WO2024095352A1

WO2024095352A1 - Measurement system and measurement method

Info

Publication number: WO2024095352A1
Application number: PCT/JP2022/040831
Authority: WO
Inventors: 磊郭
Original assignee: ファナック株式会社
Priority date: 2022-10-31
Filing date: 2022-10-31
Publication date: 2024-05-10

Abstract

Provided is a measurement system comprising a scanner which emits guide light from a predetermined emission position toward a target, a first sensor which receives the guide light reflected on the target, and a calculation unit which calculates a distance between the scanner and the target on the basis of information relating to the guide light from the first sensor.

Description

Measurement system and method

This disclosure relates to a measurement system and a measurement method.

In laser processing machines that irradiate a laser beam toward an object, it is necessary to focus the laser beam on the object before processing the object. For this reason, the distance between the emission position from which the laser beam is emitted and the object is measured. This distance is measured by the operator visually checking the graduations on a scale or the number displayed on a rangefinder (for example, Patent Document 1).

Japanese Patent Application Laid-Open No. 11-47970

However, measuring this distance is a heavy burden for workers. Therefore, there is a demand for a system that can measure distance automatically.

The measurement system disclosed herein includes a scanner that irradiates guide light from a predetermined emission position toward an object, a first sensor that receives the guide light reflected by the object, and a calculation unit that calculates the distance between the scanner and the object based on information about the guide light from the first sensor.

The measurement method disclosed herein includes irradiating a guide light from a predetermined emission position toward an object, receiving the guide light reflected by the object, and calculating the distance between the scanner and the object based on information about the guide light.

FIG. 2 is a diagram for explaining an example of a laser oscillator and a measurement system. FIG. 2 is a diagram illustrating an example of the internal structure of a scanner. FIG. 13 is a diagram for explaining a calculation principle. FIG. 2 is a block diagram showing an example of a hardware configuration of a control device. FIG. 2 is a block diagram showing an example of a function of a control device. FIG. 13 is a diagram for explaining a calculation principle. FIG. 2 is a diagram illustrating an example of the internal structure of a scanner. 10 is a flowchart showing an example of a flow of processes executed in the measurement system. FIG. 2 is a diagram for explaining an example of a mounting mode of a detector. FIG. 2 is a diagram for explaining an example of an internal structure of a detector.

Below, a measurement system and a measurement method according to an embodiment of the present disclosure will be described with reference to the drawings. In the following description, components having the same or similar functions will be given the same reference numerals. Furthermore, duplicate descriptions of those components may be omitted.

In this application, "based on XX" means "based on at least XX," and includes cases where it is based on other elements in addition to XX. Furthermore, "based on XX" is not limited to cases where XX is used directly, but also includes cases where it is based on XX that has been calculated or processed. "XX" is any element (for example, any information).

First Embodiment
1 is a diagram for explaining an example of a laser oscillator and a measurement system 2. The laser oscillator 1 is a device that generates laser light. The laser oscillator 1 is, for example, a gas laser oscillator, a fiber laser oscillator, a disk laser oscillator, a DDL laser oscillator, or a YAG laser oscillator. The laser light generated by the laser oscillator is, for example, a high-power laser light for cutting, welding, marking, or engraving.

The laser oscillator 1 also generates a guide light. The guide light is light having an optical axis that coincides with the optical axis of the laser light. The guide light is, for example, a red laser light. Note that the guide light is not limited to a red laser light, and may be any visible light.

The laser oscillator 1 is connected to the measurement system 2. The laser oscillator 1 supplies the generated laser light and guide light to the measurement system 2 via an optical fiber or the like.

The measurement system 2 includes a scanner 21, a first sensor 22, a control device 23, an industrial machine 24, and a second sensor (not shown).

The scanner 21 is a device that irradiates the laser light and guide light supplied from the laser oscillator 1 toward the object O from a predetermined emission position. The scanner 21 has a function of changing the emission direction of the laser light and guide light supplied from the laser oscillator 1. In other words, the scanner 21 is a device for scanning the object O with the laser light and guide light. The scanner 21 is, for example, a galvano scanner.

The guide light is output from the scanner 21 coaxially with the laser light. In other words, the guide light is irradiated at the same position on the object O as the position irradiated by the laser light. The worker can visually check the position irradiated by the guide light to confirm in advance the position where the laser will be irradiated.

FIG. 2 is a diagram for explaining an example of the internal structure of the scanner 21. For convenience, the directions indicated by the arrows in each diagram are defined as the positive X-axis direction, the positive Y-axis direction, and the positive Z-axis direction, respectively, in the explanation of this embodiment.

The scanner 21 has, for example, a rectangular parallelepiped housing (not shown). Inside the housing, the scanner 21 has, for example, a focus control mechanism 211, a focusing lens 212, and an angle control mechanism 213.

The focus control mechanism 211 is a mechanism for controlling the focus position of the laser light. The focus control mechanism 211 has a lens unit 211a and a drive unit 211b.

Lens portion 211a is, for example, a convex lens. However, lens portion 211a is not limited to a convex lens and may be another type of lens.

The driving unit 211b is a device that moves the lens unit 211a along the transmission direction of the laser light. The driving unit 211b is a linear motion mechanism. The linear motion mechanism is, for example, a ball screw linear motion mechanism. The driving unit 211b moves the lens unit 211a along, for example, the X-axis.

The focusing lens 212 is a lens for focusing the laser light on the angle control mechanism 213. The focusing lens 212 is, for example, a convex lens. The focusing lens 212 is disposed between the focus control mechanism 211 and the angle control mechanism 213.

The angle control mechanism 213 is a mechanism for changing the irradiation angle of the laser light and the guide light with respect to the object O. In other words, the angle control mechanism 213 is a mechanism for changing the emission angle of the laser light and the guide light emitted from a specific emission position of the scanner 21, which will be described later.

The angle control mechanism 213 includes a drive mechanism and a mirror. The drive mechanism includes a first drive mechanism 213a and a second drive mechanism 213c. The mirror includes a first mirror 213b and a second mirror 213d.

The first driving mechanism 213a is a mechanism that rotates the first mirror 213b. The first driving mechanism 213a has a rotation shaft. The rotation shaft is connected to the first mirror 213b. When the rotation shaft rotates, the first mirror 213b connected to the rotation shaft rotates. The first driving mechanism 213a is, for example, a servo motor.

The first mirror 213b is a mirror for scanning the laser light and the guide light, for example, along the X-axis. The first mirror 213b changes the direction of the optical axis of the laser light and the guide light by reflecting the laser light and the guide light. The first mirror 213b is a mirror that totally reflects the laser light. The first mirror 213b is also a mirror that totally reflects the guide light.

The second driving mechanism 213c is a mechanism that rotates the second mirror 213d. The second driving mechanism 213c has a rotation shaft. The rotation shaft is connected to the second mirror 213d. When the rotation shaft rotates, the second mirror 213d attached to the rotation shaft rotates. The second driving mechanism 213c is, for example, a servo motor.

The second mirror 213d is, for example, a mirror for scanning the laser light and the guide light along the Y axis. The second mirror 213d changes the direction of the optical axis of the laser light and the guide light by reflecting the laser light and the guide light. The second mirror 213d is a mirror that totally reflects the laser light. The second mirror 213d is a half mirror that reflects part of the guide light and transmits the other part of the guide light.

When laser light is supplied from the laser oscillator 1 to the scanner 21, the laser light is guided to the lens unit 211a. The laser light guided to the lens unit 211a passes through the lens unit 211a and is guided to the focusing lens 212. The laser light guided to the focusing lens 212 passes through the focusing lens 212 and is guided to the first mirror 213b. The laser light guided to the first mirror 213b is reflected by the first mirror 213b and is guided to the second mirror 213d. The laser light guided to the second mirror 213d is reflected by the second mirror 213d and is irradiated from the emission position towards the object O.

The emission position is the position from which the scanner 21 emits the laser light and the guide light to the outside. The emission position is, for example, the position where the surface on which the bottom plate of the housing of the scanner 21 is placed intersects with the optical axis of the laser light and the guide light.

The driving unit 211b of the focus control mechanism 211 moves the lens unit 211a to adjust the focal position of the laser light. Furthermore, the first driving mechanism 213a rotates the first mirror 213b to scan the laser light along the X-axis. Furthermore, the second driving mechanism 213c rotates the second mirror 213d to scan the laser light along the Y-axis.

When guide light is supplied from the laser oscillator 1 to the scanner 21, the guide light is guided to the lens unit 211a. The guide light guided to the lens unit 211a passes through the lens unit 211a and is guided to the condenser lens 212. The guide light guided to the condenser lens 212 passes through the condenser lens 212 and is guided to the first mirror 213b. The guide light guided to the first mirror 213b is reflected by the first mirror 213b and is guided to the second mirror 213d. The guide light guided to the second mirror 213d is reflected by the second mirror 213d and is irradiated from the emission position towards the object O.

The first driving mechanism 213a rotates the first mirror 213b, thereby allowing the guide light to scan along the X-axis. The second driving mechanism 213c rotates the second mirror 213d, thereby allowing the guide light to scan along the Y-axis. Now, let us return to the explanation of FIG. 1.

The first sensor 22 is a sensor that detects the guide light. The first sensor 22 has a light receiving section (not shown). The first sensor 22 receives the guide light reflected by the object O at the light receiving section. The first sensor 22 is, for example, a photosensor. The object O is, for example, a workpiece to be machined. The first sensor 22 sends information about the received guide light to the control device 23.

The information about the guide light is position information about the position of the guide light received by the first sensor 22. In other words, the position information is information indicating at which position of the light receiving section of the first sensor 22 the guide light is received. The first sensor 22 acquires position information about the position in the direction along the X-axis where the guide light is incident on the light receiving section, for example. As will be described later, the control device 23 calculates the distance between the scanner 21 and the object O based on the information about the guide light.

FIG. 3 is a diagram for explaining the principle of calculating the distance between the scanner 21 and the object O. The scanner 21 irradiates a guide light from an emission position P1 toward the object O. The object O reflects the guide light irradiated from the scanner 21 at a reflection position P2. In other words, the intersection of the optical axis of the guide light and the surface of the object O is the reflection position P2.

The first sensor 22 receives the guide light reflected at reflection position P2. In other words, the guide light is incident on the light receiving section of the first sensor 22 at incident position P3. In other words, the intersection point between the optical axis of the guide light and the light receiving section of the first sensor 22 is incident position P3.

The first sensor 22 acquires information about the incident position P3 of the guide light. This determines the distance d between the exit position P1 and the incident position P3. The exit angle θ of the guide light is determined based on the rotation angle of the mirror. Therefore, the distance between the exit position P1 and the object O, i.e., the distance D1 between the scanner 21 and the object O, can be calculated using the following formula 1.

Next, the control device 23 will be described. The control device 23 is a device that controls the scanner 21 and the industrial machine 24. The control device 23 controls the operation of the scanner 21 and the industrial machine 24 based on, for example, an operating program.

FIG. 4 is a block diagram showing an example of the hardware configuration of the control device 23. The control device 23 includes a hardware processor 231, a bus 232, a ROM (Read Only Memory) 233, a RAM (Random Access Memory) 234, and a non-volatile memory 235.

The hardware processor 231 is a processor that controls the entire control device 23 in accordance with a system program. The hardware processor 231 reads the system program stored in the ROM 233 via the bus 232, and performs various processes based on the system program. The hardware processor 231 controls the scanner 21 and the industrial machine 24 based on the operation program. The hardware processor 231 is, for example, a CPU (Central Processing Unit) or an electronic circuit.

The bus 232 is a communication path that connects each piece of hardware in the control device 23 to each other. Each piece of hardware in the control device 23 exchanges data via the bus 232.

ROM 233 is a storage device that stores system programs and the like for controlling the entire control device 23. ROM 233 is a computer-readable storage medium.

RAM 234 is a storage device that temporarily stores various data. RAM 234 functions as a working area for the hardware processor 231 to process various data.

The non-volatile memory 235 is a storage device that retains data even when the control device 23 is turned off and no power is being supplied to the control device 23. The non-volatile memory 235 stores, for example, operating programs and various parameters. The non-volatile memory 235 is a computer-readable storage medium. The non-volatile memory 235 is, for example, a battery-backed memory or an SSD (Solid State Drive).

The control device 23 further includes an axis control circuit 236, a first interface 237, a second interface 238, and a third interface 239.

The axis control circuit 236 is a circuit that controls a servo motor (not shown) of the industrial machine 24. The axis control circuit 236 receives control commands from the hardware processor 231 and sends various commands to the servo motor for driving the servo motor. For example, the axis control circuit 236 sends a torque command to the servo motor for controlling the torque of the servo motor.

Industrial machinery 24 is machinery used in factories and the like. Industrial machinery 24 is, for example, an industrial robot such as a manipulator, and a three-dimensional scanner processing machine. When industrial machinery 24 is an industrial robot, scanner 21 is attached, for example, to the tip of an arm of the industrial robot. When industrial machinery 24 is a three-dimensional scanner processing machine, scanner 21 is attached to the tip of the processing machine.

The first interface 237 connects the bus 232 and the scanner 21. The first interface 237 sends, for example, various commands or various data processed by the hardware processor 231 to the scanner 21.

The second interface 238 connects the bus 232 and the first sensor 22. The second interface 238 sends, for example, information acquired by the first sensor 22 to the hardware processor 231, RAM 234, etc.

The third interface 239 connects the bus 232 and the second sensor 25. The third interface 239, for example, sends information acquired by the second sensor 25 to the hardware processor 231, the RAM 234, etc. The second sensor 25 will be described in detail later.

FIG. 5 is a block diagram showing an example of the functions of the control device 23. The control device 23 includes a receiving unit 23a, a calculating unit 23b, and a control unit 23c.

The receiver 23a is connected to the first sensor 22 by wire or wirelessly, for example, via a network. The receiver 23a receives information about the guide light from the first sensor 22.

The calculation unit 23b calculates the distance D1 between the scanner 21 and the object O based on information about the guide light from the first sensor 22 received by the receiving unit 23a. The distance D1 between the scanner 21 and the object O is, for example, the distance between the emission position P1 and the surface of the object O. In other words, the distance D1 between the scanner 21 and the object O is the length of the line segment connecting the intersection of the perpendicular line and the object O to the emission position P1 when a perpendicular line is drawn from the emission position P1 of the scanner 21 to the object O.

The control unit 23c controls the scanner 21 and the industrial machine 24. The control unit 23c controls the industrial machine 24 based on the distance D1 between the scanner 21 and the object O calculated by the calculation unit 23b. The control unit 23c controls the industrial machine 24, for example, so that the distance D1 between the scanner 21 and the object O becomes a predetermined reference distance.

When the distance D1 between the scanner 21 and the object O is calculated, the calculation unit 23b can further calculate the distance between an arbitrary position on the object O where the guide light is irradiated and the emission position P1 based on the emission angle θ of the guide light.

FIG. 6 is a diagram for explaining the principle of calculating the distance between an arbitrary position P4 on the object O onto which the guide light is irradiated and the emission position P1. When the distance D1 between the scanner 21 and the object O has already been calculated, the distance D2 between an arbitrary position P4 on the object O onto which the guide light is irradiated and the emission position P1 can be calculated by the following formula 2. Note that α is the angle between the perpendicular line drawn from the emission position P1 to the object O and the optical axis of the guide light.

The measurement system 2 further includes the second sensor 25 as described above. The second sensor 25 is a sensor that detects the guide light. The second sensor 25 receives the guide light reflected by the object O. The second sensor 25 is, for example, a photosensor. The calculation unit 23b calculates the parallelism between the scanner 21 and the object O based on information from the second sensor 25 that has received the guide light.

FIG. 7 is a diagram for explaining an example of the internal structure of the scanner 21. Note that the first mirror 213b and the driving mechanism are omitted from FIG. 7.

The scanner 21 has a second sensor 25 at a position opposite the position where the object O is placed, with the second mirror 213d as a reference. In other words, the second mirror 213d is placed between the object O and the second sensor 25.

The second mirror 213d is positioned so that the angle between the surface that reflects the guide light and the bottom plate of the housing is 45°. The scanner 21 also has one or more first apertures 214 between the second mirror 213d and the second sensor 25. When the scanner 21 has multiple first apertures 214, the multiple first apertures 214 are positioned parallel to each other.

The second sensor 25 receives the guide light reflected by the object O. The second sensor 25 sends information about the received guide light to the control device 23. Here, the information about the guide light is, for example, intensity information about the intensity of the guide light. Light intensity is an index that represents the degree of brightness of light.

The guide light supplied from the laser oscillator 1 passes through the lens section 211a and the focusing lens 212, is reflected by the first mirror 213b, and is guided to the second mirror 213d. A portion of the guide light guided to the second mirror 213d is reflected by the second mirror 213d and irradiated onto the object O. The guide light irradiated onto the object O is reflected by the surface of the object O, and is again guided to the second mirror 213d.

A portion of the guide light guided to the second mirror 213d passes through the second mirror 213d. The guide light that passes through the second mirror 213d and the first aperture 214 is incident on the second sensor 25. The second sensor 25 sends information about the received guide light to the control device 23.

The receiver 23a receives information about the guide light from the second sensor 25. The calculator 23b calculates the parallelism between the scanner 21 and the object O based on the information about the guide light from the second sensor 25. The parallelism between the scanner 21 and the object O is, for example, the parallelism between the bottom plate of the housing of the scanner 21 and the surface of the object O.

When the parallelism between the scanner 21 and the surface of the object O is high, the intensity of the guide light passing through the first aperture 214 becomes stronger. As a result, the intensity of the guide light received by the second sensor 25 becomes stronger.

On the other hand, if the parallelism between the scanner 21 and the surface of the object O is low, the intensity of the guide light passing through the first aperture 214 will be weak. As a result, the intensity of the guide light received by the second sensor 25 will be weak. In other words, the calculation unit 23b calculates the parallelism between the scanner 21 and the object O based on the correlation between the intensity of the guide light received by the second sensor 25 and the parallelism between the scanner 21 and the object O.

Note that there is a positive correlation between the parallelism between the scanner 21 and the object O and the perpendicularity between the optical axis of the guide light and the surface of the object O. Therefore, the calculation unit 23b may calculate the perpendicularity between the guide light and the surface of the object O instead of the parallelism between the scanner 21 and the object O.

Next, an example of the flow of processing executed by the measurement system 2 will be described. In the above explanation, first, the calculation of the distance D1 between the scanner 21 and the object O was mentioned, and then the calculation of the parallelism between the scanner 21 and the object O was mentioned. However, in the measurement system 2, as will be explained below, first the parallelism between the scanner 21 and the object O is measured, and then the distance between the scanner 21 and the object O is measured.

FIG. 8 is a flowchart showing an example of the flow of processing executed by the measurement system 2. First, the control unit 23c moves the scanner 21 to a predetermined position where the emission position P1 of the scanner 21 faces the surface of the target object O (step S1). The control unit 23c controls the industrial machine 24 based on a predetermined operation program, for example, to move the scanner 21 to the predetermined position. The control unit 23c may also move the scanner 21 to the predetermined position based on manual operation by an operator.

Next, the parallelism between the scanner 21 and the object O is measured (step S2). Specifically, first, the control unit 23c controls the scanner 21 to irradiate the guide light toward the object O. Next, the receiving unit 23a receives information about the guide light from the second sensor 25. Next, the calculation unit 23b calculates the parallelism between the scanner 21 and the object O based on the information about the guide light from the second sensor 25 that has received the guide light.

If the parallelism calculated by the calculation unit 23b does not satisfy the predetermined condition (No in step S3), the control unit 23c controls the industrial machine 24, for example, based on an operating program, and adjusts the parallelism between the scanner 21 and the target object O (step S4).

If the parallelism calculated by the calculation unit 23b satisfies the predetermined condition (Yes in step S3), the parallelism is not adjusted by the control unit 23c.

In addition, after the parallelism has been adjusted once, the measurement of the parallelism and the determination of whether or not the predetermined condition is satisfied may be repeated until the predetermined condition is satisfied.

Next, the distance D1 between the scanner 21 and the object O is measured (step S5). Specifically, first, the control unit 23c controls the scanner 21 to irradiate the guide light toward the object O. Next, the receiving unit 23a receives information about the guide light from the first sensor 22. Next, the calculation unit 23b calculates the distance D1 between the scanner 21 and the object O based on the information about the guide light from the first sensor 22 that has received the guide light.

If the distance D1 calculated by the calculation unit 23b does not satisfy the predetermined condition (No in step S6), the control unit 23c controls the industrial machine 24, for example, based on an operation program, and adjusts the distance D1 between the scanner 21 and the target object O (step S7).

If the distance D1 calculated by the calculation unit 23b satisfies the predetermined condition (Yes in step S6), the control unit 23c does not adjust the distance and the process ends.

In addition, after the distance is adjusted, the distance measurement and the determination of whether or not the predetermined condition is satisfied may be repeated until the predetermined condition is satisfied.

After the parallelism measurement and adjustment, and the distance measurement and adjustment are completed, the control unit 23c may operate the industrial machine 24 and the scanner 21 based on the operation program to process the object O.

Second Embodiment
In the above first embodiment, the distance between the exit position P1 and the entrance position P3 is obtained based on information about the entrance position P3 acquired by the first sensor 22, and further, the distance D1 between the scanner 21 and the target object O is calculated using a predetermined exit angle θ of the guide light.

However, the emission angle θ of the guide light may be adjusted so that a predetermined position of the light receiving section becomes the incident position P3. In other words, the control device 23 may adjust the rotation angle of the mirror of the scanner 21 so that the guide light is received at a predetermined position of the light receiving section of the first sensor 22.

In this case, the receiver 23a acquires information about the emission angle θ of the guide light from the scanner 21. In this case, the emission angle θ is the emission angle of the guide light when the guide light is adjusted so that it is incident on a predetermined position of the light receiver.

The calculation unit 23b calculates the distance D1 between the scanner 21 and the object O based on the emission angle θ and the distance d between the emission position P1 and the incidence position P3.

Third embodiment
In the first embodiment, the calculation unit 23b calculates the parallelism between the scanner 21 and the object O based on information from the second sensor 25 that receives the guide light. On the other hand, the measurement system 2 of the present embodiment includes a detector that detects the parallelism between the scanner 21 and the object O, instead of the second sensor 25.

FIG. 9 is a diagram for explaining an example of a manner in which the detector is attached to the scanner 21. The detector 26 is attached, for example, at a position adjacent to the emission position P1 of the guide light.

FIG. 10 is a diagram for explaining an example of the internal structure of the detector 26. The detector 26 includes a light source 261, a third mirror 262, one or more second apertures 263, and a third sensor 264.

The light source 261 emits light toward the third mirror 262. The light source 261 emits, for example, red laser light. The direction in which the light source 261 emits light is parallel to the bottom plate of the housing of the scanner 21.

The third mirror 262 is a half mirror that transmits part of the light emitted from the light source 261 and reflects the other part. The third mirror 262 is positioned so that the angle between the surface that reflects the light emitted from the light source 261 and the bottom plate of the housing of the scanner 21 is 45°.

The third sensor 264 is a sensor that detects light. The third sensor 264 receives light reflected by the object O. The third sensor 264 sends information about the received light to the control device 23. Here, the information about the light is, for example, intensity information about the intensity of the light. The detector 26 has the third sensor 264 at a position opposite the position where the object O is placed, with the third mirror 262 as a reference. In other words, the third mirror 262 is placed between the object O and the third sensor 264.

The detector 26 also has one or more second apertures 263 between the third mirror 262 and the third sensor 264. When the detector 26 has multiple second apertures 263, the multiple second apertures 263 are arranged parallel to each other.

Light emitted by light source 261 is guided to third mirror 262. A portion of the light guided to third mirror 262 is reflected by third mirror 262 and irradiated to object O. That is, light source 261 irradiates light toward object O via third mirror 262. The light irradiated to object O is reflected by the surface of object O and is again guided to third mirror 262.

A portion of the light guided to the third mirror 262 passes through the third mirror 262. The light that passes through the third mirror 262 and the second aperture 263 is incident on the third sensor 264.

The receiving unit 23a receives information about the light from the third sensor 264. The calculating unit 23b calculates the parallelism between the scanner 21 and the object O based on the information from the third sensor 264 that has received the light.

As described above, the measurement system 2 of the present disclosure includes a scanner 21 that irradiates guide light from a predetermined emission position P1 toward an object O, a first sensor 22 that receives the guide light reflected by the object O, and a calculation unit 23b that calculates a distance D1 between the scanner 21 and the object O based on information about the guide light from the first sensor 22.

As a result, the measurement system 2 can automatically measure distance and adjust the distance. For example, compared to a case where an operator measures distance while visually checking the graduations on a scale or the numbers displayed on a rangefinder, the measurement system 2 can reduce the burden on the operator.

In addition, the measurement system 2 can improve the accuracy of distance measurement compared to when an operator measures distance while visually checking the graduations on a scale or the numbers displayed on a rangefinder.

In addition, since the measurement system 2 measures distance using guide light, there is no need to provide another light source for measuring distance.

The information about the guide light is position information about the position of the guide light received by the first sensor 22. That is, the first sensor 22 obtains position information indicating at which position in the light receiving section the guide light is incident. In this case, the scanner may be positioned at any position before measuring the distance, so long as the guide light is received by the light receiving section. This makes it easier to position the scanner before measuring the distance.

The scanner 21 also includes a mirror that changes the emission angle θ of the guide light emitted from a predetermined emission position P1, and the calculation unit 23b calculates the distance based on the emission angle θ. In this case, the scanner 21 adjusts the emission angle θ of the guide light so that the predetermined position of the light receiving unit of the first sensor 22 becomes the incident position P3. This allows the measurement range of the measurement system 2 to be increased.

The calculation unit 23b further calculates the distance between an arbitrary position P4 on the object O onto which the guide light is irradiated and the emission position P1 based on the emission angle α. Therefore, the control unit 23c can easily focus the laser light on an arbitrary position P4 on the object O onto which the laser light is irradiated.

The measurement system 2 further includes a second sensor 25 that receives the guide light reflected by the object O, and the calculation unit 23b calculates the parallelism between the scanner 21 and the object O based on information from the second sensor 25 that receives the guide light. The information from the second sensor 25 is intensity information related to the intensity of the guide light.

As a result, measurement system 2 can reduce the burden on the worker compared to when an operator measures parallelism while visually checking the scale on a spirit level. Also, measurement system 2 can improve the measurement accuracy of parallelism compared to when an operator measures parallelism while visually checking the scale on a spirit level.

The scanner 21 further includes a light source 261 that irradiates light toward the object O, and a third sensor 264 that receives the light reflected by the object O. The calculation unit 23b calculates the parallelism between the scanner 21 and the object O based on information from the third sensor 264 that receives the light. The information from the third sensor 264 is intensity information related to the intensity of the light.

The measurement system 2 further includes an industrial machine 24, and the scanner 21 is attached to the industrial machine 24. The industrial machine 24 is an industrial robot. Therefore, when the scanner 21 is attached to the industrial machine 24, particularly an industrial robot, the distance D1 between the scanner 21 and the object O, and the parallelism between the scanner 21 and the object O can be automatically measured.

Although the present disclosure has been described in detail, the present disclosure is not limited to the individual embodiments described above. Various additions, substitutions, modifications, partial deletions, etc. are possible to these embodiments without departing from the gist of the present disclosure, or without departing from the gist of the present disclosure derived from the contents of the claims and their equivalents. These embodiments can also be implemented in combination.

Below, notes relating to the embodiments of the present disclosure are provided.
Appendix [1]
A measurement system comprising: a scanner that irradiates guide light from a predetermined emission position toward an object; a first sensor that receives the guide light reflected by the object; and a calculation unit that calculates a distance between the scanner and the object based on information about the guide light from the first sensor.
Appendix [2]
The measurement system according to claim 1, wherein the information regarding the guide light is position information regarding a position of the guide light received by the first sensor.
Appendix [3]
The measurement system according to

claim

1 or 2, wherein the scanner includes a mirror that changes an emission angle of the guide light emitted from the predetermined emission position, and the calculation unit calculates the distance based on the emission angle.
Appendix [4]
The measurement system according to claim 3, wherein the calculation unit further calculates a distance between a position on the object where the guide light is irradiated and the emission position based on the emission angle.
Appendix [5]
The measurement system of any of Appendices [1] to [4], further comprising a second sensor that receives the guide light reflected by the object, wherein the calculation unit calculates a parallelism between the scanner and the object based on information from the second sensor that has received the guide light.
Appendix [6]
The measurement system according to claim 5, wherein the information from the second sensor is intensity information regarding the intensity of the guide light.
Appendix [7]
The measurement system of any of appendices [1] to [4] further includes a light source that irradiates light toward the object, and a third sensor that receives the light reflected by the object, wherein the calculation unit calculates the parallelism between the scanner and the object based on information from the third sensor that receives the light.
Appendix [8]
The measurement system of claim 7, wherein the information from the third sensor is intensity information regarding the intensity of the light.
Appendix [9]
The measurement system according to any one of appendices [1] to [8], further comprising an industrial machine, wherein the scanner is attached to the industrial machine.
Appendix [10]
The measurement system according to claim [9], wherein the industrial machine is an industrial robot.
Appendix [11]
A measurement method including: irradiating a guide light from a predetermined emission position toward an object; receiving the guide light reflected by the object; and calculating a distance between the scanner and the object based on information about the guide light.

REFERENCE SIGNS LIST 1 Laser oscillator 2 Measurement system 21 Scanner 211 Focus control mechanism 211a Lens section 211b Driving section 212 Condenser lens 213 Angle control mechanism 213a First driving mechanism 213b First mirror 213c Second driving mechanism 213d Second mirror 214 First aperture 22 First sensor 23 Control device 231 Hardware processor 232 Bus 233 ROM
234 RAM
235 Non-volatile memory 236 Axis control circuit 237 First interface 238 Second interface 239 Third interface

23a Receiving unit

23b Calculating unit

23c Control unit 24 Industrial machine 25 Second sensor 26 Detector 261 Light source 262 Third mirror 263 Second aperture 264 Third sensor

Claims

a scanner that irradiates the guide light from a predetermined emission position toward an object;
A first sensor that receives the guide light reflected by the object;
a calculation unit that calculates a distance between the scanner and the object based on information about the guide light from the first sensor;
A measurement system comprising:
The measurement system of claim 1, wherein the information about the guide light is position information about the position of the guide light received by the first sensor.
the scanner includes a mirror for changing an emission angle of the guide light emitted from the predetermined emission position,
The measurement system according to claim 1 , wherein the calculation unit calculates the distance based on the emission angle.
The measurement system according to claim 3, wherein the calculation unit further calculates the distance between the position on the object where the guide light is irradiated and the emission position based on the emission angle.
A second sensor is further provided to receive the guide light reflected by the object.
5. The measurement system according to claim 1, wherein the calculation unit calculates parallelism between the scanner and the object based on information from the second sensor that receives the guide light.
The measurement system of claim 5, wherein the information from the second sensor is intensity information regarding the intensity of the guide light.
A light source that irradiates light toward the object;
a third sensor that receives the light reflected from the object;
5. The measurement system according to claim 1, wherein the calculation unit calculates parallelism between the scanner and the object based on information from the third sensor that receives the light.
The measurement system of claim 7, wherein the information from the third sensor is intensity information regarding the intensity of the light.
Further equipped with industrial machinery,
The measurement system according to any one of claims 1 to 8, wherein the scanner is attached to the industrial machine.
The measurement system according to claim 9, wherein the industrial machine is an industrial robot.
Irradiating the guide light from a predetermined emission position of the scanner toward the object;
receiving the guide light reflected by the object;
Calculating a distance between the scanner and the object based on information about the guide light;
Measurement methods including: