WO2024050877A1 - 用于制造半导体的激光角度辅助调节装置 - Google Patents

用于制造半导体的激光角度辅助调节装置 Download PDF

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Publication number
WO2024050877A1
WO2024050877A1 PCT/CN2022/120670 CN2022120670W WO2024050877A1 WO 2024050877 A1 WO2024050877 A1 WO 2024050877A1 CN 2022120670 W CN2022120670 W CN 2022120670W WO 2024050877 A1 WO2024050877 A1 WO 2024050877A1
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Prior art keywords
laser
housing
adjustment device
interference
beam splitter
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PCT/CN2022/120670
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English (en)
French (fr)
Inventor
刘伟宏
王飞虎
朱俞峰
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台湾积体电路制造股份有限公司
台积电(中国)有限公司
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Publication of WO2024050877A1 publication Critical patent/WO2024050877A1/zh

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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/10—Beam splitting or combining systems
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere

Definitions

  • the present application belongs to the field of semiconductors, and in particular relates to a laser angle auxiliary adjustment device for manufacturing semiconductors.
  • Integrated circuits provide the computing power for these electronic devices.
  • One method of increasing the computing power of an integrated circuit is to increase a given area of the semiconductor substrate, which can include increasing the number of transistors and other integrated circuit features.
  • Features in integrated circuits are produced by means of photolithography.
  • Photolithography involves creating a mask that outlines the pattern of features to be formed on the integrated circuit die.
  • a photolithography light source illuminates the integrated circuit die through the mask.
  • Lasers can provide the light source for photoetching technology.
  • it is necessary to readjust the incident angle of the laser beam emitted by the laser.
  • only rough adjustments are made through laser marking and other methods, and the precision of the incident angle of the laser beam cannot be guaranteed. , thus unable to guarantee the working quality and working life of the laser.
  • the embodiment of the present application provides a laser angle auxiliary adjustment device for manufacturing semiconductors, which can solve the technical problem that the precision of the incident angle of the laser beam emitted by the existing laser cannot be effectively guaranteed.
  • An embodiment of the first aspect of the present application provides a laser angle auxiliary adjustment device for manufacturing semiconductors, including a housing and an optical component.
  • the housing is provided with a receiving space, and the housing includes an interference area.
  • the optical component is arranged in the receiving space.
  • the optical component can receive the laser beam from the laser source.
  • the optical component includes a beam splitter and a first reflective member.
  • the beam splitter can separate the laser beam to form a first beam and a second beam in different directions.
  • the first reflector can deflect the first beam so that the first beam and the second beam interfere in the interference area to form an interference pattern, where the interference pattern is used by the laser source to adjust the incident angle of the laser beam according to the interference pattern.
  • the interference zone is provided on the first side of the housing; the laser beam is emitted into the receiving space from the second side of the housing, and the first side and the second side are arranged vertically.
  • the interference region and the beam splitter are arranged at an included angle.
  • the center of the interference zone is on the same straight line as the geometric center of the beam splitter.
  • the interference area includes a frosted glass sheet, and the frosted glass sheet is connected to the housing.
  • the device further includes: a transmissive member, which is provided on the housing and located on the second side, and the laser beam is injected into the beam splitter through the transmissive member.
  • a film layer is provided on the side of the transmission element facing away from the beam splitter, and the reflectivity of the film layer is less than 5%.
  • the optical component further includes: a second reflective member, the second reflective member can deflect the second light beam, so that the second light beam is incident into the interference area through the beam splitter, the second reflective member and the first reflecting member are arranged perpendicularly to each other in the receiving space.
  • the optical component further includes: a third reflective member.
  • the third reflective member can deflect the laser beam passing through the transmissive member so that the laser beam is incident on the beam splitter.
  • the third reflective member and The beam splitters are arranged vertically to each other in the receiving space.
  • the device further includes: a lifting mechanism, which is provided on the housing, and the lifting mechanism is used to drive the housing to move in the first direction.
  • the laser angle auxiliary adjustment device for manufacturing semiconductors includes a housing and an optical component.
  • the optical component receives the laser beam from the laser source and separates the laser beam through a beam splitter to form a first beam and a first beam in different directions.
  • the second beam is deflected by the first reflecting member so that the first beam and the second beam generate an interference pattern in the interference area, and the incident angle of the laser beam emitted by the laser source is adjusted according to the observable interference pattern.
  • the laser angle auxiliary adjustment device of this application realizes precise adjustment of the incident angle of the laser beam of the laser source based on the optical interference principle and the characteristics of visible light interference fringes, and improves the efficiency of laser beam angle adjustment.
  • the laser angle auxiliary adjustment device includes an interference area, and the interference pattern can be directly displayed in the interference area, which facilitates precise adjustment of the incident angle, simplifies the structure of the laser angle auxiliary adjustment device, improves operating efficiency, and improves the working quality of the laser source.
  • the laser angle auxiliary adjustment device has a simple overall structure and is easy to operate, which reduces equipment purchase costs.
  • Figure 1 is a schematic structural diagram of a laser angle auxiliary adjustment device provided by an embodiment of the present application.
  • Figure 2 is a schematic diagram of the internal structure of a laser angle auxiliary adjustment device provided by an embodiment of the present application
  • Figure 3 is a schematic diagram of the undeviated laser beam in the laser angle auxiliary adjustment device provided by an embodiment of the present application;
  • Figure 4 is a schematic diagram of the offset laser beam in the laser angle auxiliary adjustment device provided by an embodiment of the present application.
  • Figure 5 is a schematic structural diagram of an optical component in a laser angle auxiliary adjustment device provided by an embodiment of the present application
  • Figure 6 is a schematic structural diagram of an optical component in a laser angle auxiliary adjustment device provided by another embodiment of the present application.
  • Optical component 21. Beam splitter; 22. First reflective element; 23. Second reflective element; 24. Third reflective element;
  • Figure 1 is a schematic structural diagram of a laser angle auxiliary adjustment device provided by an embodiment of the present application
  • Figure 2 is a schematic structural diagram of an auxiliary laser angle adjustment device provided by an embodiment of the present application.
  • a laser angle auxiliary adjustment device for manufacturing semiconductors, including a housing 10 and an optical component 20 .
  • the housing 10 is provided with a receiving space, and the housing 10 includes an interference area 11 .
  • the optical component 20 is disposed in the receiving space.
  • the optical component 20 can receive the laser beam from the laser source.
  • the optical component 20 includes a beam splitter 21 and a first reflective member 22.
  • the beam splitter 21 can split the laser beam to form first laser beams in different directions.
  • the first beam and the second beam, the first reflector 22 can deflect the first beam, so that the first beam and the second beam interfere in the interference area 11 to form an interference pattern, wherein the interference pattern is used for the laser source to adjust the laser according to the interference pattern.
  • the angle of incidence of the beam is used for the laser source to adjust the laser according to the interference pattern.
  • the housing 10 is a peripheral component of the laser angle auxiliary adjustment device 100, and the housing 10 is a basic installation component of the laser angle auxiliary adjustment device 100, which can provide a mounting basis for components such as the optical component 20.
  • the shape of the housing 10 may be a rectangular body, a convex body, a cylindrical body, etc., and is not limited here.
  • the housing 10 is provided with a receiving space, and the receiving space is a non-enclosed space.
  • the side of the housing 10 may have an opening, so that the laser beam can be incident into the receiving space through the housing 10 and realize the optical component 20 Receive laser beam.
  • the shape, size and position of the above-mentioned receiving space can be set according to actual needs.
  • the above-mentioned receiving space can be a circular space, a rectangular space or a triangular space, etc., as long as the optical component 20 is in The location of the storage space is sufficient and is not limited here.
  • Figure 3 is a schematic diagram of the undeviated laser beam in the laser angle auxiliary adjustment device provided by one embodiment of the present application
  • Figure 4 is a deflected laser beam in the laser angle auxiliary adjustment device provided by one embodiment of the present application. Schematic diagram of the laser beam.
  • the housing 10 includes an interference area 11 , which is used for the first beam and the second beam separated by the beam splitter 21 to interfere and form an interference pattern.
  • an interference area 11 which is used for the first beam and the second beam separated by the beam splitter 21 to interfere and form an interference pattern.
  • the beam splitter 21 can split the laser beam to form a first beam and a second beam in different directions.
  • the first beam is reflected to the first reflective member 22 through the beam splitter 21 and reflected from the first reflective member 22
  • the first light beam can then be incident on the interference area 11 through the beam splitter 21, and the second light beam can be transmitted in the beam splitter 21.
  • the transmitted second light beam can be directly incident on the interference area 11, or can be reflected by the reflecting member. to the interference area 11, that is, the first beam and the second beam must be incident on the same straight line to the interference area 11
  • the first reflective member 22 can deflect the first beam, and the first reflective member 22 cooperates with the beam splitter 21 to achieve interference between the first beam and the second beam in the interference area 11 .
  • the interference area 11 is arranged perpendicularly to the incident direction of the laser beam emitted by the laser source, and the beam splitter 21 separates the laser beam to form a first beam and a second beam in different directions.
  • a light beam is reflected to the first reflective member 22 through the beam splitter 21.
  • the first light beam reflected from the first reflective member 22 can then be incident on the interference region 11 through the beam splitter 21.
  • the second light beam is transmitted in the beam splitter 21.
  • the transmitted second light beam may be directly incident on the interference area 11 , or may be incident on the interference area 11 through reflection, so that the first light beam and the second light beam interfere in the interference area 11 to form an interference pattern.
  • FIG. 5 is a schematic structural diagram of an optical component in a laser angle auxiliary adjustment device provided by an embodiment of the present application.
  • the interference area 11 is arranged opposite to the incident direction of the laser beam emitted by the laser source.
  • the beam splitter 21 separates the laser beam to form a first beam and a second beam in different directions.
  • the second beam is in The second beam is transmitted through the beam splitter 21, and the transmitted second beam can be directly vertically incident on the interference area 11.
  • the first beam is reflected to the first reflective member 22 through the beam splitter 21, and the first beam is reflected twice by the first reflective member 22.
  • the first light beam is directly incident on the interference area 11, so that the first light beam and the second light beam interfere in the interference area 11 to form an interference pattern.
  • the laser beam emitted by the laser source is visible light, and the wavelength of the laser beam is 350 nm to 750 nm.
  • the first reflective member 22 may be a first reflective mirror or a first reflective coating.
  • the laser angle auxiliary adjustment device 100 provided by the embodiment of the present application includes a housing 10 and an optical component 20.
  • the optical component 20 receives the laser beam from the laser source and separates the laser beam through the beam splitter 21 to form a first beam and a third beam in different directions.
  • the first beam is deflected by the first reflector 22 so that the first beam and the second beam generate an interference pattern in the interference area 11, and the incident angle of the laser beam is adjusted according to the observed interference pattern.
  • the laser angle auxiliary adjustment device 100 of the present application based on the principle of optical interference and the characteristics of visible light interference fringes, achieves precise adjustment of the incident angle of the laser beam emitted by the laser source, and improves the efficiency of adjusting the incident angle of the laser beam.
  • the device includes an interference area 11, in which the interference pattern can be directly displayed, which facilitates precise adjustment of the incident angle, simplifies the structure of the laser angle auxiliary adjustment device 100, improves operating efficiency, and improves the working quality of the laser source.
  • the overall structure of the laser angle auxiliary adjustment device 100 is simple, easy to operate, and reduces equipment purchase costs.
  • the interference area 11 is provided on the first side of the housing 10 .
  • the laser beam is emitted into the receiving space from the second side of the housing 10, and the first side and the second side are vertically arranged.
  • the first side of the housing 10 is the interference area 11, or the first side part of the housing 10 is the interference area 11. Specifically, the first side of the housing 10 has an opening, and the first side of the housing 10 has an opening.
  • the interference component for forming the interference area 11 is provided at the opening of the housing 10 .
  • the laser beam is injected into the receiving space from the second side of the housing 10.
  • the second side of the housing 10 may be provided with a through hole for the laser beam to pass through, or a transmission hole may be provided at the through hole. member 30, so that the laser beam is incident to the beam splitter 21 through the transmission member 30.
  • first side and the second side are an integral structure, or the first side and the second side are a separate structure.
  • the incident path of the laser beam and the interference area 11 of the laser beam in the laser angle auxiliary adjustment device 100 are reasonably planned to achieve quick display of interference patterns and improve operating efficiency.
  • the interference region 11 and the beam splitter 21 are arranged at an included angle.
  • the interference region 11 and the beam splitter 21 form an acute angle, such as 30°, 30°, 35°, 40°, 45°, 50°, 55°, 60°, 65°, 70° ° etc.
  • the beam splitter 21 can split the laser beam to form a first beam and a second beam in different directions.
  • the interference area 11 is at an acute angle with the beam splitter 21 so that the second beam is incident on the housing 10 The interference area 11 of the second side.
  • the center of the interference region 11 is on the same straight line as the geometric center of the beam splitter 21 .
  • the center of the interference area 11 is on the same straight line as the geometric center of the beam splitter 21, so that the first beam and the second beam interfere in the interference area 11 to form an interference pattern and are centrally located, and the enhancement can Observability also reduces errors caused by deviations causing interference patterns to be incompletely presented.
  • the interference area 11 includes a frosted glass sheet, and the frosted glass sheet is connected to the housing 10 .
  • the first beam and the second beam interfere on the ground glass sheet to form interference fringes.
  • the device further includes a transmissive member 30 , which is disposed on the housing 10 and located on the second side.
  • the laser beam is incident into the beam splitter 21 through the transmissive member 30 .
  • the transmissive member 30 is a lens.
  • a film layer 40 is provided on the side of the transmission member 30 away from the beam splitter 21 , and the reflectivity of the film layer 40 is less than 5%.
  • the coating layer 40 allows the laser beam to be transmitted in one direction, thereby reducing a portion of the laser beam from returning to the laser source.
  • the reflectivity of the coating layer is less than 5%, which can reduce laser beam loss to ensure interference.
  • the precision of the pattern further improves the efficiency of laser beam angle adjustment.
  • the optical assembly 20 further includes: a second reflective member 23, the second reflective member 23 can deflect the second light beam, so that the second The light beam is incident into the interference area 11 through the beam splitter 21, and the second reflecting member 23 and the first reflecting member 22 are arranged perpendicularly to each other in the receiving space.
  • the second reflective member 23 and the first reflective member 22 are arranged perpendicularly to each other in the receiving space.
  • the laser beam enters the receiving space and is incident on the beam splitter 21.
  • the beam splitter 21 separates the laser beam into different shapes.
  • the first beam and the second beam in the direction, the first beam is reflected to the first reflective member 22 through the beam splitter 21, and the first beam reflected from the first reflective member 22 can be incident to the interference area 11 through the beam splitter 21,
  • the second beam is transmitted in the beam splitter 21, and the transmitted second beam reaches the second reflective member 23.
  • the second beam reflected from the second reflective member 23 can then be incident on the interference region 11 through the beam splitter 21, so that the second beam is transmitted to the second reflective member 23.
  • the first light beam and the second light beam interfere in the interference area 11 to form an interference pattern.
  • the second reflective member 23 and the first reflective member 22 are arranged perpendicularly to each other in the receiving space, and the second reflective member 23 can deflect the second beam.
  • the laser beam passes from the third part of the housing 10 The two sides are injected into the receiving space, and the laser beam is separated to form a first beam and a second beam that interfere in the interference area 11 on the first side of the housing 10 to form an interference pattern, which satisfies the vertical arrangement of the first side and the second side, which facilitates Observing the interference pattern, you can also quickly adjust the incident angle of the laser beam emitted by the laser source according to the interference pattern.
  • FIG. 6 is a schematic structural diagram of an optical component in a laser angle auxiliary adjustment device provided by another embodiment of the present application.
  • the optical assembly 20 further includes: a third reflective member 24 , the third reflective member 24 can deflect the laser beam passing through the transmissive member 30 so that the laser beam The light beam is incident on the beam splitter 21, and the third reflecting member 24 and the beam splitter 21 are arranged perpendicularly to each other in the receiving space.
  • the laser beam enters the receiving space through the transmissive member 30 and is incident on the third reflective member 24.
  • the third reflective member 24 deflects the laser beam.
  • the third reflective member 24 and the beam splitter 21 interact with each other in the receiving space.
  • the reflected laser beam is incident on the beam splitter 21.
  • the beam splitter 21 separates the laser beam to form a first beam and a second beam in different directions.
  • the first beam is reflected to the first reflective member 22 through the beam splitter 21.
  • the two first reflecting members 22 are arranged on both sides of the beam splitter 21 .
  • the first beam reflected from the first reflecting member 22 passes through the beam splitter 21 and is incident on the interference area 11 .
  • the second beam is The transmitted second light beam is transmitted in the beam splitter 21 and is incident on the interference area 11 , so that the first light beam and the second light beam interfere in the interference area 11 to form an interference pattern.
  • the third reflective member 24 can deflect the laser beam passing through the transmissive member 30 so that the laser beam is incident on the beam splitter 21 , and the third reflective member 24 and the beam splitter 21 mutually interact in the receiving space.
  • the laser beam is injected into the receiving space from the second side of the housing 10, and the laser beam is separated to form a first beam and a second beam that interfere in the interference area 11 on the first side of the housing 10 to form interference.
  • the pattern satisfies the vertical arrangement of the first side and the second side, making it easy to observe the interference pattern, and the incident angle of the laser beam of the laser source can also be quickly adjusted according to the interference pattern.
  • the device further includes: a lifting mechanism 50 disposed on the housing 10 , and the lifting mechanism 50 is used to drive the housing 10 to move along the first direction x.
  • the lifting mechanism 50 is installed at the bottom of the housing 10 , and the lifting mechanism 50 can drive the housing 10 to move along the first direction x until the laser beam emitted by the laser source is incident into the housing through the transmission member 30 In the space, the lifting mechanism 50 stops moving and stably supports the housing 10 .
  • the path of the laser beam incident on the transmissive member 30 is on the same straight line as the geometric center of the transmissive member 30 .
  • the lifting mechanism 50 can be selected from a lifting cylinder or a lifting electric cylinder to drive the housing 10 to move.
  • the present application provides a laser angle auxiliary adjustment device 100 for manufacturing semiconductors, including a housing 10, an optical component 20, a transmission member 30 and a film layer 40.
  • the housing 10 is provided with a receiving space, and the housing 10 includes an interference area 11 .
  • the interference area 11 is provided on the first side of the housing 10 .
  • the transmissive member 30 is disposed on the housing 10 and is located on the second side. The laser beam is injected into the receiving space through the transmissive member 30.
  • the first side and the second side are vertically arranged.
  • a film layer 40 is provided on the side of the transmitting member 30 away from the beam splitter 21, and the reflectivity of the film layer 40 is less than 5%.
  • the interference area 11 includes a ground glass sheet, which is connected to the housing 10 .
  • the optical component 20 is disposed in the receiving space, and the optical component 20 can receive the laser beam of the laser source.
  • the optical component 20 includes a beam splitter 21, a first reflective member 22 and a second reflective member 23.
  • the second reflective member 23 and the first reflective member 22 are arranged perpendicularly to each other in the receiving space.
  • the beam splitter 21 can split the laser beam to form a first beam and a second beam in different directions.
  • the first beam is reflected to the first reflective member 22 through the beam splitter 21.
  • the first beam reflected from the first reflective member 22 can be reflected again.
  • the second beam is incident on the ground glass sheet through the beam splitter 21, and is transmitted in the beam splitter 21.
  • the transmitted second beam reaches the second reflective member 23, and the second beam reflected from the second reflective member 23 can be separated by the beam.
  • the detector 21 is incident on the frosted glass sheet, so that the first beam and the second beam interfere on the frosted glass sheet to form an interference pattern, wherein the interference pattern is used by the laser source to adjust the incident angle of the laser beam according to the interference pattern.
  • the laser angle auxiliary adjustment device 100 for manufacturing semiconductors provided in the embodiment of the present application realizes precise adjustment of the incident angle of the laser beam of the laser source based on the optical interference principle and the characteristics of visible light interference fringes, and improves the laser beam angle adjustment. s efficiency.
  • the device includes a frosted glass sheet, and the interference pattern can be directly displayed on the frosted glass sheet, which facilitates precise adjustment of the incident angle, simplifies the structure of the laser angle auxiliary adjustment device 100, improves operating efficiency, and improves the working quality of the laser source.
  • the overall structure of the laser angle auxiliary adjustment device 100 is simple, easy to operate, and reduces equipment purchase costs.

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Abstract

本申请实施例提供一种用于制造半导体的激光角度辅助调节装置，包括壳体和光学组件，壳体开设有收容空间，壳体包括干涉区；光学组件设置于收容空间内，光学组件可接收激光源的激光光束，光学组件包括光束分离器和第一反射件，光束分离器可将激光光束分离形成不同方向的第一光束和第二光束，第一反射件可偏转第一光束，使得第一光束和第二光束在干涉区干涉，以形成干涉图案，其中，干涉图案用于激光源根据干涉图案以调节激光光束的入射角度。

Description

用于制造半导体的激光角度辅助调节装置
相关申请的交叉引用
本申请要求享有于2022年09月06日提交的名称为“用于制造半导体的激光角度辅助调节装置”的中国专利申请202222368516.4的优先权，该申请的全部内容通过引用并入本文中。
技术领域
本申请属于半导体领域，尤其涉及一种用于制造半导体的激光角度辅助调节装置。
背景技术
持续需求增加电子设备的计算能力，包括智能电话、平板电脑、台式计算机、膝上型计算机、以及许多其他种类的电子设备。集成电路为这些电子设备提供计算能力。提高集成电路的计算能力的一种方法是增加半导体衬底的给定面积，可以包括增加晶体管和其他集成电路特征的数量。集成电路中的特征部分借助光蚀刻来产生。
光蚀刻技术包括生成掩膜，勾勒出要在集成电路管芯上形成的特征的图案。光蚀刻光源穿过掩膜照射集成电路晶粒。激光器能够提供光蚀刻技术的光源，在更换激光器的过程中，需要重新调整激光器发出激光光束的入射角度，但是，现阶段仅通过激光标记等方式进行粗略调整，无法保证激光光束入射角度的精密度，从而无法保证激光器的工作品质和工作寿命。
发明内容
本申请实施例提供一种用于制造半导体的激光角度辅助调节装置，能够解决现有的激光器发出的激光光束入射角度的精密度无法有效保证的技 术问题。
本申请第一方面的实施例提供了用于制造半导体的激光角度辅助调节装置，包括壳体和光学组件。壳体开设有收容空间，壳体包括干涉区。光学组件设置于收容空间内，光学组件可接收激光源的激光光束，光学组件包括光束分离器和第一反射件，光束分离器可将激光光束分离形成不同方向的第一光束和第二光束，第一反射件可偏转第一光束，使得第一光束和第二光束在干涉区干涉，以形成干涉图案，其中，干涉图案用于激光源根据干涉图案以调节激光光束的入射角度。
根据本申请第一方面的实施方式，干涉区设置于壳体的第一侧面；激光光束从壳体的第二侧面射入收容空间内，第一侧面和第二侧面垂直设置。
根据本申请第一方面前述任一实施方式，干涉区与光束分离器呈夹角设置。
根据本申请第一方面前述任一实施方式，干涉区的中心与光束分离器的几何中心在同一直线上。
根据本申请第一方面前述任一实施方式，干涉区包括毛玻璃片，毛玻璃片连接于壳体。
根据本申请第一方面前述任一实施方式，装置还包括：透射件，设置于壳体并位于第二侧面，激光光束通过透射件射入至光束分离器。
根据本申请第一方面前述任一实施方式，透射件背离光束分离器的一侧设有膜层，膜层的反射率小于5％。
根据本申请第一方面前述任一实施方式，光学组件还包括：第二反射件，第二反射件可偏转第二光束，使得第二光束通过光束分离器射入至干涉区，第二反射件与第一反射件在收容空间内相互垂直设置。
根据本申请第一方面前述任一实施方式，光学组件还包括：第三反射件，第三反射件可偏转通过透射件的激光光束，使得激光光束射入至光束分离器，第三反射件与光束分离器在收容空间内相互垂直设置。
根据本申请第一方面前述任一实施方式，装置还包括：升降机构，设置于壳体，升降机构用于带动壳体沿第一方向移动。
本申请实施例提供的用于制造半导体的激光角度辅助调节装置，装置包括壳体和光学组件，光学组件接收激光源的激光光束，通过光束分离器将激光光束分离形成不同方向的第一光束和第二光束，并通过第一反射件偏转第一光束，使得第一光束和第二光束在干涉区产生干涉图案，依据可观测的干涉图案以调节激光源发出的激光光束的入射角度。本申请的激光角度辅助调节装置，依据光学干涉原理和可见光干涉条纹的特征，实现了激光源的激光光束的入射角度的精准调节，并提高了激光光束角度调节的效率。此外，激光角度辅助调节装置包括干涉区，在干涉区可直接显示干涉图案，便于入射角度的精准调节，简化激光角度辅助调节装置结构，提高操作效率，提升激光源的工作品质。而且，激光角度辅助调节装置整体结构简单，人员操作便捷，降低了设备采购成本。
附图说明
为了更清楚地说明本申请实施例的技术方案，下面将对本申请实施例中所需要使用的附图作简单的介绍，对于本领域普通技术人员来讲，在不付出创造性劳动的前提下，还可以根据这些附图获得其他的附图。
图1是本申请一个实施例提供的激光角度辅助调节装置的结构示意图；
图2是本申请一个实施例提供的激光角度辅助调节装置的内部结构示意图；
图3是本申请一个实施例提供的激光角度辅助调节装置中未偏移的激光光束示意图；
图4是本申请一个实施例提供的激光角度辅助调节装置中偏移的激光光束示意图；
图5是本申请一个实施例提供的激光角度辅助调节装置中的光学组件结构示意图；
图6是本申请另一个实施例提供的激光角度辅助调节装置中的光学组件结构示意图。
附图标记说明：
100、激光角度辅助调节装置；
10、壳体；11、干涉区；
20、光学组件；21、光束分离器；22、第一反射件；23、第二反射件；24、第三反射件；
30、透射件；
40、膜层；
50、升降机构；
x、第一方向。
具体实施方式
下面将详细描述本申请的各个方面的特征和示例性实施例。在下面的详细描述中，提出了许多具体细节，以便提供对本申请的全面理解。但是，对于本领域技术人员来说很明显的是，本申请可以在不需要这些具体细节中的一些细节的情况下实施。下面对实施例的描述仅仅是为了通过示出本申请的示例来提供对本申请的更好的理解。在附图和下面的描述中，至少部分的公知结构和技术没有被示出，以便避免对本申请造成不必要的模糊；并且，为了清晰，可能夸大了部分结构的尺寸。此外，下文中所描述的特征、结构或特性可以以任何合适的方式结合在一个或更多实施例中。
在本申请的描述中，需要说明的是，除非另有说明，“多个”的含义是两个以上；此外，术语“第一”、“第二”等仅用于描述目的，而不能理解为指示或暗示相对重要性。
下述描述中出现的方位词均为图中示出的方向，并不是对本申请的实施例的具体结构进行限定。在本申请的描述中，还需要说明的是，除非另有明确的规定和限定，术语“安装”、“连接”应做广义理解，例如，可以是固定连接，也可以是可拆卸连接，或一体地连接；可以是直接相连，也可以间接相连。对于本领域的普通技术人员而言，可视具体情况理解上述术语在本申请中的具体含义
为了更好地理解本申请，下面结合图1至图6对本申请实施例的激光角度辅助调节装置进行详细描述。
首先，请参阅图1和图2，图1是本申请一个实施例提供的激光角度辅助调节装置的结构示意图；图2是本申请一个实施例提供的激光角度辅助调节装置的内部结构示意图。
如图1和图2所示，本申请实施例提供了用于制造半导体的激光角度辅助调节装置，包括壳体10和光学组件20。壳体10开设有收容空间，壳体10包括干涉区11。光学组件20设置于收容空间内，光学组件20可接收激光源的激光光束，光学组件20包括光束分离器21和第一反射件22，光束分离器21可将激光光束分离形成不同方向的第一光束和第二光束，第一反射件22可偏转第一光束，使得第一光束和第二光束在干涉区11干涉，以形成干涉图案，其中，干涉图案用于激光源根据干涉图案以调节激光光束的入射角度。
本申请实施例中，壳体10为激光角度辅助调节装置100的外围构件，且壳体10为激光角度辅助调节装置100的基础安装构件，其可以为光学组件20等构件提供安装基础。需要说明的是，上述壳体10的形状可以是矩形体、凸形体、圆柱形体等，在此并不进行限定。
本申请实施例中，壳体10开设有收容空间，且收容空间为非封闭空间，壳体10的侧面可具有开口，使得激光光束通过壳体10能够入射至收容空间内，并实现光学组件20接收激光光束。需要说明的是，上述收容空间的形状、尺寸以及位置等可以根据实际需求进行设定，例如，上述收容空间可以是圆形空间、矩形空间或者三角形空间，等等，只需要满足光学组件20在收容空间位置要求即可，在此并不进行限定。
结合参阅图3和图4，图3是本申请一个实施例提供的激光角度辅助调节装置中未偏移的激光光束示意图；图4是本申请一个实施例提供的激光角度辅助调节装置中偏移的激光光束示意图。
本申请实施例中，如图3和图4所示，壳体10包括干涉区11，干涉区11用于经过光束分离器21分离的第一光束和第二光束干涉并形成干涉图案。当激光源发出的激光光束的入射角度无偏移时，在干涉区11可观 察少量的干涉条纹或者圆环形的图案；当激光源发出的激光光束的入射角度有偏移时，在干涉区11可观察多条干涉条纹的图案，偏移过大可能无法观察到图案，以此对激光源的入射角度进行精准调节。
本申请实施例中，光束分离器21可将激光光束分离形成不同方向的第一光束和第二光束，第一光束通过光束分离器21反射到第一反射件22，从第一反射件22反射的第一光束可再通过光束分离器21入射至干涉区11，第二光束在光束分离器21内透射，透射后的第二光束可直接入射至干涉区11，也可以经过反射件反射以入射至干涉区11，即需要满足第一光束与第二光束在同一直线上入射至干涉区11
本申请实施例中，第一反射件22可偏转第一光束，第一反射件22与光束分离器21配合，可实现第一光束和第二光束在干涉区11干涉。
示例性地，如图3和图4所示，干涉区11与激光源发出的激光光束的入射方向垂直设置，光束分离器21将激光光束分离形成不同方向的第一光束和第二光束，第一光束通过光束分离器21反射到第一反射件22，从第一反射件22反射的第一光束可再通过光束分离器21入射至干涉区11，第二光束在光束分离器21内透射，透射后的第二光束可直接入射至干涉区11，也可以通过反射入射至干涉区11，以实现第一光束和第二光束在干涉区11干涉形成干涉图案。
结合参阅图5，图5是本申请一个实施例提供的激光角度辅助调节装置中的光学组件结构示意图。
示例性地，如图5所示，干涉区11与激光源发出的激光光束的入射方向相对设置，光束分离器21将激光光束分离形成不同方向的第一光束和第二光束，第二光束在光束分离器21内透射，透射后的第二光束可直接垂直入射至干涉区11，第一光束通过光束分离器21反射到第一反射件22，第一光束通过第一反射件22两次反射的第一光束直接入射至干涉区11，以实现第一光束和第二光束在干涉区11干涉形成干涉图案。
本申请实施例中，激光源发出的激光光束为可见光，激光光束的波长为350nm～750nm。
可选地，第一反射件22可采用第一反射镜或第一反射涂层等。
本申请实施例提供的激光角度辅助调节装置100，包括壳体10和光学组件20，光学组件20接收激光源的激光光束，通过光束分离器21将激光光束分离形成不同方向的第一光束和第二光束，并通过第一反射件22偏转第一光束，使得第一光束和第二光束在干涉区11产生干涉图案，依据观测的干涉图案以调节激光光束的入射角度。本申请的激光角度辅助调节装置100，依据光学干涉原理和可见光干涉条纹的特征，实现了激光源发出的激光光束的入射角度的精准调节，并提高了激光光束入射角度调节的效率。此外，装置内包括干涉区11，在干涉区11可直接显示干涉图案，便于入射角度的精准调节，简化激光角度辅助调节装置100的结构，提高操作效率，提升激光源的工作品质。而且，激光角度辅助调节装置100的整体结构简单，人员操作便捷，降低了设备采购成本。
根据本申请第一方面的实施方式，如图1所示，干涉区11设置于壳体10的第一侧面。激光光束从壳体10的第二侧面射入收容空间内，第一侧面和第二侧面垂直设置。
在本申请一些实施例中，壳体10的第一侧面均为干涉区11，或者，壳体10的第一侧面部分为干涉区11，具体的，壳体10的第一侧面具有开口，将用于形成干涉区11的干涉部件设置在壳体10的开口处。
在本申请一些实施例中，激光光束从壳体10的第二侧面射入收容空间内，壳体10的第二侧面可设有用于激光光束通过的通孔，也可在通孔处设置透射件30，使得激光光束通过透射件30射入至光束分离器21。
可选地，第一侧面和第二侧面为一体结构，或者，第一侧面和第二侧面为分体结构。
在这些可选的实施例中，如此设置，合理规划激光角度辅助调节装置100中的激光光束的入射路径和激光光束的干涉区11，以实现快捷显示干涉图案，提高操作效率。
根据本申请第一方面前述任一实施方式，如图3和图5所示，干涉区11与光束分离器21呈夹角设置。
在本申请一些实施例中，干涉区11与光束分离器21之间呈锐角，例如30°、30°、35°、40°、45°、50°、55°、60°、65°、70°等。
在这些可选的实施例中，光束分离器21可将激光光束分离形成不同方向的第一光束和第二光束，干涉区11与光束分离器21呈锐角，使得第二光束入射至壳体10的第二侧面的干涉区11。
根据本申请第一方面前述任一实施方式，干涉区11的中心与光束分离器21的几何中心在同一直线上。
在这些可选的实施例中，干涉区11的中心与光束分离器21的几何中心在同一直线上，以实现第一光束和第二光束在干涉区11干涉形成干涉图案且居中设置，增强可观察性，也减少因偏离造成干涉图案未完全呈现的误差。
根据本申请第一方面前述任一实施方式，干涉区11包括毛玻璃片，毛玻璃片连接于壳体10。
在这些可选的实施例中，第一光束和第二光束在毛玻璃片干涉形成干涉条纹。
根据本申请第一方面前述任一实施方式，如图1所示，装置还包括透射件30，设置于壳体10并位于第二侧面，激光光束通过透射件30射入至光束分离器21。
可选地，透射件30为透镜。
根据本申请第一方面前述任一实施方式，透射件30背离光束分离器21的一侧设有膜层40，膜层40的反射率小于5％。
在这些可选的实施例中，膜层40允许激光光束在一个方向上传输，从而降低激光光束的一部分返回到激光源，膜层的反射率小于5％，可减少激光光束损耗，以保证干涉图案的精确，进一步提高激光光束角度调节的效率。
根据本申请第一方面前述任一实施方式，如图2、图3和图4所示，光学组件20还包括：第二反射件23，第二反射件23可偏转第二光束，使得第二光束通过光束分离器21射入至干涉区11，第二反射件23与第一反射件22在收容空间内相互垂直设置。
在本申请一些实施例中，第二反射件23与第一反射件22在收容空间内相互垂直设置，激光光束进入收容空间内入射至光束分离器21，光束分 离器21将激光光束分离形成不同方向的第一光束和第二光束，第一光束通过光束分离器21反射到第一反射件22，从第一反射件22反射的第一光束可再通过光束分离器21入射至干涉区11，第二光束在光束分离器21内透射，透射后的第二光束至第二反射件23，从第二反射件23反射的第二光束可再通过光束分离器21入射至干涉区11，使得第一光束和第二光束在干涉区11干涉形成干涉图案。
在这些可选的实施例中，第二反射件23与第一反射件22在收容空间内相互垂直设置，第二反射件23可偏转第二光束，如此设置，激光光束从壳体10的第二侧面射入收容空间内，激光光束被分离后形成第一光束和第二光束在壳体10的第一侧面的干涉区11干涉形成干涉图案，满足第一侧面和第二侧面垂直设置，便于观察干涉图案，还可以根据干涉图案快捷调节激光源发出的激光光束的入射角度。
结合参阅图6，图6是本申请另一个实施例提供的激光角度辅助调节装置中的光学组件结构示意图。
根据本申请第一方面前述任一实施方式，如图2和图6所示，光学组件20还包括：第三反射件24，第三反射件24可偏转通过透射件30的激光光束，使得激光光束射入至光束分离器21，第三反射件24与光束分离器21在收容空间内相互垂直设置。
在本申请一些实施例中，激光光束通过透射件30进入收容空间内入射至第三反射件24，第三反射件24偏转激光光束，第三反射件24与光束分离器21在收容空间内相互垂直设置，反射的激光光束入射至光束分离器21，光束分离器21将激光光束分离形成不同方向的第一光束和第二光束，第一光束通过光束分离器21反射到第一反射件22，第一反射件22有两个，两个第一反射件22设置光束分离器21的两侧，从第一反射件22反射的第一光束经过光束分离器21入射至干涉区11，第二光束在光束分离器21内透射，透射后的第二光束入射至干涉区11，使得第一光束和第二光束在干涉区11干涉形成干涉图案。
在这些可选的实施例中，第三反射件24可偏转通过透射件30的激光光束，使得激光光束射入至光束分离器21，第三反射件24与光束分离器 21在收容空间内相互垂直设置，如此设置，激光光束从壳体10的第二侧面射入收容空间内，激光光束被分离后形成第一光束和第二光束在壳体10的第一侧面的干涉区11干涉形成干涉图案，满足第一侧面和第二侧面垂直设置，便于观察干涉图案，还可以根据干涉图案快捷调节激光源的激光光束的入射角度。
根据本申请第一方面前述任一实施方式，装置还包括：升降机构50，设置于壳体10，升降机构50用于带动壳体10沿第一方向x移动。
在本申请一些实施例中，升降机构50安装在壳体10的底部，并且，升降机构50能够带动壳体10沿第一方向x移动，直至激光源发出的激光光束通过透射件30入射至收容空间内，升降机构50停止运动，并对壳体10进行稳定支撑。
可选地，激光光束的入射至透射件30的路径与透射件30的几何中心在同一直线上。
可选地，升降机构50可选自顶升气缸或顶升电缸，以驱动壳体10移动。
在本申请一些实施例中，如图和图所示，本申请提供一种用于制造半导体的激光角度辅助调节装置100，包括壳体10、光学组件20、透射件30和膜层40。壳体10开设有收容空间，壳体10包括干涉区11。干涉区11设置于壳体10的第一侧面。透射件30设置于壳体10并位于第二侧面，激光光束通过透射件30射入至收容空间内，第一侧面和第二侧面垂直设置。透射件30背离光束分离器21的一侧设有膜层40，膜层40的反射率小于5％。干涉区11包括毛玻璃片，毛玻璃片连接在壳体10上。光学组件20设置于收容空间内，光学组件20可接收激光源的激光光束。光学组件20包括光束分离器21、第一反射件22和第二反射件23，第二反射件23与第一反射件22在收容空间内相互垂直设置。光束分离器21可将激光光束分离形成不同方向的第一光束和第二光束，第一光束通过光束分离器21反射到第一反射件22，从第一反射件22反射的第一光束可再通过光束分离器21入射至毛玻璃片，第二光束在光束分离器21内透射，透射后的第二光束至第二反射件23，从第二反射件23反射的第二光束可再通 过光束分离器21入射至毛玻璃片，使得第一光束和第二光束在毛玻璃片干涉形成干涉图案，其中，干涉图案用于激光源根据干涉图案以调节激光光束的入射角度。
本申请实施例提供的用于制造半导体的激光角度辅助调节装置100，依据光学干涉原理和可见光干涉条纹的特征，实现了激光源的激光光束的入射角度的精准调节，并提高了激光光束角度调节的效率。此外，装置内包括毛玻璃片，在毛玻璃片可直接显示干涉图案，便于入射角度的精准调节，简化激光角度辅助调节装置100结构，提高操作效率，提升激光源的工作品质。而且，激光角度辅助调节装置100整体结构简单，人员操作便捷，降低了设备采购成本。
虽然已经参考优选实施例对本申请进行了描述，但在不脱离本申请的范围的情况下，可以对其进行各种改进并且可以用等效物替换其中的部件。尤其是，只要不存在结构冲突，各个实施例中所提到的各项技术特征均可以任意方式组合起来。本申请并不局限于文中公开的特定实施例，而是包括落入权利要求的范围内的所有技术方案。

Claims (10)

  1. 一种用于制造半导体的激光角度辅助调节装置，包括：
    壳体，开设有收容空间，所述壳体包括干涉区；
    光学组件，设置于所述收容空间内，所述光学组件可接收激光源的激光光束，所述光学组件包括光束分离器和第一反射件，所述光束分离器可将激光光束分离形成不同方向的第一光束和第二光束，所述第一反射件可偏转所述第一光束，使得所述第一光束和所述第二光束在所述干涉区干涉，以形成干涉图案，
    其中，所述干涉图案用于所述激光源根据所述干涉图案以调节所述激光光束的入射角度。
  2. 根据权利要求1所述的激光角度辅助调节装置，其中，
    所述干涉区设置于所述壳体的第一侧面；
    所述激光光束从所述壳体的第二侧面射入所述收容空间内，所述第一侧面和所述第二侧面垂直设置。
  3. 根据权利要求2所述的激光角度辅助调节装置，其中，
    所述干涉区与所述光束分离器呈夹角设置。
  4. 根据权利要求3所述的激光角度辅助调节装置，其中，
    所述干涉区的中心与所述光束分离器的几何中心在同一直线上。
  5. 根据权利要求1所述的激光角度辅助调节装置，其中，
    所述干涉区包括毛玻璃片，所述毛玻璃片连接于所述壳体。
  6. 根据权利要求2所述的激光角度辅助调节装置，其中，所述装置还包括：
    透射件，设置于所述壳体并位于所述第二侧面，所述激光光束通过所 述透射件射入至所述光束分离器。
  7. 根据权利要求6所述的激光角度辅助调节装置，其中，
    所述透射件背离所述光束分离器的一侧设有膜层，所述膜层的反射率小于5％。
  8. 根据权利要求1所述的激光角度辅助调节装置，其中，所述光学组件还包括：
    第二反射件，所述第二反射件可偏转所述第二光束，使得所述第二光束通过所述光束分离器射入至所述干涉区，所述第二反射件与所述第一反射件在所述收容空间内相互垂直设置。
  9. 根据权利要求6所述的激光角度辅助调节装置，其中，所述光学组件还包括：
    第三反射件，所述第三反射件可偏转通过所述透射件的激光光束，使得所述激光光束射入至所述光束分离器，所述第三反射件与所述光束分离器在所述收容空间内相互垂直设置。
  10. 根据权利要求1所述的激光角度辅助调节装置，其中，所述装置还包括：
    升降机构，设置于所述壳体，所述升降机构用于带动所述壳体沿第一方向移动。
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Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5771098A (en) * 1996-09-27 1998-06-23 Fed Corporation Laser interferometric lithographic system providing automatic change of fringe spacing
JP2000021713A (ja) * 1998-06-30 2000-01-21 Canon Inc 露光装置及びこれを用いたデバイスの製造方法
CN102043347A (zh) * 2010-10-19 2011-05-04 长春理工大学 激光干涉纳米光刻中光束入射姿态检测及校准的方法和系统
CN111812948A (zh) * 2020-07-03 2020-10-23 清华大学 激光干涉光刻中光束入射角的调控装置及方法
CN113654656A (zh) * 2021-10-18 2021-11-16 之江实验室 一种基于三光束干涉的光束漂移检测装置与方法

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5771098A (en) * 1996-09-27 1998-06-23 Fed Corporation Laser interferometric lithographic system providing automatic change of fringe spacing
JP2000021713A (ja) * 1998-06-30 2000-01-21 Canon Inc 露光装置及びこれを用いたデバイスの製造方法
CN102043347A (zh) * 2010-10-19 2011-05-04 长春理工大学 激光干涉纳米光刻中光束入射姿态检测及校准的方法和系统
CN111812948A (zh) * 2020-07-03 2020-10-23 清华大学 激光干涉光刻中光束入射角的调控装置及方法
CN113654656A (zh) * 2021-10-18 2021-11-16 之江实验室 一种基于三光束干涉的光束漂移检测装置与方法

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