WO2024045538A1

WO2024045538A1 - Re-charging feeding system for single crystal furnace

Info

Publication number: WO2024045538A1
Application number: PCT/CN2023/079692
Authority: WO
Inventors: 曹建伟; 傅林坚; 朱亮; 叶钢飞; 倪军夫; 李玉刚
Original assignee: 浙江求是半导体设备有限公司
Priority date: 2022-09-01
Filing date: 2023-03-03
Publication date: 2024-03-07
Also published as: CN115142139B; CN115142139A

Abstract

Disclosed in the present invention is a re-charging feeding system for a single crystal furnace. The system comprises a hopper, a feeding mechanism, a discharging mechanism and a driving assembly. The feeding mechanism comprises a first channel body and a first screw shaft, and the discharging mechanism comprises a second channel body and a second screw shaft. First blades of which the diameters gradually decrease in the material transportation direction are arranged on the first screw shaft, and second blades of which the diameters gradually decrease in the material transportation direction are arranged on the second screw shaft. During a material transportation process, a portion of materials, of which the grain size is smaller than or equal to a first grain size, is preferentially fed into the single crystal furnace and is levelled on the surface of a silicon liquid, and the remaining materials are subsequently fed into the single crystal furnace and drop on the portion of materials of which the grain size is smaller than or equal to the first grain size, so as to relieve impact. Therefore, the problem of silicon liquid splashing caused when materials having large grain sizes are fed into single crystal furnaces is solved, and material loss and damage to single crystal furnaces, which are caused by the silicon liquid splashing, are avoided, thereby reducing production costs, and prolonging the service life of single crystal furnaces.

Description

A kind of single crystal furnace re-throwing and feeding system

Technical field

The invention relates to the technical field of single crystal silicon manufacturing, and in particular to a single crystal furnace re-throwing and feeding system.

Background technique

There are currently three types of single crystal furnace re-injection and feeding systems. One is to use a quartz tube container to be re-thrown from top to bottom through the auxiliary furnace chamber of the single crystal furnace; the second is to set a quartz tube channel at the cover of the single crystal furnace to face the edge of the inner wall of the crucible; the third is to re-throw it in the main furnace. The position of the re-throwing hole in the furnace chamber extends into the quartz material tube and re-throws the silicon material along the upper edge of the crucible.

Most of the existing single crystal furnace multiplex feeding systems use fixed or movable linear vibration feeders or gyroscopic vibration feeders to vibrate silicon materials into the single crystal furnace crucible through quartz tubes.

Vibrating feeding is not conducive to the transportation of granular silicon. The feeding speed of small-sized silicon material is much lower than that of large-sized silicon material. When large-sized silicon material enters the single crystal furnace, it hits the silicon liquid, causing the silicon liquid to splash, resulting in This reduces the loss of silicon material and damage to the internal components of the single crystal furnace.

Therefore, there is an urgent need to develop a single crystal furnace re-dosing and feeding system that can solve the problem of silicon liquid splashing during the feeding process.

Contents of the invention

In order to solve the shortcomings of the existing technology, the purpose of the present invention is to provide a single crystal furnace re-thrown feeding system that can solve the problem of silicon liquid splashing during the feeding process.

In order to achieve the above objects, the present invention adopts the following technical solutions:

A single crystal furnace re-dropping and feeding system. The feeding system includes: a hopper; a loading mechanism, which is at least partially connected to the hopper; a unloading mechanism, which is at least partially disposed between the hopper and the unloading mechanism; and a driving component , used to drive the loading mechanism and the unloading mechanism; when the feeding system transports materials, the loading mechanism is at least partially connected with the unloading mechanism; the loading mechanism includes: a first trough; a first screw shaft, a first screw The shaft is at least partially disposed in the first trough; the unloading structure includes: a second trough; a second screw shaft, and the second screw shaft is at least partially disposed in the second trough; when the feeding system transports materials, the third One tank body is connected to the second tank body, and the driving assembly drives the first screw shaft and the second screw shaft so that the material is transported to the single crystal furnace through the first screw shaft and the second screw shaft; a third screw shaft is provided on the first screw shaft. A blade, a second blade is provided on the second screw shaft, at least one of the diameter of the first blade and the diameter of the second blade gradually decreases along the transportation direction of the material.

Further, the difference between the maximum diameter of the first blade and the minimum diameter of the first blade is greater than or equal to 7 mm and less than or equal to 13 mm, and the difference between the maximum diameter of the second blade and the minimum diameter of the second blade is greater than or equal to 7 mm and less than or equal to 13 mm. .

Further, the difference between the maximum diameter of the first blade and the minimum diameter of the first blade is greater than or equal to 9 mm and less than is equal to 11 mm, and the difference between the maximum diameter of the second blade and the minimum diameter of the second blade is greater than or equal to 9 mm and less than or equal to 11 mm.

Further, a first conveying channel is formed between the first blade and the inner wall of the first tank body, and a second conveying channel is formed between the second blade and the inner wall of the second tank body. The first conveying channel and the second conveying channel Both are used to transport materials with a particle size smaller than or equal to the first particle size. The first screw shaft and the second screw shaft are both used to transport materials with a particle size smaller than or equal to the second particle size, wherein the first particle size is smaller than the second particle size. .

Further, along the transportation direction of the material, the ratio of the length of the first tank body to the length of the second tank body is greater than or equal to 0.5 and less than or equal to 1.5.

Further, the unloading mechanism includes a first state and a second state relative to the loading mechanism. When the unloading mechanism is in the first state relative to the loading mechanism, the first trough body and the second trough body are connected, and the second trough body is in the third state. One position; when the unloading mechanism is in the second state relative to the loading mechanism, the first tank body and the second tank body are not connected, and the second tank body is in the second position.

Further, the first trough body is provided with a third trough body extending along the up and down direction of the feeding system, and the third trough body and the first trough body are integrally formed or fixedly connected.

Further, along the up and down direction of the feeding system, the distance between the first trough body and the second trough body is a first length, the length of the third trough body along the up and down direction is a second length, and the first length is greater than or equal to the second length. ; Or, the third tank body is configured as a telescopic structure. When the second tank body is in the first position, the third tank body is in the first mode. When the second tank body is in the second position, the third tank body is in the third mode. Two modes.

Further, the unloading mechanism and the driving assembly are connected through a flexible connecting shaft; when the lowering mechanism is in the first state relative to the loading mechanism, the connecting shaft is in a normal state; when the lowering mechanism is in the second state relative to the loading mechanism, the connecting shaft The shaft is bent.

Further, when the material is transported by the feeding system, if the material is transported from the hopper to the first tank, the first blade forms a first blocking mechanism that hinders the movement of the material; if the material is transported from the first tank to the second tank , the second blade forms a second blocking mechanism that hinders the movement of the material.

This application provides a single crystal furnace re-injection and feeding system. The feeding system includes a hopper, a loading mechanism, an unloading mechanism and a driving assembly. The loading mechanism includes a first trough and a first screw shaft, and the unloading mechanism includes The second trough body and the second screw shaft, the first screw shaft is provided with a first blade whose diameter gradually decreases along the material transportation direction, and the second screw shaft is provided with a second blade whose diameter gradually decreases along the material transportation direction. During the material transportation process, part of the material with a particle size smaller than or equal to the first particle size is preferentially transported to the single crystal furnace and spread on the surface of the silicon liquid. The remaining part of the material is then transported to the single crystal furnace and dropped into the single crystal furnace with a particle size smaller than On the part of materials equal to the first particle size, the impact is slowed down. This solves the problem of silicon liquid splashing when large particle size materials are put into the single crystal furnace, avoids material loss caused by silicon liquid splashing and damages to the single crystal furnace, making the production process more efficient. The production cost is reduced and the service life of the single crystal furnace is extended.

Description of drawings

Figure 1 is a schematic diagram of the internal structure of the feeding system in the embodiment of the present invention;

Figure 2 is a schematic diagram of the overall structure of the feeding system in the embodiment of the present invention;

Figure 3 is a schematic cross-sectional structural diagram of the feeding system in the embodiment of the present invention;

Figure 4 is a partially enlarged schematic diagram of the loading mechanism of the feeding system in the embodiment of the present invention;

Figure 5 is a partially enlarged schematic diagram of the unloading mechanism of the feeding system in the embodiment of the present invention;

Figure 6 is a partially enlarged schematic diagram of the left side of the unloading mechanism of the feeding system in the embodiment of the present invention;

Figure 7 is a schematic structural diagram of the first transmission part in the embodiment of the present invention;

Figure 8 is a partially enlarged schematic diagram of the feeding system in the embodiment of the present invention.

Detailed ways

The present invention will be described in detail below with reference to the specific embodiments shown in the drawings. However, these embodiments do not limit the invention. Those of ordinary skill in the art may make structural, method, or functional changes based on these embodiments. are included in the protection scope of the present invention.

It should be noted that when an element is referred to as being "disposed on" another element, it can be directly on the other element or intervening elements may also be present. When an element is said to be "connected" to another element, it can be directly connected to the other element or there may also be intervening elements present. The terms "vertical", "horizontal", "left", "right" and similar expressions used herein are for illustrative purposes only and do not represent the only implementation manner.

In the description of the present invention, it should be understood that the terms "first" and "second" are only used for descriptive purposes and cannot be understood as indicating or implying relative importance or implicitly indicating the number of indicated technical features. Therefore, features defined as "first" and "second" may explicitly or implicitly include at least one of these features.

Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the technical field to which the invention belongs. The terminology used herein in the description of the invention is for the purpose of describing specific embodiments only and is not intended to limit the invention. As used herein, the term "and/or" includes any and all combinations of one or more of the associated listed items.

In order to clearly illustrate the technical solution of the present application, the front side, back side, left side, right side, upper side and lower side as shown in Figure 1 are defined.

Please refer to Figures 1 and 2, which illustrate a single crystal furnace re-injector feeding system 100 provided by an embodiment of the present application. The feeding system 100 is installed inside the re-injector furnace body. The feeding system 100 includes: a hopper 11 , a loading mechanism 12 , a unloading mechanism 13 and a driving assembly 14 .

The hopper 11 is at least partially disposed above the loading mechanism 12 , and the unloading mechanism 13 is at least partially disposed below the loading mechanism 12 . That is, the loading mechanism 12 is at least partially disposed between the hopper 11 and the unloading mechanism 13 . Hopper 11 is used to place materials. The feeding mechanism 12 is at least partially connected to the hopper 11 , and the positions of the feeding mechanism 12 and the hopper 11 are relatively fixed. When the feeding system 100 transports materials, the loading mechanism 12 is at least partially connected to the unloading mechanism 13 . The driving assembly 14 is arranged outside the re-injector furnace body and is used to drive the loading mechanism 12 and the unloading mechanism 13 . When the feeding system 100 transports materials, the materials enter the loading mechanism 12 from the hopper 11 due to its own gravity. The driving assembly 14 drives the loading mechanism 12 to transport the materials from the loading mechanism 12 to the unloading mechanism 13. The driving assembly 14 drives the lowering mechanism 13. The feeding mechanism 13 transports the materials from the unloading mechanism 13 to the single crystal furnace.

The feeding mechanism 12 includes: a first trough 121 and a first screw shaft 122 , and the first screw shaft 122 is at least partially disposed in the first trough 121 . The unloading mechanism 13 includes: a second trough body 131 and a second screw shaft 132. The second screw shaft 132 is at least partially disposed in the second trough body 131.

Optionally, the first screw shaft 122 is rotatably connected to the first groove body 121 , and the second screw shaft 132 is rotatably connected to the second groove body 131 , so that the driving assembly 14 can control the first screw shaft 122 and the second screw shaft 132 The rotation is beneficial to material transportation and limits the range of movement of the first screw shaft 122, thereby improving the structural stability of the feeding system 100. Specifically, the first screw shaft 122 can be rotatably connected to the first groove body 121 through a bearing, and the second screw shaft 132 can be rotatably connected to the second groove body 131 through a bearing.

When the feeding system 100 transports materials, the first trough 121 is connected to the second trough 131 , and the driving assembly 14 drives the first screw shaft 122 and the second screw shaft 132 so that the material passes through the first screw shaft 122 and the second screw shaft 132 . The spiral shaft 132 is transported to the single crystal furnace. Specifically, the driving assembly 14 drives the first screw shaft 122 to transport the material from the first trough 121 to the second trough 131. At the same time, the driving assembly 14 drives the second screw shaft 132 to transport the material to the second trough 131. The materials in 131 are transported to the single crystal furnace. Through the above arrangement, the driving assembly 14 drives the first screw shaft 122 and the second screw shaft 132, and the material is driven forward by the first screw shaft 122 and the second screw shaft 132. The material can be transported forward by controlling the first screw shaft 122 and the second screw shaft. The rotation speed of the shaft 132 is used to control the material conveying speed. Compared with the traditional vibration feeding, it is more conducive to controlling the material conveying speed and can better meet the use needs.

As an optional implementation manner, a cover is provided at the connection between the hopper 11 and the loading mechanism 12 , and the cover covers the connection between the hopper 11 and the loading mechanism 12 . In this implementation mode, the cover can compensate for the installation error when the hopper 11 and the loading mechanism 12 are connected. In addition, the cover covering the connection between the hopper 11 and the loading mechanism 12 can prevent the material from leaking when transported from the hopper 11 to the loading mechanism 12, avoid contamination of the material, and improve the crystallization quality of the single crystal furnace. In this embodiment, the cover may be a silicone sleeve.

Optionally, in this embodiment, the inner wall of the hopper 11 , the inner wall of the first tank body 121 and the inner wall of the second tank body 131 The inner walls are coated with polyurethane. In this implementation mode, materials can be prevented from being contaminated during the transportation process of the feeding system 100, thereby improving the crystallization quality of the single crystal furnace.

Please refer to Figures 3, 4, 5 and 6. As an implementation manner, a first blade 123 is provided on the first screw shaft 122, and a second blade 133 is provided on the second screw shaft 132. The first blade 123 The diameter of the first blade 123 and the diameter of the second blade 133 decreases sequentially along the transportation direction of the material, and/or the diameter of the second blade 133 decreases sequentially along the transportation direction of the material, that is, at least one of the diameter of the first blade 123 and the diameter of the second blade 133 decreases along the transportation direction of the material. The transportation direction decreases sequentially; and the difference between the maximum diameter R1 of the first blade 123 and the minimum diameter R2 of the first blade 123 is greater than or equal to 7 mm and less than or equal to 13 mm, and/or the maximum diameter R3 of the second blade 133 is less than or equal to 13 mm. The difference between the minimum diameter R4 of 133 is greater than or equal to 7mm and less than or equal to 13mm. The transportation direction of the material refers to the transportation direction in which the material enters the first tank 121 from the hopper 11, is transported to the second tank 131 through the first tank 121, and is transported to the single crystal furnace through the second tank 131. In this embodiment, the transportation direction of materials is from back to front.

In this implementation, during the transportation of materials in the first tank 121, part of the materials with a particle size smaller than or equal to the first particle size can pass through the area formed between the first blade 123 and the inner wall of the first tank 121. Transported to the second tank body 131; part of the material with a particle size smaller than or equal to the second particle size can be transported to the second tank body 131 with the movement of the first blade 123. When the materials pass through the first trough 121, part of the material with a particle size smaller than or equal to the first particle size will be preferentially transported to the second trough 131. Therefore, when the materials are just transported to the second tank 131, most of them are materials with a particle size smaller than or equal to the first particle size.

It should be noted that the particle diameter is the maximum width distance value of the material, and the first particle diameter is smaller than the second particle diameter.

Similarly, during the transportation of materials in the second tank 131, part of the materials with a particle size smaller than or equal to the first particle size can be transported to the second tank through the area formed between the second blade 133 and the inner wall of the second tank 131. In the single crystal furnace, part of the materials with a particle size smaller than or equal to the second particle size can be transported to the single crystal furnace with the movement of the second blade 133 . When the materials pass through the second tank 131, part of the materials with a particle size smaller than or equal to the first particle size will be preferentially transported to the single crystal furnace.

Therefore, part of the material with a particle size smaller than or equal to the first particle size is preferentially transported to the single crystal furnace and spread on the surface of the silicon liquid. The remaining part of the material is then transported to the single crystal furnace and dropped into the single crystal furnace with a particle size smaller than or equal to the first particle size. On materials with a certain particle size, the impact is slowed down. This solves the problem of silicon liquid splashing when large particle size materials are put into the single crystal furnace, avoids material loss caused by silicon liquid splashing and damage to the single crystal furnace, reduces production costs, and prolongs the use of the single crystal furnace. life.

Preferably, the difference between the maximum diameter R1 of the first blade 123 and the minimum diameter R2 of the first blade 123 is greater than or equal to 9 mm and less than or equal to 11 mm, and the difference between the maximum diameter R3 of the second blade 133 and the minimum diameter R4 of the second blade 133 is The value is greater than or equal to 9mm and less than or equal to 11mm. In this embodiment, the difference between the maximum diameter R1 of the first blade 123 and the minimum diameter R2 of the first blade 123 is 10 mm, and the maximum diameter R3 of the second blade 133 and the maximum diameter R3 of the second blade 133 are 10 mm. The difference for small diameter R4 is 10mm. In this implementation, the diameter change of the first blade 123 is small, and the diameter change of the second blade 133 is also small, so that the inner wall of the first groove body 121 and the first blade 123 and the inner wall of the second groove body 131 are The material is not easily blocked between the second blade 133 and the second blade 133 , the material transportation efficiency is high, and the effect of preventing silicon liquid from splashing when the material is transported to the single crystal furnace is better.

Optionally, along the direction of material transportation, both the first blade 123 and the second blade 133 transition in the shape of an Archimedean spiral, and both the first blade 123 and the second blade 133 gradually reduce in diameter. In this implementation mode, the diameter of the first blade 123 and the second blade 133 decreases more smoothly, making it less likely to block materials.

Alternatively, the first spiral shaft 122, the second spiral shaft 132, the first blade 123 and the second blade 133 may be made of non-metallic materials such as molybdenum, quartz, tungsten or silicon nitride. In this implementation mode, materials can be prevented from being contaminated during the transportation process of the feeding system 100, thereby improving the crystallization quality of the single crystal furnace.

As an optional implementation, when the material is transported by the feeding system 100, if the material is transported from the hopper 11 to the first trough 121, the first blade 123 forms a first blocking mechanism that hinders the movement of the material, that is, the material moves in a certain manner. After the speed enters the first tank body 121, it will be blocked and decelerated by the first blocking mechanism formed by the first blade 123; if the material is transported from the first tank body 121 to the second tank body 131, the second blade 133 forms a third blocking mechanism that hinders the movement of the material. The second blocking mechanism means that after the material enters the second tank 131 at a certain speed, it will be blocked and decelerated by the second blocking mechanism formed by the second blade 133 . In this implementation mode, the material conveying speed is lower than the conventional feeding speed in the prior art, which can effectively solve the problem of silicone liquid splashing caused by the material impacting the liquid level due to the conventional feeding in the prior art. , avoiding material loss caused by silicon liquid splashing and damage to the single crystal furnace, reducing production costs and extending the service life of the single crystal furnace.

Optionally, along the material transportation direction, the ratio of the length L1 of the first tank body 121 to the length L2 of the second tank body 131 is greater than or equal to 0.5 and less than or equal to 1.5. Further, the ratio of the length L1 of the first groove body 121 to the length L2 of the second groove body 131 is greater than or equal to 0.7 and less than or equal to 1.3. Furthermore, the ratio of the length L1 of the first groove body 121 to the length L2 of the second groove body 131 is greater than or equal to 0.9 and less than or equal to 1.1. In this implementation mode, the lengths of the first tank body 121 and the second tank body 131 are set more reasonably, which can better transport materials into the single crystal furnace and at the same time make the structure of the feeding system 100 more compact and improve the efficiency of the feeding system 100 Space utilization.

As an optional implementation manner, the lowering mechanism 13 in the feeding system 100 includes a first state and a second state relative to the loading mechanism 12. When the lowering mechanism 13 is in the first state relative to the loading mechanism 12, the first trough body 121 is connected to the second tank body 131, and the second tank body 131 is in the first position. At this time, the feeding system 100 is in working condition, and the materials can be transported to the single crystal furnace; the lowering mechanism 13 is in the second position relative to the loading mechanism 12. In the state, the first trough body 121 and the second trough body 131 are not connected, and the second trough body 131 is in the second position. At this time, the feeding system 100 is in a non-working state, and the material transportation stops. Among them, the first position refers to the position of the second tank 131 when the feeding system 100 is working, and the second position refers to the feeding system. The position of the second tank body 131 when 100 is not working.

As shown in Figure 3, at this time, the unloading mechanism 13 is in the first state relative to the loading mechanism 12, the second tank 131 is in the first position, the first tank 121 and the second tank 131 are connected, and the second tank 131 Part of it extends into the single crystal furnace to transport materials. At this time, the feeding system 100 is in working condition. When the unloading mechanism 13 is in the second state relative to the loading mechanism 12, the second tank body 131 is in the second position, the first tank body 121 and the second tank body 131 are not connected, and the second tank body 131 extends into the single crystal furnace. The part is retracted, and the feeding system 100 does not work at this time.

Specifically, the feeding system 100 also includes a moving mechanism. The second trough body 131 is fixedly connected to the moving mechanism. The moving mechanism is used to assist the movement of the second trough body 131 between the first position and the second position. In this embodiment, the moving mechanism includes a vehicle body, pulleys, and tracks. The car body is fixedly connected to the second trough body 131 and is arranged below the second trough body 131. The car body can move on the track through pulleys. Through the above arrangement, the second trough body 131 can move between the first position and the second position more conveniently for easy operation, and the movement range of the second trough body 131 is limited on the track, so that the second trough body 131 It is not easy to be dislocated during movement, which improves the structural stability of the feeding system 100 .

As an optional implementation manner, a quartz tube may be provided inside the second trough 131 . The quartz tube is coaxially arranged with the second spiral shaft 132 , and the second trough 131 is arranged around the quartz tube. The length of the quartz tube is equal to the length of the second trough 131 . The length of the two tanks 131 is the same. The quartz tube and the second tank 131 are insulated by a high temperature resistant foam silicone pad. The quartz tube opens at the connection between the second tank 131 and the first tank 121 for transporting materials. . In this implementation mode, when the second tank body 131 is in the first position, the quartz tube extends into the single crystal furnace. Due to the high temperature resistance of the quartz tube, the quartz tube is not easily damaged and the feeding system 100 has a long service life.

As shown in FIG. 3 , as an optional implementation manner, the first trough 121 is provided with a third trough extending along the up and down direction of the feeding system 100 , and the third trough and the first trough 121 are integrally formed or fixed. connect. In this implementation, after the materials pass through the first tank 121, the faster part of the material can be blocked by the third tank and then smoothly enter the second tank 131, preventing the materials from leaking or being contaminated during the transportation process. , reduce unnecessary material loss and reduce production costs.

As an optional implementation, along the up and down direction of the feeding system 100, the distance between the first trough body 121 and the second trough body 131 is a first length, and the length of the third trough body along the up and down direction is a second length. , the first length is greater than or equal to the second length. In this implementation, the third tank body can better prevent material leakage without affecting the normal operation of the second tank body 131 .

Optionally, the third trough body is configured as a telescopic structure, and when the second trough body 131 is in the first position, the third trough body is in the first mode. That is, when the lowering mechanism 13 is in the first state relative to the loading mechanism 12 and the feeding system 100 starts to work, the third trough is extended. At this time, the third trough can be located on the upper side of the second trough 131. The body can also be at least partially are located in the second tank 131. When the second groove body 131 is in the second position, the third groove body is in the second mode. That is, when the lowering mechanism 13 is in the second state relative to the loading mechanism 12 and the feeding system 100 stops working, the third tank body is shortened. In this implementation, the third tank can be extended or shortened according to the working status of the feeding system 100. When the feeding system 100 starts to work, the third tank is in the first mode to prevent material leakage and reduce production costs; the feeding system 100 stops. During operation, the third tank body is in the second mode, reducing the volume and improving the space utilization of the feeding system 100 .

Optionally, a vertically downward PTFE elbow may be provided below the third tank body, and the PTFE elbow is integrally formed or fixedly connected to the third tank body. The PTFE elbow is resistant to chemical corrosion, so the service life of the third tank can be extended through this implementation method.

As an optional implementation, the driving assembly 14 in the feeding system 100 includes a first driving part 141 and a second driving part 142 . The first driving part 141 is coaxially arranged with the first screw shaft 122 of the loading mechanism 12 . The first driving part 141 is used to drive the loading mechanism 12 . The second driving part 142 is connected to the second screw shaft 132 of the unloading mechanism 13 . Coaxially arranged, the second driving part 142 is used to drive the unloading mechanism 13 . In this implementation, the feeding system 100 can adjust the conveying speed of materials in the loading mechanism 12 and the unloading mechanism 13 by respectively controlling the operating speeds of the first driving part 141 and the second driving part 142 to adapt to different material conveying needs. . It can be understood that the first driving part 141 and the first screw shaft 122 of the loading mechanism 12 can also be arranged on different axes. The first driving part 141 transmits the driving force to the loading mechanism 12 through other transmission structures; the second driving part 142 The second screw shaft 132 of the unloading mechanism 13 may also be disposed coaxially, and the second driving part 142 transmits the driving force to the unloading mechanism 13 through other transmission structures, which is not limited in this application.

Please refer to Figure 7. In this embodiment, the first driving part 141 includes a first motor 1411 and a first reducer 1412. The first motor 1411 and the first reducer 1412 are connected through a coupling; the second driving part 142 The structure is basically the same as that of the first driving part 141 . In this implementation mode, the driving assembly 14 can provide a larger output torque to improve the conveying capacity of the feeding system 100, and the running speed of the reduction motor is low, so that the material is conveyed at a low speed, which can effectively prevent the material from being over-speeded. Rapid leakage or silicon liquid splash due to impact on the silicon liquid surface at too fast speed reduces production costs and improves equipment production efficiency.

Optionally, the feeding system 100 also includes a transmission assembly 15 , which is used to transmit the driving force output by the driving assembly 14 to the loading mechanism 12 and the unloading mechanism 13 . The transmission assembly 15 includes a first transmission part 151 and a second transmission part 152 . One end of the first transmission part 151 is connected to the first driving part 141 , and the other end of the first transmission part 151 is connected to the first screw shaft 122 , so that the driving force output by the first driving part 141 passes through the first transmission part 151 Passed to the loading mechanism 12. One end of the second transmission part 152 is connected to the second driving part 142 , and the other end of the second transmission part 152 is connected to the second screw shaft 132 , so that the driving force output by the second driving part 142 is transmitted to Unloading mechanism 13. Specifically, in this embodiment, the first transmission part 151 includes a first magnetic fluid and a first coupling. The first magnetic fluid device Placed outside the re-injector furnace body, the outside of the first magnetic fluid is connected to the first driving part 141, the inside of the first magnetic fluid is connected to one end of the first coupling, and the other end of the first coupling is connected to the upper The first screw shaft 122 in the feeding mechanism 12 is connected. The second transmission part 152 includes a second magnetic fluid, a second coupling, a flexible connecting shaft 1521 and a third coupling. Wherein, the second magnetic fluid is arranged outside the re-injector furnace body, the outside of the second magnetic fluid is connected to the second driving part 142, the inside of the second magnetic fluid is connected to one end of the second coupling, and the second coupling The other end of the device is connected to one end of the flexible connecting shaft 1521, the other end of the connecting shaft 1521 is connected to one end of the third coupling, and the other end of the third coupling is connected to the second screw shaft 132.

In this implementation, the driving assembly 14 can be arranged outside the re-injector furnace body, and the driving force is transmitted into the re-injector furnace body through the transmission assembly 15. That is, this implementation can convert the driving force output by the driving assembly 14 from the normal pressure The environment is transferred to the vacuum environment in the furnace body of the re-injector, thus solving the problem of indirect contact between the driving component 14 and the material. It not only avoids the risk of short circuit of high-voltage electrical components in the vacuum environment, but also ensures that the driving force is not directly connected to the furnace body during the transmission process. Air tightness causes damage.

Please refer to Figure 8. In this embodiment, the unloading mechanism 13 and the second driving part 142 are connected through a second transmission part 152. The second transmission part 152 includes a second magnetic fluid, a second coupling, and a flexible connection. Shaft 1521 and the third coupling. When the lowering mechanism 13 is in the first state relative to the loading mechanism 12, the connecting shaft 1521 is in a normal state, and the feeding system 100 can work normally; when the lowering mechanism 13 is in the second state relative to the loading mechanism 12, the connecting shaft 1521 is in a normal state. In the bent state, the connecting shaft 1521 cannot work normally. If the second driving part 142 is accidentally started, the second driving part 142 will give an overload alarm. In this implementation, the feeding system 100 controls the working state of the unloading mechanism 13 through the connecting shaft 1521. When the second driving part 142 is started when the unloading mechanism 13 is in the second state, the second driving part 142 will give an overload alarm. , avoiding losses caused by misoperation and improving the safety performance of the feeding system 100 .

As an implementation manner, a first conveying channel is formed between the first blade 123 and the inner wall of the first groove body 121, and a second conveying channel is formed between the second blade 133 and the inner wall of the second groove body 131. The conveying channel and the second conveying channel are both used to transport materials with a particle size less than or equal to the first particle size, and the first screw shaft 122 and the second screw shaft 132 are both used to transport materials with a particle size less than or equal to the second particle size, wherein, The first particle size is smaller than the second particle size.

In this implementation, during the transportation of materials in the first tank 121, part of the materials with a particle size smaller than or equal to the first particle size can be transported through the area formed between the first blade 123 and the inner wall of the first tank 121. to the second tank body 131; part of the material with a particle size smaller than or equal to the second particle size can be transported to the second tank body 131 with the movement of the first blade 123. When the materials pass through the first trough 121, part of the material with a particle size smaller than or equal to the first particle size will be preferentially transported to the second trough 131. Therefore, when the materials are just transported to the second tank 131, most of them are materials with a particle size smaller than or equal to the first particle size.

Similarly, during the transportation of materials in the second tank body 131, part of the material with a particle size smaller than or equal to the first particle size can be transported to the single unit through the area formed between the second blade 133 and the inner wall of the second tank body 131. In the crystal furnace, part of the materials with a particle size smaller than or equal to the second particle size can be transported to the single crystal furnace along with the movement of the second blade 133 . When the materials pass through the second tank 131, part of the materials with a particle size smaller than or equal to the first particle size will be preferentially transported to the single crystal furnace.

It can be understood that, as an optional implementation method, along the transportation direction of the material, the diameter of the first blade 123 remains unchanged, the diameter of the second blade 133 remains unchanged, the inner diameter of the first groove body 121 gradually increases, and the diameter of the second blade 133 remains unchanged. The inner diameter of the tank 131 gradually increases, a first conveying channel is formed between the first blade 123 and the inner wall of the first tank 121, and a second conveying channel is formed between the second blade 133 and the inner wall of the second tank 131. .

As an optional implementation, when the material is transported by the feeding system 100, if the material is transported from the hopper 11 to the first trough 121, the first blade 123 forms a first blocking mechanism that hinders the movement of the material, that is, the material moves in a certain manner. After the speed enters the first tank body 121, it will be blocked and decelerated by the first blocking mechanism formed by the first blade 123; if the material is transported from the first tank body 121 to the second tank body 131, the second blade 133 forms a third blocking mechanism that hinders the movement of the material. Second blocking mechanism: after the material enters the second tank body 131 at a certain speed, it will be blocked and decelerated by the second blocking mechanism formed by the second blade 133. In this implementation mode, the material conveying speed is lower than the conventional feeding speed in the prior art, which can effectively solve the problem of silicone liquid splashing caused by the material impacting the liquid level due to the conventional feeding in the prior art. , avoiding material loss caused by silicon liquid splashing and damage to the single crystal furnace, reducing production costs and extending the service life of the single crystal furnace.

To sum up, this application provides a single crystal furnace re-injection and feeding system 100. The feeding system 100 includes a hopper 11, a loading mechanism 12, an unloading mechanism 13 and a driving assembly 14, where the loading mechanism 12 includes a first slot. body 121 and a first screw shaft 122. The unloading mechanism 13 includes a second trough body 131 and a second screw shaft 132. The first screw shaft 122 is provided with a first blade 123 whose diameter gradually decreases along the material transportation direction. The spiral shaft 132 is provided with a second blade 133 whose diameter gradually decreases along the material transportation direction. During the material transportation process, part of the material with a particle size smaller than or equal to the first particle size is preferentially transported to the single crystal furnace and spread on the surface of the silicon liquid. The remaining part of the material is then transported to the single crystal furnace and dropped into the single crystal furnace with a particle size smaller than On the part of materials equal to the first particle size, the impact is slowed down. This solves the problem of silicon liquid splashing when large particle size materials are put into the single crystal furnace, avoids material loss caused by silicon liquid splashing and damage to the single crystal furnace, reduces production costs, and prolongs the use of the single crystal furnace. life.

What is disclosed above is only the preferred embodiment of the present invention, but it is not used to limit the scope of the present invention. Those of ordinary skill in the art can understand that: without departing from the spirit and scope of the present invention and the appended claims, Within the scope of the invention, changes, modifications, substitutions, combinations, and simplifications should all be equivalent substitutions and still fall within the scope of the invention.

Claims

A single crystal furnace re-thrown feeding system, the feeding system includes:

hopper;

A feeding mechanism, which is at least partially connected to the hopper;

A unloading mechanism, the loading mechanism is at least partially disposed between the hopper and the unloading mechanism;

A driving assembly used to drive the loading mechanism and the unloading mechanism;

When the feeding system transports materials, the loading mechanism is at least partially connected to the unloading mechanism;

in,

The loading mechanism includes:

The first tank body;

a first screw shaft, the first screw shaft is at least partially disposed in the first tank;

The blanking structure includes:

second tank body;

a second screw shaft, the second screw shaft is at least partially disposed in the second tank;

When the material is transported by the feeding system, the first trough is connected to the second trough, and the driving assembly drives the first screw shaft and the second screw shaft so that the Materials are transported to the single crystal furnace through the first screw shaft and the second screw shaft;

A first blade is provided on the first screw shaft, and a second blade is provided on the second screw shaft. At least one of the diameter of the first blade and the diameter of the second blade is along the direction of the material. The direction of transport decreases in sequence.
A single crystal furnace re-dropping and feeding system according to claim 1, wherein the difference between the maximum diameter of the first blade and the minimum diameter of the first blade is greater than or equal to 7 mm and less than or equal to 13 mm, and the difference between the maximum diameter of the first blade and the minimum diameter of the first blade is greater than or equal to 7 mm and less than or equal to 13 mm. The difference between the maximum diameter of the two blades and the minimum diameter of the second blade is greater than or equal to 7 mm and less than or equal to 13 mm.
A single crystal furnace re-dropping and feeding system according to claim 1 or 2, wherein the difference between the maximum diameter of the first blade and the minimum diameter of the first blade is greater than or equal to 9 mm and less than or equal to 11 mm, so The difference between the maximum diameter of the second blade and the minimum diameter of the second blade is greater than or equal to 9 mm and less than or equal to 11 mm.
A single crystal furnace re-dropping and feeding system according to claim 1, wherein a first conveying channel is formed between the first blade and the inner wall of the first tank, and the second blade and the A second conveying channel is formed between the inner walls of the second tank body. The first conveying channel and the second conveying channel are both used to convey the material with a particle size smaller than or equal to the first particle size. The first spiral Both the shaft and the second screw shaft are used to transport the material with a particle size smaller than or equal to the second particle size, wherein the first particle size is smaller than the second particle size.
A single crystal furnace re-dropping and feeding system according to claim 1 or 2 or 4, wherein along the transportation direction of the material direction, the ratio of the length of the first groove body to the length of the second groove body is greater than or equal to 0.5 and less than or equal to 1.5.
A single crystal furnace re-dropping and feeding system according to claim 1, 2 or 4, wherein the unloading mechanism includes a first state and a second state relative to the loading mechanism. When the unloading mechanism faces the When the loading mechanism is in the first state, the first tank and the second tank are connected, and the second tank is in the first position; when the unloading mechanism is relative to the upper When the material mechanism is in the second state, the first tank body and the second tank body are not connected, and the second tank body is in the second position.
A single crystal furnace re-dropping and feeding system according to claim 6, wherein the first tank is provided with a third tank extending along the up and down direction of the feeding system, and the third tank and the The first tank body is integrally formed or fixedly connected.
A single crystal furnace re-dropping and feeding system according to claim 7, wherein the distance between the first tank body and the second tank body along the up and down direction of the feeding system is a first length, The length of the third trough along the up-down direction is a second length, and the first length is greater than or equal to the second length; or, the third trough is configured as a telescopic structure, and when the second When the tank is in the first position, the third tank is in the first mode, and when the second tank is in the second position, the third tank is in the second mode.
A single crystal furnace re-dropping and feeding system according to claim 6, wherein the unloading mechanism and the driving assembly are connected through a flexible connecting shaft; when the unloading mechanism is in a position relative to the loading mechanism, In the first state, the connecting shaft is in a normal state; when the unloading mechanism is in the second state relative to the loading mechanism, the connecting shaft is in a bent state.
A single crystal furnace re-dropping and feeding system according to claim 1 or 2 or 4, wherein when the feeding system transports the material, if the material is transported from the hopper to the first In the tank body, the first blade is formed with a first blocking mechanism that hinders the movement of the material; if the material is transported from the first tank body to the second tank body, the second blade is formed with a first blocking mechanism that hinders the movement of the material. The second blocking mechanism for material movement.