WO2024078289A1

WO2024078289A1 - Precision compensation method and system for double-shaft scribing machine

Info

Publication number: WO2024078289A1
Application number: PCT/CN2023/120279
Authority: WO
Inventors: 张明明; 石文; 吴洪柏; 徐双双; 王东生; 田佳睿; 张春航
Original assignee: 沈阳和研科技股份有限公司
Priority date: 2022-10-13
Filing date: 2023-09-21
Publication date: 2024-04-18
Also published as: CN115319932B; CN115319932A

Abstract

A precision compensation method and system for a double-shaft scribing machine, relating to the technical field of scribing machine cutting. The method comprises: during compensation for a visual module (308), controlling a first Y-shaft (302) to drive the visual module (308) to move to a reference marked line zero point of a linear scale (309), moving towards a second Y-shaft (303) according to a unit stepping length of the linear scale (309), and recording a marked line image of the linear scale (309) at the visual module (308) after the movement; compensating the visual module (308) on the basis of the marked line image; after the compensation for the visual module (308) is completed, compensating the first Y-shaft (302); after the compensation for the first Y-shaft (302) is completed, during compensation for the second Y-shaft (303), controlling the second Y-shaft (303) to cut a component to be cut, and acquiring a cutting image at the second Y-shaft (303); and compensating the second Y-shaft (303) on the basis of the cutting image. After the three components, i.e., the visual module (308), the first Y-shaft (302) and the second Y-shaft (303) are all compensated, the cutting precision of the double-shaft scribing machine is finally improved.

Description

Precision compensation method and system for dual-axis dicing machine

CROSS-REFERENCE TO RELATED APPLICATIONS

This disclosure claims priority to a Chinese patent application with application number 202211250440.3 filed with the Chinese Patent Office on October 13, 2022, entitled “A Precision Compensation Method and System for a Dual-Axis Slicing Machine,” the entire contents of which are incorporated by reference in this disclosure.

Technical Field

The present disclosure relates to the field of dicing machine compensation, and in particular, to a precision compensation method and system for a dual-axis dicing machine.

Background technique

As a special equipment for an important process in the wafer and IC packaging processing, the dual-axis dicing machine has very high requirements for positioning accuracy. Due to the limited mechanical accuracy of the transmission system, it is difficult to meet the required indicators. Usually, a grating scale is installed and a compensation mechanism is adopted to improve the equipment's repeated positioning accuracy, thereby improving the dual-axis dicing machine's cutting accuracy.

The existing grating compensation method usually installs a vision module for the dual-axis dicing machine and calibrates the unit step distance by visually identifying the linear scale scale.

Because there is usually a certain offset between the vision module and the cutting blade, and the grating compensation cannot achieve zero deviation throughout the entire process, there is a certain difference in the accuracy between the vision module and the cutting blade. The compensation accuracy cannot fully represent the cutting accuracy.

Summary of the invention

The purpose of the present disclosure is to provide a precision compensation method and system for a dual-axis dicing machine, which can improve the cutting precision of the dual-axis dicing machine.

In order to achieve the above objectives, the technical solutions adopted by the present disclosure are as follows:

In a first aspect, the present disclosure provides a precision compensation method for a dual-axis dicing machine:

The dual-axis dicing machine includes a first Y-axis, a second Y-axis, a vision module and a cutting table, the first Y-axis includes a first spindle, the second Y-axis includes a second spindle, the first spindle and the vision module are fixedly connected to the first Y-axis, a part to be cut or a line ruler is arranged on the cutting table, and the method includes:

When compensating the vision module, the first Y axis is controlled to drive the vision module to move to the reference scale zero point of the linear scale, and move in the direction of the second Y axis with a unit step length of the linear scale, and record the scale image of the linear scale at the vision module after the movement;

Compensating the visual module based on a center point of a scribed line in the scribed line image and a center line of the scribed line image;

After the visual module is compensated, when the first Y-axis is compensated, the first main axis of the first Y-axis is controlled to cut the part to be cut, and a first image at the first main axis is determined;

Determine a first cutting distance along the first Y axis from the first image;

Compensating the first Y-axis based on the first cutting distance;

After the first Y-axis is compensated, when the second Y-axis is compensated, the second Y-axis is controlled to cut the part to be cut;

Acquire a cutting image at the second Y-axis;

The second Y-axis is compensated based on the cut image.

In an optional embodiment, the step of compensating the visual module based on the center point of the scribed line in the scribed line image and the center line of the scribed line image comprises:

Determining a first center point of a scale in the scribed line image and a first center line of the scribed line image;

determining a first distance between the first center point and the first center line;

The vision module is compensated based on the first distance.

In an optional embodiment, the method further comprises:

When the first distance is greater than a preset value, a prompt message is output to prompt the user to check the dual-axis dicing machine.

In an optional implementation, the step of compensating the first Y-axis based on the first cutting distance includes:

Determine an offset value corresponding to the first cutting distance, wherein the offset value represents the interval between the vision module and the first main axis, and different first cutting distances correspond to different offset values;

The first Y-axis is compensated based on the offset value.

In an optional implementation, the step of compensating the second Y-axis based on the cutting image includes:

Determine the cutting position of the cut mark in the cutting image and the preset cutting point of the part to be cut, wherein the preset cutting point is the theoretical cutting position of the cut mark in the cutting image;

Determining a first deviation value between the cutting position and the preset cutting point;

The second Y-axis is compensated based on the first offset value.

In an optional embodiment, the method further comprises:

Control the first Y-axis to cut the part to be cut by a preset distance;

Determining the total cutting distance of the part to be cut;

Calculating a difference between the total cutting distance and the preset cutting distance as a second cutting distance of the second Y-axis;

The step of controlling the second Y-axis to cut the part to be cut comprises:

Control the second Y-axis to cut the part to be cut by the second cutting distance;

The step of compensating the second Y-axis based on the cutting image comprises:

Determine a second deviation value between a cutting position in the cutting image and a target position corresponding to the second cutting distance;

The second Y-axis is compensated based on the second offset value.

In an optional embodiment, the method further comprises:

Establishing a corresponding relationship between the offset value and the first cutting distance;

The step of establishing a corresponding relationship between the offset value and the first cutting distance includes:

Control the first Y-axis to cut the part to be cut according to different first cutting distances;

For each first cutting distance, determining a distance between the vision module and the first main axis as an offset value;

A corresponding relationship between different first cutting distances and corresponding offset values is established.

In an optional implementation, the step of establishing a corresponding relationship between the offset value and the first cutting distance includes:

The corresponding relationship between the offset value and the first cutting distance in different travel intervals is recorded.

In a second aspect, the present disclosure provides a precision compensation system for a dual-axis dicing machine, the system comprising a dual-axis dicing machine, a part to be cut or a line scale, the dual-axis dicing machine comprising a Y-axis base, a first Y-axis, a second Y-axis, a Z1 slide, a Z2 slide, a first spindle, a second spindle, a vision module, a cutting table, and a control unit;

The visual module and the first spindle are fixedly arranged on the first Y axis at a preset interval, and the second spindle is arranged on the second Y axis;

The first Y-axis and the second Y-axis move left and right on the Y-axis base, the Z1 slide drives the first spindle and the visual module to move up and down, and the Z2 slide drives the second spindle to move up and down;

The linear ruler or the part to be cut is fixedly arranged on the cutting table;

The visual module is used to collect the image of the scaled line corresponding to the visual module after the first Y-axis moves from the reference scaled line zero point of the linear ruler according to the unit step length;

The control unit is used to compensate the visual module based on the center point of the scribed line in the scribed line image and the center line of the scribed line image;

When performing the first Y-axis compensation, the visual module is used to collect a first image of the first principal axis of the first Y-axis after the part to be cut is cut;

The control unit is used to determine a first cutting distance of the first Y-axis based on the first image, and compensate the first Y-axis based on the first cutting distance;

The visual module is used to collect a cutting image at the second Y-axis after the second main axis of the second Y-axis cuts the part to be cut;

The control unit is used to compensate the second Y-axis based on the cutting image.

The present disclosure has the following beneficial effects:

The present invention first compensates the visual module of the dual-axis dicing machine based on the line scale, and then compensates the first Y-axis and the second Y-axis of the dual-axis dicing machine after the visual module compensation is completed. For the first Y-axis, the cutting distance in the first image at the first Y-axis is determined to be compensated, and for the second Y-axis, the second Y-axis is controlled to move the second Y-axis to the part to be cut. Cutting is performed and the cutting image is obtained for compensation. After compensating the three components of the visual module, the first Y-axis and the second Y-axis, the cutting accuracy of the dual-axis dicing machine is finally improved.

BRIEF DESCRIPTION OF THE DRAWINGS

In order to more clearly illustrate the technical solutions of the embodiments of the present disclosure, the drawings required for use in the embodiments will be briefly introduced below. It should be understood that the following drawings only show certain embodiments of the present disclosure and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other related drawings can be obtained based on these drawings without paying creative work.

FIG. 1 is a flowchart of a precision compensation method for a dual-axis dicing machine provided by an embodiment of the present disclosure;

FIG. 2 is a second flow diagram of a precision compensation method for a dual-axis dicing machine provided by an embodiment of the present disclosure;

FIG3 is a third flow diagram of a precision compensation method for a dual-axis dicing machine provided by an embodiment of the present disclosure;

FIG4 is a spatial schematic diagram of a first Y-axis and a visual module provided by an embodiment of the present disclosure;

FIG5 is a fourth schematic diagram of a process of a precision compensation method for a dual-axis dicing machine provided by an embodiment of the present disclosure;

FIG6 is a fifth schematic diagram of a process of a precision compensation method for a dual-axis dicing machine provided by an embodiment of the present disclosure;

FIG. 7 is a schematic structural diagram of a precision compensation system for a dual-axis dicing machine provided in an embodiment of the present disclosure.

Detailed ways

In order to make the purpose, technical solutions and advantages of the embodiments of the present disclosure clearer, the technical solutions in the embodiments of the present disclosure will be clearly and completely described below in conjunction with the drawings in the embodiments of the present disclosure. Obviously, the described embodiments are part of the embodiments of the present disclosure, rather than all the embodiments. The components of the embodiments of the present disclosure described and shown in the drawings here can be arranged and designed in various different configurations.

Therefore, the following detailed description of the embodiments of the present disclosure provided in the accompanying drawings is not intended to limit the scope of the present disclosure claimed for protection, but merely represents selected embodiments of the present disclosure. Based on the embodiments in the present disclosure, all other embodiments obtained by ordinary technicians in the field without creative work are within the scope of protection of the present disclosure.

It should be noted that similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, it does not require further definition and explanation in the subsequent drawings.

In the description of the present disclosure, it should be noted that if the terms "upper", "lower", "inside", "outside", etc. appear, the orientation or position relationship indicated is based on the orientation or position relationship shown in the drawings, or is the orientation or position relationship in which the disclosed product is usually placed when used. It is only for the convenience of describing the present disclosure and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present disclosure.

In addition, the terms “first”, “second”, etc., if used, are merely used to distinguish between the descriptions and should not be understood as indicating or implying relative importance.

In the description of the present disclosure, it should also be noted that, unless otherwise clearly specified and limited, the terms "set", "install", "connect", and "connect" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or a Integrally connected; can be mechanically connected or electrically connected; can be directly connected or indirectly connected through an intermediate medium, or can be internal communication between two elements. For ordinary technicians in this field, the specific meanings of the above terms in this disclosure can be understood in specific circumstances.

After extensive research, the inventors found that because the vision module and the cutting blade of the dual-axis dicing machine usually have a certain offset, and the grating compensation cannot achieve zero deviation throughout the entire process, there will be a certain difference in the accuracy of the vision module and the cutting blade. The compensation accuracy cannot fully represent the cutting accuracy, and the dual-axis compensation accuracy trend cannot be guaranteed to be consistent. There is a mutual influence on the dual-axis positioning accuracy during cutting.

In view of the discovery of the above problems, this embodiment provides a precision compensation method and system for a dual-axis dicing machine, which can first compensate the visual module of the dual-axis dicing machine based on the line scale. After the visual module is compensated, the first Y-axis and the second Y-axis of the dual-axis dicing machine are compensated. For the first Y-axis, the cutting distance in the first image at the first Y-axis is determined for compensation. For the second Y-axis, the second Y-axis is controlled to cut the part to be cut and the cutting image is obtained for compensation. After compensating the three components of the visual module, the first Y-axis and the second Y-axis, the cutting precision of the dual-axis dicing machine is finally improved. The solution provided by this embodiment is described in detail below.

Please refer to FIG. 1 , which is a flow chart of a method for compensating the accuracy of a dual-axis dicing machine. The method including each step is described in detail below.

The dual-axis dicing machine includes a first Y-axis, a second Y-axis, a vision module and a cutting table. The first Y-axis includes a first main axis, the second Y-axis includes a second main axis, the first main axis and the vision module are fixedly connected to the first Y-axis, and the cutting table is provided with a part to be cut or a line ruler.

Step 101: When compensating the vision module, control the first Y axis to drive the vision module to move to the reference scale zero point of the linear scale, move in the direction of the second Y axis with a unit step length of the linear scale, and record the scale image of the linear scale at the vision module after movement.

Step 102: Compensate the vision module based on the center point of the scribed line in the scribed line image and the center line of the scribed line image.

Step 103: After completing the compensation of the visual module, when compensating the first Y-axis, the first principal axis of the first Y-axis is controlled to cut the part to be cut, and the first image at the first principal axis is determined.

Step 104: Determine a first cutting distance along a first Y axis from the first image.

Step 105: Compensate the first Y-axis based on the first cutting distance.

Step 106: After the compensation of the first Y-axis is completed, when the second Y-axis is compensated, the second Y-axis is controlled to cut the part to be cut.

Step 107: Acquire a cutting image at the second Y axis.

Step 108: Compensate the second Y axis based on the cut image.

A linear ruler is a length measuring and positioning element made of metal or glass with accurately engraved equidistant parallel lines on the surface. The line spacing of a linear ruler is generally 1 mm or 0.1 mm.

The line ruler is set on the cutting table, and the line ruler is facing the vision module. The reference line zero point of the line ruler can be determined in the vision module. From the reference line zero point, it starts to move toward the second Y axis with the unit step length of the line ruler, and records the line image of the line ruler at the vision module after each movement. Based on the line image obtained each time, it is determined whether the line in the line image is consistent with the unit step length of the line ruler. If not, the vision module is compensated based on the difference between the line in the line image and the unit step length of the line ruler.

After completing the visual module compensation of the dual-axis dicing machine, the first Y-axis of the dual-axis dicing machine is compensated with the compensated visual module as a reference, the first spindle of the first Y-axis is controlled to cut the part to be cut, and the first image at the first spindle after cutting is obtained based on the visual module.

It should be noted that there are multiple ways to control the first spindle of the first Y-axis to cut the part to be cut. Cutting can be started from the zero point position of the reference scale of the linear ruler, or the starting position and end position of the first spindle of the first Y-axis when cutting the part to be cut can be recorded.

In one example, when the first spindle controlling the first Y-axis starts cutting from the zero position of the reference scale line of the linear scale, after the cutting is completed, the cutting distance of the first Y-axis is determined directly based on the scale line of the current linear scale from the acquired first image.

In another example, when the first spindle controlling the first Y-axis starts cutting from an arbitrary position, the cutting distance of the first Y-axis is determined based on the starting position and the ending position of the cutting.

Finally, the first Y-axis is compensated based on the cutting distance of the first Y-axis.

After the first Y-axis is compensated, the second Y-axis is compensated. There are many ways to compensate the second Y-axis. In one example, the second Y-axis is controlled to cut the part to be cut, and the second Y-axis cuts in the direction of the first Y-axis, and the cutting image at the second Y-axis is obtained, and the second Y-axis is compensated based on the cutting image.

In another example, after the first Y-axis compensation is completed, that is, the movement and cutting of the second Y-axis are consistent with the distance required to be cut and moved, the first Y-axis and the second Y-axis can be controlled to perform relative cutting of the part to be cut at the same time, that is, the first Y-axis moves toward the second Y-axis, and the second Y-axis moves toward the first Y-axis, and the second Y-axis is compensated based on the cutting distance of the first Y-axis and the cutting distance of the second Y-axis.

The present disclosure first compensates the visual module of the dual-axis dicing machine based on the line scale, and after the visual module is compensated, the first Y-axis and the second Y-axis of the dual-axis dicing machine are compensated. For the first Y-axis, the cutting distance in the first image at the first Y-axis is determined for compensation, and for the second Y-axis, the second Y-axis is controlled to cut the part to be cut, and the cutting image is obtained for compensation. After compensating the three components of the visual module, the first Y-axis and the second Y-axis, the cutting accuracy of the dual-axis dicing machine is finally improved, and the present disclosure does not need to use other compensation components such as sights to compensate the dual-axis dicing machine, and the cost is low.

There are many ways to compensate the visual module. In one example, as shown in FIG2 , it is a flow chart of a precision compensation method of a dual-axis dicing machine provided by the present disclosure, which specifically includes the following steps:

Step 102 - 1 : Determine a first center point of a scale in a reticle image and a first center line of the reticle image.

Step 102 - 2 : Determine a first distance between the first center point and the first center line.

Step 102 - 3 : Compensate the vision module based on the first distance.

Determine a first distance between a first center point in the engraved line image and a first center line of the engraved line image. When the first distance is positive, control the visual module to move a distance equal to the difference between the unit step length and the first distance. When the first distance is negative, control the visual module to move a distance equal to the sum of the unit step length and the first distance.

When the first distance is greater than the preset value, it indicates that the dual-axis dicing machine cannot improve the accuracy of the dual-axis dicing machine through compensation. Therefore, when the first distance is too large, that is, greater than the preset value, a prompt message is output to prompt the user or staff.

It should be noted that those skilled in the art can set the preset distance according to actual conditions, and the embodiments of the present disclosure do not impose any specific limitations on this.

There are many ways to compensate the first Y-axis based on the first cutting distance. In one example, as shown in FIG3 , a flow chart of a precision compensation method for a dual-axis dicing machine provided by the present disclosure is shown, which specifically includes the following steps:

Step 105 - 1 : Determine an offset value corresponding to a first cutting distance.

The offset value represents the interval between the vision module and the first main axis, and different first cutting distances correspond to different offset values.

Step 105 - 2 : Compensate the first Y-axis based on the offset value.

Since there is a fixed difference between the visual module and the first principal axis of the first Y axis in space, as shown in FIG4 , it is a spatial schematic diagram of the first Y axis and the visual module.

Due to hardware characteristics, the difference changes dynamically within the entire Y1 and Y2 axis travel range. Therefore, the interval between the vision module and the first Y axis also changes at different travels. Therefore, by cutting at fixed intervals, the difference between the tool mark of the first spindle obtained by the vision module and the first Y axis coordinate within different travel ranges, that is, the offset value, is found to form a corresponding relationship with the cutting distance as the X axis and the deviation value as the Y axis. The offset value of the Y axis can be determined based on the above corresponding relationship through the first cutting distance, and the first Y axis can be compensated based on the offset value.

For example, when the cutting distance is 10mm, in the corresponding relationship, the offset value corresponding to 10mm is determined to be 0.3mm. When a 10mm knife mark is cut on the first Y-axis, the distance viewed in the visual module is 9.7mm. The first Y-axis needs to move 10.3mm to ensure that the cutting distance of the first Y-axis is 10mm.

The relationship between the first distance and the offset value can be selected in the subsequent learning mode. In this mode, the corresponding relationship for a period of time will be recorded. When it reaches a certain order of magnitude or the difference between two adjacent coordinates is less than a certain limit, the corresponding relationship can be further refined to obtain an approximate curve to achieve a full stroke compensation effect. That is, the corresponding relationship between the offset value and the first cutting distance in different stroke intervals is recorded.

There are many ways to establish the correspondence between the first distance and the offset value. In one example, the following method can be used: control the first Y-axis to cut the part to be cut according to different first cutting distances; for each first cutting distance, determine the distance between the visual module and the first main axis as the offset value; establish the correspondence between different first cutting distances and the corresponding offset values.

There are many ways to compensate the second Y axis based on the cutting image. In one example, as shown in FIG5 , a flow chart of a precision compensation method for a dual-axis dicing machine provided by the present disclosure is shown, which specifically includes the following steps:

Step 108 - 1 : Determine the cutting position of the cut mark in the cutting image and the preset cutting point of the part to be cut.

The preset cutting point is a theoretical cutting position of the cutting mark in the cutting image.

Step 108 - 2 : Determine a first deviation value between the cutting position and the preset cutting point.

Step 108 - 3 : Compensate the second Y-axis based on the first deviation value.

Control the second Y-axis to cut the preset cutting point of the part to be cut. When the second Y-axis does not need to be compensated, after the second Y-axis cutting is completed, the final cutting position in the cutting image will coincide with the preset cutting point. When the second Y-axis needs to be compensated, the final cutting position in the cutting image will not coincide with the preset cutting point. At this time, determine the first deviation value between the cutting position of the final cutting and the preset cutting point, and compensate the second Y-axis based on the first deviation value.

In another example, as shown in FIG6 , it is a flow chart of a precision compensation method of a dual-axis dicing machine provided by the present disclosure, which specifically includes the following steps:

Step 201: Control the first Y axis to cut a component to be cut by a preset distance.

Step 202: Determine the total cutting distance of the part to be cut.

Step 203: Calculate the difference between the total cutting distance and the preset cutting distance as the second cutting distance of the second Y axis.

Step 204: Control the second Y-axis to cut the part to be cut by a second cutting distance.

Step 205: Determine a second deviation value between the cutting position in the cutting image and the target position corresponding to the second cutting distance.

Step 206: Compensate the second Y-axis based on the second deviation value.

In one example, after the first Y-axis is compensated, the first Y-axis and the second Y-axis are controlled to cut the part to be cut, and the cutting directions of the first Y-axis and the second Y-axis are relative directions, and the first Y-axis is controlled to cut a preset distance.

Since the total length of the part to be cut is unchanged, that is, the total cutting distance of the part to be cut is unchanged, therefore, when the first Y-axis and the second Y-axis are required to cut to the preset position of the part to be cut, that is, the first Y-axis cuts the part to be cut by the preset distance, the remaining distance of the total cutting distance is the second cutting distance, and the end point of the second cutting distance is the target position of the part to be cut at this time. When the first Y-axis and the second Y-axis do not need to be compensated, the last cutting position of the first Y-axis coincides with the target position of the part to be cut, and the last cutting position of the second Y-axis coincides with the target position of the part to be cut. Since the first Y-axis is compensated, the compensation parameters of the second Y-axis can be determined based on the preset cutting distance of the first Y-axis and the second cutting distance of the second Y-axis.

The sum of the second cutting distance on the second Y axis and the preset cutting distance is different from the total cutting distance of the part to be cut. When a difference is found, the deviation value is the second deviation value, and the second Y-axis is compensated based on the second deviation value.

When the sum of the second cutting distance of the second Y-axis and the preset cutting distance is consistent with the total cutting distance of the part to be cut, it indicates that the second Y-axis does not need to be compensated.

Referring to FIG. 7 , an embodiment of the present disclosure further provides a precision compensation system for a dual-axis dicing machine, the system comprising a dual-axis dicing machine, the dual-axis dicing machine comprising:

Y-axis base 301, first Y-axis 302, second Y-axis 303, Z1 slide 304, Z2 slide 305, first spindle 306, second spindle 307, vision module 308, the precision compensation system of the dual-axis dicing machine also includes a linear scale 309 or a part to be cut.

The dual-axis dicing machine further includes a cutting table and a control unit, and the control unit is disposed inside the dual-axis dicing machine.

The visual module and the first spindle are fixedly arranged on the first Y-axis at a preset interval, and the second spindle is arranged on the second Y-axis; the first Y-axis and the second Y-axis move left and right on the Y-axis base, the Z1 slide drives the first spindle and the visual module to move up and down, and the Z2 slide drives the second spindle to move up and down; the line scale or the part to be cut is fixedly arranged on the cutting table; the visual module is used to collect the corresponding line image at the visual module after the first Y-axis moves from the reference line zero point of the line scale according to the unit step length; the control unit is used to compensate the visual module based on the center point of the line in the line image and the center line of the line image; when performing the first Y-axis compensation, the visual module is used to collect the first image after the first spindle of the first Y-axis cuts the part to be cut; the control unit is used to determine the first cutting distance of the first Y-axis based on the first image, and compensate the first Y-axis based on the first cutting distance; the visual module is used to collect the cutting image at the second Y-axis after the second spindle of the second Y-axis cuts the part to be cut; the control unit is used to compensate the second Y-axis based on the cutting image.

The visual module is a microscope.

In summary, the present disclosure first compensates the visual module of the dual-axis dicing machine based on the line scale, and after the visual module is compensated, the first Y-axis and the second Y-axis of the dual-axis dicing machine are compensated. For the first Y-axis, the cutting distance in the first image at the first Y-axis is determined for compensation, and for the second Y-axis, the second Y-axis is controlled to cut the part to be cut, and the cutting image is obtained for compensation. After compensating the three components of the visual module, the first Y-axis and the second Y-axis, the cutting accuracy of the dual-axis dicing machine is finally improved.

In the embodiments provided in the present disclosure, it should be understood that the disclosed devices and methods may also be implemented in other ways. The device embodiments described above are merely schematic. For example, the flowcharts and block diagrams in the accompanying drawings show the possible architectures, functions, and operations of the devices, methods, and computer program products according to the various embodiments of the present disclosure. In this regard, each box in the flowchart or block diagram may represent a module, a program segment, or a portion of a code, and the module, program segment, or a portion of a code contains one or more executable instructions for implementing a specified logical function. It should also be noted that in some alternative implementations, the functions marked in the boxes may also be different from those in the embodiments. The blocks in the figures are not necessarily executed in the order indicated in the drawings. For example, two consecutive blocks may actually be executed substantially in parallel, and they may sometimes be executed in the opposite order, depending on the functions involved. It should also be noted that each block in the block diagram and/or flow chart, and the combination of blocks in the block diagram and/or flow chart, may be implemented by a dedicated hardware-based system that performs the specified functions or actions, or may be implemented by a combination of dedicated hardware and computer instructions.

In addition, the functional modules in each embodiment of the present disclosure can be integrated together to form an independent part, or each module can exist separately, or two or more modules can be integrated to form an independent part. If the function is implemented in the form of a software functional module and sold or used as an independent product, it can be stored in a computer-readable storage medium. Based on this understanding, the technical solution of the present disclosure, or the part that contributes to the prior art or the part of the technical solution, can be embodied in the form of a software product, which is stored in a storage medium and includes several instructions for a computer device (which can be a personal computer, a server, or a network device, etc.) to perform all or part of the steps of the method described in each embodiment of the present disclosure. The aforementioned storage medium includes: U disk, mobile hard disk, read-only memory (ROM, Read-Only Memory), random access memory (RAM, Random Access Memory), disk or optical disk, etc. Various media that can store program codes.

It should be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. In the absence of further restrictions, the elements defined by the sentence "comprise a ..." do not exclude the presence of other identical elements in the process, method, article or device including the elements.

The above are only various embodiments of the present disclosure, but the protection scope of the present disclosure is not limited thereto. Any person skilled in the art who is familiar with the technical field can easily think of changes or substitutions within the technical scope disclosed in the present disclosure, which should be included in the protection scope of the present disclosure. Therefore, the protection scope of the present disclosure should be based on the protection scope of the claims.

Claims

A precision compensation method for a dual-axis dicing machine, characterized in that the dual-axis dicing machine includes a first Y-axis, a second Y-axis, a vision module and a cutting table, the first Y-axis includes a first spindle, the second Y-axis includes a second spindle, the first spindle and the vision module are fixedly connected to the first Y-axis, and a part to be cut or a linear ruler is arranged on the cutting table, and the method includes:

When compensating the vision module, the first Y axis is controlled to drive the vision module to move to the reference scale zero point of the linear scale, and move in the direction of the second Y axis with a unit step length of the linear scale, and record the scale image of the linear scale at the vision module after the movement;

Compensating the visual module based on a center point of a scribed line in the scribed line image and a center line of the scribed line image;

After the visual module is compensated, when the first Y-axis is compensated, the first main axis of the first Y-axis is controlled to cut the part to be cut, and a first image at the first main axis is determined;

Determine a first cutting distance along the first Y axis from the first image;

Compensating the first Y-axis based on the first cutting distance;

After the first Y-axis is compensated, when the second Y-axis is compensated, the second Y-axis is controlled to cut the part to be cut;

Acquire a cutting image at the second Y-axis;

The second Y-axis is compensated based on the cut image.
The precision compensation method of the dual-axis dicing machine according to claim 1 is characterized in that the step of compensating the visual module based on the center point of the reticle in the reticle image and the center line of the reticle image comprises:

Determining a first center point of a scale in the scribed line image and a first center line of the scribed line image;

determining a first distance between the first center point and the first center line;

The vision module is compensated based on the first distance.
The precision compensation method of the dual-axis dicing machine according to claim 2, characterized in that the method further comprises:

When the first distance is greater than a preset value, a prompt message is output to prompt the user to check the dual-axis dicing machine.
The precision compensation method of the dual-axis dicing machine according to claim 1 is characterized in that the step of compensating the first Y-axis based on the first cutting distance comprises:

Determine an offset value corresponding to the first cutting distance, wherein the offset value represents the distance between the visual module and the The interval between the first main axes, different first cutting distances correspond to different offset values;

The first Y-axis is compensated based on the offset value.
The precision compensation method of the dual-axis dicing machine according to claim 1 is characterized in that the step of compensating the second Y-axis based on the cutting image comprises:

Determine the cutting position of the cut mark in the cutting image and the preset cutting point of the part to be cut, wherein the preset cutting point is the theoretical cutting position of the cut mark in the cutting image;

Determining a first deviation value between the cutting position and the preset cutting point;

The second Y-axis is compensated based on the first offset value.
The precision compensation method of the dual-axis dicing machine according to claim 1, characterized in that the method further comprises:

Control the first Y-axis to cut the part to be cut by a preset distance;

Determining the total cutting distance of the part to be cut;

Calculate the difference between the total cutting distance and the preset cutting distance as the second cutting distance of the second Y-axis;

The step of controlling the second Y-axis to cut the part to be cut comprises:

Control the second Y-axis to cut the part to be cut by the second cutting distance;

The step of compensating the second Y-axis based on the cutting image comprises:

Determine a second deviation value between a cutting position in the cutting image and a target position corresponding to the second cutting distance;

The second Y-axis is compensated based on the second offset value.
The precision compensation method of the dual-axis dicing machine according to claim 4, characterized in that the method further comprises:

Establishing a corresponding relationship between the offset value and the first cutting distance;

The step of establishing a corresponding relationship between the offset value and the first cutting distance includes:

Control the first Y-axis to cut the part to be cut according to different first cutting distances;

For each first cutting distance, determining a distance between the vision module and the first main axis as an offset value;

A corresponding relationship between different first cutting distances and corresponding offset values is established.
The precision compensation method of the dual-axis dicing machine according to claim 7 is characterized in that the step of establishing the corresponding relationship between the offset value and the first cutting distance comprises:

The corresponding relationship between the offset value and the first cutting distance in different travel intervals is recorded.
A precision compensation system for a dual-axis dicing machine, characterized in that the system comprises a dual-axis dicing machine, a part to be cut or a line ruler, and the dual-axis dicing machine comprises a Y-axis base, a first Y-axis, a second Y-axis, a Z1 slide, Z2 slide, first spindle, second spindle, vision module, cutting table and control unit;

The visual module and the first spindle are fixedly arranged on the first Y axis at a preset interval, and the second spindle is arranged on the second Y axis;

The first Y-axis and the second Y-axis move left and right on the Y-axis base, the Z1 slide drives the first spindle and the visual module to move up and down, and the Z2 slide drives the second spindle to move up and down;

The linear ruler or the part to be cut is fixedly arranged on the cutting table;

The visual module is used to collect the image of the scaled line corresponding to the visual module after the first Y-axis moves from the reference scaled line zero point of the linear ruler according to the unit step length;

The control unit is used to compensate the visual module based on the center point of the scribed line in the scribed line image and the center line of the scribed line image;

When performing the first Y-axis compensation, the visual module is used to collect a first image of the first principal axis of the first Y-axis after the part to be cut is cut;

The control unit is used to determine a first cutting distance of the first Y-axis based on the first image, and compensate the first Y-axis based on the first cutting distance;

The visual module is used to collect a cutting image at the second Y-axis after the second main axis of the second Y-axis cuts the part to be cut;

The control unit is used to compensate the second Y-axis based on the cutting image.
The system according to claim 9, characterized in that the vision module is a microscope.