WO2024084993A1 - 感放射線性組成物、レジストパターン形成方法及び重合体 - Google Patents

感放射線性組成物、レジストパターン形成方法及び重合体 Download PDF

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WO2024084993A1
WO2024084993A1 PCT/JP2023/036474 JP2023036474W WO2024084993A1 WO 2024084993 A1 WO2024084993 A1 WO 2024084993A1 JP 2023036474 W JP2023036474 W JP 2023036474W WO 2024084993 A1 WO2024084993 A1 WO 2024084993A1
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group
radiation
sensitive
polymer
structural unit
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English (en)
French (fr)
Japanese (ja)
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研 丸山
克聡 錦織
和也 桐山
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JSR Corp
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JSR Corp
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Priority to JP2024551482A priority Critical patent/JPWO2024084993A1/ja
Priority to KR1020257010243A priority patent/KR20250088709A/ko
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Priority to US19/176,934 priority patent/US20250237950A1/en
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    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/039—Macromolecular compounds which are photodegradable, e.g. positive electron resists
    • G03F7/0392—Macromolecular compounds which are photodegradable, e.g. positive electron resists the macromolecular compound being present in a chemically amplified positive photoresist composition
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/039—Macromolecular compounds which are photodegradable, e.g. positive electron resists
    • G03F7/0392—Macromolecular compounds which are photodegradable, e.g. positive electron resists the macromolecular compound being present in a chemically amplified positive photoresist composition
    • G03F7/0397—Macromolecular compounds which are photodegradable, e.g. positive electron resists the macromolecular compound being present in a chemically amplified positive photoresist composition the macromolecular compound having an alicyclic moiety in a side chain
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
    • C07C2601/00—Systems containing only non-condensed rings
    • C07C2601/06—Systems containing only non-condensed rings with a five-membered ring
    • C07C2601/08—Systems containing only non-condensed rings with a five-membered ring the ring being saturated
    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
    • C07C2601/00—Systems containing only non-condensed rings
    • C07C2601/12—Systems containing only non-condensed rings with a six-membered ring
    • C07C2601/14—The ring being saturated
    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
    • C07C2603/00—Systems containing at least three condensed rings
    • C07C2603/56—Ring systems containing bridged rings
    • C07C2603/58—Ring systems containing bridged rings containing three rings
    • C07C2603/70—Ring systems containing bridged rings containing three rings containing only six-membered rings
    • C07C2603/74—Adamantanes
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F2810/00—Chemical modification of a polymer
    • C08F2810/50—Chemical modification of a polymer wherein the polymer is a copolymer and the modification is taking place only on one or more of the monomers present in minority

Definitions

  • the present invention relates to a radiation-sensitive composition, a method for forming a resist pattern, and a polymer.
  • the radiation-sensitive compositions used in microfabrication by lithography generate acid in the exposed areas when irradiated with far ultraviolet light such as ArF excimer laser light (wavelength 193 nm) or KrF excimer laser light (wavelength 248 nm), electromagnetic waves such as extreme ultraviolet light (EUV) (wavelength 13.5 nm), or charged particle beams such as electron beams.
  • far ultraviolet light such as ArF excimer laser light (wavelength 193 nm) or KrF excimer laser light (wavelength 248 nm)
  • electromagnetic waves such as extreme ultraviolet light (EUV) (wavelength 13.5 nm)
  • charged particle beams such as electron beams.
  • Radiation-sensitive compositions are required to have good sensitivity to radiation such as extreme ultraviolet rays and electron beams, as well as excellent CDU (Critical Dimension Uniformity) performance.
  • the present invention was made based on the above-mentioned circumstances, and its object is to provide a radiation-sensitive composition and a method for forming a resist pattern that are excellent in sensitivity and CDU. Another object of the present invention is to provide a polymer that is suitable for the radiation-sensitive composition.
  • the invention made to solve the above problems is a radiation-sensitive composition that contains a polymer (hereinafter also referred to as "polymer [A]”) having a side chain that contains an acid-dissociable group, and a side chain that contains two or more iodine groups and one or more radiation-sensitive onium cation structures.
  • a polymer hereinafter also referred to as "polymer [A]”
  • A polymer having a side chain that contains an acid-dissociable group, and a side chain that contains two or more iodine groups and one or more radiation-sensitive onium cation structures.
  • Another invention made to solve the above problem is a method for forming a resist pattern comprising the steps of applying the radiation-sensitive composition directly or indirectly to a substrate, exposing the resist film formed by the application, and developing the exposed resist film.
  • Another invention made to solve the above problems is a polymer having a side chain containing an acid-dissociable group, and a side chain containing two or more iodine groups and one or more radiation-sensitive onium cation structures.
  • the radiation-sensitive composition of the present invention has excellent sensitivity and CDU. According to the resist pattern forming method of the present invention, a resist pattern with good sensitivity and excellent CDU can be formed.
  • the polymer of the present invention is suitable as a polymer to be contained in a radiation-sensitive composition. Therefore, these can be suitably used in the processing of semiconductor devices, which are expected to become even more miniaturized in the future.
  • the radiation-sensitive composition, resist pattern forming method, and polymer of the present invention are described in detail below.
  • the radiation-sensitive composition contains the polymer [A].
  • the radiation-sensitive composition usually contains an organic solvent (hereinafter also referred to as “organic solvent [D]”).
  • the radiation-sensitive composition preferably contains at least one selected from the group consisting of a radiation-sensitive acid generator (hereinafter also referred to as “acid generator [B]”) and an acid diffusion controller (hereinafter also referred to as “acid diffusion controller [C]”).
  • the radiation-sensitive composition may contain, as a preferred component, a polymer (hereinafter also referred to as "polymer [F]”) having a higher fluorine atom content than the polymer [A).
  • the radiation-sensitive composition may contain other optional components within a range that does not impair the effects of the present invention.
  • the radiation-sensitive composition has excellent sensitivity and CDU due to the inclusion of polymer [A].
  • the reason why the radiation-sensitive composition has the above-mentioned effect due to having the above-mentioned configuration is not necessarily clear, but it is presumed, for example, as follows. That is, an iodine group has high radiation absorption efficiency, and the presence of one or more radiation-sensitive onium cation structures and a side chain containing two or more iodine groups improves the efficiency of acid generation in exposed areas. As a result, it is believed that the radiation-sensitive composition has excellent sensitivity and CDU.
  • the radiation-sensitive composition can be prepared, for example, by mixing [A] a polymer, and, if necessary, [B] a radiation-sensitive acid generator, [C] an acid diffusion controller, [D] an organic solvent, [F] a polymer and other optional components in a predetermined ratio, and then filtering the resulting mixture preferably through a filter with a pore size of 0.2 ⁇ m or less.
  • the components contained in the radiation-sensitive composition are described below.
  • the side chain containing an acid dissociable group of the polymer [A] is preferably contained in a first structural unit (hereinafter also referred to as “structural unit (I)") containing a partial structure in which a hydrogen atom of a carboxyl group or a phenolic hydroxyl group is substituted with an acid dissociable group.
  • the side chain containing two or more iodine groups and one or more radiation-sensitive onium cation structures of the polymer [A] is preferably contained in a second structural unit (hereinafter also referred to as “structural unit (II)”) containing two or more iodine groups and one or more radiation-sensitive onium cation structures.
  • the polymer [A] is a polymer whose solubility in a developer changes under the action of an acid.
  • the polymer [A] exhibits a property of changing its solubility in a developer under the action of an acid by having a side chain containing an acid dissociable group.
  • the radiation-sensitive composition can contain one or more types of polymer [A].
  • the "structural unit” refers to one of the repeating units obtained by polymerizing a monomer, and is composed of a portion constituting a part of the main chain and a side chain.
  • the "main chain” refers to the longest atomic chain constituting the polymer.
  • side chain refers to an atomic chain constituting a polymer other than the main chain.
  • Partial structure refers to a part of a structure contained in a side chain or a structural unit.
  • the polymer [A] preferably further has a side chain containing a phenolic hydroxyl group.
  • the side chain containing a phenolic hydroxyl group is preferably contained in a third structural unit (hereinafter also referred to as "structural unit (III)") containing a phenolic hydroxyl group.
  • the polymer [A] may further have other structural units (hereinafter also referred to as “other structural units”) other than the structural units (I) to (III).
  • the polymer [A] may have one or more types of each structural unit.
  • the lower limit of the content of the polymer [A] in the radiation-sensitive composition is preferably 50% by mass, more preferably 70% by mass, and even more preferably 80% by mass, based on all components other than the organic solvent [D] contained in the radiation-sensitive composition.
  • the upper limit of the content is preferably 99% by mass, and more preferably 95% by mass.
  • the lower limit of the weight average molecular weight (Mw) of the polymer [A] in terms of polystyrene as determined by gel permeation chromatography (GPC) is preferably 1,000, more preferably 2,000, and even more preferably 3,000.
  • the upper limit of the Mw is preferably 30,000, more preferably 20,000, and even more preferably 10,000.
  • the upper limit of the ratio of Mw to the polystyrene-equivalent number average molecular weight (Mn) of the polymer (A) measured by GPC is preferably 2.5, more preferably 2.0, and even more preferably 1.7.
  • the lower limit of the above ratio is usually 1.0, preferably 1.1, more preferably 1.2, and even more preferably 1.3.
  • Mw and Mn of the polymer in this specification are values measured by gel permeation chromatography (GPC) under the following conditions.
  • GPC column 2 "G2000HXL", 1 "G3000HXL” and 1 "G4000HXL” from Tosoh Corporation
  • Column temperature 40°C
  • Elution solvent tetrahydrofuran
  • Flow rate 1.0 mL/min
  • Sample concentration 1.0 mass%
  • Sample injection volume 100 ⁇ L
  • Detector Differential refractometer Standard material: Monodisperse polystyrene
  • the polymer can be synthesized, for example, by polymerizing monomers that provide each structural unit using a known method.
  • the side chain containing an acid dissociable group in the polymer (A) is preferably contained in a structural unit (a first structural unit, also referred to as structural unit (I)) that includes a partial structure in which a hydrogen atom of a carboxy group or a phenolic hydroxyl group is substituted with an acid dissociable group.
  • a structural unit a first structural unit, also referred to as structural unit (I)
  • structural unit (I) includes a partial structure in which a hydrogen atom of a carboxy group or a phenolic hydroxyl group is substituted with an acid dissociable group.
  • Acid-dissociable group refers to a group that replaces a hydrogen atom in a carboxy group or a phenolic hydroxyl group and dissociates under the action of an acid to give a carboxy group or a phenolic hydroxyl group.
  • the acid-dissociable group dissociates from the structural unit (I) due to the action of the acid generated from the [A] polymer upon exposure, and a difference occurs in the solubility of the [A] polymer in the developer between the exposed and non-exposed areas, allowing the formation of a resist pattern.
  • the structural unit (I) is not particularly limited as long as it is a structural unit that dissociates under the action of an acid to give a carboxy group or a phenolic hydroxyl group, but among them, a structural unit containing a partial structure substituted with an acid dissociable group represented by the following formula (1-1) (acid dissociable group (a-1)) or an acid dissociable group represented by the following formula (1-2) (acid dissociable group (a-2)) is preferred.
  • the acid dissociable group (a-1) and the acid dissociable group (a-2) may be collectively referred to as the acid dissociable group (a).
  • the acid dissociable group (a) is a group that substitutes a hydrogen atom of the carboxy group or the phenolic hydroxyl group in the structural unit (I).
  • the acid dissociable group (a) is bonded to the ether oxygen atom of the carbonyloxy group or the oxygen atom of the phenolic hydroxyl group.
  • phenolic hydroxyl group refers not only to a hydroxyl group directly bonded to a benzene ring, but also to all hydroxyl groups directly bonded to aromatic rings.
  • Ar 1 is a group in which one hydrogen atom has been removed from a substituted or unsubstituted aromatic ring structure having 5 to 30 ring members.
  • R 1 and R 2 are each independently a substituted or unsubstituted monovalent aliphatic hydrocarbon group having 1 to 10 carbon atoms, or R 1 and R 2 taken together form a saturated alicyclic hydrocarbon ring having 3 to 8 carbon atoms together with the carbon atom to which Ar 1 is bonded.
  • * indicates the bonding site with the etheric oxygen atom of the carboxy group or the oxygen atom of the phenolic hydroxyl group.
  • R v1 to R v3 are each independently a hydrogen atom or a substituted or unsubstituted monovalent chain hydrocarbon group having 1 to 10 carbon atoms. s is 1 or 2. * indicates the bonding site with the ether oxygen atom of the carboxy group or the oxygen atom of the phenolic hydroxyl group.
  • Numberer of ring members refers to the number of atoms constituting a ring structure, and in the case of a polycyclic ring, it refers to the number of atoms constituting the polycyclic ring.
  • Polycyclic ring includes not only spiro-type polycyclic rings in which two rings share one shared atom and condensed polycyclic rings in which two rings share two shared atoms, but also ring assembly-type polycyclic rings in which two rings do not share an atom and are connected by a single bond.
  • Ring structure includes “alicyclic structure” and “aromatic ring structure”.
  • Alicyclic structure includes “aliphatic hydrocarbon ring structure” and "aliphatic heterocyclic structure”.
  • polycyclic rings containing an aliphatic hydrocarbon ring structure and an aliphatic heterocyclic structure are considered to be “aliphatic heterocyclic structure”.
  • “Aromatic ring structure” includes “aromatic hydrocarbon ring structure” and “aromatic heterocyclic structure”.
  • aromatic ring structures polycyclic rings containing an aromatic hydrocarbon ring structure and an aromatic heterocyclic structure are considered to be “aromatic heterocyclic structure”.
  • “A group in which X hydrogen atoms have been removed from a ring structure” means a group in which X hydrogen atoms bonded to atoms that constitute the ring structure have been removed.
  • Numberer of carbon atoms refers to the number of carbon atoms that make up the group.
  • Hydrocarbon group includes “aliphatic hydrocarbon group” and “aromatic hydrocarbon group”.
  • Aliphatic hydrocarbon group includes “saturated hydrocarbon group” and “unsaturated hydrocarbon group”. From another perspective, “aliphatic hydrocarbon group” includes “chain hydrocarbon group” and “alicyclic hydrocarbon group”.
  • Chain hydrocarbon group refers to a hydrocarbon group that does not contain a cyclic structure and is composed only of a chain structure, and includes both linear hydrocarbon group and branched hydrocarbon group.
  • Alicyclic hydrocarbon group refers to a hydrocarbon group that contains only an alicyclic structure as a ring structure and does not contain an aromatic ring structure, and includes both monocyclic alicyclic hydrocarbon group and polycyclic alicyclic hydrocarbon group. However, it does not have to be composed only of an alicyclic structure, and it may contain a chain structure as part of it.
  • “Aromatic hydrocarbon group” refers to a hydrocarbon group that contains an aromatic ring structure as a ring structure. However, it does not have to be composed only of an aromatic ring structure, and it may contain a chain structure or an alicyclic structure as part of it.
  • Examples of the aromatic ring structure having 5 to 30 ring members which gives Ar 1 include an aromatic hydrocarbon ring structure having 6 to 30 ring members and an aromatic heterocyclic structure having 5 to 30 ring members.
  • aromatic hydrocarbon ring structures having 6 to 30 ring members include benzene structures; condensed polycyclic aromatic hydrocarbon ring structures such as naphthalene structures, anthracene structures, fluorene structures, biphenylene structures, phenanthrene structures, and pyrene structures; and ring assembly aromatic hydrocarbon ring structures such as biphenyl structures, terphenyl structures, binaphthalene structures, and phenylnaphthalene structures.
  • aromatic heterocyclic structures having 5 to 30 ring members include oxygen atom-containing heterocyclic structures such as furan structure, pyran structure, benzofuran structure, and benzopyran structure; nitrogen atom-containing heterocyclic structures such as pyrrole structure, pyridine structure, pyrimidine structure, indole structure, and quinoline structure; and sulfur atom-containing heterocyclic structures such as thiophene structure and dibenzothiophene structure.
  • the aromatic ring structure having 5 to 30 ring members which gives Ar 1 is preferably an aromatic hydrocarbon ring structure having 6 to 30 ring members, more preferably a benzene structure or a condensed polycyclic aromatic hydrocarbon ring structure, and further preferably a benzene structure or a naphthalene structure.
  • Some or all of the hydrogen atoms bonded to the atoms constituting the ring structure may be substituted with a substituent.
  • halogen atoms, alkyl groups, fluorinated alkyl groups, and alkoxy groups are preferred, and fluorine atoms, iodine atoms, methyl groups, trifluoromethyl groups, and methoxy groups are more preferred.
  • fluorine atoms or iodine atoms the sensitivity of the radiation-sensitive composition may be further improved.
  • Examples of the monovalent aliphatic hydrocarbon group having 1 to 10 carbon atoms which gives R1 and R2 include alkyl groups such as methyl, ethyl, n-propyl, i-propyl, n-butyl, sec-butyl, isobutyl, and tert-butyl; alkenyl groups such as ethenyl, propenyl, butenyl, and 2-methylprop-1-en-1-yl; and alkynyl groups such as ethynyl, propynyl, and butynyl.
  • Examples of the monovalent saturated alicyclic hydrocarbon ring having 3 to 8 carbon atoms formed by combining R1 and R2 together with the carbon atom to which Ar1 is bonded include monocyclic alicyclic saturated hydrocarbon rings such as a cyclopropane ring, a cyclobutane ring, a cyclopentane ring, and a cyclohexane ring; polycyclic alicyclic saturated hydrocarbon rings such as a norbornane ring and an adamantane ring; monocyclic alicyclic unsaturated hydrocarbon rings such as a cyclopentene ring and a cyclohexene ring; and polycyclic alicyclic unsaturated hydrocarbon rings such as a norbornene ring.
  • monocyclic alicyclic saturated hydrocarbon rings such as a cyclopropane ring, a cyclobutane ring, a cyclopentane ring, and a cyclohex
  • the aliphatic hydrocarbon group giving R1 and R2 is preferably a monovalent chain hydrocarbon group having 1 to 10 carbon atoms or a monovalent alicyclic hydrocarbon group having 3 to 20 carbon atoms, more preferably an alkyl group or a monocyclic alicyclic saturated hydrocarbon group, and further preferably a methyl group, an ethyl group, an i-propyl group, or a cyclopropyl group.
  • a part or all of the hydrogen atoms in the aliphatic hydrocarbon group may be substituted with a substituent.
  • substituents include the same groups as those exemplified as the substituents that may be possessed by the ring structure giving Ar 1.
  • the substituent is preferably a halogen atom or an alkoxy group, more preferably an iodine atom.
  • examples of the alicyclic hydrocarbon ring include monocyclic saturated alicyclic hydrocarbon rings such as a cyclopropane ring, a cyclobutane ring, a cyclopentane ring, and a cyclohexane ring; and polycyclic saturated alicyclic hydrocarbon rings such as a norbornane ring and an adamantane ring.
  • monocyclic saturated alicyclic hydrocarbon rings such as a cyclopropane ring, a cyclobutane ring, a cyclopentane ring, and a cyclohexane ring
  • polycyclic saturated alicyclic hydrocarbon rings such as a norbornane ring and an adamantane ring.
  • a monocyclic saturated alicyclic hydrocarbon ring having 5 or 6 carbon atoms is preferred.
  • the acid dissociable group (a) a group that replaces a hydrogen atom of a carboxy group in the structural unit (I) is preferred.
  • the acid dissociable group (a) is preferably bonded to an ether oxygen atom of a carbonyloxy group.
  • acids-dissociable group (a-1) groups represented by the following formulae (a-1-1) to (a-1-24) are preferred.
  • Examples of the monovalent chain hydrocarbon group having 1 to 10 carbon atoms which gives R v1 to R v3 include the same groups as those exemplified as the monovalent aliphatic hydrocarbon group having 1 to 10 carbon atoms relating to R 1 and R 2 .
  • acids-dissociable group (a-2) groups represented by the following formulae (a-2-1) to (a-2-2) are preferred.
  • the structural unit (I) may contain an acid dissociable group other than the acid dissociable group (a) (hereinafter also referred to as "acid dissociable group (b)").
  • the polymer [A] has an acid-dissociable group (b), which allows the balance between sensitivity and CDU to be adjusted.
  • the acid dissociable group (b) is not particularly limited as long as it is a group other than the acid dissociable group (a), and examples thereof include acid dissociable groups represented by the following formulas (b-1) to (b-3) (hereinafter also referred to as "acid dissociable groups (b-1) to (b-3)").
  • * indicates the bonding site with the ether oxygen atom of the carboxy group or the oxygen atom of the phenolic hydroxyl group.
  • R 1 X is a substituted or unsubstituted monovalent saturated aliphatic hydrocarbon group having 1 to 20 carbon atoms, or a substituted or unsubstituted monovalent alicyclic hydrocarbon group having 3 to 20 carbon atoms.
  • R 1 Y and R 1 Z are each independently a monovalent aliphatic hydrocarbon group having 1 to 20 carbon atoms, a monovalent alicyclic hydrocarbon group having 3 to 20 carbon atoms, or these groups combined with each other to form a saturated alicyclic structure having 3 to 20 ring members together with the carbon atom to which they are bonded.
  • R A is a hydrogen atom.
  • R B and R C are each independently a hydrogen atom or a monovalent hydrocarbon group having 1 to 20 carbon atoms.
  • R D is a divalent hydrocarbon group having 1 to 20 carbon atoms which, together with the carbon atoms to which R A , R B , and R C are each bonded, constitutes an unsaturated alicyclic structure having 4 to 20 ring members.
  • R U and R V are each independently a hydrogen atom or a monovalent hydrocarbon group having 1 to 20 carbon atoms
  • R W is a monovalent hydrocarbon group having 1 to 20 carbon atoms
  • R U and R V taken together with the carbon atom to which they are bonded form an alicyclic structure having 3 to 20 ring members
  • R W is a monovalent hydrocarbon group having 1 to 20 carbon atoms
  • R U and R W taken together with the carbon atom to which R U is bonded and the oxygen atom to which R W is bonded form an aliphatic heterocyclic structure having 4 to 20 ring members
  • R V is a hydrogen atom or a monovalent hydrocarbon group having 1 to 20 carbon atoms.
  • Examples of the monovalent aliphatic hydrocarbon group having 1 to 20 carbon atoms represented by R Y or R Z include alkyl groups such as methyl group, ethyl group, n-propyl group, i-propyl group, n-butyl group, sec-butyl group, isobutyl group, and tert-butyl group; alkenyl groups such as ethenyl group, propenyl group, butenyl group, and 2-methylprop-1-en-1-yl group; and alkynyl groups such as ethynyl group, propynyl group, and butynyl group.
  • Examples of the monovalent saturated aliphatic hydrocarbon group having 3 to 20 carbon atoms represented by R 1 X include alkyl groups having 3 to 20 carbon atoms among those exemplified above as the alkyl groups.
  • Examples of the monovalent alicyclic hydrocarbon group having 3 to 20 carbon atoms represented by R X , R Y or R Z include the same groups as those explained for R 1 and R 2 in the above formula (1-1).
  • saturated alicyclic structure having 3 to 20 ring members together with the carbon atom to which they are bonded
  • saturated alicyclic structure examples include monocyclic saturated alicyclic hydrocarbon rings such as a cyclopropane ring, a cyclobutane ring, a cyclopentane ring, and a cyclohexane ring; and polycyclic saturated alicyclic saturated hydrocarbon rings such as a norbornane ring and an adamantane ring.
  • Examples of the monovalent hydrocarbon group having 1 to 20 carbon atoms represented by R B , R C , R U , R V or R W include a monovalent aliphatic hydrocarbon group having 1 to 20 carbon atoms, a monovalent alicyclic hydrocarbon group having 3 to 20 carbon atoms, and a monovalent aromatic hydrocarbon group having 6 to 20 carbon atoms.
  • Examples of the monovalent aliphatic hydrocarbon group having 1 to 20 carbon atoms include the same groups as those explained above for R 1 X.
  • Examples of the monovalent alicyclic hydrocarbon group having 3 to 20 carbon atoms include the same groups as those explained for R 1 and R 2 in the above formula (1-1).
  • Examples of monovalent aromatic hydrocarbon groups having 6 to 20 carbon atoms include aryl groups such as phenyl, tolyl, xylyl, naphthyl, and anthryl; and aralkyl groups such as benzyl, phenethyl, naphthylmethyl, and anthrylmethyl.
  • Examples of the substituent that the aliphatic hydrocarbon group represented by R X may have include the same groups as those exemplified as the substituent that the ring structure providing Ar 1 in the above formula (1-1) may have.
  • Examples of the divalent hydrocarbon group having 1 to 20 carbon atoms represented by R D include groups in which one hydrogen atom has been removed from the groups exemplified as the monovalent hydrocarbon group having 1 to 20 carbon atoms represented by R Y , R Z , R B , R C , R U , R V or R W above.
  • Examples of the unsaturated alicyclic structure having 4 to 20 ring members constituted by R D and the carbon atoms to which R A , R B , and R C are bonded include monocyclic unsaturated alicyclic structures such as a cyclobutene structure, a cyclopentene structure, and a cyclohexene structure; and polycyclic unsaturated alicyclic structures such as a norbornene structure.
  • Examples of the aliphatic heterocyclic structure having 4 to 20 ring members formed by combining R U and R W with the carbon atom to which R U is bonded and the oxygen atom to which R W is bonded include saturated oxygen-containing heterocyclic structures such as an oxacyclobutane structure, an oxacyclopentane structure, and an oxacyclohexane structure; and unsaturated oxygen-containing heterocyclic structures such as an oxacyclobutene structure, an oxacyclopentene structure, and an oxacyclohexene structure.
  • R Y and R Z are monovalent hydrocarbon groups having 1 to 20 carbon atoms
  • R Y and R Z are preferably chain-like hydrocarbon groups, more preferably alkyl groups, and more preferably methyl groups.
  • R X is preferably a chain-like hydrocarbon group, more preferably an alkyl group, and even more preferably a methyl group.
  • the saturated alicyclic structure is preferably a monocyclic saturated alicyclic structure, more preferably a cyclopentane structure or a cyclohexane structure.
  • R X is preferably a chain hydrocarbon group, more preferably an alkyl group, and further preferably a methyl group, an ethyl group, an i-propyl group or a tert-butyl group.
  • R Y and R Z are combined with each other to form, together with the carbon atom to which they are bonded, a saturated alicyclic structure having 3 to 20 ring members, in which case the CDU of the radiation-sensitive composition can be further improved.
  • R 3 B is preferably a hydrogen atom.
  • R 3 C is preferably a hydrogen atom or a chain hydrocarbon group, more preferably a hydrogen atom or an alkyl group, and further preferably a methyl group.
  • the unsaturated alicyclic structure having 4 to 20 ring members constituted by R D and the carbon atoms to which R A , R B and R C are bonded is preferably a monocyclic unsaturated alicyclic structure, more preferably a cyclopentane structure or a cyclohexene structure.
  • the acid dissociable group (b) As the acid dissociable group (b), the acid dissociable group (b-1) or (b-2) is preferred.
  • Examples of the acid dissociable group (b-1) include groups represented by the following formulas (b-1-1) to (b-1-13).
  • Examples of the acid dissociable group (b-2) include groups represented by the following formulas (b-2-1) to (b-2-2).
  • structural unit (I) examples include structural units represented by the following formula (3-1) or (3-2) (hereinafter also referred to as “structural unit (I-1) or (I-2)").
  • Z is an acid dissociable group.
  • Z is preferably an acid dissociable group represented by the above formula (1-1) or (1-2) (acid dissociable group (a-1) or acid dissociable group (a-2)), or an acid dissociable group represented by the above formulas (b-1) to (b-2) (acid dissociable groups (b-1) to (b-2)).
  • R 11 is a hydrogen atom, a fluorine atom, a methyl group or a trifluoromethyl group.
  • R 31 is a divalent linking group. m 31 is 0 or 1.
  • Examples of the divalent linking group in R 31 include the same as those exemplified as the divalent linking groups represented by L s and Q s described below. Among them, a divalent hydrocarbon group having 1 to 10 carbon atoms is preferable, and an alkylene group is more preferable.
  • R 12 is a hydrogen atom or a methyl group.
  • R 13 is a single bond, an oxygen atom, -COO- or -CONH-.
  • Ar 2 is a group in which two hydrogen atoms have been removed from a substituted or unsubstituted aromatic hydrocarbon ring structure having 6 to 30 ring members.
  • R 14 is a single bond or -CO-.
  • R 11 is preferably a hydrogen atom or a methyl group, and more preferably a methyl group.
  • R 13 is preferably a single bond.
  • Examples of the aromatic hydrocarbon ring structure having 6 to 30 ring members which gives Ar 2 include the same aromatic hydrocarbon ring structures as those exemplified as the aromatic hydrocarbon ring structure having 6 to 30 ring members among the aromatic hydrocarbon ring structures having 5 to 30 ring members which give Ar 1 in the above formula (1-1), etc. Among these, a benzene structure or a naphthalene structure is preferred.
  • R 14 is preferably a single bond.
  • the structural unit (I) As the structural unit (I), the structural unit (I-1) is preferred.
  • the lower limit of the content of the structural unit (I) in the polymer [A] is preferably 5 mol%, more preferably 15 mol%, even more preferably 20 mol%, and particularly preferably 25 mol%, based on the total structural units constituting the polymer [A].
  • the upper limit of the above content is preferably 70 mol%, more preferably 60 mol%, even more preferably 50 mol%, and particularly preferably 40 mol%.
  • the upper limit and lower limit of the numerical range may be “less than or equal to” or “less than”, and the lower limit may be “more than or equal to” or “greater than”.
  • the upper limit and lower limit can be combined in any way.
  • the lower limit of the content of the structural unit having an acid-dissociable group (a) among the structural units (I) in the polymer is 0 mol%, preferably 15 mol%, more preferably 30 mol%, more preferably 45 mol%, even more preferably 60 mol%, and particularly preferably 75 mol% relative to the content of the structural unit (I).
  • the upper limit of the content is 100 mol%, preferably 85 mol%, more preferably 70 mol%, more preferably 55 mol%, even more preferably 40 mol%, and particularly preferably 25 mol% relative to the content of the structural unit (I).
  • the lower limit of the content of the structural unit having an acid-dissociable group containing an iodine group is 0 mol%, preferably 15 mol%, more preferably 30 mol%, more preferably 45 mol%, even more preferably 60 mol%, and particularly preferably 75 mol% relative to the content of the structural unit (I).
  • the upper limit of the above content is 100 mol%, preferably 85 mol%, more preferably 70 mol%, more preferably 55 mol%, even more preferably 40 mol%, and particularly preferably 25 mol% relative to the content of the structural unit (I).
  • the polymer [A] having the structural unit (I) can be synthesized by polymerizing a monomer that provides the structural unit (I) by a known method.
  • the side chain containing two or more iodine groups and one or more radiation-sensitive onium cation structures of the polymer (A) is preferably contained in a structural unit containing two or more iodine groups and one or more radiation-sensitive onium cation structures (a second structural unit, also referred to as structural unit (II)).
  • the structural unit (II) can also be said to be a structural unit containing a partial structure that generates an acid upon irradiation with radiation (hereinafter also referred to as "exposure").
  • the number of iodine groups in the structural unit (II) may be 2 or more, preferably 2 to 6, more preferably 2 to 4, and even more preferably 2 or 3.
  • At least one of the iodine groups in the structural unit (II) is preferably bonded to an aromatic ring structure.
  • the aromatic ring structure include those exemplified as the aromatic ring structure having 5 to 30 ring members that gives Ar 1 in the above formula (1-1). Among them, an aromatic hydrocarbon ring structure having 6 to 30 ring members is preferred, an aromatic hydrocarbon ring structure having 6 to 10 ring members is more preferred, and a benzene ring is even more preferred. It is not necessary that two or more iodine groups are bonded to the same aromatic ring structure, and two or more aromatic ring structures to which one iodine group is bonded may be present.
  • Examples of the structural unit (II) include a structure containing a sulfonate anion and a radiation-sensitive onium cation, with the sulfonate anion bonded to a side chain of a polymer (hereinafter also referred to as "structure 1"), and a structure containing a sulfonate anion and a radiation-sensitive onium cation, with the radiation-sensitive onium cation bonded to a side chain of a polymer (hereinafter also referred to as "structure 2"). Of these, structure 1 is preferred.
  • the above-mentioned radiation-sensitive onium cations include the same ones as those exemplified as the radiation-sensitive onium cations in the photodegradable bases used as the acid generator [B] and the acid diffusion control agent [C] described later.
  • sulfonium cations are preferred, and monovalent radiation-sensitive sulfonium cations containing an aromatic ring structure in which at least one hydrogen atom is substituted with at least one group selected from the group consisting of a fluorine atom, a fluorine atom-containing group, and an iodine atom are preferred.
  • Specific and preferred aspects are described below in relation to the radiation-sensitive onium cations in the acid generator [B].
  • the structural unit (II) is preferably the above-mentioned structure 1, and examples thereof include a structural unit containing a partial structure represented by the following formula (II-0):
  • R g1 and R g2 are each independently a fluorine atom or a monovalent fluorinated hydrocarbon group having 1 to 20 carbon atoms.
  • n g is an integer of 1 to 10.
  • M 0+ is a monovalent radiation-sensitive onium cation. * is a bond to another partial structure in the structural unit (II).
  • Examples of the monovalent fluorinated hydrocarbon group having 1 to 20 carbon atoms represented by R g1 and R g2 include a fluorinated alkyl group having 1 to 20 carbon atoms.
  • R g1 and R g2 are preferably a fluorine atom or a fluorinated alkyl group having 1 to 6 carbon atoms, more preferably a fluorine atom or a perfluoroalkyl group having 1 to 6 carbon atoms, still more preferably a fluorine atom or a trifluoromethyl group, and particularly preferably a fluorine atom.
  • n g 1 to 4 is preferable, and 1 or 2 is more preferable.
  • the structural unit (II) can be obtained by polymerizing a (meth)acrylic acid ester compound containing two or more iodine groups and one or more radiation-sensitive onium cation structures (hereinafter also referred to as compound (II-1)), or a vinyl compound containing two or more iodine groups and one or more radiation-sensitive onium cation structures (hereinafter also referred to as compound (II-2)).
  • Examples of compound (II-1) include a monomer that is a salt containing a sulfonate anion having a (meth)acryloyloxy group and two or more iodine groups, and a radiation-sensitive onium cation (hereinafter also referred to as monomer (II-1-1)); a monomer that is a salt containing a sulfonate anion having a (meth)acryloyloxy group and one iodine group, and a radiation-sensitive onium cation having one iodine group (hereinafter also referred to as monomer (II-1-2)); and a monomer that is a salt containing a sulfonate anion having a (meth)acryloyloxy group, and a radiation-sensitive onium cation having two or more iodine groups (hereinafter also referred to as monomer (II-1-3)). Of these, monomer (II-1-1) is preferred.
  • the sulfonate anion in the monomer (II-1-1) may be a sulfonate anion containing an aromatic ring having two or more iodine groups bonded thereto and one (meth)acryloyloxy group; or a sulfonate anion containing two or more aromatic rings having one iodine group bonded thereto and one (meth)acryloyloxy group.
  • the upper limit of the iodine atom content in these sulfonate anions is preferably 50% or less, more preferably 45% or less, even more preferably 40% or less, and particularly preferably 35% or less, based on the molecular weight of the sulfonic acid having a proton bonded to the sulfonate anion.
  • the lower limit of the content is preferably 10% or more, more preferably 20% or more, and even more preferably 25% or more.
  • Examples of compound (II-2) include a monomer that is a salt containing a sulfonate anion having a vinyl group and two or more iodine groups, and a radiation-sensitive onium cation (hereinafter also referred to as monomer (II-2-1)); a monomer that is a salt containing a sulfonate anion having a vinyl group and one iodine group, and a radiation-sensitive onium cation having one iodine group (hereinafter also referred to as monomer (II-2-2)); and a monomer that is a salt containing a sulfonate anion having a vinyl group, and a radiation-sensitive onium cation having two or more iodine groups (hereinafter also referred to as monomer (II-2-3)). Of these, monomer (II-2-1) is preferred.
  • the sulfonate anion in the monomer (II-2-1) may be a sulfonate anion containing an aromatic ring having two or more iodine groups bonded thereto and one vinyl group; or a sulfonate anion containing two or more aromatic rings having one iodine group bonded thereto and one vinyl group.
  • the upper limit of the iodine atom content in these sulfonate anions is preferably 50% or less, more preferably 45% or less, even more preferably 40% or less, and particularly preferably 35% or less, based on the molecular weight of the sulfonic acid having a proton bonded to the sulfonate anion.
  • the lower limit of the content is preferably 10% or more, more preferably 20% or more, even more preferably 25% or more, and particularly preferably 30% or more.
  • Examples of compound (II-1) include compounds represented by the following formula (II-1s):
  • R s is a hydrogen atom or a methyl group.
  • L s and Q s are a single bond or a divalent linking group.
  • Ar s is an aromatic hydrocarbon group having 6 to 20 carbon atoms and a valence of (m s +p s +2).
  • R s1 and R s2 are each independently a fluorine atom or a monovalent fluorinated hydrocarbon group having 1 to 20 carbon atoms.
  • R s3 is a substituent other than an iodine group.
  • m s is an integer of 0 to 4.
  • n s is an integer of 1 to 10.
  • p s is an integer of 0 or greater.
  • M s+ is a monovalent radiation-sensitive onium cation.
  • L s contains an aromatic ring having two or more iodine groups, or contains two or more aromatic rings having one iodine group.
  • L s contains an aromatic ring having one or more iodo groups.
  • Examples of the divalent linking group represented by Ls and Qs include a carbonyl group, an ether group, a carbonyloxy group, a sulfide group, a thiocarbonyl group, a sulfonyl group, a divalent hydrocarbon group, or a group combining these groups.
  • the carbon atoms constituting the divalent hydrocarbon group may be replaced with a carbonyl group or an ether group.
  • Ls is preferably a single bond or a divalent hydrocarbon group having 1 to 10 carbon atoms.
  • Qs is preferably a group combining one or more selected from the group consisting of a carbonyl group, an ether group, a carbonyloxy group, and a divalent hydrocarbon group having 1 to 20 carbon atoms, and the carbon atoms constituting the divalent hydrocarbon group having 1 to 20 carbon atoms may be replaced with a carbonyl group or an ether group.
  • L s includes an aromatic ring having two or more iodine groups, or includes two or more aromatic rings having one iodine group.
  • L s includes an aromatic ring having one or more iodine groups.
  • aromatic rings having such iodine groups include an iodophenylene group, an iodotrilen group, an iodonaphthylene group, a diiodophenylene group, and a diiodonaphthylene group.
  • the aromatic ring may further have a substituent, and examples of such substituents include a fluoro group, a chloro group, a bromo group, an alkoxy group, a hydroxyl group, a carboxy group, and a nitro group.
  • aromatic hydrocarbon rings having 6 to 20 carbon atoms that give an aromatic hydrocarbon group having a valence of (m s +p s +2) and having 6 to 20 carbon atoms, represented by Ar s , include a benzene ring; condensed polycyclic aromatic hydrocarbon rings such as a naphthalene ring, an anthracene ring, a fluorene ring, a biphenylene ring, a phenanthrene ring, and a pyrene ring; ring-assembly aromatic hydrocarbon rings such as a biphenyl ring, a terphenyl ring, a binaphthalene ring, and a phenylnaphthalene ring; a 9,10-ethanoanthracene ring; and a triptycene ring.
  • condensed polycyclic aromatic hydrocarbon rings such as a naphthalene ring, an anthracene ring,
  • Ar s may have a substituent, and examples of such a substituent include a halogen atom, an alkoxy group, a hydroxy group, a carboxy group, and a nitro group.
  • Examples of the monovalent fluorinated hydrocarbon group having 1 to 20 carbon atoms represented by R s1 and R s2 include a fluorinated alkyl group having 1 to 20 carbon atoms.
  • R s1 and R s2 are preferably a fluorine atom or a fluorinated alkyl group, more preferably a fluorine atom or a perfluoroalkyl group, further preferably a fluorine atom or a trifluoromethyl group, and particularly preferably a fluorine atom.
  • Examples of the substituent other than the iodo group represented by R s3 include a fluoro group, a chloro group, a bromo group, an alkoxy group, a hydroxy group, a carboxy group, and a nitro group.
  • m s is preferably 2 or 3.
  • n s is preferably 1 to 4, and more preferably 1 or 2.
  • M s+ examples include the same as the radiation-sensitive onium cations described below.
  • compound (II-1) compounds represented by the following formulas (II-1-1) to (II-1-10) are preferred.
  • M s+ has the same meaning as in the above formula (II-1s).
  • Examples of compound (II-2) include compounds represented by the following formula (II-2t) or formula (II-2u):
  • Q t is a single bond or a divalent linking group.
  • Ar t is an aromatic hydrocarbon group having 6 to 20 carbon atoms and a valence of (m t +p t +1).
  • R t1 and R t2 are each independently a fluorine atom or a monovalent fluorinated hydrocarbon group having 1 to 20 carbon atoms.
  • m t is an integer from 2 to 4.
  • n t is an integer from 1 to 10.
  • p t is 1 or 2.
  • M t+ is a monovalent radiation-sensitive onium cation. When p t is 2, two Q t's are the same or different, and two M t+ 's are the same or different.
  • n t is 2 or more or p t is 2
  • a plurality of R t1's and R t2 's are each independently the same or different.
  • L u is a divalent linking group.
  • Q u is a single bond or a divalent linking group.
  • Ar u1 is a divalent aromatic hydrocarbon group having 6 to 20 carbon atoms.
  • Ar u2 is a (m u +p u +1)-valent aromatic hydrocarbon group having 6 to 20 carbon atoms.
  • R u1 and R u2 are each independently a fluorine atom or a monovalent fluorinated hydrocarbon group having 1 to 20 carbon atoms.
  • m u is an integer of 0 to 4.
  • n u is an integer of 1 to 10.
  • p u is 1 or 2.
  • M u+ is a monovalent radiation-sensitive onium cation.
  • Examples of the divalent linking group represented by Q t , L u and Q u include a carbonyl group, an ether group, a carbonyloxy group, a sulfide group, a thiocarbonyl group, a sulfonyl group, a divalent hydrocarbon group, etc.
  • the carbon atoms constituting the divalent hydrocarbon group may be replaced with a carbonyl group or an ether group.
  • L u is preferably a carbonyloxy group.
  • Q t and Q u are preferably a group consisting of one or more selected from the group consisting of a carbonyl group, an ether group, a carbonyloxy group and a divalent hydrocarbon group having 1 to 20 carbon atoms, and the carbon atoms constituting the divalent hydrocarbon group having 1 to 20 carbon atoms may be replaced with a carbonyl group or an ether group.
  • Ar u1 includes an aromatic ring having two or more iodine groups, or includes two or more aromatic rings each having one iodine group.
  • Ar u1 includes an aromatic ring having one or more iodine groups. Examples of such an aromatic ring having an iodine group include an iodophenylene group, an iodotrilen group, an iodonaphthylene group, a diiodophenylene group, and a diiodonaphthylene group.
  • a benzene ring and a naphthalene ring are preferred.
  • Art t , Ar u1 and Ar u2 may have a substituent, and examples of such a substituent include a halogen atom, an alkoxy group, a hydroxy group, a carboxy group, and a nitro group.
  • Examples of the monovalent fluorinated hydrocarbon group having 1 to 20 carbon atoms represented by R t1 , R t2 , R u1 and R u2 include a fluorinated alkyl group having 1 to 20 carbon atoms.
  • R s1 and R s2 are preferably a fluorine atom or a fluorinated alkyl group, more preferably a fluorine atom or a perfluoroalkyl group, further preferably a fluorine atom or a trifluoromethyl group, and particularly preferably a fluorine atom.
  • mt is preferably 2 or 3.
  • mu is preferably 1 to 3, and more preferably 2 or 3.
  • n t and n u is preferably an integer of 1 to 4, and more preferably 1 or 2.
  • M t+ and M u+ include the same as the radiation-sensitive onium cations described below.
  • M u+ has the same meaning as in the above formula (II-2u).
  • M t+ has the same meaning as in the above formula (II-2t).
  • M y+ is a monovalent radiation-sensitive onium cation. Note that the two M t+ in the above formulas (II-2-13) and (II-2-16) are each independent.
  • the lower limit of the content of the structural unit (II) in the polymer [A] is preferably 1 mol%, more preferably 3 mol%, even more preferably 5 mol%, and particularly preferably 7 mol%, based on all structural units constituting the polymer [A].
  • the upper limit of the above content is preferably 40 mol%, more preferably 30 mol%, and even more preferably 20 mol%.
  • the polymer (A) further has a side chain containing a phenolic hydroxyl group.
  • the side chain is preferably a structural unit containing a phenolic hydroxyl group (a third structural unit, also referred to as a structural unit (III)).
  • the sensitivity of the radiation-sensitive composition can be further increased by the polymer [A] having the structural unit (III). Therefore, when the polymer [A] has the structural unit (III), the radiation-sensitive composition can be suitably used as a radiation-sensitive composition for KrF exposure, EUV exposure, or electron beam exposure.
  • structural unit (III) examples include the structural unit represented by the following formula (III-1) (hereinafter, structural unit (III-1)).
  • R P is a hydrogen atom, a fluorine atom, a methyl group or a trifluoromethyl group.
  • L P is a single bond, -COO-, -O- or -CONH-.
  • Ar P is a group obtained by removing (p+1) hydrogen atoms from a substituted or unsubstituted aromatic hydrocarbon ring structure having 6 to 30 ring members. p is an integer of 1 to 3.
  • R 3 P is preferably a hydrogen atom or a methyl group.
  • L P is preferably a single bond or —COO—, more preferably a single bond.
  • L P is a single bond, the CDU of the radiation-sensitive composition can be further improved.
  • Examples of the aromatic hydrocarbon ring structure having 6 to 30 ring members which gives Ar P include the same as those exemplified as the aromatic hydrocarbon ring structure having 6 to 30 ring members among the aromatic ring structures having 5 to 30 ring members which give Ar 1 in the above formula (1-1). Among these, a benzene structure or a naphthalene structure is preferable, and a benzene structure is more preferable.
  • a part or all of the hydrogen atoms in the aromatic hydrocarbon ring structure may be substituted with a substituent.
  • substituents include the same groups as those exemplified as the substituents that may be possessed by the ring structure giving Ar1 .
  • p is preferably 1 or 2.
  • p is 1, the CDU of the radiation-sensitive composition can be further improved.
  • p is 2, the sensitivity of the radiation-sensitive composition can be further improved.
  • the hydroxy group is preferably bonded to a carbon atom adjacent to the carbon atom bonded to L P among the carbon atoms constituting Ar P.
  • the hydroxy group is preferably bonded to a carbon atom adjacent to the carbon atom bonded to L P among the carbon atoms constituting Ar P.
  • at least one hydroxy group and L P are preferably bonded to the ortho positions of each other in Ar P. In this case, the occurrence of defects in a resist pattern formed from the radiation-sensitive composition can be suppressed.
  • structural unit (III-1) examples include structural units represented by the following formulas (III-1-1) to (III-1-20) (hereinafter also referred to as “structural units (III-1-1) to (III-1-20)").
  • R 3 P has the same meaning as in the above formula (III-1).
  • the lower limit of the content of the structural unit (III) in the polymer [A] is preferably 10 mol%, more preferably 15 mol%, even more preferably 20 mol%, and particularly preferably 25 mol%, based on the total structural units constituting the polymer [A].
  • the upper limit of the content is preferably 60 mol%, more preferably 50 mol%, even more preferably 45 mol%, and particularly preferably 40 mol%.
  • a monomer that gives the structural unit (III) for example, a monomer in which the hydrogen atom of the phenolic hydroxyl group (-OH) of 4-acetoxystyrene or 3,5-diacetoxystyrene is replaced with an acetyl group or the like can also be used.
  • the obtained polymerized reaction product can be subjected to a hydrolysis reaction in the presence of a base such as an amine to synthesize a polymer [A] having the structural unit (III).
  • the other structural units are structural units other than the above structural units (I) to (III), such as a lactone structure, a cyclic carbonate structure, a sultone structure, or a structural unit containing a combination thereof (hereinafter also referred to as “structural unit (IV)”), a structural unit containing an alcoholic hydroxyl group (hereinafter also referred to as “structural unit (V)”), etc.
  • the structural unit (IV) is a structural unit containing a lactone structure, a cyclic carbonate structure, a sultone structure, or a combination thereof.
  • the adhesion to the substrate can be improved.
  • Examples of the structural unit (IV) include structural units represented by the following formula:
  • R L1 is a hydrogen atom, a fluorine atom, a methyl group or a trifluoromethyl group.
  • a structural unit containing a lactone structure is preferred.
  • the lower limit of the content of the structural unit (IV) is preferably 5 mol %, more preferably 10 mol %, based on the total structural units constituting the polymer [A].
  • the upper limit of the content is preferably 35 mol %, more preferably 25 mol %.
  • the structural unit (V) is a structural unit containing an alcoholic hydroxyl group (excluding those corresponding to the structural unit (IV)).
  • the solubility in a developer can be more appropriately adjusted.
  • Examples of the structural unit (V) include structural units represented by the following formula:
  • R L2 is a hydrogen atom, a fluorine atom, a methyl group or a trifluoromethyl group.
  • the lower limit of the content of the structural unit (V) is preferably 5 mol %, more preferably 10 mol %, based on the total structural units constituting the polymer [A].
  • the upper limit of the content is preferably 35 mol %, more preferably 25 mol %.
  • the acid generator [B] is a substance that generates an acid upon exposure (excluding the polymer [A]), and the preferred molecular weight is 2,500 or less, particularly 1,500 or less.
  • Examples of the radiation used for exposure include the same as those exemplified as the radiation in the exposure step of the resist pattern forming method described below.
  • the acid generated by exposure dissociates the acid-dissociable group of the polymer [A] or the like to generate a carboxyl group or a phenolic hydroxyl group, and the solubility of the resist film in the developer is different between the exposed and unexposed areas, so that a resist pattern can be formed.
  • the acid generator [B] may also be a polymer [P] different from the polymer [A].
  • the radiation-sensitive composition of the present invention has a radiation-sensitive onium cation structure in the polymer [A], but the polymer [P] does not have the radiation-sensitive onium cation structure.
  • acids generated from the acid generator include sulfonic acids, carboxylic acids, and imide acids.
  • Examples of acid generators include onium salt compounds, N-sulfonyloxyimide compounds, sulfonimide compounds, halogen-containing compounds, and diazoketone compounds.
  • onium salt compounds include sulfonium salts, tetrahydrothiophenium salts, iodonium salts, phosphonium salts, diazonium salts, pyridinium salts, etc.
  • acid generator [B] include the compounds described in paragraphs [0080] to [0113] of JP 2009-134088 A.
  • an onium salt compound is preferred, and an onium salt compound consisting of a radiation-sensitive onium cation and an organic acid anion is more preferred.
  • Examples of the radiation-sensitive onium cation include monovalent cations represented by the following formulae (r-a) to (r-b) (hereinafter also referred to as “cations (r-a) to (r-b)").
  • b1 is an integer of 0 to 4.
  • R B1 is a monovalent organic group having 1 to 20 carbon atoms, a hydroxyl group, a nitro group, or a halogen atom.
  • b1 is 2 or more, multiple R B1 are the same or different from each other and are a monovalent organic group having 1 to 20 carbon atoms, a hydroxyl group, a nitro group, or a halogen atom, or are a part of a ring structure having 4 to 20 ring members constituted by combining these groups together with the carbon chain to which they are bonded.
  • b2 is an integer of 0 to 4.
  • R B2 is a monovalent organic group having 1 to 20 carbon atoms, a hydroxyl group, a nitro group, or a halogen atom.
  • R B2 is 2 or more, multiple R B2 are the same or different from each other and are a monovalent organic group having 1 to 20 carbon atoms, a hydroxyl group, a nitro group, or a halogen atom, or are a part of a ring structure having 4 to 20 ring members constituted by combining these groups together with the carbon chain to which they are bonded.
  • R B3 and R B4 are each independently a hydrogen atom, a monovalent organic group having 1 to 20 carbon atoms, a hydroxyl group, a nitro group, or a halogen atom, or these are combined together to form a single bond.
  • b3 is an integer from 0 to 11.
  • R B5 is a monovalent organic group having 1 to 20 carbon atoms, a hydroxyl group, a nitro group, or a halogen atom.
  • R B5 are the same or different and are a monovalent organic group having 1 to 20 carbon atoms, a hydroxyl group, a nitro group, or a halogen atom, or are parts of a ring structure having 4 to 20 ring members formed together with the carbon chain to which these groups are bonded by combining with each other.
  • n b1 is an integer from 0 to 3.
  • b4 is an integer of 0 to 5.
  • R B6 is a monovalent organic group having 1 to 20 carbon atoms, a hydroxy group, a nitro group, or a halogen atom.
  • b4 is 2 or more, multiple R B6 are the same or different from each other and are a monovalent organic group having 1 to 20 carbon atoms, a hydroxy group, a nitro group, or a halogen atom, or are a part of a ring structure having 4 to 20 ring members constituted by combining these groups together and the carbon chain to which they are bonded.
  • b5 is an integer of 0 to 5.
  • R B7 is a monovalent organic group having 1 to 20 carbon atoms, a hydroxy group, a nitro group, or a halogen atom.
  • R B7 is 2 or more, multiple R B7 are the same or different from each other and are a monovalent organic group having 1 to 20 carbon atoms, a hydroxy group, a nitro group, or a halogen atom, or are a part of a ring structure having 4 to 20 ring members constituted by combining these groups together and the carbon chain to which they are bonded.
  • Organic group means a group containing at least one carbon atom.
  • Examples of the monovalent organic group having 1 to 20 carbon atoms represented by R B1 , R B2 , R B3 , R B4 , R B5 and R B6 include monovalent hydrocarbon groups having 1 to 20 carbon atoms, groups ( ⁇ ) containing a divalent heteroatom-containing group between the carbon-carbon atoms of this hydrocarbon group, groups ( ⁇ ) in which some or all of the hydrogen atoms in the above hydrocarbon group or the above group ( ⁇ ) have been substituted with a monovalent heteroatom-containing group, and groups ( ⁇ ) in which the above hydrocarbon group, the above group ( ⁇ ) or the above group ( ⁇ ) is combined with a divalent heteroatom-containing group.
  • Examples of the monovalent hydrocarbon group having 1 to 20 carbon atoms include the same groups as those exemplified as the monovalent hydrocarbon group having 1 to 20 carbon atoms represented by R B , R C , R U , R V or R W in the above formulas (b-2) to (b-3).
  • heteroatoms constituting monovalent or divalent heteroatom-containing groups include oxygen atoms, nitrogen atoms, sulfur atoms, phosphorus atoms, silicon atoms, and halogen atoms.
  • halogen atoms include fluorine atoms, chlorine atoms, bromine atoms, and iodine atoms.
  • divalent heteroatom-containing groups include -O-, -CO-, -S-, -CS-, -NR'-, and groups that combine two or more of these (e.g., -COO-, -CONR'-, etc.).
  • R' is a hydrogen atom or a monovalent hydrocarbon group having 1 to 10 carbon atoms.
  • R B1 , R B2 , R B5 , R B6 and R B7 are preferably a halogen atom or a group in which a monovalent hydrocarbon group having 1 to 20 carbon atoms has some or all of its hydrogen atoms substituted with a monovalent halogen atom.
  • the halogen atom is preferably a fluorine atom or an iodine atom. In this case, a good balance between the sensitivity and CDU of the radiation-sensitive composition can be achieved.
  • R B3 and R B4 are preferably a hydrogen atom or a single bond formed by combining these together.
  • b1, b2 and b3 each preferably represent an integer of 0 to 3.
  • n b1 is preferably 0 or 1.
  • b4 and b5 are preferably 0 or 1.
  • a monovalent radiation-sensitive onium cation containing an aromatic ring structure in which at least one hydrogen atom is substituted with at least one group selected from the group consisting of a fluorine atom, a fluorine-containing group, and an iodine atom (hereinafter, also referred to as "cation (P)") is preferred.
  • cation (P) a monovalent radiation-sensitive onium cation containing an aromatic ring structure in which at least one hydrogen atom is substituted with at least one group selected from the group consisting of a fluorine atom, a fluorine-containing group, and an iodine atom.
  • a cation in which b1 and b2 are mutually independent integers of 1 to 3 at least one R B1 is a fluorine atom or an iodine atom, and at least one R B2 is a fluorine atom or an iodine atom is preferred.
  • examples of the cation (r-b) corresponding to the cation (P) include cations in which b4 is an integer of 1 to 5, and at least one R B6 is a fluorine atom or an iodine atom.
  • a cation in which b4 and b5 are each independently an integer of 1 to 5, at least one R B6 is a fluorine atom or an iodine atom, and at least one R B7 is a fluorine atom or an iodine atom is preferred.
  • organic acid anion examples include sulfonate anion, carboxylate anion, and imide acid anion.
  • the acid generator [B] is preferably an onium salt compound (hereinafter also referred to as “compound [Z]”) having the above cation (P) and a monovalent organic acid anion (hereinafter also referred to as “anion (Q)").
  • Cation (P) may, for example, be the cations represented by the following formulas (2-1-1) to (2-1-12) (hereinafter also referred to as "cations (P-1-1) to (P-1-12)").
  • Examples of radiation-sensitive onium cations other than cation (P) include triphenylsulfonium cation and diphenyliodonium cation.
  • the anion (Q) is a monovalent organic acid anion.
  • the anion (Q) contains a monovalent anion group.
  • Examples of the monovalent anion group include a sulfonic acid anion group, a carboxylate anion group, and an imide acid anion group. Among these, a sulfonic acid anion group or a carboxylate anion group is preferred.
  • anion (Q) that has a sulfonate anion group as a monovalent anion group (hereinafter also referred to as "anion (Q-1)").
  • the anion moiety (Q-1) is not particularly limited as long as it is a sulfonate anion used as an anion in an onium salt-type radiation-sensitive acid generator, and examples thereof include the sulfonate anion represented by the following formula (4-1).
  • R p1 is a monovalent group containing a ring structure having 5 or more ring members.
  • R p2 is a divalent linking group.
  • R p3 and R p4 are each independently a hydrogen atom, a fluorine atom, a monovalent hydrocarbon group having 1 to 20 carbon atoms, or a monovalent fluorinated hydrocarbon group having 1 to 20 carbon atoms.
  • R p5 and R p6 are each independently a fluorine atom or a monovalent fluorinated hydrocarbon group having 1 to 20 carbon atoms.
  • n p1 is an integer from 0 to 10.
  • n p2 is an integer from 0 to 10.
  • n p3 is an integer from 0 to 10.
  • n p1 +n p2 +n p3 is 1 or more and 30 or less.
  • n p1 is 2 or more
  • multiple R p2 are the same or different from each other.
  • np2 is 2 or more
  • the multiple R p3 are the same or different from each other, and the multiple R p4 are the same or different from each other.
  • np3 is 2 or more
  • the multiple R p5 are the same or different from each other
  • the multiple R p6 are the same or different from each other.
  • ring structures with 5 or more ring members include aliphatic hydrocarbon ring structures with 5 or more ring members, aliphatic heterocyclic structures with 5 or more ring members, aromatic hydrocarbon ring structures with 6 or more ring members, aromatic heterocyclic structures with 5 or more ring members, or combinations of these.
  • Examples of aliphatic hydrocarbon ring structures having 5 or more ring members include monocyclic saturated alicyclic structures such as cyclopentane structure, cyclohexane structure, cycloheptane structure, cyclooctane structure, cyclononane structure, cyclodecane structure, and cyclododecane structure; monocyclic unsaturated alicyclic structures such as cyclopentene structure, cyclohexene structure, cycloheptene structure, cyclooctene structure, and cyclodecene structure; polycyclic saturated alicyclic structures such as norbornane structure, adamantane structure, tricyclodecane structure, tetracyclododecane structure, and steroid structure; polycyclic unsaturated alicyclic structures such as norbornene structure and tricyclodecene structure.
  • a "steroid structure” refers to a structure having a basic skeleton (steran
  • Examples of aliphatic heterocyclic structures having 5 or more ring members include lactone structures such as a hexanolactone structure and a norbornanelactone structure; sultone structures such as a hexanosultone structure and a norbornanesultone structure; oxygen atom-containing heterocyclic structures such as a dioxolane structure, an oxacycloheptane structure and an oxanorbornane structure; nitrogen atom-containing heterocyclic structures such as an azacyclohexane structure and a diazabicyclooctane structure; and sulfur atom-containing heterocyclic structures such as a thiacyclohexane structure and a thianorbornane structure.
  • Aromatic hydrocarbon ring structures having 6 or more ring members include, for example, a benzene structure; condensed polycyclic aromatic hydrocarbon ring structures such as a naphthalene structure, anthracene structure, fluorene structure, biphenylene structure, phenanthrene structure, and pyrene structure; ring-assembled aromatic hydrocarbon ring structures such as a biphenyl structure, terphenyl structure, binaphthalene structure, and phenylnaphthalene structure; a 9,10-ethanoanthracene structure; and a triptycene structure.
  • the benzene structure and the 9,10-ethanoanthracene structure are preferred.
  • aromatic heterocyclic structures having 5 or more ring members include oxygen atom-containing heterocyclic structures such as furan structure, pyran structure, benzofuran structure, and benzopyran structure; nitrogen atom-containing heterocyclic structures such as pyridine structure, pyrimidine structure, and indole structure; and sulfur atom-containing heterocyclic structures such as thiophene structure.
  • some or all of the hydrogen atoms bonded to the atoms constituting the ring structure may be replaced with a substituent.
  • the lower limit of the number of ring members in the ring structure is preferably 6, more preferably 8, even more preferably 9, and particularly preferably 10.
  • the upper limit of the number of ring members is preferably 25.
  • R p1 is preferably a monovalent group containing an aliphatic hydrocarbon ring structure having 5 or more ring members, a monovalent group containing an aliphatic heterocyclic structure having 5 or more ring members, or a monovalent group containing an aromatic hydrocarbon ring structure having 6 or more ring members.
  • a monovalent group containing an aromatic hydrocarbon ring structure having 6 or more ring members and having 1 to 4 iodine atoms as a substituent is preferred.
  • Examples of the divalent linking group represented by R p2 include a carbonyl group, an ether group, a carbonyloxy group, a sulfide group, a thiocarbonyl group, a sulfonyl group, a divalent hydrocarbon group, or a combination thereof.
  • the carbon atom constituting the divalent hydrocarbon group may be replaced with a carbonyl group or an ether group.
  • Examples of the monovalent hydrocarbon group having 1 to 20 carbon atoms represented by R p3 and R p4 include an alkyl group having 1 to 20 carbon atoms.
  • Examples of the monovalent fluorinated hydrocarbon group having 1 to 20 carbon atoms represented by R p3 and R p4 include a fluorinated alkyl group having 1 to 20 carbon atoms.
  • R p3 and R p4 are preferably a hydrogen atom, a fluorine atom or a fluorinated alkyl group, more preferably a hydrogen atom, a fluorine atom or a perfluoroalkyl group, and even more preferably a hydrogen atom, a fluorine atom or a trifluoromethyl group.
  • Examples of the monovalent fluorinated hydrocarbon group having 1 to 20 carbon atoms represented by R p5 and R p6 include a fluorinated alkyl group having 1 to 20 carbon atoms.
  • R p5 and R p6 are preferably a fluorine atom or a fluorinated alkyl group, more preferably a fluorine atom or a perfluoroalkyl group, further preferably a fluorine atom or a trifluoromethyl group, and particularly preferably a fluorine atom.
  • n p1 is preferably 0 to 5, more preferably 0 to 2, and further preferably 0 or 1.
  • np2 is preferably an integer of 0 to 5, more preferably an integer of 0 to 2, and even more preferably 0 or 1.
  • the lower limit of np3 is preferably 1, and more preferably 2.
  • the strength of the acid can be increased by making np3 1 or more.
  • the upper limit of np3 is preferably 4, more preferably 3, and even more preferably 2.
  • the lower limit of np1 + np2 + np3 is preferably 2, and more preferably 4.
  • the upper limit of np1 + np2 + np3 is preferably 20, and more preferably 10.
  • anions having a carboxylate anion group as a monovalent anion group can have an anion structure in which the sulfonate anion in the above formula (4-1) is replaced with a carboxylate anion.
  • the lower limit of the content of the acid generator [B] in the radiation-sensitive composition is preferably 1 part by mass, more preferably 5 parts by mass, and even more preferably 10 parts by mass, relative to 100 parts by mass of the polymer [A].
  • the upper limit of the content is preferably 50 parts by mass, more preferably 40 parts by mass, and even more preferably 30 parts by mass.
  • the acid diffusion control agent [C] has the function of controlling the diffusion phenomenon in the resist film of the acid generated from the polymer [A] or the acid generator [B] by exposure, and controlling undesirable chemical reactions in the non-exposed region.
  • the acid diffusion control agent [C] includes a compound having a monovalent radiation-sensitive onium cation and a monovalent organic acid anion (hereinafter also referred to as a "photodegradable base") (excluding the polymer [A]).
  • the photodegradable base generates an acid by exposure, so it can be called an acid generator in a broad sense, but under conditions where the acid generated from the polymer [A] or the acid generator [B] by exposure dissociates the acid dissociable group in the polymer [A], the photodegradable base does not dissociate the acid dissociable group by exposure.
  • the molecular weight of the photodegradable base is preferably 2,500 or less, more preferably 1,500 or less.
  • a polymer having a repeating unit having the above function can also be used as the acid diffusion control agent [C].
  • Examples of the monovalent radiation-sensitive onium cation in the photodegradable base include the same as those exemplified as the cation in the acid generator [B].
  • a monovalent radiation-sensitive onium cation (cation (P)) containing an aromatic ring structure in which at least one hydrogen atom is substituted with at least one group selected from the group consisting of a fluorine atom, a fluorine atom-containing group, and an iodine atom is preferred.
  • the monovalent organic acid anion in the photodegradable base contains a monovalent anion group.
  • the monovalent anion group include a carboxylate anion group and an imide acid anion group. Among these, a carboxylate anion group is preferred.
  • anion (Q) that has a carboxylate anion group as a monovalent anion group (hereinafter also referred to as “anion (Q-2)").
  • the anion (Q-2) there are no particular limitations on the anion (Q-2), so long as it is used as an anion in a photodecomposable base that is sensitized by exposure to light and generates a weak acid.
  • a carboxylate anion containing an aromatic ring structure in which one to three hydrogen atoms are substituted with iodine groups is preferred, and a carboxylate anion containing an aromatic ring structure in which two to three hydrogen atoms are substituted with iodine groups is more preferred.
  • the anion portion (Q-2) is preferably a carboxylate anion represented by the following formulas (4-2-1) to (4-2-12).
  • the photodegradable base for example, a compound that appropriately combines a monovalent radiation-sensitive onium cation with the above anion portion (Q-2) can be used.
  • nitrogen atom-containing compounds can also be used as compounds other than photodegradable bases.
  • nitrogen atom-containing compounds include amine compounds such as tripentylamine and trioctylamine; amide group-containing compounds such as formamide and N,N-dimethylacetamide; urea compounds such as urea and 1,1-dimethylurea; and nitrogen-containing heterocyclic compounds such as pyridine, N-(undecylcarbonyloxyethyl)morpholine, and N-t-pentyloxycarbonyl-4-hydroxypiperidine.
  • the lower limit of the content of the acid diffusion controller [C] in the radiation-sensitive composition is preferably 1 part by mass, more preferably 3 parts by mass, and even more preferably 5 parts by mass, per 100 parts by mass of the polymer [A] contained in the radiation-sensitive composition.
  • the upper limit of the content is preferably 30 parts by mass, more preferably 20 parts by mass, and even more preferably 15 parts by mass.
  • the lower limit of the content of the acid diffusion control agent [C] in the radiation-sensitive composition is preferably 1 mol%, more preferably 5 mol%, and even more preferably 10 mol%, relative to 100 mol% of the acid generator [B].
  • the upper limit of the content is preferably 100 mol%, more preferably 50 mol%, and even more preferably 30 mol%.
  • the lower limit of the content of the acid diffusion controller [C] in the radiation-sensitive composition is preferably 1 part by mass, more preferably 2 parts by mass, and even more preferably 5 parts by mass, per 100 parts by mass of the total of the polymer [A] and the acid generator [B].
  • the upper limit of the content is preferably 50 parts by mass, more preferably 40 parts by mass, and even more preferably 30 parts by mass.
  • the radiation-sensitive composition usually contains an organic solvent [D].
  • the organic solvent [D] is not particularly limited as long as it is a solvent that can dissolve or disperse at least the polymer [A], the acid generator [B], the acid diffusion controller [C], the polymer [F], and other optional components contained as necessary.
  • Examples of the organic solvent include alcohol-based solvents, ether-based solvents, ketone-based solvents, amide-based solvents, ester-based solvents, and hydrocarbon-based solvents.
  • the radiation-sensitive composition may contain one or more types of [D] organic solvents.
  • alcohol-based solvents examples include aliphatic monoalcohol-based solvents having 1 to 18 carbon atoms, such as 4-methyl-2-pentanol, n-hexanol, and diacetone alcohol; alicyclic monoalcohol-based solvents having 3 to 18 carbon atoms, such as cyclohexanol; polyhydric alcohol-based solvents having 2 to 18 carbon atoms, such as 1,2-propylene glycol; and polyhydric alcohol partial ether-based solvents having 3 to 19 carbon atoms, such as propylene glycol monomethyl ether.
  • ether solvents include dialkyl ether solvents such as diethyl ether, dipropyl ether, dibutyl ether, dipentyl ether, diisoamyl ether, dihexyl ether, and diheptyl ether; cyclic ether solvents such as tetrahydrofuran and tetrahydropyran; and aromatic ring-containing ether solvents such as diphenyl ether and anisole.
  • dialkyl ether solvents such as diethyl ether, dipropyl ether, dibutyl ether, dipentyl ether, diisoamyl ether, dihexyl ether, and diheptyl ether
  • cyclic ether solvents such as tetrahydrofuran and tetrahydropyran
  • aromatic ring-containing ether solvents such as diphenyl ether and anisole.
  • Ketone solvents include, for example, chain ketone solvents such as acetone, methyl ethyl ketone, methyl n-propyl ketone, methyl n-butyl ketone, diethyl ketone, methyl iso-butyl ketone, 2-heptanone, ethyl n-butyl ketone, methyl n-hexyl ketone, di-iso-butyl ketone, and trimethylnonanone; cyclic ketone solvents such as cyclopentanone, cyclohexanone, cycloheptanone, cyclooctanone, and methylcyclohexanone; 2,4-pentanedione, acetonylacetone, and acetophenone.
  • chain ketone solvents such as acetone, methyl ethyl ketone, methyl n-propyl ketone, methyl n-butyl
  • amide solvents include cyclic amide solvents such as N,N'-dimethylimidazolidinone and N-methylpyrrolidone; and chain amide solvents such as N-methylformamide, N,N-dimethylformamide, N,N-diethylformamide, acetamide, N-methylacetamide, N,N-dimethylacetamide, and N-methylpropionamide.
  • cyclic amide solvents such as N,N'-dimethylimidazolidinone and N-methylpyrrolidone
  • chain amide solvents such as N-methylformamide, N,N-dimethylformamide, N,N-diethylformamide, acetamide, N-methylacetamide, N,N-dimethylacetamide, and N-methylpropionamide.
  • Ester solvents include, for example, monocarboxylic acid ester solvents such as n-butyl acetate and ethyl lactate; lactone solvents such as gamma-butyrolactone and valerolactone; polyhydric alcohol carboxylate solvents such as propylene glycol acetate; polyhydric alcohol partial ether carboxylate solvents such as propylene glycol monomethyl ether acetate; polyvalent carboxylic acid diester solvents such as diethyl oxalate; and carbonate solvents such as dimethyl carbonate and diethyl carbonate.
  • monocarboxylic acid ester solvents such as n-butyl acetate and ethyl lactate
  • lactone solvents such as gamma-butyrolactone and valerolactone
  • polyhydric alcohol carboxylate solvents such as propylene glycol acetate
  • polyhydric alcohol partial ether carboxylate solvents such as propylene glycol monomethyl ether acetate
  • hydrocarbon solvents examples include aliphatic hydrocarbon solvents with 5 to 12 carbon atoms, such as n-pentane and n-hexane; and aromatic hydrocarbon solvents with 6 to 16 carbon atoms, such as toluene and xylene.
  • an alcohol solvent, an ester solvent or a combination thereof is preferred, a polyhydric alcohol partial ether solvent having 3 to 19 carbon atoms, a polyhydric alcohol partial ether carboxylate solvent or a combination thereof is more preferred, and propylene glycol monomethyl ether, propylene glycol monomethyl ether acetate or a combination thereof is even more preferred.
  • the lower limit of the content of the organic solvent [D] is preferably 50 mass%, more preferably 60 mass%, even more preferably 70 mass%, and particularly preferably 80 mass%, based on all components contained in the radiation-sensitive composition.
  • the upper limit of the content is preferably 99.9 mass%, preferably 99.5 mass%, and even more preferably 99.0 mass%.
  • the polymer [F] is a polymer different from the polymer [A] and has a higher fluorine atom content than the polymer [A].
  • a polymer having a higher hydrophobicity than the polymer serving as the base polymer tends to be unevenly distributed on the surface layer of the resist film.
  • the polymer [F] has a higher fluorine atom content than the polymer [A], and therefore tends to be unevenly distributed on the surface layer of the resist film due to the characteristics resulting from this hydrophobicity.
  • the radiation-sensitive composition contains the polymer [F]
  • it is expected that the cross-sectional shape of the formed resist pattern will be good.
  • the radiation-sensitive composition contains the polymer [F]
  • the cross-sectional shape of the resist pattern can be further improved.
  • the form in which fluorine atoms are contained in the [F] polymer is not particularly limited, and they may be bonded to either the main chain or the side chain of the [F] polymer.
  • the [F] polymer has a structural unit containing a fluorine atom (hereinafter also referred to as "structural unit (F)").
  • the [F] polymer may further have a structural unit other than the above structural unit (F).
  • the [F] polymer can have one or more types of each structural unit.
  • the lower limit of the content of the polymer [F] is preferably 0.1 parts by mass, and more preferably 0.5 parts by mass, per 100 parts by mass of the polymer [A].
  • the upper limit of the content is preferably 10 parts by mass, and more preferably 5 parts by mass.
  • the radiation-sensitive composition may contain one or more other optional components.
  • the method for forming a resist pattern includes a step of directly or indirectly applying a radiation-sensitive composition to a substrate (hereinafter also referred to as a "coating step"), a step of exposing the resist film formed by the coating step (hereinafter also referred to as an "exposure step”), and a step of developing the exposed resist film (hereinafter also referred to as a "development step”).
  • the radiation-sensitive composition described above is used as the radiation-sensitive composition. Therefore, according to the resist pattern forming method, a resist pattern with good sensitivity and excellent CDU can be formed.
  • the radiation-sensitive composition is applied directly or indirectly to a substrate, thereby forming a resist film directly or indirectly on the substrate.
  • the radiation-sensitive composition described above is used as the radiation-sensitive composition.
  • the substrate may be, for example, a silicon wafer, a silicon dioxide wafer, an aluminum-coated wafer, or any other conventionally known substrate.
  • the radiation-sensitive composition when the radiation-sensitive composition is indirectly applied to a substrate, for example, the radiation-sensitive composition may be applied to an anti-reflective film formed on a substrate.
  • anti-reflective films include organic or inorganic anti-reflective films disclosed in, for example, JP-B-6-12452 and JP-A-59-93448.
  • Examples of the coating method include rotary coating (spin coating), casting coating, and roll coating.
  • pre-baking hereinafter also referred to as "PB" may be performed as necessary to volatilize the solvent in the coating film.
  • the lower limit of the PB temperature is preferably 60°C, more preferably 80°C.
  • the upper limit of the above temperature is preferably 150°C, more preferably 140°C.
  • the lower limit of the PB time is preferably 5 seconds, more preferably 10 seconds.
  • the upper limit of the above time is preferably 600 seconds, more preferably 300 seconds.
  • the lower limit of the average thickness of the formed resist film is preferably 10 nm, more preferably 20 nm.
  • the upper limit of the above average thickness is preferably 1,000 nm, more preferably 500 nm.
  • the resist film formed by the coating step is exposed to light.
  • This exposure is performed by irradiating radiation through a photomask (or through an immersion medium such as water, in some cases).
  • radiation include electromagnetic waves such as visible light, ultraviolet light, far ultraviolet light, extreme ultraviolet light (EUV), X-rays, and gamma rays; charged particle beams such as electron beams and alpha rays, depending on the line width of the desired pattern.
  • far ultraviolet light, EUV, or electron beams are preferred, and ArF excimer laser light (wavelength 193 nm), KrF excimer laser light (wavelength 248 nm), EUV (wavelength 13.5 nm), or electron beams are more preferred, KrF excimer laser light, EUV, or electron beams are even more preferred, and EUV or electron beams are particularly preferred.
  • PEB post-exposure baking
  • This PEB can increase the difference in solubility in the developer between the exposed portion and the non-exposed portion.
  • the lower limit of the PEB temperature is preferably 50°C, more preferably 80°C.
  • the upper limit of the above temperature is preferably 180°C, more preferably 130°C.
  • the lower limit of the PEB time is preferably 5 seconds, more preferably 10 seconds, and even more preferably 30 seconds.
  • the upper limit of the above time is preferably 600 seconds, more preferably 300 seconds, and even more preferably 100 seconds.
  • the exposed resist film is developed. This allows a desired resist pattern to be formed.
  • the resist film is generally washed with a rinse liquid such as water or alcohol, and then dried.
  • the developing method in the developing step may be either alkaline development or organic solvent development.
  • examples of the developer used for development include an alkaline aqueous solution in which at least one alkaline compound such as sodium hydroxide, potassium hydroxide, sodium carbonate, sodium silicate, sodium metasilicate, aqueous ammonia, ethylamine, n-propylamine, diethylamine, di-n-propylamine, triethylamine, methyldiethylamine, ethyldimethylamine, triethanolamine, tetramethylammonium hydroxide (hereinafter also referred to as "TMAH”), pyrrole, piperidine, choline, 1,8-diazabicyclo-[5.4.0]-7-undecene, and 1,5-diazabicyclo-[4.3.0]-5-nonene is dissolved.
  • TMAH tetramethylammonium hydroxide
  • TMAH 1,8-diazabicyclo-[5.4.0]-7-undecene
  • examples of the developer include organic solvents such as hydrocarbon solvents, ether solvents, ester solvents, ketone solvents, and alcohol solvents, and solutions containing the above organic solvents.
  • examples of the above organic solvents include the solvents exemplified as organic solvent [D] in the radiation-sensitive composition described above.
  • Development methods include, for example, immersing the substrate in a tank filled with developer for a certain period of time (dip method), piling up developer on the substrate surface using surface tension and leaving it still for a certain period of time (paddle method), spraying developer onto the substrate surface (spray method), and continuously dispensing developer while scanning a developer dispensing nozzle at a constant speed onto a substrate rotating at a constant speed (dynamic dispense method).
  • dip method immersing the substrate in a tank filled with developer for a certain period of time
  • spray method spraying developer onto the substrate surface
  • dynamic dispense method continuously dispensing developer while scanning a developer dispensing nozzle at a constant speed onto a substrate rotating at a constant speed
  • resist patterns formed by this resist pattern formation method include line and space patterns, contact hole patterns, etc.
  • the polymer of the present invention has a side chain containing an acid dissociable group, and a side chain containing two or more iodine groups and one or more radiation-sensitive onium cation structures.
  • the side chain containing an acid dissociable group is preferably contained in a first structural unit containing a partial structure in which a hydrogen atom of a carboxyl group or a phenolic hydroxyl group is substituted with an acid dissociable group.
  • the side chain containing two or more iodine groups and one or more radiation-sensitive onium cation structures is preferably contained in a second structural unit (excluding those corresponding to the first structural unit) containing two or more iodine groups and one or more radiation-sensitive onium cation structures.
  • the constitution of the polymer is the same as that of the polymer [A] contained in the radiation-sensitive composition, and the description thereof is incorporated herein by reference.
  • Mw Weight average molecular weight
  • Mn number average molecular weight
  • Mw/Mn polydispersity
  • pm-213 is a compound represented by formula (II-2-13), in which two M t+ are both cations represented by ca-1.
  • pm-216 is a compound represented by formula (II-2-16), in which two M t+ are both cations represented by ca-1.
  • the monomers other than pm-213 and pm-216 are each composed of 1 mol of a cation and 1 mol of anion.
  • [B] Acid Generator As the acid generator [B], compounds represented by the following formulas (B-1) to (B-5) (hereinafter also referred to as “acid generators (B-1) to (B-5)”) were used.
  • Acid diffusion control agent As the acid diffusion controller [C], compounds represented by the following formulas (C-1) to (C-4) (hereinafter also referred to as “acid diffusion controllers (C-1) to (C-4)”) were used.
  • R-1 100 parts by mass of (A-1) as a polymer [A], 5 parts by mass of (C-1) as an acid diffusion controller [C], and 5,000 parts by mass of (D-1) and 2,000 parts by mass of (D-2) as organic solvents [D] were mixed together. The resulting mixture was filtered through a membrane filter having a pore size of 0.20 ⁇ m to prepare a radiation-sensitive composition (R-1).
  • the resist film was post-exposure baked (PEB) at 130°C for 60 seconds.
  • PEB post-exposure baked
  • the resist was developed using a 2.38% by mass aqueous solution of TMAH at 23° C. for 30 seconds to form a positive contact hole pattern (diameter 25 nm, pitch 50 nm).
  • an acid diffusion controller (C-3) was used as the acid diffusion controller [C], which was a compound having a monovalent radiation-sensitive onium cation and a monovalent organic acid anion, and which contained a carboxylate anion containing an aromatic ring structure in which 1 to 3 hydrogen atoms are substituted with iodine groups as the organic acid anion (Example 46), the CDU was even superior to that when no acid diffusion controller (C-3) was used (Example 28).

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WO2025079648A1 (ja) * 2023-10-11 2025-04-17 三菱瓦斯化学株式会社 化合物、組成物、樹脂組成物、膜形成用組成物、リソグラフィー用膜形成用組成物、レジスト膜形成用組成物
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