different sizes, and is provided with four mounting holes 76c for mounting the larger suction nozzle 60 and eight mounting holes 76c for mounting the smaller suction nozzle 60. The mounting holes 76c are stepped holes whose inner walls have different depths, and the stepped surface 76d is the surface on which the flange portion 66 of the suction nozzle 60 is placed.
 ベースプレート76aの上面における載置穴76cの内径、つまり、最大内径は、フランジ部66の外径よりも僅かに大きくされており、載置穴76cは、吸着ノズル60の径方向の変位(ズレ)をフランジ部66の外周において規制するように構成されている。また、段差面76dまでの深さは、載置穴76cに載置された吸着ノズル60のフランジ部66がカバープレート76bに干渉しない深さとされている。ちなみに、図に示す吸着ノズル60は、段差面76dまでの深さより薄いフランジ部66を有しており、その吸着ノズル60は、載置穴76cに載置された状態において、フランジ部66の上面が、トレイ76のベースプレート76aの上面より突出することはない。 The inner diameter of the mounting hole 76c in the upper surface of the base plate 76a, i.e., the maximum inner diameter, is slightly larger than the outer diameter of the flange portion 66, and the mounting hole 76c is configured to restrict radial displacement (misalignment) of the suction nozzle 60 at the outer periphery of the flange portion 66. The depth to the step surface 76d is set so that the flange portion 66 of the suction nozzle 60 placed in the mounting hole 76c does not interfere with the cover plate 76b. Incidentally, the suction nozzle 60 shown in the figure has a flange portion 66 that is thinner than the depth to the step surface 76d, and when the suction nozzle 60 is placed in the mounting hole 76c, the upper surface of the flange portion 66 does not protrude from the upper surface of the base plate 76a of the tray 76.
 一方、カバープレート76bには、ベースプレート76aの載置穴76cに対応して、抜穴76fが設けられている。この抜穴76fは、円形をした円穴部76f1とその円穴部76f1の一方側から延び出すスロット部76f2とからなっている。各円穴部76f1の内径は、対応する載置穴76cの最大内径と略等しくされている。スロット部76f2の幅は、対応する載置穴76cに載置される吸着ノズル60の胴体筒64の外径よりもある程度大きくされている。図4Bに示す状態では、各載置穴76cの中心と対応する抜穴76fの円穴部76f1の中心が一致しており、載置穴76cの全体が上方から覗き見れる。一方、図4Aに示す状態では、各載置穴76cの中心と対応する抜穴76fのスロット部76f2の先端に存在する円弧の中心とが略一致しており、載置穴76cは、上方からは一部しか覗き見れない。2つの状態は、そのような状態であるため、以下、便宜的に、図4Bの状態を「載置穴開状態」、図4Aの状態を「載置穴閉状態」と言うことにする。 On the other hand, the cover plate 76b is provided with a cutout hole 76f corresponding to the mounting hole 76c of the base plate 76a. This cutout hole 76f is composed of a circular hole portion 76f1 and a slot portion 76f2 extending from one side of the circular hole portion 76f1. The inner diameter of each circular hole portion 76f1 is approximately equal to the maximum inner diameter of the corresponding mounting hole 76c. The width of the slot portion 76f2 is somewhat larger than the outer diameter of the body tube 64 of the suction nozzle 60 placed in the corresponding mounting hole 76c. In the state shown in Figure 4B, the center of each mounting hole 76c and the center of the circular hole portion 76f1 of the corresponding cutout hole 76f coincide with each other, and the entire mounting hole 76c can be seen from above. On the other hand, in the state shown in Figure 4A, the center of each mounting hole 76c and the center of the arc at the tip of the slot portion 76f2 of the corresponding hole 76f are approximately aligned, and only a portion of the mounting hole 76c can be seen from above. Because the two states are as described above, for the sake of convenience, the state in Figure 4B will be referred to as the "mounting hole open state" and the state in Figure 4A as the "mounting hole closed state."
 載置穴開状態では、吸着ノズル60の載置穴76cへの載置、載置穴76cからの離脱を行うことができる。一方、吸着ノズル60が載置穴76cに載置されている場合に載置穴閉状態とすることで、吸着ノズル60の胴体筒64が抜穴76fのスロット部76f2を挿通しつつ、フランジ部66の上面の多くの部分が、カバープレート76bによって蓋われる状態となる。この状態において、吸着ノズル60は、載置穴76cからの離脱が防止される。この吸着ノズル60の離脱防止に関して言えば、トレイ76には、カバープレート76bを含んで構成される機構、つまり、いわゆるシャッタ機構170と呼ばれるノズル離脱防止機構が設けられているのである。 When the mounting hole is open, the suction nozzle 60 can be placed in and removed from the mounting hole 76c. On the other hand, when the suction nozzle 60 is placed in the mounting hole 76c, closing the mounting hole causes the body tube 64 of the suction nozzle 60 to pass through the slot portion 76f2 of the extraction hole 76f, while most of the upper surface of the flange portion 66 is covered by the cover plate 76b. In this state, the suction nozzle 60 is prevented from coming off the mounting hole 76c. To prevent the suction nozzle 60 from coming off, the tray 76 is provided with a mechanism that includes the cover plate 76b, that is, a nozzle removal prevention mechanism known as a shutter mechanism 170.
 カバープレート76bは、図示を省略するスプリングによって、載置穴閉状態となるように付勢されており、そのスプリングの付勢力を超える力でカバープレート76bを摺動させることで、載置穴開状態となる。この摺動は、図示を省略するところの、ノズルステーション30に配設されたカバー摺動機構によって行われる。装着ヘッド26のホルダ26bへの吸着ノズル60の取り付け、ホルダ26bからの吸着ノズル60を取り外し、取り付いている吸着ノズル60の別の吸着ノズル60への交換は、部品実装機10の制御装置によるカバー摺動機構の制御によって載置穴開状態が実現されて、行われる。 The cover plate 76b is biased by a spring (not shown) so that the mounting hole is closed, and the mounting hole is opened by sliding the cover plate 76b with a force exceeding the biasing force of the spring. This sliding is performed by a cover sliding mechanism (not shown) arranged in the nozzle station 30. The mounting hole open state is achieved by controlling the cover sliding mechanism by the control device of the component mounter 10, and the attachment of the suction nozzle 60 to the holder 26b of the mounting head 26, the removal of the suction nozzle 60 from the holder 26b, and the replacement of the attached suction nozzle 60 with another suction nozzle 60 are all performed.
 トレイ76は、ノズルステーション30に着脱可能とされており、例えば、ある電気回路の製造を開始するにあたって、予め吸着ノズル60が載置されたトレイ76をノズルステーション30にセットすることができ、また、例えば、ある電気回路の製造を終了するにあたって、使用していた吸着ノズル60をトレイ76ごとノズルステーション30から外すことができる。したがって、トレイ76は、部品実装機10の段取り替え等の迅速化に大きく貢献している。なお、本トレイ76では、ベースプレート76aの1つのコーナに、当該トレイ76の固有情報を認識するための識別子としての2Dコード(不図示)が付されている。この2Dコードは、固有情報の一種としての当該トレイ76のIDを示すものとなっており、そのIDは、トレイ76の個別管理に利用される。 The tray 76 is detachable from the nozzle station 30. For example, when starting the manufacture of an electric circuit, the tray 76 with the suction nozzle 60 placed on it can be set in the nozzle station 30. Also, when finishing the manufacture of an electric circuit, the suction nozzle 60 that was used can be removed from the nozzle station 30 along with the tray 76. Therefore, the tray 76 contributes greatly to speeding up the changeover of the component mounter 10. In addition, in this tray 76, a 2D code (not shown) is attached to one corner of the base plate 76a as an identifier for recognizing the unique information of the tray 76. This 2D code indicates the ID of the tray 76 as a type of unique information, and the ID is used to manage the tray 76 individually.
 なお、以上説明した吸着ノズル60およびトレイ76は、上記部品実装機10に使用されるものである。以下に示す実施例の管理機は、上記部品実装機10に使用される吸着ノズル60だけを対象とするものではなく、他の装着機に使用される吸着ノズル60をも対象とする。また、上記トレイ76は、部品実装機10で使用されるトレイ76の一例であり、部品実装機10は、種類において異なる他のトレイ76をも使用可能である。さらに、装着機によって、使用されるトレイ76も異なる。後に説明するが、実施例の管理機は、他のトレイ76に載置された若しくは載置される吸着ノズル60をも管理の対象とする。 The suction nozzle 60 and tray 76 described above are used in the component mounter 10. The management machine in the embodiment shown below is intended not only for the suction nozzle 60 used in the component mounter 10, but also for the suction nozzle 60 used in other mounting machines. The tray 76 is an example of a tray 76 used in the component mounter 10, and the component mounter 10 can also use other trays 76 of different types. Furthermore, the tray 76 used varies depending on the mounting machine. As will be explained later, the management machine in the embodiment also manages suction nozzles 60 that are placed or will be placed on other trays 76.
(ノズル管理装置)
 次に、ノズル管理装置80について説明する。ノズル管理装置80は、吸着ノズル60を管理するための装置であり、図5に示すように、管理装置本体90、パレット収容装置92、ノズル移載装置94、ノズル検査装置96、ノズル洗浄装置98、及び、ノズル乾燥装置100を有している。
(Nozzle management device)
Next, a description will be given of the nozzle management device 80. The nozzle management device 80 is a device for managing the suction nozzles 60, and as shown in Fig. 5, has a management device main body 90, a pallet storage device 92, a nozzle transfer device 94, a nozzle inspection device 96, a nozzle cleaning device 98, and a nozzle drying device 100.
 管理装置本体90は、フレーム部102と、そのフレーム部102に上架されたビーム部104とを備えている。フレーム部102は、中空構造とされており、フレーム部102内にパレット収容装置92が配設され、パレット収容装置92の上端部が、フレーム部102の上面に露出している。 The management device main body 90 comprises a frame section 102 and a beam section 104 suspended from the frame section 102. The frame section 102 has a hollow structure, and the pallet storage device 92 is disposed within the frame section 102, with the upper end of the pallet storage device 92 exposed on the upper surface of the frame section 102.
 パレット収容装置92は、複数のパレット載置棚106と、支持アーム108とを含んでいる。パレット載置棚106は、ノズルパレット(以下、単に「パレット」と言う場合がある)110を載置するための棚であり、複数のパレット載置棚106が、フレーム部102の内部において、上下方向に並んで配設されている。なお、パレット110には、複数の吸着ノズル60が収容される。また、支持アーム108は、アーム移動装置(図示省略)の作動により、複数のパレット載置棚106の前方において、上下方向に移動するとともに、パレット載置棚106に接近・離間する。これにより、パレット載置棚106へのパレット110の収納、パレット載置棚106からのパレット110の取出しが、支持アーム108によって行われる。なお、パレット載置棚106から取り出されたパレット110は、支持アーム108が上方に移動することで、フレーム部102の上面側に移動する。 The pallet storage device 92 includes a plurality of pallet placement shelves 106 and a support arm 108. The pallet placement shelves 106 are shelves for placing nozzle pallets (hereinafter, sometimes simply referred to as "pallets") 110, and the plurality of pallet placement shelves 106 are arranged vertically inside the frame section 102. The pallets 110 store a plurality of suction nozzles 60. The support arm 108 moves vertically in front of the plurality of pallet placement shelves 106 and approaches and moves away from the pallet placement shelves 106 by the operation of an arm movement device (not shown). As a result, the pallets 110 are stored in the pallet placement shelves 106 and removed from the pallet placement shelves 106 by the support arm 108. The pallets 110 removed from the pallet placement shelves 106 are moved to the upper surface side of the frame section 102 by the upward movement of the support arm 108.
 ノズル移載装置94は、トレイ76とパレット110との間で吸着ノズル60を移載するための装置であり、ビーム部104に配設されている。ノズル移載装置94は、移載ヘッド120とヘッド移動装置122とを有している。移載ヘッド120の下端面には、下方を向いた状態のカメラ126と、吸着ノズル60を把持するための把持チャック128と、エア供給装置130とが取り付けられている。 The nozzle transfer device 94 is a device for transferring the suction nozzle 60 between the tray 76 and the pallet 110, and is disposed in the beam section 104. The nozzle transfer device 94 has a transfer head 120 and a head moving device 122. A camera 126 facing downward, a gripping chuck 128 for gripping the suction nozzle 60, and an air supply device 130 are attached to the lower end surface of the transfer head 120.
 尚、カメラ126は、パレット110やトレイ76(載置トレイ)に載置されている吸着ノズル60を撮像する第1撮像装置である。 The camera 126 is a first imaging device that captures images of the suction nozzles 60 placed on the pallet 110 or the tray 76 (loading tray).
(ノズルパレット)
 パレット110は、吸着ノズル60を載置させるためのノズル載置器(吸着ノズル60が載置可能である載置トレイと言ってもよい。)として機能するものであり、図7に示すように、先に説明したトレイ76と同様、ベースプレート110aとベースプレート110aの上面を覆うカバープレート110bとを含んで構成されている。図7Aは、カバープレート110bがベースプレート110aに対してズレた状態を示しており、図7Bは、カバープレート110bがベースプレート110aにちょうど重なった状態を示している。カバープレート110bはそれら2つの状態における位置の間で摺動可能とされている。
(Nozzle Palette)
The pallet 110 functions as a nozzle mount for mounting the suction nozzle 60 (or may be called a mount tray on which the suction nozzle 60 can be mounted), and as shown in Fig. 7, like the tray 76 described above, is configured to include a base plate 110a and a cover plate 110b that covers the upper surface of the base plate 110a. Fig. 7A shows a state in which the cover plate 110b is misaligned with respect to the base plate 110a, and Fig. 7B shows a state in which the cover plate 110b is exactly overlapped with the base plate 110a. The cover plate 110b is slidable between the positions in these two states.
 なお、当該管理装置80は、便宜的に、3種類のサイズの吸着ノズル60を管理の対象とするものとして扱うこととすれば、パレット110には、それら3種類の吸着ノズル60のすべてが載置可能とされている。3種類の吸着ノズル60は、形状において互いに異なり、フランジ部66の外径によって3つに分類することができる。具体的には、小さなサイズの吸着ノズル60a(図示省略)、図8Bに示す中間のサイズの吸着ノズル60b、図8Aに示すサイズの大きな吸着ノズル60cに分類することができる。 For the sake of convenience, the management device 80 treats the three sizes of suction nozzles 60 as objects to be managed, and all three types of suction nozzles 60 can be placed on the pallet 110. The three types of suction nozzles 60 differ from one another in shape and can be classified into three types based on the outer diameter of the flange portion 66. Specifically, they can be classified into a small size suction nozzle 60a (not shown), a medium size suction nozzle 60b shown in FIG. 8B, and a large size suction nozzle 60c shown in FIG. 8A.
 ベースプレート110aには、トレイ76の場合と同様に、それぞれが載置部を構成する載置穴110cが設けられている。具体的には、小さなサイズの吸着ノズル60aが載置される40個の載置穴110c1と、大きなサイズの吸着ノズル60が載置される28個の載置穴110c2が設けられており、載置穴110c1には、上記吸着ノズル60aが、載置穴110c2には、上記吸着ノズル60b,60cが載置される。 The base plate 110a is provided with mounting holes 110c, each of which constitutes a mounting portion, in the same manner as the tray 76. Specifically, 40 mounting holes 110c1 in which small-sized suction nozzles 60a are mounted, and 28 mounting holes 110c2 in which large-sized suction nozzles 60 are mounted are provided, with the suction nozzles 60a being mounted in the mounting holes 110c1, and the suction nozzles 60b, 60c being mounted in the mounting holes 110c2.
 載置穴110c1に関しては、先に説明したトレイ76の載置穴76cと同様であり、1つの段差面110d及びピン110eを有するものであるため、ここでの説明を省略する。吸着ノズル60が載置された状態を示す図8を参照しつつ、載置穴110c2について説明すれば、載置穴110c2は、内周壁の寸法が深さにおいて異なる段付き穴とされており、詳しくは、2つの段差面110d1,110d2を有する段付き穴とされている。図8Aに示すように、大きなサイズの吸着ノズル60cは、上方に位置する段差面110d1に載置され、一方、図8Bに示すように、中間サイズの吸着ノズル60bは、下方に位置する段差面110d2に載置される。つまり、いずれの段差面110d1,110d2も、吸着ノズル60が載置される面とされており、載置穴110c2は、内周壁が深さ方向において内寸法が異なり、互いにフランジ部66の外径において異なる複数種の吸着ノズル60のフランジ部66が、互いに異なる深さの位置において嵌るように構成されているのである。また、載置穴110c2は、いずれの吸着ノズル60に対しても、それら吸着ノズル60の径方向の変位(ズレ)をフランジ部66の外周において規制するように構成されており、いずれの段差面110d1,110d2にも、吸着ノズル60の回転防止のために、フランジ部66のノッチ75が係合するピン110eが立設されている。 The mounting hole 110c1 is similar to the mounting hole 76c of the tray 76 described above, and has one step surface 110d and pin 110e, so a description thereof will be omitted here. Referring to FIG. 8 showing the state in which the suction nozzle 60 is placed, the mounting hole 110c2 is a stepped hole whose inner wall has different depth dimensions, and more specifically, is a stepped hole having two step surfaces 110d1 and 110d2. As shown in FIG. 8A, the large-sized suction nozzle 60c is placed on the step surface 110d1 located at the top, while as shown in FIG. 8B, the medium-sized suction nozzle 60b is placed on the step surface 110d2 located at the bottom. That is, both of the stepped surfaces 110d1 and 110d2 are surfaces on which the suction nozzle 60 is placed, and the mounting hole 110c2 is configured so that the inner wall has different internal dimensions in the depth direction, and the flange portions 66 of multiple types of suction nozzles 60, each of which has a different outer diameter of the flange portion 66, can be fitted at positions of different depths. Also, the mounting hole 110c2 is configured to regulate the radial displacement (displacement) of each of the suction nozzles 60 at the outer periphery of the flange portion 66, and both of the stepped surfaces 110d1 and 110d2 have pins 110e that engage with the notches 75 of the flange portion 66 to prevent the suction nozzle 60 from rotating.
 なお、上述複数の段差面110dを有する形状の載置穴110c2に代えて、例えば、図8Cに示すように、軸線方向、つまり、深さ方向において、内周壁の内寸法が漸減するようなテーパ穴の載置穴110c3を採用することも可能である。そのような載置穴110c3であっても、互いにフランジ部66の外径において異なる複数種の吸着ノズル60のフランジ部66が、互いに異なる深さの部分で嵌るように構成されることになる。ちなみに、図は、中間サイズの吸着ノズル60bが載置された状態を示しており、大きなサイズの吸着ノズル60cが載置される場合は、吸着ノズル60bより上方の位置に載置されることになる。 Instead of the mounting hole 110c2 having the above-mentioned multiple stepped surfaces 110d, it is also possible to adopt a mounting hole 110c3 that is a tapered hole in which the inner dimension of the inner wall gradually decreases in the axial direction, i.e., in the depth direction, as shown in FIG. 8C. Even with such a mounting hole 110c3, the flange portions 66 of multiple types of suction nozzles 60, each of which differs in the outer diameter of the flange portion 66, are configured to fit at different depths. Incidentally, the figure shows a state in which a medium-sized suction nozzle 60b is placed, and when a large-sized suction nozzle 60c is placed, it will be placed in a position above the suction nozzle 60b.
 一方、カバープレート110bには、トレイ76と同様、ベースプレート110aの載置穴110c1,110c2にそれぞれ対応して、それぞれが円穴部110gおよびスロット部110hを有する抜穴110f1,110f2が設けられている。図7Bに示す状態では、各載置穴110cの中心と対応する抜穴110fの円穴部110gの中心が一致しており、先に説明した載置穴開状態が実現され、図7Aに示す状態では、各載置穴110cの中心と対応する抜穴110fのスロット部110hの先端に存在する円弧の中心とが略一致しており、載置穴閉状態が実現される。そのような構造から、パレット110にも、吸着ノズル60の離脱防止に関して、カバープレート110bを含んで構成される機構、つまり、いわゆるシャッタ機構170(図9参照)と呼ばれるノズル離脱防止機構が設けられているのである。ちなみに、トレイ76と同様、カバープレート110bは、図示を省略するスプリングによって、載置穴閉状態となるように付勢されており、そのスプリングの付勢力を超える力でカバープレート110bをシリンダ(不図示)によって摺動させることで、載置穴開状態となる。 On the other hand, the cover plate 110b is provided with holes 110f1 and 110f2, each having a circular hole portion 110g and a slot portion 110h, corresponding to the mounting holes 110c1 and 110c2 of the base plate 110a, similar to the tray 76. In the state shown in FIG. 7B, the center of each mounting hole 110c coincides with the center of the circular hole portion 110g of the corresponding hole 110f, realizing the mounting hole open state described above, and in the state shown in FIG. 7A, the center of each mounting hole 110c coincides with the center of the arc at the tip of the slot portion 110h of the corresponding hole 110f, realizing the mounting hole closed state. Due to such a structure, the pallet 110 is also provided with a mechanism including the cover plate 110b for preventing the suction nozzle 60 from coming off, that is, a nozzle coming off prevention mechanism called a shutter mechanism 170 (see FIG. 9). Incidentally, like the tray 76, the cover plate 110b is biased by a spring (not shown) so that the mounting hole is closed, and the mounting hole is opened by sliding the cover plate 110b with a force exceeding the biasing force of the spring using a cylinder (not shown).
 パレット110には、トレイ76と同様、ベースプレート110aの1つのコーナに、当該パレット110の固有情報を認識するための識別子としての2Dコード(不図示)が付されている。この2Dコードは、固有情報の一種としての当該パレット110のIDを示すものとなっており、そのIDは、パレット110の個別管理に利用される。 Similar to the tray 76, the pallet 110 has a 2D code (not shown) attached to one corner of the base plate 110a as an identifier for recognizing the unique information of the pallet 110. This 2D code indicates the ID of the pallet 110 as a type of unique information, and the ID is used to manage the pallet 110 individually.
 把持チャック128は、把持対象物を解放可能に把持するためのチャック装置(すなわち把持装置)である。把持チャック128は、図6に示すように、複数(本実施形態では、3本)の把持爪132と把持チャック本体部134とを備えている。把持チャック128は、それら把持爪132を接近させることで、把持対象物である吸着ノズル60を胴体筒64において把持し、それら把持爪132を離間させることで、把持した吸着ノズル60を解放する。尚、把持爪132は、所定角度(本実施形態では、120度)をおいて配置されている。また、把持爪132は、3本に限定されず、複数であれば2本でも4本でもよい。この場合、把持爪132は、本数に応じた所定角度(4本の場合、90度である。)をおいて配置されるのが好ましい。 The gripping chuck 128 is a chuck device (i.e., a gripping device) for releasably gripping an object to be gripped. As shown in FIG. 6, the gripping chuck 128 has a plurality of gripping jaws 132 (three in this embodiment) and a gripping chuck main body 134. The gripping chuck 128 grips the suction nozzle 60, which is the object to be gripped, at the body tube 64 by bringing the gripping jaws 132 close to each other, and releases the gripped suction nozzle 60 by moving the gripping jaws 132 apart. The gripping jaws 132 are arranged at a predetermined angle (120 degrees in this embodiment). The number of gripping jaws 132 is not limited to three, and may be two or four as long as there are multiple jaws. In this case, it is preferable that the gripping jaws 132 are arranged at a predetermined angle according to the number of jaws (90 degrees in the case of four jaws).
 尚、把持装置によって把持される把持対象物として吸着ノズル60を採用するようにしたが、吸着ノズル60に限定されず、円筒状などの筒状部を有しチャック装置により把持可能である部材を採用すればよい。 Although a suction nozzle 60 is used as the object to be grasped by the gripping device, it is not limited to a suction nozzle 60, and any member that has a cylindrical or other tubular part and can be grasped by a chuck device can be used.
 また、ヘッド移動装置122は、図5に示すように、移載ヘッド120をフレーム部102の上において前後方向、左右方向、上下方向に移動させるXYZ型の移動装置である。なお、フレーム部102の前方側の上面には、ノズルトレイ76をセットするための固定ステージ131が設けられており、固定ステージ131にセットされたノズルトレイ76と、パレット収容装置92の支持アーム108に支持されたノズルパレット110との間で、吸着ノズル60が移載される。 As shown in FIG. 5, the head moving device 122 is an XYZ type moving device that moves the transfer head 120 in the front-back, left-right, and up-down directions on the frame section 102. A fixed stage 131 for setting the nozzle tray 76 is provided on the upper surface of the front side of the frame section 102, and the suction nozzle 60 is transferred between the nozzle tray 76 set on the fixed stage 131 and the nozzle pallet 110 supported by the support arm 108 of the pallet storage device 92.
 ノズル検査装置96は、カメラ140とロードセル142とジョイント146とを有している。カメラ140は、上方を向いた状態でフレーム部102の上面に配設されており、カメラ140を用いて、吸着ノズル60の先端部が検査される。詳しくは、検査対象の吸着ノズル60が把持チャック128によって把持され、その把持チャック128に把持された吸着ノズル60が、下方からカメラ140によって撮像される。これにより、吸着ノズル60の先端部の撮像データが得られ、その撮像データに基づいて、吸着ノズル60の先端部の状態が検査される。 The nozzle inspection device 96 has a camera 140, a load cell 142, and a joint 146. The camera 140 is disposed on the upper surface of the frame portion 102 facing upward, and the tip of the suction nozzle 60 is inspected using the camera 140. In detail, the suction nozzle 60 to be inspected is held by the gripping chuck 128, and the suction nozzle 60 held by the gripping chuck 128 is imaged from below by the camera 140. In this way, image data of the tip of the suction nozzle 60 is obtained, and the condition of the tip of the suction nozzle 60 is inspected based on the image data.
 また、ロードセル142は、カメラ140の隣に配設されており、ロードセル142を用いて、吸着ノズル60の先端部の伸縮状態(換言すると、吸着管68の摺動性)が検査される。詳しくは、検査対象の吸着ノズル60が把持チャック128によって把持され、その把持チャック128に把持された吸着ノズル60の先端部がロードセル142に当接される。吸着ノズル60の先端部は、伸縮可能とされており、ロードセル142により測定された荷重に基づいて、吸着ノズル60の先端部の伸縮状態が検査される。 Furthermore, the load cell 142 is disposed next to the camera 140, and is used to inspect the expansion and contraction state of the tip of the suction nozzle 60 (in other words, the sliding property of the suction tube 68). In more detail, the suction nozzle 60 to be inspected is held by the gripping chuck 128, and the tip of the suction nozzle 60 held by the gripping chuck 128 is abutted against the load cell 142. The tip of the suction nozzle 60 is capable of expanding and contracting, and the expansion and contraction state of the tip of the suction nozzle 60 is inspected based on the load measured by the load cell 142.
 また、ジョイント146は、エア供給装置130の下面に配設され、そのエア供給装置130からエアが供給される。そして、エア供給装置130からジョイント146に供給されるエアを用いて、吸着ノズル60のエア流量検査が行われる。詳しくは、ジョイント146が、ヘッド移動装置122の作動により、後述する洗浄パレット158に載置された吸着ノズル60の上方に移動する。そして、ジョイント146が、検査対象の吸着ノズル60に接続され、エア供給装置130からエアが供給される。この際にエア圧が測定され、そのエア圧に基づいて、吸着ノズル60のエア流量検査が行われる。 The joint 146 is also disposed on the underside of the air supply device 130, and air is supplied from the air supply device 130. An air flow inspection of the suction nozzle 60 is then performed using air supplied from the air supply device 130 to the joint 146. In more detail, the joint 146 is moved above the suction nozzle 60 placed on the cleaning pallet 158, which will be described later, by the operation of the head moving device 122. The joint 146 is then connected to the suction nozzle 60 to be inspected, and air is supplied from the air supply device 130. At this time, the air pressure is measured, and an air flow inspection of the suction nozzle 60 is performed based on the air pressure.
 なお、フレーム部102の上面には、複数の廃棄ボックス148が配設されており、上記検査により不良ノズルと判定された吸着ノズル60は、廃棄ボックス148に廃棄される。また、上記検査により正常なノズルと判定された吸着ノズル60は、固定ステージ131にセットされたノズルトレイ76若しくは、ノズルパレット110に戻される。 In addition, a number of disposal boxes 148 are provided on the upper surface of the frame portion 102, and suction nozzles 60 determined to be defective by the above inspection are disposed of in the disposal boxes 148. In addition, suction nozzles 60 determined to be normal by the above inspection are returned to the nozzle tray 76 set on the fixed stage 131 or the nozzle pallet 110.
 ノズル洗浄装置98は、吸着ノズル60の洗浄および乾燥を行う装置であり、パレット収容装置92の隣に配設されている。ノズル洗浄装置98は、洗浄・乾燥機構150と洗浄パレット移動機構152とを備えている。洗浄・乾燥機構150は、内部において吸着ノズル60の洗浄および乾燥を行う機構である。また、洗浄パレット移動機構152は、洗浄パレット158が露出する露出位置(図5で洗浄パレット158が図示されている位置)と、洗浄・乾燥機構150の内部との間で、洗浄パレット158を移動させる機構である。 The nozzle cleaning device 98 is a device that cleans and dries the suction nozzles 60, and is disposed next to the pallet storage device 92. The nozzle cleaning device 98 is equipped with a cleaning and drying mechanism 150 and a cleaning pallet moving mechanism 152. The cleaning and drying mechanism 150 is a mechanism that cleans and dries the suction nozzles 60 inside. The cleaning pallet moving mechanism 152 is a mechanism that moves the cleaning pallet 158 between an exposed position where the cleaning pallet 158 is exposed (the position where the cleaning pallet 158 is illustrated in Figure 5) and the interior of the cleaning and drying mechanism 150.
 ノズル乾燥装置100は、吸着ノズル60の乾燥を行う装置であり、露出位置に位置する洗浄パレット158の隣に配設されている。 The nozzle drying device 100 is a device that dries the suction nozzle 60 and is disposed next to the cleaning pallet 158 that is positioned in the exposed position.
(制御装置)
 ノズル管理装置80は、制御装置80aを備えている。制御装置80aは、パレット収容装置92、ノズル移載装置94、ノズル検査装置96、ノズル洗浄装置98、及び、ノズル乾燥装置100を駆動制御する制御装置である。特に、制御装置80aは、ノズル移載装置94(把持チャック128)を駆動して吸着ノズル60を移載し、把持チャック128によって上記載置トレイに載置された吸着ノズル60の載置状態が正常であるか否かの判定を実施したり(判定部)、正常でない旨の判定がされた場合に、吸着ノズル60の載置状態を正常状態に回復したり(回復部)する。
(Control device)
The nozzle management device 80 includes a control device 80a. The control device 80a is a control device that drives and controls the pallet storage device 92, the nozzle transfer device 94, the nozzle inspection device 96, the nozzle cleaning device 98, and the nozzle drying device 100. In particular, the control device 80a drives the nozzle transfer device 94 (the gripping chuck 128) to transfer the suction nozzle 60, determines whether the placement state of the suction nozzle 60 placed on the placement tray by the gripping chuck 128 is normal (determination unit), and when it is determined that the placement state is not normal, restores the placement state of the suction nozzle 60 to the normal state (recovery unit).
 制御装置80aは、図9に示すように、入力装置80b、表示装置80c、記憶装置80d、カメラ(撮像装置)126、ノズル移載装置94(ヘッド移動装置122,把持チャック128)、及びシャッタ機構170に接続されている。 As shown in FIG. 9, the control device 80a is connected to an input device 80b, a display device 80c, a storage device 80d, a camera (imaging device) 126, a nozzle transfer device 94 (head moving device 122, gripping chuck 128), and a shutter mechanism 170.
 入力装置80bは、ノズル管理装置80の前面に設けられており、作業者(ユーザ)が各種設定、各種指示などを制御装置80aに入力するためのものである。表示装置80cは、ノズル管理装置80の前面に設けられており、作業者に対して運転状況やメンテナンス状況などの情報を表示するためのものである。記憶装置80dは、ノズル管理装置80の制御に係るデータ、例えば、制御プログラム(加工プログラム)、制御プログラムで使用するパラメータ、各種設定や各種指示に関するデータ、撮像データなどを記憶している(記憶部)。 The input device 80b is provided on the front of the nozzle management device 80 and allows the operator (user) to input various settings and instructions to the control device 80a. The display device 80c is provided on the front of the nozzle management device 80 and displays information such as the operating status and maintenance status to the operator. The storage device 80d stores data related to the control of the nozzle management device 80, such as the control program (machining program), parameters used in the control program, data related to various settings and instructions, imaging data, etc. (storage unit).
 制御装置80aは、マイクロコンピュータ(不図示)を有しており、マイクロコンピュータは、バスを介してそれぞれ接続された入出力インターフェース、CPU、RAMおよびROM(いずれも不図示)を備えている。CPUは、各種プログラムを実施して、入力装置80b、記憶装置80d、カメラ126及びシャッタ機構170からデータ、検出信号、制御情報などを取得したり、表示装置80c、ノズル移載装置94及びシャッタ機構170を制御したりする。RAMは同プログラムの実施に必要な変数を一時的に記憶するものであり、ROMは前記プログラムを記憶するものである。 The control device 80a has a microcomputer (not shown), which is equipped with an input/output interface, a CPU, a RAM, and a ROM (all not shown), each of which are connected via a bus. The CPU executes various programs to obtain data, detection signals, control information, etc. from the input device 80b, the storage device 80d, the camera 126, and the shutter mechanism 170, and controls the display device 80c, the nozzle transfer device 94, and the shutter mechanism 170. The RAM temporarily stores variables necessary for executing the programs, and the ROM stores the programs.
 制御装置80aは、図9に示すように、判定部80a1、及び回復部80a2を備えている。判定部80a1は、把持チャック128によって上記載置トレイに載置された吸着ノズル60の載置状態が正常であるか否かの判定を実施する。回復部80a2は、判定部80a1によって正常でない旨の判定がされた場合に、吸着ノズル60の載置状態を正常状態に回復する。 As shown in FIG. 9, the control device 80a includes a judgment unit 80a1 and a recovery unit 80a2. The judgment unit 80a1 judges whether the placement state of the suction nozzle 60 placed on the placement tray by the gripping chuck 128 is normal or not. The recovery unit 80a2 recovers the placement state of the suction nozzle 60 to the normal state when the judgment unit 80a1 judges that the placement state is not normal.
(載置状態の判定・回復)
 さらに、上述したノズル管理装置80(または部品実装機10)における作動(載置状態の判定・回復)について図10に示すフローチャートを参照して説明する。制御装置80aは、ノズル検査運転開始の指示があれば、ノズル検査の自動運転を開始する。
(Determining and restoring the loading state)
Furthermore, the operation (determination and recovery of the placement state) of the nozzle management device 80 (or the component mounter 10) described above will be described with reference to the flowchart shown in Fig. 10. When an instruction to start a nozzle inspection operation is received, the control device 80a starts automatic operation of the nozzle inspection.
 制御装置80aは、ステップS102において、トレイ76の吸着ノズル60をパレット110に移載する。具体的には、制御装置80aは、ヘッド移動装置122を駆動して把持チャック128を移載対象の吸着ノズル60の真上に移動させる。次に、制御装置80aは、把持チャック128を下降させて、吸着ノズル60を把持し、把持したまま上昇位置まで上昇させる。 In step S102, the control device 80a transfers the suction nozzle 60 of the tray 76 to the pallet 110. Specifically, the control device 80a drives the head moving device 122 to move the gripping chuck 128 directly above the suction nozzle 60 to be transferred. Next, the control device 80a lowers the gripping chuck 128 to grip the suction nozzle 60, and then raises it to the raised position while still gripping it.
 そして、制御装置80aは、シャッタ機構170を駆動してカバープレート110bを載置穴開状態とすることにより、シャッタ開を実施する。次に、制御装置80aは、ヘッド移動装置122を駆動して、吸着ノズル60を把持した把持チャック128をパレット110の移載先の載置穴110cの真上に移動させる。さらに、把持チャック128を下降位置(解放位置)まで下降させて、吸着ノズル60を移載先の載置穴110cに解放(投入)し、その後吸着ノズル60を把持していない把持チャック128を上昇位置まで上昇させる。 Then, the control device 80a drives the shutter mechanism 170 to open the cover plate 110b to the mounting hole open state, thereby opening the shutter. Next, the control device 80a drives the head moving device 122 to move the gripping chuck 128 gripping the suction nozzle 60 directly above the mounting hole 110c of the transfer destination of the pallet 110. Furthermore, the gripping chuck 128 is lowered to the lowered position (released position) to release (insert) the suction nozzle 60 into the transfer destination mounting hole 110c, and then the gripping chuck 128 that is not gripping the suction nozzle 60 is raised to the raised position.
 制御装置80aは、ステップS104において、カメラ126によって吸着ノズル60の載置穴110cへの載置状態を撮像する。尚、制御装置80aは、その撮像データを記憶装置80dに記憶することが可能である。さらに、制御装置80aは、ステップS106において、把持チャック128によってパレット110(載置トレイ)の載置穴110cに載置された吸着ノズル60の載置状態が正常であるか否かの判定を実施する(判定部)。 In step S104, the control device 80a uses the camera 126 to capture an image of the placement state of the suction nozzle 60 in the placement hole 110c. The control device 80a can store the captured image data in the storage device 80d. Furthermore, in step S106, the control device 80a performs a determination as to whether the placement state of the suction nozzle 60 placed in the placement hole 110c of the pallet 110 (placement tray) by the gripping chuck 128 is normal or not (determination unit).
 制御装置80aは、ステップS106において、カメラ126(第1撮像装置)によって撮像された撮像結果(撮像データ)に基づいて上記判定を実施する。制御装置80aは、パレット110の所定の箇所(部位)または吸着ノズル60の所定の箇所(部位)に係る撮像データに基づいて前記判定を実施する。例えば、パレット110の所定の箇所としては、ピン110eが好適であり、吸着ノズル60の所定の箇所としては、胴体筒64の上端部が好適であり、特に胴体筒64の内側筒64aがより好適である。 In step S106, the control device 80a makes the above-mentioned judgment based on the imaging results (imaging data) captured by the camera 126 (first imaging device). The control device 80a makes the above-mentioned judgment based on imaging data relating to a predetermined location (part) of the pallet 110 or a predetermined location (part) of the suction nozzle 60. For example, the pin 110e is preferable as the predetermined location of the pallet 110, and the upper end of the body tube 64 is preferable as the predetermined location of the suction nozzle 60, and in particular the inner tube 64a of the body tube 64 is even more preferable.
 ステップS106において、制御装置80aは、ノズル60の載置状態が正常であるか異常であるかを判定する。制御装置80aは、撮像データ(画像データ)から、ピン110eを認定(認識)するとともに、胴体筒64(または内側筒64a)の上端及びノッチ75を認定する。そして、制御装置80aは、認定したピン110eの有無に基づいて、ノズル60が正常回転位置でなく正常回転位置からずれた異常回転位置にある、回転異常であるか否かを判定し、認定した胴体筒64の中心座標P1を算出し、その算出した座標に基づいて、ノズル60すなわち胴体筒64が傾いた傾き異常であるか否かを判定する。 In step S106, the control device 80a determines whether the placement of the nozzle 60 is normal or abnormal. The control device 80a identifies (recognizes) the pin 110e from the imaging data (image data), and also identifies the upper end and notch 75 of the body tube 64 (or inner tube 64a). Based on the presence or absence of the identified pin 110e, the control device 80a then determines whether the nozzle 60 is not in a normal rotation position but is in an abnormal rotation position deviated from the normal rotation position, that is, whether there is a rotation abnormality, calculates the center coordinate P1 of the identified body tube 64, and determines whether the nozzle 60, i.e., the body tube 64, is tilted abnormally, based on the calculated coordinates.
 図11Aに示すように、ノズル60が正常に載置されている場合には、ノズル60が正常回転位置にありノズル60のノッチ75内にピン110eが収まっているため、ピン110eを全体的に撮像することができ、さらに、胴体筒64の上端を撮像することができる。換言すると、制御装置80aは、図11Aに示すような撮像データから、ピン110eを認定することができ、胴体筒64の中心座標を算出することができる。尚、図11では、掛止ピン70及び2Dコード74を省略している。 As shown in FIG. 11A, when the nozzle 60 is placed correctly, the nozzle 60 is in the normal rotation position and the pin 110e is fitted in the notch 75 of the nozzle 60, so that the pin 110e can be imaged as a whole, and further, the upper end of the body tube 64 can be imaged. In other words, the control device 80a can identify the pin 110e from the image data as shown in FIG. 11A, and can calculate the center coordinates of the body tube 64. Note that the latch pin 70 and 2D code 74 are omitted in FIG. 11.
 制御装置80aは、認定したピン110eが有る場合、ノズル60のノッチ75内にピン110eが収まっていると判定でき、ノズル60が正常回転位置にあると判定する。また、制御装置80aは、算出した胴体筒64の中心座標が予め記憶している設計値と一致する場合、ノズル60すなわち胴体筒64が傾いていない正常である(正常傾き状態)と判定する。このように、認定したピン110eが有り、かつ、胴体筒64の中心座標が設計値と一致する場合には、制御装置80aは、ノズル60の載置状態が正常である旨を判定する。 If the controller 80a detects the presence of the recognized pin 110e, it can determine that the pin 110e is contained within the notch 75 of the nozzle 60, and determines that the nozzle 60 is in a normal rotation position. Furthermore, if the calculated central coordinates of the body tube 64 match the pre-stored design values, the controller 80a determines that the nozzle 60, i.e., the body tube 64, is not tilted and is normal (normal tilt state). In this way, if the controller 80a detects the presence of the recognized pin 110e and the central coordinates of the body tube 64 match the design values, the controller 80a determines that the placement of the nozzle 60 is normal.
 一方、図11Bに示すように、ノズル60が正常回転位置に対してθ度ずれて載置されている場合(回転異常)には、ノズル60のフランジ部66がピン110eを覆った状態であるため、ピン110eをほとんど撮像することができないものの、胴体筒64の上端を撮像することができる。換言すると、制御装置80aは、図11Bに示すような撮像データから、ピン110eを認定することができないが、胴体筒64の中心座標を算出することができる。 On the other hand, as shown in Figure 11B, when the nozzle 60 is placed with a deviation of θ degrees from the normal rotation position (abnormal rotation), the flange portion 66 of the nozzle 60 covers the pin 110e, so the pin 110e cannot be imaged at all, but the upper end of the body tube 64 can be imaged. In other words, the control device 80a cannot identify the pin 110e from the image data shown in Figure 11B, but can calculate the center coordinates of the body tube 64.
 尚、このとき、制御装置80aは、ノッチ75を認定することができるので、ノッチ75の中心座標を算出し、算出したノッチ75の中心座標と、胴体筒64の中心座標と、ピン110eの設計値(予め記憶された値)とから、回転ずれ角度θを算出することができる。また、制御装置80aは、算出した胴体筒64の中心座標が設計値に対して許容範囲内にあることを確認する。許容範囲内にない場合には、後述するように、ノズル60は傾き異常であると判定できる。 Note that at this time, since the control device 80a can identify the notch 75, it can calculate the center coordinate of the notch 75 and calculate the rotational deviation angle θ from the calculated center coordinate of the notch 75, the center coordinate of the body tube 64, and the design value of the pin 110e (a value stored in advance). The control device 80a also verifies that the calculated center coordinate of the body tube 64 is within an allowable range for the design value. If it is not within the allowable range, it can be determined that the nozzle 60 has an abnormal tilt, as described below.
 制御装置80aは、算出した胴体筒64の中心座標が予め記憶している設計値と一致する場合、ノズル60すなわち胴体筒64が傾いていない正常であると判定する。一方、認定したピン110eがない場合、ノズル60のノッチ75内にピン110eが収まっていないと判定でき、ノズル60が異常回転位置にあると判定する。このように、胴体筒64の中心座標が設計値と一致していても、認定したピン110eがない場合には、制御装置80aは、ノズル60の載置状態が回転異常である旨を判定する。 If the calculated center coordinates of the body tube 64 match the pre-stored design values, the control device 80a determines that the nozzle 60, i.e., the body tube 64, is not tilted and is normal. On the other hand, if the recognized pin 110e is not present, it can be determined that the pin 110e is not contained within the notch 75 of the nozzle 60, and the nozzle 60 is determined to be in an abnormal rotation position. In this way, even if the center coordinates of the body tube 64 match the design values, if the recognized pin 110e is not present, the control device 80a determines that the nozzle 60 is placed in an abnormal rotation position.
 さらに、図11Cに示すように、ノズル60が軸方向に対して傾いて載置されている場合(傾き異常)には、胴体筒64の上端を撮像することができるものの、ノズル60は傾いているため、胴体筒64の中心座標P1が傾いた方向にずれた状態にて撮像される。換言すると、制御装置80aは、図11Cに示すような撮像データから、胴体筒64の中心座標P1(設計値P1refよりズレた値である)を算出することができる。尚、ピン110eはノッチ75内に収容されていれば、ピン110eも撮像され、一方、ノズル60のフランジ部66がピン110eを覆っている場合にはめ、ピン110eをほとんど撮像することができない。 Furthermore, as shown in FIG. 11C, when the nozzle 60 is placed tilted relative to the axial direction (abnormal tilt), the upper end of the body tube 64 can be imaged, but because the nozzle 60 is tilted, the center coordinate P1 of the body tube 64 is imaged with the coordinate shifted in the tilted direction. In other words, the control device 80a can calculate the center coordinate P1 of the body tube 64 (a value shifted from the design value P1ref) from the image data shown in FIG. 11C. Note that if the pin 110e is housed within the notch 75, the pin 110e is also imaged, but if the flange portion 66 of the nozzle 60 covers the pin 110e, the pin 110e cannot be imaged at all.
 制御装置80aは、算出した胴体筒64の中心座標P1が予め記憶している設計値P1refに対して許容範囲内にある場合(中心軸ズレがない場合)、ノズル60すなわち胴体筒64が傾いていない正常であると判定する。一方、制御装置80aは、算出した胴体筒64の中心座標P1が予め記憶している設計値P1refに対して許容範囲内にない場合(中心軸ズレがある場合)、ノズル60すなわち胴体筒64が傾いている傾き異常であると判定する。 If the calculated center coordinate P1 of the body tube 64 is within the tolerance range of the pre-stored design value P1ref (if there is no central axis misalignment), the control device 80a determines that the nozzle 60, i.e., the body tube 64, is not tilted and is normal. On the other hand, if the calculated center coordinate P1 of the body tube 64 is not within the tolerance range of the pre-stored design value P1ref (if there is a central axis misalignment), the control device 80a determines that the nozzle 60, i.e., the body tube 64, is tilted and has an abnormal tilt.
 尚、回転異常である場合には、フランジ部66がピン110eの上端に接触するためノズル60が傾くので、傾き異常と判定される割合が比較的高いと推定される。よって、ピン110eの有無を確認することなく、ノズル60の中心軸ズレのみを確認するようにしてもよい。 In addition, if there is a rotation abnormality, the nozzle 60 will tilt because the flange portion 66 comes into contact with the upper end of the pin 110e, so it is estimated that the probability of determining that there is an abnormal tilt is relatively high. Therefore, it is also possible to check only for the central axis deviation of the nozzle 60 without checking for the presence or absence of the pin 110e.
(正常状態)
 制御装置80aは、判定対象であるノズル60が正常状態であると判定した場合には、プログラムをステップS108に進めて、シャッタ機構170を駆動してカバープレート110bを載置穴閉状態とすることにより、シャッタ閉を実施する。このとき、ノズル60はパレット110の載置穴110cに正常状態にて載置されているので、シャッタ閉が実施されても、カバープレート110bが閉まらないという不具合が生じることはない。また、ノズル60を載置する度にシャッタ閉を実施するので、載置されたノズル60がカバープレート110bによって覆われ、正常状態にあるノズル60が異常状態となったり、外に飛び出したりするのを確実に抑制することが可能となる。
(Normal state)
When the control device 80a judges that the nozzle 60 to be judged is in a normal state, the control device 80a advances the program to step S108, and closes the shutter by driving the shutter mechanism 170 to close the cover plate 110b in the mounting hole. At this time, since the nozzle 60 is normally placed in the mounting hole 110c of the pallet 110, even if the shutter is closed, the cover plate 110b does not close. In addition, since the shutter is closed every time the nozzle 60 is placed, the placed nozzle 60 is covered by the cover plate 110b, and it is possible to reliably prevent the nozzle 60 in a normal state from becoming abnormal or jumping out.
 尚、シャッタの開閉状態は、カバープレート110bの開き端に設け開状態を検知する開センサ、及びカバープレート110bの閉じ端に設け閉状態を検知する閉センサによって検出することが可能である。シャッタを閉じる閉指令が実施された際に閉センサが閉状態を検出しない場合には、シャッタの閉異常を判定することが可能となる。シャッタを開く開指令が実施された際に開センサが開状態を検出しない場合には、シャッタの開異常を判定することが可能となる。 The open/closed state of the shutter can be detected by an open sensor provided at the open end of the cover plate 110b to detect the open state, and a close sensor provided at the closed end of the cover plate 110b to detect the closed state. If the close sensor does not detect the closed state when a close command to close the shutter is executed, it is possible to determine whether the shutter is closed. If the open sensor does not detect the open state when an open command to open the shutter is executed, it is possible to determine whether the shutter is open.
 その後、制御装置80aは、プログラムをステップS102に戻して次の判定対象であるノズル60の判定を実施する。このように、制御装置80aは、ノズル60をパレット110(載置トレイ)に載置する毎に上記判定を実施する。また、制御装置80aは、全てのノズル60の判定を終了するまで、ステップS102~ステップS108の処理を繰り返し実施する。 Then, the control device 80a returns the program to step S102 and performs a judgment on the next nozzle 60 to be judged. In this way, the control device 80a performs the above judgment every time a nozzle 60 is placed on the pallet 110 (loading tray). The control device 80a also repeats the processing of steps S102 to S108 until it has finished judging all of the nozzles 60.
(異常状態判定・回復処理)
 制御装置80aは、ステップS106(判定部80a1)によって正常でない旨の判定がされた場合に、ノズル60の載置状態を正常状態に回復する(回復部)。このとき、制御装置80aは、把持チャック128を使用してノズル60の載置状態を回復する。
(Abnormal state determination and recovery processing)
When the determination in step S106 (determination unit 80a1) is that the nozzle 60 is not normal, the control device 80a restores the placement state of the nozzle 60 to the normal state (recovery unit). At this time, the control device 80a uses the gripping chuck 128 to restore the placement state of the nozzle 60.
(回転異常状態)
 具体的には、制御装置80aは、判定対象であるノズル60が回転異常状態であると判定した場合には、プログラムをステップS110以降に進めて、回転異常状態を正常状態に回復する回復処理(回転補正)を実施する。制御装置80aは、ステップS110において、異常判定回数が所定回数(例えばNa回)となったか否かを判定し、異常判定回数が所定回数以上である場合には、ステップS110にて「YES」と判定し、プログラムをステップS114に進め、エラー停止処理を実施する。エラー停止処理は、エラーである旨を発信し、ノズル60の移載を停止する処理である。異常判定が連続してNa回繰り返される場合には、メンテナンスが必要なエラーが発生したと判定し、ノズル管理装置80を確実に停止させることが可能となる。
(Abnormal rotation state)
Specifically, when the control device 80a determines that the nozzle 60 to be determined is in an abnormal rotation state, the control device 80a advances the program to step S110 and thereafter to perform a recovery process (rotation correction) for recovering the abnormal rotation state to a normal state. In step S110, the control device 80a determines whether the number of abnormality determinations has reached a predetermined number (for example, Na times), and if the number of abnormality determinations is equal to or greater than the predetermined number, the control device 80a determines "YES" in step S110 and advances the program to step S114 to perform an error stop process. The error stop process is a process for transmitting an error and stopping the transfer of the nozzle 60. When the abnormality determination is repeated Na times in succession, it is determined that an error requiring maintenance has occurred, and it becomes possible to reliably stop the nozzle management device 80.
 一方、制御装置80aは、異常判定回数が所定回数Na未満である場合には、ステップS110にて「NO」と判定し、プログラムをステップS112に進め、回転補正処理を実施する。ステップS112において、制御装置80aは、ヘッド移動装置122を駆動して把持チャック128を回転補正処理の必要な(回転異常と判定された)吸着ノズル60の真上に移動させる。次に、制御装置80aは、把持チャック128を下降させて、吸着ノズル60を把持し、把持したまま上昇位置まで上昇させる。 On the other hand, if the number of abnormality determinations is less than the predetermined number Na, the control device 80a determines "NO" in step S110 and advances the program to step S112 to perform rotation correction processing. In step S112, the control device 80a drives the head moving device 122 to move the gripping chuck 128 directly above the suction nozzle 60 that requires rotation correction processing (that has been determined to have a rotation abnormality). Next, the control device 80a lowers the gripping chuck 128 to grip the suction nozzle 60, and raises it to the raised position while still gripping it.
 さらに、制御装置80aは、ヘッド移動装置122を駆動して、異常回転位置にあるノズル60を、上述したように算出した回転ずれ角度θだけ回転させて正常回転位置に回転することにより、ノズル60の回転位置を補正する。その後、把持チャック128を下降位置(解放位置)まで下降させて、吸着ノズル60を移載先の載置穴110cに解放(投入)し、その後吸着ノズル60を把持していない把持チャック128を上昇位置まで上昇させる。 Furthermore, the control device 80a drives the head moving device 122 to rotate the nozzle 60, which is in the abnormal rotation position, by the rotation deviation angle θ calculated as described above to the normal rotation position, thereby correcting the rotation position of the nozzle 60. After that, the gripping chuck 128 is lowered to the lowered position (released position) to release (insert) the suction nozzle 60 into the destination mounting hole 110c, and then the gripping chuck 128 that is not gripping the suction nozzle 60 is raised to the raised position.
 その後、制御装置80aは、プログラムをステップS104以降に戻し、回復処理されたノズル60の載置状態を撮像し(ステップS104)、撮像データに基づいて載置状態の判定を実施する(ステップS106)。 Then, the control device 80a returns the program to step S104 and after, captures an image of the placement state of the nozzle 60 that has been restored (step S104), and determines the placement state based on the captured image data (step S106).
(傾き異常状態)
 また、制御装置80aは、判定対象であるノズル60が傾き異常状態であると判定した場合には、プログラムをステップS116以降に進めて、傾き異常状態を正常状態に回復する回復処理(傾き補正)を実施する。制御装置80aは、ステップS116において、上述したステップS110と同様に、異常判定回数が所定回数(例えばNa回)となったか否かを判定し、異常判定回数が所定回数Na以上である場合には、ステップS116にて「YES」と判定し、プログラムをステップS114に進め、エラー停止処理を実施する。
(Abnormal tilt state)
Furthermore, when the control device 80a determines that the nozzle 60 being judged is in an abnormal tilt state, the control device 80a advances the program to step S116 and onward to carry out recovery processing (tilt correction) for restoring the abnormal tilt state to a normal state. In step S116, similar to step S110 described above, the control device 80a determines whether the number of abnormality judgments has reached a predetermined number (e.g., Na times), and if the number of abnormality judgments is equal to or greater than the predetermined number Na, the control device 80a determines "YES" in step S116, advances the program to step S114, and carries out error stop processing.
 一方、制御装置80aは、異常判定回数が所定回数Na未満である場合には、ステップS116にて「NO」と判定し、プログラムをステップS118以降に進め、傾き補正(掴み直し)処理を実施する。ステップS118において、制御装置80aは、ヘッド移動装置122を駆動して把持チャック128を傾き補正処理の必要な(傾き異常と判定された)吸着ノズル60の真上に移動させる。次に、制御装置80aは、把持チャック128を下降させて、吸着ノズル60を把持し、その後解放することにより吸着ノズル60の掴み直しを実施する。尚、制御装置80aは、掴み直した後に撮像装置によって吸着ノズル60の載置状態を撮像しその撮像結果に基づいて上記判定を実施するようにしてもよい。 On the other hand, if the number of abnormality determinations is less than the predetermined number Na, the control device 80a determines "NO" in step S116, advances the program to step S118 and onward, and performs tilt correction (re-gripping) processing. In step S118, the control device 80a drives the head moving device 122 to move the gripping chuck 128 directly above the suction nozzle 60 that requires tilt correction processing (determined to have an abnormal tilt). Next, the control device 80a lowers the gripping chuck 128 to grip the suction nozzle 60, and then releases it to re-grrip the suction nozzle 60. Note that after re-gripping, the control device 80a may image the placement state of the suction nozzle 60 using an imaging device and perform the above-mentioned determination based on the imaging result.
 さらに、制御装置80aは、掴み直しを所定回数(例えばNb回)繰り返し実施する。制御装置80aは、掴み直し回数が所定回数Nb未満である場合には、ステップS120にて「NO」と判定し、プログラムをステップS118に戻して、吸着ノズル60の掴み直しを実施する。一方、制御装置80aは、掴み直し回数が所定回数Nb以上である場合には、ステップS120にて「YES」と判定し、プログラムをステップS104以降に戻し、回復処理されたノズル60の載置状態を撮像し(ステップS104)、撮像データに基づいて載置状態の判定を実施する(ステップS106)。尚、制御装置80aは、掴み直しをNb回実施した後には、吸着ノズル60を把持していない把持チャック128を上昇位置まで上昇させる。 Furthermore, the control device 80a repeats the re-gripping a predetermined number of times (for example, Nb times). If the number of re-gripping times is less than the predetermined number Nb, the control device 80a judges "NO" in step S120, returns the program to step S118, and re-gripping the suction nozzle 60. On the other hand, if the number of re-gripping times is equal to or greater than the predetermined number Nb, the control device 80a judges "YES" in step S120, returns the program to step S104 and subsequent steps, images the placement state of the recovered nozzle 60 (step S104), and determines the placement state based on the image data (step S106). After performing re-gripping Nb times, the control device 80a raises the gripping chuck 128 that is not gripping the suction nozzle 60 to the raised position.
 上述した把持チャック128(把持装置)と、パレット110(載置トレイ)と、判定部80a1と、を備え、吸着ノズル60(把持対象物)を移載するための装置が、把持対象物移載装置であり、本実施形態では、把持対象物移載装置を含むノズル管理装置80が該当する。また、ノズル管理装置80は、上述した把持対象物移載装置、及び吸着ノズル60(把持対象物)を洗浄するノズル洗浄装置98を備えているので、本明細書で開示する洗浄装置と言うことができる。 The device that includes the above-mentioned gripping chuck 128 (gripping device), pallet 110 (loading tray), and judgment unit 80a1 and that transfers the suction nozzle 60 (grasped object) is the gripping object transfer device, and in this embodiment, this corresponds to the nozzle management device 80 that includes the gripping object transfer device. In addition, since the nozzle management device 80 includes the above-mentioned gripping object transfer device and the nozzle cleaning device 98 that cleans the suction nozzle 60 (grasped object), it can be said to be the cleaning device disclosed in this specification.
(変形例)
 尚、上述した実施形態において、ノズル管理装置80が吸着ノズル60の載置状態の判定を実施するようにしたが、部品実装機10においても該判定を実施するようにしてもよい。この場合、部品実装機10においては、ホルダ26bの先端部にて吸着ノズル60を把持可能であり、ノズルトレイ76に載置された吸着ノズル60を撮像する撮像装置25(第1撮像装置)が装着ヘッド26の下端部に設けられており、撮像データに基づいて吸着ノズル60の載置状態の判定を実施する制御装置(不図示)が設けられている。該制御装置は、制御装置80aと同様に、ホルダ26bによってノズルトレイ76に載置された吸着ノズル60の載置状態の判定を実施する。尚、撮像装置25は、基板Sに付されたマークを撮像するためのものである。
(Modification)
In the above embodiment, the nozzle management device 80 judges the placement state of the suction nozzle 60, but the component mounter 10 may also perform this judgment. In this case, the component mounter 10 is capable of gripping the suction nozzle 60 at the tip of the holder 26b, an imaging device 25 (first imaging device) that images the suction nozzle 60 placed on the nozzle tray 76 is provided at the lower end of the mounting head 26, and a control device (not shown) that judges the placement state of the suction nozzle 60 based on the image data is provided. The control device judges the placement state of the suction nozzle 60 placed on the nozzle tray 76 by the holder 26b, similarly to the control device 80a. The imaging device 25 is for imaging the mark attached to the board S.
 また、上述した実施形態においては、撮像装置を使用して載置トレイに載置された吸着ノズル60の載置状態を撮像し、その撮像結果(撮像データ)に基づいて上記判定を実施するようにしたが、撮像装置に代えて三次元測定装置を使用して載置トレイに載置された吸着ノズル60の載置状態を測定し、その測定結果(測定データ)に基づいて上記判定を実施するようにしてもよい。三次元測定装置としては、接触式(タッチプローブ)のもの、非接触式(走査レーザプローブタイプや光学タイプ)のものが挙げられる。 In the above-described embodiment, an imaging device is used to image the placement state of the suction nozzle 60 placed on the placement tray, and the above judgment is made based on the imaging results (image data). However, instead of an imaging device, a three-dimensional measuring device may be used to measure the placement state of the suction nozzle 60 placed on the placement tray, and the above judgment may be made based on the measurement results (measurement data). Three-dimensional measuring devices include contact type (touch probe) and non-contact type (scanning laser probe type or optical type).
 また、上述した実施形態においては、撮像装置として標準的な撮像範囲を撮像可能である第1撮像装置(例えばCCDカメラ)を採用するようにしたが、標準的な撮像範囲より広範囲な撮像範囲を撮像可能である第2撮像装置126a(図9参照)を採用するようにしてもよい。第2撮像装置としては、例えば広角レンズを有するCCDカメラが挙げられる。第2撮像装置126aは、載置トレイに載置されている複数の吸着ノズル60を一度に撮像可能である。 In addition, in the above-described embodiment, a first imaging device (e.g., a CCD camera) capable of capturing an image of a standard imaging range is used as the imaging device, but a second imaging device 126a (see FIG. 9) capable of capturing an image of a wider imaging range than the standard imaging range may also be used. An example of the second imaging device is a CCD camera with a wide-angle lens. The second imaging device 126a is capable of capturing an image of multiple suction nozzles 60 placed on the loading tray at once.
 この場合、上記制御装置80aは、第2撮像装置126aによって撮像された撮像結果に基づいて上記判定を実施する。尚、制御装置80aは、吸着ノズル60を解放(載置穴110cに投入)する度に載置状態の上記判定を実施するのではなく、載置(移載)対象の吸着ノズル60を全て(または複数の一部)を載置穴110cに移載(投入)した後に上記判定を実施することが可能となる。具体的には、制御装置80aは、上記ステップS102において、載置(移載)対象である全ての吸着ノズル60を移載する。制御装置80aは、上記ステップS104において、パレット110上に載置されている複数の吸着ノズル60を一度に撮像する。制御装置80aは、上記ステップS106において、各吸着ノズル60について上記判定をそれぞれ実施する。さらに、制御装置80aは、異常状態と判定された吸着ノズル60を異常種類毎にまとめて回復処理を実施する。その後、上記ステップS108と同様にシャッタ閉処理を実施する。 In this case, the control device 80a performs the above judgment based on the image captured by the second image capture device 126a. The control device 80a does not perform the above judgment of the placement state every time the suction nozzle 60 is released (inserted into the placement hole 110c), but can perform the above judgment after transferring (inserting) all (or a part of multiple) of the suction nozzles 60 to be placed (transferred) into the placement hole 110c. Specifically, in the above step S102, the control device 80a transfers all of the suction nozzles 60 to be placed (transferred). In the above step S104, the control device 80a captures images of the multiple suction nozzles 60 placed on the pallet 110 at once. In the above step S106, the control device 80a performs the above judgment for each suction nozzle 60. Furthermore, the control device 80a performs recovery processing for the suction nozzles 60 determined to be in an abnormal state, grouping them by abnormality type. Thereafter, the shutter closing processing is performed in the same manner as in the above step S108.
 また、上述した実施形態においては、吸着ノズル60を解放(載置穴110cに投入)する度に載置状態の判定を実施するようにしたが、複数の吸着ノズル60を移載した後、第1撮像装置を使用してそれらの吸着ノズル60を一度にまとめて撮像し、その撮像結果に基づいて上記判定を実施するようにしてもよい。 In addition, in the above-described embodiment, the placement state is determined each time the suction nozzle 60 is released (inserted into the placement hole 110c), but after multiple suction nozzles 60 are transferred, the first imaging device may be used to image the suction nozzles 60 all at once, and the above-described determination may be made based on the imaging results.
 尚、本開示は上述した実施形態に何ら限定されることはなく、本開示の技術的範囲に属する限り種々の態様で実施し得ることはいうまでもない。 It goes without saying that this disclosure is in no way limited to the above-described embodiments, and can be implemented in various forms as long as they fall within the technical scope of this disclosure.
(実施形態の作用効果)
 上述した実施形態による把持対象物移載装置(ノズル管理装置80)は、把持対象物(吸着ノズル60)を把持するための把持装置(把持チャック128)と、吸着ノズル60が載置可能である載置トレイ(トレイ76またはパレット110)と、把持チャック128によってパレット110(またはトレイ76)に載置された吸着ノズル60の載置状態が正常であるか否かの判定を実施する判定部80a1(制御装置80a:ステップS106)と、を備えている。
(Effects of the embodiment)
The gripping object transfer device (nozzle management device 80) according to the embodiment described above comprises a gripping device (gripping chuck 128) for gripping the gripping object (suction nozzle 60), a loading tray (tray 76 or pallet 110) on which the suction nozzle 60 can be placed, and a judgment unit 80a1 (control device 80a: step S106) that judges whether the loading condition of the suction nozzle 60 placed on the pallet 110 (or tray 76) by the gripping chuck 128 is normal or not.
 本実施形態によれば、判定部80a1(制御装置80a:ステップS106)が把持チャック128によってパレット110(またはトレイ76)に載置された吸着ノズル60の載置状態が正常であるか否かの判定を実施することが可能となる。よって、吸着ノズル60の載置状態が正常であるか否かを確実に判定することができる。 According to this embodiment, the judgment unit 80a1 (control device 80a: step S106) can judge whether the placement state of the suction nozzle 60 placed on the pallet 110 (or tray 76) by the gripping chuck 128 is normal or not. Therefore, it can be reliably judged whether the placement state of the suction nozzle 60 is normal or not.
 また、本実施形態においては、パレット110(またはトレイ76)に載置されている吸着ノズル60を撮像する第1撮像装置(カメラ126)をさらに備え、判定部80a1(制御装置80a:ステップS106)は、カメラ126によって撮像された撮像結果に基づいて上記判定を実施する。これによれば、第1撮像装置に比較的低コストであるカメラ126を選定することにより、上記判定を低コストかつ確実に実施することが可能となる。 In addition, this embodiment further includes a first imaging device (camera 126) that images the suction nozzle 60 placed on the pallet 110 (or tray 76), and the determination unit 80a1 (controller 80a: step S106) performs the above determination based on the image captured by the camera 126. By selecting the relatively low-cost camera 126 as the first imaging device, the above determination can be performed reliably and at low cost.
 また、本実施形態においては、判定部80a1(制御装置80a:ステップS106)は、パレット110(またはトレイ76)の所定の箇所または吸着ノズル60の所定の箇所に係る撮像結果に基づいて上記判定を実施する。これによれば、簡便かつ安定的に撮像結果を取得することが可能となり、ひいては上記判定を確実に実施することが可能となる。 In addition, in this embodiment, the judgment unit 80a1 (controller 80a: step S106) makes the above judgment based on the image capturing results of a predetermined location on the pallet 110 (or tray 76) or a predetermined location on the suction nozzle 60. This makes it possible to obtain the image capturing results simply and stably, and therefore makes it possible to reliably make the above judgment.
 また、本実施形態においては、判定部80a1(制御装置80a:ステップS106)は、吸着ノズル60をパレット110(またはトレイ76)に載置する毎に上記判定を実施する。これによれば、吸着ノズル60の移載から上記判定までを1つずつ確実に実施することが可能となる。 In addition, in this embodiment, the judgment unit 80a1 (controller 80a: step S106) performs the above judgment each time the suction nozzle 60 is placed on the pallet 110 (or tray 76). This makes it possible to reliably perform the steps from transferring the suction nozzle 60 to the above judgment one by one.
 また、本実施形態においては、判定部80a1(制御装置80a:ステップS106)によって正常でない旨の判定がされた場合に、吸着ノズル60の載置状態を正常状態に回復する回復部80a2(制御装置80a:ステップS112,ステップS118)をさらに備えた。これによれば、異常状態で載置された吸着ノズル60を確実に正常状態に回復させることが可能となる。 In addition, this embodiment further includes a recovery unit 80a2 (controller 80a: steps S112 and S118) that restores the placement state of the suction nozzle 60 to a normal state when the determination unit 80a1 (controller 80a: step S106) determines that the suction nozzle 60 is not normal. This makes it possible to reliably restore the suction nozzle 60 that is placed in an abnormal state to a normal state.
 また、本実施形態においては、回復部80a2(制御装置80a:ステップS112,ステップS118)は、把持チャック128を使用して吸着ノズル60の載置状態を回復する。これによれば、既存の装置を使用することにより、コスト高を招くことなく吸着ノズル60を正常状態に回復させることが可能となる。 In addition, in this embodiment, the recovery unit 80a2 (control device 80a: steps S112 and S118) uses the gripping chuck 128 to restore the placement state of the suction nozzle 60. This makes it possible to restore the suction nozzle 60 to a normal state without increasing costs by using existing equipment.
 また、本実施形態においては、パレット110(またはトレイ76)に載置されている複数の吸着ノズル60を一度に撮像可能である第2撮像装置126aをさらに備え、判定部80a1は、第2撮像装置126aによって撮像された撮像結果に基づいて上記判定を実施する。これによれば、撮像工程を簡素化して全体として工数低減しながら上記判定を実施することが可能となる。 In addition, this embodiment further includes a second imaging device 126a capable of simultaneously capturing an image of multiple suction nozzles 60 placed on the pallet 110 (or tray 76), and the determination unit 80a1 performs the above-mentioned determination based on the image captured by the second imaging device 126a. This simplifies the imaging process, making it possible to perform the above-mentioned determination while reducing the overall man-hours.
 また、本実施形態においては、上記把持対象物は、電子部品を解放可能に吸着する吸着ノズル60である。これによれば、吸着ノズル60を交換可能な装置において、吸着ノズル60の載置状態が正常であるか否かを確実に判定することができる。 In addition, in this embodiment, the object to be grasped is a suction nozzle 60 that releasably suctions an electronic component. This makes it possible to reliably determine whether the placement state of the suction nozzle 60 is normal in a device in which the suction nozzle 60 is replaceable.
 また、本実施形態においては、洗浄装置(ノズル管理装置80)は、上述した把持対象物移載装置を備え、吸着ノズル60を洗浄する。これによれば、吸着ノズル60を洗浄するノズル管理装置80において、吸着ノズル60の載置状態が正常であるか否かを確実に判定することができる。 In addition, in this embodiment, the cleaning device (nozzle management device 80) is equipped with the above-mentioned gripping object transfer device, and cleans the suction nozzle 60. This allows the nozzle management device 80, which cleans the suction nozzle 60, to reliably determine whether the placement state of the suction nozzle 60 is normal or not.
 尚、本明細書に係る技術思想は、吸着ノズル60だけでなく、円筒状や円柱状のものであればよく、例えば、チューブ、配管、工作機械や多関節ロボットのワークなどにも採用可能である。 The technical concept of this specification can be applied not only to suction nozzle 60, but also to any cylindrical or columnar object, such as tubes, piping, and workpieces of machine tools and articulated robots.
 尚、本明細書では、請求項4において「請求項1に記載の把持対象物移載装置」を「請求項1~請求項3の何れか一項に記載の把持対象物移載装置」に変更した技術思想や、請求項5において「請求項1に記載の把持対象物移載装置」を「請求項1~請求項4の何れか一項に記載の把持対象物移載装置」に変更した技術思想や、請求項8において「請求項1に記載の把持対象物移載装置」を「請求項1~請求項7の何れか一項に記載の把持対象物移載装置」に変更した技術思想も開示されている。 In addition, this specification also discloses the technical idea of changing "the grasped object transfer device described in claim 1" to "the grasped object transfer device described in any one of claims 1 to 3" in claim 4, the technical idea of changing "the grasped object transfer device described in claim 1" to "the grasped object transfer device described in any one of claims 1 to 4" in claim 5, and the technical idea of changing "the grasped object transfer device described in claim 1" to "the grasped object transfer device described in any one of claims 1 to 7" in claim 8.
 25…撮像装置(第1撮像装置)、60…吸着ノズル(把持対象物)、76…ノズルトレイ(載置トレイ)、80…ノズル管理装置(把持対象物移載装置、洗浄装置)、80a…制御装置(ステップS106…判定部、ステップS112,ステップS118…回復部)、80a1…判定部、80a2…回復部、110…ノズルパレット(載置トレイ)、126…カメラ(第1撮像装置)、126a…第2撮像装置、128…把持チャック(把持装置)、P…電子部品。 25...imaging device (first imaging device), 60...suction nozzle (object to be grasped), 76...nozzle tray (mounting tray), 80...nozzle management device (object to be grasped transfer device, cleaning device), 80a...control device (step S106...determination unit, step S112, step S118...recovery unit), 80a1...determination unit, 80a2...recovery unit, 110...nozzle pallet (mounting tray), 126...camera (first imaging device), 126a...second imaging device, 128...gripping chuck (gripping device), P...electronic component.

Claims (9)

  1.  把持対象物を把持するための把持装置と、
     前記把持対象物が載置可能である載置トレイと、
     前記把持装置によって前記載置トレイに載置された前記把持対象物の載置状態が正常であるか否かの判定を実施する判定部と、を備えた把持対象物移載装置。
    A gripping device for gripping an object to be gripped;
    A placement tray on which the object to be grasped can be placed;
    and a determination unit that determines whether the object to be grasped placed on the placement tray by the gripping device is in a normal state or not.
  2.  前記載置トレイに載置されている前記把持対象物を撮像する第1撮像装置をさらに備え、
     前記判定部は、前記第1撮像装置によって撮像された撮像結果に基づいて前記判定を実施する請求項1に記載の把持対象物移載装置。
    The apparatus further includes a first imaging device that images the object to be grasped placed on the placement tray,
    The apparatus for transferring an object to be grasped according to claim 1 , wherein the determination unit performs the determination based on an image pickup result captured by the first imaging device.
  3.  前記判定部は、前記載置トレイの所定の箇所または前記把持対象物の所定の箇所に係る前記撮像結果に基づいて前記判定を実施する請求項2に記載の把持対象物移載装置。 The device for transferring an object to be grasped according to claim 2, wherein the determination unit performs the determination based on the imaging results relating to a predetermined location on the placement tray or a predetermined location on the object to be grasped.
  4.  前記判定部は、前記把持対象物を前記載置トレイに載置する毎に前記判定を実施する請求項1に記載の把持対象物移載装置。 The object transfer device according to claim 1, wherein the determination unit performs the determination each time the object is placed on the placement tray.
  5.  前記判定部によって正常でない旨の判定がされた場合に、前記把持対象物の載置状態を正常状態に回復する回復部をさらに備えた請求項1に記載の把持対象物移載装置。 The transfer device for a grasped object according to claim 1, further comprising a recovery unit that restores the placement state of the grasped object to a normal state when the determination unit determines that the grasped object is not normal.
  6.  前記回復部は、前記把持装置を使用して前記把持対象物の載置状態を回復する請求項5に記載の把持対象物移載装置。 The device for transferring an object to be grasped according to claim 5, wherein the recovery unit uses the gripping device to recover the placement state of the object to be grasped.
  7.  前記載置トレイに載置されている複数の前記把持対象物を一度に撮像可能である第2撮像装置をさらに備え、
     前記判定部は、前記第2撮像装置によって撮像された撮像結果に基づいて前記判定を実施する請求項1に記載の把持対象物移載装置。
    The apparatus further includes a second imaging device capable of simultaneously imaging the plurality of objects to be grasped placed on the placement tray,
    The apparatus for transferring an object to be grasped according to claim 1 , wherein the determination unit performs the determination based on an image pickup result captured by the second imaging device.
  8.  前記把持対象物は、電子部品を解放可能に吸着する吸着ノズルである請求項1に記載の把持対象物移載装置。 The gripping object transfer device according to claim 1, wherein the gripping object is a suction nozzle that releasably picks up an electronic component.
  9.  請求項1~請求項8の何れか一項に記載の把持対象物移載装置を備え、前記把持対象物を洗浄する洗浄装置。 A cleaning device that includes the gripping object transfer device according to any one of claims 1 to 8 and cleans the gripping object.
PCT/JP2022/041097 2022-11-03 2022-11-03 Gripping target object transfer apparatus and cleaning apparatus WO2024095431A1 (en)

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Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2016016929A1 (en) * 2014-07-28 2016-02-04 富士機械製造株式会社 Nozzle storage container
WO2019175945A1 (en) * 2018-03-12 2019-09-19 株式会社Fuji Component mounting machine
JP2022045951A (en) * 2020-09-10 2022-03-23 株式会社Fuji Detection device and detection method

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2016016929A1 (en) * 2014-07-28 2016-02-04 富士機械製造株式会社 Nozzle storage container
WO2019175945A1 (en) * 2018-03-12 2019-09-19 株式会社Fuji Component mounting machine
JP2022045951A (en) * 2020-09-10 2022-03-23 株式会社Fuji Detection device and detection method

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