WO2024051703A1

WO2024051703A1 - Seed crystal holder and crystal growth method

Info

Publication number: WO2024051703A1
Application number: PCT/CN2023/117096
Authority: WO
Inventors: 王宇; 官伟明; 顾鹏; 雷沛
Original assignee: 眉山博雅新材料股份有限公司
Priority date: 2022-09-09
Filing date: 2023-09-05
Publication date: 2024-03-14
Also published as: TW202413742A; CN218989469U

Abstract

Provided in the embodiments of the description are a seed crystal holder and a crystal growth method. The seed crystal holder comprises a seed crystal holder body and a connecting rod. The seed crystal holder body is fixed to one end of the connecting rod. A seed crystal bonding surface is arranged on the side of the seed crystal holder body away from the connecting rod.

Description

A kind of seed crystal support and crystal growth method

cross reference

This application claims priority to the Chinese application with application number 202222415184.0 submitted on September 9, 2022, the entire content of which is incorporated herein by reference.

Technical field

This specification relates to the field of crystal preparation, and in particular to a seed crystal support and a crystal growth method.

Background technique

The liquid phase method is one of the methods for growing crystals (for example, silicon carbide single crystal). When using the liquid phase method to grow crystals (for example, semiconductor crystals), the seed crystal needs to be bonded to the seed crystal holder before growing the crystal. The bonding quality of the seed crystal directly affects the quality of the prepared crystal. When preparing crystals using the upward pulling method, the seed crystal needs to be bonded to the seed crystal holder, and the seed crystal is brought into contact with the melt by lowering the seed crystal holder, thereby achieving crystal growth. Therefore, the structural design of the seed crystal holder and the bonding condition between the seed crystal holder and the crystal are all very important for the growth of the crystal.

Contents of the invention

One or more embodiments of this specification provide a seed crystal holder, which includes a seed crystal holder body and a connecting rod. The seed crystal holder body is fixed on one end of the connecting rod. The seed crystal holder body is located away from the connecting rod. One side of the connecting rod is provided with a seed crystal bonding surface.

In some embodiments, the seed crystal holder body includes a hollow first inner cavity, and a channel for cooling medium to circulate is provided in the connecting rod; the channel is connected to the first inner cavity.

In some embodiments, the seed crystal holder body is provided with a first through hole communicating with the first inner cavity.

In some embodiments, a cooling medium diffusion structure is provided in the inner cavity.

In some embodiments, the cooling medium diffusion structure includes a shell, a second inner cavity is formed in the shell, a plurality of diffusion holes are provided on the shell, and the channel is connected with the second inner cavity, The diffusion hole communicates with the first inner cavity and the second inner cavity.

In some embodiments, the seed crystal holder further includes a cooling device that delivers the cooling medium to the channel, and the cooling medium flows in the channel at a preset flow rate.

In some embodiments, the cooling medium is an inert gas, and the preset flow rate is greater than 0.4m/s.

In some embodiments, the seed crystal holder further includes a weight-increasing structure connected to the seed crystal holder body.

In some embodiments, the seed crystal holder further includes a cooling structure provided on the connecting rod, and the cooling structure cools the cooling medium in the channel.

In some embodiments, the seed crystal holder further includes a driving mechanism and a stirring mechanism. The other end of the connecting rod is connected to the driving mechanism. The driving mechanism drives the seed crystal holder body around the connecting rod through the connecting rod. The axis of the connecting rod rotates; the stirring mechanism is connected to the seed crystal holder body, and the stirring mechanism stirs the melt used for crystal growth.

In some embodiments, the stirring mechanism includes a mounting rod and a stirring paddle, and the stirring paddle is located on a side of the seed crystal bonding surface away from the connecting rod.

In some embodiments, the number of the stirring mechanisms is multiple, and the plurality of stirring mechanisms are arranged around the seed holder body.

In some embodiments, the stirring mechanism is made of one or more of tungsten alloy and high-temperature ceramics.

In some embodiments, the seed crystal holder body includes at least two sub-parts, each of the at least two sub-parts is provided with a half groove; the seed crystal holder further includes a locking structure and a locking structure. The connecting structure is provided at one end of the connecting rod and the seed crystal holder body; the at least two sub-parts are spliced so that the half-slots on each of the at least two sub-parts are spliced into a snap-in connection slot, the clamping structure is clamped in the clamping slot; the locking structure fixes the spliced at least two sub-parts.

In some embodiments, the at least two sub-parts include a first sub-part and a second sub-part with the same structure; the first sub-part and the second sub-part are axially symmetrical with respect to the axis of the connecting rod. set up.

In some embodiments, the engaging groove is a first groove body and a second groove body arranged along the axial direction of the connecting rod, and the first groove body is closer to the seed crystal than the second groove body. The bonding surface; the area of the first groove body along the cross-section perpendicular to the axis of the connecting rod is greater than the area of the second groove body along the cross-section perpendicular to the axis of the connecting rod; the clamping structure is along the The area of the cross section perpendicular to the axis of the connecting rod is greater than the area of the cross section of the connecting rod along the axis perpendicular to the connecting rod.

In some embodiments, the snap-in structure is in the shape of a polyhedron.

In some embodiments, the locking structure includes an annular groove and a locking ring; the annular groove is arranged around the outer wall of the seed crystal holder body, and the locking ring is sleeved on the spliced at least two sub-units. outside and arranged in the annular groove.

In some embodiments, the seed crystal holder further includes an annular protective holder, and the protective holder is provided with a shape similar to the shape of the seed crystal holder body. Matching accommodation cavity; the protective bracket is arranged around the seed crystal holder body, and the protective bracket is arranged around one end of the connecting rod connected to the seed crystal holder body.

In some embodiments, the seed crystal holder further includes an annular first protective sleeve, the first protective sleeve is set outside the connecting rod, and the first protective sleeve is located between the connecting rod and the protective sleeve. between care.

In some embodiments, the connecting rod includes a first outer diameter segment and a second outer diameter segment along the axial direction of the connecting rod; the outer diameter of the first outer diameter segment is smaller than that of the second outer diameter segment. outer diameter, the first outer diameter section is closer to the seed crystal holder body than the second outer diameter section; the first protective sleeve includes a first inner diameter section and a second inner diameter along the axial direction of the connecting rod section; the outer diameter of the first inner diameter section is smaller than the inner diameter of the second inner diameter section, the first inner diameter section matches the first outer diameter section, the second inner diameter section matches the second outer diameter section segment matching.

In some embodiments, a side surface of the protective bracket away from the connecting rod is provided with an annular second protective sleeve, the second protective sleeve is embedded in the protective bracket, and the second protective sleeve arranged around the accommodation cavity.

In some embodiments, when a seed crystal is bonded to the seed crystal bonding surface, an end of the second protective sleeve away from the connecting rod is attached to the seed crystal.

In some embodiments, a first groove is provided on the side surface of the protective bracket away from the connecting rod; the diameter of the first groove is larger than the diameter of the side of the accommodation cavity away from the connecting rod. The diameter of the opening; the first groove includes a communication portion connected to the opening and an annular portion surrounding the communication portion; the bottom surface of the annular portion and the seed bonding surface are located on the same plane; The annular protective sleeve is arranged on the bottom surface of the annular part.

In some embodiments, the diameter of the first groove is 5 mm to 10 mm larger than the diameter of the opening.

In some embodiments, graphite paper is adhered to the bonding surface of the seed crystal, and the graphite paper protrudes from a side of the second protective sleeve away from the connecting rod in a direction away from the connecting rod. surface.

One or more embodiments of this specification provide a seed crystal bonding device. The seed crystal bonding device includes one or more bonding components. The bonding components include a support component and a pressure component. The support component The seed crystal holder is supported, and the pressing member applies pressure, and the pressure presses the seed crystal holder and the seed crystal on the seed crystal holder toward each other.

In some embodiments, the support component includes a first pressure part and a second pressure part, the pressure applying component includes a first pressure plate; the side wall of the first pressure part includes at least one first vent hole; The second pressing piece is nestedly connected to the first pressing piece; during the bonding and fixing process of the seed crystal, the seed crystal is placed on the upper surface of the second pressing piece, and the seed crystal holder is placed on the seed crystal. The upper surface of the crystal; the first pressure plate applies pressure to the seed crystal support.

In some embodiments, the bottom of the first pressing member includes a second through hole, the bottom of the second pressing member includes a first protrusion, and the first protrusion and the second through hole cooperate with each other to achieve the Nested connection of the first pressing part and the second pressing part.

In some embodiments, the cross-sectional diameter of the first exhaust hole includes 0.01mm-10mm.

In some embodiments, after the first pressure part and the second pressure part are nested and connected, the vertical distance between the first exhaust hole and the upper surface of the second pressure part is between 0.2 mm and 5 mm. within the range.

In some embodiments, the side wall of the second pressing member includes at least one second vent hole, and the first vent hole at least partially corresponds to the second vent hole.

In some embodiments, the cross-sectional diameter of the second exhaust hole includes 0.01mm-10mm.

In some embodiments, the vertical distance between the second exhaust hole and the upper surface of the second pressure part is in the range of 0.2mm-5mm.

In some embodiments, the height of the second pressing part is smaller than the height of the first pressing part.

In some embodiments, the seed crystal holder is threadedly connected to the first pressing member.

In some embodiments, the bottom of the first pressure plate includes a second protrusion, the upper part of the seed crystal support includes a second groove, and the second protrusion cooperates with the second groove to realize the first The connection between the pressure plate and the seed crystal holder.

In some embodiments, the support component includes an annular base, the annular base and a cover, the seed crystal holder is placed on the annular base; the cover includes an annular side wall and a cover plate, the side wall Set outside the annular base, the cover exerts pressure on the seed crystal on the seed crystal holder.

In some embodiments, it also includes a first connecting member and a second connecting member, the first connecting member is provided on the annular base, and the second connecting member is provided on the cover; the first connecting member is provided on the annular base, and the second connecting member is provided on the cover; The connecting piece is detachably connected to the second connecting piece; when the first connecting piece is connected to the second connecting piece, the cover plate of the cover exerts pressure on the seed crystal on the seed crystal holder.

In some embodiments, a locking structure is provided on the base, and the locking structure fixes the seed crystal holder to the annular base.

In some embodiments, the side of the seed crystal holder away from the seed crystal bonding surface is provided with a connecting threaded hole, and the locking structure includes a locking disk, a locking piece and a locking nut. The locking piece It includes a tray, a first threaded rod and a second threaded rod, the tray supports the side of the seed crystal holder away from the seed crystal bonding surface, the first threaded rod cooperates with the connecting threaded hole; The locking plate is provided with a mounting hole, the second threaded rod passes through the mounting hole, and the locking nut cooperates with the second threaded rod; the locking nut and the tray are respectively located at the Two sides of the locking disk along the axis direction of the mounting hole.

In some embodiments, the tray is made of elastic material.

In some embodiments, a supporting structure is provided on the inner wall of the annular base, and the supporting structure includes an annular connecting plate, an annular supporting plate and an annular supporting protrusion; the outer ring connection of the annular supporting plate The annular connecting plate, the inner ring of the annular supporting plate is provided with the annular supporting protrusion, the annular supporting protrusion supports the seed crystal holder; the annular connecting plate is connected to the annular base inner wall.

In some embodiments, a bubble removal device is provided on the cover, and the bubble removal device removes bubbles between the seed crystal and the seed crystal holder.

In some embodiments, the bubble removal device includes a slot, an insert plate and a roller; the slot is provided on the cover, the insert plate is located in the slot, and the roller is provided on the cover. One end of the inserting plate; the inserting plate moves in the slot to drive the roller to roll the seed crystal.

In some embodiments, the other end of the plug-in board is provided with a pull ring.

In some embodiments, the number of the bonding components is multiple, the support component includes a support plate, the support plate supports the seed crystal and the seed crystal holder, and the seed crystal is located on the support plate. between the disk and the seed crystal holder; the seed crystal bonding device also includes a support frame and a plurality of pressure driving parts provided on the support frame, the support disk is provided on the support frame, so The seed crystal bonding device includes a plurality of bonding components, and a plurality of pressure driving members are respectively connected to a plurality of the pressure members; the pressure driving member causes the pressure member to exert an orientation on the seed crystal holder. The pressure of the support plate.

In some embodiments, the support frame includes a plurality of support rods extending in a vertical direction, and the plurality of support rods are arranged at intervals along the circumference of the support plate; a plurality of the pressure driving members are provided on On at least one of the support rods, a plurality of the pressure driving members are arranged at intervals along the vertical direction, and a plurality of seed bonding assemblies are arranged at intervals along the vertical direction.

In some embodiments, the pressure driving member includes a pneumatic pressure driving member or a hydraulic pressure driving member.

In some embodiments, the support rod provided with the pressure-applying driving member is provided with a pressure-transmitting medium channel, and at least one of the pressure-applying driving members is connected to the pressure-transmitting medium channel through a valve.

In some embodiments, the support plate is rotatably disposed on the support frame, the rotation axis of the support plate is parallel to the support rod, and the seed bonding device further includes a rotation drive member, The rotation driving member is connected with the support plate to drive the support plate to rotate.

In some embodiments, the rotational driving member includes a magnetic element, a power source and a magnetic driving member; the magnetic driving member is magnetically coupled to the magnetic element, the magnetic element is fixed on the support plate, and the magnetic driving member is magnetically coupled to the magnetic element. The driving member is fixed on the output end of the power source; the power source drives the magnetic driving member to rotate to drive the magnetic element to drive the support plate to rotate.

In some embodiments, the pressure-applying component includes a limiting pressure plate provided on the support frame, the pressure-applying driving member includes a first sub-driving member and a second sub-driving member, and the first sub-driving member The first sub-driving part and the second sub-driving part are arranged at intervals along the circumference of the limiting pressure plate, and the The first sub-driving member and the second sub-driving member are both connected to the limiting pressure plate.

In some embodiments, the seed bonding device further includes a pressure sensor, the pressure sensor being used to determine the pressure exerted by each of the pressure applying components.

In some embodiments, the seed bonding device further includes a controller, the controller is signally connected to both the valve and the pressure sensor; the controller is configured to: based on the pressure sensor sensed Pressure data adjusts the opening of the valve.

One or more embodiments of this specification provide a crucible, including a crucible body, a driving assembly and a temperature field holding disk. The driving assembly includes a driving source and a connecting mechanism. The connecting mechanism is connected between the driving source and the crucible. Between the bottom of the body, the driving assembly drives the crucible body to rotate around the axis of the crucible body relative to the temperature field holding disk; the temperature field holding disk is provided on the connection structure and is located between the driving source and the between the bottom of the crucible body.

In some embodiments, the connection mechanism includes a rotating column and a first supporting tray, the first supporting tray is provided at one end of the rotating column, and the driving source is connected to the other end of the rotating column.

In some embodiments, the first supporting tray includes a plurality of stepped grooves arranged concentrically.

In some embodiments, the connection mechanism includes a second supporting tray, the second supporting tray is annular, the second supporting tray is located between the first supporting tray and the driving source, and the second supporting tray is annular. The inner ring of the supporting tray is fixed to the outer wall of the rotating column; the second supporting tray and the temperature field holding disk are connected through a ball structure.

In some embodiments, the material of the temperature field holding disk is at least one of mullite, corundum, and alumina.

In some embodiments, the crucible further includes a plurality of telescopic support rods, one end of the telescopic support rods is connected to the bottom of the temperature field holding plate.

In some embodiments, the crucible further includes a connecting ring and a locking mechanism, and a locking hole is provided on the side wall of the connecting ring; the connecting ring is sleeved on the output shaft of the driving source and the rotating Outside the other end of the column, the locking hole cooperates with the locking mechanism to fix the connecting ring with the output shaft of the driving source and the rotating column.

One or more embodiments of this specification provide a crystal growth method, using the seed crystal holder as described in the previous embodiment, including the following steps: bonding the seed crystal to the seed crystal bonding surface of the seed crystal holder body; The seed crystal holder with the seed crystal attached to it is sunk into the melt used for crystal growth in the crucible, and the surface of the side of the seed crystal away from the seed crystal holder is located at the highest temperature of the melt. at the position; use the upward pulling method Growing crystals.

In some embodiments, a part of the seed holder body is located in the melt, and another part of the seed holder body is located outside the melt.

In some embodiments, the seed crystal holder can rotate around the axis of the connecting rod, and the crucible can rotate around the axis of the crucible; the axis of the connecting rod is parallel to the axis of the crucible; the use Growing crystals by the upward pulling method includes controlling the rotation of the seed holder and the crucible in opposite directions.

In some embodiments, the rotation speed of the seed crystal holder is 0 rpm-20 rpm; the rotation speed of the crucible is 0 rpm-20 rpm.

In some embodiments, the product of the value of the rotation speed of the seed holder and the value of the rotation speed of the crucible is 20 or 150.

In some embodiments, before sinking the seed crystal holder with the seed crystal adhered to it into the melt used for crystal growth, the method further includes: heating the melt to 1720°C to 1780°C.

In some embodiments, the use of the upward pulling method to grow crystals includes: keeping the seed crystal holder with the seed crystal attached to sink into the melt for 10 to 30 minutes; The pulling speed pulls the seed crystal support to perform crystal growth.

In some embodiments, the use of the upward pulling method to grow the crystal includes: after the crystal grows for 10h to 30h, the crystal is pulled away from the melt at a pulling speed of 30mm/h-40mm/h, and the The distance between the crystal and the melt surface is 15 mm to 25 mm.

In some embodiments, bonding the seed crystal to the seed crystal bonding surface of the seed crystal holder body includes: making the diameter of the seed crystal 5 mm-10 mm larger than the diameter of the seed crystal holder body, and the seed crystal The crystal protrudes from the side surface of the protective bracket away from the connecting rod by 0.1mm-0.2mm.

In some embodiments, a side surface of the protective bracket away from the connecting rod is provided with an annular second protective sleeve, the second protective sleeve is embedded in the protective bracket, and the second protective sleeve Set around the accommodation cavity; bonding the seed crystal to the seed crystal bonding surface of the seed crystal holder body includes: fitting the seed crystal with the end of the second protective sleeve away from the connecting rod, and Bonded to the seed crystal bonding surface of the seed crystal holder body; the crystal growth method also includes: after the crystal growth is completed, cutting the seed crystal holder along a cutting plane parallel to the seed crystal bonding surface, so as to Separate the seed crystal support from the crystal; the cutting plane covers the seed crystal support body, the protective support and the second protective cover.

Description of the drawings

This specification is further explained by way of example embodiments, which are described in detail by means of the accompanying drawings. These embodiments are not limiting. In these embodiments, the same numbers represent the same structures, where:

Figure 1 is an exemplary structural diagram of a seed crystal holder according to some embodiments of this specification;

2A is an exemplary cross-sectional view of another seed holder according to some embodiments of the present specification;

2B is an exemplary cross-sectional view of another seed holder according to some embodiments of the present specification;

2C is an exemplary cross-sectional view of another seed holder according to some embodiments of the present specification;

Figure 3 is an exemplary cross-sectional view of another seed holder according to some embodiments of the present specification;

Figure 4 is an exemplary cross-sectional view of another seed holder according to some embodiments of the present specification;

Figure 5 is an exemplary cross-sectional view of another seed holder according to some embodiments of the present specification;

Figure 6A is an exemplary front view of the first sub-section in accordance with some embodiments of the present disclosure;

Figure 6B is an exemplary front view of the second sub-portion shown in accordance with some embodiments of the present specification;

Figure 6C is an exemplary front view of the first sub-part and the second sub-part after splicing according to some embodiments of this specification;

Figure 7 is an exemplary top view of another seed crystal support according to some embodiments of this specification;

Figure 8 is an exemplary cross-sectional view of a locking structure according to some embodiments of the present specification;

Figure 9 is an exemplary bottom view of a locking structure according to some embodiments of the present specification;

Figure 10 is an exemplary cross-sectional view of another seed holder according to some embodiments of the present specification;

Figure 11 is an exemplary module diagram of a seed bonding device according to some embodiments of this specification;

Figure 12 is an exemplary structural diagram of a seed bonding device according to some embodiments of this specification;

Figure 13 is an exemplary structural diagram of a seed crystal assembly according to some embodiments of this specification;

Figure 14 is an exemplary cross-sectional view of another seed bonding device according to some embodiments of the present specification;

Figure 15A is an exemplary structural diagram of a locking member according to some embodiments of this specification;

Figure 15B is an exemplary top view of a bubble removal device according to some embodiments of the present specification;

Figure 16 is an exemplary structural diagram of another seed bonding device according to some embodiments of this specification;

Figure 17 is an exemplary block diagram of a crucible according to some embodiments of the present specification;

Figure 18 is an exemplary structural diagram of a connection mechanism according to some embodiments of this specification;

Figure 19 is an exemplary structural diagram of a second supporting tray according to some embodiments of this specification;

Figure 20A is an exemplary structural diagram of a telescopic support rod according to some embodiments of this specification;

Figure 20B is an exemplary structural diagram of a temperature field holding disk according to some embodiments of this specification;

Figure 21 is an exemplary structural diagram of a connecting ring according to some embodiments of this specification;

Figure 22 is an exemplary flow chart of a crystal growth method according to some embodiments of this specification;

Figure 23 is a schematic diagram of a generated crystal according to some embodiments of the present specification.

Detailed ways

In order to explain the technical solutions of the embodiments of this specification more clearly, the accompanying drawings needed to be used in the description of the embodiments will be briefly introduced below. Obviously, the drawings in the following description are only some examples or embodiments of this specification. For those of ordinary skill in the art, without exerting any creative efforts, this specification can also be applied to other applications based on these drawings. Other similar scenarios. Unless obvious from the locale or otherwise stated, the same reference numbers in the figures represent the same structure or operation.

It will be understood that the terms "system", "apparatus", "unit" and/or "module" as used herein are a means of distinguishing between different components, elements, parts, portions or assemblies at different levels. However, said words may be replaced by other expressions if they serve the same purpose.

As shown in this specification and claims, words such as "a", "an", "an" and/or "the" do not specifically refer to the singular and may include the plural unless the context clearly indicates an exception. Generally speaking, the terms "comprising" and "comprising" only imply the inclusion of clearly identified steps and elements, and these steps and elements do not constitute an exclusive list. The method or apparatus may also include other steps or elements.

Figure 1 is an exemplary structural diagram of a seed crystal holder according to some embodiments of this specification.

This specification provides a seed crystal holder 100, which can be used to achieve crystal growth. When preparing a crystal, the seed crystal 130 needs to be bonded to the seed crystal holder 100. The seed crystal holder 100 can be arranged on the seed crystal bonding device 30. The raw materials for preparing the crystal are placed in the crucible 400. 100 and the temperature field where the crucible 400 is located are heated, causing the raw materials to volatilize into gas phase components and move to the upper seed crystal 130, thereby realizing crystal growth by the liquid phase method. Wherein, the aforementioned seed crystal 130 may include a semiconductor seed crystal, for example, a silicon carbide seed crystal. For more information about the seed bonding device 30, please refer to FIGS. 12-16 and its related descriptions, and for more information about the crucible 400, please refer to FIGS. 17-20B and its related descriptions.

As shown in FIG. 1 , the seed crystal holder 100 may include a seed crystal holder body 110 and a connecting rod 120 . The seed crystal holder body 110 is used to fix the seed crystal 130. The material of the seed crystal holder body 110 can be graphite. The seed crystal holder body 110 can bond the seed crystal 130 under certain conditions (for example, vacuuming, heating, etc.). The seed crystal holder body 110 may be configured in a columnar shape (the cylindrical seed crystal holder body 110 shown in Figure 1), a cone shape (the frustum seed crystal holder body 110 shown in Figure 10), or other feasible shapes.

The connecting rod 120 is used to connect the seed crystal holder body 110 and the driving device (such as the driving mechanism 150 below), so that the driving device can drive the seed crystal holder body 110 to move along the axial direction of the connecting rod 120 or around the axis of the connecting rod 120 Turn. As shown in FIG. 1 , the seed crystal holder body 110 is fixed on one end of the connecting rod 120 . The seed crystal holder body 110 and the connecting rod 120 can be connected in various ways. In some embodiments, a connecting threaded hole is provided on the side of the seed crystal holder body 110 away from the seed crystal bonding surface 111, and a connecting thread can be provided on the connecting rod 120. The connecting rod 120 can be connected to the aforementioned connecting threaded hole through the connecting thread. The cooperation realizes threaded connection with the seed crystal holder body 110. The connecting rod 120 can also be connected to the seed crystal holder body 110 in other possible connection ways. For other possible connection ways, please refer to Figures 5 to 7 and their related descriptions.

In some embodiments, as shown in FIG. 1 , a seed bonding surface 111 is provided on the side of the seed holder body 110 away from the connecting rod for bonding the seed crystal 130 to the seed holder body 110 . The seed crystal bonding surface 111 may be a flat surface to ensure that the seed crystal 130 can be more stably bonded to the seed crystal holder body 110 . The seed crystal bonding surface 111 can be provided on the end surface of the seed crystal holder body 110 . For example, when the seed crystal holder body 110 is cylindrical, the seed crystal bonding surface 111 can be on the end surface of the cylinder. For another example, when the seed crystal holder body 110 is in the shape of a truncated cone, the seed crystal bonding surface 111 can be on the end face with a larger area in the truncated cone.

In some embodiments of this specification, by fixing the seed crystal holder body 110 in the seed crystal holder 100 to one end of the connecting rod 120, the connecting rod 120 can exert pressure on the seed crystal holder body, and the seed crystal 130 can be stably bonded to the seed crystal holder. On the crystal bonding surface 111, it helps to improve the quality of crystal growth.

In some embodiments, as shown in FIG. 2A , the seed crystal holder body 110 may also include a hollow first inner cavity 112 , and a channel 121 for cooling medium to circulate may be provided in the connecting rod 120 . The channel 121 is connected to the first inner cavity 112 . The cavities 112 are connected. The first inner cavity 112 is an internal space formed by the hollow structure of the seed crystal holder body 110 and is used to collect cooling medium to reduce the temperature of the seed crystal holder body 110 . In some embodiments, the shape of the first inner cavity 112 matches the shape of the seed holder body 110 so that the wall thickness of the seed holder 100 is uniform, thereby achieving uniform heat transfer. For example, the seed holder body 110 can be a cylinder, a cube or a polygonal prism, and correspondingly, the shape of the first inner cavity 112 can also be a cylinder, a cube or a polygonal prism, etc. The connecting rod 120 may be a hollow rod to form a channel to pass the cooling medium. The cooling medium refers to the fluid used to cool the seed crystal support, such as helium, argon, etc. In some embodiments, the cooling medium may be an inert gas (eg, room temperature argon).

In some embodiments of this specification, the channel 121 in the connecting rod 120 is connected to the first inner cavity 112, and the cooling medium can enter the first inner cavity 112 of the seed crystal holder body 110 through the channel 121, thereby performing maintenance on the seed crystal holder body 110. Cooling, and because the temperature of the melt in the crucible 400 is relatively high, cooling the seed crystal holder body 110 can increase the temperature gradient inside the seed crystal holder body 110 and help accelerate the formation of crystals.

In some embodiments, the seed holder body 110 may also be provided with a first through hole 113 communicating with the first inner cavity 112 . First through hole 113 The first inner cavity 112 may be connected to the furnace cavity of the crystal growth furnace 200 for discharging the cooling medium from the first inner cavity 112 into the crystal growth furnace 200 . The seed holder body 110 may be provided with one or more first through holes 113 . The shape of the first through hole 113 may be circular, elliptical, or any other shape. In some embodiments, the first through hole 113 may be provided on any surface of the seed holder body 110 except the seed bonding surface 111 . As shown in FIG. 2A , a plurality of first through holes 113 are provided on the upper wall of the seed crystal holder body 110 . The first inner cavity 112 is connected to the furnace cavity through the first through hole 113, so that the cooling medium that has basically lost its effectiveness can be discharged from the first inner cavity 112 through the first through hole 113, so that new cooling medium can be continuously supplied. Entering the seed crystal holder body 110 through the channel 121 helps to improve the cooling effect of the seed crystal holder body 110. In addition, it can also prevent the internal pressure of the seed crystal holder body 110 from rising, ensuring the safe use of the seed crystal holder body 110.

In some embodiments, a cooling medium diffusion structure 114 disposed in the first inner cavity 112 may also be provided in the first inner cavity 112 . The cooling medium diffusion structure 114 may be used to assist the diffusion of the cooling medium in the first inner cavity 112 . For example, the cooling medium diffusion structure 114 can be a spiral blade disposed at the outlet of the channel 121 in the first inner cavity 112. When the cooling medium enters the first inner cavity 112 through the channel 121, the cooling medium can exert force on the aforementioned spiral blade. , thereby causing the spiral blades to rotate, thereby driving the incoming cooling medium to be scattered everywhere in the first inner cavity 112 along with the spiral blades. Some embodiments of this specification use the cooling medium diffusion structure 114 to help diffuse the cooling medium evenly in the first inner cavity 112, thereby ensuring that various positions of the seed crystal holder body 110 can be cooled evenly, so that the seed crystal holder body 110 can be evenly cooled. The temperature distribution within 110 is more uniform.

In some embodiments, cooling medium diffusion structure 114 may include one or more hollow tubular structures. The aforementioned tubular structure may be a round tube, a square tube or a tubular structure with other cross-section shapes.

When the cooling medium diffusion structure 114 includes multiple tubular structures, one end of the multiple tubular structures has an inlet connected to the channel 121 and the other end may include multiple outlets. The multiple outlets may respectively guide the cooling medium into the first inner cavity 112 . A plurality of different positions, so that the cooling medium is evenly diffused at multiple positions in the first inner cavity 112 .

In some embodiments, when the crystal is generated, the temperature of the seed crystal holder body 110 can also be detected by a temperature detection device (for example, an external thermal imager) to obtain corresponding temperature information (for example, a thermal infrared image). The seed crystal holder 100 can communicate with a processor (not shown), which can be used to control crystal generation. When the temperature information satisfies the preset temperature adjustment condition, the processor can determine the location where temperature adjustment is required based on the temperature information. For example, the preset temperature adjustment condition may be that the temperature difference of each area in the seed crystal holder body 110 does not exceed the preset temperature difference threshold. The processor can determine the temperature distribution of the seed crystal holder body 110 based on the aforementioned temperature information. When the aforementioned temperature distribution represents the seed When the temperature difference between a certain local location in the crystal support body 110 and the temperature in other areas is greater than the temperature difference threshold, the processor may determine the aforementioned local location as a location that requires temperature adjustment. The processor can determine the corresponding cooling medium diffusion structure 114 based on the location where temperature adjustment is required, and control the input of the cooling medium to the corresponding cooling medium diffusion structure 114 to cool the location, and continuously obtain the cooled seed crystals. Depending on the temperature information corresponding to the main body 110, the temperature information indicates that the location requiring temperature adjustment does not meet the preset temperature adjustment conditions. The processor can determine the corresponding cooling medium diffusion structure 114 through the temperature adjustment correspondence table and the location where temperature adjustment is required. The aforementioned temperature adjustment correspondence table may include the temperature adjustment position corresponding to each of the plurality of tubular structures in the cooling medium diffusion structure 114, that is, the corresponding position of the outlet of each of the plurality of tubular structures. In some embodiments of this specification, by arranging the cooling medium diffusion structure 114 into multiple tubular structures, local temperature can be adjusted in a directional manner to avoid local temperatures being too high to reduce the quality of crystal formation. In addition, by monitoring the temperature of the seed crystal holder body 110 as mentioned above, the temperature of crystal generation can be automatically adjusted, thereby effectively improving the quality of crystal generation.

When the cooling medium diffusion structure 114 includes a tubular structure, the tubular structure can be spirally wrapped around the inner wall of the first inner cavity 112 , with one end of the inlet connected to the channel 121 , and finally exiting from the first through hole 113 . Exported to the crystal growth furnace 200. For example, the cooling medium diffusion structure 114 can be a square tube, and the square tube can be spirally wrapped around and completely attached to all inner walls or designated areas of the first inner cavity 112 . Furthermore, the aforementioned tubular structure can also be extended outside the crystal growth furnace 200 . It can be understood that by passing the cooling medium into the first inner cavity 112 through the aforementioned tubular structure, when the tubular structure is in contact with the inner wall of the first inner cavity 112, the cooling medium in the tubular structure can cool down the seed holder body 110. , the cooled cooling medium can continue to be exported to the outside of the crystal growth furnace 200 through the tubular structure. Some embodiments of this specification can use the aforementioned settings so that the cooling medium does not directly contact the seed crystal holder body 110, but can still cool the seed crystal holder body 110 to prevent the cooling medium from entering the seed crystal holder body 110, making it difficult to clean and causing problems. Clogging, etc., or entering the crystal growth furnace 200 may affect crystal growth. In addition, the controllability of cooling can also be improved through the aforementioned settings. For example, the cooling medium can be continued to be input into the aforementioned tubular structure by stopping, so that the current cooling medium can stay at a designated location. When the cooling medium needs to be updated, new cooling medium can be continuously input into the aforementioned tubular structure. With the new cooling After the medium enters, the used cooling medium will flow out of the aforementioned tubular structure to ensure the controllability of the cooling process.

In some embodiments, as shown in FIG. 2A , the cooling medium diffusion structure 114 may include a housing 1141 , a second inner cavity 1142 is formed in the housing 1141 , and the channel 121 is connected to the second inner cavity 1142 so that the cooling medium can enter. in the second inner cavity 1142. The housing 1141 is provided with a plurality of diffusion holes 1143. The diffusion holes 1143 communicate with the first inner cavity 112 and the second inner cavity 1142, so that the cooling medium in the second inner cavity 1142 can diffuse to the first inner cavity through the diffusion holes 1143. 112 everywhere. The shape of the aforementioned housing 1141 can be adapted to the first inner cavity 112 . The housing 1141 can be in various shapes, such as cuboid, cube, cylinder or other shapes. The material of the housing 1141 can be graphite, high-temperature ceramics, stainless steel, etc. In some embodiments of this specification, the cooling medium can enter the second inner cavity 1142 through the channel 121, and then diffuse through the second inner cavity 1142. The holes 1143 enter the first inner cavity 112 to help the cooling medium diffuse more quickly while preventing the cooling medium from accumulating at the outlet of the channel 121 .

In some embodiments, the seed holder 100 may further include a cooling device (not shown). The cooling device is a device that provides cooling medium to the seed holder body 110, and can deliver the cooling medium to the channel 121. The cooling device can output the cooling medium at a certain flow rate, so that the cooling medium flows in the channel 121 at a preset flow rate. For example, the outlet of the cooling device can be connected to the channel 121, and a power structure (such as a transfer pump) can also be provided in the cooling device or the channel to provide power for the cooling medium, drive it away from the cooling device, and make the cooling medium flow at a preset flow rate. It flows in the channel 121 toward the seed crystal support body 110 .

In some embodiments, the preset flow rate of the cooling medium is greater than 0.4m/s. In some embodiments, the cooling medium may be at room temperature. In other embodiments, the cooling medium may be cooled to a certain temperature, such as 10°, 15°, 20°, etc. It is worth noting that because the temperature in the crystal growth furnace 200 equipped with the seed crystal holder body 110 is relatively high, the cooling medium with a low flow rate may be heated. In some embodiments of this specification, the preset flow rate is set to greater than 0.4 m/s, can prevent the cooling medium from being heated, thereby ensuring the cooling effect of the cooling medium on the seed crystal holder body 110.

It can be understood that since the seed crystal holder body 110 is configured to have a structure with the first inner cavity 112, the mass of the seed crystal holder body 110 is reduced, which may cause shaking. Therefore, in some embodiments of this specification, the seed crystal holder 100 may also include a weight-increasing structure (not shown), and the weight-increasing structure may be welded or bonded to the side of the seed crystal holder body 110 away from the connecting rod 120 connected in other ways. The weight-increasing structure can be disposed in the first inner cavity 112, or can be disposed on the outer wall of the seed crystal holder body 110 (for example, on any outer wall except the seed crystal bonding surface 111). A weight-increasing structure may be used to increase the weight of the seed crystal support body 110 . The weight-increasing structure can be a variety of shapes, such as plate-like structure, ring-like structure, etc. The material of the weight-increasing structure can be stainless steel, high-temperature ceramics, tungsten alloy, etc. In some embodiments of this specification, by connecting the weight-increasing structure to the seed crystal holder body 110, the seed crystal holder body 110 can be weighted, preventing the seed crystal holder body 110 from shaking during the crystal growth process, and contributing to the stability of the crystal. generated to ensure the quality of the grown crystals.

In some embodiments, the seed crystal holder 100 may also include a cooling structure (not shown), and the cooling structure may be provided on the connecting rod 120 for cooling the cooling medium in the channel 121 . The cooling structure may include a variety of structures, such as condensers, expansion valves, etc. or any combination thereof. The cooling structure may be an annular structure attached to the inner wall of the connecting rod 120. When the cooling medium passes through the channel 121, the cooling structure may cool the cooling medium in the channel 121 by reducing the pressure of the cooling medium and/or exchanging heat with the cooling medium. . Some embodiments of this specification can lower the temperature of the cooling medium by arranging a cooling structure, thereby preventing the cooling medium from being heated too quickly by the surrounding environment, and trying to ensure that the cooling medium enters the first inner cavity 112 at a lower temperature, thereby allowing the cooling medium to enter the first inner cavity 112 at a lower temperature. The inner cavity 112 can absorb the heat of the seed crystal holder body 110 more quickly and efficiently, which helps to improve the cooling effect of the seed crystal holder body 110 .

In some embodiments, the cooling structure includes a cooling circuit 123 that delivers cooling fluid for cooling the cooling medium. In some embodiments, cooling circuit 123 is provided outside the connecting rod. As shown in FIG. 2B and FIG. 2C , the cooling structure may include a cooling jacket 124 , the cooling jacket 124 is set on the connecting rod 120 , and the cooling circuit 123 is provided on the cooling jacket 124 . In some embodiments, the cooling fluid may be a cooling liquid, such as water. In some embodiments, cooling circuit 123 may include an input channel and an output channel. In some embodiments, the input and output channels may be parallel to the channel 121 conveying the cooling medium. In other embodiments, in order to better cool the cooling medium, the output channel and the output channel may be arranged in a spiral shape surrounding the channel 121 that transports the cooling medium.

In some embodiments, as shown in FIG. 3 , the seed crystal holder 100 may further include a driving mechanism 150 and a stirring mechanism 160 .

The driving mechanism 150 refers to a mechanism that converts other energy sources into mechanical energy and generates kinetic energy. The driving mechanism 150 may include a variety of types, such as a motor, a pneumatic source, a hydraulic source, etc. The driving mechanism 150 may be connected to the other end of the connecting rod 120 , where the other end of the connecting rod 120 refers to the end away from the seed holder body 110 . The driving mechanism 150 can drive the seed crystal holder body 110 to rotate around the axis A of the connecting rod 120 through the connecting rod 120 . By arranging the driving structure 150, during the crystal growth process, the seed crystal holder 100 can rotate at a required speed to ensure stable growth of the crystal.

The stirring mechanism 160 can stir the melt 140 for crystal growth. As shown in FIGS. 3 and 4 , the stirring mechanism 160 can be connected to the seed crystal holder body 110 . When the driving mechanism 150 drives the seed crystal holder 100 to rotate, the stirring mechanism 160 can stir the melt 140 . The stirring mechanism 160 can be in various shapes, such as rod-shaped, plate-shaped or other various irregular shapes. It should be noted that during the crystal growth process, the stirring mechanism 160 needs to extend below the liquid level of the melt 140 to stir the melt 140 .

During the crystal growth process, the seed crystal 130 and the melt 140 are only in contact with each other on the liquid surface. Therefore, the overall agitation of the melt 140 is less and the flow rate is not high. This will cause the overall mass transfer of the melt 140 to be insufficient and uniform, which in turn leads to Effect on crystal growth quality. In some embodiments of this specification, the driving mechanism 150 drives the seed crystal holder body 110 to rotate around the axis A of the connecting rod 120. The rotation of the seed crystal holder body 110 can also drive the stirring mechanism 160 to rotate around the axis A of the connecting rod 120, thereby achieving Stirring the melt 140 can increase the flow rate of the melt 140, help improve the mass transfer route of key substances in the melt 140, ensure uniform mass transfer, and improve crystal growth efficiency.

In some embodiments, as shown in FIG. 4 , the stirring mechanism 160 may include a mounting rod 161 and a stirring paddle 162 . One mounting rod 161 corresponds to one stirring paddle 162 . The shape of the stirring blade 162 may include a variety of shapes, such as a paddle stirring blade, a disc turbine blade, etc. The stirring paddle 162 is located on the side of the seed crystal bonding surface 111 away from the connecting rod 120 . The stirring paddle 162 can extend into the inside of the melt 140 to stir the melt 140 . As shown in Figures 3 and 4, the stirring mechanism 160 can include a mounting rod 161 and a stirring paddle 162. One end of the mounting rod 161 is connected to the seed crystal holder body 110, and the other end is connected to the stirring paddle 162. The operation of the driving mechanism 150 can drive The seed crystal holder body 110 rotates along the axis A, and The mounting rod 161 is driven to rotate along the axis A, and the rotation of the mounting rod 161 can drive the stirring paddle 162 connected thereto to move, so that the stirring paddle 162 stirs the melt 140 .

In some embodiments, the number of stirring mechanisms 160 may be multiple, and the plurality of stirring mechanisms 160 are arranged around the seed holder body. In some embodiments, the stirring mechanism 160 may be centrally symmetrically arranged relative to the axis A. As shown in FIG. 3 , the seed crystal holder 100 may include two stirring mechanisms 160 , wherein the two stirring mechanisms 160 are arranged centrally symmetrically based on the axis A.

In some embodiments, the number of the stirring mechanism 160 may also be single. As shown in Figure 4, the seed crystal holder 100 may include a single stirring mechanism 160, and the stirring paddle 162 of the single stirring mechanism 160 may include multiple blades. When the stirring mechanism 160 rotates around the axis A, the blades of the aforementioned stirring paddle 162 may rotate around the axis A. The center of the paddle 162 rotates, which helps increase the flow rate of the melt 140 .

In some embodiments, the material of the stirring mechanism 160 may be one or more of tungsten alloy and high-temperature ceramics. The stirring mechanism 160 made of tungsten alloy, high-temperature ceramics and other materials can have higher stability in the high-temperature melt 140, effectively increasing the service life of the stirring mechanism 160.

In some embodiments, the seed holder body 110 includes at least two sub-sections. As shown in FIGS. 6A , 6B and 6C , the seed holder body 110 may include two sub-parts, namely a first sub-part 115 and a second sub-part 116 . The seed holder body may also include three sub-parts, four sub-parts or other numbers of sub-parts. The following describes an embodiment in which the seed holder body 110 includes two sub-parts.

As shown in FIG. 6C for example, the first sub-part 115 and the second sub-part 116 can be spliced to form the seed holder body 110. It can be understood that, as mentioned above, the seed crystal holder body 110 can be in various shapes such as a table shape or a cylindrical shape, and its sub-parts can be in shapes corresponding to the divided seed crystal holder body 110 . Taking the seed crystal holder body 110 as being in the shape of a truncated cone or a cylinder as an example, the first sub-part 115 and the second sub-part 116 may be in the shape of a semi-cylinder or a semi-conical cone.

In some embodiments, the shapes and sizes of different sub-sections of the seed holder body 110 may also be different. For example, the first sub-section 115 may be a three-quarter cylinder, and the second sub-section 116 may be a quarter cylinder. That is to say, the cross-sectional area of the first sub-portion 115 perpendicular to the axis of the first sub-portion 115 is greater than the cross-sectional area of the second sub-portion 116 perpendicular to the axis of the second sub-portion 116 . For example, the cross section of the first sub-portion 115 perpendicular to the axis of the first sub-portion 115 is bounded by major arcs and straight lines, and the cross-section of the second sub-portion 116 perpendicular to the axis of the second sub-portion 116 is bounded by minor arcs and straight lines. .

The splicing of at least two sub-parts of the seed crystal holder body 110 may refer to placing and combining the at least two sub-parts according to a predetermined position, thereby splicing them into a complete seed crystal holder body 110 . At least two sub-parts of the seed holder body 110 can be spliced in various ways. For example, at least two sub-parts can be placed together according to a predetermined position; for another example, one of any two adjacent sub-parts is provided with a positioning groove and the other is provided with a positioning protrusion. It is put into the positioning groove to realize the positioning of two adjacent sub-parts, thereby combining at least two sub-parts together.

In some embodiments, each of the at least two sub-portions of the seed holder body 110 is provided with a half-slot. It should be noted that a half slot can be understood as a part of a complete snap slot. The splicing of at least two sub-parts causes the half-grooves on each of the at least two sub-parts to be spliced into a complete snap-in groove 170 . That is to say, the sub-section is a part of the seed crystal holder body 110 and the half-slot is a part of the snap-in groove 170. By splicing the sub-sections into the seed crystal holder body 110, the half-slots are spliced into the snap-in slot. For example, the first sub-portion 115 may be provided with a first half-slot 1150, and the second sub-portion 116 may be provided with a second half-slot 1160. The first sub-portion 115 and the second sub-portion 116 are spliced to form the first half-slot. 1150 and the second half-slot 1160 are spliced into the snap-in slot 170 .

As shown in FIG. 5 and FIG. 6A to FIG. 6C , the first half groove 1150 is located in the first sub-portion 115 and is provided at an end of the first sub-portion 115 connected to the connecting rod 120 . The second half groove 1160 is located in the second sub-portion 116 and is provided at an end of the second sub-portion 116 connected to the connecting rod 120 . In some embodiments, the structure of the second half-slot 1160 may be the same as the structure of the first half-slot 1150 , and may be symmetrical about the axis A of the connecting rod 120 . In other embodiments, the structures of the first half groove 1150 and the second half groove 1160 may be different. The first half groove 1150 and the second half groove 1160 are spliced to form a locking groove 170, in which the connecting rod 120 and the locking structure 118 can be embedded.

In some embodiments, the seed crystal holder 100 may also include a locking structure 117 and a clamping structure 118.

As shown in FIG. 5 , the snap-in structure 118 is provided at one end of the connecting rod 120 connected to the seed crystal holder body 110 . The clamping structure 118 can be clamped in the clamping groove, so that the connecting rod 120 and the seed crystal holder body 110 are closely connected through the clamping structure 118 . The snap-in structure 118 may include a variety of three-dimensional structures (such as cubes, cylinders, etc.), and is located at the end connecting the connecting rod 120 and the seed holder body 110 . The snap-in structure 118 can be understood as being able to be accommodated in the snap-in groove 170 and not disengaged from the snap-in groove 170 after being snap-locked. There can be multiple ways of engaging the engaging structure 118 and the engaging groove 170. For details, please refer to the relevant description below.

As shown in FIG. 5 , the locking structure 117 is provided on the outer wall of the seed holder body 110 and can fix at least two spliced sub-parts (such as the first sub-part 115 and the second sub-part 116 ). In some embodiments, the locking structure 117 may include bolts, nuts and protruding structures. The protruding structures are provided on the first sub-part 115 and the second sub-part 116. There are threaded holes in the protruding structures through which the bolts can pass. The threaded holes on the protruding structure of the first sub-part 115 and the threaded holes on the protruding structure of the second sub-part 116 are fixed by nuts, thereby fixing the first sub-part 115 and the second sub-part 116 .

It can be understood that during the process of crystal growth, the seed crystal holder body 110 and the connecting rod 120 are often connected through threads. The screw-connected part will generate holes due to the existence of undercut grooves, and gas can enter the cavity space, thereby affecting the seed crystal. The average temperature gradient of the body 110 Uniform changes induce the formation of cavities on the crystal growth surface. Therefore, in some embodiments of this specification, by arranging the seed crystal holder body 110 to include at least two sub-parts, the locking structure 117 fixes the at least two sub-parts, and the clamping structure 118 is clamped in the clamping groove, it is possible to The seed holder body 110 and the connecting rod 120 are tightly connected without a space for gas to enter, which solves the problem of the undercut groove. It not only allows the temperature of the seed holder body 110 to change evenly, but also facilitates the subsequent separation of the crystal holders ( Just unlock the locking structure 117), which greatly improves the quality of the prepared crystal.

In addition, it is worth mentioning that ablation of the seed crystal holder body 110 can achieve the separation of the crystal and the seed crystal holder body 110 after crystal growth. The ablation speed depends on the ablation of the concave thread on the top of the seed crystal holder body 110. In the orientation of the equipment, when there is no attachment in the threaded hole on the top of the seed crystal holder body 110, the ablation speed will gradually slow down after about one third of the ablation in the upwind direction for 12 hours. In the above-mentioned embodiments of this specification, a combination surface will appear at the splicing location of multiple sub-parts. As shown in Figure 7, there is a combination surface B where the first sub-part 115 and the second sub-part 116 are spliced. The combination surface B can play a certain guiding role in the ablation process, speed up the later ablation speed, and help improve the ablation process. The efficiency of crystal support separation.

In some embodiments, at least two sub-parts of the seed holder body 110 include a first sub-part 115 and a second sub-part 116 with the same structure. The first sub-part 115 and the second sub-part 116 are symmetrical about the axis of the connecting rod. Axisymmetric setup. In other embodiments, when the seed holder body includes three or more sub-parts, the structure of each sub-part may be the same and arranged evenly and symmetrically.

Taking the seed crystal holder body as an example including two sub-parts, as shown in Figure 6A, Figure 6B, Figure 6C and Figure 7, the structures of the first sub-part 115 and the second sub-part 116 can be the same. The portion 116 may be arranged symmetrically with the axis A of the connecting rod 120 as the axis of symmetry.

In some embodiments of this specification, at least two sub-parts of the seed holder body 110 have the same structure and are arranged symmetrically, which can facilitate production and manufacturing, which may improve the assembly efficiency of the seed holder body 110 .

As shown in FIGS. 5 to 7 , the engaging grooves 170 are arranged along the axis A direction of the connecting rod 120 to form a first groove body 171 and a second groove body 172 . The first groove body 171 is closer to the seed bonding surface than the second groove body 172; the cross-sectional area of the first groove body 171 along the axis A perpendicular to the connecting rod 120 is larger than that of the second groove body 172 along the axis A perpendicular to the connecting rod 120. The cross-sectional area of the axis A; the cross-sectional area of the clamping structure 118 along the axis A perpendicular to the connecting rod 120 is greater than the cross-sectional area of the connecting rod 120 along the axis A perpendicular to the connecting rod 120 .

The first groove body 171 is used to fix the clamping structure 118 , and the second groove body 172 is used to accommodate the connecting rod 120 . Therefore, correspondingly, the area of the cross-section of the snap-in structure 118 along the axis A perpendicular to the connecting rod 120 is greater than the area of the cross-section of the connecting rod 120 along the axis A perpendicular to the connecting rod 120 . The shape of the first groove 171 is consistent with the snap-in connection. The shape of the structure 118 is adapted so that the clamping structure 118 can be clamped in the first groove 171 . The shape of the second slot 172 is adapted to the shape of the end of the connecting rod 120 close to the clamping structure 118 . The connecting rod 120 The end close to the clamping structure 118 is located in the second groove body 172 so that the clamping structure 118 fixes the relative position of the connecting rod 120 and the seed crystal holder body 110 . In some embodiments of this specification, the connecting rod 120 and the seed crystal holder body 110 are embedded and combined through the snap-in structure 118, which helps to avoid the aforementioned cavity problem caused by the existence of the undercut groove and ensures that the connecting rod 120 and the seed crystal holder body 110 are stable connection.

The following description takes at least two sub-portions including a first sub-portion 115 (having a first half-slot 1150 thereon) and a second sub-portion 116 (having a second half-slot 1160 thereon) as an example. As shown in FIG. 6A , the first half groove 1150 can be divided into a first upper half groove 1151 and a first lower half groove 1152 . As shown in FIG. 6B , the second half groove 1160 can be divided into a second upper half groove 1161 and a second lower half groove 1162 . As shown in FIG. 6C , the first upper half groove 1151 and the second upper half groove 1161 can be spliced to form the first groove body 171 , and the first lower half groove 1152 and the second lower half groove 1162 can be spliced to form the second groove body 172 .

In some embodiments, the snap-in structure 118 may be in the shape of a polyhedron. As shown in FIG. 7 , the cross-section of the snap-in structure 118 may be a cube. In some embodiments of this specification, by setting the snap-in structure 118 in a polyhedral shape, it is possible to ensure that the snap-in structure 118 rotates synchronously when the seed crystal holder body 110 rotates. It can be understood that if the seed crystal holder body 110 does not rotate when generating crystals, the clamping structure 110 may also be a cylinder.

It should be noted that the snap-in groove 170 and the snap-in structure 118 can have various shapes, as long as the snap-in structure 118 can be locked into the snap-in slot 170 without being detached from the snap-in slot 170 . For example only, the engaging groove 170 may be a trapezoidal groove, that is to say, the cross-sectional areas perpendicular to the axis A at different positions of the engaging groove 170 are different. The closer to the seed bonding surface 111 , the vertical cross-sectional area of the engaging groove 170 is The cross-sectional area along axis A is larger. Correspondingly, the clamping structure 118 may also be a quadrangular pyramid.

As shown in FIGS. 8-9 , the locking structure 117 may include an annular groove 1171 and a locking ring 1172. The annular groove 1171 can be arranged around the outer wall of the seed crystal holder body 110 , and the locking ring 1172 is set outside at least two sub-parts (such as the first sub-part 115 and the second sub-part 116 ) after splicing, and is arranged in the annular groove 1171 Inside. In some embodiments, the outer wall of the annular groove 1171 is provided with external threads, and the inner wall of the locking ring 1172 is provided with internal threads. The locking ring 1172 is connected to the annular groove 1171 through a threaded connection, so that the locking ring 1172 is set into the annular groove. In addition, the external threads on the outer wall of the annular groove 1171 do not exceed the top of the seed crystal holder body 110 to avoid failure in hot pressing in the later stage.

The bottom of the locking ring 1172 and the annular groove 1171 in the locking structure 117 can fit with the seed holder body 110 . The locking ring 1172 surrounds the seed crystal holder body 110 on the outer wall of the seed crystal holder body 110, and can lock at least two spliced sub-parts (such as the first sub-part 115 and the second sub-part 116) to secure the seed crystal holder body 110. 110 is fixed and restricted to realize the fixation of at least two sub-parts, thereby ensuring the tight connection between the seed crystal holder body 110 and the connecting rod 120, and the locking operation is simple and convenient.

In some embodiments, the seed crystal holder 100 may further include a protection bracket 180 for protecting the seed crystal holder body 110 . As shown in Figure 10, the seed crystal holder 100 can also include an annular protective bracket 180. The protective bracket 180 is provided with a receiving cavity 184 that matches the shape of the seed crystal holder body 110. The protective bracket 180 can be arranged around the seed crystal holder body 110. . In addition, the protective bracket 180 can also surround the seed crystal bracket body 110 and connect the Rod 120 connects one end. The aforesaid accommodating cavity 184 can accommodate the seed crystal holder body 110 , and the seed crystal holder body 110 can be closely attached to the inner wall of the accommodating cavity 184 . The protective bracket 180 may be made of graphite material. The side of the protective bracket 180 close to the connecting rod 120 is the upper surface. The upper surface of the protective bracket 180 is provided with a third through hole. The shape of the third through hole can match the shape of the connecting rod 120 (for example, the connecting rod 120 is a cylinder). Rod-shaped (the third through hole may be a cylindrical hole), the third through hole is connected to the aforementioned accommodation cavity 184, and the diameter of the third through hole matches the outer diameter of the outer wall of the connecting rod 120 along the axial direction of the connecting rod 120. The hole can be arranged with the axis A of the connecting rod 120 as the axis. The connecting rod 120 can pass through the third through hole on the upper surface of the protective bracket 180 and be connected to the seed crystal bracket body 110 in various ways (for example, threaded connection, buckle connection, the method described in the above embodiment, etc.).

It is worth mentioning that when the top seed crystal 130 is pulled to grow, the joint between the seed crystal holder body 110 and the seed crystal 130 will be wrapped by volatile matter, and there will also be an adhesion layer on the surface of the seed crystal holder body 110. This will not only cause The crystal support cannot be separated directly, and the adhesion layer will also affect the absorption and release of heat by the seed crystal support 110, affecting the growth and quality of the crystal. In some embodiments of this specification, the protective bracket 180 surrounds the seed crystal holder 110 to avoid the appearance of an adhesion layer on the surface of the seed crystal holder body 110, thereby achieving control of the axial and radial temperature gradients of the seed crystal holder body 110, thereby improving the crystal quality. Stable quality and form.

In some embodiments, the seed crystal holder 100 may also include an annular first protective sleeve 181 , the first protective sleeve 181 is set outside the connecting rod 120 , and the first protective sleeve 181 is located between the connecting rod 120 and the protective bracket 180 . The first protective cover 181 can be used to prevent volatile matter from entering between the seed crystal holder body 110 and the connecting rod 120 and between the protective holder 180 and the connecting rod 120 . As shown in FIG. 10 , the first protective sleeve 181 may be an annular cylinder with a hollow interior. The inner wall of the first protective sleeve 181 wraps the connecting rod 120 , the outer wall is connected to the surface of the protective bracket 180 , and the bottom surface is embedded in the protective bracket 180 . The upper surface of the protective bracket 180 may be provided with an annular groove, and the size of the annular groove is adapted to the first protective sleeve 181 so that the outer wall and bottom surface of the first protective sleeve 181 fit in the annular groove.

As shown in FIG. 10 , the connecting rod 120 may include a first outer diameter section r ₃ and a second outer diameter section r ₂ along the axial direction of the connecting rod 120 . The outer diameter of the first outer diameter section r ₃ is smaller than the outer diameter of the second outer diameter section r ₂ , and the first outer diameter section r ₃ is closer to the seed holder body 110 than the second outer diameter section r ₂ . Correspondingly, the first protective sleeve 181 includes a first inner diameter section r ₄ and a second inner diameter section r ₁ along the axial direction of the connecting rod 120 ; the first inner diameter section r ₄ is smaller than the inner diameter of the second inner diameter section r ₁ , and the first inner diameter section r 1 r ₄ is closer to the seed holder body 110 than the second inner diameter section r ₁ . Among them, the first inner diameter section r ₄ can match the first outer diameter section r ₃ , and the second inner diameter section r ₁ can match the second outer diameter section r ₂ . As shown in Figure 10, the first protective sleeve 181 can connect the connecting rod 120 with the protective bracket 180. The first inner diameter section _r4 and the second inner diameter section _r1 of the first protective sleeve 181 are respectively connected to the first outer diameter section of the connecting rod 120. The connection part of the diameter section r ₃ and the second outer diameter section r ₂ is fit. The outer wall of the first protective sleeve 181 is connected to the protective bracket 180 , and the bottom surface is embedded in the protective bracket 180 .

In some embodiments of this specification, the connecting rod 120 and the protective bracket 180 are connected through the first protective cover 181, which can more effectively prevent volatile matter from entering between the seed crystal bracket body 110 and the connecting rod 120, and between the protective bracket 180 and the connecting rod 120. Adhesion is caused between them, which facilitates cutting crystal separation or ablation separation.

In some embodiments, a side surface of the protective bracket 180 away from the connecting rod 120 may be provided with an annular second protective sleeve 182. The second protective sleeve 182 is embedded in the protective bracket 180, and the second protective sleeve 182 surrounds the accommodation cavity. 184 settings.

As shown in Figure 10, when the seed crystal 130 is bonded to the seed crystal bonding surface 111, the end of the second protective sleeve 182 away from the connecting rod 120 can be attached to the side of the seed crystal 130 close to the connecting rod 120 to prevent volatilization. Objects may enter between the seed crystal holder body 110 and the connecting rod 120 and between the protective holder 180 and the connecting rod 120 to cause adhesion.

In some embodiments of this specification, the second protective cover 182 can prevent the volatile matter of the melt 140 from entering the seed crystal holder body 110 and corroding the graphite paper or the seed crystal holder body 110. It can also ensure that the seed crystal 130 is not stressed when pulling, thereby preventing The seed crystal 130 falls off.

In some embodiments, the ratio of the height of the second protective sleeve 182 along the axial direction of the connecting rod 120 to the diameter of the seed bonding surface 111 of the seed holder body 110 is 3:150. By setting the ratio of the axial height of the second protective sleeve 182 to the diameter of the seed bonding surface 111, it can be ensured that the size of the second protective sleeve 182 can play a more effective protective role.

In some embodiments, a first groove 183 may be provided on a side surface of the protective bracket 180 away from the connecting rod 120 . The diameter of the aforementioned first groove 183 is larger than the diameter L of the opening of the side of the accommodation cavity 184 away from the connecting rod 120 . As shown in Figure 10, the aforementioned first groove 183 includes a communication portion 1831 connected to the opening and an annular portion 1832 surrounding the communication portion; the bottom surface of the annular portion 1832 (i.e., the upper surface of the first groove) is bonded to the seed crystal. The surface 111 is located on the same plane, the annular portion 1832 of the first groove 183 is adapted to the shape of the second protective sleeve 182 , and the second protective sleeve 182 is provided on the bottom surface of the annular portion 1832 of the first groove 183 .

In the embodiment of this specification, the first groove 183 can allow the second protective cover 182 to be embedded in the protective bracket, which can further prevent volatiles from entering between the seed crystal bracket body 110 and the connecting rod 120, and between the protective bracket 180 and the connecting rod 120. causing adhesion between them. In addition, since the bottom surface of the annular portion 1832 (ie, the upper surface of the first groove) is located on the same plane as the seed crystal bonding surface 111 , part of the seed crystal can be bonded to the bottom surface of the annular portion 1832 and with the second protective sleeve 182 fit. The size of the first groove 183 can basically match the size of the seed crystal, and can also facilitate the operator to determine the bonding position of the seed crystal to a certain extent and ensure the concentricity between the seed crystal and the seed crystal holder 100 .

In some embodiments, the diameter of the first groove 183 is 5 mm to 10 mm larger than the diameter of the opening to facilitate the placement of the annular portion and to facilitate the embedding of the second protective sleeve 182 into the protective bracket 180 , thus ensuring that the seed crystal can be more stable. Ground bonding.

In some embodiments, graphite paper 119 may be adhered to the seed crystal bonding surface 111 . Graphite paper 119 can be used to fix the seed crystal 130 . The size of the graphite paper 119 can be adapted to the seed crystal bonding surface 111 so that the graphite paper 119 is completely attached to the seed crystal bonding surface 111 . stone The ink paper 119 can be bonded to the seed crystal bonding surface 111 through hot melt glue. The graphite paper 119 protrudes from the lower surface of the second protective sleeve 182 in a direction away from the connecting rod 120 (ie, direction D as shown in FIG. 10 ). For example, the graphite paper 119 can be oriented away from the connecting rod 120 and protrude 0.1mm-0.2mm from the side surface of the second protective sleeve 182 away from the connecting rod 120 to ensure that the seed crystal 130 can be convexed in the direction away from the connecting rod 120 . To protect the lower surface of the bracket 180 . It is worth mentioning that the seed crystal 130 starts to grow at a certain speed after contacting the melt 140. As time goes by, the crucible wall begins to corrode, the melt 140 evaporates, etc., which will cause the liquid level of the melt 140 to rise. As it gradually decreases, the relative speed at which the seed crystal 130 deviates from the liquid surface of the melt 140 gradually accelerates, so that it cannot grow according to the prescribed pulling speed. In some embodiments of this specification, by arranging graphite paper on the side surface of the protruding second protective sleeve 182 away from the connecting rod 120, the seed crystal 130 can be fully contacted with the liquid level of the melt 140, and the crystal can be pulled according to the formula. Speed growth.

In some embodiments, the aforementioned seed crystal holder 100 may be disposed in the seed crystal bonding device 30 , and the seed crystal bonding device 30 may bond the seed crystal 130 based on the seed crystal holder 100 . The aforementioned seed crystal bonding device 30 can be used to bond the seed crystal 130 .

FIG. 11 is an exemplary structural diagram of a seed bonding device 30 according to some embodiments of this specification.

As shown in FIG. 11 , the seed bonding device 30 may include one or more bonding components 300 , and the bonding components 300 may include a supporting component 310 and a pressure component 320 .

The support member 310 may be used to support the seed holder 100 . For example, the support member 310 may be used to support the seed holder body 110 . For another example, the supporting component 310 can also be used to support the seed holder body 110 and the connecting rod 120 . The support component 310 may include a support frame made of metal, stainless steel, or other materials, and the structures that need to be supported in the seed crystal holder 100 may be fixed on the support frame.

The pressing component 320 can apply pressure to the seed crystal 130 and/or the seed crystal holder 100 , and the pressure can press the seed crystal holder 100 and the seed crystal 130 on the seed crystal holder 100 toward each other.

In some embodiments of this specification, through the seed crystal bonding device 30 provided with one or more bonding components 300, not only can the seed crystal holder 100 and the seed crystal 130 be pressed toward each other during the bonding process, but the seed crystal can also be fixed. The support 100 makes the bonding process more stable, thereby improving the bonding effect of the seed crystal 130.

As shown in Figure 12, the seed bonding device 30 may also include a vacuum furnace cavity 31, a vacuum component 32, a column 33, a motor 34, a screw rod 35, a pressure column 36, a support component 37, a heating component 38, and a lower pressure plate 39 . The vacuum furnace chamber 31 may be a place where the seed crystal 130 is bonded, and the vacuum assembly 32 may be used to perform vacuuming on the vacuum cranial cavity 31 . The upright column 33 can be disposed on the top of the vacuum chamber 31 , and the motor 34 can be fixedly disposed (for example, bolted or welded) on the upright column 33 . The screw rod 35 is rotatably connected to the motor 34. When the motor 34 is running, the screw rod 35 can rotate around the central axis to move up and down. The upper end of the pressure column 36 can be connected with the lower end of the screw rod 35. When the screw rod 35 rotates and moves up and down, the pressure column 36 can also move up and down. When the pressure column 36 moves downward, it can exert pressure on the bonding assembly 300. The support component 37 can be placed at the bottom of the seed bonding device 30 for supporting the heating component 38 and the lower platen 39 . The heating component 38 may be disposed between the support component 37 and the lower pressure plate 39 to provide the heat required for bonding the seed crystal 130 . The lower pressure plate 39 can be placed on the upper surface of the heating component 38, and the bonding component 300 can be placed on the upper part of the lower pressure plate 39 to cooperate with the pressure column 36 to exert pressure on the bonding component 300 to bond the seed crystal 130 to the seed crystal holder. 100 on. The seed crystal holder 100 and the seed crystal 130 can be placed in the bonding assembly 300, and the vacuum is controlled by other components inside the seed crystal bonding device 30 (for example, the vacuum assembly 32, the pressure column 36, the heating assembly 38 and the lower pressure plate 39). The cavity 31 evacuates the vacuum and applies pressure to the bonding assembly 300 to bond the seed crystal 130 to the seed crystal holder 100 to perform crystal growth.

In some embodiments, the supporting component 310 includes a first pressing member 380 and a second pressing member 390 , and the pressing member 320 includes a first pressing plate 322 . The second pressing part 390 is nested with the first pressing part 380. During the bonding and fixing process of the seed crystal 130, the seed crystal 130 is placed on the upper surface of the second pressing part 390, and the seed crystal holder 100 is placed on the upper surface of the seed crystal 130. , the first pressure plate 322 can apply pressure to the seed crystal holder 100, so that the seed crystal 130 can be bonded to the seed crystal holder 100.

The side wall of the first pressing member 380 may include at least one first vent hole 383 . At least one first exhaust hole 383 may penetrate horizontally through the side wall of the first pressing member 380 . At least one first exhaust hole 383 may be evenly and symmetrically distributed on the side wall of the first pressing member 380 . At least one first exhaust hole 383 may be located at the same height in the vertical direction.

As shown in FIG. 13 , the first pressing member 380 may be in the shape of a cylinder with an internal cavity 381 . For example, a cylinder, cube or polygonal prism with an internal cavity. The shape of the internal cavity of the first pressing member 380 may be a cylinder, a cube or a polygonal prism. The shape of the second pressing member 390 may be a cylinder, a cube or a polygonal prism. The shape and/or size of the internal cavity of the first pressing part 380 is adapted to the shape and/or size of the second pressing part 390, so that the second pressing part 390 can be placed inside the first pressing part 380 without causing significant damage. Movement (e.g., the movable amount is less than a preset threshold). Specifically, the shape and/or size of the internal cavity of the first pressing member 380 may be adapted to the shape and/or size of the second pressing member 390 . The shape of the outer wall of the first pressing member 390 is consistent or substantially consistent, and the size of the internal cavity of the first pressing member 380 is slightly larger than the size of the outer wall of the second pressing member 390, and the size of the internal cavity of the first pressing member 380 is the same as that of the second pressing member 390. The difference in size of the outer walls is less than a first preset size threshold (eg, 3 mm). The first preset size threshold can be a default value, or can be adjusted according to different situations. For example, if the shape of the outer wall of the second pressing part 390 is a cylinder, then the shape of the internal cavity of the first pressing part 380 is also a cylinder, and the diameter of the internal cavity of the first pressing part 380 is slightly larger than that of the second pressing part 390 The diameter of the outer wall (for example, the diameter of the outer wall of the second pressing part 390 is 15 cm, and the diameter of the internal cavity of the first pressing part 380 is 15.3 cm).

By configuring the shape and/or size of the internal cavity of the first pressing member 380 to match the shape and/or size of the second pressing member 390, The second pressing part 390 can be placed in the first pressing part 380 without significant movement, and the nested connection between the first pressing part 38 and the second pressing part 390 is relatively stable.

In some embodiments, the bottom of the first pressing member 380 includes a second through hole 382, and the bottom of the second pressing member 390 includes a first protrusion 391. The first protrusion 391 and the second through hole 382 cooperate with each other to realize the first pressing member. 380 and the nested connection of the second pressing piece 390.

As shown in FIG. 13 , the shape of the second through hole 382 may be a cylinder, a cube or a polygonal prism. To facilitate installation, the second through hole 382 may be cylindrical. In some embodiments, the diameter of the second through hole 382 may include 5 mm to 150 mm. In some embodiments, the diameter of the second through hole 382 may include 8mm-140mm. In some embodiments, the diameter of the second through hole 382 may include 10 mm-130 mm. In some embodiments, the diameter of the second through hole 382 may include 20 mm-120 mm. In some embodiments, the diameter of the second through hole 382 may include 30mm-110mm. In some embodiments, the diameter of the second through hole 382 may include 40mm-100mm. In some embodiments, the diameter of the second through hole 382 may include 50mm-90mm. In some embodiments, the diameter of the second through hole 382 may include 60mm-80mm. In some embodiments, the diameter of the second through hole 382 may include 70mm-75mm.

The shape of the first protrusion 391 may be a cylinder, a cube or a polygonal prism. The first protrusion 391 and the second through hole 382 may be disposed concentrically. The shape and/or size of the second through hole 382 is adapted to the shape and/or size of the first protrusion 391 such that the first protrusion 391 can be placed in the second through hole 382 without significant movement (eg, The movable amount is less than the preset threshold). Specifically, the shape and/or size of the second through hole 382 is adapted to the shape and/or size of the first protrusion 391. The shape of the first protrusion 391 is consistent or substantially consistent with the shape of the second through hole 382. , and the size of the second through hole 382 is slightly larger than the size of the first protrusion 391 and the difference between the size of the second through hole 382 and the size of the first protrusion 391 is less than the second preset size threshold (eg, 3 mm). The second preset size threshold can be a default value, or can be adjusted according to different situations. For example, if the first protrusion 391 is in the shape of a cylinder, then the second through hole 382 is also in the shape of a cylinder, and the diameter of the second through hole 382 is slightly larger than the diameter of the first protrusion 391 (for example, the first protrusion 391 is in the shape of a cylinder). 391 has a diameter of 5 cm, and the second through hole 382 has a diameter of 5.3 cm).

By configuring the shape and/or size of the second through hole 382 to match the shape and/or size of the first protrusion 391, the second pressing member 390 can be placed in the first pressing member 380 and the first protrusion 391 Cooperating with the second through hole 382, the first pressing member 380 and the second pressing member 390 are nested and connected, thereby making the overall structural connection of the bonding assembly 300 more stable.

In some embodiments, when the cross-section of the first exhaust hole 383 is circular, the cross-sectional diameter of the first exhaust hole 383 may include 0.01mm-10mm. In some embodiments, when the cross-section of the first exhaust hole 383 is circular, the diameter of the first exhaust hole 383 may include 0.1mm-9mm. In some embodiments, when the cross-section of the first exhaust hole 383 is circular, the diameter of the first exhaust hole 383 may include 1 mm to 8 mm. In some embodiments, when the cross-section of the first exhaust hole 383 is circular, the diameter of the first exhaust hole 383 may include 2 mm to 7 mm. In some embodiments, when the cross-section of the first exhaust hole 383 is circular, the diameter of the first exhaust hole 383 may include 3 mm to 6 mm. In some embodiments, when the cross-section of the first exhaust hole 383 is circular, the diameter of the first exhaust hole 383 may include 4 mm to 5 mm. By reasonably setting the size of the first exhaust hole 383, the exhaust effect during the bonding and fixing process of the seed crystal 130 can be enhanced, thereby improving the bonding and fixing effect and improving the quality of the prepared crystal.

In some embodiments, after the first pressure part 380 and the second pressure part 390 are nested and connected, the vertical distance between the first exhaust hole 383 and the upper surface of the second pressure part 390 is in the range of 0.2-5 mm. In some embodiments, after the first pressure part 380 and the second pressure part 390 are nested and connected, the vertical distance between the first exhaust hole 382 and the upper surface of the second pressure part 390 may be in the range of 0.5mm-4.5mm. . In some embodiments, after the first pressing part 380 and the second pressing part 390 are nested and connected, the vertical distance between the first exhaust hole 383 and the upper surface of the second part 390 may be in the range of 1 mm to 4 mm. In some embodiments, after the first pressure part 380 and the second pressure part 390 are nested and connected, the vertical distance between the first exhaust hole 383 and the upper surface of the second pressure part 390 may be in the range of 2 mm-3 mm. By controlling the vertical distance between the first exhaust hole 383 and the upper surface of the second pressing member 390, the exhaust effect during the bonding and fixing process of the seed crystal 130 can be enhanced, thereby improving the bonding and fixing effect and improving the quality of the prepared crystal.

In some embodiments, the side wall of the second pressing member 390 includes at least one second vent hole 393 . As shown in FIG. 13 , at least one second exhaust hole 393 can penetrate horizontally through the side wall of the slot 392 on the second pressing member 390 , and the slot 392 is used to place the seed crystal 130 . At least one second exhaust hole 393 may be evenly and symmetrically distributed on the side wall of the slot 392, and at least one second exhaust hole 393 may be located at the same height in the vertical direction.

The first exhaust hole 383 at least partially corresponds to the second exhaust hole 393. The first exhaust hole 383 at least partially corresponds to the second exhaust hole 393. The first pressure member 380 and the second pressure member 390 may be nested. After connection, part or all of the first exhaust hole 383 and the second exhaust hole 393 overlap. Alternatively, after the first pressure member 380 and the second pressure member 390 are nested and connected, the first exhaust hole 383 and the second exhaust hole 393 may overlap. The two exhaust holes 393 are arranged concentrically. The size of the first exhaust hole 383 and the size of the second exhaust hole 393 may be the same or different.

In some embodiments of this specification, the first exhaust hole 383 and the second exhaust hole 393 at least partially correspond, which can improve the exhaust effect during the bonding process of the seed crystal 130 and help improve the quality of the prepared crystal.

In some embodiments, the cross-sectional diameter of the second exhaust hole 393 may include 0.01 mm to 10 mm to improve the exhaust effect during the bonding process of the seed crystal 130 . In some embodiments, when the cross-section of the second exhaust hole 393 is circular, the diameter of the second exhaust hole 393 may include 1 mm to 8 mm. In some embodiments, when the cross-section of the second exhaust hole 393 is circular, the diameter of the second exhaust hole 393 may include 2 mm to 7 mm. In some embodiments, when the cross-section of the second exhaust hole 393 is circular, the diameter of the second exhaust hole 393 may include 3 mm to 6 mm. In some embodiments, when the cross-section of the second exhaust hole 393 is circular, the diameter of the second exhaust hole 393 may include 4mm-5mm.

In some embodiments, the vertical distance between the second exhaust hole 393 and the upper surface of the second pressing member 390 is in the range of 0.2 mm to 5 mm to improve the exhaust effect during the bonding process of the seed crystal 130 . In some embodiments, the vertical distance between the second exhaust hole 393 and the upper surface of the second pressing member 120 may be in the range of 0.5mm-4.5mm. In some embodiments, the vertical distance between the second exhaust hole 393 and the upper surface of the second pressing member 390 may be in the range of 1 m to 4 m. In some embodiments, the vertical distance between the second exhaust hole 393 and the upper surface of the second pressing member 390 may be in the range of 2m-3m.

In some embodiments, the height of the second pressing part 390 may be smaller than the height of the first pressing part 380, so that after the second pressing part 390 and the first pressing part 380 are nested and connected, the second pressing part 390 may be located on the first pressing part 380. In the internal cavity 381 of the pressing member 380.

In some embodiments, the seed crystal holder 100 and the first pressing member 380 may be threaded. The upper part of the side wall of the internal cavity 381 of the first pressing member 380 may be provided with a threaded structure, and the side wall of the seed crystal holder 100 may be provided with a threaded structure. After the seed crystal holder 100 and the first pressing part 380 are threadedly connected, the second pressing part 390 can be located in the cavity surrounded by the seed crystal holder 100 and the first pressing part 380 .

In some embodiments, the bottom of the first pressure plate 322 includes a second protrusion 3221, and the upper part of the seed crystal holder 100 includes a second groove 3222. The second protrusion 3221 and the second groove 3222 cooperate to realize the first pressure plate 380 and Seed crystal holder 100 connection.

The shape of the second protrusion 3221 may be a cylinder, a cube or a polygonal prism. The side wall of the second protrusion 3221 may be provided with a threaded structure, the inner wall of the second groove 3222 may be provided with a threaded structure, and the second protrusion 3221 and the second groove 3222 may be threadedly connected. By arranging the second groove 3222 and the second protrusion 3221 to be threadedly connected, the second groove 3222 and the second protrusion 3221 cooperate with each other to realize the connection between the first pressure plate 322 and the seed crystal holder 100, thereby realizing the operation at different temperatures. Or the seed crystal 130 and the adhesive are extruded and exhausted in stages under different pressures to better bond the seed crystal 130 to the seed crystal holder 100 .

In some embodiments, the support component 310 may further include an annular base 311 and a cover 312, and the seed crystal holder 100 may be placed on the annular base 311. The annular base 311 may be cylindrical, and the diameter of the annular base 311 may be greater than or less than the maximum diameter of the seed crystal holder 100 (ie, the diameter of the seed crystal bonding surface 111). When the diameter of the annular base 311 is larger than the maximum diameter of the seed crystal holder 100, the seed crystal bonding surface 111 can be placed stably on the annular base 311. When the diameter of the annular base 311 is smaller than the maximum diameter of the seed crystal holder 100, the outer surface of the seed crystal holder 100 can be placed on the annular base 311. The cover 312 may also be cylindrical. As shown in FIG. 14 , the cover 312 includes an annular side wall 3121 and a cover plate 3122 . The side wall 3121 can be set outside the annular base 311 . In some embodiments, the inner wall of the side wall 3121 may fit with the outer wall of the annular base 311 . The cover plate 3122 can be cylindrical with a hollow interior, located at the upper end of the annular base 311 as shown in Figure 14, and the cross-sectional area of the cover plate 3122 along the axis A perpendicular to the seed crystal holder 100 is larger than the bottom surface of the annular base 311 along the axis perpendicular to the seed. The cross-sectional area of the axis A of the crystal holder 100. The cover 312 can apply pressure toward the annular base 311 to the seed crystal 130 attached to the seed crystal holder 100 . In some embodiments of this specification, the seed crystal holder 100 is fixed through the annular base 311 and at the same time, pressure is applied to the seed crystal 130 through the cover 312 to press the seed crystal 130 toward the seed crystal holder 100, thereby achieving quick and convenient removal of the seed crystal 130. bonding.

In some embodiments, the seed bonding device 30 may further include a first connecting member 331 and a second connecting member 332, wherein the first connecting member 331 may be provided on the annular base 311 and the second connecting member 332 may be provided on the annular base 311. On the cover 312.

The first connecting member 331 may be detachably connected to the second connecting member 332. As shown in FIG. 14 , the first connecting member 331 may be a snap ring, a hook, a snap block or other structures located on the side wall of the annular base 311 . The second connecting member 332 may include a positioning protrusion 3321 and a buckle 3322. The positioning protrusion 3321 may be disposed on the lower surface or side surface of the side wall 3121 of the cover 312 as shown in FIG. 14 for connecting the second connecting member 332 is fixed on the cover 312. The buckle 3322 can be driveably connected to the fixing protrusion 3321, and the buckle 3322 can be buckled in the first connecting piece 331 to connect the first connecting piece 331 with the second connecting piece 332. At this time, the cover The cover plate 3122 of 312 exerts pressure on the seed crystal 130 on the seed crystal holder 100 to bond the seed crystal 130 . When the buckle 3322 is disengaged from the first connecting member 331, the first connecting member 331 and the second connecting member 332 are disengaged.

In some embodiments, the first connecting member 331 and the second connecting member 332 may be connecting ropes. One end of the first connecting member 331 is wound around the outer peripheral side of the annular base 331 , and one end of the second connecting member 332 is wound around the cover 312 The lower surface or side surface of the side wall 3121, the other end of the first connecting member 331 is connected to the other end of the second connecting member 332.

The seed bonding device 30 may include a plurality of first connecting members 331 and a plurality of second connecting members 332, wherein the plurality of first connecting members 331 and the plurality of second connecting members 332 cooperate with each other in a one-to-one correspondence. As shown in FIG. 14 , the seed bonding device 30 may include two first connecting members 331 and two second connecting members 332 , wherein each first connecting member 331 cooperates with a second connecting member 332 respectively.

Some embodiments of this specification use the first connecting member 331 and the second connecting member 332 to facilitate quick connection of the cover 312 and the annular base 311, thereby applying pressure to the seed crystal holder 100. In addition, configuring the first connecting member 331 and the second connecting member 332 to be detachably connected can avoid misalignment of the seed crystal holder 100 and the seed crystal 130 caused by fixed connection, thereby improving the bonding effect.

In some embodiments, the annular base 311 may also be provided with a locking structure 340 . The locking structure 340 can be used to fix the seed crystal holder 100 to the annular base 311 to improve the stability of the seed crystal holder 100 during the crystal growth process and improve the quality of crystal formation. For example, the locking structure 340 may include a latch, and the seed crystal holder 130 and the side wall 3121 may be provided with latch holes whose positions and sizes match the aforementioned latch pins. The aforementioned latch pins may be inserted into the latch holes to thereby fix the seed crystal holder 100 to on the ring base 311.

In some embodiments, the side of the seed crystal holder 100 away from the seed crystal bonding surface 111 is provided with a connecting threaded hole, and the locking structure 340 includes a lock. Tightening disk 341, locking piece and locking nut 343. As shown in FIG. 15A , the aforementioned locking member may include a tray 3421 , a first threaded rod 3422 and a second threaded rod 3423 . The first threaded rod 3422 and the second threaded rod 3423 may be located on both sides of the tray 3421 in the thickness direction. As shown in FIG. 14 , the first threaded rod 3422 can cooperate with the connecting threaded hole (not shown), be inserted into the connecting threaded hole, and then be threadedly connected with the seed crystal holder 100 . In some embodiments, a threaded hole (not shown) may be provided in the tray 3421 so as to be threadably connected to the first threaded rod 3422 to support the side of the seed crystal holder 100 away from the seed crystal bonding surface 111 . In other embodiments, the first threaded rod 3422 can be fixed to the tray 3421 by bonding, welding or other fixed connection methods. The second threaded rod 3423 can be located on the side of the tray 3421 away from the seed bonding surface 111 and is threadedly connected to the tray 341 . The locking disk 341 may be located on the side of the tray 3421 away from the seed crystal bonding surface 111 , and the locking disk 341 may be a disk that fits the inner wall of the annular base 311 . The locking plate 341 may be provided with a mounting hole, and the second threaded rod 3423 may pass through the mounting hole and cooperate with the locking nut 343 . The locking nut 343 and the tray 3421 may be respectively located on both sides of the locking plate 341 along the axis direction of the mounting hole (same as the thickness direction of the tray 3421). The axis direction of the mounting hole may be the same as the axis A of the seed crystal holder 100 . In some embodiments of this specification, the connecting threaded hole of the seed crystal holder 100 and the locking disk 341 are connected through a locking piece and fixed by a locking nut 343, so that the seed crystal holder 100 can be fixed on the annular base 311 more stably. At the same time, The locking disk 341 cooperates with the annular base 311 to help improve the concentricity between the seed crystal holder 100 and the seed crystal 130 .

In some embodiments, the tray 341 can be made of elastic material (such as rubber, plastic), which can absorb pressure or friction when the seed crystal holder 100 rotates to achieve a buffering effect and avoid damage to the seed crystal holder during the hot pressing process. Ontology 110.

In some embodiments, a supporting structure 350 can also be provided on the inner wall of the annular base 311 . As shown in FIG. 14 , the aforementioned supporting structure 350 may include an annular connecting plate 351 , an annular supporting plate 352 and an annular supporting protrusion 353 .

The annular connecting plate 351 can be used to connect the inner wall of the annular base 311 . The outer wall of the annular connecting plate 351 can fit with the inner wall of the annular base 311 , and its shape can be adapted to the shape of the inner wall of the annular base 311 . For example, the inner wall of the annular base 311 is cylindrical, and correspondingly, the annular connecting plate 351 is a ring. The inner wall of the annular base 311 may be provided with a snap-in groove that matches the annular connecting plate 351, and the annular connecting plate 351 is embedded in the aforementioned snap-in groove.

The shape of the annular supporting plate 352 can be adapted to the shape of the annular connecting plate 351. For example, when the annular connecting plate 351 is a circular ring, correspondingly, the annular supporting plate 352 can be a circular ring. The outer ring of the annular supporting plate 352 is connected to the annular connecting plate 351, and the inner ring is provided with an annular supporting protrusion 353.

The annular supporting protrusion 353 can be used to support the seed crystal holder 100, and its cross section can be semicircular or other shapes (eg, inverted cone). The aforementioned annular supporting protrusion 353 can be made of elastic material (such as rubber), which can absorb pressure or friction when the seed crystal holder 100 rotates to achieve a buffering effect and help protect the seed crystal holder during the hot pressing process. Ontology 110.

Some embodiments of this specification help to support the seed crystal holder 100 more stably by setting the supporting structure 350, effectively reducing the deflection of the seed crystal holder 100 after being pressed. The annular supporting protrusion 353 is conducive to matching different tapers. The seed crystal holder 100 is used for support.

Glue will be used when the seed crystal 130 and the seed crystal holder 100 are bonded. The viscous glue will generate bubbles during the bonding process. In some embodiments, the seed crystal bonding surface 111 can be provided with a coating, and the coating can be a thermoplastic (such as polytetrafluoroethylene), which can maintain the smoothness of the seed crystal bonding surface 111 and thereby enable better drainage. Bubbles produced during extrusion.

In some embodiments, the seed bonding device may further include a bubble removal device. In some embodiments, a bubble removal device may be provided on the cover 312 , and the aforementioned bubble removal device may be used to remove bubbles between the seed crystal 130 and the seed crystal holder 100 . The bubble removal device may be provided between the cover 312 and the seed crystal holder 100 . In other embodiments, the bubble removal device may include a device that drives the seed crystal holder to rotate (such as the rotational driving member 370 shown in FIG. 16 below. For more information about the rotational driving member 370, please refer to FIG. 16 and its related description). When the bubble removal device includes the rotary driving member 370 shown in FIG. 16 below, the seed crystal holder 100 that has been bonded to the seed crystal 130 can be removed from the annular base 311 and then placed on a driving seed crystal holder. On a 100-degree rotating device, under the pressure provided by the cover 312, the seed crystal holder 100 rotates, so that the air bubbles between the seed crystal holder 100 and the seed crystal 130 can be discharged.

In some embodiments of this specification, bubbles can be removed through a bubble removal device to improve the bonding effect between the seed crystal 130 and the seed crystal holder 100 .

As shown in FIG. 14 and FIG. 15B , the bubble removal device may also include a slot 361 , an insert plate 362 and a roller 363 . The slot 361 is located on the cover 312 for accommodating the plug-in board 362 and limiting the movement direction of the plug-in board 362 . The plug-in board 362 is strip-shaped, and its size is adapted to the slot 361 . Board 362 may be located within slot 361. The roller 363 can be disposed at one end of the insert plate 362 . The diameter of the aforementioned roller 363 may be smaller than the height of the slot 361 , so that the roller 363 can move within the slot 361 . The aforementioned roller 363 can be made of elastic material (such as rubber) to avoid damage to the seed crystal 130 or the seed crystal holder 100 when it moves.

Before the seed crystal 130 is bonded, the insert plate 362 can support the seed crystal holder 100. After the seed crystal 130 is bonded, the insert plate 362 can move (for example, left and right) in the slot 361 to drive the roller 363 to roll the seed. Crystal 130. In some embodiments of this specification, the insert plate 362 drives the roller 363 to roll the seed crystal 130, thereby squeezing out the bubbles generated during the bonding process of the seed crystal 130 and improving the bonding quality between the seed crystal 130 and the seed crystal holder 100.

As shown in FIG. 14 and FIG. 15B , the other end of the inserting plate 362 may also be provided with a pull ring 364 . After the seed crystal 130 is bonded, pulling the pull ring 364 can drive the inserting plate 362 to move, thereby driving the roller 363 to roll the seed crystal 130, thereby squeezing the bubbles more conveniently.

In some embodiments, the bubble removal device may further include a rolling rotary member (not shown in the figure). The rolling rotating member can exert a certain pressure on the seed crystal 130 in a direction toward the seed crystal bonding surface 111 . At the same time, the rolling rotating member can also rotate on a fixed axis (such as axis A). By applying pressure to the seed crystal 130 while rotating, the gas between the seed crystal 130 and the seed crystal holder 100 can be discharged. In the following embodiments, the surface of the rolling rotating member in contact with the seed crystal 130 may be provided with balls, rollers or rollers, etc., to reduce friction between the rolling rotating member and the seed crystal 130 .

In some embodiments, as shown in FIG. 16 , the support member 310 may include a support plate 313 . The aforementioned support plate 313 is used to support the seed crystal 130 and the seed crystal holder 100 . In some embodiments, the support plate 313 may be in the shape of a disc, a square disc, or the like. The cross-sectional area of the support plate 313 along the axis A perpendicular to the seed crystal holder 100 is larger than the cross-sectional area of the seed crystal holder 100 or the seed crystal 130 along the axis A perpendicular to the seed crystal holder 100 . The seed crystal 130 is located between the support plate 313 and the seed crystal holder 110 .

In some embodiments, the seed bonding device 30 may further include a support frame 314 and a plurality of pressure driving members provided on the support frame 314 . The support plate 313 is provided on the aforementioned support frame 314 . The pressure driving member may include a pump device (eg, an electric pump) for driving the pressure member 320 to apply pressure to the seed crystal holder 100 . In some embodiments, the pressure driving member may also include a pneumatic pressure driving member or a hydraulic pressure driving member.

In some embodiments, the seed bonding device 30 may include multiple bonding assemblies 300 , and the plurality of pressure driving members are respectively connected to the pressure applying components 320 in each bonding assembly 300 , so that the pressure applying components 320 Pressure is applied to the seed holder 100 toward the support plate 313 . When the pressure driving member applies pressure to the seed crystal holder 100, the support plate 313 can support the seed crystal holder 100 and limit its position to prevent the seed crystal holder 100 from being displaced. At the same time, multiple bonding components 300 can be bonded simultaneously. Multiple groups of bonding to improve bonding efficiency. As shown in Figure 16, the seed crystal bonding device 30 may include three bonding components 300, which are spaced apart along the vertical direction. The vertical direction is the same as the axial direction of the seed crystal holder 100. Each bonding component 300 has a pair of When the seed crystal 130 of one seed crystal holder 100 is bonded, the pressure driving member can simultaneously drive the pressure components 320 of three bonding assemblies 300 to press the corresponding seed crystal holder 100, thereby realizing multiple groups at the same time. Bonding of seed crystal 130.

As shown in FIG. 16 , the support frame 314 may include a plurality of support rods 315 extending along the aforementioned vertical direction. The support rods 315 are arranged at intervals along the circumferential direction of the support plate 313 . A plurality of pressure driving members can be provided on at least one support rod 315, and the plurality of pressure driving members are spaced apart along the vertical direction, and the plurality of bonding assemblies 300 are spaced apart along the vertical direction, thereby facilitating multiple The pressure driving member applies pressure at one time to bond multiple bonding components 300 and reduces space occupation.

In some embodiments, the support rod 315 provided with the pressure driving member may also be provided with a pressure transmission medium channel, and at least one pressure driving member may be connected to the pressure transmission medium channel through the valve 316 . The aforementioned valve 316 may be provided on a support rod 315 provided with a pressure driver. By opening the valve 316, the seed crystal bonding device 30 can transmit the air pressure or hydraulic pressure generated by the pressure driving component through the pressure transmission medium channel, so as to transmit the air pressure or hydraulic pressure to the pressure application component 320 to apply pressure on the seed crystal holder 100. .

In some embodiments, the support plate 313 is rotatably disposed on the support frame 314 , and the rotation axis of the support plate 313 can be parallel to the support rod 314 . The seed bonding device 30 may further include a rotational driving member 370 , which is connected to the support plate 313 to drive the support plate 313 to rotate. For example, the rotation driving member may include a motor, and the motor may drive the support plate 313 to rotate. For another example, the rotary driving member 370 may include a pneumatic driving member located at the bottom of the support plate 313. The pneumatic driving member may be a circular turntable. The bottom of the pneumatic driving member may be connected to a gas compressor. The gas compressor may transmit compressed air to the pneumatic driving member. The pneumatic driving member is driven to rotate, thereby driving the support plate 313 to rotate.

In some embodiments of this specification, by rotating the support plate 313 on the support frame 314, the rotation of the support plate 313 can drive out the air bubbles at the bonding point of the seed crystal 130, which can effectively prevent the seed crystal 130 from detaching due to weak bonding. .

In some embodiments, rotational drive 370 may include a magnetic element, a power source 371 and a magnetic drive. The magnetic element can be fixed on the support plate 313. A magnetic driver can be used to drive the magnetic element in rotation. In some embodiments, the magnetic drive may be a circular turntable. The magnetic driving member can be fixed on the output end of the power source 371, and the magnetic driving member is magnetically coupled with the magnetic element. The power source 371 can convert other energy sources into kinetic energy for driving the magnetic driving member to rotate. In some embodiments of this specification, the power source 371 drives the magnetic driving component to rotate, and then drives the magnetic element to drive the support plate 313 to rotate. This can more conveniently control the rotation of the support plate 313 and reduce friction and vibration when the support plate 313 rotates.

In some embodiments, the pressure component 320 may include a limiting pressure plate 317 provided on the support frame 314 . As shown in FIG. 16 , in some embodiments, the limiting pressure plate 317 is a disc with a protrusion at the bottom, and the protrusion is connected to the seed crystal holder 110 (for example, threaded or snap-fitted).

In some embodiments, the pressure driving member may include a first sub-driving member 381 and a second sub-driving member 381 . The first sub-driving member 381 and the second sub-driving member 382 can be disposed on different supporting rods 314 to adjust the distance between different positions of the limiting pressure plate 317 and the supporting plate 313 . The structures of the first sub-driving member 381 and the second sub-driving member 382 may be the same, for example, they may both be movable support bases. The first sub-driving member 381 and the second sub-driving member 382 may be arranged at intervals along the circumference of the limiting pressure plate 317 , and both the first sub-driving member 381 and the second sub-driving member 382 are connected to the limiting pressure plate 317 .

In some embodiments of this specification, the first sub-driving member 381 and the second sub-driving member 381 can apply pressure to the seed crystal holder 100 from different positions, which helps to avoid uneven stress on the seed crystal holder 100 caused by applying pressure from a single position. .

In some embodiments, the seed bonding device 30 may also include a pressure sensor 321, which is used to determine whether each application The pressure exerted by the pressing member 320. As shown in FIG. 16 , in some embodiments, the pressure sensor 321 can be set at the connection point between the support rod 315 and the support frame 314 , and can be used to sense the driving pressure of the pressure driving member and/or the pressure at the valve 316 . In other embodiments, the pressure sensor 321 can also be directly provided on the upper surface of the support plate 313 to directly sense the pressure on the seed crystal holder 100 . Through the pressure sensor 321, the pressure at the seed crystal holder 100 can be sensed directly or indirectly, which helps to better control the bonding process of the seed crystal 130, facilitates timely adjustment when the pressure is too large or too small, and effectively prevents Too much pressure causes the seed crystal 130 to be crushed, or too little pressure causes the bonding quality of the seed crystal 130 to decrease.

In some embodiments, the seed bonding device 30 may further include a controller, and the controller may be connected to the valve 316 and the pressure sensor 321 via signals. In some embodiments, the controller may adjust the opening of valve 316 based on pressure data sensed by pressure sensor 321 . For example, the controller can obtain the pressure data obtained by the pressure sensor 321 in real time. When the pressure data is less than the preset minimum reference pressure, the controller can increase the opening of the valve 316 to improve the bonding effect of the seed crystal 130 ; When the aforementioned pressure data is greater than the preset maximum reference pressure, the controller can reduce the opening of the valve 316 to prevent the seed crystal 130 from being crushed. In some embodiments of this specification, by judging the pressure data sensed by the pressure sensor 321, and then automatically adjusting the opening of the valve 316, it helps to regulate the pressure of each bonding component 300, so that each bonding component 300 is stressed. Balance can effectively prevent the seed crystal 130 from being crushed due to excessive pressure, or affecting the bonding effect of the seed crystal 130 due to too small pressure.

This specification also provides a crucible 400. Crucible 400 may be used to generate gas phase components required for crystal growth. The raw materials in the crucible 400 (eg, the melt 140) can volatilize into gas phase components under the action of the temperature field and move to the upper seed crystal 130 bonded to the seed crystal holder 100, thereby achieving crystal growth.

In some embodiments, as shown in FIG. 17 , crucible 400 may include a crucible body 450 , a drive assembly 460 , and a temperature field holding disk 410 .

The crucible body 450 is used to carry the melt 140 for crystal growth. The crucible body 450 may be in a cylindrical shape, and the melt 140 may be disposed in the crucible body 450. By heating the crucible body 450, the melt 140 is heated, and the seed crystal 130 in the seed crystal holder 100 is in contact with the melt 140, thereby realizing crystallization. grow.

Thermal field holding disk 410 may be used to maintain the thermal field.

The driving assembly 460 can drive the crucible body 450 to rotate around the axis E of the crucible body 450 relative to the temperature field holding disk 410 . The driving assembly 460 may include a driving source and a connecting mechanism 420. The connecting mechanism 420 may be connected between the driving source and the bottom of the crucible body 450. The driving source may be located at the bottom of the connecting mechanism 420 to provide driving force for the driving assembly 460. The aforementioned driving source may include a combination of various driving devices and transmission devices, and the driving device may include a motor, a hydraulic cylinder, a pneumatic cylinder, etc.

The temperature field holding disk 410 may be disposed on the connection structure 420 and located between the driving source and the bottom of the crucible body 450 . In some embodiments, the temperature field holding disk 410 may be disk-shaped or otherwise shaped. In some embodiments, the material of the temperature field holding disk 410 is at least one of mullite, corundum, and alumina. The above material settings can make the temperature field holding disk 410 adaptable to high temperature environments, helping to improve the temperature field maintenance. Disk 410 stability.

The thermal field holding disk 410 can keep the thermal field stationary when the crucible 400 rotates, so as to prevent its deflection and tilt from causing contact with the coil and ignition, making it impossible to continue to grow crystals. In addition, when the crucible 400 moves up and down along the axis E of the crucible body 450, the temperature field holding disk 410 can also remain relatively stationary with the crucible 400 to maintain the temperature stability of the crucible 400 and ensure the quality of crystal formation.

Some embodiments of this specification can drive the crucible body 450 to rotate around the axis E of the crucible body 450 by arranging the driving assembly 460, so that the crucible 400 and the seed crystal 130 can rotate in opposite directions, and the crucible 400 and the seed crystal 130 can also rotate alternately, etc. The steps formed on the crystal are washed in different directions to reduce the width and size of the steps, making the crystal flatter and reducing the inclusion of flux.

The rotation of the crucible body 450 can make the crystal flatter and reduce the inclusion of flux, greatly improving the overall mass transfer of the melt, thereby effectively increasing the thickness of the crystal.

As shown in FIG. 18 , the connection mechanism 420 may include a rotating column 421 and a first supporting tray 422 . The first supporting tray 422 is provided at one end of the rotating column 421 , and the driving source is connected to the other end of the rotating column 421 . As shown in FIG. 18 , the first supporting tray 422 may be cylindrical for supporting the crucible body 450 , and the rotating column 421 may be cylindrical for driving the first supporting tray 422 to rotate. The rotating column 421 can be connected to the driving source through couplings, bearings and other connecting parts. The material of the first supporting tray 422 can be graphite, and the material of the rotating column 421 can be high-temperature resistant materials such as mullite, corundum, and alumina. In some embodiments of this specification, the driving source drives the rotating column 421 to rotate, which can further drive the crucible body 450 in the first supporting tray 422 to rotate.

As shown in FIG. 18 , the first supporting tray 422 may include a plurality of concentrically arranged stepped grooves. The aforementioned plurality of stepped grooves are all concentric with the rotating column 421, and their sizes are adapted to the sizes of a plurality of different crucible bodies 450. In some embodiments of this specification, multiple stepped grooves arranged concentrically can be used to position crucible bodies 450 of various sizes, and crucible bodies 450 of different sizes and shapes can be replaced according to actual conditions to prevent the crucible body 450 from being separated from the first bearing. The tray 422 is offset concentrically. In some embodiments, the plurality of stepped grooves on the first supporting tray 422 may also include a limiting structure (for example, a rubber ring) to prevent the crucible body 450 from sliding during rotation.

In some embodiments, the connection mechanism 420 further includes a second supporting tray 423 . The second supporting tray 423 may be used to support the temperature field holding tray 410 . The material of the second tray 423 may be at least one of high temperature resistant materials such as mullite, corundum, and alumina.

As shown in FIG. 19 , in some embodiments, the second supporting tray 423 may be annular, and the inner ring of the second supporting tray 423 is fixed to the outer wall of the rotating column 421 . The second tray 423 may be located between the first tray 422 and the driving source. In some embodiments, the second supporting tray 423 can be located at the bottom of the temperature field holding plate 410 and is connected to the temperature field holding plate 410 through a ball structure 424. The second supporting tray 423 may include a plurality of ball structures 424. The plurality of ball structures 424 may be fixed on the second supporting tray 423 through one or more positioning devices. The plurality of ball structures 424 may be axially centered around the second supporting tray 423. Evenly distributed. As shown in FIG. 19 , the ball structure 424 can be arranged as two groups of rings with different radii, taking the center of the second supporting tray 423 as the center of the circle. It is worth mentioning that the material of the thermal field is easily pulverized, has low hardness and stability, and cannot guarantee absolute balance during rotation. Therefore, the thermal field holding disk 410 may be deflected and tilted during rotation, causing it to contact the coil and break. Fire, thus unable to continue to grow crystals. At the same time, it will also destroy the stability within the crucible body 450 and lead to an increase in uncontrollable factors. Some embodiments of this specification connect the second supporting tray 423 and the temperature field holding tray 410 through a ball structure 424, which can maintain the temperature when the rotating column 421 rotates. Keeping the field holding disk 410 stationary helps prevent the increase in uncontrollable factors causing the rotation of the temperature field holding disk 410 .

In some embodiments, the crucible 400 may also include a plurality of telescopic support rods 430. The telescopic support rod 430 can be used to support the temperature field holding plate 410 , and one end of the telescopic supporting rod 430 is connected to the bottom of the temperature field holding plate 410 . As shown in Figure 20A, the telescopic support rod 430 may include a sliding rod 431 and a fixed rod 432. The sliding rod 431 can move up and down along the axis of the telescopic support rod 430. The sliding rod 431 and the fixed rod 431 may be tightened by threads or other locks. Tightening mechanism. One end of the sliding rod 431 away from the fixed rod 432 can be connected to the fourth through hole 411 of the temperature field holding plate 410 . As shown in Figure 20B, the temperature field holding plate 410 may have three fourth through holes 411 evenly distributed around the axial direction of the temperature field holding plate 410. The size of the fourth through holes 411 is adapted to the sliding rod 431, and the sliding rod can pass through The threaded connection or other connection methods pass through the fourth through hole 411 and are fixed in the temperature field holding plate 410 . Some embodiments of this specification use multiple telescopic support rods 430 to prevent the temperature field holding disk 410 from tilting during the rotation of the crucible 400, thereby ensuring normal crystal growth.

In some embodiments, the crucible 400 may also include a connecting ring 440 and a locking mechanism. The aforementioned locking hole 441 cooperates with the locking mechanism to fix the connecting ring 440 to the output shaft of the driving source and the rotating column 421. As shown in Figure 21, the connecting ring 440 can be a hollow cylinder with a side wall provided with a plurality of locking holes 441 axially symmetrical along the connecting ring 440. The connecting ring 440 can be sleeved on the output shaft of the driving source and Outside the other end of the rotating column 421 (that is, the end close to the driving source). The locking mechanism can be a screw, and the size of the locking hole 441 is adapted to the locking mechanism. Through the cooperation of the locking mechanism and the locking hole 441, the connecting ring 440 can be fixed to the output shaft of the driving source and the rotating column 421. In some embodiments of this specification, the output shaft of the driving source and the rotating column 421 can be fixed to the connecting ring 440 through the connecting ring 440 and the locking mechanism. The driving source can stably drive the rotating column 421 to rotate, which helps to prevent the rotating column 421 from rotating. when disconnected from the driving source.

In some embodiments, the seed crystal holder 110 can undergo crystal growth through the crystal growth method described in the process 2200 shown in FIG. 22 .

Figure 22 is an exemplary flow chart of a crystal growth method according to some embodiments of the present specification. In some embodiments, this method may be accomplished using a seed holder (such as the one shown in Figure 10). As shown in Figure 22, process 2200 includes the following steps.

Step 2210: Bond the seed crystal to the seed crystal bonding surface of the seed crystal holder body.

The seed crystal can be bonded to the seed crystal bonding surface. In some embodiments, the seed crystal can be fixed by graphite paper. For more information on the seed crystal bonding surface and graphite paper, please refer to the relevant parts of the previous article, such as Figure 1, Figure 10, etc.

In some embodiments, bonding the seed crystal to the seed crystal bonding surface of the seed crystal holder body includes: making the diameter of the seed crystal slightly larger than the diameter of the seed crystal holder body, and making the seed crystal slightly protrude away from the protective support. One side of the connecting rod.

In some preferred embodiments, when the seed crystal is bonded to the seed crystal bonding surface of the seed crystal holder body, the diameter of the seed crystal is 5 mm-10 mm larger than the diameter of the seed crystal holder body, and the seed crystal protrudes away from the protective support. The surface of one side of the connecting rod is 0.1mm-0.2mm; in addition, the protective bracket can also wrap the seed crystal to achieve axial and radial temperature gradient control; the protective bracket also has a protective effect on the seed crystal. For example, after the seed crystal sinks into the protective bracket, the seed crystal is not stressed when it is pulled, thus preventing the seed crystal from falling off.

In some embodiments of this specification, when bonding the seed crystal, the diameter of the seed crystal is slightly larger than the diameter of the seed crystal support body, and the seed crystal slightly protrudes from the side surface of the protective support away from the connecting rod, which can ensure that the seed crystal Full contact with the melt.

In some embodiments, when the seed crystal holder has components such as the protective bracket 180 and the second protective cover 182 shown in Figure 10, the step of bonding the seed crystal to the seed crystal bonding surface of the seed crystal holder body can be The method further includes attaching the seed crystal to an end of the second protective sleeve 182 away from the connecting rod 120 and bonding it to the seed crystal bonding surface 111 of the seed crystal holder body 110 . This ensures that during the crystal growth process, the second protective cover 182 can effectively prevent volatiles from the melt from entering between the seed crystal and the protective support 180 and between the seed crystal support body 110 and the protective support.

Step 2220: sink the seed crystal holder with the seed crystal attached to it into the melt used for crystal growth in the crucible, and the surface of the side of the seed crystal away from the seed crystal holder body is located at the position with the highest temperature of the melt.

Figure 23 is a schematic diagram of a generated crystal according to some embodiments of the present specification. As shown in Figure 23, the seed crystal holder may be sunk into the melt 2320 for crystal growth in the crucible 400. Among them, melt 2320 refers to the molten state of the raw materials used to generate crystals.

In some embodiments, a surface of a side of the seed crystal away from the seed crystal holder is substantially located at a position with the highest melt temperature. It can be understood that the distance between the surface of the side of the seed crystal away from the seed crystal support and the high temperature line with the highest melt temperature is very small, such as less than 1% of the overall depth of the melt. As shown in Figure 23, the surface of the side of the seed crystal away from the seed crystal support is located at the high temperature line 2310 of the melt. High temperature line 2310 may represent the highest temperature of the melt.

In some embodiments, a portion of the seed holder is located in the melt and another portion of the seed holder is located outside the melt. Referring to Figure 23, a part of the seed crystal holder is located in the melt, and the other part of the seed crystal holder is located outside the melt. It can be understood that exposing part of the seed crystal holder outside the melt can ensure the axial and radial temperature gradient control of the seed crystal holder and ensure better crystal growth. In some embodiments, the seed crystal holder is kept out of contact with the melt as much as possible to avoid volatile matter from adhering to the seed crystal holder, which would make it difficult to separate the crystal holder after crystal growth. However, the seed crystal support should try not to come into contact with the melt, which is actually not conducive to the growth of the crystal. Due to the arrangement of the protective holder 180, especially after the first protective cover 181 and the second protective cover 182 are further provided, volatile matter will not adhere to the seed crystal holder body. After solving this problem, part of the seed crystal holder can be located in the melt and the other part is located outside the melt. The seed crystal can be placed near the high temperature line of the melt, which can ensure better crystal growth.

In some embodiments, before sinking the seed crystal holder with the seed crystal attached into the melt for crystal growth, the method further includes: heating the melt to a preset temperature range. In some preferred embodiments, the preset temperature range for melt heating may be 1720°C to 1780°C. It can be understood that heating the melt to a temperature range of 1720°C to 1780°C can ensure full melting of the melt and facilitate subsequent crystal growth.

Step 2230, use the upward pull method to grow crystals.

In some embodiments, crystals can be grown by a pull-up method.

In some embodiments, the seed holder can rotate around the axis of the connecting rod, and the crucible can rotate around the axis of the crucible; the axis of the connecting rod is parallel to the axis of the crucible.

As shown in Figure 23, the seed crystal holder can rotate around the axis A of the connecting rod, and the crucible can rotate around the axis of the crucible. Among them, the axis of the crucible is parallel to the axis of the connecting rod.

In some embodiments, growing crystals using the upward pulling method further includes: controlling the seed holder and the crucible to rotate in opposite directions. In some embodiments of this specification, by rotating the seed crystal holder and the crucible in opposite directions, the pulling can be performed better and the crystal growth efficiency can be improved.

In some embodiments, the product of the value of the rotation speed of the seed holder and the value of the rotation speed of the crucible is a preset value.

In some preferred embodiments, the product of the value of the rotation speed of the seed holder and the value of the rotation speed of the crucible is 20 or 150.

In some embodiments of this specification, the product of the value of the rotation speed of the seed crystal holder and the value of the rotation speed of the crucible is controlled to be 20 or 150, which can ensure stable, fast, and high-quality growth of the crystal.

In some embodiments, using the upward pulling method to grow crystals includes: keeping the seed crystal holder with the seed crystal attached to sink into the melt for 10 to 30 minutes, and pulling the seeds at a pulling speed of 0.01 mm/h to 0.2 mm/h. Crystal support for crystal growth.

In some preferred embodiments, the pulling speed may be 0.05mm/h.

In some embodiments of this specification, through the above embodiments, it is possible to ensure that the crystal grows under the condition that the melt is stable.

In some embodiments, after the crystal grows for 10 to 30 hours, the crystal is pulled away from the melt at a pulling speed of 30 mm/h to 40 mm/h, and the crystal and the melt surface have a separation height of 15 mm to 25 mm.

It is worth mentioning that after the crystal grows for a period of time, due to corrosion of the crucible wall, evaporation of the melt, etc., the height of the melt level gradually decreases, causing the relative speed of the seed crystal to leave the melt to gradually increase, resulting in slow or even no growth of the crystal. grow. Based on the growth time, pull height and spacing height described in the previous embodiments, the above problems can be better overcome, allowing the crystal to grow better.

In some embodiments, the crystal growth method further includes: after the crystal growth is completed, cutting the seed crystal holder along a cutting plane parallel to the seed crystal bonding surface to separate the seed crystal holder from the crystal. Wherein, the cutting plane covers the seed crystal support body, the protective support and the second protective cover. Due to the arrangement of the protective bracket and the second protective cover, there is no volatile matter attached between the seed crystal and the seed crystal bracket body, and the seed crystal bracket can be easily cut to separate the seed crystal bracket from the crystal.

In some embodiments of this specification, the crystal growth method described in the above embodiments prevents adhesion caused by volatile substances, there is no other substance attached between the seed crystal and the seed crystal holder body, and the diameter of the seed crystal is larger than the seed crystal holder. The main body can easily separate crystals; in addition, the protective bracket can also adjust the axial and radial temperature gradients to ensure stable and efficient growth of seed crystals. Therefore, the crystal growth method described in the embodiments of this specification can obtain crystals efficiently and quickly, and the obtained crystals are easy to separate.

It should be noted that the above description of process 2200 is only for example and illustration, and does not limit the scope of application of this specification. For those skilled in the art, various modifications and changes can be made to process 2200 under the guidance of this description. However, such modifications and changes remain within the scope of this specification.

The basic concepts have been described above. It is obvious to those skilled in the art that the above detailed disclosure is only an example and does not constitute a limitation of this specification. Although not explicitly stated herein, various modifications, improvements, and corrections may be made to this specification by those skilled in the art. Such modifications, improvements, and corrections are suggested in this specification, and therefore such modifications, improvements, and corrections remain within the spirit and scope of the exemplary embodiments of this specification.

At the same time, this specification uses specific words to describe the embodiments of this specification. For example, "one embodiment,""anembodiment," and/or "some embodiments" means a certain feature, structure, or characteristic related to at least one embodiment of this specification. Therefore, it should be emphasized and noted that “one embodiment” or “an embodiment” or “an alternative embodiment” mentioned twice or more at different places in this specification does not necessarily refer to the same embodiment. . In addition, certain features, structures or characteristics in one or more embodiments of this specification may be appropriately combined.

In addition, unless explicitly stated in the claims, the order of the processing elements and sequences, the use of numbers and letters, or the use of other names in this specification are not intended to limit the order of the processes and methods in this specification. Although the foregoing disclosure discusses by various examples some embodiments of the invention that are presently considered useful, it is to be understood that such details are for purposes of illustration only and that the appended claims are not limited to the disclosed embodiments. To the contrary, rights The claims are intended to cover all modifications and equivalent combinations consistent with the spirit and scope of the embodiments of this specification. For example, although the system components described above can be implemented through hardware devices, they can also be implemented through software-only solutions, such as installing the described system on an existing server or mobile device.

Similarly, it should be noted that, in order to simplify the expression disclosed in this specification and thereby help understand one or more embodiments of the invention, in the previous description of the embodiments of this specification, multiple features are sometimes combined into one embodiment. accompanying drawings or descriptions thereof. However, this method of disclosure does not imply that the subject matter of the description requires more features than are mentioned in the claims. In fact, embodiments may have less than all features of a single disclosed embodiment.

In some embodiments, numbers are used to describe the quantities of components and properties. It should be understood that such numbers used to describe the embodiments are modified by the modifiers "approximately", "approximately" or "substantially" in some examples. Grooming. Unless otherwise stated, "about," "approximately," or "substantially" means that the stated number is allowed to vary by ±20%. Accordingly, in some embodiments, the numerical parameters used in the specification and claims are approximations that may vary depending on the desired features of the individual embodiment. In some embodiments, numerical parameters should account for the specified number of significant digits and use general digit preservation methods. Although the numerical ranges and parameters used to identify the breadth of ranges in some embodiments of this specification are approximations, in specific embodiments, such numerical values are set as accurately as is feasible.

Each patent, patent application, patent application publication and other material, such as articles, books, instructions, publications, documents, etc. cited in this specification is hereby incorporated by reference into this specification in its entirety. Application history documents that are inconsistent with or conflict with the content of this specification are excluded, as are documents (currently or later appended to this specification) that limit the broadest scope of the claims in this specification. It should be noted that if there is any inconsistency or conflict between the descriptions, definitions, and/or the use of terms in the accompanying materials of this manual and the content described in this manual, the descriptions, definitions, and/or the use of terms in this manual shall prevail. .

Finally, it should be understood that the embodiments described in this specification are only used to illustrate the principles of the embodiments of this specification. Other variations may also fall within the scope of this specification. Accordingly, by way of example and not limitation, alternative configurations of the embodiments of this specification may be considered consistent with the teachings of this specification. Accordingly, the embodiments of this specification are not limited to those expressly introduced and described in this specification.

Claims

A seed crystal holder, characterized in that it includes a seed crystal holder body and a connecting rod, the seed crystal holder body is fixed on one end of the connecting rod, and the side of the seed crystal holder body away from the connecting rod Equipped with seed crystal bonding surface.
The seed crystal holder according to claim 1, characterized in that the seed crystal holder body includes a hollow first inner cavity, and a channel for cooling medium to circulate is provided in the connecting rod; the channel is connected to the first hollow cavity. An inner cavity is connected.
The seed crystal holder according to claim 2, wherein the seed crystal holder body is provided with a first through hole communicating with the first inner cavity.
The seed crystal holder of claim 2, wherein a cooling medium diffusion structure is provided in the inner cavity.
The seed crystal holder of claim 4, wherein the cooling medium diffusion structure includes a shell, a second inner cavity is formed in the shell, a plurality of diffusion holes are provided on the shell, and the channel Communicated with the second lumen, the diffusion hole communicates with the first lumen and the second lumen.
The seed crystal holder according to claim 2, wherein the seed crystal holder further includes a cooling device, the cooling device delivers the cooling medium to the channel, and the cooling medium flows at a preset flow rate. flow in the channel.
The seed crystal holder of claim 6, wherein the cooling medium is an inert gas, and the preset flow rate is greater than 0.4m/s.
The seed crystal holder according to claim 2, wherein the seed crystal holder further includes a weight-increasing structure, and the weight-increasing structure is connected to the seed crystal holder body.
The seed crystal holder according to claim 2, wherein the seed crystal holder further includes a cooling structure provided on the connecting rod, and the cooling structure cools the cooling medium in the channel.
The seed crystal holder according to claim 1, characterized in that the seed crystal holder further includes a driving mechanism and a stirring mechanism, the other end of the connecting rod is connected to the driving mechanism, and the driving mechanism drives the driving mechanism through the connecting rod. The seed crystal holder body rotates around the axis of the connecting rod;

The stirring mechanism is connected to the seed crystal holder body, and the stirring mechanism stirs the melt used for crystal growth.
The seed crystal holder according to claim 10, wherein the stirring mechanism includes a mounting rod and a stirring paddle, and the stirring paddle is located on a side of the seed crystal bonding surface away from the connecting rod.
The seed crystal holder according to claim 10, characterized in that the number of the stirring mechanisms is multiple, and the plurality of stirring mechanisms are arranged around the seed crystal holder body.
The seed crystal holder of claim 10, wherein the stirring mechanism is made of one or more materials selected from tungsten alloy and high-temperature ceramics.
The seed crystal holder according to claim 1, wherein the seed crystal holder main body includes at least two sub-parts, and each of the at least two sub-parts is provided with a half groove;

The seed crystal holder also includes a locking structure and a snap-in structure, and the snap-in structure is provided at one end of the connecting rod connected to the seed crystal holder body;

The at least two sub-parts are spliced so that the half-slots on each of the at least two sub-parts are spliced into a snap-in slot, and the snap-in structure is snap-fitted in the snap slot;

The locking structure fixes the spliced at least two sub-parts.
The seed crystal holder of claim 14, wherein the at least two sub-parts include a first sub-part and a second sub-part with the same structure; the first sub-part and the second sub-part are so The axis of the connecting rod is arranged symmetrically about the axis of symmetry.
The seed crystal holder according to claim 14, characterized in that the engaging groove has a first groove body and a second groove body arranged along the axial direction of the connecting rod, and the first groove body is larger than the third groove body. The second tank body is closer to the seed crystal bonding surface; the area of the first tank body along the cross-section perpendicular to the axis of the connecting rod is larger than the cross-section of the second tank body along the axis perpendicular to the connecting rod. The area of the clamping structure along the cross-section perpendicular to the axis of the connecting rod is greater than the area of the connecting rod along the cross-section perpendicular to the axis of the connecting rod.
The seed crystal holder according to claim 14, wherein the clamping structure is in the shape of a polyhedron.
The seed crystal holder according to claim 14, characterized in that the locking structure includes an annular groove and a locking ring; the annular groove is arranged around the outer wall of the seed crystal holder body, and the locking ring is sleeved It is arranged outside the spliced at least two sub-parts and inside the annular groove.
The seed crystal holder according to claim 1, wherein the seed crystal holder further includes an annular protective holder, and the protective holder is provided with an accommodation cavity that matches the shape of the seed crystal holder body; The protective bracket is arranged around the seed crystal holder body, and the protective bracket is arranged around one end of the connecting rod connected to the seed crystal holder body.
The seed crystal holder according to claim 19, characterized in that the seed crystal holder further includes an annular first protective sleeve, the first protective sleeve is set outside the connecting rod, and the first protective sleeve Located between the connecting rod and the protective bracket.
The seed crystal holder according to claim 20, wherein the connecting rod includes a first outer diameter section and a second outer diameter section along the axial direction of the connecting rod; the outer diameter of the first outer diameter section is smaller than the outer diameter of the second outer diameter segment, and the first outer diameter segment is closer to the seed crystal holder body than the second outer diameter segment;

The first protective sleeve includes a first inner diameter section and a second inner diameter section along the axial direction of the connecting rod; the outer diameter of the first inner diameter section is smaller than the inner diameter of the second inner diameter section, and the first inner diameter section The second inner diameter segment matches the first outer diameter segment and the second inner diameter segment matches the second outer diameter segment.
The seed crystal holder according to claim 19, characterized in that an annular second protective cover is provided on a side surface of the protective holder away from the connecting rod, and the second protective cover is embedded in the protective holder. inside, and the second protective sleeve is arranged around the accommodation cavity.
The seed crystal holder of claim 22, wherein when a seed crystal is bonded to the seed crystal bonding surface, an end of the second protective sleeve away from the connecting rod is attached to the seed crystal. combine.
The seed crystal holder according to claim 22, characterized in that a first groove is provided on a side surface of the protection holder away from the connecting rod; the diameter of the first groove is larger than that of the accommodation cavity. The diameter of the opening on the side facing away from the connecting rod; the first groove includes a communicating portion communicating with the opening and an annular portion surrounding the communicating portion;

The bottom surface of the annular part and the seed crystal bonding surface are located on the same plane; the annular protective sleeve is provided on the bottom surface of the annular part.
The seed crystal holder of claim 24, wherein the diameter of the first groove is 5 mm to 10 mm larger than the diameter of the opening.
The seed crystal holder according to claim 24, wherein graphite paper is adhered to the seed crystal bonding surface, and the graphite paper protrudes from the second protective sleeve in a direction away from the connecting rod. The side surface away from the connecting rod.
A seed crystal bonding device, characterized in that the seed crystal bonding device includes one or more bonding components, the bonding component includes a support component and a pressure component, and the support component supports the seed crystal holder, The pressing member applies pressure, and the pressure presses the seed crystal holder and the seed crystal on the seed crystal holder toward each other.
The seed bonding device according to claim 27, wherein the supporting member includes a first pressing member and a second pressing member, and the pressing member includes a first pressing plate;

The side wall of the first pressing part includes at least one first vent hole; the second pressing part is nested with the first pressing part; wherein, during the bonding and fixing process of the seed crystal, the seed crystal is placed on On the upper surface of the second pressing member, the seed crystal holder is placed on the upper surface of the seed crystal; the first pressure plate applies pressure to the seed crystal holder.
The seed bonding device of claim 28, wherein the bottom of the first pressing member includes a second through hole, the bottom of the second pressing member includes a first protrusion, and the first protrusion is connected to the second through hole. The second through holes cooperate with each other to realize the nested connection of the first pressing part and the second pressing part.
The seed bonding device according to claim 28, wherein the cross-sectional diameter of the first exhaust hole includes 0.01mm-10mm.
The seed crystal bonding device according to claim 28, characterized in that after the first pressure part and the second pressure part are nested and connected, the first exhaust hole and the second pressure part are The vertical distance of the surface is in the range of 0.2mm-5mm.
The seed bonding device of claim 28, wherein the side wall of the second pressing member includes at least one second exhaust hole, and the first exhaust hole and the second exhaust hole are At least partially corresponding.
The seed bonding device according to claim 32, wherein the cross-sectional diameter of the second exhaust hole includes 0.01mm-10mm.
The seed bonding device according to claim 32, wherein the vertical distance between the second exhaust hole and the upper surface of the second pressing member is in the range of 0.2mm-5mm.
The seed bonding device according to claim 28, wherein the height of the second pressing member is smaller than the height of the first pressing member.
The seed crystal bonding device according to claim 28, wherein the seed crystal holder is threadedly connected to the first pressing member.
The seed crystal bonding device of claim 28, wherein the bottom of the first pressure plate includes a second protrusion, the upper part of the seed crystal support includes a second groove, and the second protrusion and the The second groove cooperates to realize the connection between the first pressure plate and the seed crystal holder.
The seed crystal bonding device according to claim 27, wherein the support component includes an annular base, the annular base and a cover, the seed crystal holder is placed on the annular base; the cover includes an annular base The side wall and cover plate are set outside the annular base, and the cover exerts pressure on the seed crystal on the seed crystal holder.
The seed bonding device according to claim 38, further comprising a first connecting member and a second connecting member, the first connecting member is provided on the annular base, and the second connecting member is provided on the annular base. On the cover body; the first connecting piece and the second connecting piece are detachably connected;

When the first connecting member is connected to the second connecting member, the cover plate of the cover exerts pressure on the seed crystal on the seed crystal holder.
The seed crystal bonding device of claim 38, wherein a locking structure is provided on the base, and the locking structure fixes the seed crystal holder to the annular base.
The seed crystal bonding device according to claim 40, wherein the seed crystal holder is provided with a connecting threaded hole on a side away from the seed crystal bonding surface, and the locking structure includes a locking plate, a locking plate, and a locking plate. and a locking nut. The locking member includes a tray, a first threaded rod and a second threaded rod. The tray supports the side of the seed crystal holder away from the seed crystal bonding surface. A threaded rod cooperates with the connecting threaded hole; the locking plate is provided with a mounting hole, the second threaded rod passes through the mounting hole, and the locking nut cooperates with the second threaded rod;

The locking nut and the tray are respectively located on both sides of the locking plate along the axis of the mounting hole.
The seed bonding device of claim 41, wherein the tray is made of elastic material.
The seed crystal bonding device according to claim 38, wherein a supporting structure is provided on the inner wall of the annular base, and the supporting structure includes an annular connecting plate, an annular supporting plate and annular supporting protrusions. ; The outer ring of the annular supporting plate is connected to the annular connecting plate, and the inner ring of the annular supporting plate is provided with the annular supporting protrusion, and the annular supporting protrusion supports the seed crystal holder. ; The annular connecting plate is connected to the inner wall of the annular base.
The seed crystal bonding device according to claim 38, wherein a bubble removal device is provided on the cover, and the bubble removal device removes bubbles between the seed crystal and the seed crystal holder.
The seed bonding device of claim 44, wherein the bubble removal device includes a slot, an insert plate and a roller; the slot is provided on the cover, and the insert plate is located on the cover. In the slot, the roller is located at one end of the inserting plate; the inserting plate moves in the slot to drive the roller to roll the seed crystal.
The seed bonding device according to claim 45, wherein the other end of the inserting plate is provided with a pull ring.
The seed crystal bonding device according to claim 27, wherein the number of the bonding components is multiple, and the support member includes a support plate, and the support plate supports the seed crystal and the seed crystal. Crystal holder, the seed crystal is located between the support plate and the seed crystal holder;

The seed bonding device further includes a support frame and a plurality of pressure driving parts provided on the support frame, and the support plate is provided on the support frame. On the frame, the seed crystal bonding device includes a plurality of bonding components, a plurality of pressure driving parts are respectively connected to a plurality of the pressure parts; the pressure driving part causes the pressure part to press the seed The crystal support exerts pressure towards the support plate.
The seed bonding device of claim 47, wherein the support frame includes a plurality of support rods extending in a vertical direction, and the plurality of support rods are arranged at intervals along the circumference of the support plate. ; A plurality of the pressure driving members are provided on at least one of the support rods, and the plurality of pressure driving members are spaced apart along the vertical direction, and a plurality of seed bonding components are spaced apart along the vertical direction. layout.
The seed bonding device according to claim 47, wherein the pressure driving member includes a pneumatic pressure driving member or a hydraulic pressure driving member.
The seed bonding device of claim 49, wherein the support rod provided with the pressure driving member is provided with a pressure transmission medium channel, and at least one of the pressure driving members communicates with the pressure driving member through a valve. The pressure transmission medium channels are connected.
The seed crystal bonding device of claim 47, wherein the support plate is rotatably mounted on the support frame, the rotation axis of the support plate is parallel to the support rod, and the seed crystal The bonding device further includes a rotational driving member connected with the support plate to drive the support plate to rotate.
The seed bonding device of claim 51, wherein the rotational driving member includes a magnetic element, a power source and a magnetic driving member; the magnetic driving member is magnetically coupled to the magnetic element, and the magnetic element Fixed on the support plate, the magnetic driving member is fixed on the output end of the power source; the power source drives the magnetic driving member to rotate to drive the magnetic element to drive the support plate to rotate.
The seed bonding device of claim 48, wherein the pressure component includes a limiting pressure plate provided on the support frame, and the pressure driving component includes a first sub-driving component and a third sub-driving component. Two sub-driving parts, the first sub-driving part and the second sub-driving part are provided on different support rods;

The first sub-driving member and the second sub-driving member are arranged at intervals along the circumference of the limiting pressure plate, and both the first sub-driving member and the second sub-driving member are in contact with the limiting pressure plate. Pressure plate connection.
The seed crystal bonding device according to claim 50, wherein the seed crystal bonding device further includes a pressure sensor, and the pressure sensor is used to determine the pressure exerted by each of the pressure applying components.
The seed crystal device of claim 54, wherein the seed crystal bonding device further includes a controller, the controller is signally connected to both the valve and the pressure sensor; the controller is configured for:

Based on the pressure data sensed by the pressure sensor, the opening of the valve is adjusted.
A crucible, characterized in that it includes a crucible body, a driving assembly and a temperature field holding disk. The driving assembly includes a driving source and a connecting mechanism. The connecting mechanism is connected between the driving source and the bottom of the crucible body. , the driving assembly drives the crucible body to rotate around the axis of the crucible body relative to the temperature field holding disk; the temperature field holding disk is provided on the connection structure and is located between the driving source and the crucible body between the bottom.
The crucible of claim 56, wherein the connection mechanism includes a rotating column and a first supporting tray, the first supporting tray is provided at one end of the rotating column, and the driving source is connected to the rotating column. the other end of the column.
The crucible of claim 57, wherein the first supporting tray includes a plurality of concentrically arranged stepped grooves.
The crucible of claim 57, wherein the connection mechanism includes a second supporting tray, the second supporting tray is annular, and the second supporting tray is located between the first supporting tray and the driving source. The inner ring of the second supporting tray is fixed to the outer wall of the rotating column;

The second supporting tray and the temperature field holding tray are connected through a ball structure.
The crucible of claim 56, wherein the temperature field holding disk is made of at least one of mullite, corundum and alumina.
The crucible of claim 56, wherein the crucible further includes a plurality of telescopic support rods, one of the telescopic support rods The end is connected to the bottom of the temperature field holding disk.
The crucible of claim 56, wherein the crucible further includes a connecting ring and a locking mechanism, and a locking hole is provided on the side wall of the connecting ring; the connecting ring is sleeved on the driving source. Outside the output shaft and the other end of the rotating column, the locking hole cooperates with the locking mechanism to fix the connecting ring to the output shaft of the driving source and the rotating column.
A crystal growth method, characterized by using the seed crystal holder described in claims 19-26, including the following steps:

Bond the seed crystal to the seed crystal bonding surface of the seed crystal holder body;

The seed crystal holder with the seed crystal attached to it is sunk into the melt used for crystal growth in the crucible, and the surface of the side of the seed crystal away from the seed crystal holder is located at the highest temperature of the melt. at the position;

Crystals were grown using the pull-up method.
The crystal growth method of claim 63, wherein a part of the seed crystal holder body is located in the melt, and another part of the seed crystal holder body is located outside the melt.
The crystal growth method of claim 63, wherein the seed crystal holder can rotate around the axis of the connecting rod, and the crucible can rotate around the axis of the crucible; the axis of the connecting rod is in contact with the axis of the connecting rod. The axes of the crucible are said to be parallel;

The use of the upward pulling method to grow crystals includes:

The seed holder and the crucible are controlled to rotate in opposite directions.
The crystal growth method of claim 65, wherein the rotation speed of the seed crystal holder is 0 rpm to 20 rpm; the rotation speed of the crucible is 0 rpm to 20 rpm.
The crystal growth method of claim 66, wherein the product of the rotational speed of the seed holder and the rotational speed of the crucible is 20 or 150.
The crystal growth method according to claim 63, characterized in that, before sinking the seed crystal holder with the seed crystal adhered to it into the melt used for crystal growth, it further includes:

The melt is heated to 1720°C to 1780°C.
The crystal growth method according to claim 63, wherein growing the crystal using the upward pulling method includes:

Keep the seed crystal holder with the seed crystal attached and sink into the melt for 10 to 30 minutes;

The seed crystal support is pulled at a pulling speed of 0.01 mm/h to 0.2 mm/h to perform crystal growth.
The crystal growth method according to claim 63, wherein growing the crystal using the upward pulling method includes:

After the crystal grows for 10 to 30 hours, the crystal is pulled away from the melt at a pulling speed of 30 mm/h to 40 mm/h, and the crystal and the melt surface have a separation height of 15 mm to 25 mm.
The crystal growth method of claim 63, wherein bonding the seed crystal to the seed crystal bonding surface of the seed crystal holder body includes:

The diameter of the seed crystal is 5 mm-10 mm larger than the diameter of the seed crystal holder body, and the seed crystal protrudes 0.1 mm-0.2 mm from the side surface of the protective holder away from the connecting rod.
The crystal growth method according to claim 63, wherein an annular second protective sleeve is provided on a side surface of the protective bracket away from the connecting rod, and the second protective sleeve is embedded in the protective bracket. inside, and the second protective sleeve is arranged around the accommodation cavity;

The method of bonding the seed crystal to the seed crystal bonding surface of the seed crystal holder body includes:

Fit the seed crystal to the end of the second protective sleeve away from the connecting rod, and bond it to the seed crystal bonding surface of the seed crystal holder body;

The crystal growth method also includes:

After the crystal growth is completed, cutting the seed crystal holder along a cutting plane parallel to the seed crystal bonding surface to separate the seed crystal holder from the crystal;

The cutting plane covers the seed crystal holder body, the protective holder and the second protective cover.